JPH1136074A - Substrate transporting tray - Google Patents
Substrate transporting trayInfo
- Publication number
- JPH1136074A JPH1136074A JP9192604A JP19260497A JPH1136074A JP H1136074 A JPH1136074 A JP H1136074A JP 9192604 A JP9192604 A JP 9192604A JP 19260497 A JP19260497 A JP 19260497A JP H1136074 A JPH1136074 A JP H1136074A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- auxiliary frame
- frame member
- outer frame
- transport tray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Physical Vapour Deposition (AREA)
- Photovoltaic Devices (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、基板上に薄膜を形
成するために利用される基板搬送トレーに関し、特に、
太陽電池や液晶パネル、プラズマディスプレーなどの製
造過程における薄膜形成工程に適した基板搬送トレーに
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate carrying tray used for forming a thin film on a substrate.
The present invention relates to a substrate transport tray suitable for a thin film forming step in a manufacturing process of a solar cell, a liquid crystal panel, a plasma display, or the like.
【０００２】[0002]
【従来の技術】近年、太陽電池や液晶パネル、プラズマ
ディスプレーなどの製品群は、何れのものもコスト競争
が激化している。これら製品群の製造工程のうち共通す
る工程の一つに、基板上の薄膜形成に関するものがあ
る。この工程での低コスト化技術は、製品のコストに反
映する。例えば、太陽電池の製造工程には、基板上に薄
膜を形成するため、基板を取付けた基板搬送トレーを搬
送装置でもって、ＣＶＤ装置やスパッタリング装置など
の製膜装置内に搬送する工程がある。基板搬送トレーに
は、種々の大きさの基板が確実に取付けられる構造や、
ＣＶＤやスパッタリングなどによる製膜環境下での変形
・変質に耐え得る構造などが必要とされる。2. Description of the Related Art In recent years, cost competition has intensified for all product groups such as solar cells, liquid crystal panels, and plasma displays. One of the common processes among the manufacturing processes of these product groups is related to the formation of a thin film on a substrate. The cost reduction technology in this process reflects on the cost of the product. For example, in a manufacturing process of a solar cell, there is a process of transporting a substrate transport tray on which a substrate is mounted to a film forming device such as a CVD device or a sputtering device using a transport device in order to form a thin film on the substrate. The substrate transport tray has a structure in which substrates of various sizes can be securely attached,
A structure that can withstand deformation and alteration in a film forming environment such as CVD or sputtering is required.
【０００３】従来の基板搬送トレーの例を、図１０およ
び図１１を参照しながら以下に説明する。図１０は、従
来の基板搬送トレー９０に基板９１を取付けた様子を示
す図であり、図１１は、そのＤ−Ｄ断面説明図である。
基板搬送トレー９０は、基板９１の外形よりもやや大き
めの内形状を有するステンレスやアルミニウム製の外枠
９２からなり、この外枠９２には、基板９１の表面を支
持する段部９３が、一定の厚みで設けられている。基板
搬送トレーの使用時には、この段部９３に基板９１を設
置し、基板９１の裏面を支持するために基板上に押え板
９４を設置する。基板の押え板側の反対側の面は、開口
しており、基板の成膜面とされる。また、押え板９４を
外枠９２に保持するために、例えば、押え板の四隅を保
持するように、固定部材９５，９５，…が外枠の４箇所
にネジで固定されている。なお、一般的な基板の大きさ
は、最大のもので、１ｍ×１ｍ程度であり、最小のもの
で、０．１ｍ×０．１ｍ程度である。An example of a conventional substrate carrying tray will be described below with reference to FIGS. FIG. 10 is a diagram showing a state in which a substrate 91 is attached to a conventional substrate carrying tray 90, and FIG. 11 is a sectional view taken along the line DD.
The substrate transport tray 90 includes an outer frame 92 made of stainless steel or aluminum having an inner shape slightly larger than the outer shape of the substrate 91. The outer frame 92 has a step 93 for supporting the surface of the substrate 91. The thickness is provided. When the substrate transport tray is used, a substrate 91 is placed on the step 93, and a holding plate 94 is placed on the substrate to support the back surface of the substrate 91. The surface of the substrate on the side opposite to the holding plate side is open, and serves as the film forming surface of the substrate. In order to hold the holding plate 94 on the outer frame 92, for example, fixing members 95, 95,... Are fixed to the four positions of the outer frame with screws so as to hold the four corners of the holding plate. The size of a general substrate is about 1 mx 1 m at the maximum, and about 0.1 mx 0.1 m at the minimum.
【０００４】図１２は、基板搬送トレー１０１，１０２
を製膜装置内で搬送する状態を示す、製膜装置１００の
断面説明図である。製膜装置内の搬送路１０３は、ほぼ
真空にまで減圧されている。基板搬送トレー１０１，１
０２の搬送は、トレー１０１，１０２の上部のガイドロ
ーラー１０４，１０５をガイド１０６，１０７で誘導
し、トレー１０１，１０２の下部に設けたラック１０
８，１０９をモータ１１０，１１１に連結したピニオン
１１２，１１３にかみ合わせて、行われる。また、２枚
の基板搬送トレー１０１，１０２は、互いに平行に、か
つ同位置となるようにして、同時に搬送される。このよ
うに基板搬送トレーを縦置きの状態で搬送すると、２枚
の基板を同時に製膜できるという利点がある。FIG. 12 shows substrate transfer trays 101 and 102.
FIG. 2 is an explanatory cross-sectional view of the film forming apparatus 100, showing a state in which is transported in the film forming apparatus. The transport path 103 in the film forming apparatus is reduced to almost a vacuum. Substrate transfer tray 101, 1
02 is guided by guides 106 and 107 on guide rollers 104 and 105 above the trays 101 and 102, and a rack 10 provided below the trays 101 and 102 is transported.
