JPH11354252A - Discharge current monitor and high voltage power source device and discharge device - Google Patents
Discharge current monitor and high voltage power source device and discharge deviceInfo
- Publication number
- JPH11354252A JPH11354252A JP15886898A JP15886898A JPH11354252A JP H11354252 A JPH11354252 A JP H11354252A JP 15886898 A JP15886898 A JP 15886898A JP 15886898 A JP15886898 A JP 15886898A JP H11354252 A JPH11354252 A JP H11354252A
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- Prior art keywords
- discharge
- discharge current
- monitor
- current
- voltage
- Prior art date
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、高圧電源部にケー
ブルを介して接続された放電電極からコロナ放電する放
電装置の放電電流モニタ、高圧電源装置、及び放電装置
に関し、特に、放電を利用したプラズマ脱臭装置、オゾ
ン発生装置、電気集塵装置、或いは、放電ガス処理装置
等に使用するものに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a discharge current monitor, a high-voltage power supply, and a discharge device for a discharge device for performing corona discharge from a discharge electrode connected to a high-voltage power supply via a cable. The present invention relates to a device used for a plasma deodorizing device, an ozone generating device, an electric dust collecting device, or a discharge gas processing device.
【０００２】[0002]
【従来の技術】従来、この種の放電装置の放電電流を測
定するには、放電電極に接続されているケーブルに電流
プローブを装着し、検出した電流を増幅器を介してオシ
ロスコープの表示管面上に電圧波形表示した上、その電
圧値を読み取ることにより当該測定を行っていた。2. Description of the Related Art Conventionally, to measure the discharge current of a discharge device of this type, a current probe is attached to a cable connected to a discharge electrode, and the detected current is passed through an amplifier to a display screen of an oscilloscope. The measurement was performed by displaying the voltage waveform on the display and reading the voltage value.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、かかる
放電現象は電極間に高電圧を印加した際の一瞬の短絡現
象であり、短絡開始時における放電電流の立ち上がりは
極めて急峻であり、その放電電流を測定するためには、
数ＭＨｚ〜数百ＭＨｚの高い周波数を測定可能な電流プ
ローブを使用する必要であった。ところで、この高周波
電流プローブは測定器として極めて高価であるため、オ
シロスコープを含め当該測定にかかる設備費が高騰し、
また、この測定設備により装置サイズも大きくなるた
め、一般設備に採用するには問題があった。However, such a discharge phenomenon is an instantaneous short-circuit phenomenon when a high voltage is applied between the electrodes, and the rise of the discharge current at the start of the short-circuit is extremely steep. To measure,
It was necessary to use a current probe capable of measuring high frequencies from several MHz to several hundred MHz. By the way, since this high-frequency current probe is extremely expensive as a measuring instrument, the equipment cost for the measurement including the oscilloscope soars,
In addition, since the size of the apparatus is increased due to the measurement equipment, there is a problem in adopting it for general equipment.
【０００４】また、放電を利用したプラズマ脱臭装置で
は、放電装置における電極等の設計評価に当り、高価な
高周波電流プローブを用いた放電電流の測定を行わず
に、放電により発生したオゾン量といった副次的な因子
で放電状態を評価し、電極の評価等を行っていたが、正
確な評価をするためには複数回の再現試験が必要であ
り、当該評価に非常に手間がかかっていた。Further, in a plasma deodorizing apparatus utilizing discharge, in designing and evaluating electrodes and the like in the discharge apparatus, the discharge current is not measured using an expensive high-frequency current probe, but the amount of ozone generated by the discharge is not measured. The discharge state was evaluated by the following factors, and the evaluation of the electrodes and the like were performed. However, in order to perform accurate evaluation, a repetition test was required a plurality of times, and the evaluation was extremely troublesome.
【０００５】本発明の目的は、上述の問題点を解消し、
簡易且つ確実に放電電流の評価が可能な放電装置の放電
電流モニタを提供し、更に放電電流の安定制御が可能な
高圧電源装置を提供する点にある。An object of the present invention is to solve the above-mentioned problems,
It is an object of the present invention to provide a discharge current monitor of a discharge device capable of easily and reliably evaluating a discharge current, and to provide a high-voltage power supply device capable of stably controlling a discharge current.
【０００６】[0006]
【課題を解決するための手段】この目的を達成するため
の本発明に係る放電電流モニタの第一の特徴構成は、特
許請求の範囲の欄の請求項１に記載した通り、高圧電源
部にケーブルを介して接続された放電電極からコロナ放
電する放電装置の放電電流を評価する放電電流モニタで
あって、前記ケーブルまたは前記放電電極から輻射され
た電磁波の内、前記放電電極への印加電圧周波数成分よ
り高周波で前記放電電流の周波数帯域内の特定周波数成
分を検出する受信手段を設け、前記受信手段で検出され
た前記特定周波数成分の電磁波強度に基づいて放電電流
値に対応付けられたモニタ値を出力する出力手段を設け
てある点にある。A first feature of a discharge current monitor according to the present invention for achieving this object is as described in claim 1 of the claims. A discharge current monitor that evaluates a discharge current of a discharge device that performs corona discharge from a discharge electrode connected via a cable, wherein, among electromagnetic waves radiated from the cable or the discharge electrode, a voltage applied to the discharge electrode Receiving means for detecting a specific frequency component in the frequency band of the discharge current at a higher frequency than the component, and a monitor value associated with the discharge current value based on the electromagnetic wave intensity of the specific frequency component detected by the receiving means Is provided in the output means.
