JPS4318478Y1 - - Google Patents
Info
- Publication number
- JPS4318478Y1 JPS4318478Y1 JP1964032974U JP3297464U JPS4318478Y1 JP S4318478 Y1 JPS4318478 Y1 JP S4318478Y1 JP 1964032974 U JP1964032974 U JP 1964032974U JP 3297464 U JP3297464 U JP 3297464U JP S4318478 Y1 JPS4318478 Y1 JP S4318478Y1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Welding Or Cutting Using Electron Beams (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1964032974U JPS4318478Y1 (ja) | 1964-04-28 | 1964-04-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1964032974U JPS4318478Y1 (ja) | 1964-04-28 | 1964-04-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4318478Y1 true JPS4318478Y1 (ja) | 1968-07-30 |
Family
ID=31768051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1964032974U Expired JPS4318478Y1 (ja) | 1964-04-28 | 1964-04-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4318478Y1 (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS535496A (en) * | 1976-07-05 | 1978-01-19 | Hitachi Ltd | Laser machining method and device |
| JPS5747592A (en) * | 1980-09-05 | 1982-03-18 | Agency Of Ind Science & Technol | Laser working device |
| JP2006319198A (ja) * | 2005-05-13 | 2006-11-24 | Disco Abrasive Syst Ltd | ウエーハのレーザー加工方法およびレーザー加工装置 |
-
1964
- 1964-04-28 JP JP1964032974U patent/JPS4318478Y1/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS535496A (en) * | 1976-07-05 | 1978-01-19 | Hitachi Ltd | Laser machining method and device |
| JPS577834B2 (ja) * | 1976-07-05 | 1982-02-13 | ||
| JPS5747592A (en) * | 1980-09-05 | 1982-03-18 | Agency Of Ind Science & Technol | Laser working device |
| JP2006319198A (ja) * | 2005-05-13 | 2006-11-24 | Disco Abrasive Syst Ltd | ウエーハのレーザー加工方法およびレーザー加工装置 |