JPH11255583A - Handling device for quartz crucible and method for handling quartz crucible - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a quartz crucible handing device that can turn a quartz crucible of a heavy weight and a large diameter in a limited space and receive it into the susceptor of a carbon crucible without using man power and free from the influence of contamination and the method for handling a quartz crucible. SOLUTION: The crucible-turning device and the crucible-receiving device are combined so that they may be arranged to the same position. Particularly, the quartz crucible is stably and smoothly rotated and placed in the susceptor 60 with the hand device 32 for holding and rotating the quartz crucible 50. The quartz crucible is placed on the pallet and is made liftable.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a handling apparatus and a quartz crucible for cleaning a quartz crucible used in a single crystal growing apparatus for pulling up a single crystal rod while growing the single crystal rod, or for storing the quartz crucible in a predetermined susceptor. In particular, the present invention relates to a quartz crucible handling apparatus and a quartz crucible handling apparatus suitable for cleaning and storing a quartz crucible used in a single crystal growing apparatus for producing a large diameter Si (silicon) single crystal by a pulling CZ (Czochralski) method. About the method.

[0002]

2. Description of the Related Art In general, in a single crystal manufacturing apparatus by the pulling CZ method, a high pressure-resistant airtight chamber is decompressed to about 10 torr and fresh Ar (argon) gas is flown, and a quartz crucible provided below the chamber is provided. The polycrystal in is melted by heating, and the seed crystal is immersed in the surface of this melt from above,
The seed crystal and the quartz crucible are rotated and moved up and down, and the seed crystal is pulled up to form a conical upper cone part whose upper end protrudes below the seed crystal, and a conical lower part whose cylindrical body part and lower end protrude. It is configured to grow a single crystal (so-called ingot) composed of a cone portion.

In order to grow a conventional single crystal rod having a diameter of about several tens of inches, a quartz crucible having a diameter of about 24 inches has been used. Before loading such a quartz crucible into a crystal growth furnace, it is necessary to wash it, and then it is necessary to dry it and store it in a predetermined carbon crucible susceptor. A conventional quartz crucible weighs about 20 kg, and a series of operations such as washing the quartz crucible, drying it, and then turning it upside down and storing it in a predetermined carbon crucible susceptor are performed manually. Was. In addition, a system was adopted in which these operations were performed as independent processes.

[0004]

However, in recent years, various attempts have been made to produce so-called large-diameter single crystal ingots in which the diameter of a single crystal produced by a single crystal pulling method is increased. In the single crystal pulling apparatus for growing such a large diameter single crystal rod, the size of the quartz crucible must be increased. For example, a quartz crucible having a diameter of 36 inches has a weight of about 7 mm.
It can be 0 kg. It is impossible to lift such a heavy quartz crucible with human hands, turn it over, or store it in a predetermined carbon crucible susceptor.
If the washing / drying device, the reversing device, and the storage device for the carbon crucible susceptor were separately provided, the whole space was considerably large, which caused a large cost increase in the construction of the factory. In addition, if each process is independent and the work area is different, there is a risk that the quartz crucible that has been thoroughly cleaned will be contaminated before use.

[0005] In view of the above-mentioned conventional problems, the inventors of the present invention have performed the operation of cleaning a large-sized and large-diameter quartz crucible in a limited space, inverting the quartz crucible, and storing the quartz crucible in a carbon crucible susceptor without using human power. Cleaning device, reversing device, and storage device are placed closely adjacent to each other, and a pallet on which a quartz crucible is placed is placed next to the cleaning device. A configuration was developed that can be moved between the device, reversing device and storage device. However, in this configuration, the reversing device and the storage device can be arranged adjacent to each other, but each requires a separate space, so that further space saving is required.
Therefore, the present invention provides a quartz crucible handling apparatus and a quartz crucible handling apparatus that can reduce the space occupied by the quartz crucible reversing device and the storage device in each step, and stably invert the quartz crucible and store it in the susceptor. The aim is to provide a method.

[0006]

According to the present invention, in order to achieve the above object, a reversing device and a storage device are combined so that they are arranged at the same position.