【０００７】同第二の特徴構成は、特許請求の範囲の欄
の請求項２に記載した通り、高圧電源部にケーブルを介
して接続された放電電極からコロナ放電する放電装置の
放電電流を評価する放電電流モニタであって、前記高圧
電源部の出力側を流れる電流の内の全部または一部の前
記放電電流の周波数帯域内の特定周波数成分を、前記放
電電極への印加電圧周波数成分より高周波成分を通過さ
せる高域通過フィルタを介して検出する電流検出手段を
設け、前記電流検出手段で検出された前記特定周波数成
分の電流値に基づいて放電電流値に対応付けられたモニ
タ値を出力する出力手段を設けてある点にある。[0007] The second characteristic configuration is to evaluate a discharge current of a discharge device that performs corona discharge from a discharge electrode connected to a high-voltage power supply unit via a cable as described in claim 2 of the claims. A discharge current monitor, wherein all or a part of the current flowing on the output side of the high-voltage power supply unit has a specific frequency component within a frequency band of the discharge current, a frequency higher than a voltage frequency component applied to the discharge electrode. Providing a current detecting means for detecting through a high-pass filter that passes the component, and outputting a monitor value associated with a discharge current value based on the current value of the specific frequency component detected by the current detecting means. The point is that output means is provided.
【０００８】この目的を達成するための本発明に係る高
圧電源装置の特徴構成は、特許請求の範囲の欄の請求項
３に記載した通り、上記第一または第二の特徴構成を有
する放電装置の放電電流モニタから出力されたモニタ値
に基づいて、前記高圧電源部からの出力を所定の目標値
に制御する出力制御手段を備えてある点にある。In order to achieve this object, the high voltage power supply according to the present invention has a characteristic configuration as described in claim 3 of the claims. In that the output from the high-voltage power supply unit is controlled to a predetermined target value based on the monitor value output from the discharge current monitor.
【０００９】この目的を達成するための本発明に係る放
電装置の特徴構成は、特許請求の範囲の欄の請求項４に
記載した通り、前記放電電極を洗浄する洗浄機構を備
え、上記第一または第二の特徴構成を有する放電電流モ
ニタから出力されたモニタ値に基づいて、前記洗浄機構
を作動させて自動洗浄する洗浄制御手段を設けてある点
にある。According to a fourth aspect of the present invention, a discharge device according to the present invention is provided with a cleaning mechanism for cleaning the discharge electrode, wherein the discharge device has a cleaning mechanism for cleaning the discharge electrode. Alternatively, a cleaning control means for operating the cleaning mechanism and performing automatic cleaning based on a monitor value output from a discharge current monitor having the second characteristic configuration is provided.
【００１０】以下に、作用並びに効果について説明す
る。前記高圧電源部から前記放電電極間に印加される電
圧が一定の高電圧に達するとコロナ放電を開始し、その
放電電流の周波数帯域は極めて高周波域で数ＭＨｚ〜数
百ＭＨｚの広範囲に及ぶが、その印加電圧以外の前記放
電電流成分を含むノイズ成分は略ＤＣレベルから数百Ｍ
Ｈｚの広範囲にわたり均一なエネルギ分布のホワイトノ
イズであること、更には、前記ケーブルまたは前記放電
電極から輻射される電磁波も数ＭＨｚ〜数百ＭＨｚの広
範囲な周波数帯域において均一なエネルギ分布のフラッ
トな周波数特性を示すことが、本発明者等の鋭意研究の
結果確認することができた。従って、前記放電電流或い
は前記電磁波の前記周波数帯域内の特定周波数成分だけ
を検出しても、放電電流を的確に評価することができる
のである。The operation and effect will be described below. Corona discharge starts when the voltage applied between the discharge electrodes from the high-voltage power supply reaches a constant high voltage, and the frequency band of the discharge current extends over a wide range of several MHz to several hundred MHz in an extremely high frequency range. The noise component including the discharge current component other than the applied voltage is approximately several hundred M from the DC level.
Hz is a white noise having a uniform energy distribution over a wide range of frequencies.Furthermore, an electromagnetic wave radiated from the cable or the discharge electrode is also a flat frequency having a uniform energy distribution in a wide frequency band of several MHz to several hundred MHz. It was confirmed by the inventors of the present invention that they exhibited characteristics. Therefore, even if only the discharge current or the specific frequency component in the frequency band of the electromagnetic wave is detected, the discharge current can be accurately evaluated.
【００１１】そこで、上記放電電流モニタの第一の特徴
構成によれば、前記受信手段が前記電磁波の内の前記周
波数帯域内の特定周波数成分を検出し、前記出力手段が
前記受信手段で検出された前記特定周波数成分の電磁波
強度に基づいて放電電流値に対応付けられたモニタ値を
出力することにより、そのモニタ値によって前記放電電
流を的確に評価することができるのである。更に、この
ように放電状態を数値的に把握できるため、放電電極の
劣化や汚染等による放電電流の減少を客観的に判断でき
るのである。また、本特徴構成によれば、前記放電電流
の非接触検出が可能なため、既設の放電装置に対して後
工事によって前記放電電流モニタを前記放電装置に装着
することができるのである。Therefore, according to the first characteristic configuration of the discharge current monitor, the receiving means detects a specific frequency component in the frequency band in the electromagnetic wave, and the output means is detected by the receiving means. By outputting a monitor value associated with the discharge current value based on the electromagnetic wave intensity of the specific frequency component, the discharge current can be accurately evaluated based on the monitor value. Further, since the discharge state can be grasped numerically in this way, it is possible to objectively determine a decrease in the discharge current due to deterioration or contamination of the discharge electrode. Further, according to this characteristic configuration, since the contactless detection of the discharge current is possible, the discharge current monitor can be attached to the existing discharge device by post-construction.
【００１２】ここで、前記放電電流の評価とは、前記モ
ニタ値の増減から前記放電電流値の増減を把握する相対
的な評価と、前記モニタ値と前記放電電流値とを予め対
応付けておくことによる絶対的な評価の両者を含むもの
である。また、絶対的な評価は、必ずしも電流値として
評価せずに、例えば放電現象の結果としてのオゾン発生
量等に基づく放電電流値が適正範囲内にあるかどうかの
評価であっても構わない。Here, the evaluation of the discharge current means that a relative evaluation for grasping the increase / decrease of the discharge current value from the increase / decrease of the monitor value is associated in advance with the monitor value and the discharge current value. It includes both absolute evaluations. In addition, the absolute evaluation may not necessarily be evaluated as a current value, but may be an evaluation as to whether or not a discharge current value based on, for example, an amount of ozone generated as a result of a discharge phenomenon is within an appropriate range.
