JPH1199141A - Individual authentication device and its manufacture - Google Patents

Abstract

PROBLEM TO BE SOLVED: To detect the irregularity of an individual with high accuracy by providing a first electrode group arranged into an array shape and a second electrode group connected to individual electrodes of it on a substrate detecting irregularities such as the fingerprint of a human being as the difference of electrostatic capacity, and providing an insulating layer on the second electrode group. SOLUTION: A finger 12 is pressed to an insulator film 9 to detect a fingerprint which is irregular data. An analog switch 3 is switched in the longitudinal direction of the finger 12 by the output of a timing pulse generator 5, and the outputs of an oscillator 4 are connected to individual electrodes 1a, 1b in sequence. The outputs of the output electrodes 1a, 1b are received by input electrodes 2a, 2b connected to the output electrodes 1a, 1b by an anisotropic conductive film 10, the potential difference generated between both ends of a terminal resistor 8 is detected by a detecting circuit 6, and the output signal is inputted to a controller 13 via an A/D converter 7. The controller 13 compares and collates the inputted signal on the feature of the finger 12 with the feature information of the finger 12 stored in a memory section in advance for individual authentication.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an individual authentication apparatus for identifying an individual (person, etc.) using characteristics of the individual, such as a finger, and a method of manufacturing the same.

[0002]

2. Description of the Related Art Hitherto, there has been proposed a method of detecting unevenness of a human fingerprint or the like as a difference in capacitance. Array electrodes (including one-dimensional arrangement and two-dimensional matrix arrangement)
The capacitance between the finger surface and the electrode when the finger is touched or brought close to the electrode is sequentially read, and the magnitude of the capacitance is inversely proportional to the distance between the finger surface and the electrode, and the finger directly contacts the electrode When in a conductive state, the capacitance can be regarded as infinite.

However, since the conduction state (surface resistance value) when a finger comes into contact greatly depends on the sweating state of a finger or the like, it is difficult to obtain high reproducibility with an exposed electrode. for that reason,
A structure in which a thin insulating layer is formed on an electrode surface is used. In this case, since the unevenness is detected only by the capacitive coupling, data with high reproducibility can be obtained without depending on the sweating state of the finger or the like. Furthermore, the value of the capacitive coupling due to the insulating film is inversely proportional to the thickness of the insulating film, and the thinner the insulating film, the more accurately the unevenness of the finger can be detected.

[0004] This thin insulating film can be formed relatively easily by using a silicon integrated circuit technique or the like, but it is difficult to apply the thin insulating film to a case where the detecting section is manufactured on a general printed board or the like. This problem will be described with reference to FIG.
That is, although the formation can be performed by bonding the insulating film 109, it is difficult to reduce the thickness of the bonding layer 110, and there is a problem in that the accuracy of the obtained unevenness data of a finger or the like is reduced. In FIG. 9, 1
Reference numerals 01 and 102 denote electrodes arranged in an array, and 111 denotes a printed circuit board.

[0005]

As described above, a method of detecting unevenness of a human fingerprint or the like as a difference in capacitance is used.
In a structure in which a thin insulating layer is formed on an electrode surface, it is difficult to form a thin insulating film, and there has been a problem that the accuracy of data of unevenness of a finger or the like obtained becomes low. An object of the present invention is to provide an individual authentication device capable of improving the accuracy of unevenness data of a finger or the like and a method of manufacturing the same.

[0006]

Means for Solving the Problems In order to solve the above-mentioned problems, a first aspect of the present invention is to provide a base, a first electrode group arranged in an array on the base, and a first electrode group. A second electrode group having individual electrodes arranged in an array so as to be electrically connected to the included individual electrodes; and a second electrode group provided on the second electrode group so as to cover the surface of the electrode group. A characteristic extracting means for extracting characteristic data of the individual from the surface of the individual when the individual is pressed against the insulating layer and the capacitance between the individual electrodes included in the second electrode group; Storage means for storing characteristic information of an individual to be verified, and matching means for comparing the characteristic data extracted by the characteristic extraction means with the characteristic information stored in the storage means. An individual authentication device is provided.

