JPH1130519A - Parallelism adjustment method of straight line beams - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a parallelism adjustment method of straight line beams for easily performing parallelism adjustment between upper straight line beam and lower straight line beam where the reference spot of a laser-surveying device (namely a laser planar) for marking horizontal and vertical lines is projected. SOLUTION: The laser-surveying device is installed between an auto collimator 91 and a corner cube 90. Then, upper straight line beam is directly applied to the auto collimator 91 and lower straight line beam is bent by 180 degrees by the corner cube 90 and applied to the auto collimator 91. Then, the upper straight line beam and the lower straight line beam are observed on the auto collimator 91 and each beam axis is adjusted so that it is in parallel with the light axis of the auto collimator 91, thus enabling the upper and lower straight line beams to be in parallel each other.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for adjusting the emission direction of each linear beam in a light source device for emitting a first linear beam and a second linear beam in directions opposite to each other.

[0002]

2. Description of the Related Art Conventionally, in fields such as civil engineering and construction,
2. Description of the Related Art A laser surveying device (so-called laser planar) for marking out horizontal and vertical lines is used. This laser surveying device rotates a light projecting unit that emits a laser beam, scans the laser beam in a circumferential direction, and projects a vertical or horizontal reference line on a projection surface such as a wall surface according to the trajectory of the laser beam. Is what you do.

FIG. 5 shows the configuration of a laser surveying device. FIG. 5 shows a state in which the laser surveying device is set upright to perform horizontal scanning with laser light. The laser surveying device 11 includes a substantially cylindrical main body housing 12, a light projecting device 13 stored in the main body housing 12 with the rotating light projecting portion 15 protruding from an upper end surface 12 b of the main body housing 12, A battery case 17 is provided at the bottom of the main body housing 12 for accommodating the rotation driving battery of the rotary light projecting unit 15.
The laser emission optical system of the laser surveying apparatus 11 configured as described above will be briefly described with reference to FIGS.

A laser beam L emitted from a laser diode 23 provided in a main body 20 in the main body housing 12
₀ is reflected 90 degrees by the polarization beam splitter 27 to the λ / 4 plate 28 side. A part of the laser beam is applied to the side of the pentaprism of the λ / 4 plate 28 by the polarization beam splitter 27.
Is coated.

[0005] is reflected by the partial transmission film 28a, the laser beam transmitted through the polarization beam splitter 27 (hereinafter, referred to as the lower linear beam L ₂₎ includes two wedge prisms 29a, passes through the 29 b, the light projecting device 13 is emitted from the lower end.

On the other hand, the laser beam L ₁ transmitted through the partially transmitting film 28 a enters the pentaprism 35. The first reflecting surface 35a of the pentaprism 35 has a partially transmitting film 14
Is coated. Therefore, the pentaprism 3
5 a part of the laser beam incident on (hereinafter, referred to as upper linear beam L ₄₎ is, and goes straight, passes through the wedge-shaped prism 34, it is emitted from the upper end of the light projecting device 13. While the remaining laser light incident on the pentaprism 35 (hereinafter, referred to as the laser beam L ₃₎ is reflected at a right angle always by pentaprism 35, and is emitted in a horizontal direction from the light projecting window 33.

As described above, the laser beam L ₃ emitted from the laser device is vertically or perpendicularly applied to the wall surface or the like by rotating the pentaprism 35 together with the rotary projection unit 15 in a plane orthogonal to the laser beam L _1. Project a horizontal reference line.

The upper linear beam L ₄ and the lower linear beam L ₂ project a reference spot on a ceiling or a floor, respectively. Beam axes of the upper straight beams L ₄ and the lower linear beam L ₂ is designed always to hold an angle of 90 degrees with respect to the beam axis of the laser beam L ₃ to form a reference line. Therefore, the straight line connecting these two reference spots, always be perpendicular to the reference line is the laser beam L ₃ are formed. Then, by adjusting the position and orientation of the laser surveying device 11 so that these two reference spots are projected to a survey reference point for forming a horizontal line or a vertical line, the horizontal line or the accurate Vertical lines can be formed. Further, by using these two reference spots, a point on the ceiling surface located on a vertical line of a predetermined point on the floor surface can be easily obtained.

However, due to mechanical errors occurring when optical components are attached and variations in the performance of each optical component, the direction of each of the laser beams L _{0 to} L ₄ is set to a design value at the stage of assembling the laser surveying device. May not be as expected. In this case, the beam axes of the upper linear beam L ₄ and the laser beam L ₃ are accurately kept perpendicular by the pentaprism 35, but the angle formed by the beam axes of the lower linear beam L ₂ and the laser beam L ₃ is For these reasons, it is difficult to keep it exactly vertical.

Therefore, the lower linear beam L ₂ and the laser beam L ₃
Doo is such that exactly perpendicular, it is necessary to adjust the beam axis of the lower linear beam L _2. Specifically, the upper linear beam L ₄ and the lower linear beam L ₂ to adjust the beam axis of the lower linear beam L ₂ in parallel. The beam axis of the upper linear beam L ₄ and the laser beam L ₃ is exactly vertically maintained, this way, the laser beam L ₃ and the lower linear beam L ₂ can be adjusted vertically.

[0011] Such parallel adjustment of the beam axes of the upper and lower linear beams is usually performed during the manufacturing process of the laser surveying device.
This is performed before the light projecting device 13 is housed in the main body housing 12. Hereinafter, an example of a conventional parallel adjustment method of the upper and lower linear beams will be described with reference to FIG.

