JPH11265826A - High voltage pulse generating circuit and magnetic component therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To eliminate the need for dipping the whole magnetic component in a refrigerant and to make it possible to increase the stray capacitance of the magnetic component, by a method wherein magnetic cores and cooling fins are alternately laminated and the refrigerant is circulated in those cooling fins. SOLUTION: Doughnut-shaped cooling fins 10 and unit wound magnetic cores 11 are alternately laminated to form the interiors of the fins 10 into each cavity and the cavities are filled with a liquid refrigerant 20. Moreover, this refrigerant 20 is circulated in the interior of the fins 10 by a circulating pump provided on the outside of a magnetic component through as heat exchanger. In such a way, heat generated in the magnetic cores 11 is transferred to the fins 10 adjacent to the magnetic cores 11 and, moreover, is discharged to the outside by the refrigerant 20 being circulated in the interior of the fins 10. As a result, the heat generated in the cores 11 is never overheated and as the space on the periphery of the magnetic component is low permissivity gas, the stray capacitance of the magnetic component also is never increased, and degradation in the performance of the magnetic component due to the effect of the increase in the capacitance can be prevented from being caused.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic component for generating a high-voltage pulse used in a power supply circuit of a discharge excitation laser such as an accelerator or an excimer laser.

[0002]

2. Description of the Related Art A discharge pumping laser such as an accelerator or an excimer laser requires a high-voltage, large-current pulse discharge circuit with a fast rise. In such a pulse discharge circuit, the charge stored in the capacitor is discharged using a high-speed switch, and the generated pulse is passed through a pulse compression circuit called a magnetic compression circuit or a step-up pulse transformer to compress the pulse width, increase the voltage, etc. And lead to the load.

FIG. 8 illustrates a circuit disclosed in JP-A-6-61802 as an example of such a pulse discharge circuit. In the pulse discharge circuit of FIG. 8, the capacitors C0 and Cl and the saturable reactor 51 constitute a first resonance circuit, and the capacitors Cl and C2 and the saturable reactor 5
4 constitutes a second resonance circuit, the capacitors C2 and C3 and the saturable reactor 56 constitute a third resonance circuit, and the capacitors C3 and Cpk and the saturable reactor 58 constitute a fourth resonance circuit.

When the capacitor C0 is charged to the voltage V0 in advance and the switch 50 is turned on, the capacitor C1 has a pulse width determined by the resonance frequency of the first resonance circuit.
Is charged, then the capacitor C2 is charged with a pulse width determined by the resonance frequency of the second resonance circuit, and then the capacitor C3 is charged with a pulse width determined by the resonance frequency of the third resonance circuit. The capacitor Cpk is charged with a pulse width determined by the resonance frequency of the resonance circuit. When the capacitor C3 is charged, the voltage is amplified at this stage because the pulse transformer 100 is inserted in the resonance circuit.

In magnetic components such as saturable reactors and transformers used in such high-voltage pulse generators, the layers of a magnetic foil strip made of a non-quality alloy or the like having excellent short-pulse magnetic properties are formed by a high-density material such as a polyester film. The wound cores insulated by coating with an insulating material such as molecular film or magnesium oxide are used in a stacked state.

When high voltage pulses are generated repeatedly, these magnetic components generate heat due to core loss. However, since these magnetic components sandwich an insulating material between layers, heat conduction in a direction crossing the insulating material, that is, in a rearward direction of the wound core is poor, and heat can be expected only from the upper and lower end surfaces. For this reason, it is generally immersed in insulating oil or the like as shown in Japanese Patent Publication No. 7-16057 and cooled by circulation.

[0007]

However, when a liquid insulator such as insulating oil is used as a refrigerant, the following problems have occurred. That is, since the liquid insulator has a relative dielectric constant of 2 to 3, when the entire magnetic component is immersed, it has a floating capacitance several times that in the air. These stray capacitances are not represented on the circuit diagram, but as if a capacitor was connected in parallel with the saturable reactor or a capacitor was connected between the primary and secondary windings of the transformer. Performs a similar function.