8, 109 is engaged with pinions 112, 113 connected to motors 110, 111. Further, the two substrate transport trays 101 and 102 are transported simultaneously so as to be parallel to each other and at the same position. When the substrate transport tray is transported in the vertically placed state, there is an advantage that two substrates can be formed simultaneously.
【０００５】[0005]
【発明が解決しようとする課題】しかし、上述したよう
な従来の基板搬送トレーでは、基板の大きさや厚みに変
更がある場合、この変更に合わせて基板搬送トレーも再
設計し新たに製作・加工しなければならない。この変更
費用およびこれに絡む多数の部品の取り替え工数は、膨
大なものとなるという問題がある。However, in the above-described conventional substrate transport tray, when the size or thickness of the substrate is changed, the substrate transport tray is redesigned in accordance with the change and newly manufactured and processed. Must. There is a problem that the cost of the change and the man-hour for replacing a large number of parts involved in the change are enormous.
【０００６】本発明は、このような問題点に鑑み、基板
のサイズの変更に要する工数を大幅に減らし、安価でか
つ簡単に部品交換できる基板搬送トレーを提供すること
を目的とする。SUMMARY OF THE INVENTION In view of the above problems, it is an object of the present invention to provide a board transfer tray that can reduce the number of steps required for changing the size of a board, and is inexpensive and easily replaceable.
【０００７】[0007]
【課題を解決するための手段】上記目的を達成するため
に、本発明に係る基板搬送トレーは、最大寸法の基板の
外形状に略一致する内形状を有する開口部を単または複
数有し、前記最大寸法の基板の外縁を厚み方向に支持す
るための段部を前記開口部の内縁に設けた外枠と、非締
結構造を有する単または複数の係合手段を用いて前記開
口部に着脱可能に取付けられ、最大寸法以下の製膜対象
基板の外縁を厚み方向に支持するための段部を有する補
助枠部材とからなり、前記補助枠部材に設けられた段部
と前記外枠に設けられた段部とで、最大寸法以下の製膜
対象基板の外縁を厚み方向に支持する単または複数の基
板受け面を構成するというものである。In order to achieve the above object, a substrate carrying tray according to the present invention has one or more openings having an inner shape substantially matching the outer shape of a substrate having the largest dimension, An outer frame in which a step for supporting the outer edge of the substrate having the largest dimension in the thickness direction is provided on the inner edge of the opening, and is attached to and detached from the opening using one or more engaging means having a non-fastened structure. An auxiliary frame member having a step for supporting an outer edge of a film formation target substrate having a maximum dimension or less in a thickness direction, the auxiliary frame member being provided on the auxiliary frame member and the outer frame. The stepped portion constitutes one or a plurality of substrate receiving surfaces that support the outer edge of the film formation target substrate having a maximum dimension or less in the thickness direction.
【０００８】また、前記係合手段として、外枠の相対す
る内辺の対応位置に設けた一対の凹部と、前記補助枠部
材の両端に設けた前記凹部に係合する凸部とで構成され
ると、基板のサイズ変更により柔軟に対応できる。ま
た、この一対の凹部を複数設けて、これら凹部に係合す
る複数の補助枠部材の両端に設けた複数の凸部とで構成
されるようにすると、基板のサイズ変更により細かく対
応することができる。The engagement means includes a pair of recesses provided at positions corresponding to the inner sides of the outer frame, and projections engaging with the recesses provided at both ends of the auxiliary frame member. Then, it is possible to flexibly cope with a change in the size of the substrate. Further, by providing a plurality of the pair of recesses and a plurality of the protrusions provided at both ends of the plurality of auxiliary frame members engaging with the recesses, it is possible to more minutely cope with the size change of the substrate. it can.
【０００９】より具体的な係合手段として、係合手段
が、後述する引き落とし構造によるものとすることがで
きる。[0009] As a more specific engagement means, the engagement means may be of a pull-down structure described later.
【００１０】また、具体的な係合手段として、少なくと
も一つの補助枠部材が他の補助枠部材に係合支持される
構造をも採用することができる。Further, as a specific engagement means, a structure in which at least one auxiliary frame member is engaged and supported by another auxiliary frame member can be adopted.
【００１１】そして、補助枠部材上面と基板受け面との
間に位置する基板受け部の深さが、最大寸法以下の製膜
対象基板の厚みよりも最大でも１ｍｍを超えないように
設定されると、基板の反りに対応できる。The depth of the substrate receiving portion located between the upper surface of the auxiliary frame member and the substrate receiving surface is set so as not to exceed 1 mm at most than the thickness of the film formation target substrate having the maximum dimension or less. And can cope with the warpage of the substrate.
