JPH1154298A - Portable compact surface treatment device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a portable compact surface treatment capable of device plasma treating a surface of a material to be treated by the plasma generated by corona discharge, and reducing radiation of the electromagnetic wave noise. SOLUTION: A portable surface treatment device T comprises an output circuit part 1 where a simple switching circuit 3 for generating the AC power of high frequency by a magnet for driving a switch and a contact switch, and a simple voltage transformation circuit 4 for transforming the AC power of high frequency which is output from the switching circuit 3, into high voltage, are installed in a casing 2, and a discharging process part 5 which receives the AC power of high frequency and high-voltage output from the voltage transformation circuit 4, and generates the plasma by causing the corona discharging, when it is close to the matter to be treated. A metal electromagnetic wave shielding layer 34 is mounted on an inner peripheral face of the casing 2, whereby the radiation of the electromagnetic wave noise from the surface treating device T can be reduced.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an output circuit for generating high-voltage and high-frequency AC power, and a discharge electrode for receiving the AC power generated by the output circuit. The present invention relates to a portable, small-sized surface treatment apparatus having a discharge treatment unit for generating a corona discharge between the substrate and the object to perform surface treatment on the object to be treated. The present invention relates to a portable small-sized surface treatment apparatus capable of preventing or reducing the emission of electromagnetic wave noise to a device, and improving safety at the time of insulation breakdown in an output circuit section.

[0002]

2. Description of the Related Art In general, other members are adhered to the surface of an object to be processed made of resin, paper, cloth or metal (for example, aluminum or iron) using an adhesive, and a coating material is applied. Alternatively, when printing is performed, in order to improve the adhesiveness of the adhesive or paint to the surface of the object to be processed, the printing characteristics of the printing ink, the anti-fogging property, the cleaning property or the frictional characteristics of the surface of the object to be processed, etc. A surface treatment is performed on the processed object. As one of such surface treatments, there has been known a plasma treatment in which plasma generated in air by corona discharge is applied to the surface of a workpiece to modify the surface. The plasma treatment is described, for example, in the article “Corona Surface Treatment” published on page 24 to page 30 of Vol. 35 No. 4 of the magazine “Adhesion” published by the Society of Polymer Publishing in 1991. It has been disclosed.

[0003] In such plasma processing, a plasma generator that generates plasma in the air near the workpiece by corona discharge is used. However, conventional plasma generators are usually provided with high voltage and high frequency AC. Power or pulsed power is applied to the discharge electrode, and the discharge electrode is brought into contact with or close to the object to be processed disposed on the counter electrode held at a substantially ground voltage, and the discharge electrode and the counter electrode or the object to be processed are applied. A corona discharge is caused to generate plasma in the air near the object to be processed. And
Conventional plasma generators used for the plasma processing of such an object to be processed generally handle a high voltage and have a constant discharge interval in order to generate stable plasma. I have. Therefore,
An object to be processed is transported to a plasma generator using a transport device or the like, and is subjected to plasma processing in the plasma generator.

However, the conventional plasma generator used for the plasma processing of the object to be processed is of a large fixed type, and has a large electric capacity (for example, about several tens of Kw), so that a relatively simple shape is required. Although it is suitable for treating a large amount of workpieces uniformly, processing of workpieces with relatively complicated shapes or local plasma processing on only a part of workpieces Also, there is a problem that it is unsuitable for individual or repair processing such as performing a plasma processing stronger than other parts. In addition, such a large, large-capacity plasma generator
There is also a problem that it is extremely difficult to carry and the cost is very high. Further, in such a conventional plasma generator, when there is a portion where the metal portion is exposed near the metal surface or the surface to be processed, the discharge is concentrated on the metal portion, and the processing becomes extremely uneven. Alternatively, there is a problem that a spark is generated from the discharge electrode, and the workpiece may be damaged by the spark. Also,
Even when the surface of the steel sheet is covered with a coating, when there is a coating defect such as a very small pinhole,
There is a possibility that the problem that the discharge is concentrated on the above-mentioned metal portion may occur.

In order to solve such a problem, the present applicant has filed Japanese Patent Application No. 8-23872 of the present applicant.
In this specification, a portable small-sized atmospheric pressure plasma generator (surface treatment apparatus) is proposed. The small atmospheric pressure plasma generator includes a switch circuit that generates high-frequency AC power by a switch driving magnet that repeats excitation and demagnetization, and a contact switch that is opened and closed by the magnet, and a high-frequency power output from the switch circuit. A transformer circuit for converting the AC power of the frequency to a high voltage; and a discharge circuit for receiving the high frequency / high voltage AC power output from the transformer circuit and inducing a corona discharge to generate plasma when approaching the counter electrode. Since the switch circuit, the transformer circuit, and the discharge electrode have simple structures, the plasma generator can be easily carried, and its electric capacity is reduced and its production is simplified. Cost is reduced.

[0006]

However, the small-sized normal-pressure plasma generating apparatus (surface processing apparatus) disclosed in the specification of Japanese Patent Application No. 8-23872 according to the present applicant also has the following problem. There's a problem. That is, in this small-sized normal-pressure plasma generating apparatus, there is a problem that electromagnetic wave noise is generated in a switch circuit or a transformation circuit, particularly a contact switch, and the electromagnetic wave noise is transmitted to the outside through the casing. In particular, in recent years, electromagnetic waves radiated from portable electric devices such as mobile phones tend to be a kind of pollution source, so it is necessary to minimize the radiation of electromagnetic wave noise even in such a small normal pressure plasma generator. There is.

