JPH117892A - Cleaning device and cleaning method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To keep and manage the cleaning effect by monitoring the cleanliness (degree of contamination) of a washing liquid or rinsing liquid. SOLUTION: An electron gun 1 to be cleaned is dipped in a cleaning tank 3, and the material adhered to the electron gun 1 is removed by adding a vibration or ultrasonic wave by an ultrasonic oscillator as occasion demands. The cleaning tank 3 of this cleaning device has an IC 11. In the IC 11, a washing liquid 4 sucked by a pump 11a is passed through a separation column 11b to separate each dissolved ion in the washing liquid 4, and the kind of the ion contained in the washing liquid 4 and its content are detected by a detector cell 11c connected to the rear of the separation column 11b, and displayed. Thus, the cleanliness of the washing liquid 4 can be kept and managed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning apparatus and a cleaning method for an electron gun or an electron gun part enclosed in a cathode ray tube.

[0002]

2. Description of the Related Art An electron gun and electron gun parts to be sealed in a cathode ray tube are completed through a number of assembling and manufacturing processes. At this time, foreign matter is generated by the atmosphere of the manufacturing line, the person involved in the manufacturing, or a jig. Adheres or becomes contaminated. Therefore, before incorporating these electron gun parts and the like into the cathode ray tube, they are cleaned by a cleaning device to remove foreign substances and the like.

FIG. 5 shows a schematic configuration of a conventional electron gun cleaning apparatus, and a cleaning method will be described with reference to FIG.

The electron gun 1 incorporated in the jig 2 for supporting an electron gun is immersed in a cleaning tank 3 filled with a cleaning liquid 4, and the electron gun 1 is driven by ultrasonic waves oscillated by an ultrasonic oscillator 5 installed outside the tank. Foreign matter and the like attached to the surface are removed.

However, when the electron gun 1 is out of the cleaning tank 3, foreign matter in the cleaning liquid 4 remains on the surface thereof. For this reason, while being attached to the jig 2 for supporting the electron gun, it is immersed in the rinsing tank 6 filled with the rinsing liquid 7 to perform rinsing, thereby removing foreign substances and the like remaining on the surface of the electron gun 1.

Each of the cleaning tank 3 and the rinsing tank 6 includes a pump for feeding the cleaning liquid 4 and the rinsing liquid 7, a filter and an ion exchange membrane for maintaining the cleanliness of the liquids 4 and 7, and each tank 3. , 6 is provided with a tank for keeping a constant amount of liquid supplied to the washing tank 3 and the rinsing tank 6 via the water supply pipes 9a, 9b. 4 and a rinsing liquid 7 are supplied.

[0007] Drainage from the washing tank 3 and the rinsing tank 6 is supplied to drainage pipes 10 a and 10 b connected to the tanks 3 and 6.
After being returned to the water supply device 8 through the filter, foreign substances and the like in the liquid are removed by a filter inside the water supply device 8, and then supplied to the washing tank 3 and the rinsing tank 6 again.

[0008] The electron gun 1 cleaned by such a cleaning device is then incorporated into a cathode ray tube through a drying step.

[0009]

However, in the conventional cleaning apparatus described above, if the cleaning liquid or the rinsing liquid itself is contaminated, the effect of the cleaning is reduced.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and a cleaning apparatus and a cleaning apparatus capable of maintaining and managing a cleaning effect by monitoring the cleanliness (contamination degree) of a cleaning liquid and a rinsing liquid. The aim is to provide a method.

[0011]

A cleaning apparatus according to the present invention is a cleaning apparatus for cleaning a cathode ray tube electron gun or electron gun parts, etc., which is disposed in a cleaning tank and a pipe for draining from the cleaning tank or the cleaning tank. And an ion exchange chromatograph device.

A cleaning apparatus according to the present invention is a cleaning apparatus for cleaning a cathode ray tube electron gun or electron gun parts, etc., in a cleaning tank, a rinsing tank, and a drain pipe from the rinsing tank or the rinsing tank. And an ion exchange chromatograph device arranged.

Further, the cleaning apparatus according to the present invention has an electric conductivity detector instead of the ion exchange chromatograph apparatus.

Further, the cleaning apparatus according to the present invention is one in which an electric conductivity detector is arranged together with the ion exchange chromatograph apparatus.