【００１２】[0012]
【発明の実施の形態】以下、図面を参照しながら、本発
明に係る代表的な種々の実施例を説明する。図１は、本
発明に係る基板搬送トレー１を成膜側の反対側からみた
図であり、図２(a) は、図１のＡ−Ａ断面説明図であ
り、図２(b) は、図１のＢ−Ｂ断面説明図であり、図３
は、補助枠部材２の斜視図である。基板搬送トレー１
は、最大サイズのガラス基板の外形よりもやや大きめの
内形状をもつ開口部１２を有する、ステンレスやアルミ
ニウム製の方形の外枠３と、この外枠３にはめはずしが
可能な補助枠部材２とからなる。この外枠３の開口部１
２の全内周にわたって、最大サイズのガラス基板を支持
するための段部４が、一定の厚みで設けられている。ま
た、外枠３の内形状のうち対向する二辺に一対の凹部
５，６が設けられている。一方、補助枠部材２には、長
手方向にわたって、上段部７と下段部８が形成されてお
り、この上段部７の長手方向の両端に一対の突起部１
０，１１が設けられている。補助枠部材２の基板搬送ト
レーへの取付け方は、上側突起部１０を上側凹部５に係
合させた後、下側突起部１１を下側凹部６に係合させ
て、外枠３の段部４の上面に、補助枠部材２の上段部７
を設置するというものである。なお、補助枠部材２の下
段部８の上面と、外枠３の段部４の上面とは、同一平面
内にあるものとする。また、補助枠部材２の上段部７と
下段部８との段差ｔは、基板搬送トレーに設置する基板
１１の厚みと略同じである。これにより、後述するよう
に、基板１１と押え板１３とを基板搬送トレーに設置す
る際に、これらの板を基板搬送トレーと平行に置くこと
ができ、成膜の時に都合が良い。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, various embodiments according to the present invention will be described with reference to the drawings. FIG. 1 is a view of a substrate transport tray 1 according to the present invention as viewed from a side opposite to a film forming side, FIG. 2 (a) is an AA cross-sectional view of FIG. 1, and FIG. FIG. 3 is a sectional view taken along line BB of FIG.
4 is a perspective view of the auxiliary frame member 2. FIG. Substrate transfer tray 1
Is a rectangular outer frame 3 made of stainless steel or aluminum having an opening 12 having an inner shape slightly larger than the outer shape of the glass substrate of the maximum size, and an auxiliary frame member 2 detachable from the outer frame 3. Consists of Opening 1 of this outer frame 3
A step 4 for supporting a glass substrate of the maximum size is provided with a constant thickness over the entire inner circumference of the substrate 2. Further, a pair of concave portions 5 and 6 are provided on two opposing sides of the inner shape of the outer frame 3. On the other hand, the auxiliary frame member 2 has an upper portion 7 and a lower portion 8 formed in the longitudinal direction, and a pair of protrusions 1 is provided at both ends of the upper portion 7 in the longitudinal direction.
0 and 11 are provided. The method of attaching the auxiliary frame member 2 to the substrate carrying tray is as follows. After the upper projection 10 is engaged with the upper recess 5, the lower projection 11 is engaged with the lower recess 6, and The upper part 7 of the auxiliary frame member 2 is provided on the upper surface of the part 4.
It is to install. Note that the upper surface of the lower step 8 of the auxiliary frame member 2 and the upper surface of the step 4 of the outer frame 3 are in the same plane. The step t between the upper step 7 and the lower step 8 of the auxiliary frame member 2 is substantially the same as the thickness of the substrate 11 set on the substrate transport tray. Thus, as described later, when the substrate 11 and the holding plate 13 are set on the substrate transfer tray, these plates can be placed in parallel with the substrate transfer tray, which is convenient at the time of film formation.
【００１３】但し、補助枠部材２を取付け可能な条件と
して、上側突起部１０をある程度上側凹部５に挿し込ん
だときに、下側突起部１１を下側凹部６に挿し込み可能
であることと、下側突起部１１を下側凹部６に完全に挿
し込んだときに、上側突起部１０が上側凹部５に挿し込
まれたままの状態にあることが必要である。これは、引
き障子の取り付け構造と同じである。すなわち、引き障
子の上側凸部を鴨居にはめ込み持ち上げて、次に、引き
障子の下側凹部を敷居にはめ込み、引き障子全体を落と
して取付ける仕組み（以下、引き落とし構造と称す。）
と同じである。ここで、引き障子の上側凸部が補助枠部
材の上側突起部１０に、引き障子の下側凹部が下側突起
部１１に、鴨居が外枠の上側凹部５に、敷居が外枠の下
側凹部６に相当する。However, a condition that the auxiliary frame member 2 can be attached is that the lower projection 11 can be inserted into the lower recess 6 when the upper projection 10 is inserted into the upper recess 5 to some extent. When the lower projection 11 is completely inserted into the lower recess 6, the upper projection 10 needs to be kept inserted into the upper recess 5. This is the same as the mounting structure of the sliding door. That is, the upper convex portion of the sliding door is inserted into the gate and lifted, and then the lower concave portion of the sliding door is inserted into the sill, and the entire sliding door is dropped and attached (hereinafter referred to as a pull-down structure).
Is the same as Here, the upper convex portion of the sliding door is on the upper projecting portion 10 of the auxiliary frame member, the lower concave portion of the sliding door is on the lower projecting portion 11, the lintel is on the upper concave portion 5 of the outer frame, and the threshold is below the outer frame. This corresponds to the side recess 6.
【００１４】このような基板搬送トレーの補助枠部材の
下段部の上面と、外枠の段部の上面とに、最大サイズよ
りも小さなガラス基板１１を設置し、この基板上面と補
助枠部材２の上段部７の上面とに押え板１３を設置す
る。製膜装置内では、この基板搬送トレー１を、外枠３
の下側凹部６を重力方向に向ける縦置きの状態で搬送装
置に取付けて、搬送する。本実施例のはめ込み構造は、
基板搬送トレーを縦置きの状態で搬送する場合、特に、
脱落防止に効果的な構造である。A glass substrate 11 smaller than the maximum size is placed on the upper surface of the lower portion of the auxiliary frame member of the substrate carrying tray and on the upper surface of the step portion of the outer frame. The holding plate 13 is installed on the upper surface of the upper step 7. In the film forming apparatus, the substrate transport tray 1 is
The lower concave portion 6 is attached to a transport device in a vertically placed state in which it is directed in the direction of gravity, and is transported. The fitting structure of this embodiment is as follows.
When transporting the board transport tray vertically,
The structure is effective for preventing falling off.
