JPH11241917A - Method and apparatus for detecting plate shape - Google Patents

Method and apparatus for detecting plate shape

Info

Publication number
JPH11241917A
JPH11241917A JP4537198A JP4537198A JPH11241917A JP H11241917 A JPH11241917 A JP H11241917A JP 4537198 A JP4537198 A JP 4537198A JP 4537198 A JP4537198 A JP 4537198A JP H11241917 A JPH11241917 A JP H11241917A
Authority
JP
Japan
Prior art keywords
led
plate
camera
leds
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4537198A
Other languages
Japanese (ja)
Inventor
Toshio Mori
敏夫 森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Original Assignee
Kawasaki Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Steel Corp filed Critical Kawasaki Steel Corp
Priority to JP4537198A priority Critical patent/JPH11241917A/en
Publication of JPH11241917A publication Critical patent/JPH11241917A/en
Pending legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

PROBLEM TO BE SOLVED: To precisely detect the plate shape all the time by arranging the oriented radiation main axis of emitted light rays of respective LED employed for a back light toward approximately to a camera means. SOLUTION: Together with a LED substrate 11, a LED light source is split into a plurality of groups and at the same time the remoter from the optical axis 6a of a camera, the more the divided substrate 11 comprising these LED groups are tilted to keep normals of the substrates approximately facing to the camera 6. In such a manner, the oriented radiation main axes of respectively emitted light rays of plural LEDs 12 of the respective groups are set toward the camera 6 and the emitted light rays from the LED light source are converged on the camera 6. Consequently, regardless of the width of a steel strip 2, the steel strip 2 is illuminated with approximately even intensity in the width direction, so that an image of the steel strip with high resolution can be obtained by the camera 6 without decreasing the quantity of light and the plate shape such as the width and the crop shape of the steel strip 2 can precisely be detected constantly.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、複数のLEDを
バックライトとして用いて板を照明し、その像を撮像し
て板形状を検出する方法および装置に関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for illuminating a board using a plurality of LEDs as a backlight, capturing an image of the board, and detecting the board shape.

【0002】[0002]

【従来の技術】例えば、製鉄工場のホットストリップミ
ルには、鋼帯の形状検出装置として、板幅計やクロップ
形状計が用いられている。図4は、そのホットストリッ
プミルにおけるクロップ形状計の設備構成を示すもので
ある。この設備は、パスライン1に沿って矢印Aで示す
方向に搬送される粗圧延された鋼帯2の先端部および後
端部を、仕上げミル3の入り側においてクロップシャー
4により所定の位置で切断するための装置である。即
ち、この装置は、クロップシャー4の手前側に、パスラ
イン1の下方にLED光源5を配置し、上方に一次元固
体撮像素子(例えば、CCD)カメラ6を配置して、L
ED光源5により鋼帯2をその幅方向に亘って照明して
鋼帯2の幅方向の像をカメラ6で撮像し、その映像信号
をクロップ形状計7に供給して鋼帯2のクロップ形状を
検出し、その形状から切断位置を決定して、その切断位
置に対応するカット信号を、メジャーリングロール8か
らの出力信号に基づいて所定のタイミングでクロップシ
ャー駆動装置9に送信し、これにより鋼帯2の端部を所
定の位置で切断するようにしたものである。なお、クロ
ップ形状計7での鋼帯2の検出信号は、トラッキング用
として上位の制御装置に送信されるようになっている。
2. Description of the Related Art For example, in a hot strip mill in an iron mill, a strip width meter or a crop shape meter is used as a steel strip shape detecting device. FIG. 4 shows a facility configuration of a crop profile meter in the hot strip mill. This equipment removes the leading end and the trailing end of a roughly rolled steel strip 2 conveyed along a pass line 1 in a direction indicated by an arrow A at a predetermined position by a crop shear 4 on the entry side of a finishing mill 3. It is a device for cutting. That is, in this apparatus, an LED light source 5 is disposed below the pass line 1 in front of the crop shear 4, and a one-dimensional solid-state image sensor (for example, a CCD) camera 6 is disposed above the L-axis.
The steel strip 2 is illuminated in the width direction by the ED light source 5, an image in the width direction of the steel strip 2 is captured by the camera 6, and the video signal is supplied to the crop shape meter 7 to output the crop shape of the steel strip 2. Is detected, a cutting position is determined from the shape, and a cutting signal corresponding to the cutting position is transmitted to the crop shear driving device 9 at a predetermined timing based on an output signal from the measuring roll 8, The end of the steel strip 2 is cut at a predetermined position. The detection signal of the steel strip 2 from the crop shape meter 7 is transmitted to a higher-level control device for tracking.

