JPS472971U - - Google Patents
Info
- Publication number
- JPS472971U JPS472971U JP447071U JP447071U JPS472971U JP S472971 U JPS472971 U JP S472971U JP 447071 U JP447071 U JP 447071U JP 447071 U JP447071 U JP 447071U JP S472971 U JPS472971 U JP S472971U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP447071U JPS472971U (de) | 1971-01-27 | 1971-01-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP447071U JPS472971U (de) | 1971-01-27 | 1971-01-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS472971U true JPS472971U (de) | 1972-09-01 |
Family
ID=27844995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP447071U Pending JPS472971U (de) | 1971-01-27 | 1971-01-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS472971U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7347656B2 (en) | 1995-07-19 | 2008-03-25 | Hitachi, Ltd. | Vacuum processing apparatus and semiconductor manufacturing line using the same |
-
1971
- 1971-01-27 JP JP447071U patent/JPS472971U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7347656B2 (en) | 1995-07-19 | 2008-03-25 | Hitachi, Ltd. | Vacuum processing apparatus and semiconductor manufacturing line using the same |