JPH11325913A - Vibration gyro - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibration gyro which is, with a simple vibrator and a supporting structure of it, suitable for mass working, with stable vibration characteristics for improved detection sensitivity. SOLUTION: A vibration gyro 10 comprises a vibrator 12. The vibrator 12 comprises a first square plate-like vibration body 14. Related to the first vibration body 14, second plate-like vibration bodies 16 and 18 are formed on both end sides in its longitudinal direction while a third plate-like vibration body 20 formed at a center part in its longitudinal direction. The second vibration bodies 16 and 18 and the third vibration body 20 extend vertically upward from a main surface of the first vibration body 14. Related to the first vibration body 14, its one main surface is provided with a driving piezoelectric element 24 while the other main surface provided with detection piezoelectric elements 30 and 32. The driving piezoelectric element 24 is applied with drive signal to cause bending vibration or the first vibration body 14, so that the signal corresponding to torsion strain of the first vibration body 14 due to Coriolis force is obtained from the detecting piezoelectric elements 30 and 32.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrating gyroscope, and more particularly to a vibrating gyroscope used for detecting a rotational angular velocity in, for example, a navigation system or a vehicle body attitude control system.

[0002]

2. Description of the Related Art FIG. 11 is a perspective view showing an example of a conventional vibrating gyroscope. The vibration gyro 1 of this conventional example has an H
It includes a vibrator 2 in the shape of a letter-shaped block. The vibrator 2 connects the four beams 3a, 3b, 3c, 3d of up, down, left and right with a central connecting portion 4
Are formed by integrally joining with each other. When viewed from the front in FIG. 11, the excitation driving piezoelectric elements 5 are formed on the outer side surfaces of the beams 3 a and 3 b of the vibrator 2.
Piezoelectric elements 6 and 6 for feedback are formed on the outer side surfaces of c and 3d. In addition, the front and back of the joint 4 are respectively provided in the length direction of the beams 3a to 3d (Z in FIG. 11).
The detection piezoelectric elements 7, 7 having the interdigital electrodes 7a at a fixed angle with respect to the axial direction) are formed. Further, the vibrator 2 is supported by a support rod 8 that penetrates the coupling portion 4 in the left-right direction when viewed from the front in FIG.

In the conventional vibrating gyroscope 1, when the excitation piezoelectric elements 5 are driven, the beams 3a to 3d of the vibrator 2 are driven.
Vibrates in the direction of the solid arrow A. This is detected and amplified by the feedback piezoelectric elements 6 and 6, and is fed back to the excitation driving piezoelectric elements 5 and 5 to perform self-excited oscillation. When an angular velocity about the Z-axis is applied to the vibrator 2, each of the beams 3a to 3d vibrates in the white arrow B direction due to the action of the Coriolis force. That is, the vibrator 2 vibrates in the torsional mode, and torsional vibration occurs in the coupling portion 4 with the vibration on the detection side in the torsional mode. This torsional vibration causes torsional distortion at a fixed angle with respect to the Z axis in the coupling portion 4 and the detecting piezoelectric elements 7 and 7. Since the torsional distortion is applied at right angles to the length direction of the interdigital electrodes 7a of the detecting piezoelectric elements 7, 7, the magnitude of the applied distortion between the interdigital electrodes 7a, 7a, that is, , A voltage corresponding to the magnitude of the Coriolis force is generated. By detecting this, the angular velocity can be measured.

In the vibration gyroscope 1 of this conventional example, the number of the detecting piezoelectric elements can be reduced as compared with the case where the detecting piezoelectric elements are provided on each of the four beams 3a to 3d. That is, as the piezoelectric element 7 for detecting the Coriolis force of the vibrator 2 or the piezoelectric element 5 for driving the excitation, the detection piezoelectric element 7 having the interdigital electrode 7a which forms a certain angle with the length direction of the beams 3a to 3d. Is formed in the coupling portion 4, the vibration on the detection side is detected or the vibrator 2 is driven for excitation, so that the number of the detecting piezoelectric elements 7 or the excitation driving piezoelectric elements 5 to be used can be reduced.

