JPH11289742A - Compact linear pulse motor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve thrust force and efficiency, reduce vibration and noise, and at the same time miniaturize a motor by arranging the pole teeth part of an upper yoke and that of a lower yoke at both side parts of a long side inside a coil assembly and further forming a magnet inside the pole teeth part of the upper yoke and that of the lower yoke. SOLUTION: Pole teeth parts 30 and 32 being magnetized by current flowing through a coil assembly 3 exist at both surface sides of a magnet part 9 of a movable element 10, thus improving magnetic attractive force and the thrust force of the movable element 10 as compared with a conventional case with only one side surface. Also, the space between the magnet 9 and the pole teeth parts 30 and 32 is nearly equal at both sides, and reluctance that operates on the movable element 10 operates on the pole teeth parts 30 and 32 at both sides of the magnet 9 nearly equally, thus stabilizing the still position accuracy of the movable element 10. Further, by accommodating the pole teeth parts 30 and 32 of the yokes 4 and 6 and the part of the magnet 9 of the movable element 10 inside the coil assembly 3, the thickness dimension of a motor can be reduced.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to OA equipment, control equipment, electronic equipment, machine tools, semiconductor and liquid crystal manufacturing equipment,
The present invention relates to a PM-type linear pulse motor used for linear position control in medical equipment and the like.

[0002]

2. Description of the Related Art The present invention is different from an HB type pulse motor in which a stator yoke is formed by stacking silicon steel plates or the like.
The present invention relates to a PM type pulse motor that forms a stator yoke by processing a steel plate that can be easily bent and squeezed.

A PM linear pulse motor having such a structure is disclosed in Japanese Patent Application Laid-Open No. 8-223901. FIG. 31 is a perspective view showing the structure of a conventional linear pulse motor. In FIG. 31, a stator yoke 341 formed by punching press working and having pole teeth is arranged at a predetermined meshing position, a yoke plate 342 is put over the two stator yokes, and a coil assembly 343 is mounted on the yoke plate 342. Is wound. Further, a flat plate-shaped magnet movable plate 344 is provided through a gap to form a stator yoke 341.
Are movably arranged in the longitudinal direction. Magnet movable plate 3
Numeral 44 denotes N and S poles at twice the pitch P of the pole teeth in the longitudinal direction of the stator yoke.

[0004]

The linear pulse motor is required to be downsized, to be improved in linear propulsion force and to be more efficient, and further to be required to have lower vibration and lower noise.
Further, stability of the stationary position accuracy is required, and further, ease of assembly and mass productivity are required.

However, in the above-described conventional configuration, only one side of the movable magnet plate is opposed to the stator yoke, and the magnetic linear thrust for moving the movable magnet plate is generated only on one side of the movable magnet plate. On the side of the stator yoke of the magnet movable plate, no contribution is made to the propulsion force, and the efficiency may be reduced.

A compact linear pulse motor according to the present invention solves the above-mentioned problems, and has an improved propulsive force, higher efficiency,
It is an object of the present invention to reduce the size of a linear pulse motor while achieving low vibration, low noise, ease of assembly, and mass productivity.

[0007]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention provides a soft magnetic upper yoke having a plurality of pole teeth projecting perpendicularly from a planar flange, and a planar flange. Lower yoke having a plurality of pole teeth projecting perpendicularly from the lower yoke, a movable element having two plate-like magnets magnetized on both sides with multiple poles, and two coil assemblies wound in a rectangular shape And a linear pulse motor having a shaft and a cylindrical frame having a shaft support mechanism,
The pole teeth of the upper yoke and the pole teeth of the lower yoke are arranged at positions on both sides of the long side inside the coil assembly where the pole teeth of the upper yoke mesh with each other. The magnet is formed inside a pole tooth portion with a small gap therebetween.

According to the present invention, a PM type linear which realizes downsizing while improving linear propulsion, improving efficiency, reducing vibration and noise, stabilizing stationary position accuracy, assembling easiness and mass productivity. A pulse motor is obtained.

[0009]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The invention according to claim 1 of the present invention is directed to a soft magnetic material upper yoke having a plurality of pole teeth formed so as to protrude perpendicularly from a planar flange portion, and from a planar flange portion. A lower yoke of a soft magnetic material having a plurality of vertically protruding pole teeth, a mover having two plate-like magnets magnetized on both sides, and a coil assembly wound in a rectangular shape; , A shaft, and a cylindrical frame having a shaft support mechanism, wherein the pole teeth of the upper yoke and the pole teeth of the lower yoke mesh with each other on both long sides inside the coil assembly. A small linear pulse motor which is disposed at a position and further includes the magnets inside the pole teeth of the upper yoke and the pole teeth of the lower yoke via a gap.

With this configuration, the pole teeth magnetized by the current flowing through the coil assembly are present on both sides of the magnet portion of the mover, so that the magnetic attraction force is higher than in the case of the conventional single side only. This has the effect of improving the driving force of the mover. In addition, the gap between the magnet and the pole teeth is substantially equal on both sides, and the reluctance torque acting on the mover acts almost equally on the pole teeth on both sides of the magnet, so that the stationary position accuracy of the mover is easily stabilized. Further, by accommodating the pole teeth portion of the yoke and the magnet portion of the mover inside the coil assembly, it has the effect of reducing the thickness of the motor.

According to a second aspect of the present invention, there is provided a small linear assembly according to the first aspect, wherein the short sides of the coil assembly are adjacent to each other, and the inner space of the coil assembly is arranged in the same direction. It is a pulse motor.

According to this configuration, the thickness of the linear pulse motor is reduced, and the height of the linear pulse motor is reduced.

According to a third aspect of the present invention, the movable element is provided with two rows of holes, and the movable element is supported linearly movable by fitting with two shafts. Is a small linear pulse motor.

According to this configuration, the mover is supported so as to be movable linearly and stably moves linearly, and the friction between the sliding portion of the mover and the shaft is reduced, and the linear movement loss is reduced.

According to a fourth aspect of the present invention, there is provided the small linear pulse motor according to the second aspect, wherein the upper yoke and the lower yoke have a U-shape, and the frame has a U-shape.

With this configuration, since the magnetic circuit is formed by the U-shaped portions of the upper yoke and the lower yoke, there is no need to form a magnetic path with the frame, and the function of supporting the shaft, the upper yoke, and the lower yoke is provided. Since it only needs to be held, it can be formed in a U-shape that is easy to process and shape. Also, the joint that forms the magnetic path is
Since there is only one surface where the upper yoke and the lower yoke are in contact, it has the effect of reducing magnetic resistance.

According to a fifth aspect of the present invention, there is provided the small linear pulse motor according to the second aspect, wherein the upper yoke and the lower yoke are separated from each other in a flange, and a cutout is provided in the center of the frame.

With this configuration, the upper yoke and the lower yoke of each coil phase are magnetically separated from each other, thereby reducing the effect of adversely affecting each other.

According to a sixth aspect of the present invention, two rails are provided above and below a linear pulse motor, and a movable element slides on the rail, and the movable element is supported so as to be linearly movable. 1 is a small linear pulse motor.

According to this configuration, the pulse motor can be easily assembled, and the movable element slides on the rail, the friction of the sliding section is reduced, and the stationary position accuracy of the movable element is stabilized.

According to a seventh aspect of the present invention, there is provided a small linear device according to the sixth aspect, wherein a spherical portion is provided at an end of the mover with a hard sphere or the like to reduce friction between a slide portion of the mover and the rail. It is a pulse motor.

With this configuration, the friction between the sliding portion of the mover and the rail is reduced, and the stationary position accuracy of the mover is stabilized.

According to an eighth aspect of the present invention, there is provided the small linear pulse motor according to the sixth aspect, wherein the rail has a U-shape and is fitted to the frame by fitting.

With this configuration, the rail can be easily assembled, and the pulse motor can be easily disassembled.

According to a ninth aspect of the present invention, there is provided the small linear pulse motor according to the sixth aspect, wherein a curved portion is provided in a longitudinal portion of the rail to add a leaf spring function.

According to this configuration, variations in the height of the mover due to assembly and processing accuracy are absorbed by the leaf spring function of the rail, so that there is no gap or play between the sliding portion of the rail and the mover. The mover always has a function of moving linearly and stably.

According to a tenth aspect of the present invention, in the small linear pulse motor according to the second aspect, the upper side of the mover is fixed to the shaft, and the lower side of the mover slides on the rail. is there.

With this configuration, the motor can be easily assembled and disassembled. According to an eleventh aspect of the present invention, there is provided an outer yoke of a soft magnetic material having a plurality of pole teeth formed by vertically stacking coil assemblies coaxially and vertically projecting from a planar flange, and An inner yoke of a soft magnetic material having a plurality of pole teeth formed perpendicularly protruding from the brim portion, a cylindrical frame having a bearing mechanism, a movable element having a magnet and a shaft that is magnetized on both sides with multiple poles, and having pole teeth. 2. The small linear pulse motor according to claim 1, wherein the small linear pulse motor is arranged to be meshed at a predetermined position.

According to this structure, the thickness of the pulse motor can be reduced, the length of the pulse motor in the movable direction can be reduced, and the magnet can be formed in a single plate shape without separating the magnet into two. .

According to a twelfth aspect of the present invention, there is provided the small linear pulse motor according to the eleventh aspect, wherein a D-cut portion is provided on the shaft, and the movable element is supported by the one shaft so as to be linearly movable.

According to this configuration, the shaft for supporting the mover in a freely linear manner is formed with one shaft instead of two shafts, and has an effect of reducing the number of parts.

According to a thirteenth aspect of the present invention, there is provided the compact linear pulse motor according to the eleventh aspect, wherein the frame has a cup shape.

According to this configuration, when assembling the pulse motor, the outer yoke, the coil assembly, and the inner yoke are inserted into the cup shape, so that the assembling operation is facilitated. It is closed and has the function of preventing foreign matter from entering.

According to a fourteenth aspect of the present invention, there is provided the small linear pulse motor according to the eleventh aspect, wherein the outer yoke and the inner yoke are molded with resin before winding the winding.

According to this configuration, the outer yoke and the inner yoke are fixed by the resin, so that the vibration of the pole teeth due to the electromagnetic force is reduced, and the outer yoke and the inner yoke are reduced in assembly.

According to a fifteenth aspect of the present invention, there is provided the small linear pulse according to the eleventh aspect, wherein a plurality of protrusions are provided inside the coil bobbin constituting the coil assembly and are fitted to the pole teeth of each yoke. It is a motor.

With this configuration, when the outer yoke and the inner yoke are fitted to the coil assembly, the assembly is facilitated, the relative positioning of the outer yoke and the inner yoke is facilitated, and the stationary position accuracy of the movable element is stabilized. It has the effect of doing.

[0038]

Embodiments of the present invention will be described below with reference to the drawings.

Embodiment 1 A first embodiment of the present invention will be described with reference to FIGS.

1, 2 and 3, two coil assemblies 3 wound in a rectangular shape are inserted into a rectangular cylindrical frame 2 having a shaft support mechanism 1, and are vertically inserted from a flat brim portion. A first upper yoke 4 and a second upper yoke 5 of a soft magnetic material having a plurality of pole teeth formed to protrude from the surface, and a soft magnetic material having a plurality of pole teeth formed to protrude vertically from a planar flange portion. The first lower yoke 6 and the second lower yoke 7 are arranged at positions sandwiching the coil assembly 3 from above and below in the winding direction. At this time, the pole teeth 30 of the first upper yoke 4 and the second
Pole teeth 31 of the upper yoke 5 and pole teeth 32 of the first lower yoke 6
And the pole teeth 33 of the second lower yoke 7 are arranged inside the coil assembly 3, and the pole teeth 30 of the first upper yoke 4 and the pole teeth 32 of the first lower yoke 6 are arranged at positions where they mesh with each other. The pole teeth 31 of the second upper yoke 5 and the pole teeth 33 of the second lower yoke 7 are arranged at positions where they mesh with each other. Further, the pole teeth 30 of the first upper yoke 4 and the pole teeth 33 of the second lower yoke 7 are arranged at positions facing each other, and the pole teeth 31 of the second upper yoke 5 and the pole teeth of the first lower yoke 6 are arranged. Reference numerals 32 are arranged at positions facing each other.

Between the first upper yoke 4 and the second upper yoke 5, the pole teeth 30, 3 of the upper and lower yokes are provided.
A mover 10 having two plate-like magnets 9 in which two poles are magnetized on both sides in the longitudinal direction in which 1, 32, and 33 are arranged is inserted on both sides with a small gap.
1 is supported so as to be movable linearly. As shown in FIGS. 4 and 5, the magnetizing pitch of one magnet, that is, the center distance between the center of the adjacent S pole and the center of the N pole is the pitch P1 of the meshing pole teeth.
And the pitch is substantially the same. The distance between the two magnets is (integer multiple of P1) + (P1 × 0.5), and the gap distance at the center of each yoke is an integer multiple of P1. 2
The distance between the two magnets may be reversed to an integral multiple of P, and the gap distance at the center of each yoke may be reversed to (an integral multiple of P) + (P × 0.5).

With this configuration, the pole teeth 31, 32, 3 of the yoke are provided on both sides of the plate-shaped magnet 9 of the mover 10.
By disposing the magnets 3 and 34, the magnetic linear propulsion is excited from both sides of the mover 10, so that the propulsion is improved, and the magnet 9 and the pole teeth 30, 31, and 3 of the yoke are improved.
The gap between the movable elements 2 and 33 is approximately equal on both sides, and the reluctance torque acting on the movable element 10 acts on the pole teeth 30, 31, 32 and 33 of the yokes on both sides of the magnet 9 approximately uniformly. The static position accuracy of the camera is easily stabilized. Further, the yoke pole teeth 30 and 3 are provided inside the coil assembly 3.
An excellent compact linear pulse that has the effect of reducing the thickness of the linear pulse motor by housing the magnets 9 arranged in the form of 1, 32, 33, and has reduced the size of the linear pulse motor and further improved the linear propulsion force. A motor can be realized.

Further, by exciting by a driving method such as micro step driving or sine wave driving, it is possible to realize fine step position control. Further aligned yoke pole teeth 30,
By increasing the number of 31, 32, and 33, the linear movable distance can be increased. The number of poles of the magnet 9
The area may be increased and the linear propulsion may be increased.

The arrangement of the coil assembly 3 will be described as a further embodiment. As shown in FIGS. 2 and 3, the arrangement of the coil assembly 3 is clarified so that the short sides of the coil assembly 3 are adjacent to each other and the inner space of the coil assembly 3 is in the same direction.

With this configuration, the thickness L1 of the linear pulse motor is within the dimension obtained by adding the short side dimension a of one coil assembly 3 and the plate thickness of the frame 2, and the height of the stator portion of the linear pulse motor. The dimension L2 is set to the dimension obtained by adding the plate thickness of the upper yoke flange and the plate thickness of the lower yoke flange to the height dimension b of one coil assembly 3, thereby reducing the thickness of the linear pulse motor and reducing the height. Has the effect of reducing. The same applies to a multi-phase linear pulse motor having three or more coil assemblies 3. With the above configuration, an excellent small linear pulse motor having a small overall shape and small occupied volume can be realized.

As a further embodiment, the support of the mover 10 will be described. As shown in FIG.
The point is that a row of holes 12 is provided so that the movable element 10 is supported so as to be linearly movable by fitting with the two shafts 11. The outer diameter of the hole 12 of the mover 10 and the outer diameter of the shaft 11 are clearance fit, and the outer dimensions of the bearing 1 and the shaft 11 of the frame are clearance fit on the shaft insertion side and press fit on the opposite shaft insertion side. It is fixed.

With this configuration, the shaft 11 is inserted from the outside of the frame 2 so that the mover 10
1, the movable element 10 and the shaft 11 are supported by being linearly movable, stably linearly movable, and using a round shaft.
The sliding part becomes a line instead of a surface, and the sliding friction decreases,
An object of the present invention is to realize an excellent small linear pulse motor having an effect of reducing linear movement loss, improving linear propulsion force and increasing efficiency. Grease or the like may be added to the sliding portion to further reduce sliding friction.

(Embodiment 2) Hereinafter, the operation of the second embodiment of the present invention will be described with reference to FIGS. 6 to 8, the pole teeth 30, 31, 32, 33 of the yoke and the mover 10 are arranged inside the coil assembly 3,
The arrangement in which the short sides of the coil assembly 3 are in contact with each other is the same as in FIGS. 1 to 3 showing the first embodiment. The difference from FIGS. 1 to 3 is that the upper yokes 4, 5 and the lower yokes 6, 7 have a U-shape, and the frame 2 has a U-shape. By sandwiching the upper yokes 4, 5 and the lower yokes 6, 7 from above and below the central axis of the coil assembly 3, the outside of the long side of the coil assembly 3 is connected by the first upper yoke 4 and the first lower yoke 6, In addition, since the second upper yoke 5 and the second lower yoke 7 are connected, the magnetic path R can be formed without interposing the frame 2.

With this configuration, the magnetic path R is formed by the U-shaped portions of the upper yokes 4 and 5 and the lower yokes 6 and 7.
It is not necessary to form a magnetic path in the frame 2 and it is only necessary to have a function of supporting the shaft 11, the upper yokes 4, 5, and the lower yokes 6, 7, so that the frame 2 can have a U-shape which is easy to form. In addition, the frame 2 can be easily processed, and it is possible to realize a small-sized linear pulse motor excellent in mass productivity by using an inexpensive material that does not consider magnetic characteristics. In addition, the joining portion 13 of the magnetic body that increases the magnetic resistance in the magnetic path
Is one at the joint between the upper yokes 4 and 5 and the lower yokes 6 and 7 outside the coil assembly 3, which is smaller than the two places where the four lambs 2 are interposed. The magnetic resistance is small and high efficiency can be realized. .

(Embodiment 3) The operation of the second embodiment of the present invention will be described below with reference to the drawings.

In FIG. 9, the magnetic path R
Is similar to FIGS. 6 to 8 showing the second embodiment. 6 to 8 is that the upper yokes 4 and 5 are different.
Alternatively, only one of the lower yokes 6 and 7 has a U-shape and the outer skirt is long. FIG. 11 shows an example in which the lower yokes 6 and 7 have a U-shape. With this configuration, the same operation and effect as those of the second embodiment can be obtained, and the component formed in the U-shape can be processed by only one of the upper yokes 4, 5 and the lower yokes 6, 7, so that the processing is facilitated. .

(Embodiment 4) The operation of the fourth embodiment of the present invention will be described below with reference to FIGS.

The fourth embodiment is different from the fourth embodiment in that the pole teeth 30, 31, 32, and 33 of the yoke and the mover 10 are arranged inside the coil assembly 3, and the short sides of the coil assembly 3 are in contact with each other. It is similar to FIGS. 1 to 3 showing Example 1. The difference from FIGS. 1 to 3 is that, as shown in FIG. 10, the flanges of the upper separating yoke 15 and the lower separating yoke 16 are separated for each coil assembly 3, and a cutout 14 is formed at the center of the frame 2. That is,

With this configuration, the magnetic path constituted by each coil assembly 3 is separated by the flange portion of the yoke and the frame 2 and has the effect of reducing the adverse magnetic influence exerted on each coil assembly 3 in each phase. An excellent small linear pulse motor capable of stabilizing the stationary position accuracy of the mover 10 can be realized. Note that the number of components can be reduced by connecting the facing yokes as shown in FIG. 11, and the yoke can be easily processed by removing the flange portion of the yoke as shown in FIG.

(Embodiment 5) Hereinafter, the operation of a fifth embodiment of the present invention will be described with reference to FIGS.

13 and 14, the pole teeth 30, 31, 32, 33 of the yoke and the mover 1 are provided inside the coil assembly 3.
The point where 0 is arranged is the same as FIGS. 1 to 3 showing the first embodiment. FIGS. 13 and 1 are different from FIGS.
As shown in FIG. 4, two rails 17 are provided above and below a linear pulse motor, and the mover 10 slides on the rail 17 to support the mover 10 so as to be movable linearly.

According to this configuration, after the coil assembly 3, the upper yokes 4, 5, the lower yokes 6, 7, and the mover 10 are inserted into the frame 2, the rail 17 is finally mounted from above and below, so that the pulse motor can be easily assembled. In addition, the mover 10 slides on the rail 17 to reduce sliding friction, improve linear propulsion force, and stabilize the stationary position accuracy of the mover 10. A pulse motor can be realized.

As a further embodiment, the shape of the mover 10 will be described. As shown in FIGS. 15 and 16, a spherical portion is provided at the end of the mover 10 with a hard ball 18 or the like, and the sliding portion between the mover 10 and the rail 17 is clarified so as to contact at points. .

With this configuration, the mover 10 and the rail 17
This has the effect of reducing the sliding friction of the movable element 10 and stabilizing the stationary position accuracy of the mover 10, thereby realizing a small linear pulse motor excellent in low vibration and low noise.

As a further embodiment, the shapes of the rail 17 and the frame 2 will be described. 17 and 18, the rail 17 has a U-shape, and a protrusion 19 is provided at both ends of the rail 17, a hole 20 is provided at both ends of the frame 2, and the protrusion 19 of the rail 17 is provided. The method of mounting the rail 17 is clarified so that the rail 17 is fitted into the frame 2 from above and below the hole 20.

With this configuration, the motor assembling process is facilitated, and an inexpensive small linear pulse motor excellent in mass productivity can be realized.

The shape of the rail will be described as a further embodiment. In FIG. 19, a bent portion 21 is provided in the longitudinal portion of the rail 17 to add a function as a leaf spring.

With this configuration, the plate spring function of the rail 17 absorbs variations in the height of the mover 10 due to assembly and processing accuracy, and the vibration of the mover 10 is absorbed. This has the effect that the mover 10 always moves linearly and stably without any gaps in the sliding portion of the motor, thereby realizing a small linear pulse motor excellent in low vibration and low noise.

(Embodiment 6) Hereinafter, the operation of the sixth embodiment of the present invention will be described with reference to FIGS.

20 to 22, the pole teeth 30, 31, 32, 33 of the yoke and the mover 1 are provided inside the coil assembly 3.
0 is arranged so that the short sides of the coil assembly 3 are in contact with each other, as in FIGS. 1 to 3 showing the first embodiment. The difference from FIGS. 1 to 3 is that the upper side of the mover 10 is fixed to the shaft 11 and the lower side of the mover 10 slides on the rail 17. The shaft 11 is arranged to be larger than the entire length of the frame 2 in the longitudinal direction, and the mover 10 and the shaft 11 are fixed in advance. Frame 2
Is provided with a hole portion 20 and a semicircular shaft support portion 22. With this configuration, the motor can be easily assembled and disassembled, and a small-sized linear pulse motor excellent in mass productivity can be realized.

(Embodiment 7) The operation of the seventh embodiment of the present invention will be described below with reference to FIGS.

23 to 25, inside the coil assembly 3, the pole teeth 30, 31, 32, 33 of the yoke and the mover 1
The point where 0 is arranged is the same as FIGS. 1 to 3 showing the first embodiment. The difference from FIGS. 1 to 3 is that the coil assembly 3, the soft magnetic outer yoke 23 having a plurality of pole teeth formed to project perpendicularly from the planar flange, and the planar flange An inner yoke 24 of a soft magnetic material having a plurality of pole teeth projecting vertically, a cylindrical frame 2 having a bearing mechanism 1, a magnet 9 and a shaft 11 which are multipolar magnetized on both sides.
In the linear pulse motor comprising the mover 10 having the above structure, the coil assemblies 3 are stacked coaxially in the vertical direction, and the pole teeth are arranged so as to mesh with each other at predetermined positions. The N pole and the S pole are magnetized at twice the pitch P of the pole teeth.

With this configuration, the thickness L1 of the pulse motor
, The length L3 of the pulse motor in the movable direction is reduced, and the magnet 9 has the function of being formed into one plate-like shape instead of being separated into two parts. An excellent and inexpensive small linear pulse motor can be realized.

The shape of the shaft 11 will be described as a further embodiment. 23 and 25, a point that the shaft 11 is provided with a D-cut portion, and the mover 10 is supported by a single shaft so as to be movable linearly.

With this configuration, the shaft 11 for fixing the mover 10 in a straight line is formed of one shaft instead of two shafts, has the effect of reducing the number of parts, and is inexpensive and compact with excellent mass productivity. A linear pulse motor can be realized.

As a further embodiment, the shape of the frame 2 will be described. In FIG. 26, the frame 2 has a cup shape.

With this configuration, when assembling the pulse motor, the outer yoke 23, the coil assembly 3
The inner yoke 24 is inserted so that the assembly is easy to assemble.
6. By closing the cover in step 6, it has an effect of reducing the contamination of foreign substances, is excellent in mass productivity, and can realize a small linear pulse motor having low vibration and low noise.

As a further embodiment, the fixing of the outer yoke 23 and the inner yoke 24 will be described. 27 is that the outer yoke 23 and the inner yoke 24 are molded with a resin 27 before winding the winding. FIG. 28 is a cross-sectional perspective view when no resin mold is applied, and FIG. 27 is a cross-sectional perspective view after the resin mold. With this configuration, the outer yoke 23 and the inner yoke 24 are fixed with a resin, the vibration of the outer yoke 23 and the inner yoke 24 due to the electromagnetic force is reduced, and the assembling of the outer yoke 23 and the inner yoke 24 is reduced. Thus, a compact linear pulse motor having excellent vibration and noise can be realized. Further, when resin molding is performed, the coil bobbin 28 for winding the winding is unnecessary, and the number of components can be reduced. The same effect can be obtained by resin molding in the first to sixth embodiments.

As a further embodiment, the shape of the coil bobbin 28 will be described. As shown in FIG.
A plurality of protrusions 29 inside the coil bobbin 28
Are provided and fitted to the pole teeth 30 and 32 of each yoke. FIG. 30 shows an example after the coil bobbin 28 and each yoke are assembled.

With this configuration, when the outer yoke 23 and the inner yoke 24 are fitted to the coil assembly 3, the assembly is facilitated, the relative positioning of the outer yoke 23 and the inner yoke 24 is facilitated, and the movable element 10 This has the effect of stabilizing the static position accuracy of the motor and can realize a small linear pulse motor with excellent vibration and noise.

The projection 29 in this embodiment is rectangular, but may be cylindrical. In the case of the first to sixth embodiments, the same effect can be obtained even if the protrusion 29 is provided.
In this case, the relative positioning between the outer yoke 23 and the inner yoke 24 can be easily performed.

Although several embodiments have been described above,
The present invention is not limited to the embodiments described above, and various developments are possible within the scope of the gist. The D-cut refers to making the shaft cross section unusual so that it cannot rotate around the shaft, and does not merely refer to the D-shaped cross section. The U-shape refers to a shape in which two surfaces are opposed to each other, and includes a U-shape and other similar shapes. In this specification, the direction of the axis of the coil wound around the coil assembly is described as being vertical, and the vertical direction refers to the direction of this axis.

[0078]

As apparent from the above description, claim 1
According to the described invention, the pole teeth are arranged on both sides of the plate-like magnet of the mover, so that the mover is excited from both sides, the linear propulsion force is improved, and the stationary position accuracy can be stabilized, In addition, since the pole teeth and the mover are arranged and stored inside the coil assembly, it has the effect of reducing the thickness of the linear pulse motor. An excellent small linear pulse motor with stable accuracy can be realized.

According to the second aspect of the present invention, the arrangement of the coil assembly is clearly defined so that the short sides of the coil assembly are adjacent to each other and the inner space of the coil assembly is in the same direction. Therefore, the thickness of the linear pulse motor is within the dimension of the short side of one coil assembly plus the thickness of the frame, and the height of the stator of the linear pulse motor is the height of one coil assembly. Fits the dimensions plus the thickness of the upper yoke flange and the thickness of the lower yoke flange, making it possible to reduce the thickness of the linear pulse motor and the height to reduce the motor volume. An excellent small linear pulse motor can be realized.

According to the third aspect of the invention, two rows of holes are provided in the movable element, and the movable element is formed so as to be linearly movable by fitting with two shafts. The sliding part between the mover and the shaft becomes a line instead of a surface, and the sliding friction is reduced, the linear movable loss is reduced, and an excellent small linear pulse motor with high efficiency by improving the linear propulsion force can be realized. .

According to the fourth aspect of the present invention, the upper yoke and the lower yoke have a U-shape, and the frame is formed in a U-shape, so that the processing of the frame is easy and the frame is magnetic. An inexpensive material that does not consider characteristics can be used, and excellent small-sized linear pulse motors that are excellent in mass productivity and low in magnetic resistance and high in efficiency can be realized.

According to the fifth aspect of the present invention, the flange portion of the upper yoke and the lower yoke is separated for each coil assembly, and a cutout portion is provided at the center of the frame, so that it is constituted for each coil assembly. The magnetic path is separated by the flange of the yoke and the frame, and has the function of reducing the adverse magnetic influence exerted on each phase in each coil assembly, and is an excellent small linear pulse capable of stabilizing the stationary position accuracy of the mover. A motor can be realized.

According to the invention of claim 6, two rails are provided above and below the linear pulse motor, and the movable element slides on the rail, and the movable element is formed so as to be linearly movable. This makes it easy to assemble the pulse motor, and furthermore, the mover slides on the rails, reducing sliding friction to improve linear propulsion and stabilizing the stationary position accuracy of the mover. A compact linear pulse motor can be realized.

According to the seventh aspect of the present invention, a spherical portion such as a hard sphere is provided at an end of the movable element, and the movable element and the sliding portion of the rail are formed so as to be in point contact with each other. This has the effect of reducing the sliding friction between the rail and the rail and stabilizing the stationary position accuracy of the mover, thereby realizing a small linear pulse motor excellent in low vibration and low noise.

According to the eighth aspect of the present invention, the rail has a U-shape, convex portions are provided at both ends of the rail, and holes are provided at both ends of the frame. By clarifying the mounting method of the rail so that the hole of the frame fits into the hole, the motor assembling process becomes easy, and an inexpensive small linear pulse motor excellent in mass productivity can be realized.

According to the ninth aspect of the present invention, a bent portion is provided in the longitudinal portion of the rail to add a function as a plate spring, so that no gap is generated between the sliding portion of the rail and the movable element. In addition, the movable element always has a function of moving linearly stably, and an excellent small linear pulse motor with low vibration and low noise can be realized.

According to the tenth aspect of the present invention, the upper side of the mover is fixed to the shaft, and the lower side of the mover slides on the rail, so that the motor can be assembled and disassembled. This has the function of facilitating the operation and can realize a small-sized linear pulse motor excellent in mass productivity.

According to the eleventh aspect of the present invention, the coil assembly is formed by vertically stacking coaxially, so that the thickness of the pulse motor is reduced and the length of the pulse motor in the movable direction is reduced. Further, the magnet has the function of being formed into one plate shape, instead of being separated into two, and can realize an inexpensive small linear pulse motor having a small shape and volume and excellent mass productivity.

According to the twelfth aspect of the present invention, the shaft is provided with a D-cut portion, and the movable element is linearly movable by one shaft, so that the movable element is linearly fixed. Is formed by one instead of two,
An inexpensive small-sized linear pulse motor with reduced number of parts and excellent mass productivity can be realized.

According to the thirteenth aspect of the present invention, since the frame is formed in a cup shape, the outer yoke, the coil assembly and the inner yoke are inserted into the cup shape when assembling the pulse motor. It is easy to assemble, and the side opposite the shaft is closed with a cup-shaped frame to reduce foreign matter contamination, and realizes an excellent small-sized linear pulse motor with excellent mass productivity and low vibration and low noise. It is.

According to the fourteenth aspect of the present invention, the outer yoke and the inner yoke are fixed with the resin by forming the outer yoke and the inner yoke with resin before winding the winding. It has the function of reducing the vibration of the outer yoke and the inner yoke due to the electromagnetic force and reducing the looseness of the assembly of the outer yoke and the inner yoke, and can realize an excellent small linear pulse motor with low vibration and low noise. is there.

According to the fifteenth aspect of the present invention, a plurality of projections are provided inside the coil bobbin constituting the coil assembly and are fitted to the pole teeth of each yoke. When fitting the yoke to the coil assembly, the assembly is easy, the relative positioning of the outer yoke and the inner yoke is easier, the stationary position accuracy of the mover is stable, and the vibration is low and the noise is low and compact. A linear pulse motor can be realized.

As described above, according to the present invention, it is possible to provide an excellent small linear pulse motor having improved propulsion, improved efficiency, reduced vibration, reduced noise, ease of assembly, and good mass productivity. . This can contribute to the field of linear position control in OA equipment, control equipment, electronic equipment, machine tools, semiconductor and liquid crystal manufacturing-related equipment, medical-related equipment, and the like.

[Brief description of the drawings]

FIG. 1 is a sectional view of a small linear pulse motor according to a first embodiment of the present invention.

FIG. 2 is a perspective view of a small linear pulse motor according to a first embodiment of the present invention before assembly.

FIG. 3 is a perspective view of a small linear pulse motor according to the first embodiment of the present invention.

FIG. 4 is a perspective view (oblique direction) of a yoke according to the first embodiment of the present invention.

FIG. 5 is a perspective view (lateral direction) of a yoke and a magnet in the first embodiment of the present invention.

FIG. 6 is a perspective view of a small linear pulse motor according to a second embodiment of the present invention before assembly.

FIG. 7 is a perspective view of a small linear pulse motor according to a second embodiment of the present invention.

FIG. 8 is a sectional view of a small linear pulse motor according to a second embodiment of the present invention.

FIG. 9 is a perspective view of a small linear pulse motor according to a third embodiment of the present invention before assembly.

FIG. 10 is a perspective view of a small linear pulse motor according to a fourth embodiment of the present invention before assembly.

FIG. 11 is a perspective view of a yoke according to a fourth embodiment of the present invention.

FIG. 12 is a perspective view of a yoke according to a fourth embodiment of the present invention.

FIG. 13 is a perspective view of a small linear pulse motor according to a fifth embodiment of the present invention before assembly.

FIG. 14 is a perspective view of a small linear pulse motor according to a fifth embodiment of the present invention.

FIG. 15 is a sectional view of a small linear pulse motor according to a fifth embodiment of the present invention.

FIG. 16 is a perspective view of a mover according to a fifth embodiment of the present invention.

FIG. 17 is a perspective view of the fifth embodiment of the present invention after the frame and the rail are fitted.

FIG. 18 is a perspective view of a rail according to a fifth embodiment of the present invention.

FIG. 19 is a sectional view of a rail according to a fifth embodiment of the present invention.

FIG. 20 is a sectional view of a small linear pulse motor according to a sixth embodiment of the present invention.

FIG. 21 is a perspective view of a frame according to a sixth embodiment of the present invention.

FIG. 22 is a perspective view of a mover according to a sixth embodiment of the present invention.

FIG. 23 is a perspective view of a small linear pulse motor according to a seventh embodiment of the present invention before assembly.

FIG. 24 is a sectional view of a small linear pulse motor according to a seventh embodiment of the present invention.

FIG. 25 is a perspective view of a small linear pulse motor according to a seventh embodiment of the present invention.

FIG. 26 is a sectional view of a small linear pulse motor according to a seventh embodiment of the present invention.

FIG. 27 is a sectional perspective view of a small linear pulse motor according to a seventh embodiment of the present invention.

FIG. 28 is a cross-sectional perspective view of a small linear pulse motor without resin molding.

FIG. 29 is a sectional perspective view of a coil bobbin according to a seventh embodiment of the present invention.

FIG. 30 is a sectional perspective view when a yoke is assembled to a coil bobbin according to a seventh embodiment of the present invention.

FIG. 31 is a perspective view of a conventional pulse motor.

[Explanation of symbols]

 Reference Signs List 1 shaft support mechanism 2 frame 3,343 coil assembly 4 first upper yoke 5 second upper yoke 6 first lower yoke 7 second lower yoke 9 magnet 10 mover 11 shaft 12 hole 13 joint 14 Notch 15 Separation upper yoke 16 Separation lower yoke 17 Rail 18 Hard ball 19 Rail projection 20 Hole in frame 21 Bent section 22 Semi-circular shaft support section 23 Outer yoke 24 Inner yoke 25 D-cut section 26 Cup-shaped Frame 27 Resin 28 Coil bobbin 29 Projection 30 First upper yoke pole tooth 31 Second upper yoke pole tooth 32 First lower yoke pole tooth 33 Second lower yoke pole tooth 341 Stator yoke 342 Yoke plate 344 magnet movable plate

Claims (15)

[Claims] An upper yoke having a plurality of pole teeth projecting perpendicularly from a planar flange, and a soft magnetic body having a plurality of pole teeth projecting vertically from a planar flange. A lower yoke, a mover having two plate-like magnets magnetized on both sides, a coil assembly wound in a rectangular shape, a shaft, and a cylindrical member having a shaft support mechanism. Having a frame, on both long sides on the inner side of the coil assembly, disposed at positions where the pole teeth of the upper yoke and the pole teeth of the lower yoke mesh with each other,
A small linear pulse motor, wherein the magnet is formed inside the pole teeth of the upper yoke and the pole teeth of the lower yoke via a gap. 2. The small linear pulse motor according to claim 1, wherein the short sides of the coil assembly are adjacent to each other, and the inner space of the coil assembly is arranged in the same direction. 3. The small linear pulse motor according to claim 2, wherein the mover is provided with two rows of holes, and is fitted to two shafts to support the mover linearly. 4. The upper yoke and the lower yoke have a U-shape,
3. The small linear pulse motor according to claim 2, wherein the frame has a U-shape. 5. The upper yoke and the lower yoke have separate flanges,
3. The small linear pulse motor according to claim 2, wherein a notch is provided in a center portion of the frame. 6. The small linear pulse motor according to claim 1, wherein two rails are provided above and below the linear pulse motor, and the mover slides on the rail, and the mover is supported so as to be linearly movable. 7. The small linear pulse motor according to claim 6, wherein a spherical portion is provided at an end of the mover with a hard ball or the like to reduce friction between a slide of the mover and the rail. 8. The small linear pulse motor according to claim 6, wherein the rail has a U-shape and is fitted to the frame by fitting. 9. The small linear pulse motor according to claim 6, wherein a curved portion is provided in a longitudinal portion of the rail to add a function of a leaf spring. 10. A structure in which the upper side of the mover is fixed to the shaft, and the lower side of the mover slides on the rail.
The described small linear pulse motor. 11. An outer yoke of a soft magnetic material having a plurality of pole teeth formed so as to protrude perpendicularly from a planar flange portion by vertically stacking coil assemblies coaxially and vertically from a planar flange portion. 2. The mover according to claim 1, comprising an inner yoke made of a soft magnetic material having a plurality of protruding pole teeth, a cylindrical frame having a bearing mechanism, a double-sided multipolar magnetized magnet, and a shaft. Small linear pulse motor. 12. The small linear pulse motor according to claim 11, wherein a D-cut portion is provided on the shaft, and the mover is supported linearly movable by one shaft. 13. The frame according to claim 1, wherein the frame has a cup shape.
2. The small linear pulse motor according to 1. 14. The small linear pulse motor according to claim 11, wherein the outer yoke and the inner yoke are molded with a resin before winding the winding. 15. The small linear pulse motor according to claim 11, wherein a plurality of projections are provided inside the coil bobbin constituting the coil assembly, and are fitted with the pole teeth of each yoke.