JPH1199324A - Separation membrane module - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a separation membrane module which is a gas permeable separation membrane and has high strength and the large permeated quantity and whose manufacturing cost is made lower than before. SOLUTION: This module consists of a metal membrane 1 for selectively permeating specific gas, a reinforcing plate 2 having a lot of holes 13 and supporting the metal plate 1, and a base plate 3 having a gas removal part which can communicate with a gas releasing pipe. The reinforcing plate 2 is covered with one or plural metals selected from the group consisting of Ag, Au, Pt, Ni, and Cu, but it is not joined with them like the conventional one, and the metal film 1 and the reinforcing plate 2 are put together and the outer peripheral parts thereof are seal welded to the base plate 3. Alternatively, without joining, the metal plate 1 is caught in the holes of the reinforcing plate 2 just below it. In this way, even when a joining process or a metal coating film process and the joining process are eliminated, slippage between the metal film 1 and the reinforcing plate 2 can be prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a separation membrane module, and more particularly, to a separation membrane module used in an apparatus for producing, recovering or purifying a specific gas.

[0002]

2. Description of the Related Art As a means for producing, separating, recovering or purifying a gas, there is a method using a metal or alloy film (hereinafter sometimes abbreviated as "metal film") which selectively transmits a specific gas. Industrially, it has been put to practical use in the production of ultrahigh-purity hydrogen in the semiconductor production field, and its application to the production of ammonia in the petrochemical industry is also advancing. Regarding the phenomenon in which the metal film permeates only the specific gas, when a mixed gas containing the specific gas is brought into contact with one surface of the metal film, the specific gas molecules are absorbed by the metal film, become an atomic state, and further ionized. And diffuses to the opposite side of the metal film, where it recombines and becomes a specific gas molecule again. By utilizing this phenomenon, a specific gas is collected on the opposite side of the metal film. As a method for producing a metal film, a metal or an alloy having a specific gas selective permeability is annealed and cold-rolled, and a surface of a porous body serving as a support of the metal film is plated by electroplating, electroless plating, or the like. Or a method of forming a metal film by a vapor deposition operation such as vacuum deposition by electron beam heating.

In industrial applications, the metal film (foil) formed by the above-described means is placed on the side of the mixed gas containing the specific gas of interest with the metal film (foil) facing the outside, and the mixed gas contact surface of the metal film is contacted. On the side opposite to this, a separation membrane module having a space (gas trapping portion) for collecting a permeated specific gas and having a base portion communicating with a permeate gas extraction pipe is configured. As the pressure difference between the two sides of the metal film, that is, the pressure difference between the mixed gas and the permeated specific gas is larger, the amount of the specific gas permeating through the metal film increases, but the metal film can withstand this pressure difference. In addition, reinforcing means is required. Therefore, between the metal film and the base portion, a porous body or a reinforcing material made of a porous body is usually provided to support the metal film and reinforce the film strength. However, since the gas flow path is narrowed by the reinforcement, the pressure loss increases, so a reinforcing material that can maintain a large pressure difference and secure the flow path of the specific gas is desired. Separation membrane having a structure in which a reinforcing material combining a wire mesh and a metal foil are joined (Japanese Patent Application No. 5-2 / 1993)
No. 03250) or a plate-type or tube-type separation membrane module (Japanese Patent Application No. 8-60883) in which a metal film is laminated on a porous metal body (reinforcement plate) provided with a large number of through holes and joined. is suggesting.

[0004]

Problems to be Solved by the Invention Japanese Patent Application No. 8-6 mentioned above.
The separation membrane module proposed in Japanese Patent No. 0883 will be described with reference to FIGS. FIG. 4 is a view for explaining the structure and manufacturing method of the tubular separation membrane module, and is a gas-permeable metal membrane (metal membrane) 1 made of Pd or an alloy containing Pd or the like.
Is bonded to one or more (two in the illustrated example) metallic reinforcing plates 2 and 2 'having a large number of openings (portion (a) of FIG. 4). 12 is for diffusion bonding, for example, A
It is a metal coating such as a g film. The joined body 5 of the metal film 1 and the reinforcing plate 2 obtained above is wound around the outer peripheral portion of a base tube 4 (shown in FIG. 4B) having a large number of holes, and the periphery is sealed by welding 6. To form a separation membrane module 7 '(shown in FIG. 4C).

