JPH11261155A - Semiconductor laser element - Google Patents

Abstract

PROBLEM TO BE SOLVED: To confine electrons and holes at a deep energy potential by specifying the compsn. Of at least a semiconductor layer forming an active layer. SOLUTION: A multilayer quantum well active layer 107 is composed of a GaAs barrier layer 201, GaAs0.795 Sb0.20 N0.005 As well layer 202, GaAs barrier layer 203, GaAs0.795 Sb0.20 N0.005 As well layer 204 and GaAs barrier layer 205. At least a semiconductor layer forming an active is GaAs1-x-y Sbx Ny (0<x<=0.3, 0<y<=0.015). At a GaAs1-x-y Sbx Ny /GaAs quantum well, a hetero-barrier of the valence band and conduction band at the barrier layer interface with the well layer becomes high on the same order. Consequently, the electrons and holes can be confined at a deep energy potential.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a semiconductor laser device, and more particularly to a semiconductor laser device for optical communication.

[0002]

2. Description of the Related Art In an advanced information processing society, a technology for transmitting large-capacity information such as video information at a high speed and recording the information on a recording medium is essential. In recent years, the development of optical information processing technologies for optical communication networks and optical disks has been remarkable.
Further development is expected for the multimedia society of the 21st century. Semiconductor light emitting devices such as semiconductor light emitting diodes (LEDs) and semiconductor laser diodes (LDs) have excellent characteristics as light sources in these optical technologies. It has been.

In order to spread the LD for optical communication, it is desirable that the LD can be used at a low cost and at a high ambient temperature. However, at a high environmental temperature, the electron carriers injected into the active layer easily overflow from the active layer to the cladding layer, and the luminous efficiency is significantly reduced. In order to suppress such carrier overflow, it is effective to use a semiconductor mixed crystal having a large band gap (forbidden band width) as the cladding layer. However, the type and composition of the semiconductor mixed crystal used for the cladding layer are limited to a range that satisfies the lattice matching condition between the cladding layer and the substrate, and it is not easy to obtain an LD that can be used even at a high ambient temperature.

[0004] LDs for optical communication are usually made of InP on an InP substrate.
It is formed using a P clad layer. Since a material having a larger bandgap than InP such as AlGaAs or AlGaInP can be lattice-matched on the GaAs substrate, an optical communication LD having excellent temperature characteristics can be obtained by using such a material for the LD cladding layer. Could be However, in the case where an LD that emits light in the 1.3 μm band required for optical communication is formed on a GaAs substrate by using InGaAs having a small forbidden band width as an active layer, a strong strain is applied to the InGaAs active layer and crystal quality is degraded. Therefore, there is a problem that a high-performance LD cannot be formed. Alternatively, there is a problem that the luminous efficiency cannot be increased due to the multiple quantum wells of the active layer.

In order to solve such a problem, various materials have been studied. For example, the IEEE Journal of Selected Topics in 1997
"Quantum Electronics' New Material for Long-Wavelength Semiconductor Lasers: GaInN"
There is a report entitled "As" (Conventional Example 1). FIG. 8 shows a sectional layer structure of the conventional GaInNAs semiconductor laser. This conventional example is a semiconductor laser on a GaAs substrate.
The active layer is provided with one quantum well having a well layer of GaInNAs (quaternary semiconductor mixed crystal; Ga is gallium, In is indium, As is arsenic, and N is nitrogen). The thickness of the GaInNAs layer is 10 nm, and the In composition is about 3 nm.
0%, the N composition is about 0.4%, and light emission of 1.18 μm is obtained. However, 1.
No oscillation of 3 μm was obtained.

[0006]

SUMMARY OF THE INVENTION A 1.3 μm band LD having excellent temperature characteristics, which is a semiconductor laser on a GaAs substrate.
The challenge is to provide new materials and LD structures to achieve the above.

[0007] Applied Physics, 1997
Letter 1 at page 1608 in Volume 70 contains G at room temperature.
GaAs _1-Y N _Y dependence of experimental results for N composition Y bandgap of are marked. FIG. 9 shows the dependence of the band gap of GaAs _1-Y N _Y on the N composition Y. FIG.
Therefore, the band gap greatly decreases in proportion to the N composition when the N composition is less than 0.5%, but begins to show a saturation tendency when the N composition exceeds 0.5%, and becomes saturated when the N composition exceeds 1%. You can see that From these results, GaInN
In a conventional semiconductor laser using As as a well layer, 1.3 is used.
Obtaining oscillations of μm has proven difficult.

[0008] In addition, a practical semiconductor LD
In the conventional semiconductor laser using GaInNAs as a well layer, GaInNAs has strong strain (about 2% strain). With respect to the amount of strain, when the N composition exceeds 0.5%, there is a problem that the crystal quality is significantly reduced.

