JPH11281354A - Inclination sensor and inclination detector - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make it possible to detect the inclination angle at a high accuracy by housing a pair of differential electrodes opposed with a gap in a case also used as a common electrode, sealing a dielectric fluid in the case and changing the fluid level according to the inclination between the electrodes. SOLUTION: A pair of differential electrodes 10 are disposed on a sensor substrate 1 and a conductive case 2 also used as a common electrode is mounted thereon hermetically, serves as a common electrode by itself, has a recess 20 inside for housing the differential electrodes 10, mechanical filter 15, dielectric fluid, etc., exactly faces at the differential electrodes 10 with a fixed space to surely hermetically seal the dielectric fluid in the recess. The dielectric fluid is poured through two pouring holes 21 and sealed with solder, etc. The constitution make it possible to stably bond the case 2 to the sensor substrate 1, accurately controls the gap between the differential electrode 10 and a case 2 (common electrode) and detect the inclination angle at high accuracy.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a capacitance type inclination sensor for detecting an inclination angle and an inclination detecting device.

[0002]

2. Description of the Related Art In general, a conventional capacitance-type tilt sensor includes a pair of differential electrodes, a common electrode opposed to the differential electrodes via a gap, and a pair of differential electrodes and a common electrode. A liquid sealing member (case) in which a dielectric liquid is sealed so that the liquid level changes between the differential electrode and the common electrode according to the inclination (for example, Japanese Utility Model Application Laid-Open No. 5-38).
No. 516: “Inclination sensor”, No. 5-14168:
See “Capacitance tilt sensor”).

A specific structure of the tilt sensor is shown in FIG.
6 and FIG. 27. In the tilt sensor shown in FIG. 26, a pair of differential electrodes 7 provided on a substrate 70 is provided.
1, a common electrode 72 is arranged opposite to the substrate 1 with a gap therebetween, and a liquid tank 74 in which the differential electrode 71 and the common electrode 72 are accommodated and in which a dielectric liquid is sealed is formed on a substrate 70 by a double-sided tape 73.
To be fixed. A shield plate 75 is attached to the front side of the liquid tank 74, and a shield plate 76 is
Is attached. Further, a connector 77 for connecting an external circuit is connected to the board 70 via a lead wire 78. The integrated product is stored in the case 80, and the cover 81 is attached to the upper portion of the case 80.

In the tilt sensor shown in FIG. 27, a pair of differential electrodes 91 are mounted on a substrate 90 so as to face each other in an upright manner. The differential electrodes 91 are inserted into and supported by columns 92, and the columns 92 are made of a dielectric material. Common electrode 9 which doubles as a liquid tank for filling liquid
3 Further, the common electrode 93 is housed in the cover shield 94. A connector 95 is connected to the board 90 via a lead wire 96. This integrated product is Case 1
00 is stored.

[0005]

The conventional tilt sensor having the above structure has the following problems. (A) In order to ensure the detection accuracy, it is necessary to control the gap between the differential electrode and the common electrode with high precision, and therefore, the dimensional control of the parts alone and the control of the assembly dimensions must be strictly performed. . However, since the conventional tilt sensor is manually assembled from its structure, there is a limit to the compatibility with mass production and the stability of detection accuracy. (B) To reliably seal the dielectric liquid at low cost,
The bonding surface between the case (in the tilt sensor, the liquid tank 74 and the common electrode 93 serving also as the liquid tank) and the substrate provided with the differential electrode are brought into close contact with an adhesive or an adhesive tape, and the case and the substrate are further fixed by caulking pins or screws. A method of fixing with a stopper or the like is used.
However, this method has the following problems a to f. a) The number of parts is large. b) The tilt sensor becomes large. c) The injection amount of the dielectric liquid is increased, and the cost is increased. d) When an adhesive is used, it takes time to cure the adhesive. e) Stable adhesion between the case and the substrate cannot be obtained, and strict control is required for sealing the dielectric liquid. f) In order to obtain stable adhesion between the case and the substrate, high-precision manufacturing equipment such as a high dimensional tolerance (especially flatness) of the case bonding surface and a pressing jig (caulking jig) is required. Is expensive and requires many man-hours. (C) In order to improve the response characteristics, that is, to shorten the response time and reduce the voltage reverse output, it is desirable to use a combination of a circuit filter and a mechanical filter. Conventionally, the rapid flow of the dielectric liquid is suppressed at the terminal of the common electrode. However, in this case, the number of parts increases. (D) Since the liquid surface length in the direction orthogonal to the detection direction becomes longer, the sensitivity of the orthogonal axis becomes larger. For example, in a tilt sensor that detects the X-axis direction, malfunction due to tilt in the Y-axis direction increases. (E) Since the case is mounted on the functional circuit board, miniaturization is difficult. (F) After the necessary parts are accommodated in the case 80 and the case 100, respectively, the case is filled with resin and the case is sealed. However, since the case has a large volume, the resin filling amount is large and the cost is high. Become.