FIG. 5 is a view for explaining the structure and manufacturing method of a flat type separation membrane module, wherein a gas-permeable metal membrane (metal membrane) is shown.
As shown in FIG. 4 (a), a reinforcing plate 2 ', a reinforcing plate 2 and a metal are provided on the upper surface of the base plate 3 having a plurality of grooves 3' serving as flow paths for gas permeating through the groove 3 '. The film 1 is arranged (portion (a) of FIG. 5). Reference numeral 12 denotes a metal coating such as an Ag film for diffusion bonding, which is coated on both surfaces of the reinforcing plate 2 and the upper surface of the reinforcing plate 2 'as shown in the partial side view of FIG. The metal membrane 1 and the reinforcing plates 2 and 2 ′ are joined to form a joined body 5, and the outer peripheral portion of the joined body 5 and the base plate 3 are seal-welded 6 to form a separation membrane module 7 ′. A header 9 having a nozzle 8 serving as a gas extraction tube is separately attached to the separation membrane module 7 'by welding (FIG. 5C).
part〕.

As shown in FIGS. 4 and 5, in the conventional separation membrane module 7 ', the metal membrane 1 and the reinforcing plates 2 and 2' are joined by diffusion joining or brazing. That is, the reinforcing plates 2 and 2 'are coated with one or more metals selected from the group consisting of Ag, Au, Pt, Ni and Cu, or after the metal material is inserted, the metal film 1 Layer, using a vacuum press furnace at a temperature of 500 to 70
It is carried out under the conditions of 0 ° C. and a pressure of 1 to 3 kgf / mm ² (Literature: Japanese Unexamined Patent Publication No. Hei.
No. 1).

Conventionally, the reason why the metal film and the reinforcing plate are joined as described above will be described with reference to FIG. The gas velocity V permeating the metal film 1 is given by the equation (1) shown in Expression 1.

(Equation 1) That is, the permeated gas velocity V is proportional to the half power of the permeated gas partial pressure on both sides of the metal film 1, and the permeated gas velocity increases as the differential pressure increases. In a target gas purifying apparatus or manufacturing apparatus, it is desirable that the differential pressure on both sides of the metal film 1 be large in order to increase the purification amount.

The metal film 1 is reinforced by a reinforcing plate 2 (2 ') having an opening 13 and a pillar portion (a portion between the openings), and a bending 10 is caused by a pressure difference. If the flexure 10 is large, the base 11 of the flexure 10 is fatigued and broken due to the repetition of the “ON ← → OFF” of the refining device, that is, the repetition of “there is a pressure difference ← → no pressure difference” of the metal film. The opening pitch of the reinforcing plate 2 is designed so as to have a sufficient life if the occurrence of the bending 10 is uniform as shown in FIG. 6A, and one place as shown in FIG. 6B. Deflection 1 in opening 13
When 0 is concentrated, the direction of the flexure 10 is reversed as shown in FIG. 6C depending on the presence or absence of the pressure difference, and the root 11 of the flexure 10 causes fatigue damage. The metal film 1 and the reinforcing plate 2 are joined to prevent the concentration of the flexure 10 and to prevent the metal film 1 and the reinforcing plate 2 from shifting.

[0009]

In the prior art described above, 1) the joining process is not suitable for mass production, so that the joining cost is high. 2) The reinforcing plate is covered with metal or brazing material for joining. And it acts as an adhesive and joins the metal film,
The part of the metal membrane where the metal or brazing material adheres to the reinforcing plate cannot pass the specific gas of interest,
There is a problem that the gas permeation amount is reduced. An object of the present invention is to solve the above problems 1) and 2) and to provide a separation membrane module having a high strength and a large gas permeation amount, and having a lower production cost than the conventional one.