[0005]

However, FIG.
In the conventional vibrating gyroscope 1 shown in FIG.
The upper, lower, left and right four beams 3a to 3d are integrally connected at the center connecting portion 4 to form an H-shaped block, so that the vibrator 2 itself has a structure that is difficult to be twisted. For this reason, the conventional vibrating gyroscope 1 is insufficient even if torsional vibration occurs in the vibrator 2, and it has not been possible to expect to increase the detection sensitivity. Further, the vibrator 2 is unsuitable for mass production processing because of its structure. Further, when the vibrator 2 views the coupling portion 4 from the front in FIG.
Since it is supported by the support rod 8 penetrating in the axial direction), the supporting structure of the vibrator 2 becomes complicated, and the vibrator 2 cannot be supported accurately, and there is a possibility that vibration leakage may occur.

Therefore, a main object of the present invention is to provide a vibrating gyroscope which has a simple vibrator and a vibrator supporting structure, is suitable for mass production processing, has stable vibration characteristics, and can improve detection sensitivity. It is to be.

[0007]

A vibrating gyroscope according to the present invention is arranged on a first vibrating body in the form of a plate, and at one end and the other end of the first vibrating body in the longitudinal direction. A plate-shaped second vibrating body formed perpendicular to the main surface of the vibrating body, and a first vibrating body disposed at one end side in the width direction of the first vibrating body and at the center in the longitudinal direction thereof; And a third vibrator including a plate-shaped third vibrator formed perpendicular to the main surface of the vibrating gyroscope. A driving unit disposed on the main surface of the first vibrating body for bending and vibrating the first vibrating body in a direction perpendicular to the main surface, and one and the other of the second vibrating body and the third vibrating body Are disposed on the main surface of the first vibrating body positioned between the first vibrating body and the second vibrating body and the third vibrating body when a rotational angular velocity having a rotation axis in the longitudinal direction of the first vibrating body is applied. It is preferable to further include a detection unit that detects a signal corresponding to the amount of distortion of the first vibrator caused by the applied Coriolis force. The first vibrator, the second vibrator, and the third vibrator can be integrally formed of a material that generates mechanical vibration. Furthermore, it is preferable that the first vibrator, the second vibrator, and the third vibrator are integrally formed of a single plate-shaped member made of a material that generates mechanical vibration. A support member that supports the first vibrator near the node of the first vibrator can be formed. Further, it is preferable that the support member is integrally formed near a node of the first vibrator. A piezoelectric element can be used as the driving unit and the detecting unit. When the first vibrating body is formed of a piezoelectric body, electrodes may be used for the driving unit and the detecting unit.

By the action of the driving means, the first vibrating body is
Bending vibration occurs in a direction perpendicular to the main surface. When the first vibrator performs bending vibration, one and the other second vibrators perform vibration corresponding to the vibration direction of the first vibrator. In this case, one and the other of the second vibrators are arranged at both ends in the longitudinal direction of the first vibrator, and the third vibrator is arranged at a central portion in the longitudinal direction of the first vibrator. Therefore, the vibration direction of one and the other second vibrator accompanying the bending vibration of the first vibrator is opposite to the vibration direction of the third vibrator. In this state, when a rotational angular velocity having a rotation axis in the length direction of the first vibrator is applied, Coriolis forces in opposite directions are generated at both ends and the center in the length direction of the first vibrator. . Therefore, the first vibrating body is distorted due to torsion due to the reverse Coriolis force applied to the one and other second vibrating bodies and the third vibrating body. That is,
The first vibrator has torsional mode vibration (torsional vibration).
Occurs. The torsional distortion generated in the first vibrator is generated between one and the other second vibrator and the third vibrator in the longitudinal direction of the first vibrator. The detecting means detects distortion caused by the torsion of the first vibrator generated by the action of the Coriolis force. The detection means outputs a signal corresponding to the Coriolis force, that is, a signal corresponding to the rotational angular velocity. By measuring this output signal, the rotational angular velocity applied to the vibrating gyroscope can be obtained. When the first vibrator, one, the other second vibrator, and the third vibrator are integrally formed of a single plate-like member made of a material that generates mechanical vibration, the first vibrator , The second vibrating body and the third vibrating body can be easily manufactured. When the first vibrating body is supported by the support member, the support member may include the first vibrator.
In order to support the first vibrator near the node of the vibrator,
The first vibrating body can be supported without hindering the vibrations of the first vibrating body and the accompanying second and third vibrating bodies. For this reason, the vibration fluctuation due to the influence of the bending vibration of the first vibrating body is reduced, and a stable vibration characteristic with less noise signal is obtained.

