JPS47530Y1 - - Google Patents

Info

Publication number
JPS47530Y1
JPS47530Y1 JP1970081885U JP8188570U JPS47530Y1 JP S47530 Y1 JPS47530 Y1 JP S47530Y1 JP 1970081885 U JP1970081885 U JP 1970081885U JP 8188570 U JP8188570 U JP 8188570U JP S47530 Y1 JPS47530 Y1 JP S47530Y1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1970081885U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1970081885U priority Critical patent/JPS47530Y1/ja
Publication of JPS47530Y1 publication Critical patent/JPS47530Y1/ja
Expired legal-status Critical Current

Links

Landscapes

  • Projection-Type Copiers In General (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP1970081885U 1970-08-17 1970-08-17 Expired JPS47530Y1 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1970081885U JPS47530Y1 (enExample) 1970-08-17 1970-08-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1970081885U JPS47530Y1 (enExample) 1970-08-17 1970-08-17

Publications (1)

Publication Number Publication Date
JPS47530Y1 true JPS47530Y1 (enExample) 1972-01-10

Family

ID=42898681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1970081885U Expired JPS47530Y1 (enExample) 1970-08-17 1970-08-17

Country Status (1)

Country Link
JP (1) JPS47530Y1 (enExample)

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