JPH1154969A - Heat sink - Google Patents

Abstract

PROBLEM TO BE SOLVED: To keep only part of measurement objects of various sizes at a fixed temperature, by adjusting an interval between a pair of supporting members according to the size of a measurement object. SOLUTION: A first body block 1 and a second body block 2 are arranged spaced a fixed interval apart, and first and second narrow supporting blocks 3, 4 which are almost as high as the blocks 1, 2 are arranged in the fixed interval with edge faces thereof opposed. Two large bolt holes are formed at a central part of each of the blocks 1, 2 parallel lengthwise, and large bolts 7, 8 are screwed to the large bolt hole in the second body block 2 passing through the first body block 1. The blocks 1, 2 and the supporting blocks 3, 4 are fixed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heat sink for maintaining a temperature of an object to be measured in measuring a thermal parameter of the object to be measured.

[0002]

2. Description of the Related Art Conventionally, there are many documents on measurement of thermal parameters, for example, thermal expansion coefficient of a relatively thin substrate such as a glass substrate. In the measurement of the thermal parameter, only a part of the measurement object (substrate) is maintained at a constant temperature, and the temperature of the other part is changed.

More specifically, in measuring the thermal parameters of a glass substrate, heat is caused to flow from the center to the both ends of the glass substrate. For this reason, the central portion of the glass substrate is heated because the heat is applied thereto, while both ends are kept at room temperature.

[0004]

However, in the above-mentioned literature relating to the measurement of the thermal parameter of the substrate, only a part of the object to be measured is maintained at a constant temperature, and the other part is made to vary in temperature. The means for performing this, in particular, the means for maintaining only a part of the object to be measured at a constant temperature, is not described in detail.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and in measuring thermal parameters of a substrate, only a part of an object to be measured having various dimensions can be maintained at a constant temperature. Another object of the present invention is to provide a heat sink having a simple structure.

[0006]

SUMMARY OF THE INVENTION The present invention relates to a heat sink for maintaining the temperature of an object to be measured, the heat sink being provided on the heat sink body and supporting both ends of the object to be measured. A heat sink, comprising: a pair of support members; and a holding member for pressing an object to be measured on the support member, wherein an interval between the pair of support members can be adjusted according to a dimension of the object to be measured. .

Further, the present invention is a heat sink for maintaining the temperature of an object to be measured, wherein the heat sink is sandwiched between a pair of body blocks arranged at a predetermined interval, and It is characterized by comprising a pair of support blocks arranged so as to have a possible interval, and a pair of holding blocks for holding the ends of the measurement target to fix the measurement target on the support block. Is provided.

According to these configurations, in measuring the thermal parameters of the substrate, the object to be measured can be stably fixed, and only a part thereof can be maintained at a constant temperature. Can be adjusted, so that it can be applied to measurement objects of various dimensions (length and thickness) without additional members, and has a simple structure.

[0009]

Embodiments of the present invention will be specifically described below with reference to the accompanying drawings. FIG. 1 is a perspective view showing a heat sink according to one embodiment of the present invention. This heat sink is mainly composed of six blocks made of aluminum. Specifically, a relatively large first main body block 1 and a second main body block 2 are arranged at predetermined intervals. The predetermined interval is set to such an extent that first and second support blocks 3, 4 described later can be inserted. Therefore, the predetermined interval is appropriately set according to the width of the first and second support blocks 3 and 4.

As shown in FIGS. 2 (a) to 2 (c), the center of each of the first and second main body blocks is
The two large bolt holes 1a and 2a are formed vertically in parallel. The large bolt hole 1a of the first main body block 1 is a through hole, and the large bolt hole 2a of the second main body block 2 is a hole that is not penetrated and is threaded. This 2
The two large bolt holes 1a and 2a
8 is screwed into the second main body block 2 through the first main body block 1, and by tightening the large bolts 7, 8, the first and second main body blocks 1, 2 and 1 In addition, the second support blocks 3 and 4 can be fixed.

Between the first and second body blocks 1 and 2, the first and second support blocks 3 which are almost the same height as the first and second body blocks 1 and 2 and have a narrow width. ,
4 are arranged with their end faces facing each other. This first
And the second support blocks 3 and 4 are arranged at predetermined intervals between their end faces. The predetermined interval is set so that only both end portions of the substrate 13 can be supported on the first and second support blocks. Therefore, the predetermined interval is appropriately set according to the length of the substrate 13. Further, the first and second support blocks 3 and 4 are arranged at positions where they do not obstruct the large bolts 7 and 8.