The above and other objects, features and advantages of the present invention will become more apparent from the following detailed description of embodiments of the present invention with reference to the accompanying drawings.

[0010]

BEST MODE FOR CARRYING OUT THE INVENTION

FIG. 1 is a perspective view showing an example of a vibrating gyroscope according to the present invention. The vibrating gyroscope 10 includes a vibrator 12
Having. The vibrator 12 includes a first vibrator 14 having a rectangular plate shape.
including. The first vibrator 14 is made of nickel, iron, chromium,
It is formed of a constant elastic metal material such as titanium or an alloy thereof, an elinvar, an iron-nickel alloy, or a material generally generating mechanical vibration such as quartz, glass, quartz, or ceramic.

The first vibrating body 14 is formed with, for example, strip-shaped second vibrating bodies 16 and 18 at one end and the other end in the length direction, respectively. On the other hand, the other second vibrators 16 and 18 are formed to extend perpendicularly to the main surface of the first vibrator 14 from one end and the other end in the longitudinal direction of the first vibrator 14, respectively. Is done. Further, the first vibrating body 1
For example, a third vibrating body 20 having the same shape and the same size as the second vibrating bodies 16 and 18 is formed at one end in the width direction of 4 at the center in the length direction. The third vibrating body 20 is formed to extend vertically from one end of the first vibrating body 14 in the width direction. Third
The vibrating body 20 is provided to extend in the same direction as the second vibrating bodies 16 and 18. In the vibrator 12 of the vibrating gyroscope 10 according to the present embodiment, the second vibrators 16 and 18 and the third vibrator 20 each correspond to the first vibrator 14 in FIG.
Is provided to extend upward from the end of the upper surface of the. First vibrating body 14, second vibrating bodies 16, 18 and third vibrating body 20
Is generally integrally formed of a material that generates mechanical vibration.

In this embodiment, the first vibrating body 14, the second vibrating bodies 16 and 18, and the third vibrating body 20 have a predetermined shape made of, for example, a constant elastic metal material as shown in FIG. One plate-like member 14A (base material) is integrally formed by appropriately bending it. That is, in the plate-shaped member 14A, one and the other second vibrating bodies 16,
18 and a bent piece 16a serving as the third vibrating body 20,
18a and 20a are formed by a molding method such as pressing.
The second vibrators 16 and 18 and the third vibrator 20 are integrally formed by bending the plate member 14A so as to be perpendicular to the main surface.

The support members 22a, 22b and 22c, 2c are provided at one end and the other end in the width direction of the first vibrator 14, respectively, at predetermined intervals in the length direction.
2d is formed. The support members 22 a to 22 d are formed, for example, in the shape of an elongated rod with a rectangular cross section, and are provided so as to protrude outward from one end and the other end in the width direction of the first vibrating body 14 in parallel. The four support members 22 a to 22 d are formed integrally with the first vibrator 14.

In this case, the four support members 22a to 22d
Are arranged near the node axis when the first vibrating body 14 flexurally vibrates in its length direction. In this embodiment, the support members 22a, 22c and 22b, 22d are respectively
On the axis of the node axis extending in the width direction at one end and the other end in the length direction of the first vibrating body 14 (dashed line X in FIG. 1).
-X, Y-Y. ).

A driving piezoelectric element 24 is formed on the lower surface (the other main surface) of the first vibrating body 14 at the center in the longitudinal direction. The driving piezoelectric element 24 has a function as a driving unit for bending and vibrating the first vibrating body 14 in a direction orthogonal to the main surface thereof. This driving piezoelectric element 24
As shown in FIG. 3, a piezoelectric layer 26 such as a piezoelectric ceramic is included. Full-surface electrodes 28a and 28b are formed on one main surface and the other main surface of the piezoelectric layer 26, respectively. Then, one full-surface electrode 28b is fixed to the lower surface of the first vibrating body 14 by a method such as adhesion.