【００１３】更に、同第二の特徴構成によれば、前記高
圧電源部の出力側即ち前記ケーブルを流れる電流或いは
その一部が前記高域通過フィルタを通過することで、前
記放電電極に印加する印加電圧の周波数成分が除去さ
れ、前記ケーブルを流れる放電電流の全部または一部が
前記電流検出手段によって検出される。ところで、上記
の如く、前記放電電流はその広範囲な周波数帯域におい
て均一なエネルギ分布のフラットな周波数特性を示すこ
とから、前記電流検出手段によって検出された周波数成
分が前記放電電流の前記周波数帯域内の特定周波数成分
のみであっても、前記出力手段がその電流値に基づいて
放電電流値に対応付けられたモニタ値を出力することに
より、そのモニタ値によって前記放電電流を的確に評価
することができるのである。尚、本特徴構成によれば、
前記放電電流は接触検出となるため、上記第一の特徴構
成のように既設の放電装置に対して後工事によって前記
放電電流モニタを前記放電装置に装着することはできな
いものの、非接触検出と異なり、検出ポイントによって
検出レベルが異なり校正が煩雑になるという問題は回避
することができるのである。Further, according to the second characteristic configuration, the output side of the high-voltage power supply unit, that is, the current flowing through the cable or a part thereof is applied to the discharge electrode by passing through the high-pass filter. The frequency component of the applied voltage is removed, and all or part of the discharge current flowing through the cable is detected by the current detection means. By the way, as described above, since the discharge current shows a flat frequency characteristic of a uniform energy distribution in a wide frequency band, the frequency component detected by the current detecting means is within the frequency band of the discharge current. Even if only the specific frequency component is included, the output means outputs a monitor value associated with the discharge current value based on the current value, whereby the discharge current can be accurately evaluated based on the monitor value. It is. In addition, according to this characteristic configuration,
Since the discharge current is contact detection, the discharge current monitor cannot be mounted on the discharge device by post-construction of the existing discharge device as in the first characteristic configuration, but unlike the non-contact detection. The problem that the detection level varies depending on the detection point and the calibration becomes complicated can be avoided.
【００１４】上記高圧電源装置の特徴構成によれば、上
記第一または第二の特徴構成を有する放電装置の放電電
流モニタから出力されたモニタ値によって、前記放電電
流を的確に評価することができるため、前記出力制御手
段が前記モニタ値に基づいて、前記高圧電源部からの出
力を所定の目標値に制御することで、前記放電電流を適
正範囲内に維持することが可能となり、放電装置の安定
稼働が可能となるのである。According to the characteristic configuration of the high-voltage power supply device, the discharge current can be accurately evaluated by the monitor value output from the discharge current monitor of the discharge device having the first or second characteristic configuration. Therefore, the output control means controls the output from the high-voltage power supply unit to a predetermined target value based on the monitor value, so that the discharge current can be maintained within an appropriate range. Stable operation becomes possible.
【００１５】上記放電装置の特徴構成によれば、上記第
一または第二の特徴構成を有する放電電流モニタから出
力されたモニタ値によって、放電状態が評価でき、放電
電流量の低下が認識された場合、放電電極が劣化や汚染
等していると判断できるため、前記洗浄制御手段が前記
洗浄機構を作動させて前記放電電極を洗浄することによ
り、放電電極の劣化や汚染等を回復させ、放電状態を正
常に維持することができるのである。この結果、例え
ば、本放電装置を使用したプラズマ脱臭装置の場合、放
電によるオゾン発生量を常時適正範囲内に維持すること
が可能となり、プラズマ脱臭装置の安定稼働が可能とな
るのである。According to the characteristic configuration of the discharge device, the discharge state can be evaluated based on the monitor value output from the discharge current monitor having the first or second characteristic configuration, and a decrease in the discharge current amount has been recognized. In this case, since it can be determined that the discharge electrode is deteriorated or contaminated, the cleaning control means activates the cleaning mechanism to clean the discharge electrode, thereby recovering the deterioration or contamination of the discharge electrode and discharging the discharge electrode. The state can be maintained normally. As a result, for example, in the case of a plasma deodorizing device using the present discharge device, the amount of ozone generated by the discharge can be constantly maintained within an appropriate range, and the stable operation of the plasma deodorizing device becomes possible.
【００１６】[0016]
【発明の実施の形態】以下に本発明の実施の形態を図面
に基づいて説明する。図１は本発明に係る放電電流モニ
タを備えた放電装置、並びに、その放電現象を利用した
オゾン発生装置を示す概略構成図である。図１に示すよ
うに、前記放電装置は、放電室１２内に設けられた一対
の放電電極３（放電電極と誘導電極）がケーブル２を介
して高圧電源部１に接続され、前記高圧電源部１が出力
する１００ＫＨｚ以下の発振周波数（例えば、１５ＫＨ
ｚ）の高電圧の交流電圧が前記放電電極３の間に印加さ
れ、前記放電電極３間の電圧が一定電圧以上となるとコ
ロナ放電する構成となっている。また、前記オゾン発生
装置は、前記放電装置に加え、前記放電室１２内に被処
理ガスを供給する送風機１３、処理ガス排出用の風洞１
４を備えて構成されている。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic configuration diagram showing a discharge device provided with a discharge current monitor according to the present invention, and an ozone generator utilizing the discharge phenomenon. As shown in FIG. 1, in the discharge device, a pair of discharge electrodes 3 (discharge electrodes and induction electrodes) provided in a discharge chamber 12 are connected to a high-voltage power supply 1 via a cable 2. The oscillation frequency of 100 KHz or less (for example, 15 KH
z) A high AC voltage is applied between the discharge electrodes 3 and a corona discharge occurs when the voltage between the discharge electrodes 3 exceeds a certain voltage. The ozone generator includes a blower 13 for supplying a gas to be processed into the discharge chamber 12 and a wind tunnel 1 for discharging a processing gas, in addition to the discharge device.