JP-A-8-195522 (conventional example 2) has an active layer for generating light on a GaAs substrate, a cladding layer for confining light, and a resonator structure for obtaining laser light from the generated light. As a semiconductor laser, a 1.3 μm band or 1.55 μm band oscillating semiconductor laser using a III-V semiconductor containing N in at least a part of an active layer is disclosed. The gazette contains III-V containing N
As an example of the group III semiconductor, there is an example of GaNAsSb. In Example 7, GaN (0.03) As (0.82) Sb
(0.15) 1.3 μm having a strain-free active layer (layer thickness: 50 nm)
A band distributed feedback semiconductor laser is shown.

However, as described above, III-V
In group III semiconductors, it has become apparent that the crystal quality is significantly degraded when the N composition exceeds 0.5%. Therefore, even in the active layer described in the seventh embodiment of the conventional example 2, the N
Since the composition is as high as 1.5%, and the thickness of the layer greatly exceeds the critical thickness of 50 nm, the crystallinity is expected to be extremely reduced. In other words, the semiconductor laser shown in Conventional Example 2 cannot oscillate in the 1.3 μm band.

[0011]

SUMMARY OF THE INVENTION The present invention provides a GaAs
An object of the present invention is to provide a 1.3 μm band LD having excellent temperature characteristics using a _1- XYSb _X N _Y material for an active layer of an LD.
Specifically, according to the present invention, at least one semiconductor layer constituting the active layer is made of GaAs.
s _1-XY Sb _X N _Y (0 <X ≦ 0.3 and 0 <Y ≦ 0.0
15) A semiconductor laser device formed on a GaAs substrate, wherein the cladding layer for injecting carriers is made of AlGaAs or Ga.
Ga such as InP, AlInP or AlGaInP
A semiconductor lattice-matched to As or a semiconductor layer having the smallest band gap among the semiconductor layers constituting the active layer is GaAs _1-XY Sb _X N _Y
(0.16 ≦ X ≦ 0.23 and 0.003 ≦ Y ≦ 0.0
12) or the active layer is GaAs _1-XY Sb _X N
_Y (0.16 ≦ X ≦ 0.23 and 0.003 ≦ Y ≦ 0.
012) A quantum well structure in which well layers and GaAs barrier layers are alternately formed adjacent to each other, or the active layer is formed of GaAs _1-XY Sb _X N
_Y (0.16 ≦ X ≦ 0.23 and 0.003 ≦ Y ≦ 0.
012) Well layer and GaAs _1-p P _p (0 <p ≦ 0.2)
It has a quantum well structure formed by alternately adjoining barrier layers, or its active layer is GaAs _1-XY Sb _X N
_Y (0.16 ≦ X ≦ 0.23 and 0.003 ≦ Y ≦ 0.
012) Well layer and Ga _q In _1-q P (0.50 <q ≦
0.7) It has a quantum well structure in which barrier layers are formed alternately adjacent to each other, or in the semiconductor laser device described above, the quantum well active layer has a quantum well structure between the well layer and the barrier layer.
GaAs or a semiconductor layer lattice-matched to GaAs having a thickness of about 5 molecular layers is provided.

[0012]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention relates to, for example, a quantum well of an LD.
GaAs in the well layer of the door active layer_1-XYSb_XN _Y(0.1
6 ≦ X ≦ 0.23 and 0.003 ≦ Y ≦ 0.012),
GaAs is used for the barrier layer. GaAs
s_1-XYSb_XN_YThe Sb composition and N composition of the well layer
Restrict to the value range and set well layer thickness appropriately
1.3 μm with excellent crystal quality and high temperature characteristics
The fact that there is an operation for realizing the band LD will be described below.

FIG. 10 shows GaAs _1-X Sb _X (0 ≦ X ≦
0.5) Sb composition X of lattice mismatch for GaAs
Shows dependencies. From FIG. 10, the lattice mismatch degree is 1.
It can be seen that the region of the Sb composition satisfying the LD applicable condition of 8% or less is 0 <X ≦ 0.23.

FIG. 11 shows GaAs _1-x Sb _x , GaAs
_{1-Y N Y, In Z} Ga 1-Z As (0 ≦ X, Y, Z ≦ 0.5)
Shows the dependence of the band edge energy on the Sb composition X, the N composition Y, and the In composition Z. However, the energy level (Ev) of the valence band of GaAs was set to 0. In FIG.
GaAs _1-Y N _Y sharply conduction band energy decreases with increasing N composition. However, the decrease in the conduction band energy is saturated at an N composition of 1%.

