JPS4325497Y1 - - Google Patents
Info
- Publication number
- JPS4325497Y1 JPS4325497Y1 JP1966018160U JP1816066U JPS4325497Y1 JP S4325497 Y1 JPS4325497 Y1 JP S4325497Y1 JP 1966018160 U JP1966018160 U JP 1966018160U JP 1816066 U JP1816066 U JP 1816066U JP S4325497 Y1 JPS4325497 Y1 JP S4325497Y1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1966018160U JPS4325497Y1 (en) | 1966-03-02 | 1966-03-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1966018160U JPS4325497Y1 (en) | 1966-03-02 | 1966-03-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4325497Y1 true JPS4325497Y1 (en) | 1968-10-25 |
Family
ID=31753041
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1966018160U Expired JPS4325497Y1 (en) | 1966-03-02 | 1966-03-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4325497Y1 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49110562U (en) * | 1973-01-19 | 1974-09-20 | ||
| JPS5311576A (en) * | 1976-07-19 | 1978-02-02 | Handotai Kenkyu Shinkokai | Method of forming thin film by vapourrgrowth |
| JPS58128930U (en) * | 1982-02-22 | 1983-09-01 | 株式会社東芝 | Film forming equipment |
| JPS58140170U (en) * | 1982-03-16 | 1983-09-21 | 株式会社東芝 | carbonization equipment |
-
1966
- 1966-03-02 JP JP1966018160U patent/JPS4325497Y1/ja not_active Expired
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49110562U (en) * | 1973-01-19 | 1974-09-20 | ||
| JPS5329101Y2 (en) * | 1973-01-19 | 1978-07-21 | ||
| JPS5311576A (en) * | 1976-07-19 | 1978-02-02 | Handotai Kenkyu Shinkokai | Method of forming thin film by vapourrgrowth |
| JPS5636564B2 (en) * | 1976-07-19 | 1981-08-25 | ||
| JPS58128930U (en) * | 1982-02-22 | 1983-09-01 | 株式会社東芝 | Film forming equipment |
| JPS58140170U (en) * | 1982-03-16 | 1983-09-21 | 株式会社東芝 | carbonization equipment |