JPS3621622Y1 - - Google Patents
Info
- Publication number
- JPS3621622Y1 JPS3621622Y1 JP5610259U JP5610259U JPS3621622Y1 JP S3621622 Y1 JPS3621622 Y1 JP S3621622Y1 JP 5610259 U JP5610259 U JP 5610259U JP 5610259 U JP5610259 U JP 5610259U JP S3621622 Y1 JPS3621622 Y1 JP S3621622Y1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP561059 | 1959-02-03 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS3621622Y1 true JPS3621622Y1 (hu) | 1961-08-21 |
Family
ID=75920440
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5610259U Expired JPS3621622Y1 (hu) | 1959-02-03 | 1959-02-03 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS3621622Y1 (hu) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2021079420A1 (ja) * | 2019-10-22 | 2021-04-29 | 株式会社Fuji | プラズマ発生装置、およびプラズマ処理方法 |
-
1959
- 1959-02-03 JP JP5610259U patent/JPS3621622Y1/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2021079420A1 (ja) * | 2019-10-22 | 2021-04-29 | 株式会社Fuji | プラズマ発生装置、およびプラズマ処理方法 |
JPWO2021079420A1 (hu) * | 2019-10-22 | 2021-04-29 |