A second aspect of the present invention is to electrically connect a base, a first electrode group arranged on the base in an array, and individual electrodes included in the first electrode group. An anisotropic conductive layer provided on the insulating layer, an insulating layer provided on the anisotropic conductive layer so as to cover the surface of the conductive layer, and the surface of the solid when the solid is pressed against the insulating layer. Feature extracting means for extracting characteristic data of an individual from the capacitance between anisotropic conductive layers, storage means for storing characteristic information of an individual to be compared in advance, and feature data extracted by the characteristic extracting means And a matching unit for checking the characteristic information stored in the storage unit.

[0008] In the second aspect of the present invention, the first anisotropic conductive layer is provided on the anisotropic conductive layer and the first anisotropic conductive layer is interposed therebetween.
It is preferable to include a second electrode group having individual electrodes provided in an array so as to be electrically connected to the individual electrodes included in the electrode group.

In the first and second aspects of the present invention, the following aspects are preferred. (1) An electrode pad group connected to a peripheral circuit is provided on the base at a predetermined interval, and individual electrodes included in the first electrode group are connected to individual pads of the electrode pad group. thing.

(2) The first electrode group includes a plurality of output electrodes and an input electrode, and oscillating means is provided on the plurality of output electrodes, and the plurality of output electrodes are provided with a signal from the oscillating means. Switching means for switching an output to each of the output electrodes is connected, and a detection means for detecting an electric signal obtained from the input electrode is provided on the input electrode side.

(3) The first electrode group includes a plurality of output electrodes and an input electrode, and a plurality of oscillating means are provided corresponding to each of the plurality of output electrodes, respectively. The means is provided with output control means for controlling ON / OFF of an output from the oscillation means, and the input electrode side is provided with detection means for detecting an electric signal obtained from the input electrode.

(4) The first electrode group includes an output electrode and a plurality of input electrodes, an oscillating means is provided on the output electrode side, and an output from the oscillating means is provided to the plurality of input electrodes. Switching means for switching to each of the input electrodes is connected, and a detection means for detecting an electric signal obtained from the input electrode is provided on the plurality of input electrodes.

(5) Band limiting means for limiting the band of the electric signal obtained from the input electrode is provided, and the oscillation frequency of the oscillating means is included in the pass band of the band limiting means.

(6) The insulating layer completely covers the input electrode and the output electrode. (7) An opening is selectively formed on the input electrode in the insulating layer, and the opening is not covered in the opening.

(8) The individual is human or animal skin. (9) The individual is a human or animal finger. A third aspect of the present invention is a substrate, a first electrode group arranged on the substrate in an array, and an array formed to be electrically connected to individual electrodes included in the first electrode group. A second electrode group having individual electrodes provided on the second electrode group, an insulating layer provided on the second electrode group so as to cover the surface of the electrode group, and an individual when pressed against the insulating layer. Feature extracting means for extracting characteristic data of the individual from the capacitance between the surface of the individual and the individual electrodes included in the second electrode group, and storage means for storing in advance the characteristic information of the individual to be compared And a collating means for collating the characteristic data extracted by the characteristic extracting means with the characteristic information stored in the storage means, comprising: Forming the first electrode group, the insulating layer Forming the second electrode group in an array, and bonding the individual electrodes included in the first electrode group and the second electrode group so as to be electrically connected to each other. A method for manufacturing an individual authentication device is provided.

Still further, according to a fourth aspect of the present invention, a base, a first electrode group arranged in an array on the base, and individual electrodes included in the first electrode group are electrically connected. Anisotropic conductive layer provided as described above, an insulating layer provided on the anisotropic conductive layer so as to cover the conductive layer surface, the solid surface when the solid is pressed against the insulating layer, and Feature extracting means for extracting characteristic data of an individual from the capacitance between the anisotropic conductive layers, storage means for storing characteristic information of the individual to be compared in advance, and features extracted by the characteristic extracting means A method of manufacturing an individual authentication device, comprising: comparing means for comparing data with characteristic information stored in said storage means, wherein the first authentication apparatus is arranged in an array on the base.
Forming the electrode group, forming the anisotropic conductive layer on the insulating layer, and bonding the first electrode group and the anisotropic conductive layer so as to be electrically connected to each other. And providing a method for manufacturing an individual authentication device.