Further, the first vibrating body 14 is formed with two detecting piezoelectric elements 30 and 32 at predetermined intervals in the longitudinal direction of the upper surface (one main surface). The detecting piezoelectric elements 30 and 32 are respectively connected to the first vibrating body 14.
, The other one of the second vibrators 16 and 18
And the third vibrating body 20 and near the node axis. In this case, the detecting piezoelectric elements 30 and 32
Are formed near the inside of the axis of the node axes XX and YY of the first vibrating body 14, respectively. As shown in FIG. 3, the detection piezoelectric elements 30 and 32 include piezoelectric layers 34 and 34 made of ceramic or the like, respectively. Piezoelectric layer 34,
Each of the reference numerals 34 is polarized so that the polarization direction thereof is parallel to the support members 22a to 22d in FIG. That is, the detecting piezoelectric elements 30, 32
Each of the piezoelectric layers 34, 34 is polarized in its thickness direction, and its direction is, for example, from the front side to the rear side of the vibrating body 14 in FIG. In the piezoelectric layer 34,
On the one main surface, a full-surface electrode 36 is formed, and on the other main surface, divided electrodes 38a and 38b are formed. Then, the entire surface electrode 36 is fixed to the upper surface of the first vibrating body 14 by a method such as adhesion.

In the vibrating gyroscope 10 of the present embodiment, the first vibrating body 14 is supported by, for example, a substrate (not shown) or a housing (not shown) by the support members 22a to 22d. You. Then, in order to use the vibrating gyroscope 10, as shown in FIG.
4 and the detection piezoelectric elements 30 and 32 are connected to an oscillation circuit 40 and a detection circuit 42 via lead wires (not shown) and the like, respectively. That is, the oscillation circuit 40 includes the addition amplification circuit 44, the phase correction circuit 46, and the AC amplification circuit 48
And Split electrode 38a of one detecting piezoelectric element 30
And 38b are connected to two input terminals of the summing amplifier circuit 44, respectively. One output terminal of the addition amplification circuit 44 is connected to an input terminal of the phase correction circuit 46, and the other output terminal is connected to a synchronous detection circuit 56 of the detection circuit 42 described later. An output terminal of the phase correction circuit 46 is connected to an AC amplification circuit 48.
Is connected to the input terminal of The output terminal of the AC amplifier circuit 48
It is connected to the entire surface electrode 28 a of the driving piezoelectric element 24.

Therefore, the output signals from the divided electrodes 38a and 38b of the detecting piezoelectric element 30 are
And the level of the output signal is adjusted. And
The output signal from the addition amplification circuit 44 is
After the phase is corrected by the AC amplifier 48 and amplified to an appropriate level by the AC amplifying circuit 48, it is applied as a drive signal to the entire surface electrode 28a of the drive piezoelectric element 24.

The detection circuit 42 includes two differential amplifier circuits 50 and 52, an addition amplifier circuit 54, and a synchronous detection circuit 5
6, a smoothing circuit 58, and a DC amplifier circuit 60. The split electrodes 38a and 38b of one of the detecting piezoelectric elements 30
The split electrodes 38a, 38a of the other detecting piezoelectric element 32 are connected to two input terminals of one differential amplifier circuit 50, respectively.
8b is connected to two input terminals of the other differential amplifier circuit 52, respectively. On the other hand, the other differential amplifier circuits 50 and 52
Are connected to two input terminals of the addition amplification circuit 54, respectively. The output terminal of the addition amplification circuit 54 is connected to the synchronous detection circuit 5.
6 is connected to one input terminal. In addition, the synchronous detection circuit 5
6 is connected to the summing amplification circuit 44 of the oscillation circuit 40.
Is connected to the other output terminal of An output terminal of the synchronous detection circuit 56 is connected to an input terminal of the smoothing circuit 58. Smoothing circuit 5
The output terminal 8 is connected to the input terminal of the DC amplifier circuit 60.