As a result, the resonance operation of the resonance circuit is adversely affected, and the step-up efficiency of the transformer is deteriorated. In order to prevent this, it is necessary to increase the distance between the magnetic core, the coil, and the housing. There is a problem that the rise is slowed down.

The present invention has been made to solve the above-mentioned problems of the conventional magnetic components for generating a high-voltage pulse, and has a small size and an insulating performance without a decrease in performance due to the influence of stray capacitance. It is another object of the present invention to obtain a magnetic component for generating a high-voltage pulse, which is stable also, a magnetic component for generating a high-voltage pulse, and a high-voltage pulse generating circuit that are stable even in repetitive operations.

[0010]

According to a first aspect of the present invention, there is provided a magnetic component for a high-voltage pulse generating circuit according to the present invention, wherein magnetic cores and cooling fins are alternately laminated, and By circulating the refrigerant therein, the heat generated in the magnetic core is transmitted to the cooling fins, further transmitted to the refrigerant circulating inside the cooling fins, and discharged to the outside. Therefore, it is not necessary to immerse the whole in the refrigerant, and the floating capacitance does not increase.

In the magnetic component for a high-voltage pulse generating circuit according to a second aspect of the present invention, heat generated by the magnetic core is obtained by alternately laminating the magnetic core and the cooling fin and embedding the heat pipe in the cooling fin. It is transmitted to the cooling fins and further evaporates the working fluid inside the heat pipe. The working fluid is deprived of heat at the upper part of the heat pipe, and the heat finally generated by the magnetic core is discharged to the outside from a heat sink attached to the upper part of the heat pipe. Therefore, it is not necessary to immerse the whole in the refrigerant, and the floating capacitance does not increase.

In the magnetic component for a high-voltage pulse generating circuit according to a third aspect of the present invention, an insulating plate is interposed between the cooling fin and the magnetic core, so that the insulating plate is provided between the cooling fin and the magnetic body. As a result, the adjacent magnetic material foils are not electrically short-circuited by the cooling fins, so that interlayer dielectric breakdown of the magnetic core can be prevented.

In the magnetic component for a high-voltage pulse generating circuit according to a fourth aspect of the present invention, since the cooling fin is made of an insulator, the adjacent magnetic material foil is not electrically short-circuited by the cooling fin. In addition, it is possible to prevent the interlayer dielectric breakdown of the magnetic core from occurring.

In the magnetic component for a high-voltage pulse generating circuit according to claim 5 of the present invention, by using ceramic as the insulator, it is possible to prevent interlayer dielectric breakdown of the magnetic core without impairing the heat radiation performance.

In the magnetic component for a high-voltage pulse generating circuit according to claim 6 of the present invention, by forming an insulating film on the surface of the cooling fin, it is possible to prevent interlayer dielectric breakdown of the magnetic core without impairing heat radiation performance. Can be.

In the magnetic component for a high-voltage pulse generating circuit according to claim 7 of the present invention, since the insulating film is made of an epoxy coating, it is possible to prevent interlayer dielectric breakdown of the magnetic core without impairing the heat radiation performance.

In the magnetic component for a high-voltage pulse generating circuit according to claim 8 of the present invention, since the insulating film is formed of a ceramic coating, it is possible to prevent interlayer dielectric breakdown of the magnetic core without impairing the heat radiation performance.

In the magnetic component for a high-voltage pulse generating circuit according to the ninth aspect of the present invention, the surface of the portion charged with the high voltage is kept clean by being housed in the closed casing together with the inert gas. When the device is used for a long period of time, deterioration of insulation performance due to contamination is eliminated, and the insulation distance can be shortened.

In the magnetic component for a high-voltage pulse generating circuit according to claim 10 of the present invention, since the inert gas is a mixed gas of nitrogen and sulfur hexafluoride, the ratio contributing to global warming is low. Can be suppressed.