On the other hand, GaAs _1-X Sb _X (0 ≦ X ≦ 0.
In 5), the valence band energy greatly increases as the Sb composition X increases. However, since the change in conduction band energy is small, the GaAs _1-x Sb _x / GaAs quantum well has a small conduction band hetero-barrier at the interface between the well layer and the barrier layer, and cannot effectively confine electrons in the well. In FIG. 11, when the Sb composition X = 0.23, GaAs
The band gap of _1-X Sb _X is 1 eV or more and 1.3 μm.
Band gap required for m oscillation (0.95 eV or less)
Can not be obtained. The Sb composition that achieves 1.3 μm emission is
As can be seen from FIG. 11, when X = 0.3, the degree of lattice mismatch at this time is as large as 2.4%, and high crystal quality cannot be obtained.

However, the GaAs _1-XY Sb _X N _{Y of} the present invention (0 <X ≦ 0.3 and 0
<Y ≦ 0.12) can have both characteristics. That is, in the GaAs _1- XYSb _X N _Y / GaAs quantum well, the hetero-barrier of the valence band and the conduction band at the interface between the well layer and the barrier layer becomes substantially the same. Therefore, since electrons and holes can be confined to a deep energy potential, a high LD temperature characteristic can be realized.

FIG. 12 shows the GaAs _0.8-Y Sb _0.2 of the present invention.
The dependence of the band edge energy of N _Y (10 nm) / GaAs quantum well on the N composition Y is shown. GaAs _1-Y N _Y
The dependence of band edge energy on N composition in the case of wells is also shown. By adding Sb to the GaAs _{1-YN Y} well layer, the valence band energy level is increased. Ga
As _0.8-Y Sb _0.2 N _Y (10 nm), the conduction band energy sharply decreases as the N composition increases. As a result, N
Light emission of 1.3 μm is realized with a composition of 0.5%. At this time, the valence band hetero barrier at the interface between the well layer and the barrier layer is 2
A large value of 50 meV and a hetero barrier of the conduction band of 360 meV can be obtained. Therefore, since electrons and holes can be efficiently confined, high temperature characteristics can be realized.

The above is a basic description of the operation of the present invention.
You. GaAs of the present invention_1-XYSb_XN _YWell layer Sb group
The composition X and the N composition Y are, for example, 0.16 ≦ X ≦ 0.23
Limited to the range of 0.003 ≦ Y ≦ 0.012
It is. Below, the grounds that the composition region has an effect,
Description will be made using a case where the well layer thickness is 10 nm.

FIG. 13 shows a GaAs _1-XY Sb _X N of the present invention.
_Y (layer thickness 10 nm) / GaAs (X = 0.145, 0.
16 shows the dependence of the transition wavelength of the quantum well structure on the N composition and Y of (0.2, 0.20, 0.23). A well layer thickness of 10 nm is a typical thickness of a quantum well. At this time, in order to realize a transition wavelength of 1.3 μm from FIG.
Is in the range of 0 <Y ≦ 0.15, the Sb composition X
It is understood that ≧ 0.16 is required. Moreover, from FIG. 10, the region of the Sb composition X where the degree of lattice mismatch is within 1.8% is 0 <
X ≦ 0.23 was required. Therefore, the region of the Sb composition X of the present invention is defined as 0.16 ≦ X ≦ 0.23.

FIG. 14 shows GaAs _1- XYSb _X N _Y (0.16 ≦ X ≦ 0.23) of the well layer of the active layer of the LD of the present invention.
And (X, Y) composition region of 0.003 ≦ Y ≦ 0.012). The curve in the region shows the relationship between X and Y at which the oscillation wavelength is 1.3 μm when the well width is 10 nm. For example, a point on the curve, X = 0.2, Y = 0.005
In the case of an LD using (0.5%) GaAs _1-XY Sb _X N _Y for the well layer, light emission of 1.3 μm is obtained. The degree of lattice mismatch at this time is within 1.5%, which is a strain amount capable of forming a multiple quantum well. The N composition is 0.5%
Which is a value at which a high quality crystal can be obtained. Therefore, the GaAs _1-XY Sb _X N _Y crystal of the present invention is applicable to LD and has excellent quality.

FIG. 15 shows the GaAs _0.8- YS of the LD of the present invention.
The dependence of the transition wavelength of b _0.2 N _Y (10 nm) / GaAs quantum well on the N composition Y is shown. When the N composition of the quantum well of the LD of the present invention is 0.5%, light emission of 1.3 μm is realized. On the other hand, 1.3 μm emission cannot be realized in the conventional In _0.2 Ga _0.8 As _{1 -Y} N _Y quantum well of the LD having the same degree of lattice mismatch.

The GaAs _1-x Sb _x / GaAs quantum well is
Since the hetero-barrier in the conduction band is very small, electrons cannot be confined and injected electrons overflow, resulting in low temperature characteristics of the LD. GaAs _1-XY S of the present invention
b _X N _Y / GaAs quantum wells having the features hetero barrier of the valence band and the conduction band in the well layer and the barrier layer interface is increased to the same extent. Therefore, electrons and holes can be efficiently confined, so that a high LD temperature characteristic can be realized.

