JPH1172605A - Mirror and lens with variable curvature - Google Patents

Mirror and lens with variable curvature

Info

Publication number
JPH1172605A
JPH1172605A JP9233580A JP23358097A JPH1172605A JP H1172605 A JPH1172605 A JP H1172605A JP 9233580 A JP9233580 A JP 9233580A JP 23358097 A JP23358097 A JP 23358097A JP H1172605 A JPH1172605 A JP H1172605A
Authority
JP
Japan
Prior art keywords
mirror
concave
crystal
electrostriction
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9233580A
Other languages
Japanese (ja)
Inventor
Takashi Yamamoto
貴史 山本
Fumio Matsuzaka
文夫 松坂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
Original Assignee
IHI Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IHI Corp filed Critical IHI Corp
Priority to JP9233580A priority Critical patent/JPH1172605A/en
Publication of JPH1172605A publication Critical patent/JPH1172605A/en
Pending legal-status Critical Current

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  • Optical Elements Other Than Lenses (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PROBLEM TO BE SOLVED: To obtain a small-size inexpensive mirror with variable curvatures by using a single electrostriction crystal to constitute the mirror, shaping the faces perpendicular to the electrostriction direction of the crystal into concave or convex faces, and applying a mirror coating on the curved face. SOLUTION: This reflection mirror 1 consists of a single electrostriction element. The reflection mirror 1 has a cross section like a hand drum having parallel top and bottom lines and concave sides. Positive voltage is applied on the upper face 1a, while negative voltage is applied on the lower face 1b. Metal thin films are deposited by vapor deposition on the upper and lower faces 1a, 1b, and voltage is uniformly applied on the electrostriction element to effectively cause deformation. Either of the concave faces 1c is coated with a mirror coating 2. As for the mirror coating 2, a vapor deposition plating film of a metal is used. By adding voltage in the perpendicular direction to the electrostriction direction of the single electrostriction crystal having a drum- like cross section, the curvature of the concave face 1c changes due to the difference in the thickness in the cross section along the height direction. Thus, the curvature of the mirror face also changes.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、電歪結晶に電圧を
印加して表面の曲率を変化させる曲率可変ミラーおよび
レンズに関する。
[0001] 1. Field of the Invention [0002] The present invention relates to a variable curvature mirror and a lens which change the curvature of the surface by applying a voltage to an electrostrictive crystal.

【0002】[0002]

【従来の技術】天体望遠鏡などの大口径反射鏡は、温度
環境や姿勢が変化した場合に、その表面形状が変化し結
像系としての性能が劣化する。姿勢の変化で鏡面の変形
を起こさせないためには鏡材を厚くする必要があるが、
これは重量が増してコスト増大につながる上、熱変形に
はかえってマイナスとなる。このため鏡面の背面に複数
のアクチュエータを設け鏡面形状の変形に応じて修正制
御を行っている。アクチュエータとしてはサーボモータ
とボールネジを利用した電気機械的方法、電歪素子を用
いたピェゾ的方法、および静電的方法などが用いられて
いる。
2. Description of the Related Art When a temperature environment or posture changes, the surface shape of a large-aperture reflector such as an astronomical telescope changes, and the performance as an imaging system deteriorates. It is necessary to make the mirror material thicker in order to prevent the mirror surface from deforming due to changes in posture,
This leads to an increase in weight due to an increase in cost and a negative effect on thermal deformation. For this reason, a plurality of actuators are provided on the back surface of the mirror surface, and correction control is performed according to the deformation of the mirror surface shape. As the actuator, an electromechanical method using a servomotor and a ball screw, a piezo method using an electrostrictive element, an electrostatic method, and the like are used.