That is, according to the present invention, a quartz crucible is
A quartz crucible handling device having a reversing device in which an opening is reversed from a lower state and an opening is upward, and a storage device for storing the quartz crucible in a predetermined susceptor, wherein the reversing device and the reversing device Are provided at the same position.

Further, according to the present invention, a quartz crucible having a reversing device for reversing a quartz crucible from a state in which an opening is below and making an opening upward, and a storage device for storing the quartz crucible in a predetermined susceptor. A quartz crucible handling device is provided, wherein the reversing device and the reversing device are formed at the same position, and a pallet on which the quartz crucible can be placed is provided.

Further, according to the present invention, the quartz crucible placed on the pallet is inverted from a state where the opening is downward, and
A quartz crucible handling device having a reversing device having an opening upward, and a storage device for storing the quartz crucible in a predetermined susceptor, wherein the reversing device and the reversing device are formed at the same position, and the quartz A plurality of means for sandwiching and holding the crucible from the outside, a holding means supporting means having an annular portion to which the plurality of means for holding are attached and surrounding the quartz crucible;
A quartz crucible handling method using a quartz crucible handling device having a rotation axis attached to a position facing the quartz crucible, wherein the quartz crucible is held from the outside in the vicinity of an opening of the quartz crucible; and Relative to the pallet; rotating the rotary shaft by 180 degrees so that the opening of the quartz crucible is upward; placing the quartz crucible on the pallet; Lowering the quartz crucible and storing the quartz crucible in a susceptor.
A quartz crucible handling method is provided.

[0010]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a side view of a quartz crucible handling apparatus according to the present invention. FIG. 2 shows a line A in FIG.
It is sectional drawing cut | disconnected by -A '. FIG. 3 is a plan view of a pallet on which a quartz crucible is placed, and FIG. 4 is a line BB ′ in FIG.
It is sectional drawing cut | disconnected by. FIG. 5 is a side view showing a state where the quartz crucible is placed on the pallet with the opening thereof being downward, and FIG. 6 is a view showing a state where the quartz crucible is placed on the pallet with the opening being upward. FIG.

In FIG. 1, a quartz crucible handling device 30 has functions of a reversing device and a storage device, and its outer shape is constituted by a robust metal frame. The quartz crucible handling device can be arranged adjacent to a cleaning device not shown. The quartz crucible handling device 30 is provided with a hand device 32. As shown in FIGS. 18 and 19, the hand device 32 radially drives a plurality of holding portions for securely holding the vicinity of the opening of the quartz crucible 50, for example, a portion within about 3 cm from the edge of the opening from the outside. Air cylinder 100A,
100B, 100C, and 100D. In FIG. 1, the quartz crucible 50 is shown by a dotted line while being placed on the pallet 40.

These air cylinders 100A, 100A
B, 100C and 100D are radially attached to the annular frame 106. Air cylinder 100A, 10
0B, 100C, 100D pistons 102A, 10D
At the tip of 2B, 102C, 102D, a gripper 104A,
104B, 104C and 104D are attached.
Each of the grips 104A, 104B, 104C, and 104D has a metal plate and a silicone rubber (not shown) attached to the surface of the metal plate. Silicon rubber has a high coefficient of friction and is configured to come into contact with the quartz crucible 50. In addition, the tightening force of these air cylinders is variable, and the force for gripping the quartz crucible 50 can be adjusted appropriately.

The rotating shafts 108A and 108B are located at positions opposed to each other by 180 degrees on the annular frame 106 of the hand device 32.
Is attached. The rotating shafts 108A and 108B are attached to an arm 34 extending from a driving device 39 located at the upper part of the frame as shown in FIG.
As shown in FIG. 17, the quartz crucible 50 can be inverted or moved up and down. That is, the driving device 39 has a driving force source for the hand device 32 to perform these movements.

As shown in FIG. 2, the quartz crucible handling device 30 has two parallel rails 36A,
36B are provided. These rails 36A, 36
B can move up and down. That is, the rail 36A,
36B is connected to the driving device 31 via a link 33,
It is movable along a vertical guide (not shown).