[0023]

DESCRIPTION OF THE PREFERRED EMBODIMENTS A semiconductor laser according to the present invention basically has
E (molecular beam epitaxy) method, gas source MBE method, MO
MBE (organic metal molecular beam epitaxy) method, MOVPE
It can be manufactured using a vapor phase growth method such as a (organic metal vapor phase epitaxy) method.

Here, gas source MBE is used to
The method of growing is described. The present invention requires three group V elements of As, P and Sb. As and P are AsH ₃ ,
PH ₃ is thermally decomposed (cracking temperature is 1000 ° C.) and supplied to a GaAs substrate. Sb uses a solid material,
Heat it in a crucible and evaporate it before supplying. The N source is
Nitrogen gas is decomposed at high frequency and supplied as N radicals. N
Details of the source are described in the literature of Conventional Example 1. The group III raw material is a metal raw material such as Ga, Al, In or the like, and is similarly supplied in a crucible, heated and evaporated. Gas source
The SMBE method can control a relatively high supply amount of the group V raw material and is suitable for manufacturing the LD of the present invention.

In the LD of the invention described below, Si is used for the n-type dopant and Be is used for the p-type dopant. n-type, p
In both cases, the doping concentration of the cladding layer of the LD is 4 × 1
0 ¹⁷ to 1 × 10 ¹⁸ cm ⁻³ , the light confinement layer is 2 × 10 ¹⁷ to
It is about 8 × 10 ¹⁷ cm ⁻³ . Doping of p-type contact layer
The ping concentration is 5 × 10 ¹⁸ to 1 × 10 ¹⁹ cm ⁻³ . However, the quantum well active layer is undoped. The conductivity type and plane orientation of the GaAs substrate are not particularly limited, but are usually n-type (00
1) Use a surface. The doping concentration of n is 8 × 10 ^{17 to} 3
× 10 ¹⁸ cm ^-3 .

The growth conditions are changed depending on the type of the growth layer.
Although depending on the growth apparatus, the growth rate of the gas source MBE method is about 1 μm / h, and the n-GaAs layer and the n-Al _0.3 G
The a _0.7 As layer and the n-Al _0.7 Ga _0.3 As layer grow at a growth temperature of 600 to 680 ° C. The growth temperature of GaInP is 500-560 ° C., and GaAsSbN is 460-520 ° C.
Grow in. The flow rates of AsH ₃ and PH ₃ are ₃ to 8 sccm. Growth is performed after evaporating the oxide film on the substrate surface.

When the group V element is supplied into a growth chamber such as an MBE growth apparatus, the group V pressure in the growth chamber is significantly increased, and remains in the growth chamber even after the supply is stopped to form a background pressure. If the background pressure is high, group V atoms supplied from the background to the substrate surface cannot be ignored. Therefore, in order to control the group V composition and grow a semiconductor layer having a steep hetero interface, it is necessary to sufficiently lower the residual group V pressure before switching the group V source.

The present embodiment mainly relates to the layer structure of the LD. However, the present embodiment further reduces the stripe width of the electrode of the LD, forms a buried structure or a ridge structure, forms a diffraction grating, and emits light. By controlling the reflectivity by coating the end face with a dielectric film, the laser light can be made to have a single wavelength and stably obtained.

The semiconductor laser according to the present invention basically comprises:
It has the characteristic of emitting light in the 3 μm band and the characteristic of having excellent temperature characteristics and stable operation even at high temperatures. The active layer of the LD according to the present invention has a quantum well structure using GaAs _1-XY Sb _X N _Y as a well layer, and the thickness of the well layer and the Sb composition X and the N composition Y are defined by the regions defined in the claims. It is assumed that the oscillation wavelength of the LD is adjusted to 1.3 μm in accordance with the band gap of the barrier layer within the range described above.

Embodiment 1 FIG. 1 is a sectional view showing a layer structure of a semiconductor laser according to a first embodiment of the present invention. In the first embodiment, an n-type electrode 101, n
A GaAs (001) substrate 102, 0.3 μm thick n
-GaAs layer 103, n-Al _0.3 G having a thickness of 0.2 μm
a _0.7 As layer 104, n-Al _0.7 Ga having a layer thickness of 1.5 μm
_0.3 As layer clad layer 105, n-layer having a layer thickness of 0.15 μm
GaAs light confinement layer 106, multiple quantum well active layer 10
7. p-GaAs optical confinement layer 10 having a thickness of 0.15 μm
8, a 1.5-μm-thick p-Al _0.7 Ga _0.3 As-layer cladding layer 109, and a 0.2-μm-thick p-Al _0.3 Ga _0.7 As
A semiconductor laser for optical communication comprising a layer 110, a p-GaAs contact layer 111 having a thickness of 0.2 μm, and a p-type electrode 112.
The element.

FIG. 2 is a cross-sectional layer structure diagram of the multiple quantum well active layer 107. The multiple quantum well active layer 107 has a layer thickness of 15
nm GaAs barrier layer 201, 10 nm thick GaAs
s _{0. 795} Sb _0.20 N _0.005 As well layer 202, thickness 15
nm GaAs barrier layer 203, 10 nm thick GaAs
s _0.795 Sb _0.20 N _0.005 As well layer 204, layer thickness 15
GaAs barrier layer 205 nm.

Since the semiconductor laser of the first embodiment does not use P as a group V element, it has a feature that it can be manufactured relatively easily with a normal MBE apparatus. GaAs _0.795
In the quantum well structure of Sb _{0 .20} N _0.005 As well layers and GaAs barrier layer, since the group III element in the well layer and the barrier layer (Ga) is common in one, relatively sharp interface can be realized. Since a material containing Al is not used for the well layer and the barrier layer, an LD having high luminous efficiency and operating life can be obtained. The first embodiment is similar to the following embodiments,
It has a feature of emitting light in the 1.3 μm band and a feature of having excellent temperature characteristics and stable operation even at high temperatures.

Embodiment 2 FIG. 3 is a sectional view showing a layer structure of a semiconductor laser according to a second embodiment of the present invention. In the second embodiment, an n-type electrode 301, n
A GaAs (001) substrate 302, 0.3 μm thick n
GaAs layer 303, 1.5 μm thick n-Ga _0.5 I
n _0.5 P clad layer 304, n-G having a layer thickness of 0.15 μm
aAs light confinement layer 305, multiple quantum well active layer 30
6. p-GaAs optical confinement layer 30 having a thickness of 0.15 μm
7, p-Ga _0.5 In _0.5 P cladding layer 308 having a thickness of 1.5 μm, p-GaAs contact layer 3 having a thickness of 0.2 μm
09, a semiconductor laser device for optical communication comprising a p-type electrode 310.

FIG. 4 is a cross-sectional layer structure diagram of the multiple quantum well active layer 306. The multiple quantum well active layer 306 has a thickness of 15
GaAs barrier layer 401 of 10 nm, GaAs of 10 nm in thickness
It s _{0. 9} P _0.1 barrier layer 402, of thickness 10 nm GaAs
_0.793 Sb _0.20 N _0.007 As well layer 403, layer thickness 10n
m of GaAs _0.9 P _0.1 barrier layer _{404, GaAs 0.793 Sb 0.20 N 0.007} As well layer 405 having a thickness of 10 nm, the layer thickness 10nm GaAs _{0. 9} P _0.1 barrier layer 406, thickness 1
0 nm GaAs _0.793 Sb _0.20 N _0.007 As well layer 4
07, GaAs _0.9 P _0.1 barrier layer 40 having a thickness of 10 nm
8, a GaAs barrier layer 409 having a thickness of 15 nm.

The semiconductor laser according to the second embodiment is made of Al.
Since no material containing GaN is used, the buried structure can be easily formed by regrowth after forming the ridge structure. Therefore, an LD having a long life can be obtained even with a high luminous efficiency and a high light output operation of 100 W or more. By using a tensile-strained GaAs _0.9 P _0.1 barrier layer for the multiple quantum well active layer, the overall lattice strain of the multiple quantum well active layer can be made smaller than when using a non-strained barrier layer. Well layer and barrier layer
Since one group III element (Ga) is common, a relatively steep interface can be realized. Therefore, the LD of this embodiment is
Since the number of quantum wells can be increased while maintaining high crystal quality, the luminous efficiency is increased.
In addition, as the barrier layer, GaAs _1-p P _p , 0 <p
It is preferably in the range of ≦ 0.2. At this time, GaA
This is because the degree of lattice mismatch with respect to s is within 1.8%, so that a good quality crystal can be obtained with a commonly used barrier layer thickness.

Embodiment 3 FIG. 5 is a sectional view of the structure of a semiconductor laser according to a third embodiment of the present invention. In the third embodiment, the n-type electrodes 501, n
-GaAs (001) substrate 502, 0.3 μm thick n
-GaAs layer 503, n-Ga _0.5 I having a thickness of 0.2 μm
n _0.5 P layer 504, 1.5 μm thick n-Al _0.5 In
_0.5 P layer clad layer 505, n-G with 0.15 μm thickness
a _0.5 In _0.5 P light confinement layer 506, multiple quantum well active layer 507, p-Ga _0.5 In _0.5 P light confinement layer 508 with a thickness of 0.15 μm, p-Al _0.5 In with a thickness of 1.5 μm
_0.5 P layer cladding layer 509, p-Ga having a layer thickness of 0.2 μm
_0.5 In _{0 .5} P layer 510, the layer thickness 0.2 [mu] m p-GaAs
This is a semiconductor laser device for optical communication comprising a contact layer 511 and a p-type electrode 512. However, Al _0.5 In _0.5 P layer,
The Ga _0.5 In _0.5 P layer is lattice-matched to the GaAs substrate.