Accordingly, the present invention has been made in view of such various conventional problems, and has the following objects:
It is an object of the present invention to provide a tilt sensor and a tilt detection device that achieve the above. Detect tilt angle with high accuracy. Securely seal dielectric fluid at low cost. Improve response characteristics. Reduce orthogonal axis sensitivity. It is possible to detect the tilt in two axial directions with a small size. Reduce resin loading.

[0007]

According to a first aspect of the present invention, there is provided a tilt sensor, comprising: a pair of differential electrodes; It is characterized by comprising a case also serving as a common electrode opposed to each other at a distance, and a dielectric fluid sealed in the case so that the fluid level changes according to the inclination between the pair of differential electrodes and the common electrode (case). And

In this tilt sensor, since the case also serves as a common electrode, the number of parts is smaller and the number of steps is smaller than that of a conventional tilt sensor composed of a pair of differential electrodes, a common electrode, and a case enclosing a dielectric fluid. Reduction and low cost can be realized. Further, since the case also serves as the common electrode, components such as a liquid tank for sealing the dielectric fluid are not required, and the dielectric fluid can be securely sealed in the case. Specifically, a pair of differential electrodes is provided on the sensor substrate,
By attaching the case to the sensor substrate (claim 3), the case and the sensor substrate can be stably joined. In addition, the gap between the pair of differential electrodes and the common electrode (case) can be accurately managed, and thereby the inclination angle can be detected with high accuracy. Furthermore, the size of the tilt sensor can be reduced, and the required injection amount of the dielectric fluid can be reduced.
This also leads to cost reduction.

The tilt detecting device according to claim 7 is characterized in that the tilt sensors of the present invention are arranged in directions orthogonal to each other, and the above object can be similarly achieved. On the other hand, an inclination detecting device according to claim 8 includes a housing in which a circuit board on which a capacitance type inclination sensor for detecting an inclination angle is mounted and a shield plate surrounding the circuit board are housed in a housing. The housing has a sensor receiving groove for receiving only the tilt sensor on the circuit board.

In this inclination detecting device, only the inclination sensor on the circuit board is accommodated in the sensor accommodating groove of the housing. In other words, only the portion of the housing corresponding to the inclination sensor has a deep groove. The resin filling amount can be reduced and the cost can be reduced as compared with the related art in which the entire space has a uniform depth according to the height. In the tilt sensor of the present invention, the case also serves as the common electrode. Specifically, the case having the common electrode on the inside facing the differential electrode (claim 2), or the case itself as the common electrode It was done. In particular, when the case itself is a common electrode, there is no particular problem as long as the case is made of a material having conductivity, but it is possible to cut copper or brass, a zinc alloy formed by die casting, or a conductive material formed by injection molding. Examples thereof include plastics and plastics plated with a conductive material such as gold.

The dielectric fluid may be one used in a conventional tilt sensor. As the dielectric fluid, oil (for example, silicon oil) is used, and other fluids include a fluorine inert fluid and a coolant.

[0012]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below based on embodiments. An exploded perspective view of the tilt sensor according to the embodiment is shown in FIG. 1 (a perspective view seen from one side) and FIG. 2 (a perspective view seen from the other side), and an inner view of the sensor substrate is shown in FIG. FIG. 3B is a sectional view taken along line BB of FIG.
A cross-sectional view of the tilt sensor is shown in FIG. 3B (a cross-sectional view taken along line AA in FIG. 3A), and an inner view of the sensor substrate is shown in FIG.
FIG. 4A shows an external view of FIG.

This tilt sensor comprises a sensor substrate 1 on which a pair of differential electrodes 10 are provided, and a conductive case 2 which is attached to the sensor substrate 1 in a sealed state and also serves as a common electrode. The sensor substrate 1 has an external circuit connection terminal 1a protruding from the edge. On the inner surface of the sensor substrate 1, a pair of differential electrodes 10 are formed in a fan-shaped pattern as shown, and a reflow pattern 11 is formed around the differential electrodes 10 so as to surround the differential electrodes 10. The reflow pattern 11 is a portion to which the case 2 is joined by soldering, and extends to the terminal 1a of the sensor substrate 1 to form a pair of terminals 11a. On the other hand, on the outer surface of the sensor substrate 1,
The differential electrode 10 on the inner surface is extended through the through hole 12 to form a pair of terminals 10 a at the terminal portion 1 a of the sensor substrate 1. On the outer surface of the sensor substrate 1 except for the extended portion of the differential electrode 10, a shield pattern 13 for preventing intrusion of external noise is formed, and the shield pattern 13 also extends to the terminal 1a. A terminal 13a is provided between the pair of terminals 10a of the moving electrode 10.

Further, a mechanical filter 15 is mounted on the inner surface of the sensor substrate 1 at a position where the sensor is immersed in the dielectric fluid (in this case, two positions in which the tilt sensor may be arranged in either the upper or lower direction). I have. The mechanical filter 15 suppresses the rapid flow of the dielectric fluid when the inclination sensor is rapidly inclined. By providing this,
Reverse output of voltage can be suppressed. Therefore, the mechanical filter 15 is not electrically connected to the differential electrode 10 or the reflow pattern 11, but is simply attached to the inner surface of the sensor substrate 1. Mechanical filter 1
For example, when a commercially available resistance element is used as the element 5, it is convenient because it can be automatically mounted on the sensor substrate 1 at a low cost. Of course, in addition to the resistance element, for example, a simple ordinary columnar (or cylindrical) member may be used.
Alternatively, a member equivalent thereto may be used.

The conductive case 2 itself is a common electrode, and has a differential electrode 10 and a mechanical filter 15 inside.
And a recess 20 for storing a dielectric fluid or the like. The case 2 is formed by, for example, a cutting process, and is soldered to a reflow pattern 11 provided around the inner surface of the sensor substrate 1. Thereby, Case 2,
That is, the common electrode 2 accurately faces the differential electrode 10 with a certain gap therebetween, and the dielectric fluid contained in the recess 20 is securely sealed.

The case 2 has two injection holes 21 for injecting a dielectric fluid, and a predetermined amount (recess) is formed in the space (recess 20) formed between the sensor substrate 1 and the case 2 through the injection holes 21. (About half of the capacity of 20). After the dielectric fluid is injected, the injection hole 21 is sealed with solder. Of course, the shape and the number of the injection holes 21 are not limited to those shown.

To attach the case 2 to the sensor board 1,
For example, this is performed as shown in FIG. 5 or FIG. In FIG. 5, cream solder 30 is first applied onto the reflow pattern 11 on the inner surface of the sensor substrate 1 (see FIG. 5A), and then the case 2 is mounted on the cream solder 30 by a chip mounter. 5 (b)], the sensor substrate 1 and the case 2 are joined through a reflow furnace. In FIG. 6, after applying solder plating 31 on the reflow pattern 11 on the inner surface of the sensor substrate 1 and further applying flux on the solder plating 31, the case 2 is mounted on the solder plating 31 by a chip mounter, and then heated. The sensor substrate 1 and the case 2 are joined by pressing the case 2 against the sensor substrate 1 by the pressing jig 35 thus performed.

FIG. 7 is an exploded perspective view of a tilt sensor according to another embodiment, and FIG. 8 is a perspective view of a case 2 '. However, the same elements as those described above are denoted by the same reference numerals. In this tilt sensor, a sensor substrate 1 has exactly the same structure as the tilt sensor of the above embodiment, but a case 2 'is different. The case 2 ′ is formed by deep drawing by press working. Like the case 2, the case 2 ′ has a concave portion 20 on the inside and an injection hole 21 for injecting a dielectric fluid.

The tilt sensor configured as described above is actually incorporated in a tilt detection device as shown in FIG. 9 (outside perspective view (a), inside perspective view (b)). This tilt detecting device detects a tilt in two axes (X-axis direction, Y-axis direction), and has a convex housing 40. The housing 40 has a pair of mounting holes 41 for mounting the device to various devices, and a device connecting cable 42 extending to the outside.

In the housing 40, a functional circuit board 50 as shown in FIG.
The inclination sensors S1 and S2 are mounted in directions orthogonal to each other (X-axis direction, Y-axis direction). Functional circuit board 5
Various electronic components are mounted on both surfaces of the functional circuit board 50, and respective terminal portions 1a of the inclination sensors S1 and S2 are inserted into insertion holes formed at predetermined positions of the functional circuit board 50 with the case 2 outside or inside. Each terminal of the terminal portion 1a is soldered to a predetermined pattern of the functional circuit board 50. Note that when the case 2 is inserted with the case 2 inside, the influence of interference between the tilt sensors S1 and S2 increases, but the effect becomes stronger against external noise.

FIG. 11 (a cross-sectional view taken along line EE in FIG. 12) and FIG.
2 (a cross-sectional view taken along line DD in FIG. 11) and FIG.
This will be described with reference to (a cross-sectional view taken along line CC in FIG. 11). Inside the upper wall of the housing 40, the functional circuit board 5
The support pieces 51 respectively supporting the tilt sensors S1 and S2 attached to the projection 40 project downward, and a shield plate 52 having holes through which the support pieces 51 are inserted covers the upper wall and the four side walls of the housing 40. Are arranged in the housing 40. The shield plate 52 is for preventing external noise from entering.

When the functional circuit board 50 is accommodated from the bottom of the housing 40, the tilt sensors S1 and S2 are supported by the support pieces 51 and face the shield plate 52, respectively. After housing the functional circuit board 50 in the housing 40, the bottom of the housing 40 is filled with resin, and the housing 40 is sealed. The detecting operation of the tilt detecting device is the same as that of the conventional tilt detecting device, but the detection principle will be briefly described here. In FIG. 14A, when the fluid level of the dielectric fluid sealed in the tilt sensor is at the position indicated by the one-dot chain line in the horizontal state of the tilt sensor (the fluid level is located at the center of the pair of differential electrodes 10). In this case, when the inclination sensor is inclined and the fluid surface changes to the position indicated by the solid line in the figure, the increase or decrease (the shaded portion) of the contact area between the dielectric fluid and the differential electrode 10 is represented by ΔS, and the liquid surface is represented by ΔS. Is the angle between the horizontal position and the inclined position, C ₁ and C ₂ are the capacitances formed by each differential electrode 10 and the dielectric fluid, and r is the distance from the center to the outer edge of the sectoral differential electrode 10. And In FIG. 14B, the distance between the sensor substrate 1 and the case 2 facing each other, that is, the depth of the concave portion 20 of the case 2 is d. Then, the following equation is established.

