JPH1130523A - Method for manufacturing vibrator for detecting angular velocity - Google Patents

Abstract

PROBLEM TO BE SOLVED: To manufacture a vibrator for detecting angular velocity that consists of a piezoelectric body in the shape of a tuning fork or in a shape where a plurality of tuning forks are composited so that the orientation direction of the piezoelectric bodies is uniform and stable detection characteristics can be obtained constantly. SOLUTION: For example, a drive electrode, a monitor electrode, and an electrode for polarization are provided on the surface of a vibrator 2 in the shape of a tuning fork consisting of a piezoelectric body, and a detection electrode is provided on a side surface (Y1, Y2). When a vibrator for detecting angular velocity with an electrode being common to each electrode is to be manufactured, first, an electrode is formed on the surface of X1 and X2 in a first process, a polarization voltage is applied between electrodes being formed on the surface of X1 and X2 for polarizing the piezoelectric body, and then an electrode is formed on the surface of Y1 and Y2 in a third process. As a result, the piezoelectric body can be uniformly polarized without being affected by the electrode of the surface of Y1 and Y2 on polarization treatment, thus improving the detection accuracy of the angular velocity. Also, when the electrode is to be formed in the third process, a low-temperature curing type conductive resin is used to prevent polarization characteristics from being affected.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing an oscillator for detecting an angular velocity, which is used for vehicle control of an automobile, navigation, and prevention of camera shake of a video camera.

[0002]

2. Description of the Related Art Conventionally, for example, Japanese Unexamined Patent Application Publication No.
As disclosed in Japanese Patent Laid-Open Publication No. 0-101, there is provided a vibrator made of a piezoelectric material formed in a tuning fork shape by a pair of arms and a connecting part connecting the arms, and driving the vibrator in the arrangement direction of the arms. 2. Description of the Related Art There is known an angular velocity sensor that detects a Coriolis force applied to a vibrator when an angular velocity is input from a change state of vibration of the vibrator in a detection axis direction orthogonal to a drive shaft while constantly vibrating in an axial direction.

In this type of angular velocity sensor, the outer wall surface of a piezoelectric body formed in a tuning fork shape is driven (excited).
A vibrator can be manufactured simply by forming an electrode for vibration or vibration detection. Compared to the conventional type of angular velocity sensor that is generally used in the past, the vibrator is made of metal and a piezoelectric body is bonded to its surface. Therefore, there is an advantage that the number of parts is small and the structure and, consequently, the manufacturing process are simple.

[0004]

By the way, when the angular velocity is detected by using the vibrator made of the piezoelectric material as described above,
In order for the vibrator to function as an angular velocity detector, a process called a polarization process, in which a high voltage is applied to the piezoelectric body to activate it piezoelectrically, is required.

In view of the above, conventionally, the detection of angular velocity has been conventionally performed by a drive electrode for receiving an AC voltage to vibrate (excit) the piezoelectric body in the drive axis direction or a detection electrode for detecting vibration of each arm in the detection axis direction. After forming all necessary electrodes on the piezoelectric body,
By applying a high voltage between the formed electrodes, the piezoelectric body is polarized. The formation of each electrode on the piezoelectric body is generally performed in such a procedure that a metal paste containing a conductive metal such as silver as a main component is applied to the piezoelectric body in accordance with the shape of the electrode and baked. .

However, in a conventional vibrator made of a tuning fork-shaped piezoelectric body as described above, a driving electrode or a polarizing electrode is formed on the surface of the piezoelectric body having a concave shape in the piezoelectric body, and each arm portion has A detection electrode is formed on the side surface and at a position corresponding to the polarization electrode on the front surface, a common electrode for each electrode is formed on the back surface of the piezoelectric body, and the electrodes formed on the front and back surfaces of the piezoelectric body during polarization processing The piezoelectric body is polarized from the front surface to the back surface or in the opposite direction by applying a polarization voltage during the period.

As a result, in the conventional vibrator, during the polarization process, the orientation direction of the piezoelectric body cannot be made uniform due to the influence of the detection electrodes formed on the side surfaces of each arm. There is a problem that the internal stress remains in the piezoelectric body and the piezoelectric characteristics change with time. If the internal stress remains in the piezoelectric body, the vibration characteristics of the vibrator will vary, and the angular velocity cannot be detected stably. Change, and the reliability is reduced.

SUMMARY OF THE INVENTION The present invention has been made in view of such a problem. In manufacturing an angular velocity detecting vibrator made of a piezoelectric material having a tuning fork shape or a shape obtained by combining a plurality of tuning forks, the orientation direction of the piezoelectric material is uniform. It is another object of the present invention to manufacture an angular velocity detecting vibrator capable of always obtaining stable detection characteristics.

[0009]

According to a first aspect of the present invention, there is provided a method of the present invention, comprising at least a pair of arms arranged substantially parallel to each other and a connecting portion connecting the arms. In manufacturing an angular velocity detecting vibrator made of a piezoelectric material formed into a tuning fork shape or a shape obtained by combining a plurality of tuning forks, first, a piezoelectric material
An electrode for detecting an angular velocity to be disposed on the front and back surfaces is formed on the back surface (first step). Then, by applying a voltage for polarization between the electrodes formed on the front and back surfaces of the piezoelectric body in the first step, the piezoelectric body is polarized in a direction substantially orthogonal to the front and back surfaces (second step). ), Then on the side of the piezoelectric,
An electrode for detecting angular velocity to be arranged on this side is formed (third step).

As described above, according to the present invention, before the detection electrodes are formed on the side surfaces of the respective arm portions, the polarization processing of the piezoelectric body is performed. Therefore, the polarization processing is not affected by the detection electrodes. The piezoelectric body can be polarized, and the orientation direction of the piezoelectric body can be made uniform. Therefore, according to the present invention, the internal stress remains in the piezoelectric body due to the polarization treatment, the vibration characteristics of the vibrator vary, and the detection accuracy of the angular velocity decreases, or due to the temporal change in the piezoelectric characteristics of the piezoelectric body, It is possible to prevent a problem that the detection characteristic of the angular velocity also changes with time and the reliability is reduced. Therefore, according to the present invention, it is possible to realize an angular velocity sensor capable of detecting angular velocity with high accuracy and obtaining high reliability.

A method according to a second aspect of the present invention uses the manufacturing method according to the first aspect to detect an angular velocity formed in a tuning fork shape by a pair of arms and a connecting portion connecting the pair of arms. This is a method of manufacturing a vibrator. In the first step of forming electrodes on the front and back surfaces of a piezoelectric body, a driving electrode and a polarizing electrode are formed on the front surface of the piezoelectric body, and a common electrode is formed on the back surface of the piezoelectric body. . In the second step, the piezoelectric body is polarized by applying a voltage for polarization between the common electrode on the back surface of the piezoelectric body and each electrode on the front surface of the piezoelectric body, and the electrodes are placed on the side surfaces of the piezoelectric body. In the third step of forming, a detection electrode is formed on the side surface of each arm portion of the piezoelectric body after the polarization process and at a position corresponding to the polarization electrode.