【００１５】ところで、本実施例の押え板１３には、ス
テンレスやアルミニウム製のものを使用するが、本発明
は、これに限らない。本発明に係る押え板は、ＣＶＤや
スパッタリングなどによる製膜工程での変形・変質に耐
え得て、アースを付けて放電を促すのに適した素材であ
れば、何れでも良い。なお、押え板を基板搬送トレーに
保持する手段としては、たとえば、図１０の従来例に示
したように、外枠の４箇所に固定部材をネジで固定する
ものがある。しかし、本発明はこの手段に限らず、押え
板が、成膜工程中に基板が動かぬ程度に基板を十分な圧
力で保持するものであれば、何れの手段でも良い。The holding plate 13 of this embodiment is made of stainless steel or aluminum, but the present invention is not limited to this. The holding plate according to the present invention may be made of any material that can withstand deformation and alteration in a film forming process such as CVD or sputtering, and is suitable for attaching a ground and promoting discharge. As means for holding the holding plate on the substrate carrying tray, for example, as shown in the conventional example of FIG. 10, there is a means for fixing a fixing member at four places of the outer frame with screws. However, the present invention is not limited to this means, and any means may be used as long as the holding plate holds the substrate at a sufficient pressure so that the substrate does not move during the film forming process.
【００１６】このように、上記した構造を採用すること
で、締結部品を使わなくとも、補助枠部材を取付けるこ
とができる。また、基板の大きさや厚みに変更がある場
合でも、この変更に合わせた補助枠部材を用意して、取
り替えるだけでよいので、変更に絡む多数の部品の取り
替えや、基板搬送トレーの再設計という手間がなくな
る。さらに、この変更は簡単に行うことができるので、
市場のニーズに見合った製膜基板を素早く、低コストで
用意することができる。例えば、基板のサイズ変更に応
じて、基板の押え板を交換する必要がない。As described above, by employing the above-described structure, the auxiliary frame member can be attached without using any fastening parts. In addition, even when the size or thickness of the board is changed, it is only necessary to prepare an auxiliary frame member corresponding to the change and replace it.Therefore, it is necessary to replace many components involved in the change and redesign the board transport tray. No more hassle. In addition, this change is easy to make,
A film-forming substrate that meets the needs of the market can be prepared quickly and at low cost. For example, it is not necessary to replace the board holding plate according to a change in the size of the board.
【００１７】なお、図１〜図３の基板搬送トレーでは、
外枠３に一つの開口部１２が設けられ、この開口部１２
の全内周に段部４が設けられている。しかし、本発明
は、これに限らず、複数の開口部を外枠に設けて、それ
ぞれの開口部の内周に、上述した補助枠部材を取付ける
ような構造を有する基板搬送トレーでもよい。これによ
り、複数の基板を一枚の外枠で一度に搬送できるという
利点がある。In the substrate transfer tray shown in FIGS.
One opening 12 is provided in the outer frame 3.
Are provided with a stepped portion 4 on the entire inner circumference. However, the present invention is not limited to this, and a substrate transport tray having a structure in which a plurality of openings are provided in the outer frame and the above-described auxiliary frame member is attached to the inner periphery of each of the openings may be used. Thereby, there is an advantage that a plurality of substrates can be transported at once by one outer frame.
【００１８】次に、図４および図５を参照しながら、本
発明に係る基板搬送トレーの別の実施例を以下に説明す
る。図４は、基板搬送トレー２０を裏面側からみた図で
あり、図５は、図４のＣ−Ｃ断面説明図である。この基
板搬送トレー２０は、外枠２１と、この外枠２１に取付
けられた補助枠部材２２とからなる。外枠２１の基本構
造は、図１〜３に示した構造と同じである。両者の異な
るところは、図１に係る外枠３には、一対の凹部５，６
が形成されているのに対し、本実施例の外枠には、補助
枠部材２２に設けられた４個所の突起部２３，２４，２
５，２６に対応して、４個所に凹部２７，２８，２９，
３０が形成されている点にある。一方、補助枠部材２２
には、基板の表面を支持する下段部３１が、一定の厚み
で形成されており、この下段部３１の外周を囲む形で、
一定の厚みを有する上段部３２が形成されている。この
上段部３２の長手方向の両端に、突起部２３〜２６が設
けられている。そして、上側突起部２３，２４を上側凹
部２７，２８に係合させた後、下側突起部２５，２６を
下側凹部２９，３０に係合させて、外枠の段部３３の上
面に、補助枠部材２２の上段部３２を重ねて置くことに
より、補助枠部材２２を外枠２１に取付ける。これらの
突起部が凹部に係合する構造は、図１の基板搬送トレー
における引き落し構造と同じである。Next, another embodiment of the substrate transfer tray according to the present invention will be described below with reference to FIGS. FIG. 4 is a view of the substrate transport tray 20 as viewed from the back side, and FIG. 5 is a cross-sectional view of FIG. The substrate transport tray 20 includes an outer frame 21 and an auxiliary frame member 22 attached to the outer frame 21. The basic structure of the outer frame 21 is the same as the structure shown in FIGS. The difference between the two is that the outer frame 3 according to FIG.
On the other hand, the outer frame of this embodiment has four projections 23, 24, 2 provided on the auxiliary frame member 22.
5 and 26, four recesses 27, 28, 29,
30 is formed. On the other hand, the auxiliary frame member 22
A lower portion 31 supporting the surface of the substrate is formed with a constant thickness, and surrounds the outer periphery of the lower portion 31.
An upper portion 32 having a constant thickness is formed. Protrusions 23 to 26 are provided at both ends in the longitudinal direction of the upper section 32. Then, after the upper projections 23 and 24 are engaged with the upper recesses 27 and 28, the lower projections 25 and 26 are engaged with the lower recesses 29 and 30, and the upper surface of the step 33 of the outer frame is formed. The auxiliary frame member 22 is attached to the outer frame 21 by laying the upper portion 32 of the auxiliary frame member 22 on top of one another. The structure in which these protrusions engage with the recesses is the same as the pull-down structure in the substrate transport tray of FIG.