ΔS = πr ² (θ / 360) ΔC ₁ = (ε _S −ε _air ) (ΔS / d) ΔC ₂ = (ε _air −ε _S ) (ΔS / d) Therefore, the total capacitance C Changes in Becomes

In the above embodiment, cases 2, 2 '
The case where the electrode itself is a common electrode has been described.
A common electrode may be provided on the inside (recess 20) of the insulating case opposite to. FIG. 15 [outside perspective view (a), inside perspective view (b)] shows a tilt detection device according to another embodiment. However, the same elements as those of the above-mentioned device are denoted by the same reference numerals. This tilt detector also has two axes (X-axis direction, Y-axis direction)
It detects the inclination of the direction and has a housing 40, but the shape of the housing 40 is different from that described above.

As shown in FIG. 19 (outside perspective view), FIG. 20 (inside perspective view), and FIG. 21 (internal plan view), two housings 40 are attached to the functional circuit board 50. It has a sensor accommodation groove 45 for accommodating only the inclination sensors S1 and S2 (see FIG. 22). Sensor accommodation groove 45
Has an L-shape according to the two inclination sensors S1 and S2 arranged in the X-axis direction and the Y-axis direction, and the sensor housing groove 45 becomes an L-shaped convex portion 44 on the appearance of the housing 40. appear. A cable 42 is provided inside the housing 40.
Is formed, and a locking groove 46a for fitting a clamp 42a (see FIG. 17) attached to the cable 42 is formed in the groove 46. Further, a screw hole 48 for fixing the functional circuit board 50 is formed inside the cable 40.

In such a housing 40, FIG.
A functional circuit board 50 as shown in [a front perspective view (a) and a rear perspective view (b)] is incorporated. The tilt sensors S1 and S2 attached to the functional circuit board 50 are shown in FIG.
Unlike the above case, each case is soldered to the circuit board 50 with the case 2 inside. And the inclination sensor S
A sensor shield plate 55 is put on each of S1 and S2.

As shown in FIG. 23 (back side perspective view (a), front side perspective view (b)), the sensor shield plate 55 has a shape surrounding the tilt sensors S1 and S2.
The terminal 55a to be soldered to the wiring pattern of No. 0 and the resin filled in the internal space of the housing 40 uniformly enter the gap between the shield plate 55 and the inclination sensor (sensor substrate). It has a hole 55b and a notch 55c for positioning by fitting the support piece 51 provided in the sensor receiving groove 45 of the housing 40. By surrounding each of the inclination sensors S1 and S2 with the sensor shield plate 55, mutual electric interference of the inclination sensors S1 and S2 can be prevented, which is effective in the case of two-axis detection.

The functional circuit board 50 shown in FIG. 22 is surrounded by a board shield plate 60 inside the housing 40. FIGS. 24 (inside perspective view (a), front side perspective view (b)) and FIG. 25 [inside plan view (a), front side plan view (b), left side view of (a)] (C) and (a) are right side views (d). The board shield plate 60 has square holes 61 a and 61 b through which the tilt sensors S 1 and S 2 are inserted, respectively, and terminals 62 to be soldered to the wiring pattern of the functional circuit board 50. By surrounding the functional circuit board 50 with the board shield plate 60, intrusion of external noise can be prevented.

In this tilt detecting device, instead of the shield plate 52 in the tilt detecting device, a tilt sensor S1,
S2 is surrounded by the sensor shield plate 55, and the functional circuit board 5
Since 0 is surrounded by the substrate shield plate 60, the shape of the shield plate can be simplified, and not only external noise but also electrical interference between sensors can be prevented. or,
After the functional circuit board 50 is accommodated in the housing 40, the internal space of the housing 40 is filled with resin, and the housing 40 is sealed. Here, the housing 40
Sensor accommodation groove 45 for accommodating only tilt sensors S1 and S2
Since only the sensor accommodating groove 45 is deeper than the other space, the required resin filling amount is reduced, and the cost can be reduced.

[0030]

According to the tilt sensor according to the first aspect of the present invention, since the case also serves as the common electrode, the following effects can be obtained as compared with the conventional case in which the case and the common electrode are separated. (1) The case also serving as the common electrode can be stably and reliably joined to the differential electrode. (2) The number of parts can be reduced. (3) Man-hours can be reduced. In particular, all the sealing steps for joining the case and the differential electrode can be automated. (4) The gap between the differential electrode and the common electrode (that is, the case) can be accurately managed, and the tilt angle can be detected with high accuracy. (5) The size of the tilt sensor can be reduced. (6) The required injection amount of the dielectric fluid can be reduced,
That can save costs. (7) According to the configuration of the third aspect, injection of the dielectric fluid becomes easy. (8) According to the configuration of claim 5, the following effects i to iii are obtained.

I) When the inclination sensor is rapidly inclined, the rapid flow of the dielectric fluid can be suppressed, and the reverse output of the voltage can be suppressed. ii) Since the mechanical filter can be mounted together with the case using a chip mounter, automation can be performed and the number of steps can be reduced. In addition, by using a commercially available resistor element as the mechanical filter, a dedicated mold is not required, and equipment investment can be suppressed.

Iii) By using both the mechanical filter and the circuit filter, the response time and the voltage reverse output change little with respect to the change in the offset position (the distance from the rotational position to the position of the center of gravity of the sensor). (9) According to the configuration of claim 6, the intrusion of external noise can be prevented, and more accurate detection can be performed.

Further, according to the inclination detecting device of the present invention, since the inclination detecting device of the present invention is provided, the following effects can be obtained. (10) A direction perpendicular to the detection direction of the dielectric fluid (for example, X
Since the fluid level distance in the axial direction (in the Y-axis direction) can be reduced to a length equal to the gap between the differential electrode and the common electrode, erroneous output in the orthogonal axis direction (orthogonal axis sensitivity) can be reduced. . (11) By arranging the tilt sensor in a vertically symmetric position, even if the mounting position of the tilt sensor is turned upside down, it is possible to suppress the characteristic difference of response time-voltage reverse output at the time of mounting upside down. (12) By separating the functional circuit board and the sensor board, the size of the tilt detection device can be reduced. (13) Parts (housing, shield plate, etc.) can be shared by the uniaxial and biaxial devices, and costs can be reduced.

On the other hand, according to the inclination detecting device of the present invention, since the housing has the sensor accommodating groove for accommodating only the inclination sensor on the circuit board, the following effects can be obtained. (14) Resin filling amount is reduced compared to the conventional case where the whole is an internal space with a uniform depth according to the height of the tilt sensor,
Costs can be reduced. (15) According to the ninth aspect of the invention, since the shield plate is configured separately for the tilt sensor and the circuit board, not only the intrusion of external noise but also the mutual interference between the tilt sensors in the case of two-axis detection is prevented. And the shape of the shield plate can be simplified.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view of a tilt sensor according to one embodiment.

FIG. 2 is an exploded perspective view of the tilt sensor of FIG. 1 as viewed from another direction.

3A is an inner view of a sensor substrate in the tilt sensor of FIG. 1 (a cross-sectional view taken along line BB in FIG. 3B), and FIG. 3B is a cross-sectional view of the tilt sensor; ) Line AA
FIG.

FIG. 4 is an inner view (a) and an outer view (b) of a sensor substrate in the tilt sensor of FIG. 1;

FIG. 5 is a schematic sectional view illustrating an example of a method of joining a case to a sensor substrate in the tilt sensor of FIG.

FIG. 6 is a schematic cross-sectional view illustrating another example of a method of joining a case to a sensor substrate in the tilt sensor of FIG.

FIG. 7 is an exploded perspective view of a tilt sensor according to another embodiment.

8 is a perspective view of a case in the tilt sensor of FIG. 7 as viewed from another direction.

9A and 9B are an external perspective view of an example of an inclination detecting device incorporating the inclination sensor according to the embodiment, as viewed from the outside, and an external perspective view, as viewed from the inside, of the example.

FIG. 10 is a perspective view of a functional circuit board to which two tilt sensors are attached, which are accommodated in the tilt detecting device of FIG. 9;

FIG. 11 is a cross-sectional view of the inclination detecting device of FIG. 9 (line E in FIG. 12);
-E is a sectional view).

