JPH1123885A - Optical transmission line forming method and device therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent the fracture of an optical transmission line in the bent part and the adhesive peeling in order to avoid the exertion of stress in the shearing direction on the optical transmission end by forming the optical transmission line using a forming material of optical transmission line in the fluidized state. SOLUTION: An optical transmission line forming material 20 having solidifying property in the fluidized state is supplied to a first optical transmission end 21 among optical transmission ends and the optical transmission line forming material 20 is connected. A line composed of the optical transmission line forming material 20, having solidifying property in the fluidized state and continuing to the optical transmission line forming material 20 connected to the first optical transmission end 21, is formed from the first optical transmission end 21 to a prescribed position near a second optical transmission end 22 among optical transmission ends. The line is cut on the prescribed position near the second optical transmission end 22. The optical transmission line forming material 20 having solidifying property in the fluidized state is supplied to the second optical transmission end 22, the end on the side of the second optical transmission end 22 of the line is made to be included in the optical transmission line forming material 20 and the line is connected to the second optical transmission end 22.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming an optical transmission line for forming an optical transmission line between optical transmission ends for transmitting light via the optical transmission line, and a forming apparatus used for the method.

[0002]

2. Description of the Related Art Conventionally, as a method for connecting electronic circuits, a method using electric wiring is known. However, in recent years, with the increase in circuit processing speed, delays and waveform distortions have occurred in electric wiring, and accurate signal transmission cannot be performed. Therefore, electric signals are replaced with light, and signals are transmitted by optical wiring. Interconnection technology has been devised. However, the optical interconnection technology requires several μm to align the optical axis for coupling the light emitting element and the light receiving element or the optical waveguide.
Since the following accuracy is required, there is a problem that mounting and assembling are difficult.

Further, as a method of connecting an optical waveguide to a light emitting element or the like, a non-contact type optical coupler has been proposed in which light is not directly coupled but propagated in space to indirectly connect. However, in order to reduce the coupling loss in such a non-contact type optical coupler, measures such as processing the end of the optical fiber facing the light emitting unit into a lens shape are taken. The process is more complicated. In the conventional optical connection between an optical fiber and a light receiving / light emitting element, the light receiving / light emitting surface is on the upper surface of the die, and it is necessary to couple light from above or light upward. Each time it is cut and polished, it is necessary to simultaneously control the rotation of the fiber about the optical axis and the three axes of XYθ for axis alignment, and the alignment cost occupies most of the mounting cost.

[0004] To solve this, Japanese Patent Laid-Open No. 1-269 is disclosed.
903 and JP-A-5-88028 propose a method of optically coupling an optical fiber by directly connecting an optical fiber to an element by a wire bonding method. However, in a conventional optical semiconductor device, an optical fiber is used to form an optical transmission path between an optical transmission end serving as a transmission end or a reception end of an optical signal. Several μ
Since the optical fiber is not flexible enough to freely perform wire bonding connecting between m and several mm in length, if the optical fiber is bent to perform wire bonding, the optical fiber is bent at the bent portion. It breaks and the connection is virtually impossible. Further, even if wire bonding can be performed without breaking, the shearing stress is always applied to the optical transmission end, that is, the joint between the light emitting element and the light receiving element or the optical waveguide, so that there is a high possibility that the adhesive peels off. However, there are also reliability problems.

SUMMARY OF THE INVENTION In view of the above circumstances, an object of the present invention is to provide an optical transmission line forming method capable of preventing breakage at a bent portion and adhesion peeling at a joint portion.

[0006]

As a means for achieving the above object, a solidifying optical transmission path forming material in a flowing state is supplied by using a nozzle, and the nozzle is supplied from one optical transmission end to the other optical transmission path. By moving to the end, an optical transmission path is formed between the optical transmission ends, and a method of forming an optical transmission path for optically connecting the optical transmission end to the optical transmission path can be considered.
According to this method, a precise positioning step can be omitted, and the mounting cost can be greatly reduced. Further, reliability problems such as breakage at a bent portion and debonding caused by a shear stress being constantly applied to a joint portion, which are caused by using an off-the-shelf optical fiber having low flexibility, can be solved.