【0003】図5は電歪素子を多数用いて鏡面の曲率を
変化させる装置の概念図を示す。(A)は凹面鏡、
(B)は凸面鏡である。鏡面は可撓性の材料で構成され
ており、その背面に多数の電歪素子を配置し、各電歪素
子に図示しない電圧印加装置と変位計測装置を設け、制
御装置により各電歪素子の変位のフィードバック制御を
行い鏡面を正確に変形させる。図5は2次元を示すが、
3次元に広がっている装置もあり、この場合、3次元に
配置された電歪素子が鏡面の3次元変形制御を行う。
FIG. 5 is a conceptual diagram of an apparatus for changing the curvature of a mirror surface using a large number of electrostrictive elements. (A) is a concave mirror,
(B) is a convex mirror. The mirror surface is made of a flexible material, a large number of electrostrictive elements are arranged on the back surface, a voltage application device and a displacement measuring device (not shown) are provided for each electrostrictive device, and a control device controls each electrostrictive device. The mirror surface is deformed accurately by feedback control of the displacement. FIG. 5 shows two dimensions,
Some devices are spread three-dimensionally. In this case, a three-dimensionally arranged electrostrictive element controls three-dimensional deformation of a mirror surface.

【0004】[0004]

【発明が解決しようとする課題】このように従来の曲率
や形状を変化させる鏡面は、多数の電歪素子を使用し各
電歪素子を制御する複雑な装置を必要とするものである
ため、大型で高価なものとなっていた。また鏡面の裏面
に多数の電歪素子を配置するため、鏡面を光が一部透過
するハーフミラーとしての使用やレンズとしての使用は
できなかった。
As described above, the conventional mirror surface for changing the curvature and the shape requires a complicated apparatus for controlling each of the electrostrictive elements by using a large number of electrostrictive elements. They were large and expensive. Further, since a large number of electrostrictive elements are arranged on the back surface of the mirror surface, it cannot be used as a half mirror that partially transmits light through the mirror surface or as a lens.

【0005】本発明は上述の問題点に鑑みてなされたも
ので、1個の電歪素子で鏡面や半透明鏡面、またはレン
ズを構成し曲面の曲率を電圧の印加により変化させるよ
うにした曲率可変のミラーまたはレンズを提供すること
を目的とする。
SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and has a structure in which a single electrostrictive element constitutes a mirror surface, a translucent mirror surface, or a lens, and the curvature of the curved surface is changed by applying a voltage. It is intended to provide a variable mirror or lens.

【0006】[0006]

【課題を解決するための手段】上記目的を達成するた
め、請求項1の発明では、単一の電歪結晶からなり、そ
の結晶の電歪する方向と直交する面を凹面又は凸面に形
成し、その面に鏡面コーティングを施す。
In order to achieve the above object, according to the first aspect of the present invention, a single electrostrictive crystal is formed with a concave or convex surface perpendicular to the direction of electrostriction of the crystal. , A mirror coating is applied to the surface.

【0007】横断面が鼓や太鼓のようになった単一の電
歪結晶の電歪する方向と直交する方向から電圧を加える
と、横断面の厚みが高さ方向で異なるため、凹曲面又は
凸曲面の曲率が変化する。これにより鏡面の曲率も変化
する。
When a voltage is applied in a direction perpendicular to the direction of electrostriction of a single electrostrictive crystal whose cross section looks like a drum or a drum, the thickness of the cross section differs in the height direction, so that a concave curved surface or The curvature of the convex surface changes. This also changes the curvature of the mirror surface.

【0008】請求項2の発明では、前記凹面又は凸面が
凹球面又は凸球面である。
[0008] In the invention of claim 2, the concave surface or the convex surface is a concave spherical surface or a convex spherical surface.

【0009】凹面又は凸面を凹球面又は凸球面とするこ
とにより、曲面の加工が容易になり、かつ正確に加工す
ることができる。
By making the concave or convex surface a concave spherical surface or a convex spherical surface, processing of a curved surface becomes easy and accurate.

【0010】請求項3の発明では、前記電歪結晶の電圧
を印加する対峙した両面に金属製薄膜を付着させる。
According to a third aspect of the present invention, a metal thin film is attached to both sides of the electrostrictive crystal where voltage is applied.

