JPS4618114Y1 - - Google Patents

Info

Publication number
JPS4618114Y1
JPS4618114Y1 JP8804867U JP8804867U JPS4618114Y1 JP S4618114 Y1 JPS4618114 Y1 JP S4618114Y1 JP 8804867 U JP8804867 U JP 8804867U JP 8804867 U JP8804867 U JP 8804867U JP S4618114 Y1 JPS4618114 Y1 JP S4618114Y1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8804867U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8804867U priority Critical patent/JPS4618114Y1/ja
Publication of JPS4618114Y1 publication Critical patent/JPS4618114Y1/ja
Expired legal-status Critical Current

Links

JP8804867U 1967-10-17 1967-10-17 Expired JPS4618114Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8804867U JPS4618114Y1 (en) 1967-10-17 1967-10-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8804867U JPS4618114Y1 (en) 1967-10-17 1967-10-17

Publications (1)

Publication Number Publication Date
JPS4618114Y1 true JPS4618114Y1 (en) 1971-06-24

Family

ID=42879555

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8804867U Expired JPS4618114Y1 (en) 1967-10-17 1967-10-17

Country Status (1)

Country Link
JP (1) JPS4618114Y1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010080136A (en) * 2008-09-24 2010-04-08 Jeol Ltd Aberration correction device and charged particle beam device provided therewith
JP2016134295A (en) * 2015-01-20 2016-07-25 日本電子株式会社 Multipole lens and charged particle beam device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010080136A (en) * 2008-09-24 2010-04-08 Jeol Ltd Aberration correction device and charged particle beam device provided therewith
JP2016134295A (en) * 2015-01-20 2016-07-25 日本電子株式会社 Multipole lens and charged particle beam device

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