JPS458941Y1 - - Google Patents

Info

Publication number
JPS458941Y1
JPS458941Y1 JP1964011863U JP1186364U JPS458941Y1 JP S458941 Y1 JPS458941 Y1 JP S458941Y1 JP 1964011863 U JP1964011863 U JP 1964011863U JP 1186364 U JP1186364 U JP 1186364U JP S458941 Y1 JPS458941 Y1 JP S458941Y1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1964011863U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1964011863U priority Critical patent/JPS458941Y1/ja
Publication of JPS458941Y1 publication Critical patent/JPS458941Y1/ja
Expired legal-status Critical Current

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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP1964011863U 1964-02-19 1964-02-19 Expired JPS458941Y1 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1964011863U JPS458941Y1 (enrdf_load_stackoverflow) 1964-02-19 1964-02-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1964011863U JPS458941Y1 (enrdf_load_stackoverflow) 1964-02-19 1964-02-19

Publications (1)

Publication Number Publication Date
JPS458941Y1 true JPS458941Y1 (enrdf_load_stackoverflow) 1970-04-25

Family

ID=42837865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1964011863U Expired JPS458941Y1 (enrdf_load_stackoverflow) 1964-02-19 1964-02-19

Country Status (1)

Country Link
JP (1) JPS458941Y1 (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5424081A (en) * 1977-07-25 1979-02-23 Chino Works Ltd Inspector of material quality and like
JPS5797402A (en) * 1980-12-09 1982-06-17 Fuji Electric Co Ltd Fault detector for sheet-like body
JPS5899738A (ja) * 1981-12-09 1983-06-14 Yamamura Glass Kk 透明体の欠陥検出装置
JPS61117433A (ja) * 1984-11-14 1986-06-04 Hitachi Ltd 半導体ウェハ異物検出方法及びその装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5424081A (en) * 1977-07-25 1979-02-23 Chino Works Ltd Inspector of material quality and like
JPS5797402A (en) * 1980-12-09 1982-06-17 Fuji Electric Co Ltd Fault detector for sheet-like body
JPS5899738A (ja) * 1981-12-09 1983-06-14 Yamamura Glass Kk 透明体の欠陥検出装置
JPS61117433A (ja) * 1984-11-14 1986-06-04 Hitachi Ltd 半導体ウェハ異物検出方法及びその装置

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