Further, the cleaning method according to the present invention includes a step of measuring an ion concentration of a substance dissolved in the cleaning liquid or the rinsing liquid, and a step of stopping the cleaning when the ion concentration exceeds a predetermined value. It is a thing.

[0016]

BRIEF DESCRIPTION OF THE DRAWINGS FIG.
An embodiment of the present invention will be described.

Embodiment 1 FIG. 1 is a diagram illustrating a main part of the cleaning device according to the first embodiment. In FIG. 1, 11
Is an IC (ion-exchange chromatograph) attached to the washing tank 3 so that the washing liquid 4 in the washing tank 3 can be sucked. The IC 11 includes a pump 11a for sucking the cleaning liquid 4, a separation column 11b, a detector cell 11c, and an alarm display device 11d for displaying a detection result and warning an abnormality.

The substance attached to the electron gun 1 is removed by immersing the electron gun 1 to be cleaned in the cleaning tank 3 and applying vibration or ultrasonic waves by an ultrasonic oscillator 5 or the like as necessary.
Further, the IC 11 passes the washing solution 4 sucked by the pump 11a through the separation column 11b to separate each dissolved ion in the washing solution 4 and is contained in the washing solution 4 by a detector cell 11c connected to the back thereof. The type of ion and its content are detected and displayed on the alarm display device 11d.

In this IC 11, F is used as a main ion.
_{^{-, Cl -, PO 4 3-}} , SO 4 2- can be measured, if the ion content of these exceeds the set value, since evidenced by warning device in IC 11, to stop the washing device, It is possible to eliminate the cause of the trouble, such as replacing the cleaning liquid. If the above-mentioned ions are vaporized after the electron gun is assembled in the cathode ray tube, the emission performance of the cathode ray tube may be rapidly deteriorated. Therefore, it is important to measure the content of these dissolved ion components to reduce the adhesion of these substances to the electron gun.

Embodiment 2 FIG. 2 is a diagram illustrating a main part of a cleaning apparatus according to the second embodiment. The cleaning apparatus according to the second embodiment includes an IC 11 disposed in the cleaning tank 3 according to the first embodiment.
Is attached to the rinsing tank 6, and the dissolved ions contained in the rinsing liquid are measured.

In the cleaning apparatus according to the second embodiment as well, when the ion content of the rinsing liquid exceeds the set value, it is indicated by an alarm device in the IC 11, so that the cleaning apparatus is stopped.
It is possible to eliminate the cause of the trouble, such as replacing the cleaning liquid.

Embodiment 3 FIG. FIG. 3 is a diagram illustrating a main part of a cleaning apparatus according to the third embodiment. The cleaning device of the third embodiment differs from the cleaning device of the first embodiment in that the cleaning tank 3
Has an electric conductivity detector 12 instead of the IC 11. In the electric conductivity detector 12, a voltage is applied to the cleaning liquid 4 flowing therein, and the amount of current flowing in the liquid is detected. By detecting the amount of current, the electric conductivity (specific resistance) of the cleaning liquid 4 can be known.

The value of the electric conductivity correlates with the total number of dissolved ions in the cleaning solution 4,
Although it is impossible to measure a specific ion as in the above, the electric conductivity detector 12 can measure the cleanliness in the cleaning liquid 4 by knowing the total number of ions dissolved in the liquid. It is very effective for the maintenance and management of the cleaning effect.

Embodiment 4 FIG. 4 is a diagram illustrating a main part of a cleaning apparatus according to a fourth embodiment. The cleaning device according to the fourth embodiment attaches the electric conductivity detector 12 disposed in the cleaning tank 3 according to the third embodiment to the rinsing tank 6 and
Is to measure the total number of dissolved ions dissolved in.

Also in the cleaning apparatus of the fourth embodiment, the cleanness of the rinsing liquid 7 can be measured by knowing the total number of ions dissolved in the rinsing liquid by the electric conductivity detector 12. It is very effective for the maintenance and management of the cleaning effect.

In the present invention, the ion concentration of a substance dissolved in the cleaning liquid 4 or the rinsing liquid 7 from the electron gun 1 is measured to maintain and control its cleanliness. The present invention is not limited to the above embodiment. Not something. Therefore, in the above embodiment, both the IC 11 and the electric conductivity detector 12 are arranged in the cleaning tank 3 or the rinsing tank 6, but the IC 1
1. The electric conductivity detector 12 may be arranged in the washing tank 3 or the drainage pipe from the rinsing tank.

That is, in the present invention, the purpose of maintaining and managing cleanliness by providing either the (α) IC 11 or the (β) electric conductivity detector 12 with respect to the cleaning liquid or the rinsing liquid. The cleaning liquid 4 or the rinsing liquid 7 can be maintained and managed more effectively by combining these means (α) and (β).

[0028]

Since the present invention is configured as described above, it has the following effects.

According to the cleaning apparatus of claim 1, of monitoring the dissolved ions in the washing liquid when cleaning the electron gun and the electron gun component in the cleaning liquid _{^{F -, Cl -, PO 4}} 3-, SO
_Since the presence or absence of dissolved ions such as ^{42- and the} like can be monitored and the concentration thereof can be measured, the cleanliness can be maintained and the cleaning effect can be easily managed.

According to the cleaning device of the second aspect, the rinsing tank,
Alternatively, an ion exchange chromatograph is connected to a drain pipe from a rinsing tank to monitor dissolved ions in the rinsing liquid, and to measure F ⁻ and Cl in the rinsing liquid.
^-, PO ₄ ^3-, monitors the presence or absence of dissolution ions SO ₄ ^2-like, and can measure the concentration.

In the cleaning device according to the third aspect, the electric conductivity detector monitors the dissolved impurities in the cleaning liquid or the rinsing liquid and can measure the specific resistance indicating the total number of dissolved ions in the liquid. In addition, the cleaning effect can be easily managed.

In the cleaning device according to the fourth aspect, the use of an electric conductivity detector together with the ion exchange chromatograph device enables more reliable monitoring of dissolved impurities in the liquid.

According to a fifth aspect of the present invention, there is provided a method for measuring an ion concentration of a substance dissolved in a cleaning liquid or a rinsing liquid, and a step of stopping the cleaning when the ion concentration exceeds a predetermined value. Therefore, the cathode ray tube electron gun, electron gun parts and the like can be reliably washed.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a main part front of a cleaning apparatus according to Embodiment 1 of the present invention.

FIG. 2 is a sectional view showing a main part front of a cleaning apparatus according to a second embodiment of the present invention.

FIG. 3 is a sectional view showing a main part front of a cleaning apparatus according to Embodiment 3 of the present invention.

FIG. 4 is a cross-sectional view showing a front part of a main part of a cleaning apparatus according to Embodiment 4 of the present invention.

FIG. 5 is a sectional view showing a conventional cleaning device.

[Explanation of symbols]

1 electron gun, 2 electron gun support jig, 3 cleaning tank,
4 cleaning liquid, 5 ultrasonic oscillator, 6 rinsing tank,
7 Rinse solution, 8 Water supply device, 9a, 9b Water supply piping, 10a, 10b Drainage piping, 11 Ion exchange chromatograph device, 12 Electrical conductivity detector.

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁶ Identification code FI H01J 9/14 H01J 9/14 F 9/18 9/18 B

Claims (5)

[Claims] 1. A cleaning apparatus for cleaning a cathode ray tube electron gun, electron gun parts, or the like, comprising: a cleaning tank; and an ion exchange chromatograph apparatus disposed in the cleaning tank or a drainage pipe from the cleaning tank. Characterized cleaning equipment. 2. A cleaning apparatus for cleaning a cathode ray tube electron gun or electron gun parts, comprising: a cleaning tank, a tin bath, and an ion exchange chromatograph device disposed in a drain pipe from the tin bath or the rinse tank. A cleaning device comprising: 3. The cleaning apparatus according to claim 1, wherein an electric conductivity detector is provided in place of the ion exchange chromatography apparatus. 4. The cleaning device according to claim 1, wherein an electric conductivity detector is arranged together with the ion exchange chromatograph device. 5. A cleaning method for cleaning a cathode ray tube electron gun, electron gun parts, or the like, comprising: a step of measuring an ion concentration of a substance dissolved in a cleaning liquid or a rinsing liquid; and when the ion concentration exceeds a predetermined value. A step of stopping the cleaning.