Further, in such a small-sized normal-pressure plasma generator, when an insulation breakdown occurs in a transformer circuit or the like, power supplied from an AC power supply (for example, a single-phase 100 V AC power supply) rushes into the insulation breakdown location. It is necessary to cut off the phenomenon, that is, so-called rush current, but the conventional small normal-pressure plasma apparatus or surface treatment apparatus may not be able to reliably cut off the rush current to the dielectric breakdown location. There is.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned conventional problems, and can effectively treat a surface of an object to be treated by corona discharge, and further, prevent radiation of electromagnetic noise to the outside. Provided is a lightweight, inexpensive, portable, small-sized surface treatment apparatus that can reduce or reduce the occurrence of inrush current to a breakdown point even when insulation breakdown occurs in a transformer circuit or the like. These are issues to be solved.

[0009]

Means for Solving the Problems A first aspect of the present invention made to solve the above-mentioned problems is as follows: (a) a switch circuit for generating high-frequency AC power from power supplied from a power supply; A primary winding for receiving high-frequency AC power output from the switch circuit; and a secondary winding having a larger number of turns than the primary winding, and corresponding to the power received by the primary winding. A transformer circuit for generating high-voltage and high-frequency AC power in the secondary winding; an output circuit section disposed in a casing made of an insulating material (for example, resin); A discharge electrode (e.g., stainless steel) that receives the AC power generated by the next winding and, when approaching or coming into contact with the object, causes a corona discharge between the object and the object to treat the surface of the object. Discharge treatment with stranded wire) And (c) an electromagnetic wave shielding layer made of a conductive material is provided on at least one of the outer surface and the inner surface of the casing. . Preferably, the discharge electrode is covered with a dielectric (for example, a tube made of fluororesin). Here, examples of the conductive material suitable for the electromagnetic wave shielding layer include a metal, a conductive paint, and a conductive film. Further, the electromagnetic wave shielding layer may be in a sheet shape or a mesh shape.

[0010] The surface treatment apparatus includes an output circuit section in which a switch circuit and a transformer circuit are arranged in a casing;
It is a simple, lightweight and compact unit comprising a discharge treatment unit having a discharge electrode covered with a dielectric, and can be easily carried. Therefore, the surface treatment apparatus is carried by hand or by using a robot, and a discharge electrode (discharge part), which is preferably coated with a dielectric, is brought into contact with or close to a desired part of the object to be treated. Processing can be performed. As described above, since the surface treatment device has a simple structure, the manufacturing cost is reduced.

This surface treatment apparatus is effective for a non-conductive material such as resin (plastic), paper, cloth and / or a conductive material (metal material) such as aluminum and iron. Can be used. Specifically, examples of the object to be processed include a plastic film, a resin molded product, a PCM steel plate, and printing paper. When performing the surface treatment on the object to be processed, the surface treatment apparatus can be carried to a position where the object to be processed exists, and the desired portion of the object can be subjected to the surface treatment with a desired strength. . Therefore, processing of an object having a relatively complicated shape such as a deep groove or a hole, or locally applying a surface treatment to only a part of the object or applying a stronger surface treatment than other parts Repair or individual processing can be easily performed.

Further, in this surface treatment apparatus, an electromagnetic wave shielding layer made of a conductive material is provided on at least one of the outer surface and the inner surface of the casing, so that the electromagnetic wave noise generated in the switch circuit or the transformer circuit is shielded from the electromagnetic wave. The layer is shielded (or absorbed) and hardly radiated to the outside of the surface treatment apparatus. Therefore, it is possible to prevent or reduce the occurrence of electromagnetic wave pollution and the like.

In the surface treatment apparatus according to the first aspect of the present invention, it is preferable that the electromagnetic wave shielding layer is connected to a ground connection. The ground connection is connected to the ground or the ground terminal of the power outlet. By doing so, the electromagnetic wave noise shielding effect of the electromagnetic wave shielding layer can be enhanced. In addition, the thickness of the electromagnetic wave shielding layer is 0.1.
It is preferable that the distance be in the range of 01 mm or more and 5 mm or less. If the thickness of the electromagnetic wave shielding layer is less than 0.01 mm, a sufficient electromagnetic wave shielding effect cannot be obtained, and if the thickness is more than 5 mm, the weight of the surface treatment device increases, which makes it inconvenient to carry.

In the surface treatment apparatus according to the first aspect of the present invention, the switch circuit converts power supplied from the power supply to high-frequency AC power by repeatedly opening and closing the contact switch at high speed. Is preferred. In this case, the power supply is an AC power supply, and the switch circuit includes an electromagnet in which the excitation state and the demagnetization state are repeated by the AC power supplied from the power supply, and the contact switch switches between the excitation state and the demagnetization state of the electromagnet. It is further preferable that the door is opened and closed accordingly. In this way, with a very simple and compact structure, high-frequency AC power can be effectively generated in the switch circuit, and thus, corona discharge is effectively generated by the discharge electrode, and strong Plasma can be generated.

In the surface treatment apparatus according to the first aspect of the present invention, the switch circuit generates a spark discharge on the electrode pair disposed at a small gap with the power supplied from the power supply and vibrates. A current may be induced to generate high frequency AC power by the oscillating current. In this case, an assembly composed of the switch circuit and the transformer circuit (Tesla coil) forms a Tesla transformer. This further simplifies the structure of the switch circuit.

