JPH1175360A - Linear motor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To position the tips of bandlike coils precisely, by providing a fitting strip composed of a tabular fitting strip body and a bent strip projecting from the fitting strip body and bent approximately to ninety degrees, fixing the fitting strip body to a core bar, and fixing the bent strip of the fitting strip to a header as well. SOLUTION: A bent strip 17b is provided by bending the side part of a tabular fitting strip body 17a approximately to ninety degrees, and a fitting strip 17 is constituted. On the occasion of assembly, the fitting strip body 17a of the fitting strip 17 and one leg of a supporting fixture 19 are fitted to a core bar 12 by screwing, along with fitting bandlike coils 11 to specified positions on both surfaces of the core bar 12, and a guide 13 is glued and fixed to the side surface area in addition. And the core bar 12 is inserted into a can 14 fitted with a header 15, and the bent strip 17b of the fitting strip 17 fitted to the core bar 12 is fixed by screwing, touching the side surface of the header 15 fitted to the can 14. Consequently, it becomes possible to position the bandlike coils 11 of the core bar 12 in the axial direction and in the direction of breadth, in the can 14.

Description

DETAILED DESCRIPTION OF THE INVENTION

The present invention relates to a linear motor for driving a processing table or the like of a semiconductor device in an axial direction.

[0002]

2. Description of the Related Art Conventional linear motors are shown in FIGS.
It is configured as shown in FIG. In the figure, 36 is a linear motor, and this linear motor 36 is composed of a mover 21 and a stator 22. The mover 21 has yokes 24 and 25 attached to both legs of a U-shaped support 23. Reference numerals 26 and 27 denote permanent magnets, which are attached to the yokes 24 and 25 and attached to a movable member of a transfer device (not shown) so as to be able to reciprocate integrally with the movable member. The stator 22 is configured as follows. A conductive plate is punched, and a coiled end 28 having a V-shape is formed at one end.
a is provided, and the element coil 28
Are overlapped with each other with insulating paper 33 interposed therebetween to form a belt-shaped coil 29.
And the band-shaped coil 29 is attached to a core bar 30 made of a non-magnetic material. The core metal 30 to which the band-shaped coil 29 is attached
The side portion is attached to the guide 31 and housed in the can 32 integrally with the guide 31. The side coil of the guide 31 and the inner wall of the can 32 are adhered to each other with an adhesive, and the band-shaped coil 29 attached to the guide 31 is attached to the can 32. It was fixed. Then, headers 33 are attached to both ends of the can 32 to constitute the stator 22. Numeral 34 denotes an insulating resin filling the outer periphery of the band-shaped coil 29. The stator 22 thus configured is attached to a fixing member of a transport device (not shown) via a support 35.

[0003]

However, in the conventional linear motor, the band coil 29 is housed integrally with the guide 31 in the can 32, and the tip positions of the band coil are not uniform, so that a necessary thrust can be obtained. could not. For this reason, the guide 31 and the can 3 are positioned by using a jig so that the band-shaped coil 29 comes to a predetermined position in the can 32.
2 was bonded to the inner wall with an adhesive, and the positioning operation was complicated. In addition, the band-shaped coil 29
Is fixed with an adhesive, there is a drawback that the band-shaped coil 29 moves due to the disengagement. Then, an object of the present invention is to be able to accurately position the distal end position of the band-shaped coil, and to securely fix the band-shaped coil to the can.

[0004]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention relates to a method of forming a band-shaped coil formed by laminating two element coils formed of a conductive material with an insulating paper interposed therebetween. And a mover having a permanent magnet opposed to the stator via an air gap, wherein the stator is a linear motor mounted in a can via a header. A mounting piece consisting of a flat mounting piece main body and a bent piece protruding from the mounting piece main body and bent at a substantially right angle is provided. The mounting piece main body is fixed to the core metal, and the bent piece of the mounting piece is provided. Is fixed to the header.