【００１９】このような補助枠部材２２の下段部３１の
上面に、最大サイズよりも小さな基板３４を設置し、こ
の基板上面と補助枠部材の上段部３２の上面とに押え板
３５を設置する。押え板３５を外枠２１に保持する手段
としては、たとえば、図１０の従来例に示したように、
外枠の４箇所に固定部材をネジで固定するものがある。
しかし、本発明はこの手段に限らず、押え板が、成膜工
程中に基板が動かぬ程度に基板を十分な圧力で保持する
ものであれば、何れの手段でも良い。A substrate 34 smaller than the maximum size is set on the upper surface of the lower portion 31 of the auxiliary frame member 22, and a holding plate 35 is set on the upper surface of the substrate and the upper surface of the upper portion 32 of the auxiliary frame member. . As means for holding the holding plate 35 on the outer frame 21, for example, as shown in the conventional example of FIG.
There is one that fixes a fixing member with screws at four places on the outer frame.
However, the present invention is not limited to this means, and any means may be used as long as the holding plate holds the substrate at a sufficient pressure so that the substrate does not move during the film forming process.
【００２０】なお、図４および図５の基板搬送トレーで
は、外枠２１に一つの開口部３６が設けられ、この開口
部３６の全内周に段部３３が設けられている。しかし、
本発明は、これに限らず、複数の開口部を外枠に設け
て、それぞれの開口部の内周に、上述した補助枠部材を
取付けるような構造を有する基板搬送トレーでもよい。
これにより、複数の基板を一枚の外枠で一度に搬送でき
るという利点がある。In the substrate transfer tray shown in FIGS. 4 and 5, one opening 36 is provided in the outer frame 21, and a step 33 is provided on the entire inner periphery of the opening 36. But,
The present invention is not limited to this, and a substrate transport tray having a structure in which a plurality of openings are provided in an outer frame and the above-described auxiliary frame member is attached to the inner periphery of each of the openings may be used.
Thereby, there is an advantage that a plurality of substrates can be transported at once by one outer frame.
【００２１】ところで、基板によっては、成膜時に発生
する熱などによって、湾曲する。湾曲する基板を無理に
押さえると、基板の厚さによっては、割れる危険性があ
る。これに対処する場合は、図６に示すように、基板４
３を受ける部分の深さを、基板の厚みより深くなるよう
に設定することにより、基板の内部ストレスを湾曲によ
って解放させることができる。この深さが、基板の厚み
よりも最大でも１ｍｍを超えないように設定されると、
一般的なガラス基板を使用する場合に、この湾曲に対応
できる。Incidentally, some substrates are curved by heat generated during film formation. If a curved substrate is forcibly pressed, there is a risk of breaking depending on the thickness of the substrate. To cope with this, as shown in FIG.
By setting the depth of the portion receiving 3 to be deeper than the thickness of the substrate, the internal stress of the substrate can be released by bending. When this depth is set so as not to exceed 1 mm at most than the thickness of the substrate,
When a general glass substrate is used, this curvature can be dealt with.
【００２２】次に、図７および図８を参照しながら、本
発明に係る基板搬送トレーのさらに別の実施例を説明す
る。図７は、基板搬送トレー５０を成膜側の反対側から
みた図である。この図は、外枠５１にはめ込まれた２本
の補助枠部材５２，５３の間に、別の補助枠部材５４が
係合されている状態を示している。また、図８は、補助
枠部材を取り外した状態の基板搬送トレー５０の斜視図
である。外枠５１の構造は、図４に示した外枠２１の構
造と同じである。この外枠５１の内形状のうち対向する
二辺にわたって、２本の補助枠部材５２，５３が、引き
落し構造によって、取付けられている。これら補助枠部
材５２，５３のそれぞれには、Ｌ字形に彫られた係合部
５５，５６が形成されており、第３の補助枠部材５４の
突起部５７，５８を、これら係合部に係合することで、
第３の補助枠部材５４が補助枠部材５２，５３にはめ込
まれる。また、この第３の補助枠部材５４は、補助枠部
材５２，５３と同様に、上段部５９と下段部６０とから
なる二段構造を有し、上段部５９の下面は、外枠の段部
６１の上面によって支持される。基板は、外枠の段部６
１、補助枠部材５２，５３の下段部６２，６３、および
第３の補助枠部材５４の下段部６０とで構成される基板
受け部に設置される。また、押え板は、補助枠部材５
２，５３，５４の上段部５９，６４，６５の上面に設置
される。なお、本実施例で、外枠５１に一つの開口部６
６を有するものであるが、本発明は、これに限らず、複
数の開口部を有するものでも良い。Next, still another embodiment of the substrate carrying tray according to the present invention will be described with reference to FIGS. FIG. 7 is a view of the substrate transfer tray 50 as viewed from the side opposite to the film forming side. This figure shows a state in which another auxiliary frame member 54 is engaged between two auxiliary frame members 52 and 53 fitted in the outer frame 51. FIG. 8 is a perspective view of the substrate transport tray 50 with the auxiliary frame member removed. The structure of the outer frame 51 is the same as the structure of the outer frame 21 shown in FIG. Two auxiliary frame members 52 and 53 are attached by a pull-down structure over two opposing sides of the inner shape of the outer frame 51. L-shaped engagement portions 55 and 56 are formed on each of these auxiliary frame members 52 and 53, and the projections 57 and 58 of the third auxiliary frame member 54 are attached to these engagement portions. By engaging,
The third auxiliary frame member 54 is fitted into the auxiliary frame members 52, 53. Further, like the auxiliary frame members 52 and 53, the third auxiliary frame member 54 has a two-stage structure including an upper step portion 59 and a lower step portion 60. It is supported by the upper surface of the part 61. The substrate is a step 6 of the outer frame.