According to a second aspect of the present invention, there is provided (a) a switch circuit for generating high-frequency AC power from power supplied from a single-phase AC power supply (for example, a household single-phase 100V AC power supply); A primary winding for receiving high-frequency AC power output from the switch circuit; and a secondary winding having a larger number of turns than the primary winding, and corresponding to the power received by the primary winding. A transformer circuit for generating high-voltage and high-frequency AC power in the secondary winding; an output circuit section disposed in a casing made of an insulating material (for example, resin); A discharge electrode (e.g., stainless steel) that receives the AC power generated by the next winding and, when approaching or coming into contact with the object, causes a corona discharge between the object and the object to treat the surface of the object. Discharge treatment with stranded wire) (C) the two conductors for supplying power to the switch circuit are connected to the AC power potential side pole of the AC power supply (the pole that is not grounded). An earth conductor is provided for connecting a part of the conductor to be connected (hereinafter referred to as a “potential side conductor”) between the connection part to the AC power supply and the connection part to the switch circuit to a ground connection part. An electric detector is interposed in the ground conductor. Preferably, the discharge electrode is covered with a dielectric (for example, a tube made of fluororesin).

In this surface treatment apparatus, as in the case of the surface treatment apparatus according to the first aspect of the present invention, the lightweight and compact surface treatment apparatus is carried by hand or by using a robot, and is covered with a dielectric material. By contacting or approaching the discharged electrode to a desired portion of the object to be processed, surface treatment can be performed on the portion, and processing of the object to be processed having a relatively complicated shape such as a deep groove or hole, Alternatively, it is possible to easily perform repairing or individual treatment such as locally applying a surface treatment to only a part of the object to be treated or applying a stronger surface treatment to other parts.

Further, in this surface treatment apparatus, when the ground connection is connected to the ground or the ground terminal of the power outlet, the ground connection has the ground potential. A voltage (potential difference) corresponding to the potential of the potential side conductor is applied to the electric appliance, and the electric detector detects this voltage. On the other hand, when the ground connection of the surface treatment device is not connected to the ground or the ground terminal of the power outlet, no voltage is applied to the detector, so that the detector does not operate. Therefore, whether or not the surface treatment device is grounded to the ground or the ground terminal can be easily grasped based on the presence or absence of the operation of the voltage detector (voltage detection). For this reason, troubles such as forgetting to take the ground when using the surface treatment device are less likely to occur, and the safety of the surface treatment device is enhanced.

Here, the voltage detector is preferably composed of a resistor and a neon lamp interposed in series with the ground conductor. With this configuration, it is possible to easily visually recognize whether or not the surface treatment device is grounded based on whether or not the neon lamp is turned on. Also, the amount of current flowing from the potential side conductor to the ground connection (and ground or the ground terminal of the power outlet) is extremely small.

In the surface treatment apparatus according to the second aspect of the present invention, the switch circuit includes an electromagnet in which the excitation state and the demagnetization state are repeated by the power supplied from the AC power supply, and the excitation state and the demagnetization state of the electromagnet. And a contact switch that is opened and closed with the replacement of the contact switch.The contact switch is opened and closed to generate high-frequency AC power. A coil, a contact switch, and a primary winding of a transformer circuit are interposed in series, and a ground wire connects a portion of a potential side wire between a connection portion to an AC power supply and a coil of the electromagnet to a ground connection portion. Preferably, it is adapted to

In this way, for example, when insulation breakdown occurs in the primary winding of the transformer circuit, the potential (voltage) applied from the power potential side pole of the power supply to the potential side conductor is applied to the coil of the electromagnet and the contact point. Since the light propagates to the insulation breakdown point via the switch, no rush current flows to the insulation breakdown point. Therefore, the safety of the surface treatment device is further enhanced.

In the surface treatment apparatus according to the second aspect of the present invention, an electromagnetic wave shielding layer made of a conductive material is provided on at least one of the outer surface and the inner surface of the casing, and the electromagnetic wave shielding layer is connected to the ground connection portion. It is preferred that In this case, the thickness of the electromagnetic wave shielding layer is 0.01 m
More preferably, it is in the range of m to 5 mm. With this configuration, the electromagnetic wave noise generated in the switch circuit or the transformer circuit is shielded by the electromagnetic wave shielding layer, and is hardly radiated to the outside of the surface treatment device. Therefore, it is possible to prevent or reduce the occurrence of electromagnetic wave pollution and the like. In addition, the thickness of the electromagnetic wave shielding layer is set to 0.01 to 5 mm.
The reason is preferably the same as in the case of the surface treatment apparatus according to the first aspect. Also, the conductive material suitable for the electromagnetic wave shielding layer is the same as in the case of the surface treatment apparatus according to the first embodiment.

In the above surface treatment apparatus, the discharge electrode is
A flexible loop-shaped metal member (for example, a loop-shaped stainless steel stranded wire), wherein the dielectric is made of fluororesin, silicone resin, polyurethane, polyolefin or vinyl chloride, and covers the discharge electrode Preferably, it is a tube. With this configuration, the discharge electrode is covered with a coating member made of a dielectric material such as fluororesin, silicone resin, polyurethane, polyolefin, or vinyl chloride. The plasma treatment can be performed on the object whose portion is present on the surface without any trouble. In addition, since the discharge electrode to which a high voltage is applied is covered with a dielectric material, that is, an insulating material, safety in handling the high voltage is further improved. Further, since the discharge electrode has flexibility, the discharge portion can be softly or elastically brought into contact with the object to be processed.

[0024]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be specifically described below. As shown in FIGS. 1, 2 and 3 (a) and (b), a portable surface treatment apparatus T comprising a compact, lightweight, and portable atmospheric pressure type plasma generator according to the present invention is provided. A switch circuit 3 for converting AC power supplied from a single-phase AC power supply (not shown) into a high-frequency AC power in a hollow substantially cylindrical casing 2 made of an insulating material (for example, resin); An output circuit unit 1 including a transformer circuit 4 for transforming high-frequency AC power output from the switch circuit 3 to generate high-voltage and high-frequency AC power, and various energizing systems described later. Is provided.