A position sensor 38 for detecting the height position of these rails 36A, 36B or quartz crucible 50 is provided. The output signal of the position sensor 38 is
And the output signals are supplied to the driving device 31, respectively, and the height position information of the rails 36A and 36B is fed back to perform the height control. Although only one link 33 is shown, four links in the quartz crucible handling device 30 are driven by the same drive source at two locations near both ends of one rail. It is preferable to configure so that 36A and 36B are raised and lowered in a completely horizontal state.

The rails 36A and 36B in the storage device 30
Are air cylinders 112A, 112B, 112C, 11
Attached to the 2D pistons 72A, 72B, 72C, 72D, the distance between the rails 36A, 36B is changed according to the reciprocating motion of the pistons 72A, 72B, 72C, 72D. The air pressure is controlled by a control device (not shown) so that the air cylinders 112A, 112B, 112C, and 112D are operated synchronously. The air cylinders 112A, 112B, 112
Instead of C and 112D, a configuration in which a rotary screw shaft and a ball screw are combined may be used.

As will be described later, the quartz crucible 50 is mounted on the pallet 40 as shown in FIGS. 5 and 6, and can be moved up and down together with the rails 36A and 36B of the quartz crucible handling device 30. When deployed, they can move between each other. The structure of the pallet 40 will be described with reference to FIGS. Pallet 40
Is a frame 42 and four outer beams 43A, 43B, 43C, 43D extending inward from the frame 42.
And two beams 44A, 44B, 4 in the X direction and the Y direction, which are combined in a rectangular shape surrounded by outer beams 43A, 43B, 43C, 43D, respectively.
6A and 46B. Four outer beams 43A,
A total of eight contact members 47 are provided on 43B, 43C, and 43D as contact portions when the quartz crucible 50 is placed.

The beams 44A, 44B, 46A, 4
The contact members 48A, 48B, 49A, and 49B, which serve as contact portions when the quartz crucible 50 is placed, are respectively provided on the 6B.
Are provided. As shown in FIG. 5, the contact member 47 is used when placing the quartz crucible 50 in a state where the opening is downward, while the contact members 48A, 48B, 49A, and 49 are used.
B is used when the quartz crucible 50 is placed with its opening upward as shown in FIG. In addition, these contact members 47, 48A, 48B, 49A, and 49B are omitted in other figures, and the quartz crucible 50 is shown as being directly mounted on the pallet 40.

The frame 42 of the pallet 40
It is configured to glide on wheels rotatably mounted on 6A, 36B. The rails 36A, 3
6B, the frame 4 of the pallet 40
Wheels may be provided on the bottom surface of the second. This pallet 4
Since the main part 0 is composed of the frame 42 and the rod-shaped beam, moisture can easily fall during washing with the washing device 10 or in a subsequent drying step, and drainage is good. Also,
The central portion is provided with a central opening 70 for inserting the nozzle 14 when the pallet 40 is in the cleaning device 10.

Next, the operation of the quartz crucible handling apparatus according to the present embodiment will be described. Note that FIGS. 7 to 17
1 and 2 correspond to FIGS. 1 and 2, but unnecessary elements are omitted in the description of the operation. Now, it is assumed that the cleaning / drying process is completed by a cleaning device (not shown), and the pallet 40 is drawn out of the cleaning device into the quartz crucible handling device 30. Pallet 40 is quartz crucible handling device 3
A stopper (not shown) is provided so as to stop at a predetermined position in the X direction within 0. Note that a positioning sensor may be used instead of the stopper.

When the position of the pallet 40 in the X direction is determined, the hand device 32 is lowered to hold the vicinity of the opening of the outer peripheral portion of the quartz crucible 50 by the air cylinder while pressing the vicinity of the opening at a plurality of locations in the radial direction. . Note that, before the start of the gripping operation, the gripping portions 104A, 104B, 104
The height of the annular frame 106 is adjusted so that C and 104D grip the vicinity of the opening of the quartz crucible 50. The vicinity of the opening in the outer peripheral portion of the quartz crucible 50 is a portion exposed when the quartz crucible 50 is stored in the susceptor 60, for example, a region about 3 cm from the opening end, and is gripped by this portion. After the hand device 32 securely holds the quartz crucible 50, the rails 36A, 3
6B is lowered by a predetermined distance as shown by an arrow M5 in FIG. Therefore, the pallet 40 is mounted on the rails 36A, 3A.
6B and separate from the quartz crucible 50.

The hand device 32 may be raised by a predetermined distance as shown by an arrow M6 in FIG.
This lowering and raising operation shown by arrows M5 and M6 is performed when the quartz crucible 50 is rotated as shown by an arrow R shown in FIG.
To prevent the pallet 40 from getting in the way,
Therefore, both of these two operations may be performed, or only one of them may be performed. However, providing a space for rotating the quartz crucible 50 by lowering the pallet 40 has the advantage that this space can be obtained without increasing the overall height of the quartz crucible handling device 30.

When the quartz crucible 50 is rotated as shown in FIG. 8, in order to make the center of gravity of the quartz crucible 50 in the height direction as coincident as possible with the center of rotation, the rotating shaft 108A of the hand device 32 is manufactured at the time of manufacture. , 108B in the annular frame 106 are determined in advance by calculating from the height information of the quartz crucible 50.

After a space in which the quartz crucible 50 can be rotated as shown by the arrow R in FIG. 8 is created, the quartz crucible 50 is rotated 180 degrees in the direction of the arrow R by the hand device 32 to obtain the state shown in FIG. Next, as shown by an arrow M7 in FIG. 9, the rails 36A and 36B in the quartz crucible handling device 30 are raised, and
The quartz crucible 50 is raised on the pallet 40 as shown in FIG. Here, the hand device 32 is separated from the quartz crucible 50, and the quartz crucible 50 is
Put it on 0.

In this state, the hand device 32 is raised as shown by an arrow M10 in FIG. Next, the pallet 40
Is removed from the quartz crucible handling apparatus 30 by removing it from the opening on the right side of FIG. Next, as shown in the sectional view of FIG.
The inner rails 36A and 36B are respectively moved along the Y-axis as indicated by an arrow M11 to increase the interval between them. In this state, a graphite crucible 60 as a susceptor is placed on a pedestal 78 below the quartz crucible handling device 30 together with the gantry 62 as shown in FIG.

A ball bearing 76 is rotatably mounted on the pedestal 78.
Is movable in the X and Y directions (see FIG. 12) on the ball bearing 76, and can perform positioning for making the graphite crucible 60 coaxial with the upper quartz crucible 50. When the positioning is completed, the hand device 32 is lowered as shown by the arrow M12 in FIG. 14 and the quartz crucible 50 is stored in the graphite crucible 60. FIG. 15 shows a state where the quartz crucible 50 is housed in the graphite crucible 60. Completion of the acceptance of the quartz crucible 50 into the graphite crucible 60 is confirmed by detecting a change in the load on the hand device 32 or the graphite crucible 60 or visually confirming the change. After that, the hand device 32 is released and raised as shown by the arrow M13 in FIG. Thereafter, an arrow M1 in FIG.
As shown at 4, the gantry 62, the graphite crucible 60 thereon and the quartz crucible 50 therein are taken out.

The quartz crucible handling apparatus of the present invention is installed in a clean room of class 1000 or less. In the above embodiment, the quartz crucible handling device 30 has been described as being disposed adjacent to the cleaning device. However, it may be disposed separately from the cleaning device.

[0028]

As described above, according to the present invention, the functions of the reversing device and the storage device are organically combined, and each means for realizing these functions is arranged at the same position, so that the space within the limited space is limited. Thus, the operation of inverting the large-diameter and large-diameter quartz crucible and storing it in the carbon crucible susceptor can be performed without using human power and without being affected by contamination. Therefore, the quartz crucible handling device can be assembled at low cost, and automation and space saving can be achieved.

[Brief description of the drawings]

FIG. 1 is a side view of a quartz crucible handling apparatus according to the present invention.

FIG. 2 is a sectional view taken along line A-A 'in FIG.

FIG. 3 is a plan view of a pallet on which a quartz crucible is placed.

FIG. 4 is a sectional view taken along line B-B 'in FIG.

FIG. 5 is a side view showing a state in which a quartz crucible is placed on a pallet with an opening facing down.

FIG. 6 is a side view showing a state in which a quartz crucible is placed on a pallet with an opening facing upward.

FIG. 7 is a side view showing the operation of the embodiment of the present invention.

FIG. 8 is a side view showing the operation of the embodiment of the present invention.

FIG. 9 is a side view showing the operation of the embodiment of the present invention.

FIG. 10 is a side view showing the operation of the embodiment of the present invention.

FIG. 11 is a side view showing the operation of the embodiment of the present invention.

FIG. 12 is a cross-sectional view showing the operation of the embodiment of the present invention.

FIG. 13 is a side view showing the operation of the embodiment of the present invention.

FIG. 14 is a side view showing the operation of the embodiment of the present invention.

FIG. 15 is a side view showing the operation of the embodiment of the present invention.

FIG. 16 is a side view showing the operation of the embodiment of the present invention.

FIG. 17 is a side view showing the operation of the embodiment of the present invention.

FIG. 18 is a perspective view showing a state in which the hand device according to the embodiment of the present invention is holding a quartz crucible.

19 is a plan view of the hand device and the quartz crucible shown in FIG.

[Explanation of symbols]

Reference Signs List 30 quartz crucible handling device 32 hand device 34 arm 36A, 36B rail 37 controller 38 height position sensor 39 drive device 40 pallet 50 quartz crucible 60 graphite crucible (susceptor) 62 mount 72A, 72B, 72C, 72D rail drive air cylinder 78 78 Base 100A, 100B, 100C, 100D Air cylinder 102A, 102B, 102C, 102D Air cylinder piston 104A, 104B, 104C, 104D Gripping portion 106 Annular frame (gripping means supporting means) 108A, 108B Rotating shaft 112A, 112B , 112C, 112D Rail driving air cylinder

Claims (26)

[Claims] 1. A quartz crucible handling apparatus comprising: a reversing device for reversing a quartz crucible from a state in which an opening is downward and an opening being upward, and a storage device for storing the quartz crucible in a predetermined susceptor. A quartz crucible handling device in which the reversing device and the reversing device are formed at the same position. 2. A quartz crucible handling device comprising: a reversing device for reversing a quartz crucible from a state in which an opening is downward and an opening being upward; and a storage device for storing the quartz crucible in a predetermined susceptor. A quartz crucible handling apparatus having the pallet on which the reversing device and the reversing device are formed at the same position, and on which the quartz crucible can be placed; 3. The pallet has two parallel rails on which the pallet can travel, and at least one of the two parallel rails is movable outward so as to widen the interval. The quartz crucible handling device according to claim 1, wherein 4. The quartz crucible handling apparatus according to claim 3, further comprising means for raising and lowering the two rails. 5. The pallet is arranged along two concentric circles having different diameters so that the quartz crucible can be stably mounted in both the non-inverted state and the inverted state of the quartz crucible. 3. The quartz crucible handling device according to claim 2, further comprising a contact member. 6. A means for detecting a height position of the two parallel rails or the quartz crucible, and a height of the two parallel rails according to an output signal of the means for detecting the height position. 4. The quartz crucible handling apparatus according to claim 3, further comprising means for controlling a position. 7. A plurality of means for sandwiching and holding the quartz crucible from outside, a holding means supporting means having an annular portion to which the plurality of means for holding are attached and surrounding the quartz crucible, and a support for the holding means. 2. A quartz crucible handling apparatus according to claim 1, further comprising a rotating shaft mounted at a position opposite to the means by 180 degrees. 8. The shape and dimensions of the holding means supporting means are such that they are located at a distance from the outer peripheral surface of the quartz crucible at a distance equal to or greater than the thickness of a susceptor in which the quartz crucible is housed. The quartz crucible handling device according to claim 7, characterized in that: 9. The quartz crucible handling apparatus according to claim 7, wherein said rotating shaft is mounted at a position corresponding to a center of gravity of said quartz crucible in a height direction. 10. The means for raising and lowering the two rails has a driving force source and means for simultaneously transmitting the driving force of the driving force source to the vicinity of each end of the two rails. The quartz crucible handling device according to claim 4, wherein 11. The apparatus according to claim 10, wherein said means for simultaneously transmitting includes means connected to a rotating shaft of said driving force source and distributing a rotating force to a plurality of rotating shafts at the same gear ratio. Quartz crucible handling equipment. 12. The quartz crucible handling apparatus according to claim 7, wherein the plurality of holding means are a plurality of air cylinders. 13. The quartz crucible handling apparatus according to claim 7, further comprising means for raising and lowering said holding means supporting means. 14. A device for raising and lowering the holding means supporting means, comprising: a driving force source; and a means for simultaneously transmitting the driving force of the driving force source to the opposite gripping portions of the hand device. 14. The quartz crucible handling device according to claim 13. 15. The apparatus according to claim 14, wherein said means for simultaneously transmitting is connected to a rotating shaft of said driving force source and distributes the rotating force to a plurality of rotating shafts at the same gear ratio. Quartz crucible handling equipment. 16. The apparatus further comprising: means for detecting a height position of the rail means or the quartz crucible; and means for controlling the height position of the rail means in accordance with an output signal of the means for detecting the height position. The quartz crucible handling device according to claim 2, characterized in that: 17. The quartz crucible handling apparatus according to claim 6, wherein the rail means or the means for detecting the height position of the quartz crucible is an optical encoder provided between a movable part and a stationary part. apparatus. 18. The quartz crucible handling apparatus according to claim 7, wherein each of the plurality of holding means has an air cylinder and a holding portion attached to a tip of a piston of the air cylinder. 19. The quartz crucible handling apparatus according to claim 18, wherein said grip portion is formed by attaching silicon rubber to a surface of a metal plate. 20. The quartz crucible handling apparatus according to claim 18, wherein a tightening force of the air cylinder is variable. 21. In order to obtain a force required for gripping the quartz crucible, the cross section area and the air pressure of the air cylinder, the friction coefficient of a contact portion of the grip portion with the quartz crucible are taken into consideration, and safety is ensured. 19. The quartz crucible handling apparatus according to claim 18, wherein a contact area of the grip portion is determined in consideration of a rate. 22. A means for covering the plurality of rotating shafts with air tight so that when the plurality of rotating shafts rotate, dust which may be generated by mechanical contact is not scattered. Item 16. A quartz crucible handling device according to item 11 or 15. 23. A reversing device for reversing a quartz crucible placed on a pallet from a state in which an opening is downward and making an opening upward, and a storage device for storing the quartz crucible in a predetermined susceptor. A quartz crucible handling device having the reversing device and the reversing device formed at the same position,
A plurality of means for sandwiching and holding the quartz crucible from the outside, a plurality of means for holding the quartz crucible attached, a holding means supporting means having an annular portion surrounding the quartz crucible, and a 180-degree facing of the holding means supporting means A quartz crucible handling method using a quartz crucible handling device having a rotating shaft mounted at a position where the quartz crucible is held from the outside near an opening thereof; and Relatively rotating the rotating shaft 180 degrees so that the opening of the quartz crucible is upward; placing the quartz crucible on the pallet; descending the annular portion Lowering the quartz crucible and storing the quartz crucible in a susceptor. 24. The step of relatively separating the quartz crucible from the pallet includes the step of raising the quartz crucible and the step of lowering the rail means on which the pallet is mounted. The quartz crucible handling method according to claim 23. 25. A step of temporarily raising the quartz crucible before lowering the quartz crucible and storing the quartz crucible in the susceptor; and inserting the susceptor into a lower portion of the quartz crucible. 24. The quartz crucible handling method according to claim 23, wherein: 26. The quartz crucible handling method according to claim 23, further comprising the step of controlling the X and Y positions of the susceptor so as to be substantially coaxial with the quartz crucible.