4 is provided.
【００１７】前記放電電流モニタは、前記ケーブル２を
流れる高周波の放電電流成分によって発生する電磁波の
数ＭＨｚ〜数百ＭＨｚの周波数帯域内の特定周波数成分
を同調検波する受信手段４と、前記受信手段４で検出さ
れた前記特定周波数成分の電磁波強度に基づいて前記放
電電流の電流値に対応付けられたモニタ値を出力する出
力手段５とからなる。前記受信手段４は、具体的には、
同調コイルＬ、可変コンデンサＣ1 、ダイオードＤ1 、
抵抗Ｒ1 、コンデンサＣ2 から構成されている。前記可
変コンデンサＣ1 は同調周波数を前記特定周波数に調整
するためのものである。更に、前記モニタ値に基づい
て、前記高圧電源部１の出力を所定の目標値に制御する
出力制御手段９が設けられている。前記高圧電源部１
は、例えば、１００Ｖの商用交流電圧を入力して、内部
でＡＣ／ＤＣ変換後、チョッパ方式等による電力安定化
制御を行い、インバータでＤＣ／ＡＣ変換したものを昇
圧トランスにより高電圧を出力するものである。ここ
で、前記高圧電源部１の出力制御は前記商用交流電圧の
入力レベルを調整することで行う。The discharge current monitor includes a receiving means 4 for tuning and detecting a specific frequency component within a frequency band of several MHz to several hundred MHz of an electromagnetic wave generated by a high frequency discharge current component flowing through the cable 2, and the receiving means. Output means 5 for outputting a monitor value associated with the current value of the discharge current based on the electromagnetic wave intensity of the specific frequency component detected at 4. The receiving means 4 is, specifically,
Tuning coil L, variable capacitor C 1 , diode D 1 ,
It comprises a resistor R 1 and a capacitor C 2 . The variable capacitor C 1 is used to adjust the tuning frequency to the specified frequency. Further, output control means 9 for controlling the output of the high-voltage power supply unit 1 to a predetermined target value based on the monitor value is provided. The high-voltage power supply unit 1
For example, after a commercial AC voltage of 100 V is input, AC / DC conversion is internally performed, power stabilization control is performed by a chopper method or the like, and DC / AC conversion by an inverter is output to a high voltage by a step-up transformer. Things. Here, the output control of the high-voltage power supply unit 1 is performed by adjusting the input level of the commercial AC voltage.
【００１８】次に、前記放電電流モニタによって前記放
電電流を的確に評価できることを実験結果に基づいて説
明する。図２に示すように、実験用の回路ブロック構成
は、図１に示す前記放電装置、前記放電電流モニタ、前
記オゾン発生装置に対して、前記出力制御手段９を設け
ずに、前記商用交流電圧を電力計１１を介して前記高圧
電源部１に入力し、前記ケーブル２の一方側に抵抗ＲS
を挿入し、その両端の電圧降下により前記ケーブル２を
流れる電流量を評価するための抵抗電圧測定回路１０を
前記抵抗ＲS の両端に設け、前記放電電流モニタの前記
出力手段５として第１直流電圧計を設け、前記風洞１４
の下流側に設けた採取口Ｆから発生したオゾンを採取し
てオゾン発生量を測定するオゾンモニタ１５と前記オゾ
ンモニタ１５の出力信号レベルを読み取る第３直流電圧
計１６とから構成されている。Next, the fact that the discharge current can be accurately evaluated by the discharge current monitor will be described based on experimental results. As shown in FIG. 2, the experimental circuit block configuration is such that the output control means 9 is not provided for the discharge device, the discharge current monitor, and the ozone generation device shown in FIG. Is input to the high-voltage power supply unit 1 via a power meter 11, and a resistor R S is connected to one end of the cable 2.
And a resistance voltage measuring circuit 10 for evaluating the amount of current flowing through the cable 2 based on the voltage drop at both ends is provided at both ends of the resistor R S , and a first DC power supply is used as the output means 5 of the discharge current monitor. A pressure gauge is provided and the wind tunnel 14 is provided.
An ozone monitor 15 that measures ozone generated by collecting ozone generated from a sampling port F provided downstream of the ozone monitor 15 and a third DC voltmeter 16 that reads an output signal level of the ozone monitor 15.
【００１９】図３に示すように、前記ケーブル２を流れ
る高圧電流の点Ａでの電圧波形は、前記高圧電源部１か
ら前記１００ＫＨｚ以下の交流のベース電流による電圧
波形に、放電電流による高周波成分が重畳された形で現
れる。図３において、放電開始とともに現れるノイズ波
形は放電電流の高周波成分を含むホワイトノイズであ
り、各周期毎に印加電圧の極性が正負反転するため２回
発生する。As shown in FIG. 3, the voltage waveform at the point A of the high-voltage current flowing through the cable 2 is changed from the high-voltage power supply unit 1 to a voltage waveform based on the AC base current of 100 KHz or less, Appear in a superimposed form. In FIG. 3, the noise waveform that appears at the start of the discharge is white noise including a high-frequency component of the discharge current, and occurs twice because the polarity of the applied voltage is inverted in each cycle.
