JPS4633531Y1 - - Google Patents
Info
- Publication number
- JPS4633531Y1 JPS4633531Y1 JP3096967U JP3096967U JPS4633531Y1 JP S4633531 Y1 JPS4633531 Y1 JP S4633531Y1 JP 3096967 U JP3096967 U JP 3096967U JP 3096967 U JP3096967 U JP 3096967U JP S4633531 Y1 JPS4633531 Y1 JP S4633531Y1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3096967U JPS4633531Y1 (ja) | 1967-04-13 | 1967-04-13 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3096967U JPS4633531Y1 (ja) | 1967-04-13 | 1967-04-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4633531Y1 true JPS4633531Y1 (ja) | 1971-11-19 |
Family
ID=42894182
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3096967U Expired JPS4633531Y1 (ja) | 1967-04-13 | 1967-04-13 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS4633531Y1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108074854A (zh) * | 2016-11-11 | 2018-05-25 | 苏斯微技术光刻有限公司 | 定位装置 |
-
1967
- 1967-04-13 JP JP3096967U patent/JPS4633531Y1/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108074854A (zh) * | 2016-11-11 | 2018-05-25 | 苏斯微技术光刻有限公司 | 定位装置 |
US11075102B2 (en) | 2016-11-11 | 2021-07-27 | Suss Microtec Lithography Gmbh | Positioning device |