However, when an optical transmission line is formed by the above-described forming method, the first optical transmission end, which is the one of the optical transmission ends from which the formation of the optical transmission line is started, and the optical transmission line formation. When making an optical connection with a material, move the nozzle position to the optimal position for the optical connection, make the optical connection, and then form a line with the optical transmission line forming material in the optimal direction for the optical transmission. However, sufficient optical connection characteristics can be realized, but after moving the nozzle to form a line of the optical transmission line forming material, the line and the optical transmission end of the optical transmission end are formed. When making an optical connection with the second optical transmission end, which is the optical transmission end to be formed, the position of the nozzle is maintained in order to maintain the shape of the line formed in the optimal direction and position for optical transmission. Is optimal for optical connections It is difficult to move the nozzle to the location. For this reason, it is difficult to obtain characteristics equivalent to the optical connection characteristics (optical coupling efficiency) at the first optical transmission end at the second optical transmission end.

Therefore, an optical transmission line forming method according to the present invention is an optical transmission line forming method for forming an optical transmission line between optical transmission ends connected by an optical transmission line and performing optical transmission via the optical transmission line. And supplying a solidifying light transmission path forming material in a flowing state to the first light transmission end of the light transmission end and connecting the light transmission path forming material to the first light transmission end. A first connecting step, and an optical transmission path forming material connected to the first optical transmission end from the first optical transmission end to a predetermined position near the second optical transmission end of the optical transmission ends. Forming a line made of a solidifying optical transmission path forming material in a flowing state, and cutting the line formed in the line forming step at a predetermined position near the second optical transmission end. Process, and a solidifying optical transmission path forming material in a flowing state at the second optical transmission end. The second line is formed in the cutting step, and the end of the line formed on the side of the second optical transmission end is included in the optical transmission line forming material supplied to the second optical transmission end, so that the line is formed into the second line. And a second connection step of connecting to the optical transmission end.

In the present invention, "fluid state" means
This refers to a state in which the optical transmission path forming material has fluidity before solidification. In this flowing state, the material to be heated (the optical transmission path forming material in this case) is softened by heating, that is, the material is softened by heating. Both the state in which the heating material has fluidity and the state in which the heating material has fluidity, that is, the state in which the solute (here, the material for forming the optical transmission path) is dissolved in a solvent, thereby giving the solute fluidity are included.

Further, the optical transmission line forming apparatus of the present invention is provided between the optical transmission ends of the optical transmission line forming bodies which are connected by the optical transmission line and have an optical transmission end for performing the optical transmission through the optical transmission line. In the optical transmission path forming apparatus for forming an optical transmission path, a nozzle for injecting a solidifying optical transmission path forming material in a flowing state, and the nozzle in a three-dimensional direction relative to the optical transmission path forming body. Moving means for moving, the optical transmission path forming material in a flowing state, from the nozzle, an injection means for injecting freely, and a cutting means for cutting the optical transmission path forming material ejected from the nozzle, By controlling the moving means, the emitting means and the cutting means, the nozzle is moved to the position of the first light transmitting end of the light transmitting end, and the light flowing from the nozzle to the first light transmitting end is in a flowing state. Supply the transmission path forming material An optical transmission path forming material is connected to the first optical transmission end, and the nozzle is moved from the first optical transmission end to a predetermined position near the second optical transmission end to be connected to the first optical transmission end. A line made of an optical transmission path forming material in a flowing state continuous with the formed optical transmission path forming material, and cutting the line at a predetermined position near a second optical transmission end by cutting means; The nozzle is moved to the position of the second optical transmission end, and the nozzle is supplied with the optical transmission path forming material in a flowing state to the second optical transmission end, and the optical transmission path forming material supplied to the second optical transmission end is supplied. And a control means for connecting the line to the second optical transmission end by including an end on the second optical transmission end side of the line therein.