1. The lower frame 62, 63 of the auxiliary frame members 52, 53 and the lower frame 60 of the third auxiliary frame member 54 are installed in a substrate receiving portion. In addition, the holding plate is an auxiliary frame member 5.
2, 53, 54 are installed on the upper surfaces of upper steps 59, 64, 65. In this embodiment, one opening 6 is formed in the outer frame 51.
However, the present invention is not limited to this, and may have a plurality of openings.
【００２３】このような基板搬送トレーは、例えば、基
板の一辺の長さのみのサイズ変更がある場合に、外枠に
取付けてある補助枠部材すべてを取り替える必要がな
く、基板のサイズ変更に素早く、柔軟に対応できる。With such a substrate carrying tray, for example, when the size of only one side of the substrate is changed, it is not necessary to replace all the auxiliary frame members attached to the outer frame, and the size of the substrate can be changed quickly. Flexible.
【００２４】次に、図９を参照しつつ、外枠に形成され
る係合部（凹部）７９〜８２の種々の形状について、以
下に説明する。図９(a) 〜(d) は、これら係合部を、挿
し込み方向正面からみた図である。上記した本発明に係
る実施例では、(a) の形状を採用した。本発明では、こ
の(a) の形状に限らず、凹形の溝を彫った(b) の形状
や、略四角形の溝を彫り溶接などで蓋８３をした(c) の
形状、成膜面より溝を彫った(d) の形状などを採用する
ことができる。これら形状のうち、成膜への影響度や、
基板搬送トレーの大きさおよび厚み、補助枠部材の大き
さおよび厚みなどを考慮して、適宜、最適な形状を選択
する。また、これらの係合部に対応して、補助枠部材の
突起部（凸部）の形状も、円筒形状のみではなく、四角
形状などの種々の形状を選択できる。Next, various shapes of the engaging portions (recesses) 79 to 82 formed in the outer frame will be described with reference to FIG. FIGS. 9A to 9D are views of these engaging portions as viewed from the front in the insertion direction. In the embodiment according to the present invention described above, the shape shown in FIG. In the present invention, not only the shape of (a) but also the shape of (b) in which a concave groove is carved, the shape of (c) in which a substantially square groove is covered with a lid 83 by welding, etc., and the film forming surface The shape (d) in which a groove is carved more can be adopted. Among these shapes, the degree of influence on film formation,
The optimum shape is appropriately selected in consideration of the size and thickness of the substrate carrying tray and the size and thickness of the auxiliary frame member. Further, corresponding to these engaging portions, the shape of the protrusion (convex portion) of the auxiliary frame member can be selected from various shapes such as not only a cylindrical shape but also a square shape.
【００２５】[0025]
【発明の効果】上述の如く、本発明に係る基板搬送トレ
ーは、最大寸法の基板を支持する段部をもつ外枠と、非
締結構造を有する係合手段により外枠に着脱可能に取付
けられ、最大寸法以下の基板を支持する段部をもつ補助
枠部材とからなって、基板受け部を構成するので、締結
部品を使う必要なしに補助枠部材を取付けられ、また、
補助枠部材の交換が簡単にできる。よって、基板のサイ
ズ変更がある場合にも、変更に絡む多数の部品交換や、
基板搬送トレーの再設計という手間がなくなり、変更に
伴うコストを低く抑えられる。さらに、製膜基板の生産
に携わる作業員の作業性を大幅に改善できる。As described above, the substrate carrying tray according to the present invention is detachably attached to the outer frame by the outer frame having the step for supporting the substrate of the maximum size and the engaging means having the non-fastening structure. The auxiliary frame member having a step portion that supports a substrate having a maximum dimension or less constitutes the substrate receiving portion, so that the auxiliary frame member can be attached without using fastening parts,
The replacement of the auxiliary frame member can be easily performed. Therefore, even if there is a change in the size of the board, a number of component replacements involved in the change,
The trouble of redesigning the substrate carrying tray is eliminated, and the cost associated with the change can be kept low. Further, the workability of the workers involved in the production of the film-forming substrate can be greatly improved.
【００２６】また、前記係合手段が、外枠に設けた一対
の凹部と、補助枠部材の両端に設けた凸部とで構成さ
れ、この係合手段が、引き落とし構造によるものである
とすると、基板搬送トレーを縦置きの状態で搬送する場
合、基板の脱落防止に効果的である。Further, it is assumed that the engaging means comprises a pair of concave portions provided on the outer frame and convex portions provided on both ends of the auxiliary frame member, and the engaging means is of a pull-down structure. When the substrate transport tray is transported in a vertically placed state, it is effective for preventing the substrate from falling off.
【００２７】また、前記基板搬送トレーが、少なくとも
一つの補助枠部材が他の補助枠部材に係合支持されると
いう構造を有すると、すでに取付けた補助枠部材に、さ
らに補助枠部材を取りつけることが可能となるので、基
板の細かなサイズ変更に伴う部品交換を少なくできる。Further, when the substrate carrying tray has a structure in which at least one auxiliary frame member is engaged and supported by another auxiliary frame member, the auxiliary frame member may be further attached to the already mounted auxiliary frame member. Therefore, it is possible to reduce the number of component replacements due to the small size change of the substrate.