【0011】電圧を印加する対峙した両面に金属製薄膜
を付着させることにより、電圧を電歪結晶に均一に印加
することができ、曲面を正確に変形させることができ
る。
By attaching a metal thin film to both surfaces facing each other to which a voltage is applied, a voltage can be uniformly applied to the electrostrictive crystal, and the curved surface can be accurately deformed.

【0012】請求項4の発明では、前記電歪結晶が透明
で、前記鏡面コーティングが半透明である。
In the invention according to claim 4, the electrostrictive crystal is transparent and the mirror coating is translucent.

【0013】電歪結晶を透明とし鏡面コーティングを半
透明とすることにより、ハーフミラーを構成することが
できる。
A half mirror can be formed by making the electrostrictive crystal transparent and the mirror surface coating translucent.

【0014】請求項5の発明では、単一の透明な電歪結
晶からなり、その結晶の電歪する方向と直交する面を凹
面又は凸面に形成する。
According to a fifth aspect of the present invention, a single transparent electrostrictive crystal is formed, and a surface orthogonal to the direction of electrostriction of the crystal is formed as a concave surface or a convex surface.

【0015】電歪結晶が透明で、その結晶の電歪する方
向と直交する面を凹面又は凸面に形成してあるので、電
圧を印加することにより焦点距離を可変とするレンズを
得ることができる。
Since the electrostrictive crystal is transparent and the surface orthogonal to the direction of electrostriction of the crystal is formed as a concave surface or a convex surface, it is possible to obtain a lens whose focal length can be varied by applying a voltage. .

【0016】[0016]

【発明の実施の形態】以下、本発明の実施形態について
図面を参照して説明する。図1は第1実施形態の反射鏡
1の斜視図である。反射鏡1は単一の電歪素子より構成
されている。反射鏡1は上下が平行で左右が凹曲線の鼓
状の横断面を有し、上面1aには正電圧が印加され、下
面1bには負電圧が印加される。上下面1a,1bには
金属製薄膜が蒸着などにより付着されており、電歪素子
に均一に電圧が印加され、効果的に変形させることがで
きる。左右の凹曲面1cの何れかには鏡面コーティング
2が施されている。鏡面コーティング2としては金属の
蒸着メッキなどが用いられる。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view of the reflecting mirror 1 of the first embodiment. The reflecting mirror 1 is composed of a single electrostrictive element. The reflecting mirror 1 has a drum-shaped cross section with a parallel top and bottom and a concave curve on the left and right. A positive voltage is applied to the upper surface 1a and a negative voltage is applied to the lower surface 1b. A metal thin film is adhered to the upper and lower surfaces 1a and 1b by vapor deposition or the like, so that a voltage is uniformly applied to the electrostrictive element and the element can be effectively deformed. A mirror coating 2 is applied to one of the left and right concave curved surfaces 1c. As the mirror surface coating 2, a metal vapor deposition plating or the like is used.

【0017】図2は反射鏡1の圧電効果による凹曲面1
cの曲率変化を説明する図である。電歪素子の結晶に応
力を加えると、それに比例する大きさの分極(1m3
の電気双極子)が生ずる。結晶の両端が電気的に開放さ
れていると、その間に電圧が生じ、短絡されていると応
力をかけている間に電荷の流れが起きる。逆に、その結
晶のある一対の面の間に電圧をかけると、結晶に歪みが
起こる。互いに逆なこれら2つの効果を圧電効果とい
う。圧電性に必要な条件は、結晶構造が対称の中心を持
たないということである。
FIG. 2 shows a concave surface 1 due to the piezoelectric effect of the reflecting mirror 1.
It is a figure explaining the curvature change of c. When stress is applied to the crystal of the electrostrictive element, a polarization (electric dipole in 1 m 3 ) of a magnitude proportional thereto is generated. When both ends of the crystal are electrically open, a voltage is generated therebetween, and when short-circuited, a flow of electric charge occurs during the application of stress. Conversely, when a voltage is applied between a pair of faces of the crystal, the crystal is distorted. These two effects opposite to each other are called a piezoelectric effect. A necessary condition for piezoelectricity is that the crystal structure has no center of symmetry.

【0018】図2に示すように反射鏡1の厚みは凹曲面
1cのため高さ方向の位置によって異なっている。この
ように高さ方向の位置により厚みが異なるため、上下面
1a,1bより電圧を印加すると一様な変形とはなら
ず、破線に示すように曲率が変化し、曲率半径もR0か
らR1に変化する。反射鏡1の材質、形状、大きさを一
定とすると、曲率の変化と印加電圧の間には一定の関係
があり、これらを予め求めておくことにより所望の曲率
とこれを発生する印加電圧の値がわかる。
As shown in FIG. 2, the thickness of the reflecting mirror 1 differs depending on the position in the height direction due to the concave curved surface 1c. As described above, since the thickness differs depending on the position in the height direction, when a voltage is applied from the upper and lower surfaces 1a and 1b, the deformation is not uniform, the curvature changes as indicated by the broken line, and the radius of curvature changes from R0 to R1. Change. Assuming that the material, shape, and size of the reflecting mirror 1 are constant, there is a fixed relationship between the change in curvature and the applied voltage. By obtaining these in advance, it is possible to obtain a desired curvature and an applied voltage that generates this. You know the value.

【0019】次に第2実施形態を説明する。本実施形態
は第1実施形態において、電歪素子を透明な石英などで
構成し、鏡面コーティングを半透明の膜とし、左右いず
れかの凹曲面1cに設け、他は第1実施形態とほぼ同じ
である。これによりハーフミラーを形成することができ
る。電圧を印加することにより、このハーフミラーの曲
率を第1実施形態と同様に変化することができる。
Next, a second embodiment will be described. This embodiment is the same as the first embodiment, except that the electrostrictive element is made of transparent quartz or the like, the mirror coating is a translucent film, and is provided on one of the left and right concave curved surfaces 1c. It is. Thereby, a half mirror can be formed. By applying a voltage, the curvature of the half mirror can be changed as in the first embodiment.

【0020】次に第3実施形態を説明する。本実施形態
は第2実施形態において、半透明の鏡面コーティングを
施さずレンズとして用いた場合を示す。電圧を印加する
ことにより、このレンズの曲率を第1実施形態と同様に
変化することができる。以上の実施形態では両面とも凹
曲面としたが、片面だけでも曲面の変形は可能であり、
いずれかの面を凹面または凸面とする。
Next, a third embodiment will be described. This embodiment shows a case in which a translucent mirror coating is used as a lens in the second embodiment. By applying a voltage, the curvature of the lens can be changed as in the first embodiment. In the above embodiment, both surfaces are concave curved surfaces, but the curved surface can be deformed on only one surface,
Either surface is concave or convex.

【0021】図3は第1〜3実施形態の変形例を示す。
第1〜3実施形態では電歪素子の左右の曲面は凹曲面と
したが、これを凸曲面にしたものである。凸曲面にして
も上下面より電圧を印加することにより破線で示すよう
に曲率を変化させることができる。なお、この場合も片
側のみ凸面としてもよい。
FIG. 3 shows a modification of the first to third embodiments.
In the first to third embodiments, the left and right curved surfaces of the electrostrictive element are concave curved surfaces, but are formed as convex curved surfaces. Even if the surface is a convex curved surface, the curvature can be changed as shown by a broken line by applying a voltage from the upper and lower surfaces. Also in this case, only one side may be a convex surface.

【0022】図4は第1〜3実施形態の他の変形例を示
す。第1〜3実施形態では電歪素子の左右の曲面は凹曲
面としたが、これを凹球面としたものである。凹球面と
することにより加工が容易となり、かつ加工精度が向上
する。電圧を印加することにより球面の変形が可能であ
る。この場合も片側のみ球面としてもよい。さらに凸球
面としてもよい。
FIG. 4 shows another modification of the first to third embodiments. In the first to third embodiments, the left and right curved surfaces of the electrostrictive element are concave curved surfaces, but these are concave spherical surfaces. By making it a concave spherical surface, processing becomes easy and processing accuracy improves. By applying a voltage, the spherical surface can be deformed. Also in this case, only one side may be spherical. Further, it may be a convex spherical surface.

【0023】[0023]

【発明の効果】以上の説明から明らかなように、本発明
は、単一の電歪結晶からなり、その結晶の電歪する方向
と直交する面を凹面又は凸面に形成し、電圧を印加する
ことにより、凹面または凸面の曲面を変化させることが
できる。この凹面または凸曲面に鏡面コーティングする
ことにより曲面変化する鏡が得られ、電歪素子を透明な
結晶とし、半透明の鏡面コーティングをすることによ
り、曲面変化するハーフミラーが得られる。また電歪素
子を透明な結晶とし、鏡面コーティングをせず、そのま
ま用いることにより、曲面変化するレンズを得ることが
できる。曲面を球面とすると加工し易く精度のよい曲面
が得られる。
As is apparent from the above description, the present invention comprises a single electrostrictive crystal, and forms a concave or convex surface perpendicular to the direction of electrostriction of the crystal and applies a voltage. Thereby, the concave or convex curved surface can be changed. A mirror having a curved surface can be obtained by coating the concave or convex surface with a mirror surface, and a half mirror having a curved surface can be obtained by making the electrostrictive element a transparent crystal and applying a semi-transparent mirror surface coating. In addition, a lens having a curved surface can be obtained by using the electrostrictive element as a transparent crystal and using it as it is without performing mirror coating. When the curved surface is a spherical surface, it is easy to process and a highly accurate curved surface can be obtained.

【図面の簡単な説明】[Brief description of the drawings]

【図1】第1実施形態を示す斜視図である。FIG. 1 is a perspective view showing a first embodiment.

【図2】曲率変化を説明する図である。FIG. 2 is a diagram illustrating a change in curvature.

【図3】曲面を凸面とした場合を示す図である。FIG. 3 is a diagram showing a case where a curved surface is a convex surface.

【図4】曲面を球面とした場合を示す図である。FIG. 4 is a diagram showing a case where a curved surface is a spherical surface.

【図5】従来の鏡面変形を行う構成を示す図で、(A)
は凹面鏡、(B)は凸面鏡を示す。
FIG. 5 is a diagram showing a configuration for performing conventional mirror surface deformation, and FIG.
Indicates a concave mirror, and (B) indicates a convex mirror.

【符号の説明】[Explanation of symbols]

1 反射鏡 1a 上面 1b 下面 1c 凹曲面 2 鏡面コーティング DESCRIPTION OF SYMBOLS 1 Reflecting mirror 1a Upper surface 1b Lower surface 1c Concave curved surface 2 Mirror coating

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 単一の電歪結晶からなり、その結晶の電
歪する方向と直交する面を凹面又は凸面に形成し、その
面に鏡面コーティングを施した、ことを特徴とする曲率
可変ミラー。
1. A variable curvature mirror comprising a single electrostrictive crystal, a surface orthogonal to the direction of electrostriction of the crystal is formed as a concave surface or a convex surface, and the surface is mirror-coated. .
【請求項2】 前記凹面又は凸面が凹球面又は凸球面で
ある、請求項1記載の曲率可変ミラー。
2. The variable curvature mirror according to claim 1, wherein the concave or convex surface is a concave or convex spherical surface.
【請求項3】 前記電歪結晶の電圧を印加する対峙した
両面に金属製薄膜を付着させた、請求項1または2記載
の曲率可変ミラー。
3. The variable curvature mirror according to claim 1, wherein a metal thin film is attached to both sides of the electrostrictive crystal where voltage is applied.
【請求項4】 前記電歪結晶が透明で、前記鏡面コーテ
ィングが半透明である、請求項1ないし3のいずれかに
記載の曲率可変ミラー。
4. The variable curvature mirror according to claim 1, wherein said electrostrictive crystal is transparent, and said specular coating is translucent.
【請求項5】 単一の透明な電歪結晶からなり、その結
晶の電歪する方向と直交する面を凹面又は凸面に形成し
た、ことを特徴とする曲率可変レンズ。
5. A variable curvature lens comprising a single transparent electrostrictive crystal, wherein a surface orthogonal to the direction of electrostriction of the crystal is formed as a concave surface or a convex surface.
JP9233580A 1997-08-29 1997-08-29 Mirror and lens with variable curvature Pending JPH1172605A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9233580A JPH1172605A (en) 1997-08-29 1997-08-29 Mirror and lens with variable curvature