[0011]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view showing a main part of an optical interconnection common to each embodiment described below of the present invention. An optical / electronic integrated circuit 2 having a light emitting / receiving element, an electronic circuit, and an optical waveguide 3a formed on a Si wafer, a GaAs wafer, or the like is mounted on a substrate 1 such as glass or LiNbO ₃ . The optical waveguide 3a is formed on a Si wafer, a GaAs wafer, or the like by CVD.
And sputtering to form an oxide film or nitride film such as SiO ₂ or Si ₃ N ₄ , ion implantation, or AlGaAs epitaxial growth by an electron beam, and etching are repeated. You. The substrate 1 has an optical waveguide 3b for transmitting a signal from the optical output terminal of the optical / electronic integrated circuit 2 to the optical input terminal of another optical / electronic integrated circuit. Optical waveguide 3
b is formed by ion exchange of Cs ⁺ , Rb ⁺ , Li ⁺ , Ag ⁺ or the like into glass or the like, or LiNbO
It is formed by ion diffusion of V, Ni, Cu, Ti, etc. to ₃ or the like. The optical waveguide 3b and the optical waveguide 3a are
A transmission path forming material in a flowing state is connected between the optical waveguide 3b and the optical waveguide 3a, and is optically coupled by an optical transmission path 4 formed by solidifying the connected optical transmission path forming material. Each electrical connection terminal is electrically connected by a metal wire 5 by a conventional wire bonding method using a gold wire or the like.

FIG. 2 is a schematic diagram showing an embodiment of the optical transmission line forming apparatus according to the present invention. The optical transmission path forming apparatus 10 includes a capillary (an example of a nozzle according to the present invention) 12 for ejecting a material for forming an optical transmission circuit in a flowing state, and an image signal obtained by photographing a portion forming the optical transmission path. A camera 10a, a capillary drive unit 10b for driving the capillary 12, and a drive control unit 10c for controlling the capillary drive unit 10b are provided. In addition, the optical transmission line forming apparatus 10 is provided with a substrate mounting table 6, on which the substrate 1 on which the optoelectronic integrated circuit 2 shown in FIG. 1 is mounted is mounted. In addition, an optical transmission path forming material transfer unit and the like for supplying the optical transmission path forming material to the capillary 12 are provided on the upper portion of the capillary 12, but are not shown in FIG. This will be described below.

FIG. 3 is a schematic structural view of an optical transmission path forming material transfer section above the capillary, which is not shown in FIG. A tank 11 is provided above the capillary 12, and the tank 11 and the capillary 12 are connected by a transfer pipe 13 for transferring an optical transmission path forming material 20. Further, in the middle of the transfer pipe 13, there is provided a transfer amount control unit 14, which is an injection means according to the present invention, for controlling an amount of transferring the optical transmission path forming material 20 to the capillary 12. In addition, the direction of the discharge port 12a of the capillary 12 is rotatable from the direction shown in the figure to the direction perpendicular to the direction, but illustration of the mechanism is omitted. The direction of the discharge port 12a is controlled by a command from the drive control unit 10c shown in FIG. Further, the capillary 12 is provided with a circuit breaker (an example of a cutting means according to the present invention) for blocking the optical transmission path forming material 20, but is not shown in FIG. 3 and will be described below.

FIG. 4 is a schematic diagram showing the circuit breaker omitted in FIG. The circuit breaker 12b is a so-called shutter, and has a position between a position where the discharge port 12a is closed to block the optical transmission path forming material 20 and a position along the side surface of the capillary 12 according to a command from the drive control unit 10c shown in FIG. Move between. FIG. 5 is a schematic sectional view of the transfer amount control unit 14 shown in FIG.