In a tuning-fork vibrator manufactured by the method of the present invention, for example, a common electrode formed on the back surface is grounded to a reference potential, and a drive electrode formed on the front surface is driven by an alternating current that changes around the reference potential. When a voltage is applied, it is possible to vibrate in the drive axis direction. When an angular velocity around an axis substantially parallel to each arm is input in a state where the vibrator is vibrated in the drive axis direction, each arm vibrates in the detection axis direction according to the input angular velocity. The vibration can be detected from a change in current flowing between the detection electrode and the common electrode formed on the side surface of each arm. Therefore, by detecting this current through the detection electrode, the input angular velocity around the axis can be detected.

Also, in the method of the present invention, since the polarization treatment of the piezoelectric body is performed before the detection electrode is formed on the side surface of each arm portion, the same effect as that of the first aspect can be obtained. . Here, in the manufacturing method according to the second aspect, when the electrodes are formed on the surface of the piezoelectric body in the first step, not only the drive electrodes and the electrodes for polarization but also each On the surface of the arm portion, a monitor electrode for monitoring the vibration state of each arm portion in the drive axis direction is formed, and in a second step of performing a polarization process, a polarization voltage is also applied between the monitor electrode and the common electrode. Then, polarization between these electrodes may be performed.

According to the vibrator thus manufactured, when the vibrator is vibrated by applying an AC voltage to the drive electrode for detecting the angular velocity, the vibration state is detected via the monitor electrode. By controlling the AC voltage applied to the drive electrode in accordance with the detection result, the vibration state of the vibrator in the drive axis direction can be kept constant, and the detection accuracy of the angular velocity can be improved.

Further, in the manufacturing method according to the second aspect, when the electrode is formed on the surface of the piezoelectric body in the first step,
As described in claim 4, in addition to the electrodes, a pad electrode for extracting a detection signal is formed on each arm, and a third electrode is formed on a side surface of each arm. In addition, an extraction electrode for connecting the detection electrode and the pad electrode may be formed.

According to the vibrator thus manufactured, a signal line for applying a drive voltage, a signal line for extracting a detection signal, and a signal line for extracting a monitor signal when a monitor electrode is provided. Can be connected to each electrode formed on the surface of the vibrator, wiring can be performed easily, and variation in vibration occurring between each arm part can be suppressed to detect angular velocity well. It becomes possible to do.

That is, in the case of a tuning-fork-shaped vibrator, if the length, shape, and the like of the signal line connected to each arm vary among the arms, the vibration characteristics vary among the arms, and the tuning-fork-shaped vibration is generated. Desired vibration characteristics as a child cannot be obtained. If the vibration characteristics vary between the arms, the arms vibrate in the detection axis direction even when the angular velocity is not input, and this unnecessary vibration is included in the detection signal. Therefore, when detecting the angular velocity, it is necessary to remove the offset caused by the unnecessary vibration from the detection signal. In addition, since the unnecessary vibration changes depending on the temperature, it is difficult to reliably remove the offset caused by the unnecessary vibration from the detection signal at each speed detection, and the detection signal includes an offset temperature drift. Will be. Therefore, to reduce this offset temperature drift,
It is preferable that the signal lines are connected symmetrically without variation.However, if a signal line for extracting a detection signal is directly connected to a detection electrode formed on the side surface of each arm, the signal line is connected. It is difficult to connect the left and right arms without variation.

However, according to the manufacturing method of the fourth aspect, the pad electrode for extracting a detection signal from the detection electrode formed on the side surface of each arm portion is formed on the surface side of the vibrator. According to the vibrator manufactured by the method,
Each signal line for driving voltage application, detection signal extraction, and monitor signal extraction can be connected to each electrode formed on the surface side of the vibrator, and these signal lines vary among the arms. Can be easily arranged.
If connection of each signal line is performed by wire bonding, variations in length and shape of each signal line connected to each arm can be eliminated, and more stable detection characteristics can be obtained. Will be.

Further, as described above, when the pad electrode for extracting the detection signal is formed on the surface of each arm portion, a fifth aspect of the present invention is provided.
A pad electrode may be formed on the surface of each arm on the tip end side of the arm with respect to the electrode for polarization on the surface of each arm. You may make it form a pad electrode on the connection part side rather than the electrode for use.

When the pad electrode is formed closer to the distal end of the arm portion than the electrode for polarization, the distance between the drive electrode and the pad electrode can be increased, so that the pad electrode enters the pad electrode from the drive electrode side. Electrical noise can be reduced,
The S / N (signal to noise ratio) of the detection signal can be improved.

Conversely, when the pad electrode is formed closer to the connecting portion than the polarizing electrode, the detection signal can be extracted from a portion where the amplitude of vibration of the arm portion in the drive axis direction is small. Compared with the case where the pad electrode is formed on the tip side of the arm portion, the strength of the signal line to be connected is not required,
The signal line can be made thin. Further, since the detection signal can be extracted from a portion where the amplitude of the vibration is small, noise caused by the signal can be reduced, and the S / N (signal-to-noise ratio) of the detection signal can be improved.

Next, in the manufacturing method according to claim 2, when the electrodes are formed on the surface of the piezoelectric body in the first step, in addition to the electrodes, A grounding electrode for grounding the common electrode to the reference potential is formed on each arm, and an electrode is formed on the side surface of each arm. In the third step, in addition to the detection electrode (or the detection electrode and the extraction electrode), Thus, a short-circuit electrode for connecting the common electrode on the back surface and the ground electrode on the front surface may be formed.

When the vibrator is manufactured in this manner, a signal line for grounding the common electrode to the reference potential is provided.
A grounding electrode formed on the surface of the vibrator can be connected to the common electrode on the back surface of the vibrator, as in the case where the pad electrode is provided on the surface (claim 4). Since there is no need to connect the wires, the wires can be easily formed, and the variation in vibration between the arms due to the connection of the signal lines can be suppressed.
In particular, if the pad electrode is also formed on the surface of the vibrator, all the signal lines connected to the vibrator can be drawn out from the surface side of the vibrator, and the signal lines are connected to the vibrator. , It is possible to more reliably suppress the variation in vibration between the respective arm portions caused by the connection, and to realize a vibrator capable of detecting the angular velocity with high accuracy.

Next, according to an eighth aspect of the present invention, there is provided a comb-shaped method in which four arms arranged substantially in parallel with each other are connected at a connecting portion by using the manufacturing method according to the first aspect. In the first step, a drive electrode and at least one of a detection electrode and a common electrode are respectively formed on a surface of a piezoelectric body, and a common electrode is formed on a back surface of the piezoelectric body in a first step. And at least one of the detection electrodes. Then, in the second step, a polarization voltage is applied between each of the electrodes on the front and back surfaces of the piezoelectric body formed in the first step to polarize the piezoelectric body. At least one of the common electrode and the detection electrode is formed. In the first step and the third step, the electrodes are formed on the front, back, and side surfaces of the piezoelectric body, and at the same time, connection electrodes for connecting the common electrodes and the detection electrodes are formed.

In the comb-shaped vibrator manufactured by the method of the present invention, similarly to the tuning fork-shaped vibrator, for example, the common electrode is grounded to a reference potential, and the drive electrode is driven by an AC voltage varying around the reference potential. Is applied, the arm on which the drive electrodes are formed can be vibrated in the direction of the drive axis, which is the arrangement direction. Further, when an angular velocity around an axis substantially parallel to each arm is input in a state where the vibrator is vibrated in the drive axis direction, the arm section vibrating in the drive axis direction receives the input angular velocity. Accordingly, the arm also vibrates in the detection axis direction substantially orthogonal to the arrangement direction of each arm, and the other arms also vibrate in the detection axis direction. Then, between the detection electrode and the common electrode, a current proportional to the vibration in the detection axis direction of the arm portion on which these electrodes are formed flows, and the input angular velocity is detected by detecting the current between these electrodes. Can be detected.

In the method of the present invention, since the polarization treatment is performed before the electrodes are formed on the side surfaces of the piezoelectric body, the same effects as those of the first and second aspects can be obtained. In the manufacturing method according to the eighth aspect, when the electrodes are formed on the surface of the piezoelectric body in the first step, the common electrodes and the detection electrodes are detected in addition to the electrodes as described in the ninth aspect. A pad electrode for common electrode grounding and a detection signal extraction pad connected to each connection electrode for connecting the electrodes to each other may be formed. If the pad electrode is formed on the surface of the vibrator in this manner, it is possible to easily draw out the signal line from the vibrator, as in the fourth aspect of the present invention. To reduce the variation in vibration caused by
The angular velocity can be detected well.

Next, a method according to a tenth aspect of the present invention uses the manufacturing method according to the first aspect to have two sets of a pair of arm portions arranged substantially in parallel with each other, and each of these sets of the arm portions is provided. Is a method of manufacturing an angular velocity detecting vibrator formed in an H shape in which the parts are connected by a connecting part. First, in the first step, the surface of one of the two sets of arm parts is selected from the two sets of arm parts. And the common electrode on the surface of the other set of arms.
Each common electrode is further formed on the back surface of the piezoelectric body and in a region from the connection portion to a position corresponding to the drive electrode and the common electrode on the surface of each arm portion. In the second step, a polarization voltage is applied between the common electrode on the back surface of the piezoelectric body and each electrode on the front surface of the piezoelectric body to polarize the piezoelectric body. On the side surface, a short-circuit electrode for connecting the common electrodes formed on the front and back surfaces of the piezoelectric body is formed, and a detection electrode is formed on the side surface of a pair of arm portions having the common electrode formed on the front and back surfaces. I do.

In the H-shaped vibrator manufactured by the method of the present invention, for example, the common electrode is grounded to the reference potential and the driving electrode is centered on the reference potential, similarly to the tuning fork-shaped and comb-shaped vibrators described above. Applying an alternating voltage to
One set of arm portions on which the drive electrodes are formed can be vibrated in the drive axis direction, which is the arrangement direction. In addition, when an angular velocity about an axis substantially parallel to each arm is input in a state in which the vibrator is vibrated in the drive axis direction, each arm receives the angular velocity of each arm according to the input angular velocity. Vibration also occurs in the detection axis direction substantially orthogonal to the arrangement direction. Then, a current proportional to the vibration in the detection axis direction flows between the detection electrode and the common electrode on the other set of arm portions on which the detection electrodes are formed. Therefore, the input angular velocity can be detected by detecting the current between these electrodes.

Also, in the method of the present invention, since the polarization treatment is performed before the electrodes are formed on the side surfaces of the piezoelectric body, the same effects as those of the first, second, and eighth aspects can be obtained. Incidentally, in the manufacturing method according to claim 10,
As described in claim 11, in the first step, a pad electrode for extracting a detection signal is formed on the surface of the piezoelectric body, and in the third step, the detection electrode and the pad electrode are connected to the side surface of the piezoelectric body. May be formed. If the pad electrode is formed on the surface of the vibrator in this manner, it is possible to easily draw out the signal line from the vibrator, as in the fourth aspect of the present invention. The variation in the generated vibration can be suppressed, and the angular velocity can be detected satisfactorily.

Next, when a comb-shaped or H-shaped vibrator is manufactured by the manufacturing method according to any one of claims 8 to 11, as described in claim 12, in the first step, On the surface of each arm portion of the set where the drive electrode is formed, a monitor electrode for monitoring the vibration state in the drive axis direction is formed,
In the second step, a polarization voltage may be applied between the monitor electrode and the common electrode formed on the back surface of the piezoelectric body to polarize the piezoelectric body between these electrodes.

In this way, as in the case of manufacturing the tuning-fork-shaped vibrator by the manufacturing method according to the third aspect, an AC voltage is applied to the drive electrode for detecting the angular velocity, and the vibrator is driven. When vibrated, the vibration state can be detected via the monitor electrode, and the accuracy of detecting the angular velocity can be improved.

Next, the production method of the present invention (Claims 1 to 5)
In the case where the angular velocity detecting vibrator is manufactured in 12), in the third step, when forming each of the electrodes including the detection electrode on the side surface of each arm after the piezoelectric polarization processing, As described in above, it is desirable to form each electrode at least at a temperature lower than the Curie temperature of the piezoelectric body.
This is because if the electrodes are formed by baking a metal paste that has been generally performed after the polarization treatment of the piezoelectric body, the temperature of the piezoelectric body becomes higher than its Curie temperature during the baking, and the polarization processing is performed. This is because the uniform orientation direction of the piezoelectric body is disturbed, and the piezoelectric characteristics of the piezoelectric body deteriorate. That is, in the method of the present invention (claim 13), the formation of the electrode after the polarization treatment is performed at a temperature lower than the Curie temperature so that the vibrator can be manufactured without impairing the piezoelectric characteristics of the piezoelectric body. It is.

In order to form an electrode at a temperature lower than the Curie temperature of the piezoelectric body in the third step on the piezoelectric body after the polarization treatment as described above, for example, 16. An electrode is formed on the side surface of each arm using a low-temperature-curable conductive resin that cures at a temperature lower than the Curie temperature of the piezoelectric body.
As described in the above section, the electrodes may be formed on the side surfaces of the respective arm portions by a metal vapor deposition method.

As the low-temperature-curable conductive resin, for example, a thermosetting resin (for example, a phenol resin) that cures at a temperature sufficiently lower than the Curie temperature of the piezoelectric body (for example, about 150 ° C.) as a binder is used. A so-called polymer-type conductive paste in which a conductive metal powder of silver, copper, or the like is uniformly dispersed can be used. More specifically, for example, a silver conductive paste manufactured by Asahi Chemical Laboratory Co., Ltd. Paste “LS-504” can be used.

[0035]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view illustrating the entire configuration of the angular velocity sensor according to the embodiment, and FIG. 2 is an explanatory diagram illustrating the vibrator according to the embodiment as viewed from front, rear, left and right.

As shown in FIG. 1, the angular velocity sensor according to the present embodiment has a vibrator formed in a tuning fork shape by a pair of left and right arms 4 and 6 and a connecting portion 8 connecting one end of each arm 4 and 6. 2 is provided. The arm portions 4 and 6 and the connecting portion 8 of the vibrator 2 are each in the shape of a quadrangular prism, and the vibrator 2 is manufactured by integrally forming these components with a piezoelectric body.
The piezoelectric body constituting the vibrator 2 can be a ceramic piezoelectric body such as PZT, quartz, or the like. However, the vibrator 2 of this embodiment can be set to any polarization direction and is easy to manufacture. PZT is used.

Next, as shown in FIG. 2A, one surface (surface; hereinafter referred to as X1 surface) of the vibrator 2 having a concave shape is provided with a pair from the connecting portion 8 to each of the arm portions 4 and 6. Drive electrodes 12a and 12b are formed, and the monitor electrodes 14a and 14b and the temporary GND electrode 1 are provided at a portion from each of the drive electrodes 12a and 12b to the tip of each arm 4.6.
6a, 16b and polarization electrodes 18a, 18b are formed in order, and pad electrodes 20a, 20b for extracting detection signals are formed at the tips of the arms 4, 6, respectively.

Then, the drive electrodes 12a and 12b pass through the connecting portion 8, and the opposing surfaces on which the arms 4 and 6 oppose each other, and the left and right outer side surfaces (hereinafter referred to as Y
1 and Y2 planes) and the monitor electrode 1
4a and 14b are formed on the opposing surfaces of the arms 4 and 6, respectively. Temporary GND electrodes 16a and 16b are formed on the Y1 and Y2 surfaces of the arms 4 and 6, respectively, and the polarization electrodes 18a and 18b is formed in the entire width direction from the Y1, Y2 surface side of each of the arm portions 4, 6 to the opposing surface side, and the pad electrodes 20a and 20b are formed in the Y1, Y2 of each of the arm portions 4, 6 respectively.
It is formed on each of the two surfaces.

Each of the polarization electrodes 18a, 18b is connected to the temporary GND electrode 16a, 18b via the short-circuiting electrodes 26a, 26b.
16b are respectively connected (short-circuited). Each of these provisional GND electrodes 16a and 16b corresponds to a grounding electrode according to a seventh aspect. On the other hand, Y1,
On the Y2 side, as shown in FIGS. 2B and 2C, respectively.
Detection electrodes 22a and 22b are formed at positions corresponding to the polarization electrodes 18a and 18b, respectively, and the other surface (rear surface; hereinafter, referred to as X2 surface) of the vibrator 2 which has a concave shape is
As shown in FIG. 2D, a temporary GND electrode 24 serving as a common electrode for the drive electrodes 12a and 12b, the monitor electrodes 14a and 14b, and the detection electrodes 18a and 18b is formed. The detection electrodes 22a and 22b are connected to the respective arms 4, 6
Are formed at positions deviated from the center of the Y1 and Y2 planes toward the X2 plane.

Then, the provisional GND electrode 24 on the X2 side and X
The temporary GND electrodes 16a and 16b on the first surface are the short-circuit electrodes 2 formed on the Y1 and Y2 surfaces of each arm 4.6, respectively.
They are connected (short-circuited) to each other via 8a and 28b. Further, the pad electrodes 20a, 20b on the X1, X2 surface side
The detection electrodes 22a and 22b on the Y1 and Y2 surfaces are connected (short-circuited) to each other via extraction electrodes 30a and 30b for extracting detection signals formed on the Y1 and Y2 surfaces, respectively.

Next, the vibrator 2 of this embodiment is shown in FIG.
(C). That is, as shown in FIG. 3A, first, each of the electrodes (driving electrodes 12a, 12b,
Monitor electrodes 14a, 14b, temporary GND electrodes 16a, 16
b, polarization electrodes 18a, 18b, pad electrodes 20a, 2
0b), and a temporary GND electrode 24 is formed on the X2 plane of the piezoelectric body (first step). In the first step, for example, a metal paste mainly composed of a conductive metal such as silver is applied (printed) to the piezoelectric body in accordance with the shape of each of the above-mentioned electrodes, and is baked at a high temperature. Then, each electrode is formed (Ag baking) on the front and back surfaces of the piezoelectric body.

When the electrodes are formed on the front and back surfaces of the piezoelectric body in the first step as described above, this time, as shown in FIG.
The drive electrodes 12a and 12b, the monitor electrodes 14a and 14b, the provisional GND electrodes 16a and 16b, the polarization electrodes 18a and 18b formed on the X1 plane, and the provisional GND electrode 24 formed on the X2 plane as a common electrode for these electrodes. In the meantime, by applying a DC voltage (polarization voltage) for piezoelectric body polarization, the piezoelectric body between these electrodes is moved in a predetermined direction (in this embodiment, from the X1 plane to the X2 plane as indicated by an arrow in FIG. 1). Is performed (second step). still,
When the polarization process is performed in the second step, since the detection electrodes and the like are not formed on the side surfaces (Y1 and Y2 surfaces) of the piezoelectric body, the piezoelectric electrodes are not affected by the electrodes formed on the Y1 and Y2 surfaces. The body can be polarized, and the orientation direction of the piezoelectric body can be made uniform.

When the polarization of the piezoelectric body is performed in the second step, as shown in FIG. 3C, the detection electrodes are applied to the Y1 and Y2 surfaces of the arms 4 and 6 of the piezoelectric body. 22a,
22b, short-circuit electrodes 28a and 28b, and extraction electrode 30
a and 30b are respectively formed (third step). In addition, this third
When the electrodes are formed on the Y1 and Y2 surfaces of the arm portions 4 and 6 in the process, a low-temperature-curable conductive resin (for example, the above-mentioned polymer-type conductive paste) is formed in accordance with the shape of each electrode.
It is applied (printed) on the Y1 and Y2 surfaces of the arm portions 4 and 6, and a predetermined temperature sufficiently lower than the Curie temperature of the piezoelectric body (for example,
Each electrode is formed (low temperature baking) by a procedure such as baking at about 150 ° C.).

Next, in the vibrator 2 thus manufactured, the end face on the connecting portion 8 side is attached to the pedestal portion 32b of the supporter 32 having a cross section formed in an E-shape with an adhesive (for example, an epoxy-based adhesive). By fixing the main body side of the supporter 32 to the surface of the plate-like base 36 by welding or bonding via a spacer 34, the X2 plane is in contact with the surface of the base 36. It is fixed so as to face each other.

The supporter 32 has a pedestal portion 32 for joining the vibrator 2 to a main body fixed to a base 36 via a spacer 34 via a neck portion 32a for absorbing vibration.
b, and is integrally formed in a D-shaped cross section with a metal such as 42N, for example. Further, the base 36 is for fixing the vibrator 2 directly or via a vibration-proof rubber to a housing of the angular velocity sensor or a vehicle body or the like for which an angular velocity is to be detected. The base 36 has eight terminals T1 to T8 corresponding to the drive electrodes 12a and 12b, the monitor electrodes 14a and 14b, the temporary GND electrodes 16a and 16b, and the pad electrodes 20a and 20b formed on the vibrator 2. It is erected.

Each of the terminals T1 to T8 is for relaying between the above-mentioned electrodes and a detection circuit (not shown).
Each electrode and the terminals T1 to T8 are respectively connected to a wire W1.
Through W8 to be connected by wire bonding. Note that the base 36 and the terminals T1 to T8 are electrically insulated.

Next, when detecting the angular velocity using the vibrator 2 of the present embodiment, the terminals T5 and T6 are grounded by a signal line (not shown), so that the provisional GND electrodes 16a,
16b, polarization electrodes 18a, 18b, temporary GND electrode 24
Is grounded to a reference potential. Then, the drive electrodes 12a, 1
An AC drive signal having a phase difference of 180 degrees is input to each of the drive electrodes 12a and 12b via terminals T1 and T2 connected to the drive electrode 2b.

The drive signal is an alternating signal that changes positively and negatively around a reference potential, and its frequency is shifted in the direction of the drive axis (Y axis shown in FIG. 1), which is the direction in which the left and right arms 4, 6 are arranged. Is the resonance frequency of the vibrator 2. When each of the electrodes is grounded to the reference potential, the terminals T5 and T6 may be directly grounded to the ground (ground). For example, a constant potential of 2.5 V may be applied to the terminals T5 and T6. The bias may be applied so that That is, the reference potential may be a grounded reference potential, either directly or indirectly.

The driving electrodes 12a, 12b
When an AC drive signal is input to the
a, 12b and the temporary GND electrode 24 on the X2 plane are applied with AC voltages having inverted phases, respectively.
The arms 4 and 6 resonate in the direction of the drive shaft (Y axis).
At the time of this driving, outputs from the monitor electrodes 14a and 14b (specifically, currents flowing between the monitor electrodes 14a and 14b and the temporary GND electrode 24) are monitored via the terminals T3 and T4. The drive signal is controlled so that the amplitude of the units 4 and 6 in the Y-axis direction becomes constant even when the temperature changes (self-excited control oscillation).

When the vibrator 2 is self-excited and oscillated in this manner, a Z-axis centered on the Z-axis substantially parallel to the arms 4, 6 at the center position of the arms 4, 6. When the angular velocity Ω around the axis is input, each of the arm portions 4 and 6 vibrates in the X-axis direction (detection axis direction) penetrating the X1 and X2 planes by Coriolis force. And the vibration component in the X-axis direction is
It is proportional to the current flowing between the detection electrodes 22a, 22b and the temporary GND electrode 24. Then, the current between these electrodes is taken in via terminals T7 and T8 connected to the detection electrodes 22a and 22b, respectively, converted into a voltage signal by a current-voltage conversion circuit, and further, each voltage signal is differentiated. By differentially amplifying through the dynamic amplifier, a voltage signal corresponding to the vibration component of each of the arms 4 and 6 in the detection resonance mode is generated, and this is output as a detection signal representing the angular velocity around the Z axis.

As described above, in this embodiment, in manufacturing the tuning-fork-shaped vibrator 2, first, electrodes are formed on the front and back surfaces (X1, X2 surfaces) of the piezoelectric body which is the vibrator main body. By applying a polarization voltage between the electrodes on the front and back surfaces, the piezoelectric body is polarized, so that the piezoelectric body can be uniformly polarized in a certain direction (in this embodiment, from the X1 plane to the X2 plane). Therefore, according to the present embodiment, the internal stress remains in the piezoelectric body due to the polarization process, the vibration characteristics of the vibrator vary, and the detection accuracy of the angular velocity decreases.
Alternatively, it is possible to prevent a problem that the detection characteristic of the angular velocity changes over time due to the change over time in the piezoelectric characteristics of the piezoelectric body, and the reliability is reduced.

When the electrodes are formed on the X1 plane of the piezoelectric body in the first step, in addition to the drive electrodes 12a and 12b, the monitor electrodes 14a and 14b, and the polarization electrodes 18a and 18b, the polarization electrode 18a is formed. , 18b and a temporary GND electrode 16a for grounding the temporary GND electrode 24 on the X2 plane to a reference potential.
16b, the polarization electrodes 18a and 18b and the provisional GND electrode 16
a, 16b for temporary short-circuiting connecting the electrodes a and 16b,
Also, pad electrodes 20a and 20b for extracting detection signals from the detection electrodes 22a and 22b on the Y1 and Y2 surfaces are formed at the same time, and further, in the third step after the polarization processing, the Y1 and Y2 surfaces of the arm portions 4 and 6 are formed. When an electrode is formed of a low-temperature curable conductive resin in addition to the detection electrodes 22a and 22b,
The detection electrodes 22a and 22b and the pad electrode 20 on the X1 plane
a and 20b, and short-circuit electrodes 28a and 28b connecting the temporary GND electrode 24 on the X2 plane and the temporary GND electrodes 16a and 16b on the X1 plane.
Are simultaneously formed.

As a result, according to the present embodiment, all the signal lines connected to the vibrator 2 for detecting the angular velocity
From the electrode formed on the surface (X1 plane). Further, in this embodiment, in particular, wires W1 to W8 for wire bonding are used for signal lines, and terminals T1 to T8 arranged around each electrode on the X1 plane and the vibrator 2.
Are connected by wire bonding. For this reason, according to the vibrator 2 of the present embodiment, the signal lines can be arranged so as to be symmetrical between the left and right arms 4 and 6, and each arm 4 is connected by connecting the signal lines. , 6 can be suppressed, and the angular velocity detection accuracy can be improved.

Further, in the third step, the side surfaces (Y1, Y2 surfaces) of the arm portions 4, 6 are applied to the piezoelectric body after the polarization process.
When forming the electrodes, each electrode is formed by using a low-temperature curing type conductive resin capable of forming the electrode at a temperature sufficiently lower than the Curie temperature of the piezoelectric body, and baking the conductive resin at a low temperature. With this configuration, it is possible to prevent the piezoelectric characteristics of the piezoelectric body from being impaired by the electrode formation after the polarization process.

The electrode formation after the polarization treatment may be performed by using a metal deposition method other than the method using a low-temperature-curable conductive resin, and the temperature may be sufficiently lower than the Curie temperature of the piezoelectric body. Can form an electrode. As mentioned above, although one Example of this invention was described, this invention is not limited to the said Example, You can employ | adopt various aspects. For example, in the above embodiment, the pad electrodes 20a, 20b are provided on the surfaces of the arm portions 4, 6 and the side surfaces (Y1 , Y2) on the extraction electrode 30a,
Although the case where the vibrator provided with the electrode 30b and the short-circuiting electrodes 28a and 28b is formed has been described, the method of the present invention, for example, as shown in FIG. It is applicable even if it does.

In the above embodiment, the surface (X
In order to extract the detection signal on one side,
The pad electrodes 20a and 20b are formed at the tip of
As shown in FIG. 4B, the pad electrodes 40a and 40b for extracting the detection signal from the surface (X1 plane) are located on the X1 plane at a position closer to the connecting portion 8 than the polarization electrodes 18a and 18b (in the figure, , Polarization electrodes 18a and 18b, and monitor electrode 1
4a, 14b and the temporary GND electrodes 16a, 16b).

In this case, as in the above embodiment, X1
The X1 plane polarization electrode 1 is connected via signal lines (wires W5 and W6) connected to the plane temporary GND electrodes 16a and 16b.
In order that the 8a, 18b and the temporary GND electrode 24 on the X2 plane can be grounded to the reference potential, in the third step after the polarization processing, the side surfaces (Y1, Y2 plane) of the arms 4, 6 are detected. When forming the electrodes 22a, 22a and the short-circuit electrodes 28a, 28b, the polarizing electrodes 18a, 18b and the provisional GND electrode 2
The short-circuit electrodes 44a and 44b for connecting (short-circuiting) the electrodes 4 and 4 may be formed at the same time.

In the above embodiment, the vibrator 2 is used in the first step.
Drive electrodes 12a, 12b formed on the surface (X1 plane) of
Has been described as being formed from the connecting portion 8 to the left and right connecting portions 4 and 6, but the drive electrodes 12a and 12b
5A, as shown in FIG. 5A, the connection may not be made at the connecting portion 8 and may be formed only on the left and right arms 4 and 6 along the longitudinal direction of each arm 4 and 6. , FIG.
As shown in (b), it may be formed only on the connecting portion 8 side along the longitudinal direction of the connecting portion 8 (that is, in the left-right direction).

Incidentally, the piezoelectric body constituting the vibrator 2 may be formed in a shape in which the supporter 32 is connected to the connecting portion 8.
On the other hand, in the above-described embodiment, the method of manufacturing the tuning-fork-shaped vibrator 2 has been described. However, the manufacturing method of the present invention is not limited to a vibrator having a pair of arm portions which are arranged substantially parallel to each other and one ends of which are connected. The shape of the vibrator to which the present invention can be applied is not limited to the tuning fork shape.

That is, as an angular velocity sensor for detecting an angular velocity using a tuning fork formed by a connecting portion and a pair of arms, as shown in FIGS.
Two arm units, each of these arm units 103, 1
04, 105, and 106 are arranged substantially in parallel, and one end thereof is connected by a common connection portion 102, thereby using a vibrator 100 formed in a comb shape, or as shown in FIG. Two sets of two arm portions are provided, and the arm portions 203, 204 and 205, 206 of each set are provided.
Are arranged on both sides of the connecting portion 202 and connected to each other, thereby using the vibrator 200 formed in an H shape.

In these angular velocity sensors as well, if the vibrators 100 and 200 are manufactured in the same procedure as in the above embodiment, the angular velocity detection accuracy can be improved. Hereinafter, the configurations of the vibrators 100 and 200 shown in FIGS. 6 to 8 and a manufacturing method thereof will be briefly described.

The vibrator 100 of the angular velocity sensor shown in FIGS. 6 and 7 has arms 103, 104 and 105, 10
6 is a so-called four-leg tuning fork in which two sets of tuning forks having different intervals are combined. A tuning fork with a narrow interval between the arms 103 and 104 is arranged between one tuning fork with a wide interval between the arms 105 and 106. It has a shape (comb shape) in which the connecting portions of the tuning forks are connected. The connecting portion 1 of the vibrator 100
02 has a torsion beam 10 at the center as in the vibrator 2 shown in FIG.
8 are joined using an adhesive or the like, and the supporter 107 further includes
6 is fixed on the base 111 via a spacer 110 by welding or the like so as to be arranged substantially parallel to a position separated from the base 111 by a certain distance.

FIG. 6 is a perspective view showing the entire structure of the angular velocity sensor provided with the comb-shaped vibrator 100. FIG. 2 shows the vibrator 100 in front and rear (X1 and X2 planes) and left and right (Y
FIG. 3 is an explanatory diagram illustrating a state viewed from one surface (Y2 surface). The vibrator 100 is formed in a comb shape by, for example, machining PZT by dicing or the like. Then, of the four arm portions 103 to 106 constituting the vibrator 100, a pair of arm portions 103 and 1 constituting a central tuning fork portion are provided.
An electrode for vibrating the vibrator 100 in the arrangement direction (Y-axis direction) of each of the arm portions 103 to 106 is formed on the 04, and a pair of arm portions 105 and 1 constituting an outer tuning fork portion are formed.
06, each of the arms 103 to 103 added to the vibrator 100
An electrode is formed for detecting an angular velocity Ω around a Z-axis substantially parallel to the central axis of 106.

That is, as shown in FIG.
The drive electrodes 112 and the monitor electrodes 113 are respectively formed on the X1 surface (the surface opposite to the base 111) of the X-rays 3 and 104, and the X2 surface (the back surface facing the base 111) is formed on the X3 surface. Temporary GND electrode 12 for grounding to a reference potential
0 is formed. And each of the arm portions 103, 10
4 drive electrode 112 and monitor electrode 113
Are connected to each other on the X1 plane of the connecting part 102, and are formed on the X2 plane of the arm parts 103 and 104, respectively.
The electrodes 120 are connected to each other on the X2 plane of the connection part 102.

On the other hand, the detection electrode 114 is formed on the X1 plane of the arm 105, the detection electrode 122 is formed on the X2 plane, and the Y1 plane which is the outer side surface of the vibrator 100 is formed on the X1 plane.
A temporary GND electrode 125 is formed, and a short-circuit electrode 129 that connects (short-circuits) the detection electrodes 114 and 122 on the X1 and X2 planes is formed. The arm 10
6, a temporary GND electrode 115 is formed on the X1 plane,
A temporary GND electrode 121 is formed on the surface, and the vibrator 100
The detection electrode 124 is formed on the Y2 surface, which is the outer side surface of the X-ray, and the provisional GND electrodes 115 and 12 on the X1 and X2 surfaces.
1 are connected to each other (short-circuit).

Next, a pad electrode 116 for extracting a detection signal is formed on the X1 surface of the connecting portion 102. The pad electrode 116 is connected to the X1 surface of the arm portion 105 via an extraction electrode 118. The arm portion 106 is connected to the formed detection electrode 114 and is connected to the arm portion 106 via the extraction electrode 126.
Is connected to the detection electrode 124 formed on the Y2 plane. A pad electrode 117 for grounding a temporary GND electrode is also formed on the X1 plane of the connecting portion 102. The pad electrode 117 is connected to the arm portion 1 via an extraction electrode 119.
The temporary GND electrode 115 formed on the X1 plane of No. 06 is connected. The temporary GND electrode 121 of the arm 106 connected to the temporary GND electrode 115 is connected to the connecting portion 1.
02 through the extraction electrode 123 formed on the X2 plane and the extraction electrode 127 formed on the Y1 plane of the arm 105.
Temporary GND electrode 12 formed on Y1 surface of arm 105
5 and the provisional GND electrodes 120 formed on the X2 plane of the arm portions 103 and 104 are connected to each other.

Then, as shown in FIG.
The drive electrode 11 formed on the X1 plane of the connecting portion 102
2. Four terminals T31 to T34 corresponding to the monitor electrode 113, the pad electrode 116, and the pad electrode 117.
And each of these electrodes and each terminal T31
To T34 are respectively connected by bonding the wires W31 to W34.

When detecting the angular velocity using the angular velocity sensor having the above configuration, the driving arm 10
By applying a drive signal (AC voltage) between the drive electrode 112 formed on the third and fourth electrodes 104 and the provisional GND electrode 120, the inner tuning fork formed by the arms 103 and 104 is driven left and right. By controlling the drive signal using a control circuit (not shown) so as to resonate in the axial direction (Y-axis direction shown in the drawing) and to keep the output from the monitor electrode 113 constant, the tuning fork inside the vibrator 100 is formed. The part is self-oscillated. When the vibrator 100 is self-excited and oscillated in this manner, when an angular velocity Ω about the longitudinal central axis (Z axis) of the vibrator 100 is input,
The arms 103 and 104 also vibrate in the X-axis direction (detection axis direction) penetrating the X1 and X2 planes by Coriolis force. Then, each arm part 1 constituting the outer tuning fork part
05, 106 also vibrate in the X-axis direction, and the detection electrodes 114, 1
22 and the provisional GND electrode 125 and the detection electrode 12
4 and the temporary GND electrodes 115 and 121, a current proportional to the vibration in the X-axis direction flows. By converting the current between these electrodes into a voltage value, the angular velocity Ω around the Z-axis is changed. To detect.

Then, such a comb-shaped vibrator 10
0, the same procedure as that of the tuning fork-shaped vibrator 2, that is, the front and back surfaces (X1,
X1), the above electrodes are formed (first step), and a DC voltage (polarization voltage) for polarizing the piezoelectric body is applied between the front and rear electrodes to move the piezoelectric body in a predetermined direction (for example, (The direction from the X1 plane to the X2 plane) (second step).
The above-mentioned electrodes can be formed on the side surfaces (Y1, Y2 surfaces) of the piezoelectric body (third step), and the same effect as in the above embodiment can be obtained.

Next, the vibrator 2 of the angular velocity sensor shown in FIG.
00 designates a tuning fork having the same shape as the arm 203 of each tuning fork.
Each tuning fork has an H-shape connected at a connecting portion 202 such that the 204, 205, and 206 face in opposite directions. The vibrator 200 is formed in an H-shape by machining PZT by dicing or the like, and the vibrator 200 is attached to the pair of arms 203 and 204 forming one tuning fork. An electrode for vibrating in the arrangement direction (Y-axis direction) is formed, and a pair of arms 205 and 206 constituting the other tuning fork are provided with the arms 203 to 206 applied to the vibrator 200.
An electrode for detecting an angular velocity about a z-axis substantially parallel to the central axis is formed.

That is, the drive electrode 207 and the monitor electrode 208 are formed on the X1 surface (one surface of the vibrator 200 having an H shape) of the arm portions 203 and 204. Then, the drive electrode 20 of each arm 203, 204
7 and the monitor electrode 208 are connected to each other at the connection portion 202. Further, temporary GND electrodes 210 and 211 are formed on the X1 surface of the arm portions 205 and 206, respectively.
The detection electrodes 212 and 21 are provided on the Y1 and Y2 planes (outer side surfaces of the vibrator 200 in the respective arm portions 205 and 206).
3 are formed.

The X2 plane of the vibrator 200 (vibrator 20
0), an arm 2
03 and 204 through the connecting portion 202 and the arm portion 20
Temporary GND electrodes 209 are formed over substantially the entire area extending to the arm portions 205 and 206. The temporary GND electrodes 210 and 211 formed on the X1 plane of the arm portions 205 and 206
Short-circuit electrodes 21 formed on the Y1 and Y2 planes 206
8, 219 are connected to the temporary GND electrode 209 on the X1 plane. Further, pad electrodes 214 and 215 for extracting a detection signal are formed on the X1 surface of the connection portion 202, and the detection electrodes 212 and 213 formed on the Y1 and Y2 surfaces of the arm portions 205 and 206 are connected to the extraction electrode 216. , 217 are connected to the pad electrodes 214, 215, respectively.

When detecting the angular velocity using the vibrator 200 having the above-described configuration, for example, the X
At the same time as fixing the two surfaces on the base via the supporter,
The temporary GND electrode 209 on the X2 plane is grounded to the reference potential. Then, the drive electrodes 2 formed on the arm portions 203 and 204 are formed.
07 and the provisional GND electrode 209, a drive signal (AC voltage) is applied between these arm portions 103, 1
The drive signal is generated by using a control circuit (not shown) so that the tuning fork formed by the drive circuit 04 resonates in the left and right drive axis directions (Y axis direction shown in the figure) and the output from the monitor electrode 208 becomes constant. By performing the control, the tuning fork inside the vibrator 200 is caused to self-oscillate.

When an angular velocity Ω around the Z-axis is input during the self-excited control oscillation of the vibrator 200, the arms 203 and 204 are moved by the Coriolis force to the X1 and X2 planes. Vibrates also in the X-axis direction (not shown) penetrating through. Then, each of the arm units 20 constituting the other tuning fork unit
5 and 206 also vibrate in the X-axis direction.
A current proportional to the vibration in the X-axis direction flows between the temporary GND electrodes 209 and 210 and between the detection electrode 213 and the temporary GND electrodes 209 and 211. Then, this current is taken out through the pad electrodes 214 and 215 and converted into a voltage value, thereby detecting the angular velocity Ω around the Z axis.

The H-shaped vibrator 20
0, the tuning fork-shaped or comb-shaped vibrators 2, 1
It can be manufactured by the same procedure as that of the embodiment 00, and the same effect as the above embodiment can be obtained. In the present invention,
The drive electrode and the detection electrode formed on the same arm portion are:
The arm may be provided on a surface having a substantially orthogonal relationship, instead of the orthogonal surface. That is, the drive electrode and the detection electrode may be arranged at positions where the detection electrode can detect the angular velocity applied in the direction perpendicular to the drive axis direction of the arm.

Therefore, the front and back surfaces of each arm are
It is not always necessary to be parallel to the arrangement direction of the arms, but it is sufficient if they are substantially parallel.

[Brief description of the drawings]

FIG. 1 is a perspective view illustrating a configuration of an angular velocity sensor according to an embodiment.

FIG. 2 is an explanatory diagram showing electrodes formed on the vibrator shown in FIG.

FIG. 3 is an explanatory diagram illustrating a method for manufacturing the vibrator shown in FIG.

4 is an explanatory diagram illustrating a configuration example of a vibrator in which a pad electrode connected to a detection electrode is deleted or changed from the vibrator illustrated in FIG. 1;

FIG. 5 is an explanatory diagram illustrating a configuration example of a vibrator in which the shape of a drive electrode is changed from the vibrator shown in FIG. 1;

FIG. 6 is an explanatory diagram illustrating a configuration of an angular velocity sensor including a comb-shaped vibrator having two sets of tuning forks.

FIG. 7 is an explanatory view showing electrodes formed on the comb-shaped vibrator shown in FIG.

FIG. 8 is an explanatory diagram illustrating a configuration of an H-shaped vibrator having two sets of tuning forks.

[Explanation of symbols]

2,100,200 ... vibrator, 4,6,103-10
6, 203-206 ... arm part, 8, 102, 202 ...
Connecting parts, 12a, 12b, 112, 207 ... drive electrodes,
14a, 14b, 113, 208 ... monitor electrode, 16
a, 16b: temporary GND electrode (electrode for grounding), 18a, 1
8b ... polarizing electrodes, 20a, 20b, 116, 117,
214, 215: pad electrode, 22a, 22b, 11
4, 122, 124, 212, 213 ... detection electrode, 2
4,115,120,121,125,209,21
0,211... Temporary GND electrode (common electrode), 26a, 26
b, 28a, 28b, 128, 129, 218, 219
... Electrode for short circuit 30a, 30b, 118, 119, 1
23, 126, 127, 216, 217 ... extraction electrode, 3
2,107 ... Supporter 34,110 ... Spacer, 3
6,111: Base, T1 to T8, T31 to T34: Terminal, W1 to W8, W31 to W34: Wire.

Claims (15)

[Claims] 1. A piezoelectric body formed by at least a pair of arms arranged substantially parallel to each other and a connecting part connecting the arms, and a front and back surface substantially parallel to an arrangement direction of the arms. And a drive electrode that receives an AC voltage from the outside and excites each arm in a drive axis direction that is an arrangement direction of each arm, and at least a side surface that is substantially perpendicular to the front and back surfaces, A detection electrode for detecting vibration generated in a detection axis direction orthogonal to the drive shaft;
A method for manufacturing an angular velocity detecting vibrator in which an angular velocity detecting electrode is formed, comprising: forming an angular velocity detecting electrode to be disposed on the front and back surfaces of the piezoelectric body; A step of applying a voltage for polarization between the electrodes formed on the front and back surfaces of the piezoelectric body in the first step to polarize the piezoelectric body in a direction substantially orthogonal to the front and back surfaces. A method for manufacturing an angular velocity detecting vibrator, comprising: two steps; and a third step of forming an angular velocity detecting electrode to be disposed on the side face on the side face of the piezoelectric body after the polarization processing. . 2. The piezoelectric body is formed in a tuning fork shape by a pair of arms and a connecting part connecting one end of each arm. In the first step, the drive electrode is formed on a surface of the piezoelectric body. And a polarizing electrode, and a common electrode on the back surface, respectively. In the second step, a polarizing voltage is applied between the common electrode on the piezoelectric back surface and each electrode on the piezoelectric body surface. The piezoelectric body is polarized, and in the third step, the detection electrode is formed on a side surface of each arm of the piezoelectric body after the polarization processing and at a position corresponding to the polarization electrode. The method of manufacturing an angular velocity detecting vibrator according to claim 1. 3. In the first step, a monitor electrode for monitoring a vibration state of each of the arm sections in the drive axis direction is formed on a surface of each of the arm sections. 3. The method according to claim 2, wherein a polarization voltage is applied between the common electrode and the common electrode to polarize the piezoelectric body between the electrodes. 4. In the first step, a pad electrode for extracting a detection signal is formed on a surface of each of the arm portions. In the third step, the detection electrode and the pad electrode are provided on a side surface of each of the arm portions. 4. The method of manufacturing an angular velocity detecting vibrator according to claim 2, wherein an extraction electrode is formed to connect the vibrator to the angular velocity detecting device. 5. 5. The angular velocity according to claim 4, wherein, in the first step, the pad electrode is formed on a surface of each of the arm portions and on a tip end side of the arm portion with respect to the polarization electrode. Manufacturing method of the transducer for detection. 6. The angular velocity detection according to claim 4, wherein, in the first step, the pad electrode is formed on a surface of each of the arm portions and on a side closer to the connecting portion than the polarization electrode. Manufacturing method of the oscillator. 7. In the first step, a grounding electrode for grounding the common electrode to a reference potential is formed on a surface of each of the arm portions, and in the third step, a ground electrode is provided on a side surface of each of the arm portions. 7. The method of manufacturing an angular velocity detecting vibrator according to claim 1, further comprising forming a short-circuit electrode connecting the common electrode and the ground electrode. 8. The piezoelectric body is formed in a comb shape in which four arm portions arranged substantially in parallel with each other are connected by the connecting portion. In the first step, a driving electrode and Forming at least one of the detection electrode and the common electrode, respectively,
At least one of a common electrode and a detection electrode is formed on the back surface. In the second step, a voltage for polarization is applied between each electrode on the front and back surfaces of the piezoelectric body formed in the first step, and In the third step, at least one of a common electrode and a detection electrode is formed on a side surface, and in the first step and the third step, the front, back, and side surfaces of the piezoelectric body are respectively formed. At the same time as forming each electrode,
A method for manufacturing a transducer for detecting angular velocity, comprising forming connection electrodes for connecting the common electrodes and the detection electrodes, respectively. 9. In the first step, a pad electrode for grounding a common electrode and extracting a detection signal, which is connected to each connection electrode for connecting the common electrode and the detection electrode to each other, on the surface of the piezoelectric body. The method for manufacturing an angular velocity detecting vibrator according to claim 8, wherein: 10. The piezoelectric body has two sets of a pair of arms arranged substantially parallel to each other, and is formed in an H-shape in which the arms of each set are connected by the connecting part. In the first step, the drive electrode is formed on the surface of one arm of the two sets of arm portions, and the common electrode is formed on the surface of the other set of arm portions. Forming a common electrode on the back surface and in a region from the connecting portion to a position corresponding to the drive electrode and the common electrode on the surface of each of the arm portions; and in the second step, the common electrode on the back surface of the piezoelectric body and the piezoelectric body A polarization voltage is applied between each of the electrodes on the front surface to polarize the piezoelectric body. In the third step, common electrodes formed on the side surface of the piezoelectric body and on the front and back surfaces, respectively. A short-circuit electrode for connecting them is formed, and the common electrode is The method according to claim 1, wherein the detection electrode is formed on a side surface of the pair of arm portions formed on the surface. 11. In the first step, a pad electrode for extracting a detection signal is formed on a surface of the piezoelectric body, and in the third step, the detection electrode and the pad electrode are formed on a side surface of the piezoelectric body. The method for manufacturing an angular velocity detecting vibrator according to claim 10, wherein an extraction electrode for connecting the electrodes is formed. 12. In the first step, a monitor electrode for monitoring the vibration state in the direction of the drive axis is formed on the surface of each arm of the set on which the drive electrode is formed, and in the second step, The angular velocity detection according to any one of claims 8 to 11, wherein a polarization voltage is also applied between a monitor electrode and the common electrode on the back surface to polarize the piezoelectric body between the electrodes. Manufacturing method of the oscillator. 13. The method according to claim 1, wherein in the third step, an electrode is formed on a side surface of the piezoelectric body at least at a temperature lower than the Curie temperature of the piezoelectric body. A method for manufacturing an angular velocity detecting vibrator. 14. In the third step, an electrode is formed on a side surface of the piezoelectric body using a low-temperature-curable conductive resin that cures at a temperature lower than the Curie temperature of the piezoelectric body. A method for producing the angular velocity detecting vibrator according to claim 13. 15. The method according to claim 13, wherein in the third step, an electrode is formed on a side surface of the piezoelectric body by a metal deposition method.