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9233580A JPH1172605A (en) 1997-08-29 1997-08-29 Mirror and lens with variable curvature

Publications (1)

Publication Number Publication Date
JPH1172605A true JPH1172605A (en) 1999-03-16

Family

ID=16957303

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9233580A Pending JPH1172605A (en) 1997-08-29 1997-08-29 Mirror and lens with variable curvature

Country Status (1)

Country Link
JP (1) JPH1172605A (en)

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US7385755B2 (en) 2003-05-14 2008-06-10 Koninklijke Philips Electronics, N.V. Adjustable mirror
US7567374B2 (en) 2004-06-22 2009-07-28 Bae Systems Plc Deformable mirrors
JP2015018095A (en) * 2013-07-10 2015-01-29 日本電信電話株式会社 Variable focus mirror
CN104898269A (en) * 2014-01-27 2015-09-09 光引研创股份有限公司 Photonic apparatus
JP2015172730A (en) * 2014-01-27 2015-10-01 フォアルクス インコーポレイテッドForelux Inc. Photonic apparatus with periodic structures
CN108406097A (en) * 2018-05-29 2018-08-17 深圳光韵达光电科技股份有限公司 A kind of laser processing device and processing method being suitable for processing superhard material
US10677965B2 (en) 2014-01-27 2020-06-09 Forelux Inc. Optical apparatus for non-visible light applications
CN114390812A (en) * 2020-10-16 2022-04-22 维沃移动通信有限公司 Shell of electronic equipment, electronic equipment and control method and control device of electronic equipment

Cited By (13)

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WO2002013193A1 (en) * 2000-08-02 2002-02-14 Matsushita Electric Industrial Co., Ltd. Optical pickup device
US6836459B2 (en) 2000-08-02 2004-12-28 Matsushita Electric Industrial Co., Ltd. Optical pickup device
US7385755B2 (en) 2003-05-14 2008-06-10 Koninklijke Philips Electronics, N.V. Adjustable mirror
US7567374B2 (en) 2004-06-22 2009-07-28 Bae Systems Plc Deformable mirrors
CN100355935C (en) * 2004-07-19 2007-12-19 精碟科技股份有限公司 Optical element film coated appliance
JP2015018095A (en) * 2013-07-10 2015-01-29 日本電信電話株式会社 Variable focus mirror
CN104898269A (en) * 2014-01-27 2015-09-09 光引研创股份有限公司 Photonic apparatus
JP2015172730A (en) * 2014-01-27 2015-10-01 フォアルクス インコーポレイテッドForelux Inc. Photonic apparatus with periodic structures
US10539719B2 (en) 2014-01-27 2020-01-21 Forelux Inc. Photonic apparatus with periodic structures
US10677965B2 (en) 2014-01-27 2020-06-09 Forelux Inc. Optical apparatus for non-visible light applications
CN108406097A (en) * 2018-05-29 2018-08-17 深圳光韵达光电科技股份有限公司 A kind of laser processing device and processing method being suitable for processing superhard material
CN114390812A (en) * 2020-10-16 2022-04-22 维沃移动通信有限公司 Shell of electronic equipment, electronic equipment and control method and control device of electronic equipment
CN114390812B (en) * 2020-10-16 2024-01-30 维沃移动通信有限公司 Housing of electronic equipment, control method and control device of electronic equipment

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