A ball screw-shaped screw 14a is provided inside the transfer amount control unit 14, and a motor 15 is connected to a rotating shaft of the screw 14a.
The rotation of the motor 15 is controlled by a command from a drive control unit 10c shown in FIG.
The transfer amount of the optical transmission path forming material 20 to the capillary 12 by 4 is determined in accordance with the rotation of the motor 15.

Returning to FIG. 3, the description will be continued. The upper part of the tank 11 is openably and closedly sealed, and the upper part thereof is provided with a pressurizing pipe 16 for feeding air or a predetermined gas for pressurizing the inside of the tank 11 and a valve 16a for conducting and shutting off the pressurizing pipe 16. Is provided. Similarly, a vacuum pipe 17 for depressurizing the inside of the tank 11 and a valve 17a thereof are provided above the tank 11.

In the following, details of the first connecting step, the line forming step, the cutting step, and the second connecting step in the optical transmission line forming method of the present invention using the optical transmission line forming apparatus described above will be described. Next, specific embodiments will be described. (First Connection Step) In the first connection step, light input / output performance at the optical transmission end is important. That is, at the connection between the optical transmission path forming material and the optical transmission end, the matching between the optical transmission path forming material and the optical waveguide, the light emitting element, or the light receiving element, which is the optical transmission end, is achieved, and the connection at the connection part It is necessary to make connections so as to avoid a decrease in light transmission due to scattering or refraction of incoming and outgoing light.

As for the positioning of the connection portion, the capillary 12 shown in FIG. 2 is moved to a pre-stored joint portion, and the positioning portion provided on the substrate 1 shown in FIG. This can be done by correcting the position with the mark. Also,
In order to improve the matching at the connection portion, the material must not be excessively quenched when the optical transmission line forming material is connected to the optical transmission end. If the material is rapidly quenched excessively, only the leading end of the optical transmission path forming material solidifies and bubbles are formed at the connection portion, which may scatter incoming and outgoing light.

Therefore, it is preferable that the optical transmission end is pre-heated. In order to heat the light transmission end, a heater built in the substrate mounting table 6 shown in FIG. 2 is used. In addition, it is possible to heat the atmosphere around the connection part. In this case, the entire substrate 1 is uniformly heated, so that damage to the connected optical circuit is reduced and the capillary 12 is heated. The material for forming the optical transmission path supplied from the optical system is not quenched, so that clogging of the material in the capillary 12 can be prevented.
The solidification of the optical transmission path forming material at the tip of the capillary 12 can be prevented during the movement of the capillary 12 before the connection step starts.

When the temperature of the capillary 12 itself is raised when the atmosphere is not heated, the solidification of the tip of the capillary can be prevented. However, since the temperature of the material itself rises, the solidification is delayed and the material is exposed to air. There is a risk that the solidification rate will change significantly between the surface and the interior. Therefore, care should be taken not to cause unintended variations in the refractive index distribution and other optical transmission characteristics. (Line formation step) In the line formation step, instead of aligning the end of a ready-made optical fiber whose light transmission property is guaranteed with the light transmission end, a line is formed by an optical transmission path forming material before solidification. In order to survive, it must be ensured that the formed and solidified line actually functions as an optical transmission line. In other words, it is necessary to form a line so that light incident on the line from the optical transmission end repeatedly reflects in the line and emits light to the other optical transmission end without fail. The shape must be determined so that the light transmission is not impaired.

Therefore, the first optical transmission end is an optical transmission end, such as a light emitting portion, on which light is incident on the optical transmission line. In the case where a line is formed from the light emitting portion side, First, the capillary 12 shown in FIG. 2 is moved so that a line is formed along the traveling direction of light at the first optical transmission end. By doing so, light incident on the optical transmission line is surely guided into the line.