FIG. 6 is a sectional layer structure diagram of the multiple quantum well active layer 507. The multiple quantum well active layer 507 has a thickness of 10
Ga _0.5 In _0.5 P layer 601 and a 10 nm thick Ga
_0.6 In _0.4 P barrier layer 602, 10 nm thick GaAs
_0.793 Sb _0.20 N _0.007 As well layer 603, layer thickness 10n
Ga _0.6 In _0.4 P barrier layers 604 _{m, GaAs 0.793 Sb 0.20 N 0.007} As well layer 605 having a thickness of 10 nm, the layer thickness 10nm Ga _{0. 6} In _0.4 P barrier layers 606, thickness 1
0 nm GaAs _0.793 Sb _0.20 N _0.007 As well layer 6
07, Ga _0.6 In _0.4 P barrier layer 60 having a layer thickness of 10 nm
8, a Ga _0.5 In _0.5 P layer 609 having a layer thickness of 10 nm.

In the multiple quantum well active layer, tensile strained Ga _0.6 I
By using the n _0.4 P barrier layer, the entire lattice strain of the multiple quantum well active layer can be made smaller than that in the case of using the unstrained barrier layer. The In composition of the Ga _0.6 In _0.4 P barrier layer can be controlled more precisely than the P composition of the GaAs _0.9 P _0.1 barrier layer in Example 2, and thus the strain amount can be controlled more accurately. Therefore, the LD of the present embodiment has a feature that the luminous efficiency increases because the number of quantum wells can be increased while maintaining high crystal quality. The barrier layer in the present embodiment is desirably in the range of 0.50 <q ≦ 0.7 as Ga _q In _1-q P.
At this time, since the degree of lattice mismatch with respect to GaAs is within 1.8%, a high-quality crystal can be obtained with a commonly used barrier layer thickness.

In the semiconductor laser according to the third embodiment, an LD having high luminous efficiency and operating life can be obtained because a material containing Al is not used for the multiple quantum well active layer. Al _0.5 I
Since the n _0.5 P layer has a conduction band hetero barrier of 180 meV larger than the Ga _0.5 In _0.5 P layer, the LD of this embodiment using the Al _0.5 In _0.5 P layer clad layer is the most stable at a high temperature in this material system. It has the feature that it can operate.

Embodiment 4 The semiconductor laser of the fourth embodiment has a structure in which the multiple quantum well active layer 507 of the semiconductor laser of the third embodiment is replaced by a multiple quantum well active layer 710 shown below. Otherwise, it has the same structure as the semiconductor laser of the third embodiment.

FIG. 7 is a sectional view showing the structure of a multiple quantum well active layer 710 of a semiconductor laser according to a fourth embodiment of the present invention. The multiple quantum well active layer 710 has a thickness of 10 nm.
_0.5 In _0.5 P layer 701, quantum well layer 706, quantum well layer 707, quantum well layer 708, Ga _0.5 I having a thickness of 10 nm
An n _0.5 P layer 709 is formed. The quantum well layer 706, the quantum well layer 707, and the quantum well layer 708 have the same order and the same layer structure. The quantum well layer 706 has a thickness of 10 nm.
a _0.6 In _0.4 P barrier layer 702, GaAs having a thickness of 3 molecular layers
Layer 703, GaAs _0.795 Sb _0.20 N with a thickness of 10 nm
_0.005 As well layer 704, GaAs layer 7 with 3 molecular layer thickness
It consists of 05. The multiple quantum well active layer 710 has a feature different from that of the multiple quantum well active layer 507 in that a GaAs layer having a thickness of three molecular layers is provided between the well layer and the barrier layer. The GaAs layer having a thickness of three molecular layers has a function of alleviating a difference in strain between the well layer and the barrier layer. Thereby, a multiple quantum well having excellent crystal quality can be realized. In the present embodiment, the GaAs layer having a thickness of three molecular layers is provided between the barrier layer and the well layer. However, the present invention is not limited to this, and it is sufficient if the difference in the amount of strain between the well layer and the barrier layer can be reduced. GaAs with 1-5 molecular layer thickness
AlGaAs, GaI lattice-matched to layer or GaAs
A semiconductor layer such as nP, AlInP, or AlGaInP can be provided. Here, the upper limit of the thickness of the quantum well layer is about 10% of the upper limit of 15 nm. Further, the GaAs _0.9 P _0.1 shown in the above-described second embodiment.
Between the barrier layer and the GaAs _0.793 Sb _0.20 N _0.007 As well layer, a GaAs layer or GaAs having a thickness of 1 to 5 molecular layers is also provided.
By providing a semiconductor layer lattice-matched to s, the effect of alleviating the amount of strain can be similarly obtained.