【００２８】さらに、補助枠部材上面と基板受け面との
間に位置する基板受け部の深さが、最大寸法以下の製膜
対象基板の厚みよりも最大でも１ｍｍを超えないように
設定すると、基板の湾曲を許して内部ストレスを解放す
ることができるので、基板のひび割れなどを防ぐことが
でき、製品の歩留まりを向上させることが可能となる。Further, when the depth of the substrate receiving portion located between the upper surface of the auxiliary frame member and the substrate receiving surface is set so as not to exceed 1 mm at most than the thickness of the substrate to be formed having the maximum dimension or less, Since the internal stress can be released by allowing the substrate to bend, it is possible to prevent the substrate from cracking and to improve the product yield.
【図１】本発明に係る基板搬送トレーの実施例を示す図
である。FIG. 1 is a view showing an embodiment of a substrate carrying tray according to the present invention.
【図２】(a) 図１のＡ−Ａ断面説明図である。(b) 図１
のＢ−Ｂ断面説明図である。FIG. 2A is an explanatory sectional view taken along the line AA of FIG. 1; (b) Fig. 1
It is BB sectional drawing of FIG.
【図３】本発明に係る補助枠部材の斜視図である。FIG. 3 is a perspective view of an auxiliary frame member according to the present invention.
【図４】本発明に係る基板搬送トレーの実施例を示す図
である。FIG. 4 is a view showing an embodiment of a substrate carrying tray according to the present invention.
【図５】図４のＣ−Ｃ断面説明図である。FIG. 5 is a sectional view taken along the line CC in FIG. 4;
【図６】湾曲する基板を設置した本発明に係る基板搬送
トレーを示す図である。FIG. 6 is a view showing a substrate carrying tray according to the present invention on which a curved substrate is installed.
【図７】本発明に係る基板搬送トレーの実施例を示す図
である。FIG. 7 is a view showing an embodiment of a substrate carrying tray according to the present invention.
【図８】本発明に係る基板搬送トレーの斜視図である。FIG. 8 is a perspective view of a substrate carrying tray according to the present invention.
【図９】外枠に形成される係合部の種々の形状を示す図
である。FIG. 9 is a view showing various shapes of an engagement portion formed on the outer frame.
【図１０】従来の基板搬送トレーを示す図である。FIG. 10 is a view showing a conventional substrate transport tray.
【図１１】図１０のＤ−Ｄ断面説明図である。11 is an explanatory sectional view taken along the line DD of FIG. 10;
【図１２】典型的な製膜装置を示す断面説明図である。FIG. 12 is an explanatory sectional view showing a typical film forming apparatus.
【符号の説明】 １ 基板搬送トレー ２ 補助枠部材 ３ 外枠 ４ 段部 ５ 上側凹部 ６ 下側凹部 ７ 上段部 ８ 下段部 ９ 上側突起部 １０ 下側突起部 １１ 基板 １２ 開口部 １３ 押え板 ２０ 基板搬送トレー ２１ 外枠 ２２ 補助枠部材 ２３，２４ 上側突起部 ２５，２６ 下側突起部 ２７，２８ 上側凹部 ２９，３０ 下側凹部 ３１ 下段部 ３２ 上段部 ３３ 段部 ３４ 基板 ３５ 押え板 ３６ 開口部 ４０ 基板搬送トレー ４１ 外枠 ４２ 補助枠部材 ４３ 基板 ４４ 押え板 ５０ 基板搬送トレー ５１ 外枠 ５２，５３，５４ 補助枠部材 ５５，５６ Ｌ字形係合部 ５７，５８ 突起部 ５９ 上段部 ６０ 下段部 ６１ 段部 ６２，６３ 下段部 ６４，６５ 上段部 ６６ 開口部 ６７，６８，６９，７０ 外枠 ７１，７２，７３，７４ 上段部 ７５，７６，７７，７８ 下段部 ７９，８０，８１，８２ 凹部 ９０ 基板搬送トレー ９１ 基板 ９２ 外枠 ９３ 段部 ９４ 押え板 ９５ 固定部材 １００ 製膜装置 １０１，１０２ 基板搬送トレー １０３ 搬送路 １０４，１０５ ガイドローラー １０６，１０７ ガイド １０８，１０９ ラック １１０，１１１ モータ １１２，１１３ ピニオンDESCRIPTION OF SYMBOLS 1 Substrate carrying tray 2 Auxiliary frame member 3 Outer frame 4 Step 5 Upper recess 6 Lower recess 7 Upper step 8 Lower step 9 Upper projection 10 Lower projection 11 Substrate 12 Opening 13 Pressing plate 20 Substrate transport tray 21 Outer frame 22 Auxiliary frame member 23, 24 Upper protrusion 25, 26 Lower protrusion 27, 28 Upper recess 29, 30 Lower recess 31 Lower step 32 Upper step 33 Step 34 Substrate 35 Pressing plate 36 Opening Part 40 substrate transport tray 41 outer frame 42 auxiliary frame member 43 substrate 44 holding plate 50 substrate transport tray 51 outer frame 52, 53, 54 auxiliary frame member 55, 56 L-shaped engaging part 57, 58 projecting part 59 upper part 60 lower part Part 61 step part 62, 63 lower step part 64, 65 upper part part 66 opening part 67, 68, 69, 70 outer frame 71, 72, 73, 74 upper part part 75, 76, 77, Reference Signs List 8 lower step 79, 80, 81, 82 recess 90 substrate transfer tray 91 substrate 92 outer frame 93 step 94 holding plate 95 fixing member 100 film forming apparatus 101, 102 substrate transfer tray 103 transfer path 104, 105 guide roller 106, 107 Guide 108, 109 Rack 110, 111 Motor 112, 113 Pinion
Claims (6)
形状を有する開口部を単または複数有し、前記最大寸法
の基板の外縁を厚み方向に支持するための段部を前記開
口部の内縁に設けた外枠と、 非締結構造を有する単または複数の係合手段を用いて前
記外枠に着脱可能に取付けられ、最大寸法以下の製膜対
象基板の外縁を厚み方向に支持するための段部を有する
補助枠部材とからなり、 前記補助枠部材に設けられた段部と前記外枠に設けられ
た段部とで、最大寸法以下の製膜対象基板の外縁を厚み
方向に支持する単または複数の基板受け面を構成した基
板搬送トレー。1. A method according to claim 1, further comprising: a plurality of openings each having an inner shape substantially corresponding to an outer shape of the substrate having a maximum dimension, and a step for supporting an outer edge of the substrate having the maximum dimension in a thickness direction. And an outer frame provided on the inner edge of the substrate, detachably attached to the outer frame using one or more engaging means having a non-fastened structure, and supporting the outer edge of the film formation target substrate having a maximum dimension or less in the thickness direction. An auxiliary frame member having a step portion for the, the step provided in the auxiliary frame member and the step provided in the outer frame, the outer edge of the film formation target substrate having a maximum dimension or less in the thickness direction A substrate transport tray having one or more substrate receiving surfaces for support.
