JPS48101084A - - Google Patents

Info

Publication number
JPS48101084A
JPS48101084A JP3169672A JP3169672A JPS48101084A JP S48101084 A JPS48101084 A JP S48101084A JP 3169672 A JP3169672 A JP 3169672A JP 3169672 A JP3169672 A JP 3169672A JP S48101084 A JPS48101084 A JP S48101084A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3169672A
Other languages
Japanese (ja)
Other versions
JPS5636570B2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3169672A priority Critical patent/JPS5636570B2/ja
Publication of JPS48101084A publication Critical patent/JPS48101084A/ja
Publication of JPS5636570B2 publication Critical patent/JPS5636570B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP3169672A 1972-03-31 1972-03-31 Expired JPS5636570B2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3169672A JPS5636570B2 (en:Method) 1972-03-31 1972-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3169672A JPS5636570B2 (en:Method) 1972-03-31 1972-03-31

Publications (2)

Publication Number Publication Date
JPS48101084A true JPS48101084A (en:Method) 1973-12-20
JPS5636570B2 JPS5636570B2 (en:Method) 1981-08-25

Family

ID=12338226

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3169672A Expired JPS5636570B2 (en:Method) 1972-03-31 1972-03-31

Country Status (1)

Country Link
JP (1) JPS5636570B2 (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5386580A (en) * 1977-01-10 1978-07-31 Hitachi Ltd Treating method of semiconductor complex

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3042593A (en) * 1957-09-23 1962-07-03 Philco Corp Electrochemical method for cleansing semiconductive devices

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3042593A (en) * 1957-09-23 1962-07-03 Philco Corp Electrochemical method for cleansing semiconductive devices

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5386580A (en) * 1977-01-10 1978-07-31 Hitachi Ltd Treating method of semiconductor complex

Also Published As

Publication number Publication date
JPS5636570B2 (en:Method) 1981-08-25

Similar Documents

Publication Publication Date Title
JPS4954967A (en:Method)
FR2173970A1 (en:Method)
FR2191578A5 (en:Method)
JPS48101084A (en:Method)
JPS5043191Y2 (en:Method)
JPS4953921U (en:Method)
CH567169A5 (en:Method)
CH565657A5 (en:Method)
DD96610A1 (en:Method)
CH602117A5 (en:Method)
CH601542A5 (en:Method)
CH595343A5 (en:Method)
BG18698A1 (en:Method)
CH593025A5 (en:Method)
CH589636A5 (en:Method)
CH583061A5 (en:Method)
CH581690A5 (en:Method)
CH577097A5 (en:Method)
CH575934A5 (en:Method)
CH572959A5 (en:Method)
CH572565A5 (en:Method)
CH569565A5 (en:Method)
CH568120A5 (en:Method)
CH568075A5 (en:Method)
CH564993A5 (en:Method)