[0005]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below based on an embodiment shown in the drawings. FIG. 1 is a front view of a linear motor without a cover according to an embodiment of the present invention, in which a lower half is a sectional view. 2A and 2B show a linear motor stator according to an embodiment of the present invention. FIG. 2A is a side sectional view of the linear motor stator, and FIG. 2B is a cross section taken along line AA in FIG. FIG. 3 and FIG. 3 are front views of the linear motor with the cover removed. In the figure, reference numeral 1 denotes a linear motor, and the linear motor 1 includes a mover 2 and a stator 3.
The mover 2 is provided with yokes 5 on both legs of a U-shaped support 4.
6 is attached. Reference numerals 7 and 8 denote permanent magnets which are attached to the yokes 5 and 6, and which are attached to a movable member of a transport device (not shown) so as to be able to reciprocate integrally with the movable member. The stator 3 is formed by stamping a conductive plate, and providing an element coil 9 having a U-shaped coil end 9a at one end thereof. Forming a coil 11;
Is attached to the core 12 made of a non-magnetic material. The core metal 12 to which the band-shaped coil 11 is mounted is mounted on a guide 13, and the band-shaped coil 11 is housed in a can 14 integrally with the guide 13. Reference numerals 15 and 16 denote headers attached to the ends of the can 14, and refrigerant inlet / outlets 15a and 16a are provided on side portions. Reference numeral 17 denotes a mounting piece, which is a mounting piece main body 17 made of a flat thin plate.
A bent piece 17b is formed by bending the side portion of a at a substantially right angle, and a mounting hole is provided in the mounting piece main body 17a and the bent piece 17b. A cover 18 covers the opening of the header.
Reference numeral 19 denotes a support formed by bending a thin plate into an L-shape. One of the legs is fixed to the cored bar 12, and the other leg is fixed to the header 16. Reference numeral 20 denotes an insulating resin that fills the outer periphery of the strip-shaped coil 11. Reference numeral 21 denotes a fixing member that supports the stator 3, and the fixing member 21 is attached to a fixing portion of a transport device (not shown). The assembly of the linear motor configured as described above is performed as follows. First, core metal 1
The strip-shaped coil 11 is attached to a predetermined position on both surfaces of the second coil. The attachment piece main body 17a of the attachment piece 17 and one leg of the support 19 are attached to the cored bar 12 by screwing. A guide 13 is bonded and fixed to the side surface of the cored bar 12. Next, the mounting piece 1 is attached to the can 14 to which the header 15 is mounted.
7. Insert the metal core 12 to which the support 19 and the guide 13 are attached. The bent piece 17b of the attachment piece 17 attached to the cored bar 12 is brought into contact with the side surface of the header 15 attached to the can 14 and screwed and fixed. As a result, the band-shaped coil 11 of the cored bar 12 is positioned in the can 14 in the axial direction and the width direction. Next, the other leg of the support 19 is fixed to the other end of the metal core 12 and the header 16, and the metal core 12
Is fixed to the header 16. In this case, the core metal 12 to which the band-shaped coil 11 is mounted is fixed by screwing with the mounting piece 17, so that the band-shaped coil 11 is securely fixed.

[0006]

As described above, according to the present invention, the tip position of the strip coil can be accurately positioned in the can, and the strip coil can be securely fixed to the can.

[Brief description of the drawings]

FIG. 1 is a front view of a linear motor without a cover according to an embodiment of the present invention, in which a lower half is a cross-sectional view.

2A and 2B show a stator of a linear motor according to an embodiment of the present invention, in which FIG. 2A is a side sectional view of the stator, and FIG. 2B is a sectional view taken along line AA in FIG. is there.

FIG. 3 is a front view of the linear motor according to the embodiment of the present invention with the cover of the linear motor removed.

FIG. 4 is a front sectional view in which the internal structure of a conventional linear motor is omitted.

FIG. 5 is a side sectional view of a conventional linear motor.

FIG. 6 is a sectional view taken along the line BB of FIG. 6;

[Explanation of symbols]

1 linear motor, 2 mover, 3 stator, 4
Supporting stand, 5, 6 yoke, 7, 8 permanent magnet, 9
Element coil 10 Insulation paper, 11 Strip coil, 12 core metal,
13 Guide, 14 Can, 15, 16 Header,
15a, 16a Injection outlet, 17 mounting piece, 17a
Mounting piece body, 17b bent piece, 18 cover, 1
9 Supports

Claims (1)

[Claims] 1. A stator having two element coils formed of a conductive material bonded to each other with an insulating paper interposed therebetween, and a band-shaped coil fixed to both surfaces of a non-magnetic core metal, and a gap between the stator and the stator. A linear motor mounted in the can via a header, wherein the stator has a plate-shaped mounting piece main body, and a substantially right angle protruding from the mounting piece main body. A linear motor, comprising: a mounting piece composed of a bent piece bent into a fixed shape, a mounting piece body fixed to the cored bar, and a bent piece of the mounting piece fixed to the header. [0001]