The first and second support blocks 3, 4 are
As shown in FIGS. 3A to 3C, first small bolt holes 3a and 4a are formed on the upper surface, respectively. The first small bolt holes 3a and 4a are threaded. Further, two notched portions 3b, 4b are formed on the facing end surfaces of the first and second support blocks 3, 4.
The large bolts 7, 8 are inserted into the spaces formed by the notches 3b, 4b even when the opposed end faces of the first and second support blocks 3, 4 abut. It is formed to the extent possible.

The first and second support blocks 3, 4
From above, both ends of the substrate 13 are supported respectively. Thermal conductive grease is applied between the substrate 13 and the first and second support blocks 3 and 4 as needed.

Also, the first and second support blocks 3,
First and second substrate pieces 11 and 12 made of the same material as the substrate 13 are arranged on the outer end side of the upper surface of the substrate 4. The first and second substrate pieces 11, 12 are:
Since it serves as a spacer between first and second holding blocks 5 and 6 and first and second supporting blocks 3 and 4 described later, it is desirable that the thickness be the same as that of the substrate 13.

On one end of the first substrate piece 11 and one end of the substrate 13, a first holding block 5 is mounted.
On the other end of the substrate piece 12 and the substrate 13, a second holding block 6 is placed.

The first and second holding blocks 5, 6
As shown in FIGS. 4A to 4C, concave portions 5 a and 6 a are respectively formed on the upper surface, and second small bolt holes 5 b and 6 b which are through holes are formed. . Therefore, the small bolts 9 and 10 are respectively connected to the first and second bolts.
By screwing the first and second support blocks 3 and 4 with the first small bolt holes 3a and 4a via the second small bolt holes 5b and 6b of the holding block, as shown in FIG. , The first and second holding blocks 5 and 6
3 can be fixed.

Next, the case where the thermal characteristics of the substrate are actually measured by the heat sink having the above configuration will be described. FIG. 6 is a diagram for explaining the flow of heat in the heat sink of the present invention. The substrate used here is a glass substrate having a length of 70 mm, a width of 10 mm, and a thickness of 1 mm. In this case, a length adjustment of several cm can be performed.
This length adjustment is appropriately performed according to the material of the substrate to be measured.

First, before measurement, nickel is sputtered on the surface of the glass substrate 13 to form two nickel wires 14 and 15 having a length of 1 cm (width of the substrate), a width of 100 μm and a thickness of 100 nm. . These two nickel wires 1
4 and 15 are formed at the center of the glass substrate 13 with an interval of 1 to 2 mm. The resistance value of the nickel wire having a length of 1 cm is usually 100Ω.

Next, the glass substrate 13 is placed on the first and second support blocks 3 and 4 so that one nickel wire 14 is located at the center of the heat sink. At this time, the first and second support blocks 3 and 4 are arranged at an interval such that the central portion of the glass substrate 13 is not supported and only the both ends are supported. Further, between the first and second support blocks 3 and 4 and the glass substrate 13, a thermally conductive grease (vacuum grease) is applied so as to improve the thermal conductivity.

A heater is formed by connecting a wire to the nickel wire 14 and connecting the wire to a pulse generator (not shown). Another nickel wire 1
5 is connected to a computer (neither is shown) via an amplifier and an analog-digital converter to form a thermometer. The wires and devices required for such a measurement can be housed in a heat sink.

Next, the nickel wire 14 is supplied from the pulse generator.
Send voltage pulse to The pulse at this time is as shown in FIG.
And has a length of several seconds to one minute and a magnitude of about 0.5 V. Then, a current flows through the nickel wire 14 to which the voltage pulse has been sent, and the nickel wire generates heat due to its resistance. Therefore, the nickel wire 14
Flows through the glass substrate 13 from the heater composed of.

This heat flows from the nickel wire 14 toward both ends of the glass substrate 13 as shown in FIG. When the heat flows through the glass substrate 13, the temperature of the glass substrate 13 rises. In the glass substrate 13 at this time, the temperature is the highest at the nickel wire 14 and the temperature is the lowest at both ends.

Since both ends of the glass substrate 13 are in contact with the first and second support blocks 3 and 4, that is, are in contact with the heat sink, heat is applied to the glass substrate 13 as shown by the arrow in FIG. 13 flows from the center to both ends, and further flows through the first and second support blocks 3 and 4 to the first and second body blocks 1 and 2. For this reason, both ends of the glass substrate 13 are maintained at approximately room temperature, and there is almost no temperature change. Therefore, both ends of the glass substrate 13 can be maintained at a desired temperature. Thereby, the analysis of the experimental data of the thermal characteristics can be simplified.

