JPS3920398Y1 - - Google Patents
Info
- Publication number
- JPS3920398Y1 JPS3920398Y1 JP1466862U JP1466862U JPS3920398Y1 JP S3920398 Y1 JPS3920398 Y1 JP S3920398Y1 JP 1466862 U JP1466862 U JP 1466862U JP 1466862 U JP1466862 U JP 1466862U JP S3920398 Y1 JPS3920398 Y1 JP S3920398Y1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/24485—Energy spectrometers
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measurement Of Radiation (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1466862U JPS3920398Y1 (cs) | 1962-03-24 | 1962-03-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1466862U JPS3920398Y1 (cs) | 1962-03-24 | 1962-03-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS3920398Y1 true JPS3920398Y1 (cs) | 1964-07-17 |
Family
ID=57014943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1466862U Expired JPS3920398Y1 (cs) | 1962-03-24 | 1962-03-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS3920398Y1 (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016132445A1 (ja) * | 2015-02-16 | 2016-08-25 | 株式会社日立製作所 | 荷電粒子照射システム |
-
1962
- 1962-03-24 JP JP1466862U patent/JPS3920398Y1/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016132445A1 (ja) * | 2015-02-16 | 2016-08-25 | 株式会社日立製作所 | 荷電粒子照射システム |