JPH11322281A - Conveying device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a ceiling mounting type conveying device which requires no dynamic contact such as a slip ring, prevents dust generation from a power feeding unit, and can be used in a factory demanding high air cleanness such as a clean room. SOLUTION: A winding drum 19 is provided with a main drum part 19a with a large winding diameter and a sub-drum part 19b with a small winding diameter, and a rotary shaft 20 for them is connected to a motor 29 coaxially. A winding drum 19 is supported in a guide rail 33 slidably. Over the main drum part 19a and the sub-drum part 19b, a spiral groove 34 is formed, and a wire 17 is continuously wound in the groove 34. An unwinding end T1 of the wire 17 on the main drum part 19a side is fixed to a chuck 25, while a winding end T2 of the wire 17 on the sub-drum part 19b side is fixed on the upper side.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transfer apparatus, particularly a ceiling-mounted transfer apparatus used in a clean room of a factory.

[0002]

2. Description of the Related Art Some transfer devices used in factories and the like include:
For example, there is a structure shown in FIGS. This transport device has a rail 1 disposed above a work space of a factory or a warehouse, for example, along a transport route near a ceiling, and a traveling device 2 which is moved on the rail 1 via a drive motor (not shown). It is.

[0005] The traveling device 2 is provided with a winding device 3, and the winding device 3 is provided with four winding drums 4 rotatably via a driving device (not shown). A spiral groove 5 is provided on the peripheral wall of each winding drum 4, and a wire 6 guided by the groove 5 is mounted on each groove 5 so as to be wound. A chuck 8 that holds and releases the work 7 is suspended from the unwinding end of the wire 6 suspended from the winding drum 4. In addition, as shown in FIG.
Is wound between guide plates 10 and a winding drum 11 is used.

The chuck 8 is provided with electric parts such as an opening / closing motor and a grip sensor. To supply power to these electric parts, the wires 6 and the belt 9 or a separately provided conductive part are required. It is necessary to connect these components to a power supply via the winding drums 4 and 11 using wires. However, the winding drum 4,
Since the conductive wire is twisted because it is a rotating member because it is a rotating member, a slip ring 12 is usually provided on the winding drums 4 and 11 as shown in FIGS. The conductive line 12a is connected to a power supply via the. Therefore, the winding drums 4 and 11 are rotated via the driving device, and the wire 6 and the belt 9 are wound while being guided by the grooves 5 and the guide plate 10 of the winding drums 4 and 11, thereby forming the work 7 The chuck 8 is opened and closed by supplying power through the conductive wire 12 a and the slip ring 12 to hold and open the work 7, and the work 7 is transported to a predetermined work stage by the traveling device 2. (This similar structure is disclosed in, for example, Japanese Patent Application Laid-Open No. 8-295484).

[0005]

In such a conventional transfer apparatus, the installation position is above the work space, so that the space for the work can be saved and the work stage is not adversely affected. Although it is advantageous, there is a problem that it is difficult to use it in a production environment (a production environment such as a semiconductor manufacturing plant) where dust is disliked, such as a clean room.

More specifically, the case where the wire 6 itself is a conductive wire in the winding drum 4 will be described as an example. The winding end (not shown) of the wire 6 of the rotating winding drum 4 and the slip ring 12 Is a dynamic contact point, and inevitably generates a spark at this contact point, which may become oxidized spark dust and fall down to lower the product quality.

In order to prevent the spark dust from scattering around, it is conceivable to cover the entire winding device 3 with a case. However, as shown in FIGS. It is necessary to provide a long hole 13 through which the dust is inserted, so that scattering of dust from the long hole 13 is inevitable.

Therefore, the present invention does not require a dynamic contact such as a slip ring, eliminates dust generation from a power supply portion, and can be used in a factory or the like where a high air cleanliness is required such as a clean room. It is intended to provide a mold conveying device.

[0009]

According to the first aspect of the present invention,
A traveling device that moves along a track, a winding device that is supported by the traveling device, and on which the string-like member is wound; and a horizontally and coaxially provided on the winding device, where the string-like member is continuously arranged. A plurality of take-up drums wound around the take-up drum, the take-up drum is supported movably up and down with respect to the traveling device, and one end of the cord-shaped member is connected to the traveling device, and The end is connected to the work holding means, and the diameters of the plurality of winding drums are different from each other.

According to a second aspect of the present invention, there is provided a traveling device which moves along a track, a winding device which is supported by the traveling device and on which a cord-like member is wound, and which is horizontally and coaxially mounted on the winding device. A plurality of take-up drums that are provided and are continuously wound around the string-like member. The take-up drum is supported so as to be vertically movable with respect to the traveling device, and one end of the string-like member is provided. Is connected to the traveling device, the other end is connected to the work holding means, and the string-shaped member is wound around one and the other of the winding drums in different winding directions.

According to a third aspect of the present invention, the winding drum is provided at the other end of the string-shaped member, and is provided at one end of the string-shaped member and has a smaller diameter than the main drum. A groove for winding the string-shaped member in a predetermined direction is formed on the outer periphery of these winding drums, and a spiral groove on the main drum portion side for guiding the string-shaped member is provided. The spiral grooves on the side of the sub-drum are formed in the same direction.

According to a fourth aspect of the present invention, the winding drum is provided at the other end of the string-shaped member, and is provided at one end of the string-shaped member, and has a smaller diameter than the main drum. A groove for winding the string-like member in a predetermined direction is formed on the outer periphery of these winding drums, and a spiral groove on the main drum portion side and a spiral groove on the sub drum portion side are provided. The grooves are formed in opposite directions.

According to the invention described in claim 1, when the winding drum is rotated by the driving device, the rotation of the winding drum causes the entire winding device to move up and down, and the work holding means also moves up and down. . Accordingly, when the winding directions are different from each other, the work is lifted or lowered due to a difference in winding or unwinding amount corresponding to a difference in drum diameter.

According to the second aspect of the present invention, the string-like member is wound or unwound on the two winding drums with the rotation of the winding drum. And the winding device itself rises,
Conversely, with the lowering of the work holding device, the winding device itself also lowers.

According to the third aspect of the present invention, since the groove is formed in the winding drum, the string-shaped member can be smoothly wound or unwound along the groove. Further, since the fishing is performed only in accordance with the difference in the diameter of the winding drum, the torque required for the driving device of the winding drum can be reduced.

According to the fourth aspect of the present invention, the string-like member can be smoothly wound or unwound along the groove of the winding drum. Further, since the winding drum on one end side of the string-shaped member has a small diameter, the amount of lifting and lowering of the device itself due to the rotation of the winding drum is reduced, and therefore, the guide required for guiding the winding drum is required. Rails and the like can be minimized.

[0017]

Embodiments of the present invention will be described below with reference to the drawings. In FIG. 5, reference numeral 14 denotes a transfer device. The transfer device 14 includes a traveling device 16 that moves along a channel-shaped rail 15 as a track disposed near a ceiling in a clean room such as a semiconductor manufacturing factory.
Various modes such as a roller driving device and a linear induction motor can be adopted as the driving type of the traveling device 16.
A winding device 18 for a wire 17 as a cord-like member is attached to the traveling device 16. Winding device 1
In FIG. 8, four take-up drums 19 are arranged with their rotating shafts 20 horizontal. Then, the wire 17 is unwound from each winding drum 19, and this wire 1
7 is suspended from a long hole 23 formed in a bottom plate 22 of a case 21 of a winding device 18, and a chuck 25 as a work holding unit for holding and opening a work 24 is hung at the unwinding end T <b> 1 of the wire 17. ing.

Next, the winding drum 19 will be described. As shown in FIGS. 1 and 2, the take-up drum 19 includes a main drum portion 19a having a large take-up diameter and arranged coaxially.
And a sub-drum 19b having a small winding diameter. These main drum section 19a and sub drum section 1
The end of the rotation shaft 20 of the 9b on the side of the main drum 19a is
The support bracket 27 is rotatably supported by a support bracket 27 via a bearing 26a, and the end of the rotary shaft 20 on the sub-drum portion 19b side is rotatably supported by the support bracket 28 via a bearing 26b. Further, the main drum unit 1 of the rotating shaft 20
The end on the 9a side penetrates the support bracket 27 and is connected via a joint 30 to a motor 29 as a driving device.

The motor 29 is provided with a bracket 31, and the bracket 31 and the support bracket 2 are provided.
7 and the support bracket 28, the slider 32
And guide rails 33, 3 arranged vertically in the case 21 of the winding device 18.
3 and 33 are slidably supported. Here, the slider 3 of the bracket 31 and the support bracket 27 is used.
The guide rails 33 on which the guide rails 2 and 32 are supported are arranged with their sliding surfaces facing each other. Accordingly, the winding drum 19 is supported integrally with the motor 29 so as to be able to move up and down along the guide rails 33, 33, 33.

The winding drum 19 constructed as described above
A spiral groove 34 is formed on the outer peripheral surface of the main drum portion 19a, that is, over the main drum portion 19a and the sub drum portion 19b. Then, while being guided by the groove 34, one wire 17 is moved from the main drum portion 19a to the sub drum portion 19b.
The winding end T1 of the wire 17 on the side of the main drum portion 19a is suspended from the long hole 23 of the bottom plate 22 of the case 21 of the winding device 18 and fixed to the chuck 25, and the sub-drum is wound. The winding end T2 of the wire 17 on the side of the portion 19b is the case 2
1 is fixed to the upper wall 35 as the upper part. here,
At a transition portion between the main drum portion 19a and the sub drum portion 19b, the wire 17 is fixed by a not-shown stopper, and the main drum portion 19a is connected to the sub drum portion 19b.
The wire 17 is not loosened at the portion passing through.

The wire 17 functions as it is as a conductive wire. A power source V is electrically connected to the winding end T2 of the wire 17, and the unwinding end T
A motor 1 for opening and closing the chuck 25, a grip sensor (both not shown), and the like are electrically connected to 1.

According to the above embodiment, when the work 24 is lifted, the winding drum 1 is driven by the motor 29.
9 rotates, and the main drum portion 19 of the winding drum 19 rotates.
When the unwinding end T1 side of the wire 17 is wound into the groove 34 of FIG.
The take-up end T2 side is unwound. Therefore, the chuck 25 is attached to the take-up drum 19 by the difference between the take-up length of the wire 17 on the main drum portion 19a side and the take-up length of the wire 17 on the sub drum portion 19b side. To rise. At this time, since the winding end T2 side of the wire 17 is unwound from the sub drum portion 19b side of the winding drum 19, the winding drum 19 itself descends. Therefore, the work 24 is raised by the winding drum 19 that winds the wire 17 while descending (shown in FIG. 4).

Conversely, when lowering the work 24,
When the winding drum 19 is rotated by the motor 29 and the winding end T1 side of the wire 17 is unwound from the groove 34 of the main drum portion 19a of the winding drum 19, the winding of the wire 17 into the groove 34 is performed at the sub-drum portion 19b. End T2
Therefore, the chuck 2 is wound by the difference between the unwinding length of the wire 17 on the main drum portion 19a and the winding length of the wire 17 on the sub-drum portion 19b.
5 descends relative to the take-up drum 19. At this time,
Since the winding end T2 side of the wire 17 is wound around the sub-drum portion 19b of the winding drum 19, the winding drum 19 itself rises. Therefore, the work 24 is
It is lowered by the winding drum 19 that unwinds the wire 17 while rising (shown in FIG. 3).

Here, since the winding drum 19 smoothly moves up and down along the guide rail 33 via the slider 32, there is no adverse effect on the movement of the work 24.

While the winding drum 19 is moving up and down, the wire 17 is connected to the unwinding end T1 of the main drum 19a of the winding drum 19 and to the winding end T2 of the sub-drum 19b. Take-up,
Although the wire 17 is unwound, no twisting force acts on the wire 17 due to the winding drum 19 functioning as a moving pulley. Therefore, the power supply from the power source V to the chuck 25 is performed without any trouble, and dust is not generated due to spark as in the case of using a slip ring. Therefore, it is possible to prevent the product quality from being lowered due to the drop of the generated dust. Although a slip ring is not used, a guide rail 33 for slidably guiding the take-up drum 19 is required. The sliding speed between the guide rail 33 and the slider 32 is different from that in the case where a slip ring is used. Since the sliding speed is extremely lower than the sliding speed at the contact point of the slip ring, no dust is generated therefrom.

The winding drum 19 is composed of a main drum portion 19a having a large diameter and a sub drum portion 19 having a small diameter.
b, by appropriately setting the difference in diameter between the two, the lifting stroke of the winding drum 19 as well as the lifting stroke of the work 24 can be adjusted. Even if there is a restriction on the space in the vertical direction or a restriction on the elevating stroke of the work 24, a high degree of design freedom can be obtained to cope with this.

The present invention is not limited to the above-described embodiment. For example, the groove 3 provided on the winding drum 19
4 is formed by the main drum portion 19a and the sub-drum portion 19b in opposite directions. When the work 24 rises, the take-up drum 19 also rises, and when the work 24 descends, the take-up drum 19 also descends. The lifting stroke of the take-up drum 19 may be suppressed by the sub-drum portion 19b having a smaller diameter than the main drum portion 19a, while the work 24 is raised and lowered well.
When the grooves 34 provided on the winding drum 19 are formed in the main drum portion 19a and the sub drum portion 19b in the opposite directions, the main drum portion 19a and the sub drum portion 19b should not have a difference in diameter. Even work 2
4 can be raised and lowered without any trouble as in the above-described embodiment.

The combination of the outer diameter of the main drum and the sub-drum and the setting of the winding direction are not limited to the above embodiment. The following is a summary of these combinations and the effects based on them. That is, assuming that the diameter of the main drum is D, the diameter of the sub-drum is d, and the number of revolutions of the drum is n, when the winding directions are different from each other, the elevation amount is nπ (D +
d), and there is an effect that the guide rail becomes shorter as d becomes smaller. If the winding directions are equal, D
= D, and the lifting amount is nπ (D−d).

[0029]

According to the invention described in claim 1, when the winding drum is rotated by the driving device, the rotation of the winding drum raises and lowers the entire winding device, and the work holding means is also provided. Go up and down. Accordingly, when the winding direction is the same, the work is lifted or lowered due to a difference in winding or unwinding amount corresponding to a difference in drum diameter. On the other hand, when the winding directions are different, the cord-like member can be wound up and unwound to raise and lower the work without twisting. In addition, it becomes possible to use the string-shaped member as a conductive wire for power supply, which eliminates the possibility of dust generation at the contact as in the case of using a dynamic contact such as a slip ring, thereby improving product quality. There is an effect that can be. As a result, there is an effect that it can be used in a semiconductor manufacturing factory or the like where high air cleanliness is required, such as a clean room. According to the invention described in claim 2, the string-shaped member is wound or unwound onto the two winding drums as the winding drum rotates, so that the winding is performed as the work holding means rises. The device itself also rises, and conversely, the winding device itself descends as the work holding device descends, so that a predetermined amount of elevation can be obtained with a minimum number of rotations. In addition, since the amount of lifting and lowering of the winding drum can be reduced, the cost of equipment such as rails for guiding the winding drum can be reduced to a minimum. According to the third aspect of the present invention, the groove is formed in the winding drum, so that the string-shaped member can be smoothly wound or unwound along the groove. Since the fishing is performed only in accordance with the difference in the diameter of the winding drum at one end of the shaped member, the torque required for the driving device of the winding drum can be reduced. According to the invention described in claim 4, since the winding drum is formed with the groove, it is possible to smoothly wind or unwind the string-like member along the groove. Since the take-up drum at one end of the shaped member has a small diameter, the amount of elevation of the device itself due to the rotation of the take-up drum is reduced, and therefore, a guide rail or the like required to guide the take-up drum is required. Can be minimized.

[Brief description of the drawings]

FIG. 1 is a front view of an embodiment of the present invention.

FIG. 2 is a plan view of the same.

FIG. 3 is an explanatory diagram of the embodiment of the present invention at a work lowering position.

FIG. 4 is an explanatory view at the work lifting position.

FIG. 5 is an overall schematic perspective view of an embodiment of the present invention.

FIG. 6 is an overall schematic perspective view of a conventional technique.

FIG. 7 is a perspective view of the main part.

FIG. 8 is another perspective view of the main part of the prior art.

[Explanation of symbols]

 Reference Signs List 14 transport device 15 rail (track) 16 traveling device 17 wire (string-like member) 18 winding device 19 winding drum 19a main drum portion 19b sub-drum portion 20 rotation shaft 21 case 24 work 25 chuck (work holding portion) 29 motor (Drive device) 33 Guide rail 34 Groove 35 Upper wall (upper) T1 Unwinding end T2 Rewinding end

Claims (4)

[Claims] 1. A traveling device that moves along a track, a winding device that is supported by the traveling device and that winds a cord-like member, and a cord that is provided horizontally and coaxially with the winding device. A plurality of winding drums around which the winding member is continuously wound, wherein the winding drum is supported so as to be vertically movable with respect to the traveling device, and one end of the string-shaped member is connected to the traveling device. And a second end connected to the work holding means, wherein the plurality of winding drums have different diameters. 2. A traveling device that moves along a track, a winding device that is supported by the traveling device, and on which a string-like member is wound, and a string that is provided horizontally and coaxially with the winding device. A plurality of winding drums around which the winding member is continuously wound, wherein the winding drum is supported so as to be vertically movable with respect to the traveling device, and one end of the string-shaped member is connected to the traveling device. And a second end connected to the work holding means, wherein the string-shaped member is wound in different winding directions on one and the other of the winding drum. 3. The winding drum includes a main drum portion provided on the other end side of the string-shaped member, and a sub-drum portion smaller in diameter than the main drum portion provided on one end side of the string-shaped member, On the outer periphery of these winding drums, grooves for winding the string-shaped member in a predetermined direction are formed,
The conveying device according to claim 1, wherein the spiral groove on the main drum portion side and the spiral groove on the sub drum portion side for guiding the string-shaped member are formed in the same direction. 4. The winding drum includes a main drum portion provided at the other end of the string-shaped member, and a sub-drum portion provided at one end of the string-shaped member and having a smaller diameter than the main drum portion. , On the outer periphery of these winding drums,
A groove for winding the string-shaped member in a predetermined direction is formed, and a spiral groove on the main drum portion side and a spiral groove on the sub drum portion side are formed in opposite directions. The transport device according to claim 2.