Therefore, the output signals from divided electrodes 38a and 38b of one and other detection piezoelectric elements 30 and 32 are output from one and other differential amplifier circuits 50 and 5 respectively.
2, and by taking the difference between them, the detecting piezoelectric element 3
Only the Coriolis component is extracted from the overall change in the characteristics of 0,32. Then, the levels of the output signals (Coriolis signals) of the differential amplifier circuits 50 and 52 are adjusted by the addition amplifier circuit 54. In the addition amplification circuit 54, the Coriolis signal is doubled and other torsion signals are reduced. The output signal from the addition amplification circuit 54 has a small noise component.
Detection is performed in synchronization with the output signal of the addition amplification circuit 44 of the oscillation circuit 40. The detected signal is smoothed by a smoothing circuit 58, further amplified by a DC amplifier 56, and output from an output terminal of the DC amplifier 56.

The oscillation circuit 40 allows the driving piezoelectric element 2
When the drive signal is given to the first vibrator 4, the first vibrator 14 moves in the direction perpendicular to the surface on which the driving piezoelectric element 24 is formed, that is, the main surface of the first vibrator 14, as shown in FIG. Bending vibration. When the first vibrating body 14 bends and vibrates, the second vibrating bodies 16 and 18 and the third vibrating body 20 vibrate according to the bending vibration. In this case, the second vibrating body 1
Reference numerals 6 and 18 are arranged at one end and the other end of the first vibrator 14 in the longitudinal direction, and the third vibrator 20 is arranged at the center of the first vibrator 14. Therefore, the first vibrating body 14
Is warped upward as seen in FIGS. 5 and 6, for example, the second
The vibration directions of the vibrators 16 and 18 are downward, and the vibration direction of the third vibrator 20 is upward. That is, the second vibrating bodies 16 and 18 and the third vibrating body 20 have opposite directions of vibration.

In this state, as shown by ω in FIGS. 1 and 6, when the vibrating gyroscope 10 rotates about the central axis in the width direction extending in the longitudinal direction of the first vibrating body 14, the second vibration Coriolis forces F and -F act in a direction orthogonal to the vibration direction of the bodies 16 and 18. Coriolis force acts on the second vibrators 16 and 18 in a direction parallel to the main surface, and Coriolis force acts on the third vibrator 20 in a direction perpendicular to the main surface. In this case, since the Coriolis force in the opposite direction acts on the second vibrating bodies 16 and 18 and the third vibrating body 20, the main surface of the first vibrating body 14 has one end in the length direction thereof. , A torsional strain in the opposite direction is generated between the other end side and the center, and the first vibrating body 1
4 performs torsional vibration. With the torsional vibration of the first vibrating body 14, the divided electrodes 3 of the detecting piezoelectric elements 30 and 32
A signal corresponding to the torsional distortion is output to 8a and 38b. Since this amount of distortion corresponds to the Coriolis force, the divided electrodes 38a, 38a of the detecting piezoelectric elements 30, 32 are provided.
The output signal from 8b is a signal corresponding to the Coriolis force. Therefore, by measuring the output signal of the DC amplification circuit 56, the rotational angular velocity applied to the vibrating gyroscope 10 can be detected.

In the vibrating gyroscope 10 according to the present embodiment,
At one end, the other end, and the center in the length direction of the first vibrating body 14 having a rectangular plate shape, the second vibrating bodies 16 and 18 each having a plate shape perpendicular to the main surface of the first vibrating body 14 are provided. And the third vibrating body 20, the second vibrating bodies 16, 18 when a rotational angular velocity having a rotation axis in the longitudinal direction is applied to the center of the first vibrating body 14 in the width direction. The third vibrating body 20 and the third vibrating body 20 exert opposite Coriolis forces F and -F, so that the main surface of the first vibrating body 14 is easily twisted. Therefore, the detection sensitivity can be improved as compared with the conventional example having the H-shaped block-shaped vibrator as shown in FIG.

