JPS4711772U - - Google Patents
Info
- Publication number
- JPS4711772U JPS4711772U JP1330471U JP1330471U JPS4711772U JP S4711772 U JPS4711772 U JP S4711772U JP 1330471 U JP1330471 U JP 1330471U JP 1330471 U JP1330471 U JP 1330471U JP S4711772 U JPS4711772 U JP S4711772U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1330471U JPS4711772U (enExample) | 1971-03-04 | 1971-03-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1330471U JPS4711772U (enExample) | 1971-03-04 | 1971-03-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4711772U true JPS4711772U (enExample) | 1972-10-12 |
Family
ID=27860734
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1330471U Pending JPS4711772U (enExample) | 1971-03-04 | 1971-03-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4711772U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59150584A (ja) * | 1983-02-16 | 1984-08-28 | 株式会社日立製作所 | 半導体ウエハの超音波洗浄方法 |
| CN101530852A (zh) * | 2008-03-10 | 2009-09-16 | 富士通株式会社 | 清洁装置、清洗槽、清洁方法以及用于制造物件的方法 |
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1971
- 1971-03-04 JP JP1330471U patent/JPS4711772U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59150584A (ja) * | 1983-02-16 | 1984-08-28 | 株式会社日立製作所 | 半導体ウエハの超音波洗浄方法 |
| CN101530852A (zh) * | 2008-03-10 | 2009-09-16 | 富士通株式会社 | 清洁装置、清洗槽、清洁方法以及用于制造物件的方法 |
| JP2009213996A (ja) * | 2008-03-10 | 2009-09-24 | Fujitsu Ltd | 洗浄装置、洗浄槽、洗浄方法、及び物品の製造方法 |