JPS4511103Y1 - - Google Patents
Info
- Publication number
- JPS4511103Y1 JPS4511103Y1 JP5813966U JP5813966U JPS4511103Y1 JP S4511103 Y1 JPS4511103 Y1 JP S4511103Y1 JP 5813966 U JP5813966 U JP 5813966U JP 5813966 U JP5813966 U JP 5813966U JP S4511103 Y1 JPS4511103 Y1 JP S4511103Y1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5813966U JPS4511103Y1 (en) | 1966-06-20 | 1966-06-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5813966U JPS4511103Y1 (en) | 1966-06-20 | 1966-06-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4511103Y1 true JPS4511103Y1 (en) | 1970-05-19 |
Family
ID=42839970
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5813966U Expired JPS4511103Y1 (en) | 1966-06-20 | 1966-06-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4511103Y1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54104878U (en) * | 1978-01-06 | 1979-07-24 | ||
| JP2021039008A (en) * | 2019-09-03 | 2021-03-11 | 東京エレクトロン株式会社 | Thermocouple structure, thermal treatment device, and thermocouple structure manufacturing method |
-
1966
- 1966-06-20 JP JP5813966U patent/JPS4511103Y1/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54104878U (en) * | 1978-01-06 | 1979-07-24 | ||
| JP2021039008A (en) * | 2019-09-03 | 2021-03-11 | 東京エレクトロン株式会社 | Thermocouple structure, thermal treatment device, and thermocouple structure manufacturing method |
| US11815407B2 (en) | 2019-09-03 | 2023-11-14 | Tokyo Electron Limited | Thermocouple structure, heat treatment apparatus, and method of manufacturing thermocouple structure |