[0010]

As a means for solving the above-mentioned problems, the present invention provides (1) a metal film which selectively permeates a specific gas, and a reinforcing member having a large number of openings and supporting the metal film. In a separation membrane module comprising a plate and a base having a gas trapping part which can communicate with a gas extraction pipe, the reinforcing plate is made of one or more kinds of metals selected from the group consisting of Ag, Au, Pt, Ni and Cu. A separation membrane module, wherein the outer periphery of the metal membrane and the reinforcing plate overlapped with each other is seal-welded to the base, (2) the Ag, Au, Pt, Ni and The separation membrane module according to (1), wherein a coating of one or more kinds of metals selected from the group consisting of Cu is formed on only a part of the surface of the reinforcing plate. Metal that selectively permeates gas In a separation membrane module comprising a membrane, a reinforcing plate having a large number of openings, supporting the metal film, and a base portion having a gas trapping portion capable of communicating with a gas extraction pipe, the metal film and the reinforcing plate are stacked. A separation membrane module, wherein an outer peripheral portion of the combined product is seal-welded to the base portion, and the metal film has a structure in which the metal film cuts into the opening of the reinforcing plate immediately below;
(4) The separation membrane module according to any one of (1) to (3), wherein the base is a plate having a groove or a perforated tube.

[0011]

BEST MODE FOR CARRYING OUT THE INVENTION The present invention relates to a method in which Ag, Au,
One or more kinds of metals selected from the group consisting of Pt, Ni and Cu are coated (hereinafter simply referred to as metal coating). FIGS. 1 and 2 are schematic diagrams showing the structure and manufacturing method of the present invention, respectively. As shown in the figure, the first feature is that the bonding by diffusion bonding or brazing is not performed, and the metal film is directly overlapped with the base portion and seal-welded. 1 and 2, the same reference numerals as those in FIGS. 4 and 5 denote the same parts, and 7 denotes a separation membrane module of the present invention. The reason why the present invention is configured as described above will be described in an embodiment of the present invention described later. With the configuration of the present invention, fatigue damage can be sufficiently prevented, and the joining step of the conventional example can be omitted, so that both the manufacturing time and the cost can be reduced.

In the present invention, the metal film is not particularly limited as long as it is a metal film (foil) permeable to a specific gas, but examples of the metal include Pd or a Pd alloy. Pd alloys include Y and other rare earth elements, Group 11 elements such as Ag, Au and Cu, Pt, Ni
Group 10 elements such as Rh, Co, etc .;
Preferable alloys include one or more selected from the group consisting of Group 8 elements such as Fe, Group 6 elements such as Mo, and Group 5 elements such as V, and Pd. There is no particular limitation on the method of producing the metal film itself, and examples thereof include a method of rolling a metal plate, a method of forming a film on a surface of a substrate by plating, thermal spraying, vapor deposition, and the like, and then removing the substrate. Can be

In the present invention, a reinforcing plate having a portion which can be seal-welded to a base plate is used. Also,
It is necessary to have a porous structure so that a specific gas of interest permeates (however, a non-porous frame may be provided on the outer periphery). Those having pores (porous metal body) are exemplified. Specifically, a material formed by drilling by a laser method, an etching method, a drill method, or the like, a material formed into a net shape, and the like can be given. The hole shape of the reinforcing plate, the number of reinforcing plates, etc. can be arbitrarily selected,
It is a preferred embodiment to use a reinforcing plate or the like, which is proposed in Japanese Patent Application No. 8-60833, in which the major axis directions of the holes are alternately perpendicular to each other.

In the present invention, the metal coating on the surface of the reinforcing plate includes one or more metals selected from the group consisting of Ag, Au, Pt, Ni and Cu. The coating is formed by a vacuum evaporation method, an ion plating method or the like, an electroplating method, an electroless plating method or the like, a thermal spraying method, an ion implantation method or the like, particularly preferably a vapor deposition method, and a thickness of 0.1 to 5 μm. Degree, preferably about 0.5 to 1 μm.