Further, the surface treatment apparatus T includes a transformer circuit 4
(Secondary winding) while accepting AC power,
When contacting or approaching the workpiece 6 held at a substantially ground voltage (substantially ground voltage), a corona discharge is generated between the workpiece 6 and the workpiece 6 to generate plasma in the air near the workpiece. There is provided a discharge processing unit 5 for performing the discharge. Note that FIG.
In the example shown in (1), the object 6 is placed on a counter electrode 7 in order to keep the object 6 at a substantially ground voltage, and the counter electrode 7 is connected to a ground portion 8 (ground).

The transformer circuit 4 of the output circuit section 1 has a so-called Tesla coil in which a primary winding 9 having a small number of turns and a secondary winding 10 having a large number of turns are concentrically arranged in order to suppress high-frequency loss. It has been. This transformer circuit 4
Uses an iron core (not shown) of a ferrite core to increase the output. The transformer circuit 4 having such a structure can generate a sufficiently high voltage despite being very simple, small, and lightweight.

An example of the size or shape of the transformer circuit 4 which is small and lightweight and has a high transformer performance will be described below. (1) Transformer circuit dimensions (length 200-300mm, diameter 30-60mm) (2) Transformer circuit output peak voltage (15-35kV) (3) Transformer circuit power capacity (10-300W) (4) Number of turns of primary winding (3 to 20 times) (5) Number of turns of secondary winding (300 to 800 times)

The switch circuit 3 receives the first and second terminals 1 of the plug 11 from an AC power supply (not shown).
100 V single-phase AC power (for example, 50/60 Hz) is supplied via the first and second conductive wires 14 and 15 connected to the power supply 2 and 13. By the way, in household, commercial or industrial single-phase AC power generally supplied to a customer from a power supplier, one of two power distribution terminals (transmission lines) is connected to one terminal (AC power potential side pole). The alternating potential that changes periodically is applied, and the other terminal (earth side pole) is grounded and is always ground potential (ground potential).
Is held in. And in this surface treatment apparatus T,
The first terminal 12 of the plug 11 is connected to an AC power potential side pole of the AC power supply, while the second terminal 13 is connected to the ground side pole of the AC power supply. Therefore, the first conductor 1
4 (potential-side conductor) is applied with a periodically changing AC potential, but the second conductor 15 (earth-side conductor) is always kept at the ground potential.

A noise filter 16 for removing electric field noise and a power supply for turning on / off the supply of power to the switch circuit 3 are provided in the first and second conducting wires 14 and 15 which are current supply paths to the switch circuit 3. A switch 17 is provided. Further, between the insertion plug 11 and the power switch 17, a fuse 18 (for example,
2A). Further, the power switch 17
The first conducting wire 14
A connecting lead 19 for connecting the second lead 15 to the second lead 15;
A first resistor 20 and a first neon lamp 21 (for example, red) are interposed in series on the connection conductor 19. Thus, the first neon lamp 21 is connected to the power switch 1
7 is turned on when power is supplied to the switch circuit 3 and turned off when power is not supplied to the switch circuit 3. It can be grasped.

The switch circuit 3 includes the first conductor 1
4 is provided with a switch driving magnet 23 (electromagnet) formed by winding a coil 22 (inductance) disposed around a rod made of a ferromagnetic material. Further, the switch circuit 3 has one end connected to the first conductor 14.
A first contact 24 connected to the P ₁ position of the contact switch S consisting of the second contact 25. is provided whose one end is connected to the P ₂ position of the first conductor 14. In other words, a contact switch S for turning on / off the switch circuit 3 is interposed in the first conductor 14.

A first contact portion 26 is provided on the surface of the first contact 24 of the contact switch S facing the second contact 25. On the other hand, a second contact portion 27 is provided at a position corresponding to the first contact portion 26 on a surface of the second contact 25 facing the first contact 24. A ferromagnetic piece 28 is attached to a surface of the first contact 24 facing the switch driving magnet 23. Further, for the contact switch S,
A switch adjusting knob 29 for adjusting the operating characteristics of the contact switch S is provided. The switch adjustment knob 29 is screwed into the rear wall 2a of the casing 2 and can be moved in the Y ₁ and Y ₂ directions by rotating around the axis thereof.

The tip of the first conductor 14 (the plug 1
1 is connected to one end (potential side end) of the primary winding 9 of the transformer circuit 4 and the tip of the second conductor 15 (the end opposite to the insertion plug 11). ) Is connected to the other end (the ground side end) of the primary winding 9. Also, P ₁ position and P ₃ of the second conductor 15 of the first conductor 14
A noise removing capacitor 31 for preventing generation of electric field noise is interposed in the third conductor 30 connecting the position. The second conductor 15 is connected via a fifth conductor 33 to a fourth conductor 32 connected to one end (earth-side end) of the secondary winding 10 of the transformer circuit 4.
That is, the primary winding 9 and the secondary winding 10 of the transformer circuit 4
Are connected to a second conductor 15 which is always maintained at the ground voltage.

It is to be noted that the switch circuit 3 does not have such a configuration, and a switch having a simple disconnection function with an electrode pair.
Alternatively, it may be formed using a semiconductor switch (for example, a transistor). Also, the switch circuit 3
With a power supplied from a power source, a spark circuit is generated in an electrode pair arranged with a slight gap therebetween to generate an oscillating current, and the oscillating current generates a high-frequency AC power as a switch circuit. Is also good. In this case, the assembly including the switch circuit 3 and the transformer circuit 4 becomes a Tesla transformer.