In the high-voltage pulse generating circuit according to the eleventh aspect of the present invention, the magnetic components for the high-voltage pulse generating circuit, the switching elements, and the capacitors, which are the components, are housed in a closed tank filled with an inert gas. In addition, it is possible to minimize the increase in the wiring distance due to the connection conductor pull-out, and to provide a smaller, lighter and less expensive high-voltage pulse generating circuit.

In the high-voltage pulse generating circuit according to the twelfth aspect of the present invention, the heat generated by the capacitor is reduced by circulating the refrigerant inside the conductor that is in close contact with the capacitor and connects to other equipment. To the refrigerant flowing inside the conductor and discharged to the outside.

In a high-voltage pulse generating circuit according to a thirteenth aspect of the present invention, a conduit is welded to a conductor which is in close contact with the capacitor and connects to other equipment, and a refrigerant is circulated through the conduit to thereby form a capacitor. Is transmitted to the conductor and further transmitted to the refrigerant flowing through the inside of the pipe line closely contacted with the conductor, and is discharged to the outside.

[0023]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing a magnetic component for a high-voltage pulse generating circuit according to a first embodiment of the present invention. In the drawing, donut-shaped cooling fins 10 and unit winding cores 11 are alternately stacked. Further, the inside of the cooling fin 10 is hollow and is filled with the liquid refrigerant 20. The refrigerant is circulated through a heat exchanger (not shown) by a circulation pump provided outside.

With this configuration, the heat generated in the wound core is transmitted to the adjacent cooling fins and further discharged outside by the refrigerant circulating inside the fins. Therefore, the heat generated in the winding core is discharged to the outside by the circulating refrigerant, so that it does not overheat. Further, since the space around the magnetic component is a gas having a low dielectric constant, the floating capacitance does not increase, so that a decrease in performance due to the influence can be prevented.

FIG. 2 is a view showing a magnetic component for a high-voltage pulse generating circuit according to a second embodiment of the present invention. here,
The same parts as those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted.

In the cooling fin of FIG. 2, a circulation path for circulating the refrigerant is provided inside the cooling fin, and the refrigerant flows therethrough. Other functions and effects are the same as those of the first embodiment, and thus description thereof is omitted.

FIG. 3 is a view showing a magnetic component for a high-voltage pulse generating circuit according to a third embodiment of the present invention. here,
The same parts as those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted.

In the cooling fin shown in FIG. 3, a heat pipe is embedded in the cooling fin, a plurality of heat radiating plates are mounted on the heat pipe, and air is blown by a fan (not shown) provided outside. Can be

With this configuration, the heat generated in the winding core is transmitted to the adjacent cooling fins, further transmitted to the upper portion of the heat pipe by evaporation of the working fluid inside the heat pipe, and finally discharged from the heat radiating plate to the outside. .

Therefore, the heat generated in the wound core is discharged to the outside by the heat pipe, so that the heat is not overheated.
Further, since the space around the magnetic component is a gas having a low dielectric constant, the floating capacitance does not increase, so that a decrease in performance due to the influence can be prevented.

FIG. 4 is a view for explaining a fourth embodiment of the present invention, in which a winding core 11, an insulating plate 21, and cooling fins 10 are provided.
2 shows an enlarged cross section of the contact portion. In FIG.
The wound core is composed of a layer of a magnetic foil 12 and an insulating film 13, and a magnetic component for generating a high voltage pulse is provided by placing an insulating plate on a wound core in which the magnetic foil 12 and the insulating film 13 are alternately wound. It is composed by stacking cooling fins on top.

With this configuration, heat generated in the winding core is transmitted to the cooling fins 10 across the insulating plate 21.
Therefore, since the insulating plate is provided between the cooling fin and the magnetic material, the adjacent magnetic material foil is not electrically short-circuited by the cooling fin. If there is no insulating plate, for example, an insulating film 13 is placed on the magnetic foil 12 to prevent a short circuit.
However, in this case, an air layer is formed between the magnetic foil 12 and the cooling fins 10, so that the heat transfer coefficient is reduced and the cooling efficiency is reduced. Therefore, according to the present embodiment, it is possible to obtain a magnetic component for generating a high-voltage pulse with stable cooling efficiency and insulating performance.

The material of the insulating plate 21 is preferably a ceramic having excellent insulating performance and excellent heat transfer. Also,
When the cooling fin itself is made of an insulating material such as ceramic, the above-described insulating plate is unnecessary.

Further, even if the cooling fin is made of metal, if an insulating film is formed on the surface of the cooling fin, the same operation and effect as when an insulating plate is provided can be obtained. Epoxy coating or ceramic coating is suitable as the type of insulating film.

FIG. 5 is a diagram showing a saturable reactor according to a fifth embodiment of the present invention. The reactor shown in FIG. 5 is constituted by alternately laminating the cooling fins 10, the winding core 11, and winding the coil 15 around the inner and outer peripheries thereof, and enclosing the coil 15 with the inert gas 16 in the closed casing 30. . The electrical connection with the outside of the housing is performed through the through terminal 17.

By enclosing the device in a sealed housing, the surface of the portion charged with a high voltage is kept clean, so that when the device is used for a long period of time, the insulation performance does not decrease due to contamination, and the insulation distance is reduced. Can be smaller.

The use of a mixture of nitrogen and sulfur hexafluoride gas as the inert gas is advantageous in that the insulation performance is improved and the rate of contribution to global warming can be reduced.

Furthermore, not only the magnetic component alone, but also the other high-speed switches and capacitors required as a high-voltage pulse generating circuit are housed in the same housing, so that the wiring distance due to the connection conductor drawing-out increases. By minimizing it, a smaller, lighter and cheaper high-voltage pulse generating circuit can be obtained.

Next, a method of cooling a capacitor used in the high-voltage pulse generating circuit will be described. In a high-voltage pulse generating circuit, a plurality of cylindrical ceramic capacitors are often connected in series and parallel. Ceramic capacitors have many excellent features such as high withstand voltage and suitability for large current flow, but have the disadvantage that the capacitance is temperature-dependent. Therefore, if a repetitive operation is carried out when incorporated in a high-voltage pulse generating circuit, the capacitance changes due to self-heating due to dielectric loss. In order to prevent this, it is necessary to cool the condenser to reduce the temperature change. The following is for obtaining a high-voltage pulse generating circuit which is small in the temperature change of the capacitor and stable even in the repetitive operation.

FIG. 6 is a view showing a mounting portion of a capacitor used in a high-voltage pulse generating circuit according to a sixth embodiment of the present invention. In the present embodiment, the cylindrical ceramic capacitor 40 is fixed by being sandwiched between a first conductor plate 42 and a second conductor plate 41 which have a cavity therein and through which a coolant flows.

By doing so, the capacitor 40
Is transmitted to the first conductive plate 42 and is removed by the refrigerant flowing inside the conductive plate 42, so that the temperature rise of the capacitor 40 can be suppressed.

FIG. 7 is a view showing a mounting portion of a capacitor used in a high-voltage pulse generating circuit according to a seventh embodiment of the present invention. In the present embodiment, the cylindrical ceramic capacitor 40 is fixed by being sandwiched by a conductor plate 44 that welds the conduit 43 and allows the coolant to flow.

By doing so, the capacitor 40
The heat generated in the process is transmitted to the conductor plate 44 and
The temperature rise of the condenser 40 is suppressed because the refrigerant is removed by the refrigerant flowing through the pipeline welded to the pipe.

[0044]

As described above, according to the present invention, the performance does not decrease due to the influence of the floating capacitance.
It is possible to obtain a high-voltage pulse generating magnetic component that is small in size and stable in insulation performance and a high-voltage pulse generating circuit stable in repetitive operation.