A second feature of the present invention is that the metal coating may be partially coated instead of the entire surface of the reinforcing plate as in the prior art. The joining is for preventing the displacement between the metal film and the reinforcing plate, and the displacement can be prevented without joining the entire reinforcing plate. Therefore, if a metal or brazing material film is formed only on a part of the reinforcing plate, it is possible to prevent a reduction in the gas permeation area caused by the joint portion covering the metal film.
Thereby, fatigue damage can be sufficiently prevented, and the effect that the specific gas permeation amount can be increased can be obtained in addition to the above-described effect that the manufacturing can be performed without the joining step.

A method of forming a metal or brazing film (metal coating) only on a part of the reinforcing plate is to form a metal coating by a vacuum deposition method using a mask on the reinforcing plate, and to form a mask after forming the coating. Peel off, after forming a metal coating on the entire surface,
Any method such as etching an unnecessary portion or forming a metal coating by pattern printing may be used.

Further, in the present invention, after the metal film and the reinforcing plate are overlapped, as a means for preventing displacement of the foil and the reinforcing plate instead of joining, the metal film is plastically deformed so that the metal film is inserted into the hole of the reinforcing plate. A third feature is to have a bite structure. That is, as shown in FIG. 3A, the bending due to the presence or absence of the pressure difference is formed in advance. Thereby, the displacement between the metal film and the reinforcing plate can be prevented without joining, the bending can be made very small as shown in FIG. 3 (b), and the bending can be prevented from being concentrated at one place. In this case, a metal coating may be provided on the entire surface or a part of the surface of the reinforcing plate. However, even if a metal coating such as an Ag film is not provided as shown in Examples described later, the displacement can be sufficiently prevented. As described above, the one without the metal coating such as the Ag film can further reduce the manufacturing cost.

In order to obtain the structure shown in FIG. 3, any one of i) a method using a soft roll and ii) a high pressure method is used. i) The soft roll method is a method in which a metal film is superimposed on a reinforcing plate and pressed from a side of the metal film with a roll or a plate of easily deformable material such as rubber to deform the metal film plastically. ii) The high-pressure method is a method in which the metal film is plastically deformed by a pressure difference between both sides of the metal film. This method can be applied even after the separation membrane module is manufactured in a tube type or a flat type (plate type).

In the present invention, the shape of the base portion is limited as long as the base portion has a capturing portion capable of capturing a specific gas that has passed through the metal film and the reinforcing plate and can collect the specific gas. For example, a plate type having a groove serving as a gas flow path or a perforated tube type may be used. The gas trapping section (gas flow path) of the base section communicates with a pipe for extracting a specific gas, but a pipe for introducing a sweep gas may be further provided. Examples of the material of the base portion include metals and alloys.

In the separation membrane module of the present invention, the outer peripheral portion of the above-mentioned metal film and the reinforcing plate provided with the metal coating are sealed and welded to the base plate. Laser welding, TIG welding (Tungsten Inert-Gas arc)
welding) is used. The reason for employing laser welding and TIG welding is that only small areas can be heated and welded, so that heat input is small and damage to the metal film can be reduced.

[0021]

【Example】

[Conventional Example] A flat separation membrane module 7 'shown in FIG. 5 was manufactured by a conventional method. As the gas permeable metal film 1, Pd-23% having a thickness of 20 μm, a width of 70 mm, and a length of 120 mm
Ag alloy foil, SUS430 as the reinforcing plate 2
One sheet of 1 mm, the same material as the reinforcing plate 2 ′ and a thickness of 0.
A total of two reinforcing plates, one of 3 mm, were prepared. In each case, the outer diameter is 70 mm in width and 120 mm in length, and the mesh portion is 60 mm in width and 100 mm in length. As shown in FIG. 7, the mesh portion of the reinforcing plate 2 having a thickness of 0.1 mm has a width of 0.1 mm.
Openings having a length of 6 mm and a length of 1.0 mm are arranged in a zigzag pattern with 0.04 mm remaining (column portion). Since the number of openings is large, the opening ratio of the mesh portion can be approximated by a value obtained by dividing the rectangular opening area by the area of the rectangle indicated by the dotted line in FIG. That is, from the calculation (2) of Equation 2,

(Equation 2) 0.77. A 0.3 mm thick reinforcing plate 2 ′ has a width of 0.3 mm.
A rectangular opening having a thickness of 35 mm and a length of 1.0 mm has a thickness of 0.3 mm.
In a direction intersecting with the 1 mm reinforcing plate 2, they are arranged in a zigzag pattern with 0.35 mm remaining.