Thus, the switch circuit 3 has the first and second
When a predetermined AC power is supplied via the conductors 14 and 15, the switch driving magnet 23 repeats the excitation state and the demagnetization state according to the frequency of the AC power,
Accordingly, the contact switch S is opened and closed. That is,
When the switch driving magnet 23 is in the excited state, the ferromagnetic piece 28 attached to the first contact 24 is attracted to the switch driving magnet 23, and the first contact portion 26 and the second contact The contact switch S is opened by separating the unit 27 from the unit 27. As a result, the switch driving magnet 23 is demagnetized. When the switch driving magnet 23 is in the demagnetized state, the first contact 2
4 returns to its original position due to its own elasticity, whereby the first contact portion 26 and the second contact portion 27 come into contact, and the contact switch S is closed again. In this way, the contact switch S is continuously opened and closed at a high speed, and accordingly, high-frequency AC power is induced in the switch circuit 3, and this AC power is input to the primary winding 9 of the transformer circuit 4. Is done. The opening and closing characteristics of the contact switch S, and thus the switch circuit 3
The vibration characteristic of the high-frequency AC power caused by the above can be adjusted by preferably adjusting the switch adjustment knob 29.

In this way, the high-frequency AC power generated by the switch circuit 3 is input to the primary winding 9 of the transformer circuit 4, and accordingly, the secondary winding 10 of the transformer circuit 4 AC power of high frequency and high voltage is generated. Here, the voltage output terminal of the secondary winding 10 is connected to the discharge wire 42 of the discharge processing unit 5 via a conductive member, and
The high-frequency and high-voltage AC power generated by the
To be entered. In addition, 2 of the transformer circuit 4
The ground-side end of the next winding 10 is at the ground potential as described above.

On the inner peripheral surface of the casing 2, an electromagnetic wave shielding layer 34 made of metal is provided.
Reference numeral 4 is connected to a ground connection part 36 via a conductor 35. When the insertion plug 11 is inserted into a power outlet (not shown) in a predetermined form,
When 2 is inserted into the AC power potential side pole and the second terminal 13 is plugged into the ground side pole, this ground connection portion 36 is connected to the ground terminal of the power outlet, so that the electromagnetic wave shielding layer 34 is grounded. Will be.
If the power outlet is not provided with a ground terminal, the ground connection terminal 36 may be connected to an appropriate ground portion (for example, the ground, a metal water pipe, or the like).

As described above, in the output circuit section 1, since the sheet-like electromagnetic wave shielding layer 34 made of a conductive material is provided on the inner surface of the casing 2, the switching circuit 3
Alternatively, the electromagnetic wave noise generated by the transformer circuit 4, especially the contact switch S, is shielded (or absorbed) by the electromagnetic wave shielding layer 34, and is hardly radiated to the outside of the surface treatment apparatus T. Therefore, it is possible to prevent or reduce the occurrence of electromagnetic wave pollution and the like. Since the electromagnetic wave shielding layer 34 is grounded via the conducting wire 35 and the ground connection portion 36, the electromagnetic wave noise shielding effect of the electromagnetic wave shielding layer 34 is enhanced.

Here, the thickness of the electromagnetic wave shielding layer 34 is set to a value of 0.1.
It is preferable that the distance be in the range of 01 mm or more and 5 mm or less. If the thickness of the electromagnetic wave shielding layer 34 is less than 0.01 mm, a sufficient electromagnetic wave shielding effect cannot be obtained. If the thickness is more than 5 mm, the weight of the surface treatment apparatus T increases, which makes it inconvenient to carry. The electromagnetic wave shielding layer 34 may be in a mesh shape.

The material of the electromagnetic wave shielding layer 34 is not limited to metal, but may be any conductive material. For example, a conductive paint, a conductive film, or the like can be used. The electromagnetic wave shielding layer 34 may be provided on the outer peripheral surface of the casing 2, or may be provided on both the inner peripheral surface and the outer peripheral surface of the casing 2.

Further, the output circuit section 1 is provided with a ground conductor 37 connecting the portion of the first conductor 14 between the fuse 18 and the power switch 17 and the electromagnetic wave shielding layer 34. Therefore, the above-described portion of the first conductive wire 14 is connected to the ground connection part 36 via the ground conductive wire 37, the electromagnetic wave shielding layer 34, and the conductive wire 35. Then, the second resistor 38 and the second neon lamp 3 are connected to the ground conductor 37.
9 (white) is arranged in series.

Thus, when the plug 11 is plugged into a power outlet (not shown) in a predetermined form and the ground connection 36 is connected to the ground terminal, the ground connection 36 is grounded. Electromagnetic wave shielding layer 3
The conductive system from 4 to the ground connection 36 is grounded. At this time, a voltage (potential difference) corresponding to the potential of the first conductor 14 is applied to the second resistor 38 and the second neon lamp 39 interposed between the ground conductor 37, and the second neon lamp is turned on (white). ). On the other hand, when the ground connection portion 36 is not grounded, the second neon lamp 39 does not light because no voltage is applied. Therefore, the second
Whether the neon lamp 39 is lit (white) or not can easily be visually checked whether or not the conductive system from the electromagnetic wave shielding layer 34 to the ground connection portion 36 is grounded.
For this reason, troubles such as forgetting to ground when using the surface treatment apparatus T are unlikely to occur, and the safety of the surface treatment apparatus T is enhanced. In this case, the amount of current flowing from the first conductive wire 14 to the ground connection portion 36 (therefore, the ground or the ground terminal of the power outlet) becomes extremely small.

The voltage detector interposed in the ground conductor 37 is not limited to a resistor and a neon lamp, but may be any type as long as it can detect a potential or a voltage. However, it can be used.