位置に設けた一対の凹部と、前記補助枠部材の両端に設
けた前記凹部に係合する凸部とで構成される請求項１記
載の基板搬送トレー。2. An engaging means comprising a pair of recesses provided at corresponding positions on inner sides of the outer frame, and projections engaging with the recesses provided at both ends of the auxiliary frame member. The substrate transport tray according to claim 1.
を複数設けて、これら凹部に係合する複数の補助枠部材
の両端に設けた複数の凸部とで構成される請求項１記載
の基板搬送トレー。3. The engaging means comprises a plurality of pairs of concave portions according to claim 2, and a plurality of convex portions provided at both ends of a plurality of auxiliary frame members engaged with these concave portions. 2. The substrate transport tray according to 1.
である請求項２または請求項３記載の基板搬送トレー。4. The substrate transport tray according to claim 2, wherein the engaging means is of a pull-down structure.
枠部材に係合支持される請求項１〜４の何れか１項に記
載の基板搬送トレー。5. The substrate transport tray according to claim 1, wherein at least one auxiliary frame member is engaged and supported by another auxiliary frame member.
置する基板受け部の深さが、最大寸法以下の製膜対象基
板の厚みよりも最大でも１ｍｍを超えないように設定さ
れる請求項１〜５の何れか１項に記載の基板搬送トレ
ー。6. The depth of a substrate receiving portion located between the upper surface of the auxiliary frame member and the substrate receiving surface is set so as not to exceed 1 mm at most than the thickness of the film formation target substrate having the maximum dimension or less. The substrate transport tray according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19260497A JP3747580B2 (en) | 1997-07-17 | 1997-07-17 | Substrate transport tray |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19260497A JP3747580B2 (en) | 1997-07-17 | 1997-07-17 | Substrate transport tray |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH1136074A true JPH1136074A (en) | 1999-02-09 |
| JP3747580B2 JP3747580B2 (en) | 2006-02-22 |
Family
ID=16294035
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19260497A Expired - Lifetime JP3747580B2 (en) | 1997-07-17 | 1997-07-17 | Substrate transport tray |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3747580B2 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008506993A (en) * | 2004-07-16 | 2008-03-06 | アプライド マテリアルズ インコーポレイテッド | Shadow frame with mask panel |
| CN100456446C (en) * | 2005-07-18 | 2009-01-28 | 三星Sdi株式会社 | Holder for fabricating organic light emitting display |
| JP2014528155A (en) * | 2012-04-05 | 2014-10-23 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | Flip edge shadow frame |
| WO2014200927A1 (en) * | 2013-06-10 | 2014-12-18 | View, Inc. | Glass pallet for sputtering systems |
| CN106133187A (en) * | 2014-03-24 | 2016-11-16 | 艾克斯特朗欧洲公司 | Substrate holder at two wide sides deviated from mutually supporting substrates respectively of substrate holder |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5514404B2 (en) * | 2008-03-21 | 2014-06-04 | 有限会社埼玉通商 | tent |
-
1997
- 1997-07-17 JP JP19260497A patent/JP3747580B2/en not_active Expired - Lifetime
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008506993A (en) * | 2004-07-16 | 2008-03-06 | アプライド マテリアルズ インコーポレイテッド | Shadow frame with mask panel |
| KR101332234B1 (en) * | 2004-07-16 | 2013-11-25 | 어플라이드 머티어리얼스, 인코포레이티드 | Shadow frame with mask panels |
| CN100456446C (en) * | 2005-07-18 | 2009-01-28 | 三星Sdi株式会社 | Holder for fabricating organic light emitting display |
| US7771539B2 (en) | 2005-07-18 | 2010-08-10 | Samsung Mobile Display Co., Ltd. | Holder for fabricating organic light emitting display |
| JP2014528155A (en) * | 2012-04-05 | 2014-10-23 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | Flip edge shadow frame |
| WO2014200927A1 (en) * | 2013-06-10 | 2014-12-18 | View, Inc. | Glass pallet for sputtering systems |
| US11133158B2 (en) | 2013-06-10 | 2021-09-28 | View, Inc. | Glass pallet for sputtering systems |
| US11424109B2 (en) | 2013-06-10 | 2022-08-23 | View, Inc. | Carrier with vertical grid for supporting substrates in coater |
| US11688589B2 (en) | 2013-06-10 | 2023-06-27 | View, Inc. | Carrier with vertical grid for supporting substrates in coater |
| CN106133187A (en) * | 2014-03-24 | 2016-11-16 | 艾克斯特朗欧洲公司 | Substrate holder at two wide sides deviated from mutually supporting substrates respectively of substrate holder |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3747580B2 (en) | 2006-02-22 |
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