[0042]

The semiconductor laser for optical communication according to the present invention is a high-quality GaAs _1- XYSb _X N _Y (0 <X ≦ 0.3 and 0
<Y ≦ 0.015). Therefore, GaAs
For the first time, a 1.3 μm band LD can be realized on a substrate. For example, GaAs _0.795 Sb _0.2 N is formed in a well layer of a quantum well.
_{When 0.005} is used, GaAs, Ga _0.52 I
n _{0.4 8} P, by using the Al _0.52 In _0.48 P, respectively hetero barrier in the conduction band of the well layer and the barrier layer, 360Me
V, 570 meV, and 750 meV. Similarly, the valence band heterobarriers are 25
The values are 0 meV, 515 meV, and 770 meV, and the same value as that of the hetero barrier in the conduction band can be obtained.

In a conventional LD on an InP substrate, the hetero-barrier in the conduction band between the well layer and the barrier layer is about 200 meV. Therefore, in the LD of the present invention, a hetero-barrier having a conduction band of 2 to less than 4 times that of the LD on the conventional InP substrate can be obtained. As a result, electrons and holes can be efficiently confined in the quantum well layer, so that a stable optical output can be obtained without changing the threshold value even if the ambient temperature of the LD changes.

That is, the semiconductor laser for optical communication according to the present invention has an excellent temperature characteristic in which the change of the oscillation threshold current value of the LD with respect to the temperature change is small. Also, even if the environmental temperature rises to about 100 ° C., the operation is stable. Therefore, LD
Since a device for keeping the temperature of the laser light constant and a device for keeping the light output constant are unnecessary, the cost of the laser device can be greatly reduced.

The LD of the present invention can be manufactured by using a conventional crystal growth apparatus when the Sb raw material and the N source are charged, and thus has an advantage that a large new capital investment is not required.

[Brief description of the drawings]

FIG. 1 is a sectional layer structure view of a semiconductor laser for optical communication according to a first embodiment.

FIG. 2 is a sectional layer structure diagram of a multiple quantum well active layer 107.

FIG. 3 is a sectional layer structure diagram of a semiconductor laser for optical communication according to a second embodiment.

FIG. 4 is a sectional layer structure diagram of a multiple quantum well active layer 306.

FIG. 5 is a sectional layer structure view of a semiconductor laser for optical communication according to a third embodiment.

FIG. 6 is a cross-sectional layer structure diagram of a multiple quantum well active layer 507.

FIG. 7 shows a multiple quantum well active layer 710 according to a fourth embodiment.
FIG. 4 is a sectional layer structure diagram of FIG.

FIG. 8 is a sectional layer structure diagram of a conventional GaInNAs semiconductor laser.

FIG. 9 is a graph showing the dependence of the band gap of GaAs _{1 -Y NY} on the N composition Y.

FIG. 10 shows Ga of GaAs _1-X Sb _X (0 ≦ X ≦ 0.5).
5 is a graph showing the dependence of the degree of lattice mismatch on the Sb composition X with respect to As.

FIG. 11 shows GaAs _1-X Sb _X , GaAs _{1-Y NY} , In _Z
4 is a graph showing the dependence of band edge energy of Ga _{1 -Z} As (0 ≦ X, Y, Z ≦ 0.5) on Sb composition X, N composition Y, and In composition Z.

FIG. 12 shows a GaAs _0.8-Y Sb _0.2 N _Y (10n) of the present invention.
m) / N composition Y of band edge energy of GaAs quantum well
6 is a graph showing the dependency on.

FIG. 13 shows a GaAs _1-XY Sb _X N _Y (layer thickness of 10) of the present invention.
nm) / GaAs (Sb composition X = 0.145, 0.1
6 is a graph showing the dependence of the transition wavelength of the quantum well structure of (6, 0.20, 0.23) on the N composition Y.

FIG. 14 shows GaAs of the well layer of the active layer of the LD of the present invention.
_1-XY Sb _X N _Y (0.16 ≦ X ≦ 0.23 and 0.00
3 is a graph defining a (X, Y) composition region of 3 ≦ Y ≦ 0.012).

FIG. 15 shows GaAs _0.8-Y Sb _0.2 N of the LD of the present invention.
₅ is a graph showing the dependence of the transition wavelength of _Y (10 nm) / GaAs quantum well on the N composition Y.