【００２０】前記放電電流の高周波成分によって前記ケ
ーブル２から輻射する前記電磁波の特定周波数成分が、
前記受信手段４の点Ｂにおいて、前記同調コイルＬと前
記可変コンデンサＣ1 で構成される共振回路によって検
出される。図４に示すように、この特定周波数は数ＭＨ
ｚ〜数百ＭＨｚの広範囲に分布するホワイトノイズの周
波数帯域の中から選ばれ、点Ｂでの検出波形からは前記
ベース電流の周波数成分は除去されている。点Ｂで検出
された電流信号は、前記ダイオードＤ1 、前記抵抗Ｒ
1 、前記コンデンサＣ2 で構成される整流平滑化回路で
電圧変換され、前記第１直流電圧計５で点Ｄにおける電
圧値が測定される。これにより、輻射電磁波として検出
される放電電流量を電圧値として表し、放電電流を評価
するモニタ値として取り出すことができ、放電状態つま
り放電電流の大小を簡単にモニタリングすることができ
るのである。The specific frequency component of the electromagnetic wave radiated from the cable 2 by the high frequency component of the discharge current is:
In point B of the receiving unit 4 is detected by the resonant circuit composed with the tuning coil L in the variable capacitor C 1. As shown in FIG. 4, this specific frequency is several MH
It is selected from the frequency band of white noise distributed over a wide range of z to several hundred MHz, and the frequency component of the base current is removed from the detected waveform at the point B. The current signal detected at the point B is expressed by the diode D 1 and the resistor R
1, wherein the voltage conversion configured rectifier smoothing circuit by the capacitor C 2, the voltage value at the point D in the first DC voltmeter 5 is measured. As a result, the amount of discharge current detected as a radiated electromagnetic wave can be represented as a voltage value, taken out as a monitor value for evaluating the discharge current, and the discharge state, that is, the magnitude of the discharge current can be easily monitored.
【００２１】図２に示すように、前記抵抗電圧測定回路
１０は、前記ケーブル２を流れる電流を検出すべく、抵
抗Ｒ2 とフォトカップラＰの発光ダイオード部の直列回
路を前記抵抗ＲS と並列に設け、前記フォトカップラＰ
の受光トランジスタ部とエミッタ抵抗Ｒ3 を直列に接続
し、前記発光ダイオード部を流れる電流を前記受光トラ
ンジスタ部側で電圧変換し、第２直流電圧計で点Ｅにお
ける電圧を測定して前記ケーブル２を流れる電流値を間
接的に評価するものである。また、具体的な放電状態
は、放電によるオゾン発生量を前記オゾンモニタ１５及
び前記第３直流電圧計１６で検出して評価することがで
きる。As shown in FIG. 2, the resistance voltage measuring circuit 10 connects a series circuit of a resistor R 2 and a light emitting diode section of a photocoupler P in parallel with the resistor R S in order to detect a current flowing through the cable 2. And the photocoupler P
Connect the light receiving transistor portion and the emitter resistor R 3 of the series, the voltage conversion of the current flowing through the light emitting diode by the light receiving transistor portion, the cable 2 by measuring the voltage at point E in the second DC voltmeter The value of the flowing current is evaluated indirectly. The specific discharge state can be evaluated by detecting the amount of ozone generated by the discharge with the ozone monitor 15 and the third DC voltmeter 16.
【００２２】次に、モニタ値である点Ｄにおける放電検
出電圧が、前記オゾンモニタ１５が検出したオゾン濃
度、及び、前記抵抗電圧測定回路１０で測定した点Ｅに
おける抵抗電圧との相関関係を検証した実験結果につき
説明する。Next, the correlation between the discharge detection voltage at the point D, which is the monitor value, and the ozone concentration detected by the ozone monitor 15 and the resistance voltage at the point E measured by the resistance voltage measuring circuit 10 is verified. The following describes the experimental results.
【００２３】この検証実験は、前記商用電源の入力電圧
をＡＣ７５ＶからＡＣ９０Ｖまで５Ｖ刻みで変化させ、
その際の入力電力、前記放電検出電圧、前記オゾン濃
度、前記抵抗電圧を、夫々各順に、前記電力計１１、前
記第１直流電圧計５、前記第３直流電圧計１６、前記第
２直流電圧計で測定したものを、各別に図５、図６、図
７に示す。尚、夫々横軸はＡＣ入力電圧である。また、
各図に対応する実測値を表１に示す。表１の括弧内は数
字は入力電圧の５Ｖ増加毎の各測定値の増加率を表して
いる。In this verification experiment, the input voltage of the commercial power supply was changed from AC75V to AC90V in steps of 5V.
At this time, the input power, the discharge detection voltage, the ozone concentration, and the resistance voltage are measured by the power meter 11, the first DC voltmeter 5, the third DC voltmeter 16, and the second DC voltmeter, respectively, in that order. The results are shown in FIGS. 5, 6, and 7, respectively. The horizontal axis represents the AC input voltage. Also,
Table 1 shows the measured values corresponding to each figure. The numbers in parentheses in Table 1 indicate the rate of increase of each measured value for each 5 V increase in the input voltage.
【００２４】図５、図６、及び、表１より、ＡＣ入力電
圧の変化に対して、前記放電検出電圧と前記オゾン濃度
は同一の増加率で変化していることが分かる。尚、点Ｅ
における前記抵抗電圧は前の２測定値と少し異なった増
加率で変化しており、前記抵抗電圧でもって完全に放電
状態を評価しているとは言えない。この点については後
述する。From FIG. 5, FIG. 6 and Table 1, it can be seen that the discharge detection voltage and the ozone concentration change at the same increase rate with respect to the change of the AC input voltage. Note that point E
The resistance voltage changes at a slightly different rate of increase from the two previous measured values, and it cannot be said that the discharge state is completely evaluated by the resistance voltage. This will be described later.