The vibrating gyroscope 10 according to the present embodiment
Since the support members 22a to 22d are formed near the node axis of the first vibrating body 14, the first vibrating body 14
The first vibrating body 14 can be supported without hindering the bending vibration. Therefore, the second vibrators 16 and 18 and the third vibrator 20 can perform stable vibration. Therefore, the vibrating gyroscope 10 according to the present embodiment
Has a small influence of vibration leakage and a stable vibration characteristic with a small noise signal.

The vibrating gyroscope 10 according to the present embodiment
Then, the first vibrating body 14, the second vibrating bodies 16, 18, the third vibrating body 20, and the four support members 22a to 22d are formed by pressing a metal plate made of a constant elastic metal material by pressing or the like. Since it is manufactured by the method, the structure is simple, mass production processing is easy, and the manufacturing cost can be reduced.

FIG. 7 is a perspective view showing another example of the vibrating gyroscope according to the present invention. Vibrating gyroscope 10 shown in FIG.
1 differs from the vibrating gyroscope 10 shown in FIG. 1 in the positions at which the second vibrators 16 and 18 are formed, the size of the third vibrator 20, the position at which the driving piezoelectric element 24 is formed, and the like. That is, in the vibrating gyroscope 10 shown in FIG.
The vibrators 16 and 18 are formed at one end in the width direction of the first vibrator 14 and at one end and the other end in the length direction. The main surfaces of the second vibrators 16 and 18 are arranged on the same side in parallel with the third vibrator 20. The driving piezoelectric element 24 is arranged on the upper surface of the first vibrating body 14, that is, on the same main surface as the detecting piezoelectric elements 30 and 32. In this case, the detection piezoelectric elements 30 and 32
Of the vibrating body 14 is disposed closer to the outside than the axis of the node axes XX and YY. Further, the third vibrating body 20 is formed larger than the second vibrating bodies 16 and 18. Note that the first vibrating body 14, the second vibrating bodies 16, 18 and the third vibrating body 20 are manufactured in the same manner as in the previous embodiment. That is, as shown in FIG. 8, one plate-like member 14A (base material) of a predetermined shape made of, for example, a constant elastic metal material
Is formed integrally by bending appropriately.

In the vibrating gyroscope 10 of this embodiment, when a driving signal is given to the driving piezoelectric element 24, the first vibrating body 14 vibrates as shown in FIG. Accordingly, the second vibrators 16 and 18 and the third vibrator
Vibrating body 20 also vibrates. Then, as shown by ω in FIGS. 7 and 10, when the vibrating gyroscope 10 rotates, Coriolis forces in directions opposite to the vibration directions of the second vibrating bodies 16, 18 and the third vibrating body 20 respectively. Works.
In the embodiment shown in FIGS. 7 and 10, etc., the second vibrators 16 and 18 are arranged on the same side as the third vibrator 20 as compared with the vibrating gyroscope 10 shown in FIGS. The main surfaces of the second vibrators 16 and 18 are located in a direction orthogonal to the direction in which the Coriolis force acts, so that the action of the Coriolis force can be sufficiently received similarly to the third vibrator 20.
Further, the third vibrating body 20 includes the second vibrating bodies 16 and 18.
Since the main surface is formed larger than the main surface, the vibrator 12 of the vibrating gyroscope 10 is more easily affected by Coriolis force. Therefore, in the vibrating gyroscope 10 shown in FIGS. 7, 10 and the like, the torsional vibration of the first vibrating body 14 generated by the action of the Coriolis force is reduced by the vibration gyroscope 10 of the previous embodiment shown in FIGS. Can be increased, and the detection sensitivity can be further increased.

In each of the above embodiments, the driving piezoelectric element 24 and the detecting piezoelectric elements 28 and 30 are formed on the main surfaces of the first vibrating body 14 and the second vibrating bodies 16 and 18, respectively. However, in the vibrating gyroscope according to the present invention, the first vibrating body 14 and the second vibrating bodies 16 and 18 may be formed of piezoelectric bodies. In that case, the first vibrating body 14 and the second vibrating body Electrodes may be formed on the electrodes 16 and 18 instead of the piezoelectric elements.

[0029]

According to the present invention, it is possible to obtain a vibrating gyroscope which has a simple vibrator and a vibrator supporting structure, is suitable for mass production processing, has stable vibration characteristics, and can improve detection sensitivity.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an example of a vibrating gyroscope according to the present invention.

FIG. 2 is an illustrative view showing one example of a method of manufacturing a vibrating body of the vibrating gyroscope of FIG. 1, wherein (A) is an illustrative view showing a base material to be each vibrating body, and (B) is a predetermined view of a base material; FIG. 4 is an illustrative view showing a state where a part is bent.

3 is a partially omitted side view schematically showing a driving piezoelectric element and a detecting piezoelectric element disposed on one main surface and the other main surface of a first vibrating body of the vibrating gyroscope of FIG. 1;

FIG. 4 is a block diagram showing a circuit for using the vibrating gyroscope of FIG. 1;

FIG. 5 is an explanatory diagram showing the movement of the vibrator of the vibrating gyroscope of FIG. 1 during non-rotation.

FIG. 6 is an explanatory view showing the movement of the vibrator of the vibrating gyroscope of FIG. 1 during rotation.

FIG. 7 is a perspective view showing another example of the vibrating gyroscope according to the present invention.

FIG. 8 is an illustrative view showing one example of a method of manufacturing a vibrating body of the vibrating gyroscope of FIG. 7, wherein (A) is an illustrative view showing a base material to be each vibrating body, and (B) is a predetermined view of the base material; FIG. 4 is an illustrative view showing a state where a part is bent.

FIG. 9 is an explanatory diagram showing the movement of the vibrator of the vibrating gyroscope of FIG. 7 during non-rotation.

FIG. 10 is an explanatory diagram showing the movement of the vibrator of the vibrating gyroscope of FIG. 7 during rotation.

FIG. 11 is a perspective view showing an example of a conventional vibrating gyroscope.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Vibration gyroscope 12 Vibrator 14 1st vibrating body 14A Plate member 16, 18 2nd vibrating body 16a, 18a, 20a Bending piece 20 3rd vibrating body 22a-22d Supporting member 24 Driving piezoelectric element 26, 34 Piezoelectric layers 28a, 28b, 36 Full-surface electrodes 30, 32 Piezoelectric elements for detection 38a, 38b Split electrodes 40 Oscillation circuits 42 Detection circuits 44, 54 Addition amplification circuits 46 Phase correction circuits 48 AC amplification circuits 50, 52 Differential amplification circuits 56 Synchronization Detection circuit 58 Smoothing circuit 60 DC amplification circuit

Claims (6)

[Claims] 1. A first vibrating body having a plate shape, disposed at one end and the other end of the first vibrating body in a longitudinal direction, and formed perpendicular to a main surface of the first vibrating body. The plate-shaped second vibrator and the first vibrator are disposed at one end in the width direction and at the center in the length direction, and are formed perpendicular to the main surface of the first vibrator. A vibrating gyroscope comprising a vibrator including a plate-shaped third vibrating body. 2. A driving means disposed on a main surface of the first vibrating body for bending and vibrating the first vibrating body in a direction perpendicular to the main surface, and one and the other of the second vibrating body.
The first vibrator positioned between the vibrator and the third vibrator
Coriolis force acting on the second vibrating body and the third vibrating body when a rotational angular velocity having a rotation axis in the longitudinal direction of the first vibrating body is applied to the main surface of the vibrating body The vibrating gyroscope according to claim 1, further comprising a detecting unit configured to detect a signal corresponding to an amount of distortion of the first vibrating body caused by the vibration. 3. The method according to claim 1, wherein the first vibrating body, the second vibrating body, and the third vibrating body are integrally formed of a material that generates mechanical vibration. The vibrating gyro described. 4. The vibrating gyroscope according to claim 3, wherein the first vibrating body, the second vibrating body, and the third vibrating body are integrally formed by a single plate-shaped member. 5. The apparatus according to claim 1, further comprising: a support member that supports the first vibrating body near a node of the first vibrating body.
A vibrating gyroscope according to claim 4. 6. The vibrating gyroscope according to claim 5, wherein the supporting member is formed integrally with the first vibrating body.