JPS458941Y1 - - Google Patents
Info
- Publication number
- JPS458941Y1 JPS458941Y1 JP1964011863U JP1186364U JPS458941Y1 JP S458941 Y1 JPS458941 Y1 JP S458941Y1 JP 1964011863 U JP1964011863 U JP 1964011863U JP 1186364 U JP1186364 U JP 1186364U JP S458941 Y1 JPS458941 Y1 JP S458941Y1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1964011863U JPS458941Y1 (enrdf_load_stackoverflow) | 1964-02-19 | 1964-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1964011863U JPS458941Y1 (enrdf_load_stackoverflow) | 1964-02-19 | 1964-02-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS458941Y1 true JPS458941Y1 (enrdf_load_stackoverflow) | 1970-04-25 |
Family
ID=42837865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1964011863U Expired JPS458941Y1 (enrdf_load_stackoverflow) | 1964-02-19 | 1964-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS458941Y1 (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5424081A (en) * | 1977-07-25 | 1979-02-23 | Chino Works Ltd | Inspector of material quality and like |
| JPS5797402A (en) * | 1980-12-09 | 1982-06-17 | Fuji Electric Co Ltd | Fault detector for sheet-like body |
| JPS5899738A (ja) * | 1981-12-09 | 1983-06-14 | Yamamura Glass Kk | 透明体の欠陥検出装置 |
| JPS61117433A (ja) * | 1984-11-14 | 1986-06-04 | Hitachi Ltd | 半導体ウェハ異物検出方法及びその装置 |
-
1964
- 1964-02-19 JP JP1964011863U patent/JPS458941Y1/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5424081A (en) * | 1977-07-25 | 1979-02-23 | Chino Works Ltd | Inspector of material quality and like |
| JPS5797402A (en) * | 1980-12-09 | 1982-06-17 | Fuji Electric Co Ltd | Fault detector for sheet-like body |
| JPS5899738A (ja) * | 1981-12-09 | 1983-06-14 | Yamamura Glass Kk | 透明体の欠陥検出装置 |
| JPS61117433A (ja) * | 1984-11-14 | 1986-06-04 | Hitachi Ltd | 半導体ウェハ異物検出方法及びその装置 |