Next, the line is formed toward the second optical transmission end. At this time, the curvature of the line and the line are formed according to the shape of the second optical transmission end and the connection object. The final position needs to be adjusted. Even if the second optical transmission end is a light receiving element having a wide directivity in the light detecting direction, a light receiving element having a narrow directivity in the light detecting direction, or a light guide formed in advance on the substrate. Even in the wave path,
It is easy to form the second optical transmission end in advance so as to obtain the maximum optical sensitivity in the direction from above perpendicular to the surface on which the second optical transmission end is formed. In the following embodiments, a second optical transmission end formed in advance so as to obtain the maximum light sensitivity in the direction from above vertically is used.
In this case, the line is formed up to about 3 mm immediately above the second optical transmission end. (Cutting step) The supply of the optical transmission line forming material is stopped while the vicinity of the capillary 12 of the line formed up to about 3 mm just above the second optical transmission end is kept in a flowing state, and the cutoff provided in the capillary 12 is stopped. The line is cut near the capillary 12 by moving the container 12b to a position that closes the discharge port 12a, and the line and the capillary 12 are separated. (Second Connection Step) The direction of the discharge port 12a of the capillary 12 shown in FIG. 2 is made parallel to the substrate 1, and the same connection part positioning as in the first connection step is performed. At this time, the capillary 12 stands still while being inserted between the end of the line and the second optical transmission end formed in the cutting step. Thereafter, a dome-shaped optical transmission end connection portion is formed by supplying the solidifying optical transmission path forming material in a flowing state onto the second optical transmission end.

It is preferable that the second optical transmission end is heated in advance in order to maintain the flow state of the dome-shaped optical transmission end connection portion. In order to heat the optical transmission end, the substrate mounting table 6 shown in FIG. 2 is heated by a heater or the atmosphere around the optical transmission end connection is heated. When the atmosphere around the optical transmission end connection is heated, the entire substrate 1 is uniformly heated, so that damage to the connected optical circuit is reduced.

The end on the second optical transmission end side of the line formed to the vicinity of the second optical transmission end through the line forming step and the cutting step is connected to the optical transmission end formed on the second optical transmission end. The line and the optical transmission end connection are integrated into the connection.
As a method to include the end of the line in the optical transmission end connection part,
There are a method of pushing the end of the line into the optical transmission end connection portion, a method of continuing to supply the optical transmission line forming material to the optical transmission end connection portion, and increasing the size to reach the end of the line. At this time, it is necessary to minimize the inclusion of bubbles and the like that cause optical coupling loss at the second optical transmission end. Further, in the case of pushing the end of the line into the optical transmission end connection portion, the distance at which the end of the line is pushed is suppressed to several hundred μm or less by setting the optical transmission end connection portion to a height of about 2 mm or more. By sufficiently reducing the stress applied to the line, breakage of the line can be prevented.

Thereafter, all the above-mentioned heat treatments for maintaining the flow state of the optical transmission end connection formed on the second optical transmission end are stopped, and the optical transmission end connection is solidified. The optical connection at the second optical transmission end is completed. According to the present invention including the steps described above, after the optical transmission end connection material is formed in advance on the second optical transmission end, the optical transmission end connection material is arched from the first optical transmission end. Since the connection is made so as to include the end of the formed line, it is possible to obtain the same optical connection characteristics (optical coupling efficiency) as the first optical transmission end even at the second optical transmission end.

The method of forming an optical transmission line according to the present invention promotes the solidification of the optical transmission line forming material supplied to the second optical transmission end in the second connecting step, in addition to the above steps. A coagulation accelerating step may be provided, or a light-blocking step of covering the light transmission path with a light-blocking material that blocks external light may be provided. In the above description, the case where the optical transmission end connection portion is formed of the same material as the optical transmission line forming material used to form the line has been described, but the optical transmission end connection portion is formed in order to form the line. It may be formed using an optical material or an optical adhesive different from the optical transmission path forming material used.

An embodiment according to the basic concept described above will be described below. 6 to 13 are process diagrams showing a process of forming an optical transmission line in the first embodiment of the optical transmission line forming method of the present invention. Hereinafter, a first embodiment of the present invention will be described with reference to FIGS.