First, both sides of the reinforcing plate 2 having a thickness of 0.1 mm,
A coating 12 made of Ag is formed on one side of a reinforcing plate 2 'having a thickness of 0.3 mm by a vacuum evaporation method, and a hydrogen-permeable metal foil /
A reinforcing plate having a thickness of 0.1 mm / a reinforcing plate having a thickness of 0.3 mm are stacked in this order, and using a vacuum pressurizing furnace, at a temperature of 500 ° C. and a pressing force of 2
It joined under the condition of kgf / mm ^{2 to} obtain a joined body 5. Next, the joined body 5 was placed on the base plate 3 and the outer peripheral portion was sealed and welded. Seal welding 6 was performed by CO ₂ laser welding.
One end of the groove 3 'of the base plate 3 is closed, and a header 9 having a nozzle 8 for discharging hydrogen is connected to the other end which is not closed by welding.

With respect to the hydrogen separation membrane module 7 'produced as described above, an evaluation test of hydrogen permeation performance and a durability test by repeatedly raising and lowering the temperature and pressure were performed. The test conditions were: hydrogen permeation performance evaluation test, test condition: temperature 500
° C, hydrogen partial pressure outside the hydrogen permeable metal foil 2 kgf / cm ²
G, the inner hydrogen partial pressure was 0 kgf / cm ² G. The durability was evaluated by measuring the amount of permeated hydrogen.
C., an outside pressure of 10 kgf / cm ² G →→ a temperature of 50 ° C., and an outside pressure of 0 kgf / cm ² G: The evaluation was made based on whether or not a leak occurred. The evaluation result shows that the hydrogen permeation performance is 22
Nm ³ / hr · m ² , and durability showed no leakage even after 3,000 repetitions.

[Comparative Example] In order to confirm the effectiveness of joining, the same members as in the conventional example were not used to form and join the Ag coating, ie, a hydrogen-permeable metal foil 1 and a reinforcing plate 2 having a thickness of 0.1 mm. And a reinforcing plate 2 'having a thickness of 0.3 mm
The outer peripheral portion was seal-welded 6 to form a hydrogen separation membrane module. When the obtained hydrogen separation membrane module was evaluated in the same manner as in the conventional example, the hydrogen permeation performance was increased to 29 Nm ³ / hr · m ² , but the durability was 12
Leakage occurred at the repetition of 00 times, and durability was a problem.

Example 1 Using the same members as in the conventional example, the surface of the reinforcing plate 2 having a thickness of 0.1 mm, which is in contact with the metal foil 1 made of hydrogen permeable, as shown in FIG. Ag film 12
, But without joining, the hydrogen permeable metal foil 1 /
A reinforcing plate 2 having a thickness of 0.1 mm / a reinforcing plate 2 ′ having a thickness of 0.3 mm is placed on the base plate 3, and the outer peripheral portion thereof is sealed with a seal weld 6, and the hydrogen separation membrane module shown in FIG. 7 was produced. Further, a header having a nozzle (hydrogen extraction pipe) 8 was attached to the unclosed end of the groove 3 'by welding. About the obtained hydrogen separation membrane module 7, it evaluated similarly to the conventional example. The hydrogen permeation performance before the durability evaluation test was 29 Nm ³ / hr · m ^2, which was as good as the comparative example. In the durability evaluation test, no leak occurred even after 3,000 repetitions, indicating good durability. After the durability evaluation test, the hydrogen permeability was 22 Nm ³ / hr ·
m ^{2, which} is a level of the conventional example.