【００２５】[0025]
【表１】 [Table 1]
【００２６】更に、上記実験結果より、前記放電検出電
圧と前記オゾン濃度は線形で正の相関関係にあることが
分かるが、更にこの点を検証すべく、前記放電検出電圧
を０．１Ｖ刻みに１．１Ｖまで変化するように前記ＡＣ
入力電圧を調整しながら、前記オゾン濃度、前記抵抗電
圧、及び、前記入力電力を測定した結果を、図８、図
９、図１０に各別に示す。図８より、前記放電検出電圧
と前記オゾン濃度が線形で正の相関関係にあることが明
確であり、前記出力手段５が出力するモニタ値、つまり
本検証実験での放電検出電圧が的確に放電状態を評価し
ていることが判明した。Further, from the above experimental results, it can be seen that the discharge detection voltage and the ozone concentration have a linear and positive correlation, but in order to verify this point, the discharge detection voltage is increased in steps of 0.1 V. 1.1V.
The results of measuring the ozone concentration, the resistance voltage, and the input power while adjusting the input voltage are shown in FIGS. 8, 9, and 10, respectively. From FIG. 8, it is clear that the discharge detection voltage and the ozone concentration have a linear and positive correlation, and the monitor value output by the output means 5, that is, the discharge detection voltage in the present verification experiment accurately discharges. It turned out that the condition was being evaluated.
【００２７】ところで、図９及び図１０より、前記抵抗
電圧と前記入力電力は共に前記放電検出電圧とは線形な
相関関係になく、前記抵抗電圧と前記入力電力とが線形
な相関関係にあることが分かる。このことは、前記ケー
ブル２を流れる電流には前記ベース電流（１００ＫＨｚ
以下）が含まれているためである。つまり、前記ベース
電流は放電現象を起こすためのキャリアであり、放電電
流とは異なるため、入力電力の変化と一致するのは、ベ
ース電流分の損失と一致して増減するためである。According to FIGS. 9 and 10, both the resistance voltage and the input power do not have a linear correlation with the discharge detection voltage, but have a linear correlation with the resistance voltage and the input power. I understand. This means that the current flowing through the cable 2 is equal to the base current (100 KHz).
The following is included. That is, the base current is a carrier for causing a discharge phenomenon, and is different from the discharge current. Therefore, the reason why the base current matches the change in the input power is that the base current increases and decreases in accordance with the loss of the base current.
【００２８】従って、前記抵抗電圧の測定において、前
記ベース電流の周波数成分を高域通過フィルタを介して
除去することで、前記放電検出電圧と同様に、前記抵抗
電圧によっても、的確に放電状態を評価できると考えら
れる。この点を検証するために、図２に示す実験回路に
対して、図１１に示すように、前記抵抗Ｒ2 と前記フォ
トカップラＰの発光ダイオード部の直列回路に前記ベー
ス電流の周波数成分を除去する高域通過フィルタ６を挿
入する変更を加えて、前記放電検出電圧に対する前記抵
抗電圧の測定を行い、その結果を図１２に示す。Therefore, in the measurement of the resistance voltage, by removing the frequency component of the base current through the high-pass filter, the discharge state can be accurately detected by the resistance voltage as well as the discharge detection voltage. It can be evaluated. To verify this point, removal against experimental circuit shown in FIG. 2, as shown in FIG. 11, the frequency component of the base current to the series circuit of the light emitting diode of the resistor R 2 and the photocoupler P The resistance of the discharge detection voltage is measured with respect to the discharge detection voltage, with a change of inserting the high-pass filter 6 being performed. The result is shown in FIG.
【００２９】図１２より、前記高域通過フィルタ６を挿
入後の前記抵抗電圧も前記放電検出電圧と同様に、的確
に放電状態を評価できることが判明した。このことは、
前記受信手段４と前記出力手段５からなる前記放電電流
モニタの代わりに、前記抵抗電圧測定回路１０に前記高
域通過フィルタ６を挿入したものが、別の放電電流モニ
タとして使用できることを意味する。FIG. 12 shows that the resistance state after the insertion of the high-pass filter 6 can accurately evaluate the discharge state similarly to the discharge detection voltage. This means
This means that the high-pass filter 6 inserted into the resistance voltage measurement circuit 10 instead of the discharge current monitor including the receiving unit 4 and the output unit 5 can be used as another discharge current monitor.
【００３０】従って、図１３に示すように、本発明に係
る放電電流モニタの別実施形態として、放電電流モニタ
を、前記高圧電源部１の出力側即ち前記ケーブル２を流
れる電流の内の全部または一部の前記放電電流の周波数
帯域内の特定周波数成分を、前記放電電極３への印加電
圧周波数成分より高周波成分を通過させる前記高域通過
フィルタ６を介して検出する電流検出手段７を設け、前
記電流検出手段７で検出された前記特定周波数成分の電
流値に基づいて放電電流値に対応付けられたモニタ値を
出力する出力手段８を設けて構成するようにするのも好
ましい。この場合、図１に示す実施の形態と同様に、前
記出力制御手段９が、前記出力手段８が出力するモニタ
値に基づいて、前記高圧電源部１の出力を所定の目標値
に制御する。Therefore, as shown in FIG. 13, as another embodiment of the discharge current monitor according to the present invention, the discharge current monitor is connected to all or all of the current flowing through the output side of the high-voltage power supply unit 1, that is, the cable 2. Current detection means 7 for detecting a specific frequency component in a frequency band of a part of the discharge current through the high-pass filter 6 that passes a higher frequency component than a frequency component of a voltage applied to the discharge electrode 3; It is also preferable that an output unit 8 that outputs a monitor value associated with a discharge current value based on the current value of the specific frequency component detected by the current detection unit 7 is provided. In this case, as in the embodiment shown in FIG. 1, the output control means 9 controls the output of the high-voltage power supply unit 1 to a predetermined target value based on the monitor value output by the output means 8.