【0003】ここで、上記のLED光源5は、図5にパ
スライン1の方向から見た図を示すように、一般に、パ
スライン1の幅方向に沿って延在するLED基板11上
に複数のLED(発光ダイオード)12を直線状に配列
して構成されている。なお、ホットストリップミルの板
幅計においても、図5と同様に、パスラインの下方にそ
の幅方向に複数のLEDを直線状に配列してなるLED
光源を配置し、上方に一次元固体撮像素子カメラを配置
して鋼帯の幅方向の像を撮像し、その像の画素数から板
幅を計測するようにしている。
Here, as shown in FIG. 5, a plurality of LED light sources 5 are generally provided on an LED substrate 11 extending along the width direction of the pass line 1 as shown in FIG. (Light emitting diodes) 12 are arranged in a straight line. Note that, similarly to FIG. 5, in a width meter of a hot strip mill, an LED in which a plurality of LEDs are linearly arranged in the width direction below a pass line.
A light source is arranged, a one-dimensional solid-state imaging device camera is arranged above, an image in the width direction of the steel strip is taken, and the board width is measured from the number of pixels of the image.

【0004】[0004]

【発明が解決しようとする課題】ところで、図6に示す
ように、LED12は、LEDチップ(図示せず)およ
びリード12aを保持するベース12bと、該ベース1
2bにLEDチップを覆うように設けたキャップ12c
とを有し、このキャップ12cを通して放射される光
は、例えば符号L1,L2で示すような指向性を有し、
強度が最も強い放射主軸の方向は、キャップ12cの中
心を通るベース12bの法線方向となっている。
As shown in FIG. 6, the LED 12 includes a base 12b for holding an LED chip (not shown) and a lead 12a, and a base 1b.
Cap 12c provided on 2b to cover the LED chip
And light emitted through the cap 12c has directivity as indicated by reference numerals L1 and L2, for example.
The direction of the radiation main axis having the highest intensity is the normal direction of the base 12b passing through the center of the cap 12c.

【0005】しかしながら、上述した従来の形状検出装
置では、図5に示すように、複数のLED12の各々
を、その放射主軸が鉛直上方向に向くように配列してい
る。このため、カメラ6に入射する光の強度は、カメラ
6の直下、すなわちカメラ6の光軸6a上に位置するL
EDが最も高く、光軸6aから離れるに従って弱くな
る。例えば、図7に示すように、LED光源5の長さを
3mとし、その中心から上方に5m離れた位置にカメラ
6を配置した場合には、LED光源5の両端のLED1
2の放射主軸と、該LED12からカメラ6に向かう方
向との成す角度は、16.7°となる。この場合、LE
D12が図6に符号L1で示した指向性を有するとすれ
ば、これら両端のLED12からカメラ6に向かう光の
強度は、光軸6a上のLEDの光強度のほぼ0.4倍と
なる。このため、鋼帯2の幅方向端部の光量が低下し
て、鋼帯2の形状を正確に検出できないという問題があ
る。
However, in the above-described conventional shape detection device, as shown in FIG. 5, each of the plurality of LEDs 12 is arranged such that the main radiation axis thereof is directed vertically upward. For this reason, the intensity of the light incident on the camera 6 is lower than that of the camera 6, that is, L, located on the optical axis 6 a of the camera 6.
The ED is highest and becomes weaker as the distance from the optical axis 6a increases. For example, as shown in FIG. 7, when the length of the LED light source 5 is 3 m and the camera 6 is arranged at a position 5 m above the center thereof, the LEDs 1 at both ends of the LED light source 5
The angle formed between the main radiation axis 2 and the direction from the LED 12 toward the camera 6 is 16.7 °. In this case, LE
Assuming that D12 has the directivity indicated by reference numeral L1 in FIG. 6, the intensity of light traveling from the LEDs 12 at both ends toward the camera 6 is approximately 0.4 times the light intensity of the LED on the optical axis 6a. For this reason, there is a problem that the light amount at the width direction end of the steel strip 2 is reduced, and the shape of the steel strip 2 cannot be accurately detected.

【0006】このような問題を解決するため、本発明者
は、図8に示すように、LED光源5をLED基板11
とともに複数の群に分割し、その両側のLED群の基板
11を、その法線がカメラ6に向くように傾斜して配置
したものを開発した。しかし、種々の実験検討の結果、
かかる構成では、鋼帯が両側のLED群からの光によっ
て照明される程度の幅を有する場合には、形状を正確に
検出することができるが、両側のLED群からの照明光
が入射しないような幅の小さな鋼帯や、搬送方向端部に
形成されるフィッシュテール等の形状は、正確に検出で
きないことが判明した。
In order to solve such a problem, the present inventor has proposed that the LED light source 5 be mounted on the LED substrate 11 as shown in FIG.
And a plurality of groups, and the substrates 11 of the LED groups on both sides thereof were developed so as to be inclined so that the normal line thereof faces the camera 6. However, as a result of various experimental studies,
In such a configuration, when the steel strip has a width enough to be illuminated by the light from the LED groups on both sides, the shape can be accurately detected, but the illumination light from the LED groups on both sides is not incident. It has been found that shapes such as a steel strip having a small width and a fish tail formed at the end in the transport direction cannot be detected accurately.

【0007】この発明は、上述した点に鑑みてなされた
もので、種々の板形状を、常に正確に検出できる板形状
の検出方法および装置を提供することを目的とするもの
である。
SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and has as its object to provide a plate shape detecting method and apparatus which can always accurately detect various plate shapes.

【0008】[0008]

【課題を解決するための手段】上記目的を達成するた
め、この発明に係る板形状の検出方法は、複数のLED
からの放射光が撮像手段に集中するように、各LED
を、その放射光の指向性の放射主軸を前記撮像手段にほ
ぼ向けて配列し、これら複数のLEDをバックライトと
して板を照明して、その像を前記撮像手段で撮像して前
記板の形状を検出することを特徴とするものである。
In order to achieve the above object, a plate shape detecting method according to the present invention comprises a plurality of LEDs.
Each LED so that the emitted light from
Are arranged with the radiation principal axis of the radiated light directed substantially toward the image pickup means, illuminate the plate with the plurality of LEDs as a backlight, and take an image of the image by the image pickup means to form the plate. Is detected.

【0009】さらに、この発明は、板の一方の側に撮像
手段を配置し、他方の側に複数のLEDを配置して、前
記板を前記複数のLEDにより照明し、その像を前記撮
像手段で撮像して前記板の形状を検出するようにした板
形状の検出装置において、前記各LEDを、その放射光
の指向性の放射主軸が前記撮像手段にほぼ向くように配
置して、前記複数のLEDからの放射光を前記撮像手段
に集中させるよう構成したことを特徴とするものであ
る。
Further, according to the present invention, an image pickup means is arranged on one side of a plate, a plurality of LEDs are arranged on the other side, and the plate is illuminated by the plurality of LEDs, and an image thereof is taken by the image pickup means In the plate shape detection device configured to detect the shape of the plate by imaging in the above, each of the LEDs is arranged so that the radiation main axis of the directivity of the radiated light is substantially directed to the imaging unit, and The structure is such that the light emitted from the LED is concentrated on the imaging means.

【0010】さらに、この発明は、所定のパスラインに
沿って搬送される板を、前記パスラインの一方の側か
ら、該パスラインと直交する方向に延在して配置した複
数のLEDにより照明し、その像を前記パスラインの他
方の側に配置した一次元固体撮像素子を有する撮像手段
で撮像して前記板の形状を検出するようにした板形状の
検出装置において、前記複数のLEDを複数の群に分割
して、それぞれLED基板上に設けると共に、各群のL
ED基板を、その法線が前記撮像手段にほぼ向くように
配置して、各群の複数のLEDからの放射光が前記撮像
手段に集中するよう構成したことを特徴とするものであ
る。
Further, according to the present invention, a plate conveyed along a predetermined pass line is illuminated by a plurality of LEDs arranged so as to extend from one side of the pass line in a direction orthogonal to the pass line. In a plate-shaped detection device configured to capture an image of the image by an imaging unit having a one-dimensional solid-state imaging device arranged on the other side of the pass line and detect the shape of the plate, the plurality of LEDs are It is divided into a plurality of groups, each is provided on the LED substrate, and the L
The ED substrate is arranged so that a normal line thereof is substantially directed to the image pickup means, so that light emitted from a plurality of LEDs in each group is concentrated on the image pickup means.

【0011】[0011]

【発明の実施の形態】図1は、この発明に係る板形状検
出方法を実施する装置の一実施形態を示すものである。
この板形状検出装置は、図4および図5で説明したと同
様に、パスライン1の下方にその幅方向に沿って配置し
た複数のLED12を有するLED光源5と、パスライ
ン1の上方に配置した一次元固体撮像素子カメラ6とを
有し、LED光源5をバックライトとしてパスライン1
に沿って搬送される鋼帯2をその幅方向に沿って照明
し、その像をカメラ6で撮像して板形状を検出するもの
である。
FIG. 1 shows an embodiment of an apparatus for implementing a plate shape detecting method according to the present invention.
This plate shape detection device includes an LED light source 5 having a plurality of LEDs 12 arranged below the pass line 1 along the width direction thereof, and an LED light source 5 arranged above the pass line 1 as described with reference to FIGS. And a one-dimensional solid-state imaging device camera 6 having the LED light source 5 as a backlight and a pass line 1.
Is illuminated along the width direction of the steel strip 2 conveyed along, and the image thereof is captured by the camera 6 to detect the plate shape.

【0012】この実施形態では、かかる板形状検出装置
において、LED光源5をLED基板11とともに複数
の群に分割すると共に、これらLED群の基板11を、
カメラ6の光軸6aから離れるに従って傾けて配置し
て、その各法線がカメラ6にほぼ向くようにする。この
ようにして、各群の複数のLED12の各々の放射光の
指向性の放射主軸をほぼカメラ6に向けて、LED光源
5からの放射光をカメラ6に集中させるようにする。
In this embodiment, in such a plate shape detecting device, the LED light source 5 is divided into a plurality of groups together with the LED substrates 11, and the substrates 11 of these LED groups are
The camera 6 is disposed so as to be tilted away from the optical axis 6 a so that each normal line thereof is substantially directed to the camera 6. In this way, the radiation main axis of the directivity of the emitted light of each of the plurality of LEDs 12 of each group is directed substantially toward the camera 6, and the emitted light from the LED light source 5 is concentrated on the camera 6.

【0013】したがって、例えば、図7と同様に、LE
D光源5の長さを3mとし、その中心から上方に5m離
れた位置にカメラ6を配置する場合には、LED光源5
の両側のLED群の基板については、図2に示すよう
に、カメラ6側に16.7°傾けて配置する。なお、各
LED群の基板中心における法線と、該中心からカメラ
6に向かう方向との成す角度θは、好ましくは、−2°
≦θ≦+2°の範囲とする。
Therefore, for example, as in FIG.
When the length of the D light source 5 is 3 m and the camera 6 is arranged at a position 5 m above the center, the LED light source 5
As shown in FIG. 2, the substrates of the LED groups on both sides are arranged at an angle of 16.7 ° toward the camera 6. The angle θ between the normal line at the substrate center of each LED group and the direction from the center toward the camera 6 is preferably −2 °.
≦ θ ≦ + 2 °.

【0014】このように構成すれば、鋼帯2を、その幅
の大小にかかわらず、幅方向に亘ってほぼ均一な強度で
照明できるので、その像をカメラ6において光量低下を
生じることなく高解像度で撮像することができ、鋼帯2
の幅やクロップ形状等の板形状を常に正確に検出するこ
とができる。
According to this structure, the steel strip 2 can be illuminated with substantially uniform intensity in the width direction regardless of the width of the steel strip 2. It can be imaged at the resolution, steel strip 2
The shape of the plate such as the width of the image and the shape of the crop can always be detected accurately.

【0015】図3は、この発明に係るLED光源5の一
具体的配置例と、従来の構成とを比較して説明するため
の図である。ここでは、LED光源5の中心から上方に
5364mm離れた位置にカメラ6を配置し、その光軸
6aを中心に両側にそれぞれ14個のLED群を配置す
る。また、各LED群の基板11の長さは100mmと
して、その各基板11上に複数のLEDを取り付ける。
なお、光軸6aを中心として、両側のLED群は対称な
ので、ここでは一方の側のLED群の配列について説明
する。
FIG. 3 is a diagram for comparing and explaining a specific arrangement example of the LED light source 5 according to the present invention and a conventional configuration. Here, the camera 6 is disposed at a position 5364 mm away from the center of the LED light source 5, and 14 LED groups are disposed on both sides of the optical axis 6a. The length of the substrate 11 of each LED group is 100 mm, and a plurality of LEDs are mounted on each substrate 11.
Since the LED groups on both sides are symmetric about the optical axis 6a, the arrangement of the LED groups on one side will be described here.

【0016】ここで、光軸6aから外側に向けて、順次
のLED群を第1LED群、第2LED群、・・・、第
14LED群として、これらの第1〜14群の各基板1
1を、従来のように全て水平、すなわち傾斜角YをY=
0°に配置すると、各基板11の中心における法線と、
該中心からカメラ6に向かう方向との成す角度は、第1
LED群で0.5°と最も小さく、光軸6aから離れる
LED群に従ってその角度は大きくなって、第14LE
D群では14.1°となり、光軸6aから離れるに従っ
て、各LEDからカメラ6に向かう光の強度は低下する
ことになる。
Here, from the optical axis 6a to the outside, the successive LED groups are referred to as a first LED group, a second LED group,..., And a fourteenth LED group.
1 are all horizontal as in the prior art, that is, the inclination angle Y is Y =
When arranged at 0 °, a normal line at the center of each substrate 11 and
The angle between the center and the direction toward the camera 6 is the first angle.
The LED group has the smallest angle of 0.5 °, and its angle increases as the LED group moves away from the optical axis 6a.
In the D group, the angle is 14.1 °, and as the distance from the optical axis 6a increases, the intensity of light traveling from each LED toward the camera 6 decreases.

【0017】この発明の一具体的配置例では、第1LE
D群はY=0°、第2〜4LED群はY=2.9°、第
5〜7LED群はY=5.7°、第8,9LED群はY
=8.6°、第10〜12LED群はY=11.5°、
第13,14LED群はY=14.5°に各基板11を
傾斜して配置する。このように配置すれば、各基板11
の中心における法線と、該中心からカメラ6に向かう方
向との成す角度は、第3,6LED群で0.2°と最も
小さく、最大でも第10LED群で−1.5°となり、
全てのLED群において±2°の範囲内に収まることに
なる。したがって、LED光源5の中央部および端部か
らカメラ6に入射する光の強度がほぼ等しくなるので、
板形状を正確に検出することができるようになる。
In one specific arrangement example of the present invention, the first LE
The D group is Y = 0 °, the second to fourth LED groups are Y = 2.9 °, the fifth to seventh LED groups are Y = 5.7 °, and the eighth and ninth LED groups are Y.
= 8.6 °, the 10th to 12th LED groups have Y = 11.5 °,
In the thirteenth and fourteenth LED groups, each substrate 11 is arranged at an angle of Y = 14.5 °. With this arrangement, each substrate 11
The angle between the normal at the center of the lens and the direction from the center toward the camera 6 is the smallest at 0.2 ° in the third and sixth LED groups, and is −1.5 ° at the maximum in the tenth LED group,
All of the LED groups fall within the range of ± 2 °. Therefore, the intensity of light incident on the camera 6 from the center and the end of the LED light source 5 becomes substantially equal,
The plate shape can be accurately detected.

【0018】なお、この発明は、上述した実施形態にの
み限定されるものではなく、幾多の変更または変形が可
能である。例えば、この発明は、上述したホットストリ
ップミルにおける板幅計やクロップ形状計のように、一
次元LED光源と一次元固体撮像素子カメラとを用いる
ものに限らず、二次元LED光源と二次元固体撮像素子
カメラとを用いて板形状を検出する場合にも有効に適用
することができる。また、複数のLEDは、複数の群に
分割して、各LED群毎に傾斜させる場合に限らず、撮
像手段を中心とする円弧状の一次元に、あるいは球面状
の二次元に配列することもできる。さらに、この発明の
一部をLED表示盤等に適用して、各LEDの放射主軸
を所定の観察位置に集中させるようにして、視認性を向
上させることもできる。
It should be noted that the present invention is not limited to only the above-described embodiment, and that various changes and modifications are possible. For example, the present invention is not limited to the one using a one-dimensional LED light source and a one-dimensional solid-state imaging device camera, such as a plate width meter and a crop shape meter in the above-described hot strip mill. The present invention can also be effectively applied to a case where a plate shape is detected using an image sensor camera. Further, the plurality of LEDs are not limited to being divided into a plurality of groups and inclining for each LED group, and may be arranged one-dimensionally in an arc shape centering on the imaging means or two-dimensionally in a spherical shape. Can also. Furthermore, by applying a part of the present invention to an LED display panel or the like, the emission principal axis of each LED can be concentrated at a predetermined observation position, so that the visibility can be improved.

【0019】[0019]

【発明の効果】この発明によれば、複数のLEDからの
放射光が撮像手段に集中するように、各LEDを、その
指向性の放射主軸を撮像手段にほぼ向けて配列し、これ
ら複数のLEDをバックライトとして板を照明して、そ
の像を撮像手段で撮像して板形状を検出するようにした
ので、撮像手段において均一な光量を確保することがで
きる。したがって、例えば、ホットストリップミルにお
ける板幅計やクロップ形状計においては、光量低下を生
じることなく、種々の板形状を常に正確に検出すること
ができる。
According to the present invention, the LEDs are arranged so that the radiation main axis of the directivity thereof is substantially directed to the image pickup means so that the light emitted from the plurality of LEDs is concentrated on the image pickup means. Since the plate is illuminated with the LED as a backlight, the image is taken by the image pickup means and the plate shape is detected, so that a uniform light amount can be secured in the image pickup means. Therefore, for example, in a plate width meter and a crop shape meter in a hot strip mill, various plate shapes can always be accurately detected without a decrease in light amount.

【図面の簡単な説明】[Brief description of the drawings]

【図1】この発明の一実施形態を示す図である。FIG. 1 is a diagram showing an embodiment of the present invention.

【図2】図1に示す実施形態を説明するための図であ
る。
FIG. 2 is a view for explaining the embodiment shown in FIG. 1;

【図3】この発明に係るLED光源の一具体的配置例と
従来例とを比較して説明するための図である。
FIG. 3 is a diagram for comparing and explaining a specific arrangement example of an LED light source according to the present invention and a conventional example.

【図4】ホットストリップミルにおけるクロップ形状計
の設備構成を示す図である。
FIG. 4 is a diagram showing a facility configuration of a crop shape meter in a hot strip mill.

【図5】図4に示すLED光源をパスライン1の方向か
ら見た図である。
FIG. 5 is a view of the LED light source shown in FIG.

【図6】LEDの構成および指向性を示す図である。FIG. 6 is a diagram showing a configuration and directivity of an LED.

【図7】従来のLED光源における不具合を説明するた
めの図である。
FIG. 7 is a diagram illustrating a problem in a conventional LED light source.

【図8】本発明者が先に開発した形状検出装置の構成を
示す図である。
FIG. 8 is a diagram showing a configuration of a shape detection device developed earlier by the present inventors.

【符号の説明】[Explanation of symbols]

1 パスライン 2 鋼帯 5 LED光源 6 一次元固体撮像素子カメラ 6a 光軸 11 LED基板 12 LED Reference Signs List 1 pass line 2 steel strip 5 LED light source 6 one-dimensional solid-state imaging device camera 6a optical axis 11 LED substrate 12 LED

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 複数のLEDからの放射光が撮像手段に
集中するように、各LEDを、その放射光の指向性の放
射主軸を前記撮像手段にほぼ向けて配列し、これら複数
のLEDをバックライトとして板を照明して、その像を
前記撮像手段で撮像して前記板の形状を検出することを
特徴とする板形状の検出方法。
An LED is arranged such that radiation main axes of directivity of the emitted light are substantially directed to the image pickup means so that light emitted from the plurality of LEDs is concentrated on the image pickup means. A plate shape detection method, wherein a plate is illuminated as a backlight, and an image of the plate is taken by the imaging means to detect the shape of the plate.
【請求項2】 板の一方の側に撮像手段を配置し、他方
の側に複数のLEDを配置して、前記板を前記複数のL
EDにより照明し、その像を前記撮像手段で撮像して前
記板の形状を検出するようにした板形状の検出装置にお
いて、 前記各LEDを、その放射光の指向性の放射主軸が前記
撮像手段にほぼ向くように配置して、前記複数のLED
からの放射光を前記撮像手段に集中させるよう構成した
ことを特徴とする板形状の検出装置。
2. An image pickup means is arranged on one side of a plate, and a plurality of LEDs are arranged on the other side.
A plate-shaped detection device configured to illuminate with an ED and detect an image of the plate by detecting the shape of the plate by capturing the image with the imaging unit. The plurality of LEDs
A plate-shaped detection device, characterized in that light emitted from the device is concentrated on the imaging means.
【請求項3】 所定のパスラインに沿って搬送される板
を、前記パスラインの一方の側から、該パスラインと直
交する方向に延在して配置した複数のLEDにより照明
し、その像を前記パスラインの他方の側に配置した一次
元固体撮像素子を有する撮像手段で撮像して前記板の形
状を検出するようにした板形状の検出装置において、 前記複数のLEDを複数の群に分割して、それぞれLE
D基板上に設けると共に、各群のLED基板を、その法
線が前記撮像手段にほぼ向くように配置して、各群の複
数のLEDからの放射光が前記撮像手段に集中するよう
構成したことを特徴とする板形状の検出装置。
3. A plate conveyed along a predetermined pass line is illuminated from one side of the pass line by a plurality of LEDs arranged so as to extend in a direction perpendicular to the pass line. In a plate-shaped detection device configured to detect the shape of the plate by capturing an image with an imaging unit having a one-dimensional solid-state image sensor arranged on the other side of the pass line, the plurality of LEDs are divided into a plurality of groups. Divide and LE
In addition to being provided on the D board, the LED boards of each group were arranged so that the normal line thereof was substantially directed to the image pickup means, so that light emitted from the plurality of LEDs of each group was concentrated on the image pickup means. A plate shape detection device, characterized in that:
JP4537198A 1998-02-26 1998-02-26 Method and apparatus for detecting plate shape Pending JPH11241917A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4537198A JPH11241917A (en) 1998-02-26 1998-02-26 Method and apparatus for detecting plate shape

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4537198A JPH11241917A (en) 1998-02-26 1998-02-26 Method and apparatus for detecting plate shape

Publications (1)

Publication Number Publication Date
JPH11241917A true JPH11241917A (en) 1999-09-07

Family

ID=12717423

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4537198A Pending JPH11241917A (en) 1998-02-26 1998-02-26 Method and apparatus for detecting plate shape

Country Status (1)

Country Link
JP (1) JPH11241917A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014075350A1 (en) * 2012-11-15 2014-05-22 深圳市华星光电技术有限公司 Linewidth measurement device
JP2018028539A (en) * 2016-08-17 2018-02-22 オートニクス コーポレイション Reflective image detection sensor
CN113758420A (en) * 2021-09-08 2021-12-07 深圳市龙图光电有限公司 Mask plate auxiliary static image measuring device and mask plate static image measuring system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014075350A1 (en) * 2012-11-15 2014-05-22 深圳市华星光电技术有限公司 Linewidth measurement device
JP2018028539A (en) * 2016-08-17 2018-02-22 オートニクス コーポレイション Reflective image detection sensor
CN113758420A (en) * 2021-09-08 2021-12-07 深圳市龙图光电有限公司 Mask plate auxiliary static image measuring device and mask plate static image measuring system
CN113758420B (en) * 2021-09-08 2022-06-14 深圳市龙图光电有限公司 Mask plate auxiliary static image measuring device and mask plate static image measuring system

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