JPH1149504A - Separator for waste active carbon and water - Google Patents

Separator for waste active carbon and water

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Publication number
JPH1149504A
JPH1149504A JP9202086A JP20208697A JPH1149504A JP H1149504 A JPH1149504 A JP H1149504A JP 9202086 A JP9202086 A JP 9202086A JP 20208697 A JP20208697 A JP 20208697A JP H1149504 A JPH1149504 A JP H1149504A
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Japan
Prior art keywords
water
storage tank
active carbon
activated carbon
spent
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Pending
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JP9202086A
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Japanese (ja)
Inventor
Yuji Furuhashi
Masakazu Ota
勇二 古橋
正和 太田
Original Assignee
Toshiba Corp
Toshiba Eng Co Ltd
東芝エンジニアリング株式会社
株式会社東芝
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Application filed by Toshiba Corp, Toshiba Eng Co Ltd, 東芝エンジニアリング株式会社, 株式会社東芝 filed Critical Toshiba Corp
Priority to JP9202086A priority Critical patent/JPH1149504A/en
Publication of JPH1149504A publication Critical patent/JPH1149504A/en
Application status is Pending legal-status Critical

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Abstract

PROBLEM TO BE SOLVED: To provide a separator for waste active carbon and water which is simple in a separating mechanism for the waste active carbon and the water, is capable of separating the water under a low hydrostatic head pressure, is simple in the structure of a storage tank and a discharge water receiver, does not cause the crushing of the waste active carbon and lessens the generation of the powder and filtrate of the waste active carbon. SOLUTION: This separator consists of the waste active carbon storage tank 1 which houses a mixture composed of the waste active carbon 2 and the water 3, the discharge water receiver 4 which has a water head (H) and is arranged adjacently to this waste active carbon storage tank 1 and a water outflow member 5 which is disposed so as to allow the inside of this discharge water receiver 4 to communicate with the inside of the waste active carbon storage tank l and sucks and discharges the water 3 by capillarity. The water outflow member 5 consists of piping 6, and fibrous material 7 consisting of cloth, yarn, cotton, etc. The water 3 in the waste active carbon storage tank 1 is discharged along the fibrous material 7 of the water outflow member 5 by the capillarity and is admitted into the discharge water receiver 4.

Description

【発明の詳細な説明】 DETAILED DESCRIPTION OF THE INVENTION

【0001】 [0001]

【発明の属する技術分野】本発明は原子力発電所や燃料再処理施設等における処理水を活性炭でろ過した後の廃活性炭と水との分離装置に関する。 The present invention relates to relates to separation apparatus of spent carbon with water after the treatment water in nuclear power plants and fuel reprocessing facilities and filtered with activated carbon.

【0002】 [0002]

【従来の技術】原子力発電所や使用時燃料再処理施設では活性炭を使用して被処理水を処理して浄化している。 BACKGROUND OF THE INVENTION In a nuclear power plant and used during the fuel reprocessing facility has been cleaned and treated water to be treated by using activated carbon.
例えば再処理施設の使用済の活性炭、つまり廃活性炭を処理する場合、廃活性炭槽において水分を除く作業を行った後、分離された廃活性炭はドラム缶等で保管することになっている。 Such as activated carbon of spent reprocessing facility, that is, when processing a waste activated carbon, after working with the exception of water in the waste activated carbon tank, the separated spent carbon is supposed to be stored in drums or the like.

【0003】この廃活性炭が混合したものから水のみを除く処理を行うにはいろいろな方法がある。 [0003] There are a variety of ways to do the processing, except for only water from what the waste activated carbon were mixed. 例えばヌッチェ式加圧ろ過器を使用して、圧縮空気を容器内に加えてフィルタにより水をろ過した後、ヒーティングして回転羽根により乾燥した廃活性炭を掻き出して排出する加圧ろ過方式が知られている。 For example using Nutsche pressure filter, filtered water by filtering the compressed air in addition to the container, pressure filtration method to discharge scraping the spent activated carbon was dried by rotating blades and coating heating is known It is. また、廃活性炭と水との混合物を容器内に収納し、容器全体を回転させて遠心力を発生させ、この遠心力によって生じる比重差により容器外周部に廃活性炭を、内側に水を分離してそれぞれ排出させる遠心分離方式が知られている。 Further, a mixture of spent carbon with water housed in a container, rotating the entire container to generate centrifugal force, the spent carbon to the container outer peripheral part by a difference in specific gravity caused by the centrifugal force, the water is separated inwardly centrifugal separation method for discharging respectively Te is known. さらに、加圧ろ過方式と遠心分離方式とを組み合わせた第3の分離方式が知られている。 The third separation method which combines a pressure filtration method and centrifugation method are known.