Further, in the output circuit section 1, it is connected to an AC power potential side pole of a power outlet (not shown),
Therefore, the coil 22 of the switch driving magnet 23, the contact switch S, and the primary winding 9 of the transformer 9 are interposed in series on the first conductor 14 to which the periodically changing AC potential is applied. Therefore, for example, when insulation breakdown occurs in the primary winding 9 of the transformer circuit 9, the potential (voltage) applied to the first conductor 14 from the AC power potential side pole is transmitted through the coil 22 and the contact switch S. And propagates to the dielectric breakdown. In this case, the potential of the first conductive wire 14 is brought close to the ground potential by the coil 22 or the contact switch S before it propagates to the insulation breakdown point, that is, the potential decreases when the potential is positive, and decreases when the potential is negative. Rise, so that no rush current flows to the insulation breakdown point. Therefore, the safety of the surface treatment device T is further enhanced.

A discharge processing unit 5 is detachably attached to the tip of the output circuit unit 1. The discharge processing unit 5 generates a corona discharge between the discharge processing unit 5 and the workpiece 6. And a jacket 41 that supports the discharge unit 40 and shields the discharge line 42 or the current path to the discharge line 42 from the outside. The discharge part 40 is made of a flexible (flexible) stainless steel stranded wire (wire) or a warp yarn, and a discharge tube 42 made of a fluororesin tube (Teflon tube). And a dielectric 43. Here, the material of the discharge wire 42 is not limited to stainless steel, and any material may be used as long as it is a conductive material. Further, the material of the dielectric 43 is not limited to fluororesin (Teflon),
Any material may be used as long as it is a dielectric material (for example, silicone resin, polyurethane, polyolefin, vinyl chloride, etc.).

It should be noted that the dielectric 43 is made of a first tube (for example, an outer diameter of 2 mm and an inner diameter of 1 mm) that directly covers the discharge wire 42 (for example, 1 mm in diameter), and a second tube that covers the first tube. Tube (for example, outer diameter 3mm, inner diameter 2
mm). This makes it possible to increase the durability of the dielectric 43 while maintaining the flexibility of the discharge unit 40.

As described above, the surface treatment apparatus T according to the present invention includes the output circuit section 1 in which the switch circuit 3 and the transformer circuit 4 are disposed in the casing 2, and is detachably attached to the output circuit section 1. Simplification consisting of the discharge processing unit 5
It is lightweight and compact and can be easily carried. Therefore, by carrying this surface treatment apparatus T manually or by using a robot and bringing the discharge unit 40 into or out of contact with a desired portion of the workpiece 6, the plasma treatment can be effectively performed on the portion. As described above, since the surface treatment apparatus T has a simple structure, the manufacturing cost is reduced.

The surface treatment apparatus T according to the present invention comprises a workpiece 6 made of a non-conductive material such as resin (plastic), paper, cloth and / or a conductive material (metal material) such as aluminum or iron. Can be used effectively. Specifically, examples of the workpiece 6 include a plastic film, a resin molded product, a PCM steel plate, and printing paper. When performing the surface treatment on the object 6, the surface treatment apparatus T is carried to the position where the object 6 is present, and the desired portion of the object 6 is subjected to the plasma treatment with a desired strength. Can be applied. Therefore, processing of the processing object 6 having a relatively complicated shape such as a deep groove or a hole, or performing plasma processing locally only on a part of the processing object 6 or performing plasma processing stronger than other parts is performed. Repairing or individual processing such as can be easily performed. Further, in this surface treatment apparatus T, the switch circuit 3 and the transformer circuit 4 are housed in the casing 2 made of an insulating material, and the energization path to the discharge wire 42 is completely covered by the jacket 41 which is an insulator. As a result, safety in handling a high voltage is greatly improved.

An example of the size, shape, and the like of the simple and compact surface treatment apparatus T according to the present invention having the above configuration will be described below. (1) Dimensions: length 445 mm, body outer diameter 48 φmm (2) Weight: 1000 g (3) Power supply: 100 V AC power supply for home use (50/60
Hz) (4) Output voltage: several KV to several tens of KV (5) Ambient temperature: 0 to 40 ° C

Hereinafter, a method of performing a plasma treatment on the workpiece 6 using the surface treatment apparatus T (surface treatment method) will be described. In such a surface treatment, for example, as shown in FIG. 2, a non-conductive material such as resin (plastic), paper, cloth, or the like is first placed on a counter electrode 7 (ground electrode) whose voltage is maintained at a ground voltage (earth voltage). An object to be processed 6 (specifically, for example, a plastic film, a resin molded product, a PCM steel plate, printing paper, or the like) made of a conductive material and / or a conductive material (metal material) such as aluminum or iron is placed. When the object 6 includes a layered metal, for example, when the object to be processed is a layered member in which a resin, a paint, or the like is coated on a metal plate such as a PCM steel plate, the layered metal is provided without providing the counter electrode 7. The metal plate of the member can be grounded. Also in this case, a strong corona discharge is induced, and a strong plasma is generated.

Next, the surface treatment apparatus T is carried by hand or by using a robot, and the discharge unit 40 of the discharge processing unit 5 is discharged.
Is brought into contact with an appropriate position within a range to be subjected to the plasma treatment on the surface of the workpiece. Then, the discharge unit 40 is moved over a range where plasma processing is to be performed while keeping the discharge unit 40 in contact with the surface of the workpiece. Here, the discharge unit 40 is, for example, 1 to 2 cm.
It is preferable to move uniformly at a moving speed of / sec.
In the case where a normal plasma process is performed on the surface of the object, it is preferable that the discharge unit 40 is repeatedly moved about 1 to 5 times on the surface of the object.