[Explanation of symbols]

101 n-type electrode 102 n-GaAs (001) substrate 103 n-GaAs layer 104 n-Al _0.3 Ga _0.7 As layer 105 n-Al _0.7 Ga _0.3 As layer clad layer 106 n-GaAs light confining layer 107 multiple quantum well active layer 108 p-GaAs optical confinement layer 109 p-Al _0.7 Ga _0.3 As layer clad layer 110 p-Al _0.3 Ga _0.7 As layer 111 p-GaAs contact layer 112 p-type electrode 201 GaAs barrier layer 202 GaAs _0.795 Sb _0.20 N _0.005 As well layer 203 GaAs barrier layer 204 GaAs _0.795 Sb _0.20 n _0.005 As well layer 205 GaAs barrier layer 301 n-type electrode 302 n-GaAs (001) substrate 303 n-GaAs layer 304 n-Ga _0.5 In _0.5 P cladding layer 305 n-GaAs Light confinement layer 306 Child-well active layer 307 p-GaAs light confining layer 308 p-Ga _0.5 In _0.5 P cladding layer 309 p-GaAs contact layer 310 p-type electrode 401 GaAs barrier layer 402 GaAs _0.9 P _0.1 barrier layer 403 GaAs _0.793 Sb _0.20 N _0.007 As Well layer 404 GaAs _0.9 P _0.1 barrier layer 405 GaAs _0.793 b _0.20 N _0.007 As well layer 406 GaAs _0.9 P _0.1 barrier layer 407 GaAs _0.793 Sb _0.20 N _0.007 As well layer 408 GaAs _0.9 P _0.1 barrier layer 409 GaAs barrier layer 501 n electrode 502 n-GaAs (001) substrate 503 n-GaAs layer 504 n-Ga _0.5 In _0.5 P layer 505 n-Al _0.5 In _0.5 P layer clad layer 506 n-Ga _0.5 In _0.5 P optical confinement layer 507 MQW active layer 508 p-Ga _0.5 I _0.5 P optical confinement layer 509 p-Al _0.5 In _0.5 P layer cladding layer 510 p-Ga _0.5 In _0.5 P layer 511 p-GaAs contact layer 512 p-type electrode 601 Ga _0.5 an In _0.5 P layer 602 Ga _0.6 In _0.4 P barrier layer 603 GaAs _0.793 Sb _0.20 N _0.007 As well layer 604 Ga _0.6 In _0.4 P barrier layers 605 GaAs _0.793 Sb _0.20 N _0.007 As well layer 606 Ga _0.6 In _0.4 P barrier layers 607 GaAs _0.793 Sb _0.20 N _0.007 As well layer 608 Ga _0.6 an In _0.4 P barrier layer 609 Ga _0.5 In _0.5 P layer 701 Ga _0.5 In _0.5 P layer 702 Ga _0.6 In _0.4 P barrier layer 703 GaAs layer 704 GaAs _0.793 Sb _0.20 N _0.007 As well layer 705 GaAs layer 706 Quantum well layer 707 Quantum well layer 708 Quantum well layer 709 Ga _0.5 In _{0. 5} P layer 710 Multiple quantum well active layer

Claims (7)

[Claims] At least one semiconductor layer constituting an active layer is made of GaAs _{1-X- Y} Sb _X N _Y (0 <X ≦ 0.3 and 0
<Y ≦ 0.015), wherein the semiconductor laser element is formed on a GaAs substrate. 2. The semiconductor laser device according to claim 1, wherein the cladding layer for injecting carriers is made of AlGaAs, G
A semiconductor laser device, which is a semiconductor lattice-matched to GaAs selected from the group consisting of aInP, AlInP or AlGaInP. 3. A process according to claim 1 or 2, wherein the semiconductor laser - in laser device, the band gap is the smallest semiconductor layer GaAs _1-XY Sb among the semiconductor layers constituting the active layer _X N
_Y (0.16 ≦ X ≦ 0.23 and 0.003 ≦ Y ≦ 0.
012). 4. The semiconductor laser device according to claim 1, wherein said active layer is made of GaAs.
_1-XY Sb _X N _Y (0.16 ≦ X ≦ 0.23 and 0.00
3 ≦ Y ≦ 0.012) A semiconductor laser device having a quantum well structure formed by alternately adjoining well layers and GaAs barrier layers. 5. The semiconductor laser device according to claim 1, wherein said active layer is made of GaAs.
_1-XY Sb _X N _Y (0.16 ≦ X ≦ 0.23 and 0.00
3 ≦ Y ≦ 0.012) Well layer and GaAs _1-p P _p (0 <
(p ≦ 0.2) A semiconductor laser device having a quantum well structure formed by alternately adjoining barrier layers. 6. The semiconductor laser device according to claim 1, wherein said active layer is made of GaAs.
_1-XY Sb _X N _Y (0.16 ≦ X ≦ 0.23 and 0.00
3 ≦ Y ≦ 0.012) well layer and Ga _q In _1-q P (0.
50 <q ≦ 0.7) A semiconductor laser device having a quantum well structure formed by alternately adjoining barrier layers. 7. The semiconductor laser device according to claim 5, wherein between the well layer and the barrier layer of the quantum well active layer, the semiconductor layer lattice-matched to GaAs or GaAs having a thickness of 1 to 5 molecular layers. A semiconductor laser device comprising: