JPH1125413A - Thin film magnetic head - Google Patents

Thin film magnetic head

Info

Publication number
JPH1125413A
JPH1125413A JP17417397A JP17417397A JPH1125413A JP H1125413 A JPH1125413 A JP H1125413A JP 17417397 A JP17417397 A JP 17417397A JP 17417397 A JP17417397 A JP 17417397A JP H1125413 A JPH1125413 A JP H1125413A
Authority
JP
Japan
Prior art keywords
thin film
thin
sections
magnetic head
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17417397A
Other languages
Japanese (ja)
Inventor
Hayato Hasegawa
はやと 長谷川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP17417397A priority Critical patent/JPH1125413A/en
Publication of JPH1125413A publication Critical patent/JPH1125413A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To increase the contacting pressure between a magnetic recording medium and thin film element employing a simple machining and to improve the productivity by providing grooves to the sliding section, which always contacts with and slides against a magnetic recording medium to conduct a magnetic recording and reproducing and has plural thin film elements, so that the peripheral sections of the elements become independent to each other. SOLUTION: The peripheral sections of plural thin film elements 43 are made into independent parts by grid shaped grooves 41 provided on a sliding section S and the parts are sectionalized by prismatic thin film element sections O and pyramid shaped guide sections P. The sections P absorb the dispersion in the positioning of elements 43 so that the sections O, which are located at the position being guided, always receive a constant contacting width and a contacting pressure. Due to its own elasticity, a magnetic tape T generates elastic distortion against the grooves 41, the sections O are enclosed, the contacting conditions are stabilized and the winding-up of worn particles generated during a tape running and foreign matters from the external is prevented. Thus, a stable recording and reproducing is conducted and the improvement in the productivity by the simplified manufacturing process is realized.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、例えばコンピュ
ータ用データカートリッジに用いられる薄膜磁気へッド
に関し、特に薄膜素子よりも幅の広い磁気記録媒体との
摺動部を必要とする薄膜磁気へッドに関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin-film magnetic head used for, for example, a data cartridge for a computer, and more particularly to a thin-film magnetic head which requires a sliding portion with a magnetic recording medium wider than a thin-film element. About

【0002】[0002]

【従来の技術】高密度磁気記録に適した薄膜磁気へッド
は、より高容量化へと移行しつつあるコンピュータ用デ
ータカートリッジ等の分野においてもバルクタイプの磁
気へッドに代わり採用化が進められている。特に近年
は、より高密度化への対応により、記録側にインダクテ
ィブ型薄膜へッドが用いられ、再生側に磁気記録媒体で
ある磁気テープからの信号磁界を電気抵抗変化に変換し
検出する磁気抵抗効果素子型薄膜ヘッド(MRへッド)
が用いられている。
2. Description of the Related Art Thin-film magnetic heads suitable for high-density magnetic recording are being used instead of bulk-type magnetic heads in the field of data cartridges for computers, which are shifting to higher capacity. Is underway. Particularly in recent years, in response to higher densities, inductive thin film heads have been used on the recording side, and a magnetic field that converts a signal magnetic field from a magnetic tape, which is a magnetic recording medium, into electrical resistance change and detects it on the reproducing side. Resistive effect type thin film head (MR head)
Is used.

【0003】MRヘッドを含む薄膜磁気へッドは、半導
体の製法を用いて作製されるため、一般的には3インチ
〜5インチ程度の基板サイズで作製されることが多い。
半導体と同様に、薄膜形成工程における1ヘッド当たり
の工数を滅らし、かつ1ヘッド当たりの歩留まりを稼い
でコストを下げる目的で、基板サイズを可能な限り大き
くする一方、1ヘッド分の縦×横の寸法を必要最小限に
小さくし、基板1枚当たりから取れる薄膜磁気ヘッドの
数ができるだけ多くなるような考慮がなされている。
[0003] Thin-film magnetic heads including MR heads are manufactured using a semiconductor manufacturing method, and thus are generally manufactured with a substrate size of about 3 inches to 5 inches.
Similar to semiconductors, the size of the substrate is made as large as possible in order to reduce the man-hour per head in the thin film forming process and to increase the yield per head and reduce the cost, while increasing the length and width of one head. Has been considered so that the number of thin film magnetic heads per substrate can be as large as possible.

【0004】ところが、薄膜素子よりも幅の広い磁気テ
ープとの摺動部を必要とする薄膜磁気へッド、例えばコ
ンピュータ用テープストリーマに用いられる薄膜磁気ヘ
ッド等においては、薄膜素子の無い余白部分の占める面
積が多くなるため、1枚の基板内に入れられる薄膜磁気
へッドの数を多くすることができなくなってしまう。薄
膜磁気へッドは、薄膜形成工程が数十工程以上と全体の
工数中での占める割合が非常に多く、この場合特に歩留
まりの観点から結果的にコストアップを招くことが多
い。
However, in a thin-film magnetic head that requires a sliding portion with a magnetic tape wider than the thin-film element, for example, a thin-film magnetic head used in a tape streamer for a computer, a blank portion having no thin-film element is provided. Increases the area occupied by the thin film magnetic heads in one substrate. The thin-film magnetic head has a very large proportion of the total man-hours in the number of processes of forming the thin film, which is several tens of steps or more. In this case, the cost is often increased particularly from the viewpoint of the yield.

【0005】そこで、図14に示すように、上記問題を
回避するため1ヘッド分の幅寸法を薄膜磁気ヘッド30
の薄膜素子33の必要最小限の幅寸法でパターン設計
し、薄膜素子33を保護する対向保護板38と必要とす
る磁気テープTとの摺動幅を補う並列保護板39を後の
工程で接着する方法を採っていた。
Therefore, as shown in FIG. 14, in order to avoid the above problem, the width of one head is reduced by the thin film magnetic head 30.
A pattern is designed with the minimum required width of the thin film element 33, and a parallel protection plate 39 for supplementing the required sliding width between the opposing protection plate 38 for protecting the thin film element 33 and the required magnetic tape T is bonded in a later step. Had taken the method of doing.

【0006】[0006]

【発明が解決しようとする課題】上述した従来の薄膜磁
気ヘッド30の摺動部Sは、良好な記録再生を行う目的
から、図16に示す磁気ープTに対する接触角度θ1及
び圧力P等から算出された、ある一定の曲率Rを有する
円筒形状に形成されている。尚、図中Wは摺動部Sが磁
気テープTに接触する幅を示している。
The sliding portion S of the above-mentioned conventional thin film magnetic head 30 has a contact angle θ1 with the magnetic loop T shown in FIG. It is formed in a calculated cylindrical shape having a certain curvature R. In the drawing, W indicates the width at which the sliding portion S contacts the magnetic tape T.

【0007】このような円筒形状の摺動部Sでは、図1
4に示す磁気テープTとの接触状態においては、接触幅
Wは薄膜素子33に対して大きくなる。また、図15に
示す薄膜素子33に対する磁気テープTの接触圧力を高
めた場合の接触状態においては、接触幅Wは薄膜素子3
3に対して小さくなる。そして、薄膜磁気ヘッド30の
位置決め精度がθ方向に傾いた場合には、接触幅Wが薄
膜素子33の位置から外れてしまい、電気的特性の劣化
が生じ、安定した記録・再生が行えなくなる。
In such a cylindrical sliding portion S, FIG.
In the state of contact with the magnetic tape T shown in FIG. 4, the contact width W is larger than the thin film element 33. Further, in the contact state when the contact pressure of the magnetic tape T with respect to the thin film element 33 shown in FIG.
3 smaller. If the positioning accuracy of the thin-film magnetic head 30 is inclined in the θ direction, the contact width W deviates from the position of the thin-film element 33, and the electrical characteristics are deteriorated, so that stable recording / reproduction cannot be performed.

【0008】従って、摺動部Sにおける磁気テープTと
の接触状態は、薄膜磁気ヘッド作製時の位置決め精度の
影響を大きく受けることとなるので、そのばらつきを考
慮して磁気テープTとの接触幅Wを大きくしている。と
ころが、このように接触幅Wが大きいと、薄膜素子33
に対する接触圧力は低下し、また摺動部Sが薄膜素子3
3に対して大きな面となるため、摩耗粉や異物等の巻き
込みが発生しやすい。そして、接触圧力の低下及び摩耗
粉や異物等の巻き込みによって、薄膜素子33と磁気テ
ープTとの間にスペーシングロスが発生し、良好な記録
・再生が行えない等の品質的な問題が発生する。
Accordingly, the state of contact between the sliding portion S and the magnetic tape T is greatly affected by the positioning accuracy when the thin-film magnetic head is manufactured. W is increased. However, when the contact width W is large, the thin film element 33
The contact pressure on the thin film element 3 is reduced.
Since the surface is larger than that of No. 3, entrapment of abrasion powder, foreign matter and the like is likely to occur. Then, due to a decrease in contact pressure and entrainment of abrasion powder or foreign matter, a spacing loss occurs between the thin film element 33 and the magnetic tape T, and quality problems such as a failure to perform good recording / reproduction occur. I do.

【0009】さらに、薄膜磁気ヘッド30の位置決め工
程において、高精度な位置決めを行う組立技術が必要と
なることはもちろんのこと、安定した接触状態を維持す
るためには摺動部Sが均一な円筒形状であることも求め
られ、高精度な円筒研削を行う加工技術が求められてい
る。従って、位置決め工程及び円筒研削工程の作業工数
が掛かるので、製造工程全体のタクトを短縮することが
難しく、1ヘッド当たりのコストを下げることが容易で
ないという問題があった。
Further, in the step of positioning the thin-film magnetic head 30, not only an assembling technique for performing high-precision positioning is required, but also in order to maintain a stable contact state, the sliding portion S must have a uniform cylindrical shape. A shape is also required, and a processing technique for performing highly accurate cylindrical grinding is required. Accordingly, since the number of steps required for the positioning step and the cylindrical grinding step is increased, it is difficult to reduce the tact time of the entire manufacturing step, and it is not easy to reduce the cost per head.

【0010】この発明は、上述した事情から成されたも
のであり、磁気記録媒体と摺動部との接触状態を向上さ
せるとともに、製造工程を簡略化させることができる薄
膜磁気ヘッドを提供することを目的とする。
The present invention has been made in view of the above circumstances, and provides a thin-film magnetic head capable of improving a contact state between a magnetic recording medium and a sliding portion and simplifying a manufacturing process. With the goal.

【0011】[0011]

【課題を解決するための手段】上記目的は、この発明に
あっては、磁気記録媒体と摺動する摺動部に設けられ、
前記磁気記録媒体と常時接触しながら磁気記録・再生を
行う複数の薄膜素子を有する薄膜磁気へッドにおいて、
前記各薄膜素子の周辺部を独立した状態とする溝を設け
ることにより達成される。
According to the present invention, the above object is provided on a sliding portion which slides on a magnetic recording medium,
In a thin-film magnetic head having a plurality of thin-film elements that perform magnetic recording and reproduction while constantly contacting the magnetic recording medium,
This is achieved by providing a groove that makes the peripheral portion of each of the thin film elements independent.

【0012】上記構成によれば、薄膜素子の周辺部を独
立した状態とする溝を設けているので、磁気記録媒体と
各薄膜素子との間で高い接触圧力が得られ、安定した接
触が可能となる。さらに、位置決め精度や円筒研削精度
に影響されずに安定した接触が可能となることから、位
置決め工程及び円筒研削工程に対する要求精度が低減さ
れることになり、生産性を向上させることができる。
According to the above configuration, since the groove for making the peripheral portion of the thin film element independent is provided, a high contact pressure is obtained between the magnetic recording medium and each thin film element, and stable contact is possible. Becomes Furthermore, since stable contact can be performed without being affected by the positioning accuracy and the cylindrical grinding accuracy, the required accuracy for the positioning step and the cylindrical grinding step is reduced, and productivity can be improved.

【0013】[0013]

【発明の実施の形態】以下、この発明の好適な実施形態
を添付図面に基づいて詳細に説明する。なお、以下に述
べる実施形態は、この発明の好適な具体例であるから、
技術的に好ましい種々の限定が付されているが、この発
明の範囲は、以下の説明において、特にこの発明を限定
する旨の記載がない限り、これらの形態に限られるもの
ではない。
Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings. The embodiment described below is a preferred specific example of the present invention,
Although various technically preferable limits are given, the scope of the present invention is not limited to these embodiments unless otherwise specified in the following description.

【0014】図1は、この発明の薄膜磁気ヘッドの実施
形態を示す斜視図であり、図2は、その平面図である。
この薄膜磁気ヘッド40は、薄膜素子43を保護する対
向保護板48と必要とする磁気テープTとの摺動幅を補
う並列保護板49を備えている点は従来と同一の構成で
あるが、複数の薄膜素子43の周辺部をそれぞれ独立し
た状態とする格子状の溝41が摺動部Sに設けられてい
る点で異なる構成となっている。
FIG. 1 is a perspective view showing an embodiment of a thin-film magnetic head according to the present invention, and FIG. 2 is a plan view thereof.
The thin-film magnetic head 40 has the same configuration as the conventional one in that it has a parallel protective plate 49 for compensating for the sliding width between the opposing protective plate 48 for protecting the thin-film element 43 and the required sliding width of the magnetic tape T, The configuration is different in that a lattice-shaped groove 41 for making the peripheral portions of the plurality of thin film elements 43 independent from each other is provided in the sliding portion S.

【0015】薄膜素子43の周辺部は、格子状の溝加工
により角柱状に形成された薄膜素子部Oと角錐状に形成
されたガイド部Pに区切られており、各薄膜素子43は
磁気テープTとそれぞれ独立に接触する。ガイド部P
は、薄膜素子部Oをガイドする補助的な役割を果たして
いる。薄膜素子部O単体による磁気テープTとの接触で
は、1素子当たりの接触圧力は飛躍的に向上するが、接
触圧力が高まったために薄膜素子43の摩耗発生が顕著
となり、へッド寿命が短くなる等の薄膜磁気へッド40
の性能が劣化するからである。
The peripheral portion of the thin film element 43 is divided into a prismatic thin film element portion O and a pyramid-shaped guide portion P by lattice-like groove processing. Contact each with T independently. Guide part P
Plays an auxiliary role of guiding the thin film element portion O. In the contact of the thin film element portion O with the magnetic tape T alone, the contact pressure per element is dramatically improved, but the increased contact pressure causes significant wear of the thin film element 43 and shortens the head life. Thin film magnetic head 40
This is because the performance of the device deteriorates.

【0016】また、ガイド部Pは、各薄膜素子43の位
置決め精度のばらつきを吸収して、ガイドしている位置
にある薄膜素子部Oに常に一定の接触幅及び接触圧力を
受けさせる役割を果たしている。薄膜素子部O単体にお
ける磁気テープTとの接触位置は、位置決め精度のばら
つきによって不均一となるからである。
The guide portion P serves to absorb the variation in the positioning accuracy of each thin film element 43 and to constantly apply a constant contact width and contact pressure to the thin film element portion O at the position where the thin film element 43 is being guided. I have. This is because the contact position of the thin film element portion O with the magnetic tape T alone becomes non-uniform due to variation in positioning accuracy.

【0017】図3は、薄膜素子部Oと磁気テープTとの
接触状態を側面方向から見た断面図を示している。磁気
テープTは自らの弾性材による特徴から、溝形状に対し
て弾性歪みを生じ、角柱状の薄膜素子部Oを包み込むか
たちとなっている。これにより接触状態が安定すること
はもちろんのこと、磁気テープTの走行時に発生する摩
耗粉及び外部からの異物等の巻き込みを防止する。
FIG. 3 is a cross-sectional view of the contact state between the thin film element portion O and the magnetic tape T viewed from the side. Due to the characteristics of the magnetic tape T due to its own elastic material, the magnetic tape T is elastically deformed in the groove shape and wraps around the prismatic thin film element portion O. This not only stabilizes the contact state, but also prevents the abrasion powder generated during running of the magnetic tape T and the intrusion of foreign matter from the outside.