The time during which the discharge section 40 is brought into contact with the surface of the workpiece is preferably set according to the required strength of the plasma processing. At this time, the discharge unit 40 (discharge line 4
Corona discharge is induced between 2) and the counter electrode 7 or the object 6, and a plasma is generated in the air near the surface of the object by the corona discharge, and the surface of the object is plasma-treated by the plasma. You. In this way,
In the case where another member is adhered to the surface of the processing target 6 using an adhesive, and a paint is applied or printing is performed, the adhesive or the adhesiveness of the coating to the surface of the processing target 6 is used. -Various surface characteristics such as adhesion, printing characteristics of the printing ink, anti-fogging property of the surface, detergency and frictional properties are improved or modified.

Here, by adjusting the time during which the discharge section 40 is brought into contact with the portion of the surface of the workpiece to be subjected to the plasma treatment, the intensity of the plasma treatment applied to the portion can be adjusted. For example, if the contact time is increased, a strong plasma treatment can be performed on the portion. Therefore, a desired intensity of the plasma processing can be applied to a desired portion of the processing target 6.

Further, in this surface treatment apparatus T, when a discharge electrode having a flexible discharge wire 42 covered with a dielectric material 43 (fluorine resin tube) is used,
When performing plasma processing on the workpiece 6, the dielectric 43 contacts or slides and moves on the surface of the workpiece, and
The surface of the object to be processed is plasma-treated by the plasma generated between the substrate 3 and the surface of the object without causing spark discharge. Further, at this time, the discharge wire 42 or the dielectric 43 softly contacts the surface of the object to be processed with an appropriate pressing force due to the elasticity thereof, so that the surface of the object to be processed is not damaged for a short time (for example, several seconds). ) Can complete the plasma processing. In addition, the plasma treatment can be carried out by selecting the form and material according to the parts, such as deep grooves and holes, which were not sufficiently treated with the conventional large fixed type. it can. Further, when processing an object 6 having a relatively complicated shape and a large processing area, the processing efficiency can be increased by using the object 6 in combination with a fixed type.

If the discharge wire 42 is wound in multiple turns and covered with a dielectric material 43 such as a tube made of fluororesin, the contact area between the discharge portion 40 and the surface of the object to be treated is increased, and the plasma treatment is performed. Is further reduced.

As described above, this surface treatment apparatus T
In the above, the electromagnetic wave shielding layer 34 is provided on the inner surface of the casing 2 and the electromagnetic wave shielding layer 34 is grounded, so that the radiation of electromagnetic wave noise generated in the switch circuit 3 or the transformer circuit 4 to the outside is reduced. But
The measurement results of the radiation amount of the electromagnetic wave noise (noise electric field intensity) are shown for the surface treatment apparatus T according to the present invention having the electromagnetic wave shielding layer 34 and the surface treatment apparatus having no electromagnetic wave shielding layer.

The measurement of the electromagnetic wave noise is performed in accordance with a measuring method specified by an Ordinance of the Ministry of International Trade and Industry, which determines the technical standards of electric appliances based on the Electric Appliance Control Law, as shown in FIG.
The measurement was performed using a measuring device for up to 1000 MHz. In addition,
Since this measuring device or measuring method is generally used, detailed description thereof is omitted, but the outline thereof is as follows.

As shown in FIG. 4, in this measuring device or measuring method, a test material 61 (in this case, a surface treatment device) is arranged on a turntable 60 having a predetermined height H.
A predetermined power is supplied to the test material 61 from a predetermined power supply via a conducting wire 62 having a filter 63. Electromagnetic noise radiated from the test material 61 is received by a tuning dipole antenna 64 disposed at a position separated by a predetermined distance d (for example, 30 m or 10 m) from the test material 61. The electromagnetic wave noise received at 64 is detected by the measuring device 65.

FIGS. 5 and 6 show a surface treatment apparatus T (invention) having an electromagnetic wave shielding layer 34 according to the present invention, using a measuring apparatus or a measuring method for 30 to 1000 MHz as shown in FIG. 4 shows the results of measuring electromagnetic noise with a surface treatment apparatus having no electromagnetic wave shielding layer 34 (comparative example). As is clear from FIGS. 5 and 6, the surface treatment apparatus T according to the present invention (the present invention) has a frequency of about 600 to 1000 compared to the surface treatment apparatus of the comparative example.
The electromagnetic wave noise (noise electric field strength) in the MHz range is low. Therefore, the surface treatment apparatus T according to the present invention can reduce the occurrence of electromagnetic wave pollution.

[Brief description of the drawings]

FIG. 1 is an explanatory side sectional view of a surface treatment apparatus according to the present invention.

FIG. 2 is an electric circuit diagram of the surface treatment apparatus shown in FIG.

3A is a side view of a discharge processing section of the surface treatment apparatus shown in FIG. 1, and FIG. 3B is a side sectional view of a discharge section of the discharge processing section.

FIG. 4 is a schematic diagram showing a configuration of an electromagnetic wave noise measuring device.

FIG. 5 is a graph showing measurement results of electromagnetic wave noise of the surface treatment apparatus according to the present invention.

FIG. 6 is a graph showing measurement results of electromagnetic wave noise of the surface treatment apparatus according to the comparative example.