FIG. 12 is a sectional view taken along line DD of FIG. 11;

FIG. 13 is a sectional view taken along line CC of FIG. 11;

14A and 14B are views for explaining the principle of tilt detection, and are an inner view (a) of the sensor substrate [a cross-sectional view taken along line GG in FIG. 14B] and a cross-sectional view of the tilt sensor (b). [FIG. 14
(A) is a sectional view taken along line FF of FIG.

FIG. 15A is an external perspective view of an inclination detecting device according to another embodiment as viewed from the outside, and FIG.

FIG. 16 is a vertical sectional view of a main part of the inclination detecting device of FIG. 15;

FIG. 17 is a bottom view of the inclination detecting device of FIG. 15;

FIG. 18 is a sectional view taken along line HH in FIG. 17;

19 is an external perspective view of the outside of a housing in the tilt detection device of FIG.

20 is an external perspective view of the inside of a housing in the tilt detection device of FIG.

FIG. 21 is an internal plan view of a housing in the inclination detecting device of FIG. 15;

22 is a front perspective view (a) and a rear perspective view (b) of a functional circuit board in the tilt detection device of FIG.

23A and 23B are a rear perspective view and a front perspective view of a sensor shield plate in the functional circuit board of FIG. 22;

24A and 24B are an inner perspective view and a front perspective view of a substrate shield plate in the tilt detection device of FIG.

FIG. 25 is an inner plan view (a), a front plan view (b), and a left side view (c) of (a) of the substrate shield plate of FIG. 24;
And (d) is a right side view of (a).

FIG. 26 is an exploded perspective view of a tilt sensor according to a conventional example.

FIG. 27 is an exploded perspective view of a tilt sensor according to another conventional example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Sensor board 1a Terminal part 2, 2 'Conductive case which also serves as common electrode 10 Differential electrode 11 Reflow pattern 13 Shield pattern 15 Mechanical filter 20 Depression 21 Injection hole 40 Housing for tilt detection device 45 Sensor accommodation groove 50 Functional circuit board 52 shield plate 55 sensor shield plate 60 board shield plate S1, S2 tilt sensor

Claims (11)

[Claims] 1. A pair of differential electrodes, a case in which the differential electrodes are housed, and also serves as a common electrode facing the differential electrodes with a gap therebetween, and a fluid surface having a pair of differential electrodes and a common electrode. And a dielectric fluid sealed in a case so as to change in accordance with the inclination between the inclination sensors. 2. The tilt sensor according to claim 1, wherein the case has a common electrode on the inside facing the differential electrode. 3. The tilt sensor according to claim 1, wherein the case has an injection hole for a dielectric fluid. 4. The tilt sensor according to claim 1, wherein the pair of differential electrodes are provided on a sensor substrate, and the case is attached to the sensor substrate. 5. The tilt sensor according to claim 4, wherein the sensor substrate has a mechanical filter at a position immersed in the dielectric fluid for suppressing rapid flow of the dielectric fluid. 6. The tilt sensor according to claim 4, wherein the sensor substrate has a shield pattern. 7. An inclination detecting device according to claim 1, wherein said inclination sensors are arranged in directions orthogonal to each other. 8. A tilt detecting device in which a circuit board having a capacitance type tilt sensor for detecting a tilt angle mounted therein and a shield plate surrounding the circuit board are housed in the housing. An inclination detecting device having a sensor accommodation groove for accommodating only an inclination sensor on a substrate. 9. The tilt detecting device according to claim 8, wherein said shield plate is configured to be separated into a sensor shield plate surrounding a tilt sensor and a board shield plate surrounding a circuit board. 10. The tilt detecting device according to claim 8, wherein two of said tilt sensors are arranged in a direction orthogonal to each other. 11. The tilt sensor according to claim 1, wherein the tilt sensor is the tilt sensor according to any one of claims 1 to 6.
The tilt detection device according to claim 9 or 10.