【0018】ここで、この薄膜磁気ヘッド40を用いた
コンビネーションヘッドの製造方法の一例を図4〜図1
3を参照して説明する。先ず、図4に示すように、蒸
着、スパッタリングあるいはエッチング等の薄膜形成技
術を用いて、薄膜素子43と薄膜素子43からの電極引
き出し端子44を基板42の表面にマトリクス状に形成
して薄膜磁気へッド基板45を作製する。次に、この薄
膜磁気へッド基板45を仮想線46に沿って1ヘッド分
に切断し、図5に示すような切断チップ47を作製す
る。
Here, an example of a method of manufacturing a combination head using the thin-film magnetic head 40 will be described with reference to FIGS.
3 will be described. First, as shown in FIG. 4, a thin film element 43 and an electrode lead terminal 44 from the thin film element 43 are formed in a matrix on the surface of the substrate 42 by using a thin film forming technique such as evaporation, sputtering or etching. A head substrate 45 is manufactured. Next, the thin-film magnetic head substrate 45 is cut along the imaginary line 46 into one head to produce a cutting chip 47 as shown in FIG.

【0019】そして、図6に示すように、この切断チッ
プ47を対向保護板48及び並列保護板49と組み合わ
せ、樹脂あるいはガラス等で接着し、図7に示すような
接着チップ50を作製する。その後、この接着チップ5
0を仮想線51、52に沿って1チップ分に切断し、図
8に示すようなヘッドチップ53を作製する。
Then, as shown in FIG. 6, the cut chip 47 is combined with the opposing protection plate 48 and the parallel protection plate 49, and bonded with resin or glass to produce an adhesive chip 50 as shown in FIG. Then, this adhesive chip 5
0 is cut into one chip along the imaginary lines 51 and 52 to produce a head chip 53 as shown in FIG.

【0020】次に、このヘッドチップ53における磁気
テープTとの摺動部Sとなる面を、薄膜磁気へッド基板
45内に設けられたギャップ深さ研磨量を寸法で読みと
れるマーカー(以下、デプスマーカーという)や電気抵
抗の変化で検出する研磨モニター(以下、デプスモニタ
ーという)を用いて、図9に示すように、予め定められ
たギャップ深さ寸法Hになるように制御しながら研削加
工してへッドチップ54を作製する。
Next, the surface of the head chip 53, which is to be the sliding portion S with the magnetic tape T, is marked with a marker (hereinafter referred to as the "gap depth") provided in the thin-film magnetic head substrate 45, which can be polished by a dimension. , A depth marker) and a polishing monitor (hereinafter referred to as a depth monitor) that detects a change in electric resistance, while controlling to a predetermined gap depth dimension H as shown in FIG. Processing is performed to produce a head chip 54.

【0021】即ち、へッドチップ53を回転もしくは揺
動運動をさせながら、ダイヤモンド砥粒等の固定砥粒で
構成された外周切れ刃である円筒形の研削砥石により研
削する円筒研削を行う。そして、円筒研削された摺動部
Sを、シート状の研磨材(研磨テープ)により最終研磨
する。
That is, while rotating or oscillating the head tip 53, cylindrical grinding is performed by a cylindrical grinding wheel, which is an outer peripheral cutting edge composed of fixed abrasive grains such as diamond abrasive grains. Then, the cylindrically ground sliding portion S is finally polished with a sheet-like abrasive (polishing tape).

【0022】そして、研削加工装置やスライシングマシ
ンにダイヤモンド等の砥粒、金属または樹脂等のボンド
材によって構成された研削砥石を取り付けて、図10に
示すように、研磨された摺動部Sに溝41を研削加工し
てへッドチップ55を作製する。尚、レーザートリミン
グ加工により溝41を形成しても良い。その後、図11
に示すように、このへッドチップ55の電極引き出し端
子44から印刷配線基板56へワイヤーボンディングま
たは半田接続等を用いて電極配線を取り出してへッドチ
ップ57を作製する。
Then, a grinding wheel made of abrasive grains such as diamond or a bonding material such as metal or resin is attached to a grinding device or a slicing machine, and as shown in FIG. The groove 41 is ground to produce a head chip 55. The grooves 41 may be formed by laser trimming. Then, FIG.
As shown in (1), the electrode wiring is taken out from the electrode lead-out terminal 44 of the head chip 55 to the printed wiring board 56 by wire bonding or solder connection, and the head chip 57 is manufactured.

【0023】次に、図12に示すように、このへッドチ
ップ57のうち記録用の薄膜素子43が形成された薄膜
記録へッドチップ57aと、再生用の薄膜素子部43が
形成された薄膜再生ヘッドチップ57bを組合せて接着
し、コンビネーションブロック58を作製する。このコ
ンビネーションブロック58は、各ヘッドチップ57
a、57bの薄膜素子部43の構成により、単品あるい
は複数個、若しくはテープガイドや消去磁気ヘッド等と
組み合わせることになる。例えば、薄膜記録へッドチッ
プ57aと薄膜再生ヘッドチップ57b、又は薄膜記録
へッドチップ57aと薄膜再生ヘッドチップ57bと消
去磁気へッド、あるいは記録/再生複合タイプ薄膜磁気
へッドチップとテープガイド等の組合せとなる。
Next, as shown in FIG. 12, of the head chip 57, a thin film recording head chip 57a having the recording thin film element 43 formed thereon, and a thin film reproducing head having the reproducing thin film element section 43 formed thereon. The chips 57b are combined and bonded to form a combination block 58. This combination block 58 includes
Depending on the configuration of the thin film element section 43 of a and 57b, a single product, a plurality of products, or a combination with a tape guide, an erasing magnetic head, or the like is used. For example, a combination of a thin film recording head chip 57a and a thin film reproducing head chip 57b, a thin film recording head chip 57a and a thin film reproducing head chip 57b and an erasing magnetic head, or a combination of a recording / reproducing combined type thin film magnetic head chip and a tape guide. Become.

【0024】そして、図13に示すように、このコンビ
ネーションブロック58をパーマロイ等から成るシール
ド枠59に位置決めして樹脂等で固定する。これによ
り、コンビネーションヘッド60が作製される。
Then, as shown in FIG. 13, the combination block 58 is positioned on a shield frame 59 made of permalloy or the like and fixed with a resin or the like. Thereby, the combination head 60 is manufactured.

【0025】[0025]

【発明の効果】以上のように、この発明によれば、磁気
記録媒体と摺動部との接触状態を向上させることがで
き、安定した記録・再生が可能となる。また、製造工程
を簡略化させることができ、生産性を向上させることが
可能となる。
As described above, according to the present invention, the state of contact between the magnetic recording medium and the sliding portion can be improved, and stable recording and reproduction can be performed. Further, the manufacturing process can be simplified, and the productivity can be improved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】この発明の薄膜磁気ヘッドの実施形態を示す斜
視図。
FIG. 1 is a perspective view showing an embodiment of a thin-film magnetic head according to the present invention.

【図2】図1の薄膜磁気ヘッドの平面図。FIG. 2 is a plan view of the thin-film magnetic head of FIG. 1;

【図3】図1の薄膜磁気ヘッドの薄膜素子部と磁気テー
プとの接触状態を側面方向から見た断面図。
FIG. 3 is a cross-sectional view of a contact state between a thin film element portion and a magnetic tape of the thin film magnetic head of FIG.

【図4】図1の薄膜磁気ヘッドの製造方法の一例を示す
第1の図。
FIG. 4 is a first diagram showing an example of a method for manufacturing the thin-film magnetic head of FIG. 1;

【図5】図1の薄膜磁気ヘッドの製造方法の一例を示す
第2の図。
FIG. 5 is a second diagram showing an example of the method for manufacturing the thin-film magnetic head of FIG. 1;

【図6】図1の薄膜磁気ヘッドの製造方法の一例を示す
第3の図。
FIG. 6 is a third diagram showing an example of the method for manufacturing the thin-film magnetic head of FIG. 1;

【図7】図1の薄膜磁気ヘッドの製造方法の一例を示す
第4の図。
FIG. 7 is a fourth diagram showing an example of the method for manufacturing the thin-film magnetic head of FIG. 1;

【図8】図1の薄膜磁気ヘッドの製造方法の一例を示す
第5の図。
FIG. 8 is a fifth diagram showing an example of the method for manufacturing the thin-film magnetic head of FIG.

【図9】図1の薄膜磁気ヘッドの製造方法の一例を示す
第6の図。
FIG. 9 is a sixth diagram showing an example of the method for manufacturing the thin-film magnetic head of FIG. 1;

【図10】図1の薄膜磁気ヘッドの製造方法の一例を示
す第7の図。
FIG. 10 is a seventh diagram showing one example of a method for manufacturing the thin-film magnetic head of FIG. 1;

【図11】図1の薄膜磁気ヘッドの製造方法の一例を示
す第8の図。
FIG. 11 is an eighth diagram showing an example of the method for manufacturing the thin-film magnetic head of FIG. 1;

【図12】図1の薄膜磁気ヘッドの製造方法の一例を示
す第9の図。
FIG. 12 is a ninth view showing one example of a method for manufacturing the thin-film magnetic head of FIG. 1;

【図13】図1の薄膜磁気ヘッドの製造方法の一例を示
す第10の図。
FIG. 13 is a tenth view showing one example of a method for manufacturing the thin-film magnetic head of FIG. 1;

【図14】従来の薄膜磁気ヘッドの一例を示す斜視図。FIG. 14 is a perspective view showing an example of a conventional thin-film magnetic head.

【図15】図14の薄膜磁気ヘッドの問題点を説明する
ための側面図。
FIG. 15 is a side view for explaining a problem of the thin-film magnetic head of FIG. 14;

【図16】従来の薄膜磁気ヘッドの磁気テープとの接触
状態を示す側面図。
FIG. 16 is a side view showing a contact state of a conventional thin-film magnetic head with a magnetic tape.

【符号の説明】[Explanation of symbols]

40・・・薄膜磁気ヘッド、41・・・溝、43・・・
薄膜素子、O・・・薄膜素子部、S・・・摺動部、T・
・・磁気テープ
40 ... thin-film magnetic head, 41 ... groove, 43 ...
Thin film element, O: Thin film element part, S: Sliding part, T
··Magnetic tape

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 磁気記録媒体と摺動する摺動部に設けら
れ、前記磁気記録媒体と常時接触しながら磁気記録・再
生を行う複数の薄膜素子を有する薄膜磁気へッドにおい
て、 前記各薄膜素子の周辺部を独立した状態とする溝を設け
たことを特徴とする薄膜磁気ヘッド。
1. A thin-film magnetic head having a plurality of thin-film elements provided on a sliding portion that slides on a magnetic recording medium and performing magnetic recording / reproduction while constantly in contact with the magnetic recording medium, A thin-film magnetic head comprising a groove for making a peripheral portion of an element independent.
【請求項2】 前記溝が、前記摺動部に設けられている
請求項1に記載の薄膜磁気へッド。
2. The thin-film magnetic head according to claim 1, wherein the groove is provided in the sliding portion.
【請求項3】 前記溝が、格子状に設けられている請求
項1に記載の薄膜磁気へッド。
3. The thin-film magnetic head according to claim 1, wherein the grooves are provided in a lattice shape.
JP17417397A 1997-06-30 1997-06-30 Thin film magnetic head Pending JPH1125413A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17417397A JPH1125413A (en) 1997-06-30 1997-06-30 Thin film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17417397A JPH1125413A (en) 1997-06-30 1997-06-30 Thin film magnetic head

Publications (1)

Publication Number Publication Date
JPH1125413A true JPH1125413A (en) 1999-01-29

Family

ID=15973991

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17417397A Pending JPH1125413A (en) 1997-06-30 1997-06-30 Thin film magnetic head

Country Status (1)

Country Link
JP (1) JPH1125413A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8035919B2 (en) 2008-12-15 2011-10-11 Tdk Corporation Multi-channel thin-film magnetic head, magnetic tape drive apparatus with the multi-channel thin-film magnetic head and manufacturing method of multi-channel thin-film magnetic head

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8035919B2 (en) 2008-12-15 2011-10-11 Tdk Corporation Multi-channel thin-film magnetic head, magnetic tape drive apparatus with the multi-channel thin-film magnetic head and manufacturing method of multi-channel thin-film magnetic head

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