In Example 1, the cause of the decrease in the hydrogen permeability after the durability evaluation test was examined by disassembling the hydrogen separation membrane. The hydrogen permeable metal foil 1 and the thickness of 0.1 m were examined.
It was found that the m reinforcing plate 2 ′ was joined by the Ag film 12. It was presumed that the same effect as bonding in a vacuum pressurizing furnace appeared depending on the temperature and pressure in the durability evaluation test.
In addition, the hydrogen permeation area is reduced by this bonding,
It was presumed that the hydrogen permeation performance was reduced to the level of the conventional example after each pressure rise and fall.

According to the first embodiment, in the hydrogen film module manufacturing process, as long as a metal film for bonding is formed on the reinforcing plate, it can be evaluated during durability evaluation or bonded during the hydrogen purification and hydrogen manufacturing process. It has been found that the joining process in the manufacturing process can be omitted.

[Embodiment 2] In this embodiment, a structure capable of preventing a reduction in the hydrogen permeable area due to bonding was examined. First, a hydrogen separation membrane module was prototyped using the same members as the conventional example. The metal coating 12 was formed on the reinforcing plate 2 as follows. When the metal coating (Ag film) 12 is coated on the reinforcing plate 2 having a thickness of 0.1 mm by a vacuum deposition method, a mask having a hole in a direction intersecting with the long hole of the reinforcing plate 2 (the opening width of the short axis of the hole is 0). .1 mm, residual width 0.9 mm, aperture ratio 0.
1) was prepared, and a mask was overlaid on the reinforcing plate 2 to form a film. The film is formed only in the holes of the mask, and the reinforcing plate 2
An Ag film was formed on only 10% of the surface of the sample. Thickness 0.3
Similarly, the Ag film 12 was formed on only 10% of the surface of the reinforcing plate 2 'having a thickness of 2 mm. Hydrogen permeable metal foil 1, thickness 0.
A 1 mm reinforcing plate 2 and a 0.3 mm thick reinforcing plate 2 ′ were stacked on a base plate, and the outer peripheral portion thereof was seal-welded to the base plate 3 without joining, thereby producing a hydrogen separation membrane module.

The hydrogen separation membrane module obtained in Example 2 was evaluated in the same manner as in the conventional example. The hydrogen permeation performance before the durability evaluation test was 29 Nm ³ / hr · m ² . In the durability evaluation test, no leak occurred even after 3,000 repetitions, indicating good durability. The hydrogen permeability after the durability evaluation was hardly reduced to 28 Nm ³ / hr · m ² .

From the results of Example 2, it can be seen that, by reducing the metal cover forming area of the reinforcing plate, a decrease in the hydrogen permeable area of the hydrogen permeable metal foil due to subsequent joining in actual use can be reduced, and the hydrogen permeable performance can be reduced. Improved.
In the second embodiment, the Ag film was formed on only 10% of the surface of each of the reinforcing plates 2 and 2 '. However, the covering ratio of both was changed, and further, one was partially covered and the other was entirely covered. Is also mentioned as an embodiment of the present invention, and any of the above effects can be obtained.

[Embodiment 3] In this embodiment, a hydrogen separation membrane was produced by trial using the same members as in the conventional example, but the reinforcing plate 2 having a thickness of 0.1 mm and the reinforcing plate 2 'having a thickness of 0.3 mm were manufactured. Ag
No coating was formed. The reinforcing plate 2 was superimposed on the water-permeable metal foil 1, and a pressure of 20 kgf / mm ² was applied from the side of the hydrogen-permeable metal foil using a rubber roll. As a result, the hydrogen-permeable metal foil 1 was plastically deformed in each hole of the reinforcing plate 2 as shown in FIG. Hydrogen-permeable metal foil 1 / reinforcement plate 2 with thickness of 0.1 mm
/ Lay a 0.3 mm thick reinforcing plate 2 ′ on the base plate 3,
Without joining, the outer periphery was sealed and welded to produce a hydrogen separation membrane module.

The hydrogen separation membrane module obtained in Example 3 was evaluated in the same manner as in the conventional example. The hydrogen permeability was very good at 31 Nm ³ / hr · m ² both before and after the durability evaluation test. In the durability evaluation test, no leak occurred even after 3,000 repetitions, indicating good durability. In the present embodiment, the hydrogen permeation performance was slightly improved from the conventional one because the hydrogen permeable metal foil was pressed by a rubber roll.
It is thought that it became slightly larger and thinner.

In the third embodiment, since the hydrogen permeable metal foil is fixed by being cut into the opening of the reinforcing plate, durability can be obtained and a reduction in the hydrogen permeable area due to bonding can be prevented. Led to improvement. Further, since the metal coating forming step and the joining step can be eliminated, the manufacturing cost can be reduced. Note that the above effect can be sufficiently obtained by fixing only the plastic deformation of the metal film without forming the metal coating such as Ag as in Example 3, but the metal coating is provided on the entire surface or a part of the reinforcing plate. Needless to say, if the structure is such that the metal film bites into the opening of the reinforcing plate, it can be fixed very firmly.

Although the first to third embodiments have described the flat type separation membrane module, the present invention similarly applies to the tube type separation membrane module having a cylindrical porous tube shown in FIG. In the same manner as in Examples 1 to 3, a structure in which the metal film is cut into the reinforcing plate without joining, or without joining, by reducing the metal coating area, or without joining, was obtained.

[0035]

As described above, the separation membrane module of the present invention can reduce the number of manufacturing steps compared to the conventional one, realizing a reduction in manufacturing cost, and ensuring sufficient durability.
This is industrially very advantageous in that gas permeation performance can be further improved.

[Brief description of the drawings]

FIG. 1 is a schematic explanatory view showing the structure and manufacturing method of a flat type separation membrane module according to one embodiment of the present invention.

FIG. 2 is a schematic explanatory view showing the structure and manufacturing method of a tubular separation membrane module according to another embodiment of the present invention.

FIG. 3 is a schematic explanatory view illustrating the structure and operation of a separation membrane module having a structure in which a metal film is cut into a reinforcing plate according to still another embodiment of the present invention.

FIG. 4 is a schematic explanatory view of an example of a conventional tubular separation membrane module.

FIG. 5 is a schematic explanatory view of an example of a conventional flat separation membrane module.

FIG. 6 is a schematic diagram illustrating a state of bending of a metal film.

FIG. 7 is a schematic diagram for explaining a structure and a hole ratio of a mesh portion of a reinforcing plate in the present invention.

[Explanation of symbols]

1 gas permeable metal membrane, 2 and 2 ′ reinforcing plate,
3 Base plate, 3 'groove, 4 Base tube, 5 Joint, 6 Seal welding
7 Separation membrane module (product of the present invention), 7 'separation membrane module (conventional product), 8 nozzle, 9 header, 10 deflection,
11 base, 12 metal coating, 13
Aperture.

Claims (4)

[Claims] A metal film that selectively permeates a specific gas;
In a separation membrane module having a large number of openings, a reinforcing plate for supporting the metal membrane, and a base having a gas trapping portion capable of communicating with a gas extraction pipe, the reinforcing plate may have A
g, Au, Pt, Ni and Cu, and is covered with one or more kinds of metals selected from the group consisting of a group consisting of the metal film and the reinforcing plate. A separation membrane module, comprising: 2. The method according to claim 1, wherein a coating of one or more metals selected from the group consisting of Ag, Au, Pt, Ni and Cu is formed on only a part of the surface of the reinforcing plate. The separation membrane module according to claim 1 or 2. 3. A metal film selectively permeating a specific gas,
A separation membrane module having a large number of openings, a reinforcing plate supporting the metal membrane, and a base having a gas trapping portion that can communicate with a gas extraction pipe, wherein the metal membrane and the reinforcing plate are overlapped. A separation membrane module having a structure in which an outer peripheral portion is seal-welded to the base portion, and the metal film bites into the opening of the reinforcing plate immediately below. 4. The separation membrane module according to claim 1, wherein the base portion is a plate having a groove or a perforated tube.