JPS4323685Y1 - - Google Patents
Info
- Publication number
- JPS4323685Y1 JPS4323685Y1 JP2378368U JP2378368U JPS4323685Y1 JP S4323685 Y1 JPS4323685 Y1 JP S4323685Y1 JP 2378368 U JP2378368 U JP 2378368U JP 2378368 U JP2378368 U JP 2378368U JP S4323685 Y1 JPS4323685 Y1 JP S4323685Y1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Heat Treatments In General, Especially Conveying And Cooling (AREA)
- Tunnel Furnaces (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Structure Of Belt Conveyors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2378368U JPS4323685Y1 (en) | 1968-03-26 | 1968-03-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2378368U JPS4323685Y1 (en) | 1968-03-26 | 1968-03-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4323685Y1 true JPS4323685Y1 (en) | 1968-10-07 |
Family
ID=31758801
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2378368U Expired JPS4323685Y1 (en) | 1968-03-26 | 1968-03-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS4323685Y1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02282476A (en) * | 1989-04-24 | 1990-11-20 | Sanko Seisakusho:Kk | Vacuum deposition device |
JP2008124481A (en) * | 2007-11-26 | 2008-05-29 | Canon Anelva Corp | Method for conveying object to be processed in vacuum processor |
-
1968
- 1968-03-26 JP JP2378368U patent/JPS4323685Y1/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02282476A (en) * | 1989-04-24 | 1990-11-20 | Sanko Seisakusho:Kk | Vacuum deposition device |
JP2008124481A (en) * | 2007-11-26 | 2008-05-29 | Canon Anelva Corp | Method for conveying object to be processed in vacuum processor |