JPH1199940A - Conveyor system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To travel a conveyor carriage at a high speed and simultaneously to perform the positioning of this carriage in time of stoppage in a highly accurate manner. SOLUTION: This conveyor system is provided with four stations SR1 to SR4 capable of stopping a conveyor carriage at a line traveling this carriage, while first primary conductors 44 and 45 performing their power feeding at the specified interval at the ground side are installed in the line traveling the conveyor carriage, a first secondary conductor corresponding to these primary conductors 44 and 45 is installed at the side of the carriage, and a linear induction motor linearized with an induction motor is made to be composable by the first primary conductors 44, 45 and the secondary conductor, and likewise, in respective stations ST1 to ST4, a second primary conductor is installed at the ground side, a second secondary conductor is installed on the side of the carriage so as to correspond to the primary conductor of these stations ST1 to ST4, and then a servo-controllable linear synchronous motor linearized with a synchronous motor is made to be composable by the second primary conductor and the secondary conductor.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transfer apparatus using a linear induction motor and a linear synchronous motor, and particularly to a transfer section that does not require positioning of a transfer cart.
Using a linear induction motor that is a linearized induction motor,
The present invention relates to a transport device that uses a linear synchronous motor in which a synchronous motor is servo-controlled in a section where high-precision positioning of the transport vehicle is required at the time of stopping.

[0002]

2. Description of the Related Art Some transfer apparatuses such as a wafer, a liquid crystal panel, and a plasma display which are handled in a clean room use a linear induction motor in which an induction motor is linearized.

FIG. 17 shows an example of a conventional transfer apparatus using such a linear induction motor.

In FIG. 17, a is a transport vehicle capable of traveling on a track b, and c is arranged at a required interval along the track b so that an alternating current for traveling the transport vehicle a can be supplied. The coil d is arranged near the stop position of the transport vehicle a along the track b, and is capable of supplying an alternating-phase alternating current for stopping the transport vehicle a. The coil e is close to the coil d. The coils are arranged so as to be able to supply a low-frequency alternating current for stopping the carriage a, and the coils c, d, and e constitute a primary conductor.

Further, f is a secondary conductor provided on the transport vehicle a and having a structure in which an aluminum plate is laminated on an iron plate. When the transport vehicle a is positioned on a predetermined coil c or d or e, the coil c , D, e and the secondary conductor f, it is possible to constitute a linear induction motor (LIM) in which the induction motor is linearized.

[0006] g is disposed on the upstream side of the coil d in the traveling direction D1 of the carrier trolley a.
A h is a positioning stopper capable of performing a horizontal reciprocating motion in a direction along, and a stopper h which is lifted by an actuator to stop the transport carriage a.

In the above-described transfer apparatus, by feeding power to the coil c corresponding to the transfer carriage a, a thrust is applied to the transfer carriage a in the traveling direction D1, so that the transfer carriage a moves on the track b. In the traveling direction D1.

After passing through the coil c, the carriage a travels (coasts) to the next coil c by inertia, but is slightly decelerated by traveling resistance until it reaches the next coil c. Is accelerated again in the next coil c.

When the transport vehicle a reaches the coil d, power is supplied to the coil d in the opposite phase, and a thrust in the direction opposite to the traveling direction D1 acts on the transport vehicle a. As a result, the transport vehicle a Is rapidly decelerated.

When the transport vehicle a decelerates and reaches a predetermined position on the coil d, the positioning stopper g
And the stopper h rises, the positioning stopper g pushes the transport vehicle a toward the stopper h, and the transport vehicle a travels in a traveling direction D caused by supplying a low-frequency AC current to the coil e.
The speed is further decelerated by a small thrust in the direction opposite to the direction 1, and comes into contact with the stopper h and stops (see the phantom line in FIG. 17). Note that the use of such a mechanical positioning device or an electromagnetic positioning device (not shown) is not appropriate even if the transport carriage a is stopped depending on the amount of power supplied to the linear induction motor or the direction of power supply. This is because it occurs.

[0011]

However, the above-described transport apparatus has the following problems.

I) Since the linear induction motor is a linearized induction motor, it is suitable for high-speed transport of the transport vehicle a. However, when the transport vehicle a is stopped at a predetermined position, positioning is performed with high precision. Therefore, in order to perform high-precision positioning, a mechanical positioning device or an electromagnetic positioning device is required.

Ii) When a mechanical positioning device or an electromagnetic positioning device is used, the space occupied by the positioning device is large, so that the space cannot be effectively used, and the device is complicated and large, resulting in an increase in cost. However, it is difficult to apply the transfer device to a clean room due to the presence of contact operating parts, and the number of operating parts reduces the reliability of the equipment, and the cycle time between stop and start becomes longer, resulting in lower transfer efficiency. Invite.