In the conventional method for adjusting the parallelism of a linear beam, two
Use one autocollimator. Autocollimator 91
Reference numerals a and 91b denote transparent plates 92 having collimator lenses 94a and 94b and cross-line charts 93a and 93b intersecting at the focal positions of the collimator lenses 94a and 94b.
a, 92b and eyepieces 95a, 95b. First, as shown in FIG. 7A, the collimator lenses 94 of the two auto collimators 91a and 91b are used.
a and 94b are arranged so as to face each other. From the eyepiece 95a of the autocollimator 91a to the autocollimator 9
Looking through the collimator lens 94b of 1b, the chart 93a of its own autocollimator 91a and the chart 93b of another autocollimator 91b can be seen with the same diopter. Similarly, both charts 93a and 93b can be viewed from the autocollimator 92b with the same diopter.

Next, while looking at one of the auto collimators 91a, the operator sets the auto collimators 91a, 9b so that the two charts 93a, 93b appear to be completely overlapped.
The position and orientation of the optical axis 1b are mutually adjusted. By this adjustment, the optical axes of the autocollimators 91a and 91b can be made parallel.

Next, as shown in FIG. 7B, the light projecting device 13 of the laser surveying device 11 is disposed between the two autocollimators 91a and 91b facing each other. When the laser diode 23 is excited in this state, a lower linear beam L ₂ is emitted from the lower end of the light projecting device 13,
Upper straight line beam L ₄ is emitted from the upper end of the. At this stage, the beam axis of the lower linear beam L ₂ of the beam axis and the upper linear beam L _4, are not adjusted to be parallel.

[0015] Then, looking through the light projecting device 13 from the auto collimator 91a, as the center of the upper linear beam L ₄ of the spot and chart 93a which is emitted from the upper end of the light projecting device 13 appear to overlap completely, throw The position and orientation of the optical device 13 are adjusted. This makes it possible to adjust the beam axis of the optical axis 96a of the autocollimator 91a and the upper linear beam L ₄ in parallel (FIG. 7 (c)).

Next, from the autocollimator 91b to the main body section
20 and the lower straight window emitted from the main body 20
Room L_TwoSpot and the center of chart 93b are completely
The lower straight beam adjuster 29 is attached so that it can be seen
Turn the wedge prisms 29a and 29b
Turn the lower straight beam L_TwoAdjust beam direction
I do. Thereby, the optical axis 96 of the autocollimator 91b is
b and lower straight beam L _TwoAdjust the beam axis of
(FIG. 7D). With this adjustment,
Upper straight beam L_Four, Lower straight beam L_TwoIs the optical axis
Since it is parallel to 96a and 96b, the upper straight beam
L_FourAnd lower straight beam L_TwoAre parallel to each other. More than
Thus, the upper straight beam L_FourBeam axis and lower straight line
Beam L_TwoCan be adjusted in parallel with the beam axis of
You.

[0017]

[SUMMARY OF THE INVENTION] As described above, parallel adjustment of the beam axis of the upper linear beam L ₄ with the lower linear beam L ₂ of the beam axis of the laser surveying device is performed using two autocollimator be able to. However, in this method, since two autocollimators are used facing each other, it is difficult to adjust in a narrow place, and the efficiency is poor because at least two operators are required to adjust the beam axis. There was such a problem.

Further, since a parallel adjustment error between the optical axes of the autocollimator is included, there is a problem that a parallel error between the beam axes of the upper and lower linear beams becomes larger. Further, in the conventional method, since the parallel adjustment is performed while visually observing the laser beam, there are problems such as a decrease in measurement resolution and an influence on the human body.

It is an object of the present invention to provide an adjustment method that can easily perform parallel adjustment of the upper and lower linear beams of the light source device in a space-saving manner.

[0020]

The present invention has the following features to attain the object mentioned above. That is, according to the first aspect of the present invention, the first linear beam and the second linear beam of the light source device for emitting the first linear beam and the second linear beam, which are substantially parallel light, in directions opposite to each other. In the parallel adjustment method for making the axes parallel,
A) directing the first linear beam to a cats optical system that reflects incident light from all directions in a direction parallel to the incident light; b) the first linear beam and the laser reflected by the cats optical system The second linear beam emitted from the surveying instrument is directly incident on the same condensing optical system, and c) the first linear beam and the first linear beam are detected by using beam detecting means arranged near the focal plane of the condensing optical system. Observing the passing point of the second linear beam near the focal plane of the condensing optical system, and d) recognizing each of the first linear beam and the second linear beam near the focal plane of the condensing optical system. The emission direction of the first linear beam and the emission direction of the second linear beam are adjusted such that the passing points overlap.

Here, as the light collecting optical system and the beam detecting means arranged near the focal plane of the light collecting optical system, specifically, an autocollimator or the like can be used.
The autocollimator is an optical measuring device including an eyepiece, a collimator lens as a light-collecting optical system, and a transparent plate having a chart as a beam position detecting means at a focal position of the collimator lens. The difference can be detected, and the angle difference between the light beam incident on the autocollimator and the optical axis of the autocollimator can be detected.

Further, the condensing optical system and the beam detecting means may be a telescope including an objective lens and a focusing plate having a chart at a focal position of the objective lens, or the objective lens and the objective lens. The optical device may be a screen having a chart at the focal position of the objective lens or an optical device provided with an imaging unit.

The chart as the beam detecting means as described above may be any chart indicating the focal position of the condensing optical system. For example, it may be a figure like a crosshair,
It may be a scale or a point. Further, the beam position detecting means includes a two-dimensional position-sensitive detector (Position Sensitive D) provided at the focal position of the condensing optical system.
etector, hereinafter referred to as PSD).

The cats optical system is 18
It is an optical component that emits light at a deflection angle of 0 degrees, and a corner cube or a cat's eye may be used. Further, a prism (deformed corner cube) having a shape obtained by cutting off the apex angle of the corner cube may be used.

According to a second aspect of the present invention, the light source device according to the first aspect rotates a light projecting section that emits substantially parallel light to scan this laser light within a predetermined scanning plane, and furthermore, the first straight line. The beam and the second linear beam are specified by being emitted in directions orthogonal to the scanning surface and opposite to each other.

According to a third aspect of the present invention, the substantially parallel light according to the first or second aspect is specified as being a laser beam. According to a fourth aspect of the present invention, the beam position detecting means according to any one of the first to third aspects is specified as a chart showing a focal position of the light-collecting optical system.

[0027] The invention according to claim 5 is the invention according to claims 1 to 3.
A two-dimensional position-sensitive beam detector installed near the focal plane of the light-collecting optical system with its light-receiving surface orthogonal to the optical axis of the light-collecting optical system. Identified by being a detector.

[0028] The invention according to claim 6 is the invention according to claims 1 to 3.
The cats optical system described in any of the above is a corner cube, and has been specified. According to a seventh aspect of the present invention, the beam position detecting means according to any one of the first to third aspects further comprises a passing point of the first linear beam and the second linear beam near a focal plane of the condensing optical system. Is provided to identify whether or not is the optical axis position of the condensing optical system.

According to an eighth aspect of the present invention, in the seventh aspect, the passing points of the first linear beam and the second linear beam near the focal plane of the condensing optical system are respectively the light of the condensing optical system. This is specified by adjusting the emission direction of the first linear beam and the emission direction of the second linear beam from the laser surveying device so as to overlap the axial position.

According to a ninth aspect of the present invention, in the ninth aspect, the passing point of the first linear beam near the focal plane of the focusing optical system is overlapped with the optical axis position of the focusing optical system. After adjusting the emission direction of the first linear beam from the laser surveying instrument, the passing point of the second linear beam near the focal plane of the condensing optical system is overlapped with the optical axis position of the condensing optical system. Then, the emission direction of the second linear beam from the laser surveying device is adjusted to specify the second linear beam.

According to a tenth aspect of the present invention, in the ninth aspect, the focus of the first linear beam on the condensing optical system in a state where the second linear beam is first blocked from entering the condensing optical system. After adjusting the emission direction of the first linear beam from the laser surveying device so that the passing point near the plane overlaps the optical axis position of the light-collecting optical system, the light-collecting optical system of the first linear beam is adjusted. The laser surveying of the second linear beam is performed such that a passing point of the second linear beam near the focal plane of the condensing optical system overlaps with an optical axis position of the condensing optical system in a state where incidence on the second linear beam is blocked. It is specified by adjusting the emission direction from the device.

According to an eleventh aspect of the present invention, the light source device according to the ninth or tenth aspect has an emission direction adjusting unit for variably adjusting the emission direction of the second linear beam,
First, the direction of the light source device itself is adjusted such that the passing point of the first linear beam near the focal plane of the condensing optical system overlaps the optical axis position of the condensing optical system, and then the second linear beam is adjusted. It is specified by adjusting the emission direction adjusting unit such that a passing point of the beam near the focal plane of the condensing optical system overlaps with the optical axis position of the condensing optical system.

According to a twelfth aspect of the present invention, in the light source device according to the eleventh aspect, the light source device rotates in a plane parallel to the scanning surface, and a part of the laser light incident along the rotation axis is converted into the first straight line. Specified by having a pentaprism having a first reflecting surface that transmits as a beam and reflects the remainder, and a second reflecting surface that reflects the laser light reflected by the first reflecting surface in the direction of the scanning surface. It is.

According to a thirteenth aspect of the present invention, in the light source device of the twelfth aspect, there is provided a beam splitter for separating a laser beam emitted from a laser light source into a laser beam incident on the pentaprism and the second linear beam. By having, it is specified.

[0035]

Embodiments of the present invention will be described below with reference to the drawings. (I) Configuration of Laser Surveying Apparatus Before describing each example of the parallel beam adjusting method according to the present embodiment, the configuration of a laser surveying apparatus (light source apparatus) as an adjustment target will be described.

FIG. 5 is a sectional view showing the configuration of a laser surveying apparatus to which the method for adjusting a straight beam according to the present embodiment is applied. FIG. 5 shows a state where the laser surveying device is set up in the vertical direction in order to perform laser beam scanning in the horizontal direction.

As shown in FIG. 5, the laser surveying device 11
The main body housing 12 has a substantially cylindrical shape, a light projecting device 13 housed in the main body housing 12 with its rotary light projecting portion 15 protruding from an upper end surface 12 b of the main body housing 12, It comprises an upper housing 16 surrounding the rotary light projecting section 15 of the device 13 and a battery case 17 provided at the bottom of the main body housing 12 for accommodating a driving battery of the light projecting device 13.

[Main Body Housing] On the upper end surface 12b of the substantially cylindrical main body housing 12, a mortar-shaped sliding guide portion 19 is formed coaxially with its central axis. A circular sliding hole 19a is formed on the bottom surface of the sliding guide portion 19 coaxially with its central axis.

A bracket 42 is formed on the inner surface of the main body housing 12 on the side of the sliding guide portion 19 so as to project toward the central axis. The two brackets 42 are formed at positions shifted from each other by 90 degrees about the center axis of the main body housing 12. Also,
A support projection 51 is formed on the outer surface of the sliding guide portion 19 (the surface inside the main body housing 12) in a direction that bisects the angle formed between these two brackets 42 and the central axis.

Also, on the lower end surface of the main body housing 12,
A circular hole 12a is formed coaxially with the central axis.

[Battery case] Battery case 1
7 has a cylindrical shape having the same diameter as the outer diameter of the main body housing 12. At the center of the upper end surface and the lower end surface of the battery case 17, circular holes 17a and 17b having the same diameter as the circular holes 12a formed on the lower end surface of the main body housing 12 are formed.

[Upper Housing] The upper housing 16 has a box shape coaxial with the center axis of the main body housing 12, and has four windows (emission portions) 16b made of a transparent member on four side surfaces extending in the same direction as the center axis. This window 16b
The lid 16c is formed of an opaque member that closes the end face of the cover 16c. A circular hole 16a into which the transparent member 36 is inserted is formed at the center of the lid 16c.

[Light Projection Device] The light projection device 13 is composed of a rotating light projecting portion 15 and a main body portion 20 which rotatably and coaxially holds the rotating light projecting portion 15 via a bearing 10. . The main body 20 has a hollow laser light path 20b penetrating the whole along the central axis thereof, and a laser light path 20 branched at a right angle from the laser light path 20b.
a are formed. In addition, the rotary light emitting unit 15 includes:
Hollow laser light paths 15a, 15a, which are coaxially connected to the laser light path 20b and are formed coaxially with the rotation axis thereof.
And a pentaprism housing portion 15b communicating with the laser beam path 15a and having openings in the end face direction and sideways.
Are formed.

(Laser Emission Optical System) The optical configuration of the laser emission optical system built in each of the laser light paths 20a, 20b and 15a will be described with reference to FIGS.

The laser light paths 20a and 20a in the main body 20
A polarization beam splitter 27 is fixed at the intersection of 0b. A laser diode 23 is fixed to an end face of the laser light path 20a, and a collimator lens 24 and an anamorphic lens 1
8 is fixed. Also, wedge prisms 29a and 29b are provided on the battery case side in the laser beam path 20b.
Is fixed to the lower linear beam optical axis adjuster 29 (emission direction adjuster) in which is stored. Also, the laser light path 20b
Λ / 4 plate 28, semi-permeable film 28 a, front lens group 3, in that order from the polarization beam splitter 27 side.
The first and rear group lenses 32 are fixed. Further, a pentaprism 35 and a wedge-shaped prism 34 are fixed in the pentaprism accommodating portion 15b of the rotary light projecting portion 15.

Laser diode 23 as laser light source
Oscillates a laser beam that is linearly polarized in an S-polarized plane (plane perpendicular to the paper surface) with respect to the polarization splitting surface 27a of the polarization beam splitter 27. The collimator lens 24 is a lens that converts the laser light emitted from the laser diode 23 into parallel light. The anamorphic lens 18 is a lens for correcting the cross-sectional shape of the laser beam transmitted through the collimator lens 24 to a perfect circle.

[0047] In the polarizing beam splitter 27, the polarization splitting surface 27a inclined 45 degrees to lambda / 4 plate 28 side with respect to the beam axis of the laser beam L ₀ from the laser diode 23 is formed. This polarization splitting surface 27a converts S-polarized light into 10
It has the property of reflecting 0% and transmitting 100% of P-polarized light. Therefore, the laser light transmitted through the anamorphic lens 18 is 100% λ.
The light is reflected to the / 4 plate 28 side.

The λ / 4 plate 28 is arranged such that the direction of the optical axis is tilted at 45 degrees with respect to the P-polarized plane (plane parallel to the paper plane) with respect to the polarization splitting plane 27 a with the optical axis as the center. Affixed to Therefore, the λ / 4 plate 28
Converts incident linearly polarized light into circularly polarized light. This λ / 4
On the side surface of the pentaprism 35 of the plate 28, a partially transmitting film 28a that reflects a part of the laser light toward the polarization beam splitter 27 is formed. The circularly polarized laser light reflected by the semi-permeable film 28a re-enters the λ / 4 plate 28, is converted into P-polarized light, and passes through the polarization beam splitter 27.

The laser beam (lower linear beam) L ₂ transmitted through the polarization beam splitter 27 passes through the wedge prisms 29 a and 29 b and is emitted from the lower end of the light projecting device 13.

Each of the wedge prisms 29a and 29b is an optical element composed of planes opposed to each other at a slight angle from parallel. Beam axis of the lower linear beam L ₂ are wedge prism 29a, is slightly bent by 29b. Accordingly, each wedge prism 29a as an axis the central axis of the body portion 20, 29 b to by rotating respectively, it is possible to perform the angular adjustment of the beam axis of the lower linear beam L _2.

On the other hand, the front lens group 31 on which the laser beam transmitted through the partially transmitting film 28a is incident is a negative lens, and the sliding cylindrical member 3 inserted in the laser beam path 20b so as to be able to move forward and backward.
It is kept within 0. The rear lens group 32 on which the laser light diverged by the front lens group 31 enters is a positive lens, and is fixed in the laser light path 20b. Therefore, the front group lens 31 and the rear group lens 32
Constitutes a beam expander for expanding the beam diameter of the incident laser light. Then, by moving the front lens group 31, the formation position of the beam waist can be changed.

The pentaprism 35 on which the laser beam transmitted through the rear lens group 32 is incident is fixed in the pentaprism housing portion 15b of the rotary light projecting portion 15 so as to rotate integrally with the rotary light projecting portion 15. I have. This penta prism 3
Reference numeral 5 denotes a light incident surface 35c on which the laser light is incident, a first reflecting surface 35a inclined by 22.5 degrees with respect to the light incident surface 35c, and on which the laser light incident from the light incident surface 35c is incident. The second reflecting surface 35b, which is inclined 45 degrees with respect to the first reflecting surface 35a and reflects the laser light reflected by the first reflecting surface again, is perpendicular to the light incident surface 35c. and a light emitting surface 35d that emits the laser beam L ₃ reflected by the second reflecting surface 35b. Therefore, the pentaprism 35 is shown in FIGS.
Even inclined in a plane, the angle between the beam axis of the beam axis and the laser light emitted L ₃ of the laser beam L ₁ is always kept at 90 degrees. In addition, since the enhanced reflection film is formed on the second reflection surface 35b by aluminum vapor deposition, the laser light is internally reflected by 100% on the second reflection surface 35b. On the other hand, the first reflective surface 35a has a reflectance of 70%.
~ 80% of the partially permeable membrane 14 is formed.
Thus, 20-30% of the laser beam (upper straight line beam) L _4, transmitted through the first reflecting surface 35a, passes through the wedge prism 34, is emitted from the upper end of the light projecting device 13. Upper straight line beam L ₄ are, since it is emitted in the laser beam L ₁ and coaxially between the beam axis of the upper linear beam L ₄ and the laser beam L ₃ it is also kept at the 90 degrees.

On the other hand, the light exit surface 35 of the pentaprism 35
The laser beam L ₃ emitted from the d is, the light projecting window 33 opened in the side of the pentaprism housing portion 15b, and passes through the window 16b of the upper housing 16, is emitted. The laser beam L ₃ emitted in this way, by rotating in a plane rotated light projecting unit 15 by the pentagonal prism 35 is perpendicular to the laser beam L ₁ (a predetermined scanning plane), vertical, etc. to the wall or Project a horizontal reference line.

(Tilting Mechanism) Next, returning to FIG. 5, a structure for enabling the light projecting device 13 to be tiltable in all directions in the main body housing 12 will be described.

The sliding guide 1 is provided on the upper part of the main body 20.
A swelling portion 21 held inside 9 is formed. The bulging portion 21 is composed of a cylindrical portion having an outer diameter larger than the inner diameter of the sliding hole 19a, and a hemispherical portion connecting the large-diameter cylindrical portion and another portion. Therefore, the bulging portion 21 is held without falling off from the sliding hole 19a in a state where the hemispherical surface portion is in contact with the sliding hole 19a. Since the holding of the light emitting device 13 to the main body housing 12 is determined by the contact of this portion, the entire light emitting device 13 is rotated by rotating the hemispherical portion of the bulging portion 21 in the sliding hole 19a. It can be tilted in any direction about the center of the hemisphere.

A mechanical configuration for performing this tilt will be described. First, a tension spring 52 is stretched between a portion of the main body 20 below the protrusion 21 and the support protrusion 51. Therefore, a rotational torque by the tension spring 52 is applied to the bulging portion 21.

The sliding guide 19 has two slits 19b in the same direction as the brackets 42 provided at right angles to the center axis. A drive arm 37 is formed at the uppermost portion of the bulging portion 21 so as to project in the same direction as each slit 19b when viewed from the center axis thereof. Each drive arm 37 is inclined toward the lower direction, and enters the main body housing 12 through the corresponding slit 19b. At the tip of each of the drive arms 37, a pin 40 is formed which is directed in a direction radiating from the spherical center of the bulging portion 21.

On the other hand, an adjusting screw 45 is provided between each bracket 42 and the upper end surface 12b of the main housing 12.
Are rotatably suspended in parallel with the central axis of the main body housing 12. Each adjustment screw 45 is a pinion 4
9 and a transmission gear 50, which is rotated by a level adjustment motor 44 fixed on each bracket 42. An adjusting nut 46 is screwed into each adjusting screw 45. On the outer surface of the adjusting nut 46, a pin 4
An operating pin 47 that comes into contact with 0 protrudes and restricts rotation of the bulging portion 21.

Since the rotation of each adjustment nut 46 with respect to the main body housing 12 is restricted by a rotation restricting means (not shown), when the adjustment screw 45 is rotationally driven by the level adjustment motor 44, it moves up and down. . Therefore, the pins 40 elastically mounted on the respective operating pins 47 move up and down following this elevating, so that the bulging portion 21 rotates in any direction according to the elevating direction.

The microcomputer 82 detects the inclination of the light emitting device 13 in the Y direction (direction orthogonal to the paper surface) in the Y direction, and detects the inclination of the light emitting device 13 in the X direction (the paper surface direction). The tilt detection signal from the X-direction level detection sensor 73 is received, and the rotation of the level adjustment motor 44 is controlled so that the axis of the light projecting device 13 is oriented in the vertical direction.

(Rotating Mechanism) Next, a mechanism as a rotating means for rotating the rotary light projecting section 15 with respect to the main body section 20 will be described.

On the outer peripheral surface of the rotary light projecting unit 15 rotatably connected to the main body 20 via the bearing 10,
The gear 69 is fixed. On the other hand, a bracket 65 protruding outward is provided on the upper end surface of the bulging portion 21 of the main body 20. The light emitting section rotating motor 66 is fixed to the bracket 65, and a pinion 67 attached to a rotating shaft of the light emitting section rotating motor 66 meshes with a gear 69 of the rotary light emitting section 15. The microcomputer 82 controls the stop or the rotation of the light projecting unit rotation motor 66. That is, when stopping the light projection unit rotation motor 66, the beam axis of the laser beam L ₃ emitted from the light projecting window 33 is stopped while facing certain direction. On the other hand, when the light-emitting unit rotating motor 66 is rotated, the laser light L ₃ emitted from the light-emitting window 33 is emitted.
Since the emission direction of rotation about the axis of rotation of the rotary light projecting unit 15, as long as the beam axis of the laser beam L ₁ is consistent with the rotation shaft, a reference plane perpendicular to the rotary shaft is formed.

(Focusing Mechanism) Next, a structure for driving the front lens group 31 in the optical axis direction will be described.

In the vicinity of the movable range of the sliding cylindrical member 30 in the main body 20 of the light projecting device 13, a slit 63 penetrating the inner and outer surfaces thereof is formed. A bracket 53 and a bracket 55 are formed on the outer surface of the main body 20 so as to sandwich the slit 63 from above and below. A focusing screw 56 is rotatably hung between the brackets 53 and 55 in parallel with the central axis of the main body 20. The focusing screw 56 includes a focusing nut 57.
Is screwed. The other end of the transmission link 62 having one end fixed to the sliding cylindrical member 30 through the slit 63 is fixed to the focusing nut 57.

The focusing screw 56 is driven to rotate by a focusing motor 59 fixed on a bracket 53 via a pinion 60 and a transmission gear 61. The rotation of the focusing motor 59 is controlled by the microcomputer 82. That is, by appropriately controlling the rotation of the focusing motor 59 according to the distance to the wall surface, the front lens 31 is moved to a position where a beam waist can be formed on the wall surface.
Can be moved forward and backward.

(Ii) Parallel Adjustment Method of Straight Beam Next, a description will be given of a parallel adjustment method of the straight beam of the laser surveying apparatus 11 configured as described above.

The beam axis of the lower linear beam L ₂ emitted vertically downward from the lower end of the light emitting device 13 (light emitting portion), and the upper linear beam L emitted vertically upward from the upper end of the light emitting device 13 _{The four} beam axes are designed to be coaxial with each other, but when assembling the actual apparatus, a relative inclination of about several tens of minutes is inevitably generated.
In order to correct this inclination, on completion of assembly of the light projecting device 13, prior to incorporation into the body housing 12, performs parallel adjustment of the upper linear beam L ₄ with the lower linear beam L _2. Hereinafter, a specific example of the optical axis parallel adjustment method according to the present embodiment will be described.

<First Embodiment> FIG. 1 is a perspective view showing the arrangement of instruments used for a method for adjusting the beam axis of the upper linear beam L _{4 and} the beam axis of the lower linear beam L ₂ in parallel according to the first embodiment. is there.

In this embodiment, an autocollimator 91 is used as a condensing optical system and a beam detecting means, and a corner cube 90 is used as a cats optical system. Further, in this embodiment, the first straight beam and upper linear beam L _4, second
It has a straight beam and lower linear beam L _2.

In the present embodiment, prior to the adjustment operation, first, the light projecting device 13 (corresponding to the light source device described in the claims) of the laser surveying device 11 is controlled by the upper and lower linear beams L ₂ and L _4. Are set on the clamper C installed on the test object table T1 such that the light beams are emitted in a substantially horizontal direction. The clamper C is mounted on the light emitting device 13
Can be tilted in any direction within some tolerance. Next, the auto collimator 91 is moved to the stand S so that the upper linear beam L ₄ is incident on the auto collimator 91.
Install using. The autocollimator 91 is provided with a collimator lens 94 and a cross-shaped chart 9 which intersects at the focal position of the collimator lens 94, similarly to the conventional one.
3 is provided.

Then, the corner cube 90 is moved so that the lower linear beam L ₂ enters the corner cube 90.
Installed on the corner cube table T2. Therefore,
As shown in FIG. 1, the light projecting device 13 is arranged near a straight line connecting the autocollimator 91 and the corner cube 90. After these preparations are completed, the optical axis parallel adjustment work is performed.

FIG. 2 is a schematic diagram showing the procedure of the optical axis parallel adjustment method according to the first embodiment. As shown in FIG. 2, when the eyepiece 95 of the autocollimator 91 arranged as shown in FIG. 1 is viewed, the chart 93 drawn on the transparent plate 92 and the autocollimator 91 emitted from the light projecting device 13 of the spot upper linear beam L ₄ which is directly incident on the collimator lens 94 can be visually recognized. At the same time, the lower linear beam L ₂ spots incident on the collimator lens 94 of the light projecting device 13 is bent 180 degrees by being emitted corner cube 90 from the autocollimator 91 can be visually recognized. Therefore, first, we focus on the spot upper linear beam L _4, and the center of the spot and chart 93 of the upper straight line beam L ₄ is to look completely overlap each other, to adjust the orientation of the light projector 13. Here, as described above, the center of the chart 93 is located at the focal position of the collimator lens 94. Accordingly, only light rays parallel to the optical axis 96 of the collimator lens 94 pass through the focal point of the collimator lens 94. Thus, by matching the spot of the upper linear beam L ₄ in the center of the chart 93, it is possible to collimate the beam axis of the optical axis 96 and the upper linear beam L ₄ of the collimator lens 94.

Next, the lower linear beam L_TwoNote on spot
This lower straight beam L_TwoThe spot is on the chart
93 center and upper straight beam L_FourThe spot and completely
The lower linear beam optical axis adjuster 29 is shown so as to overlap.
Wedge prisms 29a and 29 in (emission direction adjustment unit)
Adjust the rotation of b. Lower straight beam L_TwoIs the corner queue
It is bent exactly 180 degrees by the bush 90. Obedience
The lower straight beam L _TwoIs the light of the collimator lens 94
Only when it is parallel to axis 96, lower linear beam L_TwoBut
It passes through the focus of the remeter lens 94. Therefore, the lower straight line
Beam L_TwoTo the center of chart 93
As a result, the optical axis 96 of the collimator lens 94 and the lower
Straight beam L_TwoBeam axis can be parallel
You. This lower straight beam L_TwoAdjust the beam axis of the upper part
Straight beam L_FourAnd the optical axis 96 of the collimator lens 94
This is done without disrupting the parallel relationship. For this reason, this work
Work, the upper straight beam L_FourBeam axis and
Lower straight beam L_TwoParallel to the beam axis with an accuracy of a few seconds
Adjusted.

As described above, according to the present embodiment, only one
The upper and lower linear beams L_Two, L_Four
Can be adjusted in parallel.
Space-saving, parallel adjustment of straight beam by small number of people
It works. <Second Embodiment> The second embodiment is similar to the first embodiment.
Upper linear beam L incident on the remeter lens 94_Four,under
Partial straight beam L_TwoFrom the mechanical shutter or liquid crystal shutter
Characterized by alternately blocking light using a light blocking member
Other parts are the same. That is, first, FIG.
, The lower straight beam as the second straight beam
L _TwoIs blocked using the light blocking member 97a, and the first linear beam is blocked.
Upper straight beam L as_FourOnly the collimator lens 9
4 And the upper straight beam L_FourThe spot
And the center of the chart 93 appear to overlap completely
Next, the direction of the main body 20 is adjusted. This allows auto
The optical axis 96 of the collimator 91 and the upper linear beam L _FourBee
Axis becomes parallel to the system axis.

Next, as shown in FIG.
Beam L_FourIs blocked by using the light shielding member 97b,
Beam L_TwoOnly the light enters the collimator lens 94.
And the lower straight beam L_TwoSpots and charts 93
So that it looks completely overlapped with the center of
Wedge prisms 29a and 29b in the optical axis adjustment unit 29
To adjust. Thereby, the optical axis of the autocollimator 91
96 and lower straight beam L_TwoIs parallel to the beam axis.
At the same time, the upper straight beam L_FourAnd lower straight beam L _TwoBee
The system axis can also be adjusted in parallel.

As described above, according to the present embodiment, the parallel adjustment of the upper and lower linear beams can be performed using one autocollimator 91, as in the first embodiment. The parallel adjustment of the straight beam can be performed with a small number of people in a small space. Further, the light shielding members 97a, 97
b because it can separately observe vertical linear beam with, there is no fear of confusing the spot upper linear beam L ₄ and the lower linear beam L ₂ during observation. <Third Embodiment> In the third embodiment, instead of using the autocollimator 91 in the method of the second embodiment, (the objective lens 94 'is placed on the image-side focal plane of the objective lens 94' as a condensing optical system). (In a state perpendicular to the optical axis), using a detecting device 98 provided with a two-dimensional PSD as a beam detecting means, and the other parts are the same as those in the second embodiment.

In the third embodiment, the detection device 98 having the above-described configuration is installed by a stand S instead of the autocollimator 91 of the first and second embodiments. Then, as shown in FIG. 4 (a), blocked with a lower linear beam L ₂ light shielding member 97a, is incident only upper linear beam L ₄ to the objective lens 94 of the detection device 98 '. Then, the upper linear beam L transmitted through the objective lens 94 '
₄ is a two-dimensional PSD 99 passing through the inside of the lens barrel of the detection device 98.
Incident on. Spot position of the upper linear beam L ₄ incident on the two-dimensional PSD99 is calculated based on the current ratio to be outputted from the output terminals of the two-dimensional PSD. Therefore, the operator adjusts the direction of the light projecting device 13 so that the calculated spot position matches the optical axis position of the objective lens 94 '. Thus, the 'optical axis 96' of the objective lens 94 and the upper linear beam L ₄ are parallel.

Next, as shown in FIG. 4B, the upper linear beam L ₄ is cut off using the light blocking member 97 b, and only the lower linear beam L ₂ is made incident on the objective lens 94 ′ of the detector 98. Then, as in the upper linear beam L _4, the optical axes of the two-dimensional detecting the spot position of the lower linear beam L ₂ by PSD99, the spot objective lens 94 '9
The wedge prisms 29a and 29b in the lower linear beam adjustment unit 29 are rotationally adjusted so as to be positioned above 6 '. Thus, the optical axis 96 'of the detector 98 and the lower linear beam L ₂ are parallel. At the same time, it is possible to beam axis of the upper linear beam L ₄ and the lower linear beam L ₂ is also adjusted in parallel.

As described above, according to the present embodiment, the parallel adjustment of the upper and lower linear beams L ₂ and L ₄ can be performed by using one detector 98, so that the space can be saved as compared with the conventional method. Thus, the parallel adjustment of the linear beam can be performed by a small number of people. In addition, the spot position of the upper and lower linear beams is determined by two-dimensional P
Since the detection is performed using the SD, the parallel adjustment can be performed with higher accuracy than the visual adjustment. Further, since there is no need to visually observe the spot of the laser beam, there is no fear of affecting the human body.

[0080]

According to the optical axis parallel adjusting method of the present invention,
Parallel adjustment of the upper and lower linear beams of the light source device can be easily performed in a small space.

[Brief description of the drawings]

FIG. 1 is a perspective view showing the arrangement of tools used for a method for adjusting a straight beam in parallel according to a first embodiment of the present invention.

FIG. 2 is an explanatory diagram of a method for adjusting the parallelism of a straight beam according to the first embodiment of the present invention.

FIG. 3 is an explanatory diagram of a method for adjusting the parallelism of a linear beam according to a second embodiment of the present invention.

FIG. 4 is an explanatory diagram of a method for adjusting the parallelism of a linear beam according to a third embodiment of the present invention.

FIG. 5 is a cross-sectional view of a laser surveying device to which the method for adjusting the parallelism of a straight beam according to the present invention is applied.

6 is an optical configuration diagram of the laser emission optical system of FIG.

FIG. 7 is a diagram showing a procedure of a conventional parallel beam adjusting method for a linear beam.

[Description of Signs] 15 Projection device 29 Lower linear beam optical axis adjustment unit 90 Corner cube 91 Autocollimator 92 Transparent plate 93 Chart 94 Collimator lens 94 'Objective lens 95 Eyepiece lenses 96, 96' Optical axis 97a, 97b Light shielding member 98 Detector 99 Two-dimensional PSD L ₂ Lower linear beam L ₄ Upper linear beam

Claims (13)

[Claims] 1. A light source device for emitting a first linear beam and a second linear beam consisting of substantially parallel light in directions opposite to each other for parallelizing the first linear beam and the second linear beam. A parallel adjustment method, wherein the first linear beam is directly incident on a cats optical system that reflects incident light from all directions in a direction parallel to the incident light, and the first straight line reflected by the cats optical system is provided. The beam and the second linear beam emitted from the light source device are directly incident on the same condensing optical system, and the first linear beam is detected by using a beam detecting unit disposed near a focal plane of the condensing optical system. And observing the passing point of the second linear beam near the focal plane of the focusing optical system, and passing each of the first linear beam and the second linear beam near the focal plane of the focusing optical system. Dots overlap like,
A method for adjusting the parallelism of a linear beam, comprising adjusting an emission direction of the first linear beam and an emission direction of the second linear beam, respectively. 2. The light source device according to claim 1, further comprising: rotating a light projecting unit that emits substantially parallel light, scans the substantially parallel light within a predetermined scanning plane, and forms the first linear beam and the second linear beam. 2. The method according to claim 1, wherein the light is emitted in directions perpendicular to the scanning plane and opposite to each other. 3. The method according to claim 1, wherein the substantially parallel light is a laser beam. 4. A method according to claim 1, wherein said beam detecting means is a chart showing a focus position of said condensing optical system. 5. A two-dimensional position-sensitive detector, wherein said beam detecting means is installed near a focal plane of said condensing optical system with its light receiving surface orthogonal to the optical axis of said condensing optical system. 4. The parallel beam adjusting method according to claim 1, wherein: 6. The method according to claim 1, wherein the cats optical system is a corner cube. 7. A system according to claim 1, wherein said beam detecting means determines whether a passing point of said first linear beam and said second linear beam near a focal plane of said condensing optical system is an optical axis position of said condensing optical system. The method for adjusting the parallelism of a linear beam according to any one of claims 1 to 3, wherein the method is used for identification of a linear beam. 8. The first linear beam and the second linear beam so that passing points of the condensing optical system near the focal plane of the condensing optical system respectively overlap the optical axis positions of the condensing optical system. 8. The method according to claim 7, wherein an emission direction of the linear beam and an emission direction of the second linear beam from the light source device are adjusted. 9. The light source device of the first linear beam first such that a passing point of the first linear beam near the focal plane of the condensing optical system overlaps an optical axis position of the condensing optical system. The light source device of the second linear beam is adjusted such that a passing point of the second linear beam near the focal plane of the condensing optical system overlaps with the optical axis position of the condensing optical system after adjusting the emission direction of the second linear beam. 9. A parallel beam adjusting method according to claim 8, wherein an emission direction from the light beam is adjusted. 10. A point where the first linear beam passes near the focal plane of the condensing optical system while the incidence of the second linear beam on the condensing optical system is first blocked. After adjusting the emission direction of the first linear beam from the light source device so as to overlap the optical axis position of the system, the second linear beam is blocked in a state where the first linear beam is incident on the condensing optical system. The emission direction of the second linear beam from the light source device is adjusted such that a passing point near the focal plane of the light-collecting optical system overlaps with the optical axis position of the light-collecting optical system. Item 10. The method for adjusting parallelism of a linear beam according to Item 9. 11. The light source device has an emission direction adjustment unit for variably adjusting the emission direction of the second linear beam, and firstly, a focal plane of the condensing optical system for the first linear beam. After adjusting the direction of the light source device itself such that the passing point in the vicinity overlaps the optical axis position of the condensing optical system, the passing point of the second linear beam near the focal plane of the condensing optical system becomes 11. The method according to claim 9, wherein the emission direction adjustment unit is adjusted so as to overlap an optical axis position of the light-collecting optical system. 12. The light source device rotates in a plane parallel to the scanning surface, and transmits a part of the laser light incident along the rotation axis as the first linear beam and reflects the rest. 2. A pentaprism having a first reflecting surface and a second reflecting surface for reflecting substantially parallel light reflected by the first reflecting surface in a direction of the scanning surface.
2. The method for adjusting parallelism of a linear beam according to 1. 13. The light source device according to claim 1, further comprising a beam splitter for separating substantially parallel light emitted from the light source into substantially parallel light incident on the pentaprism and the second linear beam. 13. The method for adjusting parallelism of a linear beam according to item 12.