JPH11297455A - Discharge electrode needle - Google Patents
Discharge electrode needleInfo
- Publication number
- JPH11297455A JPH11297455A JP10301998A JP10301998A JPH11297455A JP H11297455 A JPH11297455 A JP H11297455A JP 10301998 A JP10301998 A JP 10301998A JP 10301998 A JP10301998 A JP 10301998A JP H11297455 A JPH11297455 A JP H11297455A
- Authority
- JP
- Japan
- Prior art keywords
- needle
- main body
- zirconium oxide
- male screw
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Elimination Of Static Electricity (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、除電器等に使用さ
れる放電電極針に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a discharge electrode needle used for a static eliminator or the like.
【0002】[0002]
【従来の技術】従来の放電電極針の材質は、大半がステ
ンレス又はタングステンであり、これらの金属は放電に
より摩耗し易いために発塵し、特に半導体製造工程で
は、発塵した金属粒子が半導体デバイスなどに付着して
トラブルの要因となっている。2. Description of the Related Art The material of conventional discharge electrode needles is mostly stainless steel or tungsten, and these metals are liable to be abraded by electric discharge, so that they generate dust. Adhered to devices etc., causing trouble.
【0003】[0003]
【発明が解決しようとする課題】本発明の課題は、耐摩
耗性が高い金属材質であるため摩耗による金属粒子の発
塵が少なく、しかも安定した放電特性を長時間継続で
き、かつ電撃も少ない放電電極針を提供することにあ
る。SUMMARY OF THE INVENTION An object of the present invention is to reduce the generation of metal particles due to abrasion due to the use of a metal material having high abrasion resistance, to maintain a stable discharge characteristic for a long time, and to reduce electric shock. It is to provide a discharge electrode needle.
【0004】[0004]
【課題を解決するための手段】本発明の放電電極針は、
固有抵抗値が5MΩ/cm〜20MΩ/cmの酸化ジル
コニウムで針本体を製作したことを特徴とする。According to the present invention, there is provided a discharge electrode needle comprising:
The needle body is made of zirconium oxide having a specific resistance of 5 MΩ / cm to 20 MΩ / cm.
【0005】酸化ジルコニウムは、耐摩耗性が高い金属
である上に、それ自体に比較的高い固有抵抗があるの
で、放電による摩耗が少ないとともに、火花放電などの
異常放電を抑制して、安定した放電特性を維持できる。
酸化ジルコニウムの固有抵抗値が5MΩ/cm未満であ
ると、電撃が生じやすくなり、また20MΩ/cmを越
えると、放電電流が少なくなってイオン生成性能が低下
する。Zirconium oxide is a metal having high abrasion resistance and has a relatively high specific resistance itself. Therefore, zirconium oxide has a small amount of abrasion due to discharge and suppresses abnormal discharge such as spark discharge, and is stable. Discharge characteristics can be maintained.
If the specific resistance of zirconium oxide is less than 5 MΩ / cm, electric shock is likely to occur, and if it exceeds 20 MΩ / cm, the discharge current is reduced and the ion generation performance is reduced.
【0006】本発明の放電電極針は、固有抵抗値が5M
Ω/cm〜20MΩ/cmの酸化ジルコニウムで針本体
を製作し、該針本体の基端部に雄ネジを設け、この雄ネ
ジをステンレス製の短管状針ホルダの雌ネジに螺合させ
て針本体を短管状針ホルダに保持した構造にして使用す
るのが良い。[0006] The discharge electrode needle of the present invention has a specific resistance of 5M.
A needle main body is manufactured from Ω / cm to 20 MΩ / cm zirconium oxide, a male screw is provided at a base end of the needle main body, and the male screw is screwed into a female screw of a short tubular needle holder made of stainless steel. It is preferable to use the main body in a structure held by a short tubular needle holder.
【0007】[0007]
【発明の実施の形態】次に、本発明の実施の形態につい
て図面を参照して説明する。Next, embodiments of the present invention will be described with reference to the drawings.
【0008】図1は、本発明による放電電極針の針本体
1を示す。この針本体1は、固有抵抗値が5MΩ/cm
〜20MΩ/cmの酸化ジルコニウムで製作され、その
基端部の外周に雄ネジ2が設けられている。FIG. 1 shows a needle body 1 of a discharge electrode needle according to the present invention. The needle body 1 has a specific resistance of 5 MΩ / cm.
It is made of zirconium oxide of 2020 MΩ / cm, and is provided with a male screw 2 on the outer periphery of the base end.
【0009】図2は、針本体1を保持する針ホルダ3を
示す。この針ホルダ3は、ステンレス製の短管で構成さ
れ、その内周面の半部には雌ネジ4が設けられている。
この雌ネジ4に針本体1の雄ネジ2を螺合させることに
より、針本体1は針ホルダ3に着脱可能(交換自在)に
保持して使用される。FIG. 2 shows a needle holder 3 for holding the needle body 1. The needle holder 3 is formed of a short tube made of stainless steel, and a female screw 4 is provided on a half portion of the inner peripheral surface thereof.
By screwing the male screw 2 of the needle main body 1 into the female screw 4, the needle main body 1 is used while being detachably (exchangeably) held on the needle holder 3.
【0010】図3は、上記の放電電極針をエアーガン式
除電器に適用した例を示す。針本体1を針ホルダ3に保
持した放電電極針は、接地側電極となるノズル4内の中
央に設置される。この除電器では、直流電源5により発
振回路6を発振させ、高周波トランス7から高周波の高
電圧を出力して、放電電流制御のためのコンデンサ8及
び抵抗9を介して針ホルダ3に印加することにより、針
本体1とノズル4との間で放電させ、その放電により生
成されたプラス・マイナスのイオンをエアーと共に除電
対象物に吹き付けるようになっている。FIG. 3 shows an example in which the above-mentioned discharge electrode needle is applied to an air gun type static eliminator. The discharge electrode needle holding the needle body 1 in the needle holder 3 is installed at the center of the nozzle 4 serving as the ground electrode. In this static eliminator, an oscillating circuit 6 is oscillated by a DC power supply 5, a high-frequency high voltage is output from a high-frequency transformer 7, and applied to the needle holder 3 via a capacitor 8 and a resistor 9 for controlling discharge current. As a result, a discharge is generated between the needle body 1 and the nozzle 4, and positive and negative ions generated by the discharge are blown to the object to be neutralized together with air.
【0011】[0011]
【発明の効果】本発明によれば、針本体を固有抵抗値が
5MΩ/cm〜20MΩ/cmの酸化ジルコニウムで製
作したので、次のような効果が得られる。 酸化ジルコニウムは耐摩耗性が高いため、摩耗によ
る金属粒子の発塵が殆ど無い。 針本体の材質として、固有抵抗値が比較的高い金属
である酸化ジルコニウムを選んだので、針自体の抵抗値
によって火花放電などの異常放電を抑制して、長時間に
わたり安定した放電特性を維持できる。 酸化ジルコニウムの中でも固有抵抗値が5MΩ/c
m〜20MΩ/cmの酸化ジルコニウムを選んだので、
除電に必要な放電電流を十分に確保しながら、針自体に
より電撃を防止できる。 酸化ジルコニウムは強度も高いため、取扱中の破損
が少ない。According to the present invention, since the needle body is made of zirconium oxide having a specific resistance of 5 MΩ / cm to 20 MΩ / cm, the following effects can be obtained. Since zirconium oxide has high abrasion resistance, there is almost no generation of metal particles due to abrasion. Since zirconium oxide, a metal with a relatively high specific resistance, was selected as the material of the needle body, abnormal discharge such as spark discharge can be suppressed by the resistance value of the needle itself, and stable discharge characteristics can be maintained for a long time. . Among the zirconium oxides, the specific resistance value is 5 MΩ / c
Since we chose zirconium oxide of m ~ 20MΩ / cm,
Electric shock can be prevented by the needle itself while sufficiently securing a discharge current required for static elimination. Since zirconium oxide has high strength, there is little breakage during handling.
【0012】 針本体の基端部に雄ネジを設け、この
雄ネジをステンレス製の短管状針ホルダの雌ネジに螺合
させて針本体を短管状針ホルダに保持することにより、
針本体の交換及び高電圧電源との接続を容易に行える。[0012] An external thread is provided at the base end of the needle main body, and the external thread is screwed into the internal thread of the stainless steel short tubular needle holder to hold the needle main body in the short tubular needle holder.
Replacement of the needle body and connection to a high-voltage power supply can be easily performed.
【図1】本発明による放電電極針の針本体の正面図であ
る。FIG. 1 is a front view of a needle main body of a discharge electrode needle according to the present invention.
【図2】針本体を針ホルダに保持した状態の断面図であ
る。FIG. 2 is a cross-sectional view of a state where the needle main body is held by a needle holder.
【図3】図2の放電電極針をエアーガン式除電器に適用
した例を示すブロック図である。FIG. 3 is a block diagram showing an example in which the discharge electrode needle of FIG. 2 is applied to an air gun type static eliminator.
1 針本体 2 雄ネジ 3 針ホルダ 4 雌ネジ 1 Needle body 2 Male screw 3 Needle holder 4 Female screw
Claims (2)
mの酸化ジルコニウムで針本体を製作したことを特徴と
する放電電極針。(1) a specific resistance value of 5 MΩ / cm to 20 MΩ / c;
A discharge electrode needle characterized in that the needle body is made of zirconium oxide.
mの酸化ジルコニウムで針本体を製作し、該針本体の基
端部に雄ネジを設け、この雄ネジをステンレス製の短管
状針ホルダの雌ネジに螺合させて針本体を短管状針ホル
ダに保持したことを特徴とする放電電極針。2. A material having a specific resistance of 5 MΩ / cm to 20 MΩ / c.
The needle body is made of zirconium oxide having a length of m, a male screw is provided at the base end of the needle body, and this male screw is screwed into a female screw of a stainless steel short tubular needle holder to attach the needle body to the short tubular needle holder. A discharge electrode needle, wherein the discharge electrode needle is held.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10301998A JPH11297455A (en) | 1998-04-14 | 1998-04-14 | Discharge electrode needle |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10301998A JPH11297455A (en) | 1998-04-14 | 1998-04-14 | Discharge electrode needle |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH11297455A true JPH11297455A (en) | 1999-10-29 |
Family
ID=14342945
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10301998A Pending JPH11297455A (en) | 1998-04-14 | 1998-04-14 | Discharge electrode needle |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH11297455A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002318169A (en) * | 2001-01-12 | 2002-10-31 | Hewlett Packard Co <Hp> | Measurement method for optical characteristic of retarding element |
CN109659814A (en) * | 2017-10-11 | 2019-04-19 | 吕承彰 | Lightning arrester and its transmission module |
-
1998
- 1998-04-14 JP JP10301998A patent/JPH11297455A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002318169A (en) * | 2001-01-12 | 2002-10-31 | Hewlett Packard Co <Hp> | Measurement method for optical characteristic of retarding element |
CN109659814A (en) * | 2017-10-11 | 2019-04-19 | 吕承彰 | Lightning arrester and its transmission module |
CN109659814B (en) * | 2017-10-11 | 2020-12-08 | 吕承彰 | Lightning arrester and transmission module thereof |
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