Actually, when the temperature of the glass substrate 13 rises, the temperature of the heat sink also rises. However, since the heat sink is relatively large with respect to the substrate and has a large heat capacity, the temperature rise is zero or negligible. .

On the other hand, when the temperature of the glass substrate 13 rises, the resistance of the nickel wire 15 changes. By measuring the change in resistance, the temperature of the glass substrate 13 can be measured. The temperature curve in this case is as shown in FIG. The measured temperature data is analyzed by a computer and used to derive the thermal characteristics of the glass substrate 13, such as heat capacity and thermal conductivity.

As described above, when the heat sink of the present invention is used, both ends of the glass substrate 13 can be maintained at a constant temperature, and the thermal characteristics can be measured more accurately. Moreover, the first and second support blocks 3, 4
Can easily change the distance between them,
It can accommodate substrates of various sizes. Also, by increasing or decreasing the width of the first and second support blocks 3 and 4 and the first and second holding blocks, it is possible to cope with measurement boards of various widths.

As described above, the heat sink of the present invention is flexible and simple. In addition, since the heat sink of the present invention is small enough to be installed in a vacuum chamber, it can be installed in a vacuum chamber to eliminate heat convection and heat conduction from the substrate under measurement to air.

In the above embodiment, the case where a glass substrate is used as a substrate is described. However, the present invention can be similarly applied to a case where a substrate made of silicon or another hard material is used as a substrate. . Also, there is no particular limitation on the dimensions of the substrate, since the size of the block may correspond to the substrate.

In the above embodiment, the case where an aluminum block is used as the six blocks constituting the heat sink is described. However, the present invention is applied to a case where a block made of a material having good heat conductivity is used. Can also be applied.

In the above embodiment, the case where both ends of the glass substrate are maintained at room temperature is described. However, in the present invention, both ends of the substrate are cooled or heated to maintain a temperature other than room temperature. You can also. In this case, it is necessary to attach a heater or a cooler to both ends of the substrate, and connect a temperature sensor or a control circuit thereto.

In the above embodiment, the first and second
Although the description has been made of the case where a screwing structure is used for fixing the main body blocks 1 and 2 and the fixing of the substrate 13, in the present invention, other fixing structures are used for fixing the blocks constituting the heat sink and fixing the substrate. May be used.

[0032]

As described above, the heat sink of the present invention can stably fix an object to be measured, can maintain only a part of the object at a constant temperature, and can reduce the distance between a pair of support members. Since it can be adjusted, it can be applied to measurement objects of various dimensions without additional members, and has a simple structure.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a heat sink according to an embodiment of the present invention.

FIG. 2 is a plan view, a front view, and a side view showing first and second main body blocks according to one embodiment.

FIG. 3 is a plan view, a front view, and a side view showing first and second support blocks according to one embodiment.

FIG. 4 is a plan view, a front view, and a side view showing first and second holding blocks according to the embodiment.

FIG. 5 is a diagram showing a fixed state of an object to be measured in one embodiment.

FIG. 6 is a diagram for explaining the flow of heat in the heat sink of the present invention.

FIG. 7 is a diagram showing a pulse waveform of a voltage applied to a measurement object and a waveform of temperature data corresponding thereto.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... First body block, 1a, 2a ... Large bolt hole, 2
... second body block, 3 ... first support block, 3
a, 4a: first small bolt hole, 3b, 4b: notch,
5a, 6a recess, 5b, 6b second small bolt hole, 4
... second support block, 5 ... first presser block, 6 ...
Second holding block, 7, 8 large bolt, 9, 10 small bolt, 11 first board piece, 12 second board piece, 1
3 ... substrate, 14, 15 ... nickel wire.

Claims (2)

[Claims] 1. A heat sink for maintaining the temperature of an object to be measured, comprising: a heat sink body; a pair of support members provided on the heat sink body, each supporting both ends of the object to be measured; A heat sink, comprising: a holding member for holding an object to be measured on a member, wherein a distance between a pair of supporting members can be adjusted according to a dimension of the object to be measured. 2. A heat sink for maintaining the temperature of an object to be measured, comprising: a pair of main body blocks arranged at a predetermined interval; A heat sink, comprising: a pair of support blocks arranged so as to have; and a pair of holding blocks for pressing an end of the measurement target to fix the measurement target on the support block.