【００３１】次に、本発明に係る放電電流モニタを備え
た放電装置の別実施形態として、前記放電電極３を洗浄
する洗浄機構を備え、前記放電電流モニタから出力され
たモニタ値に基づいて、前記洗浄機構を作動させて前記
放電電極３を自動洗浄する洗浄制御手段を設けるのも好
ましい。一般に、放電装置では、被処理ガス中でのコロ
ナ放電に伴って生成する塩類が前記放電電極３の表面に
付着して、前記放電電極を汚染するため、これを除去し
て、適正な放電状態を維持する必要がある。Next, as another embodiment of the discharge device provided with the discharge current monitor according to the present invention, the discharge device is provided with a cleaning mechanism for cleaning the discharge electrode 3, and based on a monitor value output from the discharge current monitor, It is also preferable to provide cleaning control means for automatically cleaning the discharge electrode 3 by operating the cleaning mechanism. In general, in the discharge device, salts generated by corona discharge in the gas to be treated adhere to the surface of the discharge electrode 3 and contaminate the discharge electrode. Need to be maintained.
【００３２】前記洗浄機構は、具体的には、前記放電室
１２内部の前記放電電極３の表面に向けて洗浄水を噴射
する洗浄ノズルと前記洗浄ノズルへの前記洗浄水の供給
を開始及び停止するための洗浄液供給弁で構成されてい
る。前記洗浄液供給弁は弁の開閉を操作する操作部が、
前記洗浄制御手段からの制御信号を受信して弁の開閉を
制御する構成となっている。前記放電電流モニタが放電
電流量の低下を検出して、その状態に応じた前記モニタ
値を出力することで、前記洗浄制御手段が、前記放電電
極３が洗浄が必要な状態にあると判断して、前記洗浄液
供給弁を開成し、前記洗浄ノズルから洗浄水が噴射さ
れ、噴射された洗浄水によって汚染した前記放電電極３
の表面が洗浄される。尚、電極洗浄時には、前記送風機
１３を停止するとともに、前記高圧電源部１の二次側出
力を停止するように構成してある。Specifically, the cleaning mechanism includes a cleaning nozzle for spraying cleaning water toward the surface of the discharge electrode 3 inside the discharge chamber 12, and starting and stopping the supply of the cleaning water to the cleaning nozzle. And a cleaning liquid supply valve. The cleaning liquid supply valve has an operation unit for opening and closing the valve,
The control signal is received from the cleaning control means to control the opening and closing of the valve. The discharge current monitor detects a decrease in the amount of discharge current and outputs the monitor value according to the state, whereby the cleaning control unit determines that the discharge electrode 3 is in a state requiring cleaning. Then, the cleaning liquid supply valve is opened, cleaning water is injected from the cleaning nozzle, and the discharge electrode 3 contaminated by the injected cleaning water.
The surface is cleaned. At the time of electrode cleaning, the blower 13 is stopped, and the secondary output of the high-voltage power supply unit 1 is stopped.
【図１】本発明に係る放電電流モニタを備えた放電装
置、並びに、その放電現象を利用したオゾン発生装置を
示す概略構成図FIG. 1 is a schematic configuration diagram showing a discharge device provided with a discharge current monitor according to the present invention, and an ozone generator using the discharge phenomenon.
【図２】本発明に係る放電電流モニタの実用性を検証す
る検証実験用の回路ブロック構成図FIG. 2 is a circuit block diagram for a verification experiment for verifying the practicality of the discharge current monitor according to the present invention.
【図３】ケーブルを流れる高圧電流の電圧波形図FIG. 3 is a voltage waveform diagram of a high-voltage current flowing through a cable.
【図４】高周波検出信号の電圧波形図FIG. 4 is a voltage waveform diagram of a high-frequency detection signal.
【図５】ＡＣ入力電圧と放電検出電圧の相関関係図FIG. 5 is a correlation diagram between an AC input voltage and a discharge detection voltage.
【図６】ＡＣ入力電圧とオゾン濃度の相関関係図FIG. 6 is a diagram showing a correlation between an AC input voltage and an ozone concentration.
【図７】ＡＣ入力電圧と抵抗電圧の相関関係図FIG. 7 is a correlation diagram between an AC input voltage and a resistance voltage.
【図８】放電検出電圧とオゾン濃度の相関関係図FIG. 8 is a correlation diagram between a discharge detection voltage and an ozone concentration.
【図９】放電検出電圧と抵抗電圧の相関関係図FIG. 9 is a diagram showing a correlation between a discharge detection voltage and a resistance voltage.
【図１０】放電検出電圧と入力電力の相関関係図FIG. 10 is a correlation diagram between a discharge detection voltage and input power.
【図１１】検証実験用の回路ブロック構成図の変更を示
す説明図FIG. 11 is an explanatory diagram showing a change in a circuit block configuration diagram for a verification experiment.
【図１２】放電検出電圧と高域通過フィルタ挿入前後の
抵抗電圧との相関関係図FIG. 12 is a correlation diagram between a discharge detection voltage and a resistance voltage before and after a high-pass filter is inserted.
【図１３】本発明に係る放電電流モニタの別実施形態を
示す概略構成図FIG. 13 is a schematic configuration diagram showing another embodiment of the discharge current monitor according to the present invention.
１ 高圧電源部 ２ ケーブル ３ 放電電極 ４ 受信手段 ５ 出力手段 ６ 高域通過フィルタ ７ 電流検出手段 ８ 出力手段 ９ 出力制御手段 １２ 放電室 １３ 送風機 １４ 風洞 DESCRIPTION OF SYMBOLS 1 High voltage power supply part 2 Cable 3 Discharge electrode 4 Receiving means 5 Output means 6 High-pass filter 7 Current detection means 8 Output means 9 Output control means 12 Discharge chamber 13 Blower 14 Wind tunnel
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 ＦＩ // Ｈ０１Ｔ 23/00 Ｈ０１Ｔ 23/00 (72)発明者 斉木 茂夫 兵庫県高砂市荒井町新浜１丁目２番１号 株式会社タクマ中央研究所内────────────────────────────────────────────────── ─── Continued on the front page (51) Int.Cl. 6 Identification symbol FI // H01T 23/00 H01T 23/00 (72) Inventor Shigeo Saiki 1-2-1, Shinhama, Araimachi, Takasago-shi, Hyogo Prefecture TAKUMA CORPORATION Central Research Laboratory
Claims (4)
た放電電極からコロナ放電する放電装置の放電電流を評
価する放電電流モニタであって、 前記ケーブルまたは前記放電電極から輻射された電磁波
の内、前記放電電極への印加電圧周波数成分より高周波
で前記放電電流の周波数帯域内の特定周波数成分を検出
する受信手段を設け、前記受信手段で検出された前記特
定周波数成分の電磁波強度に基づいて放電電流値に対応
付けられたモニタ値を出力する出力手段を設けてある放
電電流モニタ。1. A discharge current monitor for evaluating a discharge current of a discharge device that performs corona discharge from a discharge electrode connected to a high-voltage power supply unit via a cable, wherein the discharge current monitor includes an electromagnetic wave radiated from the cable or the discharge electrode. Receiving means for detecting a specific frequency component within a frequency band of the discharge current at a frequency higher than a frequency component of a voltage applied to the discharge electrode, and discharging based on an electromagnetic wave intensity of the specific frequency component detected by the receiving means. A discharge current monitor provided with output means for outputting a monitor value associated with a current value.
た放電電極からコロナ放電する放電装置の放電電流を評
価する放電電流モニタであって、 前記高圧電源部の出力側を流れる電流の内の全部または
一部の前記放電電流の周波数帯域内の特定周波数成分
を、前記放電電極への印加電圧周波数成分より高周波成
分を通過させる高域通過フィルタを介して検出する電流
検出手段を設け、前記電流検出手段で検出された前記特
定周波数成分の電流値に基づいて放電電流値に対応付け
られたモニタ値を出力する出力手段を設けてある放電電
流モニタ。2. A discharge current monitor for evaluating a discharge current of a discharge device that performs corona discharge from a discharge electrode connected to a high-voltage power supply unit via a cable, wherein a discharge current monitor includes: Current detection means for detecting a specific frequency component in a frequency band of the discharge current in whole or in part through a high-pass filter that passes a higher frequency component than a voltage frequency component applied to the discharge electrode; A discharge current monitor provided with output means for outputting a monitor value associated with a discharge current value based on the current value of the specific frequency component detected by the detection means.
電流モニタから出力されたモニタ値に基づいて、前記高
圧電源部からの出力を所定の目標値に制御する出力制御
手段を備えてある高圧電源装置。3. An output control means for controlling an output from the high-voltage power supply unit to a predetermined target value based on a monitor value output from a discharge current monitor of the discharge device according to claim 1 or 2. High voltage power supply.
え、請求項１または２記載の放電装置の放電電流モニタ
から出力されたモニタ値に基づいて、前記洗浄機構を作
動させて自動洗浄する洗浄制御手段を設けてある放電装
置。4. A cleaning device comprising a cleaning mechanism for cleaning the discharge electrode, wherein the cleaning device is operated to automatically perform cleaning based on a monitor value output from a discharge current monitor of the discharge device according to claim 1. A discharge device provided with control means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15886898A JP3849043B2 (en) | 1998-06-08 | 1998-06-08 | Discharge device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15886898A JP3849043B2 (en) | 1998-06-08 | 1998-06-08 | Discharge device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11354252A true JPH11354252A (en) | 1999-12-24 |
| JP3849043B2 JP3849043B2 (en) | 2006-11-22 |
Family
ID=15681169
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15886898A Expired - Fee Related JP3849043B2 (en) | 1998-06-08 | 1998-06-08 | Discharge device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3849043B2 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1647777A2 (en) * | 2004-10-08 | 2006-04-19 | Lg Electronics Inc. | Apparatus and method for controlling air cleaning in an air conditioner |
| CN108224712A (en) * | 2017-12-01 | 2018-06-29 | 霍尼韦尔环境自控产品（天津）有限公司 | For reminding the method for cleaning electrostatic precipitator |
| CN109856516A (en) * | 2019-03-21 | 2019-06-07 | 中国科学院电工研究所 | A kind of high frequency square wave dielectric discharge characteristic experimental apparatus |
| JP2020102417A (en) * | 2018-12-25 | 2020-07-02 | 春日電機株式会社 | Static eliminator |
| JP2020112404A (en) * | 2019-01-10 | 2020-07-27 | 中国電力株式会社 | State display device of high-pressure conductor |
| CN115031487A (en) * | 2022-06-16 | 2022-09-09 | 珠海格力电器股份有限公司 | Refrigerator, and control method, device and system of odor remover |
-
1998
- 1998-06-08 JP JP15886898A patent/JP3849043B2/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1647777A2 (en) * | 2004-10-08 | 2006-04-19 | Lg Electronics Inc. | Apparatus and method for controlling air cleaning in an air conditioner |
| EP1647777A3 (en) * | 2004-10-08 | 2006-12-20 | Lg Electronics Inc. | Apparatus and method for controlling air cleaning in an air conditioner |
| CN108224712A (en) * | 2017-12-01 | 2018-06-29 | 霍尼韦尔环境自控产品（天津）有限公司 | For reminding the method for cleaning electrostatic precipitator |
| JP2020102417A (en) * | 2018-12-25 | 2020-07-02 | 春日電機株式会社 | Static eliminator |
| JP2020112404A (en) * | 2019-01-10 | 2020-07-27 | 中国電力株式会社 | State display device of high-pressure conductor |
| CN109856516A (en) * | 2019-03-21 | 2019-06-07 | 中国科学院电工研究所 | A kind of high frequency square wave dielectric discharge characteristic experimental apparatus |
| CN115031487A (en) * | 2022-06-16 | 2022-09-09 | 珠海格力电器股份有限公司 | Refrigerator, and control method, device and system of odor remover |
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| Publication number | Publication date |
|---|---|
| JP3849043B2 (en) | 2006-11-22 |
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