The present invention has been made in view of the above-described circumstances, and enables the traveling of a transport vehicle at a high speed, and does not use a mechanical positioning device or an electromagnetic positioning device when stopping the transport vehicle. The purpose of the present invention is to make it possible to position the carrier with high accuracy.

[0015]

The transfer device of the present invention is provided with at least one station capable of stopping the transfer vehicle on a line on which the transfer vehicle travels, and requires a line on the ground side for the line on which the transfer vehicle travels. A first primary conductor for supplying power at intervals of is provided, and the carrier has a first secondary conductor corresponding to the first primary conductor, and the first primary conductor and the first secondary conductor are provided. A linear induction motor in which an induction motor is linearized by a conductor is provided, and each station is provided with a second primary conductor for supplying power to the ground side, and the carrier is provided with the second primary conductor. To provide a second secondary conductor having a plurality of permanent magnets disposed so that the N pole and the S pole face each other in a direction parallel to the traveling direction of the transport vehicle, Same by the primary conductor and the second secondary conductor Is obtained by adapted to constitute a servo controllable linear synchronous motor with linear the motor.

Therefore, in the present invention, the carriage can travel at a high speed except at the station, and the positioning accuracy when the carriage is stopped can be improved at the station. Therefore, in the present invention, the work efficiency is improved and the reliability of the device is improved.

Also, since there is no fear of dust generation, the present invention can be applied to the transfer of articles in a clean room.

[0018]

Embodiments of the present invention will be described below with reference to the accompanying drawings.

FIGS. 1 to 16 show an embodiment of the present invention.

In FIG. 1, reference numeral 1 denotes an endless trajectory disposed on both the left and right sides with respect to the traveling direction D1.
In the middle of the traveling direction D1, there is provided an inclined rising portion 1a as shown in FIG. 2 and an inclined descending portion 1b as shown in FIG. 3, and the front and rear end horizontal portions are viewed in plan as shown in FIG. And an arc-shaped corner portion 1c.

Stations ST1, ST2, ST3, and ST4, which will be described later, are provided in a straight section of the track 1 on the low ground side 2 of the track.

The straight horizontal portion of the track 1 on the low ground side 2 is installed on the bracket 4 via the support frame 3 erected on the ground side and the bracket 4 installed on the support frame 3. The bracket 5 is fixed and supported on the outer surface of the middle part in the height direction of the bracket 5 (see FIGS. 2, 3, and 4).

The corner 1c of the track 1 on the low ground side 2 is
It is fixed to and supported by a top outer surface of a bracket 6 erected on the support frame 3 via a support frame 3 erected on the ground side (see FIGS. 2, 3, and 5).

The straight horizontal portion of the track 1 on the ground elevation side 7 is interposed between a structure 8 erected on the ground side and a support frame 3 installed on the structure 8 and a bracket 4 installed on the support frame 3. hand,
It is fixed and supported on the outer surface of the middle part in the height direction of the bracket 5 installed on the bracket 4 (see FIGS. 2, 3, and 4).

The corner 1c of the track 1 on the ground elevation side 7
Via a structure 8 erected on the ground side and a support frame 3 installed on the structure 8, it is fixed and supported on the outer surface of the top of the bracket 6 erected on the support frame 3 (FIG. 2). 3,5
reference).

[0026] The inclined rising portion 1a and the inclined falling portion 1 of the track 1
b is a structure 9 erected from the ground side and having an upper horizontal portion fixed to a structure 8 and an I-shaped steel horizontal member 10 mounted on the structure 9 and a bracket 4 mounted on the horizontal member 10
, And is fixed to and supported by the outer surface of the middle part in the height direction of the bracket 5 mounted on the bracket 4 (see FIGS. 2, 3, and 6).

On the track 1, the transport vehicle 11 is moved in the traveling direction D.
It is mounted so that it can run toward 1. The details of the transport vehicle 11 are shown in FIGS. 7 to 9, and the transport vehicle 11 includes two vehicle main bodies 12 arranged at required intervals in the traveling direction.

The bogie body 12 straddles the right and left tracks 1,
Top plate 12a and side plates 12 fixed to both sides of the top plate 12a
b, the front shape is formed in a substantially gate-shaped frame shape, and a side plate 1 is provided at an intermediate portion and a lower end in the height direction of the side plate 12b.
Roller support members 12c and 12d protruding from 2b in the front-rear direction parallel to the track 1 are provided.

A guide roller 14 is rotatably supported via a horizontal pin 13 at the front and rear ends of the roller support member 12c in the longitudinal direction of the track 1, and a substantially central portion of the roller support member 12d in the longitudinal direction of the track 1 is provided. A guide roller 16 is rotatably supported by a horizontal pin 15 via a horizontal pin 15. Further, a vertical pin 1
A guide roller 18 is rotatably supported via the shaft 7.

The guide rollers 14 attached to the carrier 11
As shown in FIG. 7, the track 16 sandwiches the track 1 from above and below, and the guide roller 14 is capable of rolling on the upper surface of the track 1. The guide roller 16 is provided at the inclined rising section 1a and the inclined descending section 1b. Depending on the position of the center of gravity of the load, the track 1 can be rolled in contact with the lower surface of the track 1. The guide roller 18 can roll on the side surface of the track 1.

The carriage 11 is supported on the track 1 by the guide rollers 14, 16 and 18, so that it does not derail from the track 1 during traveling.

A vertical pin 19 whose upper and lower ends protrude upward and downward from the top plate 12a is pivotally mounted to the bogie main body 12 at substantially the center of the top plate 12a in the left-right direction. A secondary conductor 20 made of an aluminum plate having a rectangular side surface and extending in the front-rear direction and the up-down direction while the thickness direction extends in the left-right direction of the track 1 and integrally connects the front and rear bogie main bodies 12. It is fixed in a vertical state.

A guide roller 22 is rotatably supported at a lower end of the secondary conductor 20 at a substantially central position in a direction parallel to the track 1 via vertical pins 21 provided on both sides in the thickness direction of the secondary conductor 20. The guide roller 22 is adapted to roll along both side surfaces of the vertical member of the guide member 23 attached to the upper surface of the support frame 3 or the like in parallel with the track 1.

The secondary conductor 20 is a secondary conductor of a linear induction motor (LIM) in which the induction motor is linearized.
When the transport vehicle 11 travels up the inclined rising portion 1a of the track 1, a thrust for raising the transport vehicle 11 along the track 1 is applied to the transport vehicle 11, and the transport vehicle 11
When traveling down the inclined descending portion 1b, the transport vehicle 11
To apply a thrust in a direction opposite to the traveling direction D1 to apply a braking force to the transport vehicle 11 so that the vehicle does not run away along the track 1.

At the upper end protruding portion of the vertical pin 19, a horizontal plate-shaped bogie frame 24 having a substantially I-shaped planar shape is fixed. Thus, when the transport vehicle 11 travels in the corner 1c, the vehicle body 12 rotates slightly horizontally with respect to the vertical pin 19 while being guided by the track 1, and as a result, the transport vehicle 11 smoothly moves. The vehicle can run on the corner 1c.

Guide rollers 26 are pivotally supported on the left and right sides of the top plate 12a of the carriage body 12 via horizontal pins 25.
The guide roller 26 supports the lower surface of the bogie frame 24.

On the lower surface on the left side (lower right surface in FIG. 7) of the carriage frame 24 in the traveling direction D1 of the carriage frame 24, the carriage body 11 extends horizontally from one carriage body 12 to the other carriage body 12 in the longitudinal direction of the track 1. The secondary conductor 27 extends
Is installed.

The secondary conductor 27 is formed by attaching an aluminum plate 27b horizontally to the lower surface of a horizontal iron plate 27a. The secondary conductor 27 is a secondary conductor of a linear induction motor (LIM) having a linear induction motor. Is for applying a thrust to the carrier 11 when traveling on the corner 1c of the track 1.

On the lower surface on the right side (left side in FIG. 7) of the carriage frame 24 in the traveling direction D1 of the carriage 11,
An L-shaped bracket 28 is attached, and a secondary conductor 29 is installed on the bracket 28 so as to extend vertically from one bogie main body 12 side to the other bogie main body 12 in the longitudinal direction of the track 1. (See FIGS. 7, 9, 10, and 13).

The secondary conductor 29 is magnetized on the outer side surface of the vertical iron plate 29a in the left-right direction of the track 1 so that the N-pole and the S-pole alternately face in a direction parallel to the running direction D1 of the carrier 11. Permanent magnet 29b protected by protection plate 29c
And a secondary conductor of a linear synchronous motor (LSM) in which the synchronous motor is linearized so that servo control can be performed. Thus, the secondary conductor 29 applies a thrust to the transport vehicle 11 in the same direction or the opposite direction to the traveling direction D1 at each of the stations ST1, ST2, ST3, and ST4 in FIG. 1 to accelerate or decelerate the transport vehicle 11. Alternatively, it is for giving a thrust in a direction opposite to the traveling direction D1 to stop the transport carriage 11 at a predetermined position accurately and with high precision.

At the lower end of the vertical plate-shaped secondary conductor 29, another vertical plate-shaped bracket 30 is fixedly mounted. The bracket 30 is provided with a bogie frame in a direction parallel to the traveling direction D1 of the transport cart 11. A detection piece setting member 31 extending over a range slightly longer than 24 is attached (see FIG. 13).

As shown in FIG. 11, a light shielding portion 32a and a slit-shaped light transmitting portion 3 are provided on the upper end of the detecting piece setting member 31.
2b is formed with a detection piece 32 alternately arranged in a direction parallel to the traveling direction D1 of the carriage 11 with a width T1 = T2 = 48 mm, and the detection piece 32 is an optical sensor 39, which will be described later.
It can be used when detecting the position of the permanent magnet 29b with respect to 40 and 41.

As shown in FIG. 12, a light shielding portion 33a and a slit-shaped light transmitting portion 3 are provided at the lower end of the detecting piece setting member 31.
3b, T4 = 2.3 mm, T3 = 1.7 mm, and detection pieces 33 alternately provided in a direction parallel to the traveling direction D1 of the transport trolley 11 are formed, and the detection pieces 33 are described later. Each of the stations ST1,
This is for detecting the speed and position of the transport vehicle 11 in ST2, ST3, and ST4.

Each of the stations ST1 to ST4 is provided with a support frame 3 so as to be located on the right side in the traveling direction D1 of the transport vehicle 11.
A vertical panel-shaped frame body 34 is erected on the upper surface, and a coil extending parallel to the traveling direction D1 of the transport trolley 11 is attached as a primary conductor 35 to a surface of the frame body 34 that can face the secondary conductor 29. (See FIGS. 7 and 10), and when the transport cart 11 is in the stations ST1 to ST4, a gap of 2 to 3 mm is formed between the primary conductor 35 and the secondary conductor 29. (See FIG. 7).

It should be noted that the coil pitch of the primary conductor 35 constituting the linear synchronous motor (LSM) and the mounting interval of the permanent magnet 29b of the secondary conductor 29 and the light shielding portion 3 of the detection piece 32
Both the width T1 of 2a and the width T2 of the light transmitting portion are equal, and are 48 mm in the case of the present embodiment.

Thus, a linear synchronous motor (LSM) is constructed in which the synchronous motor is linearized by the primary conductor 35 and the secondary conductor 29 so that servo control can be performed.

A bracket 36 capable of adjusting the position of the track 1 in the left-right direction is mounted on the inner side surface below the position where the primary conductor 35 of the frame body 34 is installed. The transfer cart 11 is in the station ST
A guide roller 38 which guides the bracket 28 when traveling in 1 to ST4 so as to appropriately maintain the gap between the primary conductor 35 and the secondary conductor 29 is pivotally supported (FIGS. 7, 10). reference).

The inner surface of the frame 34 below the guide roller 38 is mounted on the bracket 28 of the carriage 11 when controlling the speed and position of the carriage 11 at the stations ST1 to ST4. In order to detect the position of the permanent magnet 29b of the secondary conductor 29, 3
Optical sensors 39, 40, 41 such as transmission type photoelectric switches
Are provided at predetermined intervals in a direction parallel to the traveling direction D1 of the transport vehicle 11 (see FIGS. 7 and 10).

Thus, the transport vehicle 11 is moved to the station ST.
When the vehicle travels from 1 to ST4, the detection piece 32 provided on the side of the transport trolley 11 can pass through the internal space of the optical sensors 39, 40, and 41 having a U-shaped cross section (FIGS. 7, 10). ,
14).

The reason why two sets of optical sensors 39, 40 and 41 are provided is to extend the controllable range of the carriage 11 in each of the stations ST1 to ST4.

On the inner side surface of the frame 34 below the position where the optical sensors 39, 40, 41 are installed, the stations ST1 to ST
At T4, two optical sensors 42, 4 such as transmission type photoelectric switches are provided for each set so that the position and speed of the carrier 11 can be detected when the speed and position of the carrier 11 are controlled.
2 are provided at predetermined intervals in a direction parallel to the traveling direction D1 of the carrier 11 (FIGS. 7, 10, and 15).
reference).

The pulse signals A and B detected by the optical sensors 42 and 43 are detected so as to be detected earlier than the ON signals U, V and W detected by the optical sensors 39, 40 and 41.
The optical sensors 42, 43, 39, 40, 41 are arranged in each of the stations ST1 to ST4.

Thus, the transport vehicle 11 is moved to the station ST.
When traveling from 1 to ST4, the detection piece 33 provided on the side of the transport trolley 11 can pass through the internal space of the optical sensors 42 and 43 having a U-shaped cross section.

The reason why two sets of optical sensors 42 and 43 are provided is to extend the controllable range of the carriage 11 in each of the stations ST1 to ST4.

The reason why two optical sensors 42 and 43 are provided for one set is as follows. That is, the distance L1 between the centers of the optical sensors 42 and 43 (see FIG. 10) is n
(T3 + T4) + (T3 + T4) × (1/4) (n =
1, 2, 3,...), (T3 + T4) ×
This is because pulse signals can be obtained at (1/4) mm intervals, and highly accurate control can be performed. That is, T3 +
When T4 = 1.7 + 2.3 = 4 mm, pulse signals can be obtained at 1 mm intervals. In addition, T3 = 1.7m
The reason for setting m and T4 = 2.3 mm is to obtain accurate pulse signals at equal intervals based on the diffraction response times of the optical sensors 42 and 43.

As shown in FIG. 1, primary conductors 44, which are coils, are arranged at required intervals in the longitudinal direction of the track 1 on the straight portions of the track 1 that deviate from the stations ST1 to ST4. Thus, as shown in FIG.
The induction motor is fixed to the inner surface of the bracket 5 supported by the support frame 3, and when the carrier 11 comes to the primary conductor 44, the induction motor is linearized by the primary conductor 44 and the secondary conductor 20. A linear induction motor (LIM) is configured.

The inclined ascending portion 1a and the inclined descending portion 1 of the track 1
b, as shown in FIG. 1, a primary conductor 44 which is a coil.
Are disposed so as to be close to the primary conductors 44 adjacent in the longitudinal direction of the track 1. Thus, as shown in FIG. 6, the primary conductor 44 is fixed to the inner surface of the bracket 5 supported by the horizontal member 10, and when the carrier 11 comes to the primary conductor 44, the primary conductor 44 44 and secondary conductor 2
A value of 0 constitutes a linear induction motor (LIM) in which the induction motor is linearized.

Also, a gap of 2 to 3 mm is formed in the horizontal direction between the primary conductor 44 and the secondary conductor 20, and the primary conductor 44 is located on the left and right sides of the secondary conductor 20. Although it is located, it may be on one side. However,
In the case of one side, the secondary conductor 20 needs to have a configuration in which an aluminum plate is adhered to an iron plate.

As shown in FIG. 1, the corner 1c of the track 1 and the straight portion in the vicinity thereof are arranged in the circumferential direction so that the track 1 is located inside the circular arc of the track 1 having a smaller radius of curvature. Primary conductors 45, which are coils, are provided at required intervals. The primary conductors 45 are fixed to the upper ends of the columns 46 erected on the support frame 3 as shown in FIG. When the primary conductor 45 reaches the primary conductor 45, a gap of 2 to 3 mm is formed between the primary conductor 45 and the secondary conductor 27 in the vertical direction.

2 and 3, reference numeral 47 denotes the bogie frame 2.
4 is a cage whose upper end is pivotally supported via a horizontal pin 49 on a bracket 48 erected on the upper surface of the cage 4.

Next, the operation of the embodiment of the present invention will be described.

For example, when the carriage 11 stopped at the station ST1 shown in FIG. 1 is caused to travel to the station ST4, it is sequentially moved to the primary conductor 35 of the station ST1 forming a linear synchronous motor with the secondary conductor 29. AC power is supplied. Therefore, a thrust in the traveling direction D1 acts on the transport vehicle 11 and the transport vehicle 11
Starts running.

As the amount of power supply at the station ST1 increases, the transport vehicle 11 is accelerated, and the transport vehicle 11 sent from the station ST1 is moved to the station S1.
Until T2, run on track 1 by inertial force (coasting)
I do.

The transport vehicle 11 is decelerated because of the traveling resistance while coasting, and its traveling speed decreases. Therefore, when the transport vehicle 11 reaches the predetermined position of the station ST2, power is supplied to the primary conductor 35 of the station ST2 in the same manner as in the case of the station ST1, and the transport vehicle 11 is accelerated by receiving the thrust and travels in the traveling direction D1. I do.

The carriage 11 delivered from the station ST2 coasts on the track 1 and decelerates to reach the primary conductor 44 disposed on the horizontal portion of the track 1. For this reason, the alternating current is supplied to the primary conductor 44, which constitutes a linear induction motor together with the secondary conductor 20, so that the carrier 11 is accelerated by receiving the thrust.

By repeating such acceleration and deceleration a required number of times, when the transport carriage 11 reaches the inclined ascending section 1a, the power is sequentially supplied to the primary conductors 44 disposed in the inclined ascending section 1a to carry the carrier. The bogie 11 receives the thrust along the track 1 and rises along the track 1 at the inclined rising portion 1a at a substantially constant speed.

The transport cart 11 is located above the ground 8 on the structure 8.
When the transport vehicle 11 reaches the horizontal linear portion, the transport vehicle 11 accelerates and decelerates by coasting in the same manner as described above, and reaches the corner portion 1c on the structure 8.

For this reason, when the transport vehicle 11 reaches the primary conductor 45 disposed at the corner 1 c of the track 1,
The secondary conductor 27 and the primary conductor 45, which constitute a linear induction motor, are supplied with alternating current by forward feeding, and the carrier 11 is accelerated by receiving a thrust. Therefore, the transport vehicle 1
By sequentially supplying power to the primary conductor 45, the vehicle 1 travels while repeatedly accelerating and decelerating in the corner portion 1c and reaches the inclined descending portion 1b.

In the inclined descending portion 1b, since the alternating current of the opposite phase is supplied to the primary conductor 44, a thrust in a direction opposite to the descending direction acts on the transporting vehicle 11, so that the transporting vehicle 11 is in the inclined descending portion. The track 1b descends at a substantially constant speed while being braked.

When the carriage 11 descends the inclined descending portion 1b and reaches the horizontal straight portion on the low ground side 2, the primary conductor 44
The vehicle is accelerated by power supply, and then decelerates due to running resistance to enter the station ST3. At the station ST3, an alternating current of opposite phase is supplied to the primary conductor 35 so that the transport vehicle 11 is in the traveling direction D1 of the transport vehicle 11. The thrust in the reverse direction acts, whereby the carrier 11 is braked and decelerated, and is sent out from the station ST3.

The transport cart 11 sent from the station ST3 is further decelerated by running resistance and sent to the station ST4, where it is braked at the station ST4 in the same manner as in the case of the station ST3, and is decelerated to an accurate position. Stop with high accuracy.

Next, how to control the stations ST1 to ST4 when accelerating, decelerating, or stopping the carriage 11 will be described in detail with reference to FIG.

I) For example, when accelerating or decelerating the transport vehicle 11 at the station ST2, the transport vehicle 11 moves in the traveling direction D of the station ST2, for example.
When traveling forward on the track 1 in the direction D1 in FIG. 1 on the upstream side, the transport vehicle 11 is coasting, and therefore, the primary conductor 35 of the station ST2 has a control unit (not shown). Is not supplied, and the control unit is in a standby state.

When the carrier 11 coasts on the track 1 and approaches the primary conductor 35 of the station ST2, the light of the optical sensors 42 and 43 is shielded by the light shielding portion 33a of the detecting piece 33, so that the optical sensors 42 and 43 are blocked. From 43, the output of the pulse signals A and B is started as shown in FIG. 16D, and the output pulse signals A and B are input to a control unit (not shown). The pulse signals A and B at this time indicate that the traveling body 1
4) It is generated every time it moves by a distance of × (T3 + T4) mm (1 mm interval in the present embodiment).

When the pulse signals A and B are input to the control unit, the control unit starts calculating the coasting speed of the carrier 11 based on the number of pulse signals A and B per unit time. At the same time, the calculation of the position of the carrier 11 is started.

Further, as the transport carriage 11 travels in the direction D1 and the light shielding portion 32a at the leading end of the detection piece 32 in the traveling direction shields the light of the optical sensor 39, the light from the optical sensor 39 is shown in FIG. The ON signal U is output and provided to the control unit. As a result, the permanent magnet 29 of the carrier 11
The position of b on orbit 1 is confirmed.

Note that the carriage 41 travels in the direction D1 and the light shielding portion 32a at the leading end of the detection piece 32 in the traveling direction shields the light from the optical sensor 40. Is output and given to the control unit. By the rise of the ON signal V, it is confirmed that the permanent magnet 29b of the transport vehicle 11 has reached the position X1 on the track 1 where control should be started.

For this reason, control by the control unit is started, and the control unit supplies an alternating current corresponding to the coasting speed of the transport vehicle 11 at the position X1 to the primary conductor 35 corresponding to the permanent magnet 29b of the transport vehicle 11. Power, and consequently,
A predetermined thrust acts on the transport trolley 11 in the traveling direction D1, and the transport trolley 11 is smoothly switched from coasting to synchronized travel by power without receiving an impact.

When the transport vehicle 11 is switched to the synchronized travel at the position X1, the traveling speed of the transport vehicle 11 at that time obtained from the number of pulse signals A and B per unit time detected by the optical sensors 42 and 43 is obtained. The acceleration start position or the deceleration start position on the track 1 of the transport vehicle 11 is calculated from the set traveling speed of the transport vehicle 11 at the station ST2 and the preset acceleration curve or deceleration curve as well as the position of the transport vehicle 11. .

When the transport vehicle 11 further travels in the direction D1 and the light shielding portion 32a of the detection piece 32 at the leading end of the transport vehicle 11 in the travel direction D1 passes through the optical sensor 39, the ON signal U is turned off. Due to the fall of the ON signal U, the transport vehicle 1 is moved to a position X2 where the counting of the distance to the acceleration start position or the deceleration start position of the transport vehicle 11 should be started.
It is confirmed that 1 has been reached.

Therefore, thereafter, as the carrier 11 travels in the direction D1, the carrier 11 comes to the acceleration start position or the deceleration start position based on the number of pulse signals A and B detected by the optical sensors 42 and 43. Is determined, and when the carrier 11 reaches the acceleration start position or the deceleration start position,
The alternating current supplied from the control unit to the primary conductor 35 of the station ST2 is controlled based on the set acceleration curve or deceleration curve. As a result, the magnitude and direction of the thrust acting in parallel with the traveling direction of the transport vehicle 11 are determined. The speed is adjusted or accelerated or decelerated so that the transport vehicle 11 reaches a predetermined traveling speed at a predetermined position, and the speed of the transport vehicle 11 is controlled.

While such speed control is being performed, FIG.
As shown in the figure, at least one of the ON signals U, V, and W detected by the optical sensors 39, 40, and 41 is constantly generated, and the ON signal does not disappear.
It can be confirmed that control is possible.

When all of the ON signals U, V, and W are cut off when the transport vehicle 11 travels, the primary conductor 35
Is stopped, the control unit enters a standby state, and the transport vehicle 11 coasts on the track 1 toward the next destination.

II) For example, when the transport vehicle 11 is stopped at the station ST4 The operation from the coasting of the transport vehicle 11 to the synchronous running by power without receiving an impact is performed at the station S4.
This is the same as the case where the carrier 11 is accelerated or decelerated at T2 (up to the position X1 in FIG. 16).

When the transport vehicle 11 is switched to the synchronized travel at the position X1, the traveling speed of the transport vehicle 11 at that time, which is obtained from the number of pulse signals A and B per unit time detected by the optical sensors 42 and 43, The deceleration start position of the transport vehicle 11 on the track 1 is calculated from the distance from the position X1 to the position where the transport vehicle 11 should be stopped, and from the previously set deceleration curve.

When the carriage 11 travels in the direction D1 and the light shielding portion 32a of the detection piece 32 at the leading end of the carriage 11 in the traveling direction D1 passes through the optical sensor 39, the ON signal U is turned off. By the fall of the ON signal U, it is confirmed that the transport vehicle 11 has reached the position X2 at which the counting of the distance to the deceleration start position of the transport vehicle 11 should be started.

Therefore, hereinafter, the traveling direction D of the carriage 11
As the vehicle travels to 1, it is determined from the number of pulse signals A and B detected by the optical sensors 42 and 43 whether or not the transport vehicle 11 has reached the deceleration start position. The AC current supplied from the control unit to the primary conductor 35 of the station ST4 is controlled based on the set deceleration curve, and as a result, a thrust is applied in a direction opposite to the traveling direction of the transport vehicle 11, so that the transport vehicle 11 The traveling speed is gradually reduced until the traveling speed becomes zero, and the carrier 11 accurately stops at a predetermined position.

At the time of stop, a small current is supplied to the primary conductor 35. When the stopped carriage 11 shifts forward or backward, the current flow direction is adjusted in accordance with the shifted direction. At the same time, the power supply amount is increased, and the carriage 11 is returned to the original position (servo lock).

When the carriage 11 moves in the direction opposite to the traveling direction D1, the initial position of the permanent magnet 29b is confirmed by the ON signal W from the optical sensor 41 (see C in FIG. 16). .

As described above, in this embodiment,
In portions other than the stations ST <b> 1 to ST <b> 4, high-speed conveyance becomes possible, so that work efficiency is improved.

In this embodiment, since the stations ST1 to ST4 use linear synchronous motors in which synchronous motors are linearized, servo control becomes possible, and therefore, a mechanical positioning device or an electromagnetic type Even if the positioning device is not provided, the stopping accuracy of the carrier 11 is improved.

Further, since a mechanical positioning device and an electromagnetic positioning device are not required, the portion occupied by the space positioning device is eliminated, so that the space can be effectively used and the device is not increased in size and cost is reduced. Can be achieved.

Further, since there is no contact operating portion such as a mechanical positioning device or an electromagnetic positioning device, there is no danger of dust generation due to the contact operation, and wafers in a clean room can be used.
The present invention can be applied to the transport of articles such as a liquid crystal panel and a plasma display panel.

Furthermore, since the cycle of stopping and starting the transport carriage 11 is shortened, the transport efficiency is improved, and the reliability of the apparatus is improved.

Further, the permanent magnets 29b are mounted on the carriage 11, so that the number of the permanent magnets 29b can be reduced, and the cost of the equipment can be reduced from this point as well.

Further, in addition to the detection of the position of the permanent magnet 29b, the ON signals U, V, and W detected by the optical sensors 39, 40, and 41 are used to determine a control start / end signal and a position for starting positioning. Since it is also used as a signal to be detected, it is possible to reduce the number of sensors and simplify external control of the control unit.

In the embodiment of the present invention,
The case where an optical sensor is used as a sensor has been described. However, in order to determine the traveling speed of a transport vehicle, it is possible to use various sensors such as an eddy current sensor as well as an optical sensor if it is a non-contact type sensor. The case where two sensors are used for one location of the primary conductor has been described. However, it is possible to use one sensor, and various changes can be made without departing from the gist of the present invention. , Of course.

[0098]

According to the transfer device of the present invention, various excellent effects as described below can be obtained.

I) High-speed traveling is possible in portions other than the station portion, and the stopping accuracy of the transport vehicle is improved in the station portion. As a result, the operation efficiency of the device and the reliability of the device are improved as a whole.

II) Since the number of permanent magnets is small and power supply to the primary conductor only needs to be performed at necessary places, cost can be reduced.

III) Since there is no dust generating portion, it can be used in a clean room.

[Brief description of the drawings]

FIG. 1 is an overall plan view of a transfer device of the present invention.

FIG. 2 is a view taken in the direction of arrows II-II in FIG.

FIG. 3 is a view in the direction of arrows III-III in FIG. 1;

FIG. 4 is a view in the direction of arrows IV-IV in FIG. 2;

FIG. 5 is a view in the direction of arrows VV in FIG. 2;

FIG. 6 is a view in the direction of arrows VI-VI in FIGS. 2 and 3;

FIG. 7 is a longitudinal sectional view showing a state in which a carrier is located at a station portion in the apparatus of FIG. 1;

FIG. 8 is a right side view of the carrier cart shown in FIG.

FIG. 9 is a plan view of FIG. 7;

FIG. 10 is a view taken in the direction of arrows XX in FIG. 7;

FIG. 11 is a plan view of one detection piece used for each station.

FIG. 12 is a plan view of another detection piece used for each station.

FIG. 13 is a side view showing a relationship between a secondary conductor mounted on the transport vehicle shown in FIG. 7 and a detection piece setting member.

FIG. 14 is a view as seen in the direction of the arrow XIV in FIG. 7;

FIG. 15 is a view as viewed in the direction XV in FIG. 7;

FIG. 16 is a diagram illustrating a state of a signal when controlling the transport vehicle in the transport device of the present invention.

FIG. 17 is a conceptual diagram of a conventional transport device.

[Explanation of symbols]

 11 Carrier 20, 27 Secondary conductor (first secondary conductor) 29 Secondary conductor (second secondary conductor) 29b Permanent magnet 35 Primary conductor (second primary conductor) 44, 45 Primary conductor (first ST1, ST2, ST3, ST4 Station D1 Running direction

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁶ Identification symbol FI // B65G 23/23 B60L 13/02 Q

Claims (1)

[Claims] At least one station capable of stopping a transport vehicle is provided on a line on which the transport vehicle travels, and a first primary conductor for supplying power to the ground side at a required interval on the line on which the transport vehicle travels Provided, the carrier cart is provided with a first secondary conductor corresponding to the first primary conductor, a linear induction linearized induction motor by the first primary conductor and the first secondary conductor To configure a motor, each station is provided with a second primary conductor that supplies power to the ground side, the transport vehicle, corresponding to the second primary conductor, the traveling direction of the transport vehicle and N pole and S toward parallel direction
A second secondary conductor having a plurality of permanent magnets arranged so that poles are opposed to each other is provided, and the second primary conductor and the second secondary conductor can be used for servo control by linearizing a synchronous motor. A transport device comprising a linear synchronous motor.