JPH11263403A - Abnormality process control method for automatic guided vehicle - Google Patents

Abstract

PROBLEM TO BE SOLVED: To minimize the effect on the manufacturing term of a product by reporting the trouble of a process device to a host computer, and controlling an automatic guided vehicle with an abnormality process logic which prohibits conveyance to the device and allows the automatic guided vehicle to continue changeover conveyance to another process device. SOLUTION: When a trouble occurs on a process device 120 and the interlock and transaction between an automatic guided vehicle(AGV) 8 and the process device 120 are made infeasible, the AGV 8 reports the trouble of the process device 120 to a host computer H/C without making an error stop requiring a manual recovery. The host computer H/C rewrites the state data of the process device 120, continues the conveyance of the AGV 8, and returns a conveyance-interrupted carrier A22 to a stocker 3. The host computer H/C searches process devices except the process device 120 for the conveyance receiver of the carrier A22 and instructs the changeover conveyance to a pertinent process device G18. The AGV 8 can convey the carrier A22 from the stocker 3 to the process device G18.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an automatic guided vehicle abnormality processing control method, and more particularly to a cassette (hereinafter, referred to as "carrier") containing semiconductor substrates (hereinafter, referred to as "wafers").
Abnormal handling of an automated guided vehicle in an in-process transfer system using an unmanned guided vehicle (hereinafter referred to as "AGV") that supplies an automatic storage shelf (hereinafter, referred to as "stocker") to a process device or collects from the process device to a stocker It relates to a control method.

[0002]

2. Description of the Related Art Various processes are required for manufacturing a wafer, and the wafer must be moved by some means in the order of the steps.

[0003] In a clean room in a manufacturing plant, a plurality of small rooms (hereinafter referred to as "bays") are generally provided and stockers and process devices are installed in each bay. Is performed automatically by the in-process transfer system.

[0004] Previously, in many cases, a transfer station was provided for each group of process equipment, an AGV was used to automatically transfer between the stocker and the transfer station, and an operator manually transferred between the transfer station and the process equipment.
Due to problems such as insufficient transport capacity, insufficient reliability, low cleanliness, chemical contamination, increased cost, and increased transport station control load due to operator intervention, AG
The mainstream is a method of directly supplying carriers from a stocker to a process device by using V, or collecting carriers from the process device to a stocker.

FIG. 6 is a system state diagram A of a conventional example.
This shows the system status in the normal system during transport.

As shown in FIG. 1, the bay layout includes process devices A12 to J2 which perform the same kind of processing.
1 and a stocker 3 are installed, and an AGV 8 performing in-process transfer is waiting in this bay.

[0007] Process device I20, process device C1
4. The carrier supply request is issued from the process device G18 in this order, and the process is in a waiting state. Since the other process devices 10 are already processing, the carrier supply request has not been issued.

At this timing, the carrier A22 and the carrier B23 to be processed have not been processed to the stocker 3, that is, the carriers B23 and B23 have been transported in this order.
A transfer instruction is issued to the AGV 8 via the GV controller.

The carrier movement path A24 and the carrier movement path B25 indicate the movement paths when the carrier is transported in response to the transport instruction.

FIG. 7 is a flowchart A of the operation and control of the conventional example, and shows the operation and control flow of AGV8 conveyance in FIG.

The AGV 8 moves in front of the stocker 3 to carry the carrier A22 for which the carrying instruction has already been given (F-1).

The AGV 8 transports the carrier A22 from the stocker 3 to the process device I20 along the carrier moving path A24 (F-2).

Further, the AGV 8 moves in front of the stocker 3 to carry the carrier B23 for which the carrying instruction has already been given (F-3).

The AGV 8 transports the carrier B23 from the stocker 3 to the process device C14 along the carrier moving path B25 (F-4).

FIG. 8 is a system state diagram B of a conventional example.
This shows the system status in the abnormal system during transport.

The situation before the transfer is executed is the same as in FIG.
After the host computer 1 issues the transfer instruction, a trouble has occurred in the process device I20. Note that the carrier movement route C26 indicates a movement route when the carrier is transported in response to the transport instruction.

FIG. 9 is a flowchart B of the operation and control of the conventional example, and shows the operation and control flow of AGV8 conveyance in FIG.

Although a trouble has occurred in the process device I20 (F-5), the AGV 8 moves in front of the stocker 3 to transport the carrier A22 for which the transport instruction has already been given (F-6). .

The AGV 8 conveys the carrier A22 from the stocker 3 to the front of the process device I20 along the carrier moving path C26 (F-7). However, the AGV 8 cannot be engaged with the process device I20 due to an interlock failure (NG). The carrier A2 is attached to the process device I20.
2 cannot be passed (F-8).

The AGV 8 stops with an error (F-9), so that the conveyance cannot be continued.

Therefore, the carrier A22, the carrier B23 already reserved for transport, and all the carriers reserved thereafter are not supplied to the process apparatus until the recovery is manually performed.

[0022]

As described above, according to the prior art, if a trouble occurs in the process device after the host computer issues a transfer instruction to the AGV, the A
The GV stopped due to an error due to an interlock with the process equipment and could not continue the subsequent transfer. Therefore, the GV relied on manual labor to restore the system, causing a long-term system downtime and having a significant impact on the product production schedule. Was exerted.

[0023]

SUMMARY OF THE INVENTION A feature of the present invention is that an AGV for supplying an intermediate product in a manufacturing stage from a stocker to a process device or recovering the intermediate product from the process device to the stocker.
In an in-process transfer system using a computer, if the AGV is unable to exchange due to the interlock failure due to a trouble in the process device, that is, if the intermediate product cannot be delivered to this process device, it corresponds to the host computer. Notifying the trouble of the device, rewriting the status data of the relevant device, prohibiting the transfer to the relevant device, and continuing the transfer to the AGV, returning the interrupted intermediate product to the stocker, and transferring and transferring it to another process device. An AGV abnormality processing control method having abnormality processing logic. Alternatively, a feature of the present invention is that in an in-process transfer system using an AGV that supplies an intermediate product in a manufacturing stage from a stocker to a process device or recovers the process product from the process device to the stocker, the AGV is interlocked due to a failure in the process device. If it becomes impossible, that is, if the intermediate product cannot be delivered to this process device, it notifies the host computer of the trouble of the device and rewrites the status data of the device, and prohibits transport to the device. AG
An AGV abnormality processing control method having an abnormality processing logic for causing an intermediate product whose conveyance has been interrupted to be continuously transferred to another process device and transferred to another process device.

Here, in these AGV abnormality processing control methods, it is preferable that the host computer notified of the trouble of the process device displays the trouble at its terminal. Further, a large number of process devices that perform the same processing on the intermediate product will be arranged, and the trouble occurs in one of the plurality of process devices waiting for the supply of the intermediate product. The transfer transfer can be performed to a process device in which an intermediate product request is later than the process device in which the trouble has occurred.
Further, the process devices are arranged on both sides of the passage for carrying the AGV, respectively, and the process device to be transferred and transferred can be located on the same side as the process device in which the trouble has occurred.

Further, the intermediate product in the manufacturing stage is a wafer stored in a carrier, and the carrier storing the wafer is supplied from a stocker to a process device using an AVG, or collected from the process device to the stocker. Thus, it is preferable to use the present invention in a method for manufacturing a wafer of a semiconductor device.

[0026]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the drawings.

FIG. 1 is a system state diagram of the first embodiment of the present invention, FIG. 2 is an operation and control flowchart of the first embodiment, and FIG. 3 is a diagram of the embodiment of the present invention. FIG. 1 is an overall system configuration diagram used.

Referring first to FIG. 3, an AGV controller 4 having a host computer 1 on the upper level and controlling the entire in-process transfer system includes a communication unit 5, a charger panel 6, a charging station 7, It has an AGV8.

The AGV controller 4 receives a transfer instruction from the host computer 1 and transmits the signal via the communication unit 5 to the AV controller.
A transport instruction is transmitted to the GV8 by a communication means such as an optical system.

When the voltage of the internal battery, which is the power source, drops below a certain value, the AGV 8 performs rapid charging at the charging station 7 connected to the charger panel 6.

Similarly, under the control of the host computer 1, there are a stocker 3 via a stocker controller 2, and a process device 10 via a process device controller 9.
The AGV 8 performs in-process transfer between the stocker 3 and the process device 10.

At this time, the AGV 8 handles the stocker 3 and the process device by interlocking with the communication means such as an optical system.

Further, a host computer terminal 11 is connected to the host computer 1, and can monitor information on a carrier storing a wafer, a state of each device, and the like.

FIG. 1 is a diagram showing a system state according to the first embodiment of the present invention, and shows a system state in an abnormal system during transport.

In FIG. 1, the situation before the transfer is executed is the same as in FIG. That is, in the bay layout, the process devices A12 to J21 and the stocker 3 that perform the same kind of processing are installed, and the AGV 8 that performs in-process transfer is waiting in this bay. Further, the process device I2
0, a request to supply a carrier containing wafers is issued from the process apparatus C14 and the process apparatus G18 in this order, and the apparatus is in a processing waiting state. That is, the process device I2
0 is the first wait state (wait (1)), the process device C14 is in the second wait state (wait (2)), and the process device G18 is in the third wait state (wait (3)). . Since other processing apparatuses are already processing the wafer, the carrier supply request has not been raised.

In FIG. 1, similarly to FIG. 8, a trouble has occurred in the process device I20 after the host computer 1 (FIG. 3) issues a transfer instruction.

The carrier moving route B25, the carrier moving route C26, the carrier moving route D27, the carrier moving route E28, and the carrier moving route F29 indicate the moving routes when the carrier is conveyed in response to the conveying instruction.

FIG. 2 shows the operation of the first embodiment of the present invention.
FIG. 2 is a control flowchart showing an AGV8 in FIG.
9 shows an operation / control flow of conveyance.

Although a trouble has occurred in the process device I20 (F-10), the AGV 8 moves to the front of the stocker 3 in order to carry the carrier A22 containing the wafer for which the carrying instruction has already been given ( F-11).

The AGV 8 conveys the carrier A22 from the stocker 3 to the front of the process device I20 along the carrier moving path C26 (F-12). However, the AGV 8 cannot be connected to the process device I20 due to an interlock failure. Cannot be transferred to the process device I20 from the device (F-1).
3).

Therefore, the AGV 8 does not stop with an error, that is, does not stop its operation until it is manually restored, and performs the abnormality processing control as follows. First, AGV
8 notifies the host computer 1 of the trouble of the process device I20 via the AGV controller 4 (F-1).
4). Then, the host computer 1 sets the process device I
Recognizing the trouble of No. 20, rewriting the status data of the device and prohibiting the subsequent transport to the process device I20 (F-
15).

Further, the host computer 1 displays a trouble of the process device I20 on the host computer terminal 11 (FIG. 3) (F-16), and informs the monitor of the abnormality and prompts the investigation.

During this time, the AGV 8 does not need to wait in particular, so that the subsequent conveyance corresponding to the other flow from F-14 is continued.

The AGV 8 transports the carrier A22 whose transport has been interrupted for the first time to the stocker 3 from the front of the process device I20 and returns it to the stocker 3 along the carrier moving path D27 (F-17).

Then, the host computer 1 searches for the transfer destination of the carrier A22 except for the process device I20 whose transfer is already prohibited, and schedules transfer transfer to the corresponding process device G18 (F-1).
9).

The stocker 3 transports the carrier A22 along the carrier moving path E28 according to the transport instruction of the host computer 1 (F-20).
The process device G of the carrier A22 is provided to the GV controller 4.
18 (F-21).

During this time, the AGV 8 does not need to stand by, so that the subsequent conveyance corresponding to the other flow from F-17 is continued. The AGV 8 transfers the carrier B23 from the stocker 3 to the process device C14 by the carrier moving path B25.
(F-18).

Thereafter, if the flow of F-21 has been completed, the AGV 8 moves before the stocker 3 to carry the carrier A22 (F-22). The AGV 8 transports the carrier A22 from the stocker 3 to the process device G18 along the carrier moving path F29 (F-23).

Therefore, the AGV 8 can continue the conveyance by performing the abnormal processing control without stopping the error, and can transfer the carrier A22, the carrier B23, and all the carriers reserved thereafter with almost no loss time. Can be supplied to

Next, a second embodiment of the present invention will be described.

FIG. 4 is a system state diagram of the second embodiment, and shows a system state in an abnormal system during transport. FIG. 5 is an operation / control flowchart of the second embodiment. Also, in the second embodiment, as in the first embodiment, the entire system shown in FIG. 3 is used. Note that, in FIG. 4, the same or similar portions as those in FIG.

In FIG. 4 as well, a trouble has occurred in the process device I20 after the host computer 1 issues a transfer instruction. Note that the carrier movement route B25, the carrier movement route C26, and the carrier movement route G30 indicate the movement routes when the carrier is transported in response to the transport instruction.

FIG. 5 shows an operation / control flow of AGV8 transport in the second embodiment.
(F-24), the AGV 8 moves in front of the stocker 3 to transport the carrier A22 for which the transport instruction has already been given (F-25).

The AGV 8 conveys the carrier A22 from the stocker 3 to the front of the process device I20 along the carrier moving path C26 (F-26). To process device I2
0 (F-27).

Therefore, the AGV 8 performs the abnormality processing control as described below without stopping the operation until the operation is manually restored. First, the AGV 8 sends the processing device I to the host computer 1 via the AGV controller 4.
The trouble of No. 20 is notified (F-28).

Then, the host computer 1 recognizes the trouble of the process device I20, rewrites the status data of the device, and prohibits the subsequent transfer to the process device I20 (F-29).

Further, the host computer 1 displays a trouble of the process device I20 on the host computer terminal 11 (FIG. 3) (F-30), and informs the monitoring person of the abnormality and prompts an investigation. During this time, the subsequent processing corresponding to the other flow from F-28 is continued.

The host computer 1 sets the transfer destination of the carrier A22 to the process device I2 in which the transfer is already prohibited.
0, and the transfer and transfer to the corresponding process apparatus G18 is scheduled (F-3).
1) Immediately instruct the AGV controller 4 (FIG. 3) to transport the carrier A22 to the process device G18 (F
-32).

The AGV 8 transfers the carrier A22 from the front of the process device I20 to the process device G18.
It is transported as indicated by 30 (F-33).

The AGV 8 moves in front of the stocker 3 to carry the carrier B23 (F-3).
4). The AGV 8 transports the carrier B23 from the stocker 3 to the process device C14 along the carrier moving path B25 (F-35).

Therefore, the AGV 8 can continue the conveyance by performing the abnormal processing control without stopping the error, and can transfer the carrier A22, the carrier B23, and all the carriers reserved thereafter to the process apparatus with almost no loss time. It becomes possible to supply.

[0062]

According to the present invention, even if a trouble occurs in the process device and the AGV cannot be connected due to the establishment of the interlock with the process device, the AGV does not stop the error that requires manual recovery. By performing the abnormality processing control, it is possible to maintain a high operation rate, and as a result, it is possible to realize the minimization of the production period of the product.

[Brief description of the drawings]

FIG. 1 is a diagram showing a system according to a first embodiment of the present invention.

FIG. 2 is a diagram showing an operation / control flow according to the first embodiment of the present invention.

FIG. 3 is a diagram showing a configuration of an entire system according to the embodiment of the present invention.

FIG. 4 is a diagram showing a system according to a second embodiment of the present invention.

FIG. 5 is a diagram showing an operation / control flow according to a second embodiment of the present invention.

FIG. 6 is a diagram showing a normal state in a conventional system.

FIG. 7 is a diagram showing an operation / control flow in a normal state according to the related art.

FIG. 8 is a diagram showing an abnormal state in a conventional system.

FIG. 9 is a diagram showing an operation / control flow in an abnormal state according to the related art.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Host computer 2 Stocker controller 3 Stocker 4 AGV controller 5 Communication unit 6 Charger board 7 Charging station 8 AGV 9 Process device controller 10 Process device 11 Host computer terminal 12 Process device A 13 Process device B 14 Process device C 15 Process device D 16 Process device E 17 Process device F 18 Process device G 19 Process device H 20 Process device I 21 Process device J 22 Carrier A 23 Carrier B 24 Carrier moving route A 25 Carrier moving route B 26 Carrier moving route C 27 Carrier moving route D 28 Carrier movement path E 29 Carrier movement path F 30 Carrier movement path G

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[Procedure amendment]

[Submission date] April 6, 1999

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] Claim 1

[Correction method] Change

[Correction contents]

[Procedure amendment 2]

[Document name to be amended] Statement

[Correction target item name] Claim 2

[Correction method] Change

[Correction contents]

[Procedure amendment 3]

[Document name to be amended] Statement

[Correction target item name] 0023

[Correction method] Change

[Correction contents]

[0023]

SUMMARY OF THE INVENTION A feature of the present invention is that an AGV for supplying an intermediate product in a manufacturing stage from a stocker to a process device or recovering the intermediate product from the process device to the stocker.
In the in-process transfer system using the host computer, if the AGV cannot be engaged because the interlock is not established due to the trouble of the first process device, that is, if the intermediate product cannot be delivered to this process device, The AGV notifies the computer of the trouble of the first process device,
Rewriting the status data of the first process device,
Together to perform conveyance prohibition to the first process unit, the first intermediate product a first conveyance interrupted by an instruction of the host computer to continue the transfer to the AGV
After returning directly to the stocker in front of the process equipment ,
The intermediate product is transferred from the stocker to the second process device.
AGV, and then transport the first intermediate product to the
An AGV abnormality processing control method having a logic of abnormality processing to be carried from the stocker to the third process device by the AGV . Alternatively, a feature of the present invention is that, in an in-process transfer system using an AGV that supplies an intermediate product in a manufacturing stage from a stocker to a process device or recovers the intermediate product from the process device to the stocker, the AGV is interrupted due to a trouble in the first process device. When the lock cannot be established and the exchange cannot be performed, that is, when the intermediate product cannot be delivered to the process device, the AGV notifies the host computer of the trouble of the first process device, and the host computer notifies the host computer of the trouble. According to the instructions
Ri state data rewriting of the first process unit, the second
Together to perform conveyance prohibition to 1 of process equipment, prior to
The AGV continues to be conveyed to the AGV according to an instruction from the host computer, and transfers the intermediate product whose conveyance has been interrupted to the first process device
An AGV abnormality processing control method having an abnormality processing logic for directly transferring and transferring the second processing apparatus to the second processing apparatus from before .

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁶ Identification code FI H01L 21/68 H01L 21/68 A // B65G 43/08 B65G 43/08 C

Claims (6)

[Claims] 1. An in-process transfer system using an unmanned transfer vehicle that supplies an intermediate product in a manufacturing stage from an automatic storage shelf to a process device or recovers the intermediate product from the process device to the automatic storage shelf. When the interlock is not established,
Notify the host computer of the trouble of the device, rewrite the status data of the device, prohibit the transfer to the device, and continue the transfer to the automatic guided vehicle and return the suspended intermediate products to the automatic storage shelf. An automatic guided vehicle abnormality processing control method, comprising an abnormality processing logic for transferring and transferring to another process device. 2. An in-process transfer system using an unmanned transfer vehicle that supplies an intermediate product in a manufacturing stage from an automatic storage shelf to a process device or recovers the intermediate product from the process device to the automatic storage shelf. When the interlock is not established,
Notify the host computer of the trouble of the relevant device and rewrite the status data of the relevant device, prohibit the transfer to the relevant device, continue the transfer to the automatic guided vehicle, and transfer the interrupted intermediate product directly to another process device An unmanned guided vehicle abnormality processing control method, comprising a logic of an abnormality processing to be carried. 3. The method according to claim 1, wherein the host computer notified of the trouble of the process device displays the trouble on its terminal. 4. A large number of processing apparatuses for performing the same processing on an intermediate product from now on are arranged, and the trouble occurs in one of a plurality of processing apparatuses waiting for supply of the intermediate product. 2. The transfer machine according to claim 1, wherein the transfer is performed to a process device having an intermediate product request later than that of the process device in which the trouble has occurred.
Or the automatic guided vehicle abnormality processing control method according to claim 2. 5. The process device according to claim 1, wherein the process devices are arranged on both sides of the path where the automatic guided vehicle conveys, and the process device to be transferred and transferred is located on the same side as the process device in which the trouble has occurred. An automatic guided vehicle abnormality processing control method according to claim 1 or 2. 6. The intermediate product in a manufacturing stage is a semiconductor substrate stored in a cassette, and the cassette in a state where the semiconductor substrate is stored is supplied from an automatic storage shelf to a process apparatus using an automatic guided vehicle, or 6. The apparatus according to claim 1, wherein the information is collected from an apparatus to an automatic storage shelf.
An automatic guided vehicle abnormality processing control method according to any one of the above.