JPS4323685Y1 - - Google Patents

Info

Publication number
JPS4323685Y1
JPS4323685Y1 JP2378368U JP2378368U JPS4323685Y1 JP S4323685 Y1 JPS4323685 Y1 JP S4323685Y1 JP 2378368 U JP2378368 U JP 2378368U JP 2378368 U JP2378368 U JP 2378368U JP S4323685 Y1 JPS4323685 Y1 JP S4323685Y1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2378368U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2378368U priority Critical patent/JPS4323685Y1/ja
Publication of JPS4323685Y1 publication Critical patent/JPS4323685Y1/ja
Expired legal-status Critical Current

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Landscapes

  • Physical Vapour Deposition (AREA)
  • Heat Treatments In General, Especially Conveying And Cooling (AREA)
  • Tunnel Furnaces (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Structure Of Belt Conveyors (AREA)
JP2378368U 1968-03-26 1968-03-26 Expired JPS4323685Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2378368U JPS4323685Y1 (en) 1968-03-26 1968-03-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2378368U JPS4323685Y1 (en) 1968-03-26 1968-03-26

Publications (1)

Publication Number Publication Date
JPS4323685Y1 true JPS4323685Y1 (en) 1968-10-07

Family

ID=31758801

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2378368U Expired JPS4323685Y1 (en) 1968-03-26 1968-03-26

Country Status (1)

Country Link
JP (1) JPS4323685Y1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02282476A (en) * 1989-04-24 1990-11-20 Sanko Seisakusho:Kk Vacuum deposition device
JP2008124481A (en) * 2007-11-26 2008-05-29 Canon Anelva Corp Method for conveying object to be processed in vacuum processor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02282476A (en) * 1989-04-24 1990-11-20 Sanko Seisakusho:Kk Vacuum deposition device
JP2008124481A (en) * 2007-11-26 2008-05-29 Canon Anelva Corp Method for conveying object to be processed in vacuum processor

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