In the fourth aspect of the present invention, a step of forming a second electrode group in an array on the insulating layer;
Forming the anisotropic conductive layer on the electrode group, and electrically connecting the individual electrodes included in each of the first electrode group and the second electrode group to each other via the anisotropic conductive layer. And a step of bonding to be connected to

The arrangement of the array electrodes described above includes 1
It includes a two-dimensional array and a two-dimensional matrix arrangement. According to the present invention described above, the first electrode group is previously formed on the base in order to form a plurality of electrodes (second electrode group) or an insulating layer covering the surface of the anisotropic conductive layer. At the same time, a plurality of electrodes (second electrode group) or an anisotropic conductive layer is formed on the insulating layer in advance to prepare a thin sheet. The thin sheet on which the plurality of electrodes or the anisotropic conductive layer is formed is used upside down, and the plurality of electrodes or the anisotropic conductive layer electrodes are connected to a peripheral circuit at predetermined intervals by electrode pads (first electrode By connecting to (group), it is possible to make the thickness of the insulating layer itself correspond to the total insulating film thickness. That is, it is possible to prevent the total thickness of the insulating film from increasing due to the thickness of the adhesive layer, and it is possible to suppress such a thickness. Therefore, it is possible to provide a personal authentication device capable of detecting the unevenness data of the finger with high accuracy, and it is possible to improve the matching accuracy as the personal authentication device.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an individual authentication device and a method of manufacturing the same according to the present invention will be described in detail with reference to the drawings. (First Embodiment) FIG. 1 is a schematic diagram showing a configuration of a personal authentication device according to a first embodiment of the present invention. FIG.
(A) and (b) are a sectional view and a top view of the personal authentication device, respectively.

In FIG. 1, 11 is a printed circuit board, 9 is an insulator film, and the insulator film 9 has a thickness of 1 to 20 μm.
A film such as PET (polyethylene terephthalate) or PPS (polyphenylene sulfide) is used. 1a is an output linear electrode array, 2a is an input electrode, both of which are insulating films 9
Are formed on the same surface with each other on the back surface.

The electrodes are formed by a process such as mask evaporation. That is, a stainless steel thin plate processed into a predetermined pattern is fixed to a printed circuit board, a metal film is formed on the entire surface thereof, and the stainless steel thin plate is removed. An electrode can be formed by leaving the metal film. Instead of this method, it is also possible to form a metal pattern by bonding a thin metal plate to a printed circuit board and then forming a mask and performing wet etching.

Here, the interval between the electrodes is about 1/10 mm. The number of electrodes, that is, the length of the electrode array 1a in the longitudinal direction is usually set to a length completely including the second joint from the tip of the finger.

The output electrode 1b and the input electrode 2b are connected to the output electrode 1a
And a pad for connecting the input electrode 2a to a peripheral circuit (detection circuit), the shape of which is the same as or a part of the output electrode 1a and the input electrode 2a. The electrical connection between the output electrode and the output electrode 1b, and between the input electrode 2a and the input electrode 2b,
This is performed using the anisotropic conductive film 10.

A finger 12 whose signal is to be detected is pressed against the insulator film 9 in a direction orthogonal to the electrode arrangement direction. At this time, the output of the oscillator 4 is sequentially connected to the individual electrodes 1a and 1b by switching the analog switch 3 in the length direction of the finger 12. Output electrode 1a,
The output of 1b is received by the input electrodes 2a and 2b, the potential difference generated at both ends of the terminating resistor 8 is detected by the detection circuit 6, and the A / D converter 7
To a digital signal. The timing pulse generator 5 switches the analog switch 3 and the A / D converter
7. Generate a signal to control the sampling timing. Reference numeral 13 denotes a control unit that outputs a control signal of the timing pulse generator 5 and inputs an output signal from the A / D converter 7.

The control section 13 has a storage section in which characteristic information of a finger to be verified is stored in advance. The finger characteristic information stored in the storage unit and the signal related to the finger characteristic output from the A / D converter 7 are compared and collated by the collation unit in the control unit 13.

The signal V (i) thus obtained can be expressed by the following equation. V (i) = R × Vo / (Z (i) + Zf + Zc + R) (1) In equation (1), R is the impedance of the terminating resistor 8, and Vo is the oscillator.
4, Z (i) is the impedance between the i-th output electrode 1a, 1b and the finger 12 due to the capacitive coupling, and Zf is the finger 12
The impedance itself, Zc, is the impedance between the finger 12 and the input electrodes 2a, 2b due to capacitive coupling.

FIG. 7 shows V (i) when the finger is put down. In the place where the finger and the electrode are close to each other as shown by the portion A in the figure, the capacitive coupling between the finger 12 and the output electrode 1a becomes strong, and the impedance Z (i) becomes small. V (i) of the portion takes a large value. Conversely, as shown by the horizontal wrinkle B near the first joint and the horizontal wrinkle C near the second joint,
And the output electrode 1a are not in close contact with each other, the capacitive coupling between the finger 12 and the output electrode 1a is weakened, and the impedance Z (i) is increased. Take a small value.

Therefore, V (i) has a steep drop in that portion. That is, this V (i) has information on the concave and convex pattern of the finger. Hereinafter, V (i) is referred to as a projection signal. Due to the presence of the dielectric film 9, the finger 12 and the electrodes 1a, 2a
The contact electric resistance between them becomes infinite, and the projection signal is more stable without being affected by changes in the state of the finger surface such as sweating.
V (i) is obtained.

In FIG. 7, the output electrode 1a and the input electrode 2a are both coated, but whether only the input electrode 2a is selectively coated or vice versa. Alternatively, a configuration in which both portions of the input electrode 2a and the output electrode 1a are not covered is also possible.

Among these, the output electrode 1a and the input electrode 2a
The case where both are covered is preferable in that the influence of the sweating state of the finger or the like can be removed. In particular, the input electrode 2a
When the thickness of the insulating layer covering the upper portion is reduced, a large detection signal can be obtained. In this case, the thickness of the insulating layer covering the input electrode 2a can be smaller than the thickness of the insulating layer covering the output electrode 1a. If emphasis is placed on obtaining a large detection signal, the insulating layer on the input electrode 2a can be removed. The same applies to the case where the output electrode and the input electrode are exchanged as in a third embodiment described later.

Next, the effects of the present invention will be described. The impedance Z (i) between the finger and the output electrode is the capacitance Cf of the insulator film.
And the reciprocal of the air capacity Ca between the finger and the insulator surface. Cf is inversely proportional to the thickness of the insulating film. The presence of the insulating film is essential for canceling the fluctuation due to the sweating state of the finger as described above, but is an unnecessary component for the detected signal.

The unevenness of a fingerprint is generally considered to be 50 μm or less, but when the insulating film is thick, this component becomes larger. As the insulating film, although there is a conventional material having a thickness of 10 μm or less, an adhesive layer is formed between the electrode and the insulating layer when bonding on the electrode, and the thickness becomes 15 to 25 μm, which is 25 to 35 μm in total. This greatly affected the detection signal.

According to the present invention, since the thickness of the insulator film is directly reflected, a sufficiently thin insulator layer can be easily formed. Note that it can be considered that a thin insulator layer can be easily formed by a general method in a silicon process such as oxide sputtering or spin coating of a resist resin. However, these steps are methods suitable for a silicon or glass substrate, and it is difficult to apply them, for example, when a sensor is configured on a printed board.

In the present invention, the insulating film on which the electrodes are formed may be bonded in the final step of the sensor manufacturing process, and the silicon process or the like is applied to the electrode portion on the insulating layer side before the sensor manufacturing process. It can be used and can correspond to any circuit configuration such as a silicon substrate or a printed circuit board.

(Second Embodiment) FIG. 2 is a schematic diagram showing the configuration of a modification of the finger feature extracting means according to the second embodiment of the individual authentication device of the present invention. 2, the same parts as those in FIG. 1 are denoted by the same reference numerals.

In FIG. 2, a plurality of output electrodes 1a and 1b and input electrodes 2a and 2b are provided, and a plurality of oscillators 24 are connected to the respective electrodes of the output electrodes 1a and 1b, respectively. The oscillator 24 is provided with a timing pulse generator 5 for controlling ON / OFF thereof.

According to the present embodiment, the same effect as that of the first embodiment can be obtained, and a different oscillator can be provided in the longitudinal direction of the finger or the like. Accordingly, detection and collation can be performed efficiently and accurately.

(Third Embodiment) FIG. 3 is a schematic diagram showing the configuration of a modification of the finger feature extraction means according to the third embodiment of the individual authentication device of the present invention. 3, the same parts as those in FIG. 1 are denoted by the same reference numerals.

In FIG. 3, output electrodes 31a and 31b and a plurality of input electrodes 32a and 32b are provided, and output electrodes 31a and 31b are provided.
, 31b are connected to an oscillator 34, and a plurality of input electrodes 3
Analog switch 3 for switching between 2a and 32b for connection
, A detection circuit 6, an A / D converter 7, and a control unit 13 are sequentially connected. According to this embodiment, it is also possible to obtain the same effects as those of the first embodiment.

(Fourth Embodiment) FIG. 4 is a schematic diagram showing the configuration of a modification of the finger feature extraction means according to the fourth embodiment of the individual authentication device of the present invention. 4, the same parts as those in FIG. 1 are denoted by the same reference numerals.

The features of the feature extracting means shown in FIG.
The bandpass filter 41 for limiting the band of the electric signal obtained from the input electrodes 2a and 2b is provided before the detection circuit 6. The band-pass filter 41 is set so that the oscillation frequency of the oscillator 4 is included in the pass band of the filter 41. With this bandpass filter 41, detection and collation with higher accuracy can be performed.

(Fifth Embodiment) Next, as a fifth embodiment, a manufacturing process of the individual authentication device of the present invention will be described. FIG. 8 is a process cross-sectional view illustrating a manufacturing process of the individual authentication device of the present invention.

First, as shown in FIG.
The PET, PPS insulating film 9 is stretched and held, and the metal thin films 1a and 2a for electrodes are formed on the film 9 by a sputtering method, a CVD method or the like. According to these silicon processes, the bond between the electrode metal thin films 1a and 2a and the insulator film 9 can be strengthened. Next, as shown in FIG. 8B, a resist (not shown) is applied to the metal thin films for electrodes 1a and 2a, and after the resist is patterned, the metal thin films 1a and 2a are etched to form an output electrode pattern 1a and an input electrode pattern 2a. I do.

On the other hand, as shown in FIG.
On 11, wiring patterns 1 b and 2 b which are the same as or partially the same as the film 9 side are formed. The same forming method as in the first embodiment can be used. Next, FIG.
As shown in (d), the anisotropic conductive film 10 is bonded onto the electrodes 1b and 2b on the circuit board 11 side. Finally, as shown in FIG. 8 (e), the surfaces of the insulating film 9 on which the electrode patterns 1a and 2a are formed are positioned on the anisotropic conductive film 10 and bonded by heating and pressing. At this time, the anisotropic conductive film 10 plays a role as an adhesive.

Through the above steps, the thickness of the insulating film can be determined only by the film thickness of the insulating film 9 while substantially eliminating the thickness of the adhesive. This is because the anisotropic conductive film 10 plays a role as an adhesive, but also has conductivity. Therefore, it is possible to reduce the thickness of the insulating film, thereby improving the accuracy of unevenness data of a finger or the like, and improving the accuracy of detection and collation.

(Sixth Embodiment) FIG. 5 is a sectional view showing a configuration of a modification of the electrode connection structure according to the sixth embodiment of the individual authentication device of the present invention. 5, the same parts as those in FIG. 1 are denoted by the same reference numerals.

As shown in FIG. 5, in the structure of the present embodiment, the anisotropic conductive film of the structure of the first embodiment is used.
The electrodes 1a, 2a and the electrodes 1b, 2b are directly adhered to each other without using 10. 51 is an adhesive, and the electrodes 1a, 2a
These electrodes are bonded so as to fill the gap between the electrodes 1b and 2b.

As the bonding method, an electrode pattern formed on each surface of the circuit board 11 and the insulating film 9 is used.
After the alignment of 1b, 2b and 1a, 2a, bonding by the adhesive 51 is performed by pressing and heating. In this method, although an adhesive layer 51 is formed between the electrodes 1a and 2a and the electrodes 1b and 2b, the electrodes have a certain surface roughness, and the electrodes are partially in contact with each other, and the electrodes are electrically connected. Can be taken.

According to the present embodiment, the thickness of the insulating film can be determined only by the film thickness of the insulating film 9 without substantially changing the thickness of the adhesive. Therefore, it is possible to reduce the thickness of the insulating film, thereby improving the accuracy of unevenness data of a finger or the like, and improving the accuracy of detection and collation.

(Seventh Embodiment) FIG. 6 is a sectional view showing a configuration of a modification of the electrode connection structure according to the seventh embodiment of the individual authentication apparatus of the present invention. 6, the same parts as those in FIG. 1 are denoted by the same reference numerals.

As shown in FIG. 6, in the structure of the present embodiment, the electrodes 1a and 2a on the insulator film side in the structure of the first embodiment are not used, and the electrode pattern 1b on the circuit board 11 is not used. , 2b, an anisotropic conductive film 10 is adhered thereon, and an insulator film 9 is formed thereon by heating and pressing.

In this case, the electrode pattern on the circuit board 11
1b and 2b become the output electrode and the input electrode as they are. Since the thickness of the insulating film is only the thickness of the insulating film 9 in this embodiment by the adhesion with the anisotropic conductive film 10, the same effect as the structure of the first embodiment can be obtained.

The present invention is not limited to the above embodiment. For example, in the above embodiments, the electrodes are linear and one-dimensionally arranged, but by arranging the electrodes in a matrix, two-dimensional information such as fingerprints can be detected.

The individual to be authenticated is not limited to a finger, but may be skin in general, for example, a palm, and may be an animal as well as a human. In addition, various modifications can be made without departing from the spirit of the present invention.

[0055]

As described in detail above, according to the present invention, the surface of an individual when an individual such as a finger contacts or approaches an array electrode (including a one-dimensional arrangement or a two-dimensional matrix arrangement). In the case of sequentially reading the capacitance between the electrodes and the electrodes and extracting the characteristics of the individual, the unevenness data of the individual can be detected with high accuracy, and a highly accurate personal authentication device can be realized.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing a configuration of a personal authentication device according to a first embodiment of the present invention.

FIG. 2 is a schematic diagram showing a configuration of a personal authentication device according to a second embodiment of the present invention.

FIG. 3 is a schematic diagram showing a configuration of a personal authentication device according to a third embodiment of the present invention.

FIG. 4 is a schematic diagram showing a configuration of a personal authentication device according to a fourth embodiment of the present invention.

FIG. 5 is a sectional view showing a configuration of a personal authentication device according to a sixth embodiment of the present invention.

FIG. 6 is a sectional view showing a configuration of a personal authentication device according to a seventh embodiment of the present invention.

FIG. 7 is an explanatory diagram of a finger characteristic signal according to the present invention.

FIG. 8 is a process cross-sectional view illustrating a manufacturing process of the personal authentication device according to the fifth embodiment of the present invention.

FIG. 9 is a sectional view showing the configuration of a conventional personal authentication device.

[Explanation of symbols]

 1a, 1b: Output electrode 2a, 2b: Input electrode 3: Analog switch 4: Oscillator 5: Timing pulse generator 6: Detection circuit 7: A / D converter 8: Reference resistance 9: Insulator film 10: Anisotropic Conductive film 11… Substrate 12… Finger 41… Band pass filter 51… Adhesive

Continued on the front page (72) Inventor Satoshi Uchida 70 Yanagicho, Yukicho, Kawasaki-shi, Kanagawa Prefecture Inside the Toshiba Yanagimachi Plant Co., Ltd. (72) Inventor Kenichi Ide 70 Yanagimachi Yuki-cho, Kawasaki-shi, Kanagawa Prefecture Toshiba Yanagicho Plant Co., Ltd.

Claims (15)

[Claims] 1. A base, a first electrode group arranged on the base in an array, and an array provided so as to be electrically connected to individual electrodes included in the first electrode group. A second electrode group having individual electrodes, an insulating layer provided on the second electrode group so as to cover the surface of the electrode group, and an individual surface when the individual is pressed against the insulating layer. Feature extraction means for extracting individual characteristic data from the capacitance between the individual electrodes included in the second electrode group; storage means for storing in advance the characteristic information of the individual to be compared; An individual authentication device comprising: a matching unit that matches feature data extracted by a feature extracting unit with feature information stored in the storage unit. 2. A base, a first electrode group disposed on the base in an array, and an anisotropic member provided to be electrically connected to individual electrodes included in the first electrode group. A conductive layer, an insulating layer provided on the anisotropic conductive layer to cover the surface of the conductive layer, and a static layer between the solid surface and the anisotropic conductive layer when the solid is pressed against the insulating layer. Feature extraction means for extracting individual characteristic data from the capacitance, storage means for storing in advance the characteristic information of the individual to be verified, and characteristic data extracted by the characteristic extraction means and stored in the storage means And a matching means for matching the feature information with the identification information. 3. An array provided on the anisotropic conductive layer so as to be electrically connected to individual electrodes included in the first electrode group through the anisotropic conductive layer. The device according to claim 2, further comprising a second electrode group having individual electrodes. 4. An electrode pad group connected to a peripheral circuit is provided on the base at predetermined intervals, and individual electrodes included in the first electrode group are connected to individual pads of the electrode pad group. 4. The individual authentication device according to claim 1, wherein: 5. The first electrode group includes a plurality of output electrodes and an input electrode, an oscillating means is provided on the plurality of output electrodes, and an output from the oscillating means is provided on the plurality of output electrodes. Switching means for switching the output electrodes to individual ones of the output electrodes is connected, and a detection means for detecting an electric signal obtained from the input electrode is provided on the input electrode side. Item 5. The individual authentication device according to any one of Items 1 to 4. 6. The first electrode group includes a plurality of output electrodes and an input electrode, and a plurality of oscillating means are provided corresponding to respective ones of the plurality of output electrodes. Is provided with output control means for controlling ON / OFF of the output from the oscillation means, and the input electrode side is provided with detection means for detecting an electric signal obtained from the input electrode. The individual authentication device according to claim 1, wherein: 7. The first electrode group includes an output electrode and a plurality of input electrodes, an oscillating means is provided on the output electrode side, and an output from the oscillating means is provided to the plurality of input electrodes. Switching means for switching to individual ones of the input electrodes is connected, and a detection means for detecting an electric signal obtained from the input electrode is provided on the plurality of input electrodes. Item 5. The individual authentication device according to any one of Items 1 to 4. 8. The apparatus according to claim 1, further comprising a band limiting unit that limits a band of the electric signal obtained from the input electrode, wherein an oscillation frequency of the oscillating unit is included in a pass band of the band limiting unit. 8. The individual authentication device according to 5 to 7. 9. The device according to claim 5, wherein the insulating layer completely covers the input electrode and the output electrode.
The individual authentication device according to the above. 10. The individual authentication device according to claim 5, wherein the insulating layer has an opening selectively formed on the input electrode and is not covered at the opening. 11. The individual authentication apparatus according to claim 1, wherein the individual is human or animal skin. 12. The individual authentication device according to claim 1, wherein the individual is a finger of a human or an animal. 13. A base, a first electrode group arranged on the base in an array, and an array provided to be electrically connected to individual electrodes included in the first electrode. A second electrode group having individual electrodes, an insulating layer provided on the second electrode group so as to cover the surface of the electrode group, and an individual surface when the individual is pressed against the insulating layer. Feature extraction means for extracting individual characteristic data from the capacitance between the individual electrodes included in the second electrode group; storage means for storing in advance the characteristic information of the individual to be compared; A method for manufacturing an individual authentication device, comprising: matching means for comparing feature data extracted by a feature extracting means with feature information stored in the storage means, wherein the first device is arranged in an array on the substrate. Forming an electrode group, and forming an electrode group on the insulating layer. A step of forming the second electrode group in a lay shape; and a step of bonding individual electrodes included in the first electrode group and the second electrode group so as to be electrically connected to each other. A method for manufacturing an individual authentication device, comprising: 14. A base, a first electrode group arranged on the base in an array, and an anisotropic member provided to be electrically connected to individual electrodes included in the first electrode group. A conductive layer, an insulating layer provided on the anisotropic conductive layer to cover the surface of the conductive layer, and a static layer between the solid surface and the anisotropic conductive layer when the solid is pressed against the insulating layer. Feature extraction means for extracting feature data of an individual from a capacitance;
An individual comprising: a storage unit that stores in advance the characteristic information of the individual to be compared; and a matching unit that compares the characteristic data extracted by the characteristic extraction unit with the characteristic information stored in the storage unit. A method of manufacturing an authentication device, comprising: forming the first electrode group in an array on the base; forming the anisotropic conductive layer on the insulating layer; Bonding the group and the anisotropic conductive layer so as to be electrically connected to each other. 15. A step of forming a second electrode group in an array on the insulating layer, a step of forming the anisotropic conductive layer on the second electrode group, and a step of forming the anisotropic conductive layer on the second electrode group. And bonding the individual electrodes included in each of the first electrode group and the second electrode group so as to be electrically connected to each other via the first electrode group and the second electrode group. Manufacturing method of authentication device.