【0004】 [0004]

【発明が解決しようとする課題】加圧ろ過方式では圧縮空気ユニットの設置と、容器が加圧されることによる胴の肉厚化により強固なものとする必要があり、また、フィルタが破損し易く、定期的な交換が必要であり、ヒーティングによるエネルギーも多く要する課題がある。 And installation of the compressed air unit in the pressure filtration method [0005], the container must be assumed strengthened by thickening of the body due to pressurized, The filter is broken easily, it requires periodic replacement, there is a problem that requires many energy by heating.

【0005】遠心分離方式では軽い微細浮遊物である粉末活性炭の分離が困難であること、遠心力により活性炭同士が衝突し合って押しつぶすので、活性炭の破損が多い。 [0005] In the centrifugal separation method is difficult to separate the powder activated carbon is lighter fine suspended matter, since crush with each other by the activated carbon each other collision by centrifugal force, breakage of the activated carbon is large. また、活性炭内部に閉じ込められているろ過物を解放してしまうことが多い。 Also, often resulting in releasing the filtrate that is trapped inside the activated carbon. さらに容器の構造の複雑化, Further complication of the structure of the container,
設置基礎も遠心力を考慮して強固なものとする必要があり、複雑な回転機構で、設備費用がかさむなどの課題がある。 Installation foundation must also be assumed strong in view of the centrifugal force, in a complex rotation mechanism, there are problems such equipment costly.

【0006】さらに、加圧ろ過方式と遠心分離方式を組み合わせた第3の分離方式では活性炭の破損が多く、組み合わせるための設備費用が前記2方式よりも最も高くなるなどの課題がある。 Furthermore, in the third separation method which combines pressure filtration method and centrifugal separation method has problems such as breakage of the activated carbon is large and equipment cost for combining is highest than the two systems.

【0007】本発明は上記課題を解決するためになされたもので、廃活性炭と水とを分離するための機構が単純で、静水頭圧で水を分離することができ、容器の構造が単純で、撹拌等の工程がなく、水の分離過程での廃活性炭の破砕が生じることがなく、活性炭の粉末やろ過物の発生の少ない廃活性炭と水との分離装置を提供することにある。 [0007] The present invention has been made to solve the above problems, a mechanism for separating the spent carbon with water is simple, it is possible to separate the water hydrostatic head pressure, a simple structure of the container in, no step of stirring or the like, without crushing the spent carbon with water in the separation process occurs, it is to provide a separation device of the less spent carbon with water occurrence of active carbon powder or filtrate.

【0008】 [0008]

【課題を解決するための手段】請求項1の発明は、廃活性炭と水との混合物を収納した廃活性炭貯槽と、この廃活性炭貯槽に隣接して水頭(H)を有して配置された排出水受容器と、この排出水受容器内と前記廃活性炭貯槽内を連通して設けられた毛細血管現象により前記水を吸い込んで流出する水流出部材とを具備したことを特徴とする。 Means for Solving the Problems of claims 1 invention, the spent activated carbon storage tank accommodating the mixture of spent carbon and water, which is arranged with a water head (H) adjacent to the spent carbon tank and effluent receptacle, characterized by comprising a water outlet member exiting suck the water by capillary phenomenon is provided in communication with the effluent receiving vessel and the spent carbon storage tank.

【0009】請求項2の発明は、前記水流出部材は配管と、この配管内に充填された布,糸,綿等の繊維材料とからなることを特徴とする。 [0009] The invention of claim 2, wherein the water outlet member is a pipe, characterized in that it consists of the fabric which is filled in the pipe, yarn, and fiber materials such as cotton. 請求項3の発明は、前記排水受容器内の前記水流出部材の末端部は前記排水受容器の水面より上方に位置するように設定してなることを特徴とする。 A third aspect of the present invention, the distal end of the water outlet member in the drainage receptacle is characterized by being set so as to be positioned above the water surface of the drainage receptacle.

【0010】請求項1〜3の発明においては、水流出部材に毛細管現象により水を吸い込んで流出し得る布, [0010] In the invention of claims 1 to 3, may flow out sucks water by capillary action water outlet member cloth,
糸,綿等の繊維材料を使用する。 Thread, using a fiber material such as cotton. この水流出部材により水のみが繊維材料を伝わり排出水受容器へと排出され、 By this water flux member only water is discharged into the discharge water receiver transmitted a fiber material,
廃活性炭槽内に固形物である廃活性炭や残渣分が残る。 Spent carbon and residual 渣分 a solid in spent carbon tank remains.

【0011】水が繊維材料を伝わり排出されるためには、排出水受容器は水の逆流を防止するため、廃活性炭槽より下方に配置し、水流出部材の排出端は排出水受容器内の水面以上に位置するように設定する。 [0011] Since water is discharged transmitted the fiber material, for discharging water receptacle is to prevent backflow of water, placed below the spent carbon tank, the discharge end of the water outlet member is in the discharge water receptacle set of to be located above the water surface.

【0012】請求項1〜3によれば、水の分離に駆動力を使用する必要がないので、静水頭圧で運用ができ、廃活性炭槽や排出水受容器の構造を単純化でき、またきわめて省エネルギーで、廃活性炭と水とを分離することができる。 According to claims 1 to 3, it is not necessary to use the driving force for the separation of water, can be operated in hydrostatic head pressure, it can simplify the structure of the spent activated carbon tank or effluent receptors, also in a very energy-saving, it can be separated from the waste activated carbon and water.

【0013】請求項4の発明は、前記廃活性炭貯槽は原子力発電所または燃料再処理施設のろ過器から排出される廃活性炭と水との混合物の貯留タンクからなることを特徴とする。 [0013] The invention of claim 4, wherein the spent carbon reservoir is characterized by comprising a storage tank of the mixture of waste activated carbon and water discharged from the filter of a nuclear power plant or a fuel reprocessing facility.

【0014】請求項4の発明によれば、原子力発電所または再処理施設において、使用済活性炭の処理工程での水分の除去作業を単純化できる。 According to the invention of claim 4, in nuclear power plants or reprocessing facilities, it can be simplified work of removing moisture in the processing steps of the spent activated carbon. 再処理施設等において、廃活性炭はプラント運転中に連続して出てくるものではなく、通常廃活性炭槽前後の圧力損失を測定して、 In reprocessing facilities, spent carbon is not coming out continuously during plant operation, and normally measure the pressure drop across the spent carbon tank,
目詰まり等を生じて圧力損失が大きくなった場合、活性炭を入れ換えることが行われており、一か月に一度程度が妥当な値である。 If the pressure loss becomes larger clogged etc., have been made to replace the activated carbon, a reasonable value is about once in a month. したがって、廃活性炭槽の水の分離を行う時間の裕度があり、水流出部材の本数と排出時間とをそれぞれ配慮して定めておけばよい。 Therefore, there is a tolerance of time for separation of the water of the waste activated carbon tank, and a discharge time and the number of the water outlet member may if determined in consideration respectively. 乾燥した後、 After drying,
廃活性炭槽内に撹拌機等を投入して廃活性炭を排出することができる。 Was put a stirrer or the like in the spent carbon tank can be discharged spent carbon.

【0015】 [0015]

【発明の実施の形態】図1を参照しながら、本発明に係る廃活性炭と水との分離装置の実施の形態を詳しく説明する。 With reference to the DETAILED DESCRIPTION OF THE INVENTION Figure 1, an embodiment of the separation device of the spent activated carbon and water according to the present invention in detail. 図1中、符号1は廃活性炭貯槽で、この廃活性炭貯槽1内には廃活性炭2と水3との混合物が収納されている。 1, reference numeral 1 denotes a spent activated carbon storage tank, a mixture of spent carbon 2 and water 3 is housed in the spent carbon storage tank 1. 符号4は排出水受容器で、この排出水受容器4と廃活性炭貯槽1とは水流出部材5によって連通されている。 Reference numeral 4 denotes a discharge water receiver, are connected with each other by a water outflow member 5 and the discharge water receptacle 4 and spent carbon storage tank 1. 水流出部材5は配管6内に布,糸,綿等の繊維材料7に充填されたものからなっている。 Water outflow member 5 is made from those filled into the pipe 6 fabric, yarn, the fiber material 7 such as cotton.

【0016】繊維材料7は廃活性炭貯槽1内の水3を毛細管現象により吸い込んで廃活性炭貯槽1内から排出水受容器4内に流出するもので、符号8は流出水を示している。 The fiber material 7 is intended to flow out the discharge water receiving vessel 4 from spent carbon storage tank within 1 water 3 in the spent carbon storage tank 1 is sucked by a capillary phenomenon, reference numeral 8 indicates a runoff. 廃活性炭貯槽1と排出水受容器4とは水頭圧(H)の高さを有して上下に配置されている。 Waste activated carbon storage tank 1 and the effluent receptacle 4 are arranged vertically with a height of hydraulic head pressure (H). なお、図1中、符号10はガス抜き孔兼液体流出入穴である。 1, reference numeral 10 is a gas vent hole and liquid inflow and outflow hole.

【0017】しかして、図1に示すように、本実施の形態の廃活性炭槽1からの水分分離機構は、繊維材料7の末端を廃活性炭槽1内につけ、その槽1の上部から配管6内を繊維材料7を通して、もう一方の末端を排出する側の排出水受容器4へ導くものとする。 [0017] Thus, as shown in FIG. 1, water separation mechanism from the waste activated carbon tank 1 of this embodiment, with the ends of the fiber material 7 in the spent carbon tank 1, piping from the top of the tank 1 6 the inner through fiber material 7, it is assumed that leads to the discharge water receiving container 4 on the side for discharging the other end. 繊維材料7の種類は綿布や水の浸透性が高い化学繊維を用いることもよく、そのプラントの機構上で水分離するのに必要な時間の設定等により、水の性状と繊維材料7の排出能力を考慮して、繊維材料7の材質と本数を選定すればよい。 Type of fiber material 7 may also be used high chemical fiber permeability cotton or water, the setting of the time required for water separated on mechanisms of the plant, discharge of water property and fibrous materials 7 taking into account the capacity may be selected the material and the number of fiber material 7.

【0018】なお、廃活性炭2はプラント運転中に連続して出てくるものではなく、通常、廃活性炭槽1前後の圧力損失を測定して、目詰まり等を起こして圧力損失が大きくなったときに活性炭を入れ替えることが行われており、再処理施設等においては、一月に一度程度が妥当な値である。 [0018] Incidentally, spent carbon 2 is not coming out continuously during plant operation, usually by measuring the pressure drop across the spent activated carbon tank 1, the pressure loss is increased clogged etc. It has been made to replace the active carbon when, at the reprocessing facility, etc., about once a month is a reasonable value. 従って、廃活性炭槽1内の水3の分離を行う時間の裕度があり、水流出部材5の本数と排出時間とはそれぞれを考慮して定めていけばよい。 Therefore, there is a tolerance of time for separation of water 3 in the waste activated carbon tank 1, the number and the discharge time of the water outlet member 5 may hopefully be determined in consideration of each. 乾燥してから後は、撹拌機等を投入して廃活性炭を排出することが可能となる。 After the dried, it is possible to discharge the spent carbon was put a stirrer or the like.

【0019】また、廃活性炭槽1の上部から繊維材料7 [0019] In addition, the fiber material 7 from the upper portion of the waste activated carbon tank 1
が立上げられる寸法は大気圧下において、10mまでであれば毛細管現象は持続するので、この値以内に立上げ寸法を設定する必要があり、導かれる側の排出水受容器4 In There dimension is raised under atmospheric pressure, since capillary action is sustained as long as up to 10 m, it is necessary to set the rising dimension within this value, the side discharge water receiver 4 to be guided
では、水が逆流しないよう廃活性炭槽1より下部に位置するように配置し、排出水受容器側の繊維材料7の末端は水面9に接触しないように、水面9より上で止めておく必要がある。 So water is arranged to be positioned in the lower portion than the spent carbon tank 1 so as not to flow back, the ends of the fiber material 7 for discharging water receiver side so as not to contact the water surface 9, must be stopped above the water surface 9 there is.

【0020】水の浸透性の高い化学繊維を充填した水流出部材5の一端を廃活性炭と水が入り交じった廃活性炭貯槽1内に漬け、水流出部材5の他端を排出水受容器(配管)4側に水に触れぬよう出しておく。 [0020] One end of the water outlet member 5 filled with high chemical fibers water permeability dipped in the waste activated carbon storage tank 1 mingled waste activated carbon and water, discharged water receiver and the other end of the water outlet member 5 ( keep out so as not to touch the water in the pipe) 4 side.

【0021】水自身が毛細管現象(水頭は10mまで立ち上げられる)による布の浸透作用により、水3のみを繊維材料7を伝わって徐々に廃活性炭貯槽1外へ排出させるので、固形物は廃活性炭貯槽1内に残ることとなる。 [0021] by osmotic action of the cloth water itself by capillary action (hydraulic head is raised up to 10m), because only the water 3 is discharged to gradually waste activated carbon tank 1 outside transmitted the fiber material 7, the solid waste and thus it remains in the activated carbon storage tank 1.
再処理施設においては、廃活性炭は約1ケ月に一度の排出としているので、廃活性炭貯槽1の脱水における時間は一ケ月かけて緩慢に行うことができることから、本実施の形態に係る分離装置の排出方法は適合するものと云える。 In the reprocessing facility, since spent carbon is a once discharged to about 1 month, since the time during the dewatering of the waste activated carbon storage tank 1 can be carried out slowly over a period of one months, of the separation device according to the present embodiment those emission method to meet and it can be said.

【0022】本実施の形態によれば、排出水受容器に加わる圧力は静水頭のみであるため、排出水受容器の肉厚を薄くすることができ、かつ、水を排出するための余計なエネルギーや装置類も加える必要がなく、極めて省エネルギーで分離操作を行うことができる。 According to the present embodiment, since the pressure applied to the effluent receptacle is only hydrostatic head, it is possible to reduce the wall thickness of the discharge water receiver, and superfluous for discharging water energy and equipment of any kind it is not necessary to add, it is possible to perform the separation operation at extremely energy-saving. また、圧縮機構を使用しないことから脱水時の廃活性炭の破損が生じない。 Also, it does not cause damage of the waste activated carbon at the time of dehydration because they do not use a compression mechanism. これによって、固形物を含まない水のみの排出が可能となること等からかなり有益な効果を上げることができる。 This makes it possible to increase the substantial beneficial effect from such that it is possible to discharge only water without solids.

【0023】 [0023]

【発明の効果】本発明によれば、動的機構や加圧機構を使用することなく廃活性炭槽から水のみの排出が可能となることで、廃活性炭の破砕も生じない。 According to the present invention, that it is possible to discharge only water from the spent carbon vessel without using a dynamic mechanism and the pressure mechanism, it does not occur crushing of spent carbon. また、廃活性炭内に閉じ込められた残渣分が放出してくることが少ないため、分離水に汚濁が生じにくい。 Further, since it is less residual 渣分 confined in spent carbon comes released, it polluted the separated water is unlikely to occur. また、廃活性炭貯槽や排出水受容器も大気圧下で使用するので、耐圧容器に構成する必要がなく、廃活性炭貯槽や排出水受容器の肉厚を薄くすることができ、水の分離にかかる運転コストを低減することができるなどの効果がある。 Furthermore, since used at atmospheric pressure spent carbon reservoir or effluent receptors, it is not necessary to configure a pressure vessel, it is possible to reduce the wall thickness of the spent activated carbon storage tank and discharged water receptacle, the separation of water such an effect can be reduced such operating costs.

【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS

【図1】本発明に係る廃活性炭と水との分離装置の実施の形態を説明するための一部側面で概略的に示す縦断面図。 Figure 1 is a longitudinal sectional view schematically showing a part side to the embodiment will be described of the separating device of the spent activated carbon and water according to the present invention.

【符号の説明】 DESCRIPTION OF SYMBOLS

1…廃活性炭貯槽、2…廃活性炭、3…水、4…排出水受容器、5…水流出部材、6…配管、7…繊維材料、8 1 ... spent activated carbon storage tank, 2 ... spent activated carbon, 3 ... water, 4 ... effluent receiver, 5 ... water outlet member, 6 ... pipe, 7 ... fibrous material, 8
…流出水、9…水面、10…ガス抜き孔兼液体流出孔、H ... effluent, 9 ... water, 10 ... gas release openings and the liquid outlet hole, H
…水頭。 ... hydrocephalus.

Claims (4)

    【特許請求の範囲】 [The claims]
  1. 【請求項1】 廃活性炭と水との混合物を収納した廃活性炭貯槽と、この廃活性炭貯槽に隣接して水頭(H)を有して配置された排出水受容器と、この排出水受容器内と前記廃活性炭貯槽内を連通して設けられた毛細血管現象により前記水を吸い込んで流出する水流出部材とを具備したことを特徴とする廃活性炭と水との分離装置。 1. A and spent activated carbon storage tank mixture was stored in the waste activated carbon and water, and the effluent receptacle disposed with a water head (H) adjacent to the spent carbon storage tank, the effluent receptacle separating apparatus and the waste activated carbon and water, characterized by comprising a water outlet member exiting suck the water by capillary phenomenon provided the inner and the spent carbon storage tank communicates.
  2. 【請求項2】 前記水流出部材は配管と、この配管内に充填された布,糸,綿等の繊維材料とからなることを特徴とする請求項1記載の廃活性炭と水との分離装置。 Wherein said water outlet member is a pipe, the fabric which is filled in the pipe, thread separation apparatus of spent carbon and water according to claim 1, characterized in that it consists of a fibrous material such as cotton .
  3. 【請求項3】 前記排水受容器内の前記水流出部材の末端部は前記排水受容器の水面より上方に位置するように設定してなることを特徴とする請求項1記載の廃活性炭と水との分離装置。 3. A waste activated carbon and water according to claim 1, wherein the distal end of the water outlet member in the drainage receptacle is characterized by comprising set so as to be positioned above the water surface of the drainage receptacle and of the separation device.
  4. 【請求項4】 前記廃活性炭貯槽は原子力発電所または燃料再処理施設のろ過器から排出される廃活性炭と水との混合物の貯留タンクからなることを特徴とする請求項1記載の廃活性炭と水との分離装置。 Wherein said spent carbon reservoirs and waste activated carbon according to claim 1, characterized in that it consists of a storage tank of the mixture of waste activated carbon and water discharged from the filter of a nuclear power plant or fuel reprocessing facilities separation apparatus with water.
JP9202086A 1997-07-29 1997-07-29 Separator for waste active carbon and water Pending JPH1149504A (en)

Priority Applications (1)

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JP9202086A JPH1149504A (en) 1997-07-29 1997-07-29 Separator for waste active carbon and water

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Application Number Priority Date Filing Date Title
JP9202086A JPH1149504A (en) 1997-07-29 1997-07-29 Separator for waste active carbon and water

Publications (1)

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JPH1149504A true JPH1149504A (en) 1999-02-23

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JP9202086A Pending JPH1149504A (en) 1997-07-29 1997-07-29 Separator for waste active carbon and water

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FR2812219A1 (en) * 2000-07-26 2002-02-01 Suido Kiko Kaishya Ltd "Water treatment device comprising an assembly a filter membrane has pores large"
WO2005036624A1 (en) 2003-10-09 2005-04-21 Nikon Corporation Exposure apparatus, exposure method, and device producing method
WO2007058188A1 (en) 2005-11-15 2007-05-24 Nikon Corporation Exposure apparatus, exposure method and device manufacturing method
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Publication number Priority date Publication date Assignee Title
FR2812219A1 (en) * 2000-07-26 2002-02-01 Suido Kiko Kaishya Ltd "Water treatment device comprising an assembly a filter membrane has pores large"
WO2005036624A1 (en) 2003-10-09 2005-04-21 Nikon Corporation Exposure apparatus, exposure method, and device producing method
JP2010087531A (en) * 2003-10-09 2010-04-15 Nikon Corp Exposure apparatus, exposure method, and method for producing device
EP2717295A1 (en) 2003-12-03 2014-04-09 Nikon Corporation Exposure apparatus, exposure method, and method for producing a device
EP3139214A2 (en) 2003-12-03 2017-03-08 Nikon Corporation Exposure apparatus, exposure method, device producing method, and optical component
WO2007058188A1 (en) 2005-11-15 2007-05-24 Nikon Corporation Exposure apparatus, exposure method and device manufacturing method
WO2007094431A1 (en) 2006-02-16 2007-08-23 Nikon Corporation Exposure apparatus, exposing method, and device manufacturing method
WO2007094414A1 (en) 2006-02-16 2007-08-23 Nikon Corporation Exposure apparatus, exposing method, and device manufacturing method
EP2541325A1 (en) 2006-02-21 2013-01-02 Nikon Corporation Exposure apparatus and exposure method
WO2007145139A1 (en) 2006-06-16 2007-12-21 Nikon Corporation Variable slit device, illuminating device, exposure device, exposure method, and method of manufacturing device
KR101347834B1 (en) * 2012-02-09 2014-01-09 건국대학교 산학협력단 Filter for prevent clogging

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