[Brief description of the drawings]

FIG. 1 is a diagram showing a magnetic component for a high-voltage pulse generating circuit according to a first embodiment of the present invention.

FIG. 2 is a diagram illustrating a magnetic component for a high-voltage pulse generating circuit according to a second embodiment of the present invention.

FIG. 3 is a view showing a magnetic component for a high-voltage pulse generating circuit according to a third embodiment of the present invention.

FIG. 4 is a partially enlarged view of a magnetic component for a high-voltage pulse generation circuit according to a fourth embodiment of the present invention.

FIG. 5 is a diagram showing a saturable reactor according to a fifth embodiment of the present invention.

FIG. 6 is a diagram illustrating a mounting portion of a capacitor used in a high-voltage pulse generation circuit according to a sixth embodiment of the present invention.

FIG. 7 is a diagram illustrating a mounting portion of a capacitor used in a high-voltage pulse generation circuit according to a seventh embodiment of the present invention.

FIG. 8 is a circuit diagram of a conventional high-voltage pulse generation circuit.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... Cooling fin 11 ... Winding core 12 ... Magnetic material foil 13 ... Insulating film 15 ... Coil 16 ... Inert gas 17 ... Through terminal 20 ... Refrigerant 21 ... Insulating plate 30 ... Housing 40 ... Capacitor 41, 42, 44 ... Conductor Plate 43 ... Pipe line

Claims (13)

[Claims] 1. A magnetic component for a high-voltage pulse generating circuit, wherein magnetic cores and cooling fins are alternately stacked, and a coolant is circulated in the cooling fins. 2. A magnetic component for a high-voltage pulse generating circuit, wherein magnetic cores and cooling fins are alternately stacked, and a heat pipe is embedded in the cooling fins. 3. The magnetic component for a high-voltage pulse generating circuit according to claim 1, wherein an insulating plate is interposed between the cooling fin and the magnetic core. 4. The magnetic component for a high-voltage pulse generating circuit according to claim 1, wherein said cooling fin is made of an insulating material. 5. The magnetic component for a high-voltage pulse generating circuit according to claim 4, wherein said insulating plate is made of ceramic. 6. The magnetic component for a high-voltage pulse generating circuit according to claim 1, wherein an insulating film is formed on a surface of the cooling fin. 7. The magnetic component for a high-voltage pulse generating circuit according to claim 6, wherein said insulating film is an epoxy coating. 8. The magnetic component for a high-voltage pulse generating circuit according to claim 6, wherein said insulating film is a ceramic coating. 9. The magnetic component for a high-voltage pulse generating circuit according to claim 1, wherein the magnetic component is housed in a closed casing together with an inert gas. 10. The magnetic component for a high-voltage pulse generating circuit according to claim 9, wherein said inert gas is a mixed gas of nitrogen and sulfur hexafluoride. 11. A high-voltage pulse generating circuit having at least a magnetic component for a high-voltage pulse generating circuit, a switching element, and a capacitor, wherein the magnetic component for a high-voltage pulse generating circuit is according to any one of claims 1 to 8. A high-voltage pulse generating circuit characterized by being housed in a sealed tank filled with an inert gas, as the magnetic component for the high-voltage pulse generating circuit described in the above. 12. A high-voltage pulse generating circuit having at least a magnetic component for a high-voltage pulse generating circuit, a switching element, and a capacitor, wherein a refrigerant is circulated inside a conductor that is in close contact with the capacitor and connects to another device. A high-voltage pulse generation circuit characterized by the following. 13. A high-voltage pulse generating circuit having at least a magnetic component for a high-voltage pulse generating circuit, a switching element, and a capacitor, wherein a conduit is welded to a conductor that is in close contact with the capacitor and that is connected to another device. A high voltage pulse generation circuit characterized by circulating a refrigerant through a pipeline.