[Explanation of symbols]

T: surface treatment device, S: contact switch, 1: output circuit section, 2: casing, 2a: rear wall of casing, 3 ...
Switch circuit, 4 ... Transformer circuit, 5 ... Discharge processing section, 6 ... Processing object, 7 ... Counter electrode, 8 ... Ground section, 9 ... Primary winding, 10 ... Secondary winding, 11 ... Plug plug, 12 …
1st terminal, 13 ... 2nd terminal, 14 ... 1st conductor, 15 ... 2nd conductor, 16 ... Noise filter, 17 ... Power switch,
18 fuse, 19 connection wire, 20 first resistor,
DESCRIPTION OF SYMBOLS 21 ... 1st neon lamp, 22 ... Coil, 23 ... Switch drive magnet, 24 ... 1st contact, 25 ... 2nd contact, 26 ... 1st contact part, 27 ... 2nd contact part, 28 ... Ferromagnetic piece , 29 ... switch adjustment knob, 30 ... third conductor,
31: noise removal capacitor, 32: fourth conductor, 33
... Fifth conductor, 34 ... Electromagnetic wave shielding layer, 35 ... Conductor, 36 ...
Ground connection, 37: ground conductor, 38: second resistor,
Reference numeral 39 denotes a second neon lamp, 40 denotes a discharge part, 41 denotes a mantle part, 42 denotes a discharge wire, 43 denotes a dielectric (fluorine resin tube), 60 denotes a turntable, 61 denotes a test material, and 62 denotes a lead wire.
... Filter, 64 ... Tuning dipole antenna, 65 ... Measuring instrument.

Claims (14)

[Claims] 1. A switch circuit for generating high-frequency AC power from power supplied from a power supply, a primary winding receiving the high-frequency AC power output from the switch circuit, and a primary winding that is higher than the primary winding. A secondary winding having a large number of turns, and a transformer circuit for generating high-voltage and high-frequency AC power in the secondary winding in response to the power received by the primary winding; A corona between an output circuit portion disposed in a casing made of the above, and an ac power generated by a secondary winding of the transformer circuit, when the ac power comes close to or comes into contact with the object. A small-sized surface treatment apparatus provided with a discharge treatment unit having a discharge electrode for causing a discharge to treat the surface of the workpiece, wherein at least one of the outer surface and the inner surface of the casing has a conductive property. Electromagnetic material Portable compact surface treatment apparatus, wherein a shielding layer is provided. 2. The small portable surface treatment apparatus according to claim 1, wherein said discharge electrode is covered with a dielectric. 3. The portable small surface treatment apparatus according to claim 1, wherein the electromagnetic wave shielding layer is connected to a ground connection part. 4. The thickness of the electromagnetic wave shielding layer is 0.01 mm.
The portable small surface treatment apparatus according to any one of claims 1 to 3, wherein the distance is within a range of 5 mm or less. 5. The power supply according to claim 1, wherein the switch circuit converts power supplied from a power supply into high-frequency AC power by repeatedly opening and closing a contact switch at a high speed. 4. A portable small-sized surface treatment apparatus according to any one of 4. 6. The power supply is an AC power supply, and the switch circuit includes an electromagnet whose excitation state and demagnetization state are repeated by an AC power supplied from the power supply, and the contact switch is configured to excite the electromagnet. The portable small surface treatment apparatus according to claim 5, wherein the apparatus is opened and closed when the state and the demagnetized state are alternated. 7. The switch circuit generates an oscillating current by generating a spark discharge in an electrode pair disposed at a slight gap with the power supplied from a power supply, and generates a high-frequency oscillation by the oscillating current. The portable small surface treatment apparatus according to any one of claims 1 to 4, wherein the apparatus is adapted to generate AC power. 8. A switch circuit for generating high-frequency AC power from power supplied from a single-phase AC power supply, a primary winding for receiving the high-frequency AC power output from the switch circuit, and a primary winding for receiving the high-frequency AC power. A transformer having a secondary winding having a larger number of turns than the winding, and generating a high-voltage / high-frequency AC power in the secondary winding corresponding to the power received by the primary winding; An output circuit portion disposed in a casing made of an insulating material, and an AC power generated by a secondary winding of the transformer circuit, the AC power generated by the secondary winding being approached or brought into contact with the object to be processed. A small-sized surface treatment apparatus provided with a discharge processing unit having a discharge electrode for generating a corona discharge between the two to supply a power to the switch circuit. Of the conductors,
An earth conductor for connecting a portion of the conductor connected to the AC power potential side pole of the AC power source between the connection portion to the AC power source and the connection portion to the switch circuit to a ground connection portion is provided. A portable small-sized surface treatment device, wherein an electric detector is interposed in the conductor. 9. The portable small surface treatment apparatus according to claim 8, wherein the discharge electrode is covered with a dielectric. 10. The small portable surface treatment apparatus according to claim 8, wherein the voltage detector comprises a resistor and a neon lamp interposed in series with the ground conductor. 11. An electromagnet in which the switching circuit is repeatedly switched between an excited state and a demagnetized state by electric power supplied from the AC power supply, and a contact switch which is opened and closed when the excited state and the demagnetized state of the electromagnet are alternated. A high-frequency AC power is generated by opening and closing the contact switch, and the conductor connected to the AC power potential side pole of the AC power supply is connected to the AC power supply in this order from the connection side. An electromagnet coil, the contact switch, and a primary winding of the transformer circuit are interposed in series, and the ground conductor is provided between a connection portion of the conductor to an AC power supply and the coil of the electromagnet. The portable small surface treatment apparatus according to any one of claims 8 to 10, wherein the part is connected to a ground connection part. 12. An electromagnetic wave shielding layer made of a conductive material is provided on at least one of an outer surface and an inner surface of the casing, and the electromagnetic wave shielding layer is connected to the ground connection portion. A portable small-sized surface treatment apparatus according to any one of 8 to 11. 13. The electromagnetic wave shielding layer has a thickness of 0.01 m.
m or more and 5 mm or less,
A small portable surface treatment apparatus according to claim 12. 14. A tube for covering said discharge electrode, wherein said discharge electrode is a flexible loop-shaped metal member, and said dielectric is made of fluororesin, silicone resin, polyurethane, polyolefin or vinyl chloride. The portable small surface treatment apparatus according to any one of claims 2 to 7 or 9 to 13, characterized in that: