JPH1149504A - Separator for waste active carbon and water - Google Patents
Separator for waste active carbon and waterInfo
- Publication number
- JPH1149504A JPH1149504A JP9202086A JP20208697A JPH1149504A JP H1149504 A JPH1149504 A JP H1149504A JP 9202086 A JP9202086 A JP 9202086A JP 20208697 A JP20208697 A JP 20208697A JP H1149504 A JPH1149504 A JP H1149504A
- Authority
- JP
- Japan
- Prior art keywords
- water
- activated carbon
- waste activated
- storage tank
- active carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Water Treatment By Sorption (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は原子力発電所や燃料
再処理施設等における処理水を活性炭でろ過した後の廃
活性炭と水との分離装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for separating waste activated carbon and water after filtering treated water in a nuclear power plant or a fuel reprocessing facility with activated carbon.
【0002】[0002]
【従来の技術】原子力発電所や使用時燃料再処理施設で
は活性炭を使用して被処理水を処理して浄化している。
例えば再処理施設の使用済の活性炭、つまり廃活性炭を
処理する場合、廃活性炭槽において水分を除く作業を行
った後、分離された廃活性炭はドラム缶等で保管するこ
とになっている。2. Description of the Related Art At a nuclear power plant and a fuel reprocessing facility during use, treated water is treated and purified using activated carbon.
For example, in the case of treating used activated carbon in a reprocessing facility, that is, waste activated carbon, after removing water in a waste activated carbon tank, the separated waste activated carbon is stored in a drum or the like.
【0003】この廃活性炭が混合したものから水のみを
除く処理を行うにはいろいろな方法がある。例えばヌッ
チェ式加圧ろ過器を使用して、圧縮空気を容器内に加え
てフィルタにより水をろ過した後、ヒーティングして回
転羽根により乾燥した廃活性炭を掻き出して排出する加
圧ろ過方式が知られている。また、廃活性炭と水との混
合物を容器内に収納し、容器全体を回転させて遠心力を
発生させ、この遠心力によって生じる比重差により容器
外周部に廃活性炭を、内側に水を分離してそれぞれ排出
させる遠心分離方式が知られている。さらに、加圧ろ過
方式と遠心分離方式とを組み合わせた第3の分離方式が
知られている。There are various methods for performing a treatment for removing only water from a mixture of the waste activated carbon. For example, a pressurized filtration method is known in which compressed air is added to the inside of a container using a Nutsche type pressure filter, water is filtered by a filter, and the waste activated carbon that has been heated and dried by a rotating blade is scraped and discharged. Have been. In addition, the mixture of waste activated carbon and water is stored in a container, and the entire container is rotated to generate centrifugal force.The specific gravity difference caused by this centrifugal force separates waste activated carbon on the outer periphery of the container and separates water inside. There is known a centrifugal separation method in which each is discharged. Further, a third separation method combining a pressure filtration method and a centrifugal separation method is known.
【0004】[0004]
【発明が解決しようとする課題】加圧ろ過方式では圧縮
空気ユニットの設置と、容器が加圧されることによる胴
の肉厚化により強固なものとする必要があり、また、フ
ィルタが破損し易く、定期的な交換が必要であり、ヒー
ティングによるエネルギーも多く要する課題がある。In the pressurized filtration system, it is necessary to install a compressed air unit and to increase the thickness of the body by pressurizing the container. It is easy to use, requires regular replacement, and requires a lot of energy from heating.
【0005】遠心分離方式では軽い微細浮遊物である粉
末活性炭の分離が困難であること、遠心力により活性炭
同士が衝突し合って押しつぶすので、活性炭の破損が多
い。また、活性炭内部に閉じ込められているろ過物を解
放してしまうことが多い。さらに容器の構造の複雑化,
設置基礎も遠心力を考慮して強固なものとする必要があ
り、複雑な回転機構で、設備費用がかさむなどの課題が
ある。[0005] In the centrifugal separation method, it is difficult to separate powdered activated carbon, which is a light fine suspended substance, and activated carbons collide with each other due to centrifugal force and are crushed. In addition, it often releases the filtrate trapped inside the activated carbon. Furthermore, the structure of the container is complicated,
The installation foundation also needs to be strong in consideration of the centrifugal force, and there are problems such as a complicated rotation mechanism and increased equipment costs.
【0006】さらに、加圧ろ過方式と遠心分離方式を組
み合わせた第3の分離方式では活性炭の破損が多く、組
み合わせるための設備費用が前記2方式よりも最も高く
なるなどの課題がある。Further, the third separation method, which combines the pressure filtration method and the centrifugal separation method, has a problem that the activated carbon is often damaged, and the equipment cost for the combination is higher than that of the two methods.
【0007】本発明は上記課題を解決するためになされ
たもので、廃活性炭と水とを分離するための機構が単純
で、静水頭圧で水を分離することができ、容器の構造が
単純で、撹拌等の工程がなく、水の分離過程での廃活性
炭の破砕が生じることがなく、活性炭の粉末やろ過物の
発生の少ない廃活性炭と水との分離装置を提供すること
にある。The present invention has been made to solve the above-mentioned problems, and has a simple mechanism for separating waste activated carbon and water, can separate water with a hydrostatic head pressure, and has a simple container structure. Accordingly, it is an object of the present invention to provide an apparatus for separating water from waste activated carbon, which does not involve a step of stirring or the like, does not cause crushing of the activated carbon in the process of separating water, and generates little powder of the activated carbon or a filtrate.
【0008】[0008]
【課題を解決するための手段】請求項1の発明は、廃活
性炭と水との混合物を収納した廃活性炭貯槽と、この廃
活性炭貯槽に隣接して水頭(H)を有して配置された排
出水受容器と、この排出水受容器内と前記廃活性炭貯槽
内を連通して設けられた毛細血管現象により前記水を吸
い込んで流出する水流出部材とを具備したことを特徴と
する。According to a first aspect of the present invention, there is provided a waste activated carbon storage tank containing a mixture of waste activated carbon and water, and a water head (H) disposed adjacent to the waste activated carbon storage tank. It is characterized by comprising a discharge water receiver, and a water outflow member which is provided so as to communicate between the discharge water receiver and the waste activated carbon storage tank and sucks and flows out the water by capillary action.
【0009】請求項2の発明は、前記水流出部材は配管
と、この配管内に充填された布,糸,綿等の繊維材料と
からなることを特徴とする。請求項3の発明は、前記排
水受容器内の前記水流出部材の末端部は前記排水受容器
の水面より上方に位置するように設定してなることを特
徴とする。A second aspect of the present invention is characterized in that the water outflow member is made of a pipe and a fiber material such as cloth, thread, and cotton filled in the pipe. The invention of claim 3 is characterized in that the end of the water outflow member in the drainage receptacle is set to be located above the water surface of the drainage receptacle.
【0010】請求項1〜3の発明においては、水流出部
材に毛細管現象により水を吸い込んで流出し得る布,
糸,綿等の繊維材料を使用する。この水流出部材により
水のみが繊維材料を伝わり排出水受容器へと排出され、
廃活性炭槽内に固形物である廃活性炭や残渣分が残る。According to the first to third aspects of the present invention, there is provided a cloth capable of sucking water out of the water outflow member by capillary action and flowing out.
Use fiber materials such as yarn and cotton. By this water outflow member, only water is transmitted through the fiber material and discharged to the discharge water receiver,
Solid activated carbon waste and residue remain in the waste activated carbon tank.
【0011】水が繊維材料を伝わり排出されるために
は、排出水受容器は水の逆流を防止するため、廃活性炭
槽より下方に配置し、水流出部材の排出端は排出水受容
器内の水面以上に位置するように設定する。In order for water to be transmitted through the fiber material and discharged, the discharge water receiver is disposed below the waste activated carbon tank in order to prevent the backflow of water, and the discharge end of the water outflow member is located in the discharge water receiver. Set to be above the water surface of.
【0012】請求項1〜3によれば、水の分離に駆動力
を使用する必要がないので、静水頭圧で運用ができ、廃
活性炭槽や排出水受容器の構造を単純化でき、またきわ
めて省エネルギーで、廃活性炭と水とを分離することが
できる。According to the first to third aspects, it is not necessary to use a driving force for water separation, so that the operation can be performed with a hydrostatic head pressure, and the structures of the waste activated carbon tank and the discharged water receiver can be simplified. It is possible to separate waste activated carbon and water with extremely low energy consumption.
【0013】請求項4の発明は、前記廃活性炭貯槽は原
子力発電所または燃料再処理施設のろ過器から排出され
る廃活性炭と水との混合物の貯留タンクからなることを
特徴とする。[0013] The invention of claim 4 is characterized in that the waste activated carbon storage tank comprises a storage tank for a mixture of waste activated carbon and water discharged from a filter of a nuclear power plant or a fuel reprocessing facility.
【0014】請求項4の発明によれば、原子力発電所ま
たは再処理施設において、使用済活性炭の処理工程での
水分の除去作業を単純化できる。再処理施設等におい
て、廃活性炭はプラント運転中に連続して出てくるもの
ではなく、通常廃活性炭槽前後の圧力損失を測定して、
目詰まり等を生じて圧力損失が大きくなった場合、活性
炭を入れ換えることが行われており、一か月に一度程度
が妥当な値である。したがって、廃活性炭槽の水の分離
を行う時間の裕度があり、水流出部材の本数と排出時間
とをそれぞれ配慮して定めておけばよい。乾燥した後、
廃活性炭槽内に撹拌機等を投入して廃活性炭を排出する
ことができる。According to the fourth aspect of the present invention, in the nuclear power plant or the reprocessing facility, the operation of removing water in the process of treating used activated carbon can be simplified. In reprocessing facilities, waste activated carbon does not come out continuously during plant operation, but usually measures the pressure loss around the waste activated carbon tank,
When pressure loss increases due to clogging or the like, the activated carbon is replaced, and about once a month is a reasonable value. Therefore, there is a margin of time for separating the water in the waste activated carbon tank, and the number of the water outflow members and the discharge time may be determined in consideration of each. After drying,
A waste activated carbon can be discharged by putting a stirrer or the like into the waste activated carbon tank.
【0015】[0015]
【発明の実施の形態】図1を参照しながら、本発明に係
る廃活性炭と水との分離装置の実施の形態を詳しく説明
する。図1中、符号1は廃活性炭貯槽で、この廃活性炭
貯槽1内には廃活性炭2と水3との混合物が収納されて
いる。符号4は排出水受容器で、この排出水受容器4と
廃活性炭貯槽1とは水流出部材5によって連通されてい
る。水流出部材5は配管6内に布,糸,綿等の繊維材料
7に充填されたものからなっている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS With reference to FIG. 1, an embodiment of a device for separating waste activated carbon and water according to the present invention will be described in detail. In FIG. 1, reference numeral 1 denotes a waste activated carbon storage tank in which a mixture of waste activated carbon 2 and water 3 is stored. Reference numeral 4 denotes a discharged water receiver, and the discharged water receiver 4 and the waste activated carbon storage tank 1 are connected by a water outflow member 5. The water outflow member 5 is formed of a pipe 6 filled with a fiber material 7 such as cloth, thread, or cotton.
【0016】繊維材料7は廃活性炭貯槽1内の水3を毛
細管現象により吸い込んで廃活性炭貯槽1内から排出水
受容器4内に流出するもので、符号8は流出水を示して
いる。廃活性炭貯槽1と排出水受容器4とは水頭圧
(H)の高さを有して上下に配置されている。なお、図
1中、符号10はガス抜き孔兼液体流出入穴である。The fiber material 7 sucks the water 3 in the waste activated carbon storage tank 1 by capillary action, and flows out from the waste activated carbon storage tank 1 into the discharge water receiver 4, and reference numeral 8 denotes outflow water. The waste activated carbon storage tank 1 and the discharged water receiver 4 are arranged vertically with a head pressure (H). In FIG. 1, reference numeral 10 denotes a gas vent hole and a liquid outflow / inflow hole.
【0017】しかして、図1に示すように、本実施の形
態の廃活性炭槽1からの水分分離機構は、繊維材料7の
末端を廃活性炭槽1内につけ、その槽1の上部から配管
6内を繊維材料7を通して、もう一方の末端を排出する
側の排出水受容器4へ導くものとする。繊維材料7の種
類は綿布や水の浸透性が高い化学繊維を用いることもよ
く、そのプラントの機構上で水分離するのに必要な時間
の設定等により、水の性状と繊維材料7の排出能力を考
慮して、繊維材料7の材質と本数を選定すればよい。As shown in FIG. 1, the mechanism for separating water from the waste activated carbon tank 1 of this embodiment is such that the end of the fiber material 7 is placed in the waste activated carbon tank 1, and the pipe 6 extends from the top of the tank 1. The inside is guided through the fiber material 7 to the discharge water receiver 4 on the side from which the other end is discharged. The type of the fiber material 7 may be a cotton cloth or a chemical fiber having a high water permeability. The nature of the water and the discharge of the fiber material 7 may be determined by setting the time required for water separation on the mechanism of the plant. The material and the number of the fiber materials 7 may be selected in consideration of the capacity.
【0018】なお、廃活性炭2はプラント運転中に連続
して出てくるものではなく、通常、廃活性炭槽1前後の
圧力損失を測定して、目詰まり等を起こして圧力損失が
大きくなったときに活性炭を入れ替えることが行われて
おり、再処理施設等においては、一月に一度程度が妥当
な値である。従って、廃活性炭槽1内の水3の分離を行
う時間の裕度があり、水流出部材5の本数と排出時間と
はそれぞれを考慮して定めていけばよい。乾燥してから
後は、撹拌機等を投入して廃活性炭を排出することが可
能となる。Incidentally, the waste activated carbon 2 does not continuously come out during the operation of the plant. Usually, the pressure loss around the waste activated carbon tank 1 is measured, and the pressure loss becomes large due to clogging and the like. Activated carbon is sometimes replaced, and in reprocessing facilities etc., about once a month is a reasonable value. Therefore, there is a margin of time for separating the water 3 in the waste activated carbon tank 1, and the number of the water outflow members 5 and the discharge time may be determined in consideration of each. After drying, it becomes possible to discharge the waste activated carbon by introducing a stirrer or the like.
【0019】また、廃活性炭槽1の上部から繊維材料7
が立上げられる寸法は大気圧下において、10mまでであ
れば毛細管現象は持続するので、この値以内に立上げ寸
法を設定する必要があり、導かれる側の排出水受容器4
では、水が逆流しないよう廃活性炭槽1より下部に位置
するように配置し、排出水受容器側の繊維材料7の末端
は水面9に接触しないように、水面9より上で止めてお
く必要がある。Further, the fiber material 7 from the upper part of the waste activated carbon tank 1
Since the capillary phenomenon is continued up to 10 m under atmospheric pressure, the rising dimension needs to be set within this value.
In this case, it is necessary to dispose the fiber material 7 below the waste activated carbon tank 1 so that water does not flow backward, and to stop the end of the fiber material 7 on the discharge water receiver side above the water surface 9 so as not to contact the water surface 9. There is.
【0020】水の浸透性の高い化学繊維を充填した水流
出部材5の一端を廃活性炭と水が入り交じった廃活性炭
貯槽1内に漬け、水流出部材5の他端を排出水受容器
(配管)4側に水に触れぬよう出しておく。One end of a water outflow member 5 filled with chemical fibers having high water permeability is immersed in a waste activated carbon storage tank 1 in which waste activated carbon and water are mixed, and the other end of the water outflow member 5 is discharged water receiver ( Pipe (pipe) 4 side so as not to touch water.
【0021】水自身が毛細管現象(水頭は10mまで立ち
上げられる)による布の浸透作用により、水3のみを繊
維材料7を伝わって徐々に廃活性炭貯槽1外へ排出させ
るので、固形物は廃活性炭貯槽1内に残ることとなる。
再処理施設においては、廃活性炭は約1ケ月に一度の排
出としているので、廃活性炭貯槽1の脱水における時間
は一ケ月かけて緩慢に行うことができることから、本実
施の形態に係る分離装置の排出方法は適合するものと云
える。The water itself is transmitted through the fiber material 7 and gradually discharged to the outside of the waste activated carbon storage tank 1 by the permeation of the cloth due to the capillary phenomenon (the head rises up to 10 m). It will remain in the activated carbon storage tank 1.
In the reprocessing facility, the waste activated carbon is discharged about once a month, so that the time for dewatering the waste activated carbon storage tank 1 can be slowly performed over one month. The discharge method can be said to be compatible.
【0022】本実施の形態によれば、排出水受容器に加
わる圧力は静水頭のみであるため、排出水受容器の肉厚
を薄くすることができ、かつ、水を排出するための余計
なエネルギーや装置類も加える必要がなく、極めて省エ
ネルギーで分離操作を行うことができる。また、圧縮機
構を使用しないことから脱水時の廃活性炭の破損が生じ
ない。これによって、固形物を含まない水のみの排出が
可能となること等からかなり有益な効果を上げることが
できる。According to the present embodiment, the pressure applied to the discharge water receiver is only the hydrostatic head, so that the thickness of the discharge water receiver can be reduced, and there is no extra water discharge. There is no need to add energy or equipment, and the separation operation can be performed with extremely low energy consumption. Further, since the compression mechanism is not used, the waste activated carbon is not damaged during dehydration. As a result, it is possible to discharge only water that does not contain solid matter, and thus a considerably beneficial effect can be obtained.
【0023】[0023]
【発明の効果】本発明によれば、動的機構や加圧機構を
使用することなく廃活性炭槽から水のみの排出が可能と
なることで、廃活性炭の破砕も生じない。また、廃活性
炭内に閉じ込められた残渣分が放出してくることが少な
いため、分離水に汚濁が生じにくい。また、廃活性炭貯
槽や排出水受容器も大気圧下で使用するので、耐圧容器
に構成する必要がなく、廃活性炭貯槽や排出水受容器の
肉厚を薄くすることができ、水の分離にかかる運転コス
トを低減することができるなどの効果がある。According to the present invention, since only water can be discharged from the waste activated carbon tank without using a dynamic mechanism or a pressurizing mechanism, crushing of waste activated carbon does not occur. Further, since the residue trapped in the waste activated carbon is hardly released, the separated water is less likely to be polluted. In addition, since the waste activated carbon storage tank and the wastewater receiver are also used under atmospheric pressure, there is no need to construct a pressure-resistant container, and the thickness of the waste activated carbon storage tank and the wastewater receiver can be reduced, making it possible to separate water. There are effects such as reduction of such operation costs.
【図1】本発明に係る廃活性炭と水との分離装置の実施
の形態を説明するための一部側面で概略的に示す縦断面
図。FIG. 1 is a longitudinal sectional view schematically showing a partial side view for describing an embodiment of a separation apparatus for waste activated carbon and water according to the present invention.
1…廃活性炭貯槽、2…廃活性炭、3…水、4…排出水
受容器、5…水流出部材、6…配管、7…繊維材料、8
…流出水、9…水面、10…ガス抜き孔兼液体流出孔、H
…水頭。DESCRIPTION OF SYMBOLS 1 ... Waste activated carbon storage tank, 2 ... Waste activated carbon, 3 ... Water, 4 ... Discharged water receiver, 5 ... Water outflow member, 6 ... Piping, 7 ... Fiber material, 8
... outflow water, 9 ... water surface, 10 ... gas vent hole and liquid outflow hole, H
... water head.
Claims (4)
性炭貯槽と、この廃活性炭貯槽に隣接して水頭(H)を
有して配置された排出水受容器と、この排出水受容器内
と前記廃活性炭貯槽内を連通して設けられた毛細血管現
象により前記水を吸い込んで流出する水流出部材とを具
備したことを特徴とする廃活性炭と水との分離装置。1. A waste activated carbon storage tank containing a mixture of waste activated carbon and water, a discharged water receiver disposed with a water head (H) adjacent to the waste activated carbon storage tank, and the discharged water receiver And a water outflow member which sucks and flows out the water by capillary action and is provided so as to communicate between the inside of the waste activated carbon storage tank and the waste activated carbon storage tank.
充填された布,糸,綿等の繊維材料とからなることを特
徴とする請求項1記載の廃活性炭と水との分離装置。2. The separation device for waste activated carbon and water according to claim 1, wherein the water outflow member is made of a pipe and a fiber material such as cloth, thread, and cotton filled in the pipe. .
端部は前記排水受容器の水面より上方に位置するように
設定してなることを特徴とする請求項1記載の廃活性炭
と水との分離装置。3. The waste activated carbon and water according to claim 1, wherein an end of the water outflow member in the drainage receiver is set to be higher than a water surface of the drainage receiver. And separation equipment.
燃料再処理施設のろ過器から排出される廃活性炭と水と
の混合物の貯留タンクからなることを特徴とする請求項
1記載の廃活性炭と水との分離装置。4. The waste activated carbon storage tank according to claim 1, wherein the waste activated carbon storage tank comprises a storage tank of a mixture of waste activated carbon and water discharged from a filter of a nuclear power plant or a fuel reprocessing facility. Water separation equipment.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9202086A JPH1149504A (en) | 1997-07-29 | 1997-07-29 | Separator for waste active carbon and water |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9202086A JPH1149504A (en) | 1997-07-29 | 1997-07-29 | Separator for waste active carbon and water |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH1149504A true JPH1149504A (en) | 1999-02-23 |
Family
ID=16451743
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9202086A Pending JPH1149504A (en) | 1997-07-29 | 1997-07-29 | Separator for waste active carbon and water |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH1149504A (en) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2812219A1 (en) * | 2000-07-26 | 2002-02-01 | Suido Kiko Kaishya Ltd | "WATER TREATMENT DEVICE COMPRISING A MEMBRANE FILTER ASSEMBLY WITH LARGE SIZE PORTS" |
WO2005036624A1 (en) | 2003-10-09 | 2005-04-21 | Nikon Corporation | Exposure apparatus, exposure method, and device producing method |
WO2007058188A1 (en) | 2005-11-15 | 2007-05-24 | Nikon Corporation | Exposure apparatus, exposure method and device manufacturing method |
WO2007094414A1 (en) | 2006-02-16 | 2007-08-23 | Nikon Corporation | Exposure apparatus, exposing method, and device manufacturing method |
WO2007094431A1 (en) | 2006-02-16 | 2007-08-23 | Nikon Corporation | Exposure apparatus, exposing method, and device manufacturing method |
WO2007145139A1 (en) | 2006-06-16 | 2007-12-21 | Nikon Corporation | Variable slit device, illuminating device, exposure device, exposure method, and method of manufacturing device |
EP2541325A1 (en) | 2006-02-21 | 2013-01-02 | Nikon Corporation | Exposure apparatus and exposure method |
KR101347834B1 (en) * | 2012-02-09 | 2014-01-09 | 건국대학교 산학협력단 | Filter for prevent clogging |
EP2717295A1 (en) | 2003-12-03 | 2014-04-09 | Nikon Corporation | Exposure apparatus, exposure method, and method for producing a device |
-
1997
- 1997-07-29 JP JP9202086A patent/JPH1149504A/en active Pending
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2812219A1 (en) * | 2000-07-26 | 2002-02-01 | Suido Kiko Kaishya Ltd | "WATER TREATMENT DEVICE COMPRISING A MEMBRANE FILTER ASSEMBLY WITH LARGE SIZE PORTS" |
WO2005036624A1 (en) | 2003-10-09 | 2005-04-21 | Nikon Corporation | Exposure apparatus, exposure method, and device producing method |
JP2010087531A (en) * | 2003-10-09 | 2010-04-15 | Nikon Corp | Exposure apparatus, exposure method, and method for producing device |
EP2717295A1 (en) | 2003-12-03 | 2014-04-09 | Nikon Corporation | Exposure apparatus, exposure method, and method for producing a device |
EP3139214A2 (en) | 2003-12-03 | 2017-03-08 | Nikon Corporation | Exposure apparatus, exposure method, device producing method, and optical component |
WO2007058188A1 (en) | 2005-11-15 | 2007-05-24 | Nikon Corporation | Exposure apparatus, exposure method and device manufacturing method |
WO2007094414A1 (en) | 2006-02-16 | 2007-08-23 | Nikon Corporation | Exposure apparatus, exposing method, and device manufacturing method |
WO2007094431A1 (en) | 2006-02-16 | 2007-08-23 | Nikon Corporation | Exposure apparatus, exposing method, and device manufacturing method |
EP2541325A1 (en) | 2006-02-21 | 2013-01-02 | Nikon Corporation | Exposure apparatus and exposure method |
WO2007145139A1 (en) | 2006-06-16 | 2007-12-21 | Nikon Corporation | Variable slit device, illuminating device, exposure device, exposure method, and method of manufacturing device |
KR101347834B1 (en) * | 2012-02-09 | 2014-01-09 | 건국대학교 산학협력단 | Filter for prevent clogging |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH1149504A (en) | Separator for waste active carbon and water | |
JPS6255885B2 (en) | ||
KR101204207B1 (en) | Fiber Bits Filter | |
JP2004121955A (en) | Sludge concentration apparatus and method for washing the same | |
GB1603681A (en) | Method and apparatus for sludge treatment | |
JPH0884913A (en) | Complex filter | |
JPH0437729B2 (en) | ||
JP2006035178A (en) | Apparatus, system and treatment method for recovering sludge | |
CN211226656U (en) | Low-emission construction waste reconstruction production line | |
JPH11128967A (en) | Apparatus for treating waste water | |
CZ289597A3 (en) | Method of separating solid substance from liquids and/or emulsion breaking | |
CN215388103U (en) | Papermaking plain boiled water processing apparatus | |
CN116332443B (en) | Washing machine wastewater air energy heating regeneration recycling device and method | |
CN211097931U (en) | Water based paint recycling device without discharge | |
JP3835395B2 (en) | Filtration equipment using fiber filter media | |
JP3181224U (en) | Muddy water filtration device and soil washing treatment system | |
JP3649382B2 (en) | Filtration equipment using floating media | |
JPS6146580B2 (en) | ||
JPS61157306A (en) | Method for washing hollow yarn membrane | |
JPS558818A (en) | Washing of precipitated sand in waste water treatment | |
JPH02191511A (en) | Filter and its back-washing method | |
KR820000468B1 (en) | Process for removal of suspended solids from liquid | |
JP3105799B2 (en) | Solid-liquid separation method and portable solid-liquid separation device | |
JP2004188364A (en) | Upward stream type filtering apparatus | |
SU1270117A1 (en) | Installation for removing suspended substances and petroleum products from waste water |