Polyarylate as an optical transmission path forming material 20 is placed in a tank 11 having a heater for temperature control shown in FIG. 3, and heated to a temperature at which the polyarylate sufficiently melts to have a desired viscosity, for example, 300 ° C. I do. Thereafter, the valve 17a is opened, and the air caught in the optical transmission path forming material 20 is released. Next, the valve 17
After closing the valve a, the valve 16a is opened and the tank 11 is opened.
The inside is pressurized, and the motor 15 is further rotated to rotate the screw 14 a (see FIG. 5) inside the transfer amount control unit 14 to the side that supplies the optical transmission path forming material 20 to the capillary 12. Then, the optical transmission path forming material 20 having fluidity is formed.
Is pushed out of the tank 11 toward the capillary 12.

The capillary 12 is moved to a position immediately above the first optical transmission end 21 which is a light emitting element, and an optical transmission path heated to 270 ° C. to 300 ° C. is formed immediately above the first optical transmission end 21. The material 20 is extruded from the capillary 12 (FIG. 6). The capillary 12 is lowered in a state where the light transmission path forming material 20 is partially pushed out of the capillary 12, and the tip of the light transmission path forming material 20 is pressed against the first light transmission end 21 (FIG. 7).

Thereafter, by continuously applying pressure to the light transmission path forming material 20, the capillary 12 is slowly raised while extruding the light transmission path forming material 20. Capillary 1
2 is heated to the tip, and the optical transmission path forming material 20
Is in a molten state at the tip of the capillary 12. In order to control the shape of the optical transmission line, the viscosity of the optical transmission line forming material 20 is desirably adjusted to about 10 ² to 10 ⁵ poise.

In the above-described connecting step to the first optical transmission end, the optical transmission path forming material 20 comes into contact with the first optical transmission end heated to 150 to 175 ° C. as soon as it comes out of the capillary 12. Then, by this contact, it is cooled and bonded at the same time. Thereafter, the optical transmission path forming material 20 ejected from the capillary 12 according to the moving speed of the capillary 12
Is cooled at the same time as the injection by the atmosphere air of 175 ° C. or less, and solidified or increased in viscosity to form a line.

Therefore, if the coordinates between two points to be connected are input to the drive control unit 10c shown in FIG. 2, the same loop control (shape) as that used in a conventional wire bonder using a gold wire is used. Control)
Is possible. However, while the conventional loop control performed by a wire bonder using a gold wire is trying to keep the vertex of the loop low, here, it is necessary to control the shape of the loop so that it draws a curve as smooth as possible No.

The capillary 12 draws the above-mentioned trajectory. At this time, the drive control shown in FIG. 2 is performed so that the discharge port 12a of the capillary 12 faces the direction of the optical transmission path forming material 20 in synchronization with this. It is controlled by the unit 10c (FIG. 8). After the capillary 12 has moved to about 3 mm immediately above the second optical transmission end 22 on the substrate 1 side (FIG. 9), the pressurization control on the optical transmission path forming material 20 is stopped, and the screw 14a is reversely rotated momentarily. Immediately thereafter, the optical transmission path forming material 20 is cut by the circuit breaker 12b provided in the capillary 12 to separate the optical transmission path from the capillary 12 (FIG. 10).

Next, while the capillary 12 is kept still, the polyarylate heated to 270 ° C. to 300 ° C. is extruded and supplied onto the second optical transmission end 22.
A dome-shaped optical transmission end connecting portion 23 is formed.
1). Here, it is preferable that the second light transmission end 22 be heated in advance in order to maintain the flow state of the dome-shaped light transmission end connection part 23. Optical transmission end 22 at 200 to 230 ° C
The substrate mounting table 6 of the apparatus 10 shown in FIG.
Use the built-in heater.

Next, the end of the optical transmission path forming material 20 cut at a position of about 3 mm immediately above the second optical transmission end 22 is pushed in the direction of the second optical transmission end 22 to thereby form the dome-shaped portion. It is included in the optical transmission end connection part 23 in a flowing state (FIG. 12). As described above, by continuing to supply the polyarylate to the optical transmission end connection part 23, the optical transmission end connection part 23 may be enlarged to include the end of the optical transmission path forming material 20.

Thereafter, the second optical transmission end 22 is connected to 200 to 2
The heater that has been heated and held at 30 ° C. is turned off, and the optical transmission end connecting portion 23 in a dome-shaped flowing state is solidified, whereby the second optical transmission end 22 and the optical transmission path forming material 20 are optically connected. The optical transmission path 40 is formed by the above steps (FIG. 13). Although the manufacturing method is omitted, when forming a two-layered optical transmission line including a core and a clad as the optical transmission line, the line forming step includes the first solidifying first step in a flowing state for forming the core. Forming a line with a double-structured optical transmission path forming material in a state in which the material is surrounded by a solidifying second material that forms a clad in a fluid state. After forming the line with the solidifying first material in a flowing state, a step of forming a clad so as to cover the first material may be performed. As the clad material, for example, a silicone resin can be used. However, the material is not limited to the silicone resin, and any material having a lower refractive index than the core material can be used.

In the above-described embodiment, the case where polyarylate is used as the light transmission path forming material 20 has been described, but the light transmission path forming material 20 may be made of light transmitting material such as polymethyl methacrylate, polycarbonate, polyether sulfone, amorphous polyolefin or the like. Any material may be used as long as it has properties, and a polyester solution such as polyethylene terephthalate dissolved in dichloromethane and adjusted to a desired viscosity may be used. Further, not only organic polymer materials but also inorganic materials such as glass can be manufactured.

Hereinafter, a second embodiment of the optical transmission line forming method of the present invention will be described. In the second embodiment, only points different from the first embodiment will be described, and a duplicate description of the same points will be omitted. In the first embodiment, the material of the optical transmission line end connecting portion 23 formed on the second optical transmission end 22 is formed from the first optical transmission end 21 to the vicinity of the second optical transmission end 22. An example is shown in which the transmission line is formed of polyarylate, which is the same material as the transmission line.
In the embodiment, an optical adhesive whose refractive index is adjusted so as to have a refractive index equivalent to the refractive index of the optical transmission path is used.

In this case, the dome-shaped light transmission end connection portion 23 is formed of a flowing optical adhesive having the same refractive index adjustment as that of the light transmission line, and the light transmission end connection portion 23 is formed on the light transmission end connection portion 23. Is encapsulated by a polymerization reaction, an addition reaction or a condensation reaction. Alternatively, heat energy or light energy may be applied to promote the coagulation reaction.

FIG. 14 shows an optical MCM (multi-chip module) manufactured by using the optical transmission line forming method of the present invention. The optical MCM 30 includes a CPU (Central Processing Unit) 33 and a memory 3
4. It is composed of a semiconductor laser array 35, a photodiode array 37, a semiconductor laser driving IC 36 and a photodiode driving IC 38, and transmits and receives signals to and from another optical MCM or optical IC via the optical waveguide 32.

Here, between the semiconductor laser array 35 and the photodiode array 37 and the optical waveguide 32,
Optical transmission path 3 formed by the optical transmission path forming method of the present invention
The optical signal is converted into an optical signal by a semiconductor laser, enters the optical waveguide 32 via the optical transmission line 31, and is transmitted to another optical MCM or optical IC. Also,
An optical signal from another optical MCM or an optical IC enters the photodiode array 37 from the optical waveguide via the optical transmission line 31 and is converted into an electric signal again. Further, by using a plurality of optical MCMs 30 and performing optical parallel processing, the optical MCM 30 can be used as a high-speed image processing apparatus.

[0042]

According to the present invention, since the optical transmission path is formed by the optical transmission path forming material in a flowing state, the optical transmission path does not break at the bent portion, and the optical transmission path is not sheared with the optical transmission end. Since no stress is applied, adhesion and peeling can be prevented.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a main part of a common optical interconnection of each embodiment.

FIG. 2 is a schematic configuration diagram of an optical transmission line forming apparatus.

FIG. 3 is a schematic configuration diagram of an optical transmission path forming material transfer unit.

FIG. 4 is a schematic diagram showing a blocking unit.

FIG. 5 is a schematic sectional view of a transfer amount control unit.

FIG. 6 is a process chart showing a first step of forming an optical transmission line of the present invention.

FIG. 7 is a process chart showing a second step of forming the optical transmission line of the present invention.

FIG. 8 is a process chart showing a third step of forming the optical transmission line of the present invention.

FIG. 9 is a process chart showing a fourth step of forming the optical transmission line of the present invention.

FIG. 10 is a process chart showing a fifth step of forming the optical transmission line of the present invention.

FIG. 11 is a process chart showing a sixth step of forming the optical transmission line of the present invention.

FIG. 12 is a process chart showing a seventh step of forming the optical transmission line of the present invention.

FIG. 13 is a process chart showing an eighth step of forming the optical transmission line of the present invention.

FIG. 14 is a diagram showing a signal processing device using an optical transmission line formed by the optical transmission line forming method of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Substrate 2 Optical / electronic integrated circuit 3a, 3b Optical waveguide 4, 40 Optical transmission path 6 Substrate mounting table 10 Optical transmission path forming apparatus 10a Camera 10b Capillary drive unit 10c Drive control unit 11 Tank 12 Capillary 12a Discharge port 12b Circuit breaker 13 Transfer tube 14 transfer amount control unit 20 transmission line forming material 21 first optical transmission end 22 second optical transmission end 23 optical transmission end connection

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Tsutomu Hamada 430 Nakaicho, Nakai-machi, Ashigarakami-gun, Kanagawa Prefecture Inside Fuji Xerox Fuji Xerox Co., Ltd. Inside the company (72) Inventor Shinya Kyozuka 430 Nakai-cho, Nakai-cho, Ashigarashimo-gun, Kanagawa Prefecture Inside Green Tech Nakamura Fuji Xerox Co., Ltd. Person Takashi Ozawa 430 Nakaicho, Ashigara-gun, Kanagawa Prefecture Green Tech Inside Fuji Xerox Co., Ltd.

Claims (5)

[Claims] 1. An optical transmission line forming method for forming an optical transmission line between optical transmission ends connected by an optical transmission line and performing optical transmission via the optical transmission line, comprising: A first connecting step of supplying a solidifying light transmission path forming material in a flowing state to the first light transmission end and connecting the light transmission path forming material to the first light transmission end; From the first optical transmission end to a predetermined position in the vicinity of the second optical transmission end of the optical transmission ends, the fluid transmission state is continuous with the optical transmission path forming material connected to the first optical transmission end. A line forming step of forming a line by using a solidifying optical transmission path forming material; a cutting step of cutting the line formed in the line forming step at a predetermined position near the second optical transmission end; And supplying the solidifying light transmission path forming material in a flowing state to the light transmission end of No. 2. The ends of the optical transmission terminal side of the second formed the line in the cutting step second
A second connection step of connecting the line to the second optical transmission end by enclosing the line in the optical transmission line forming material supplied to the optical transmission end of the optical transmission line. Forming method. 2. The light according to claim 1, further comprising a coagulation accelerating step of accelerating coagulation of the optical transmission path forming material supplied to the second optical transmission end in the second connection step. Transmission path forming method. 3. An optical transmission line forming method for forming an optical transmission line having a two-layer structure including a core and a clad as the optical transmission line, wherein the line forming step includes forming a core in a flowing state. Forming a line made of a two-layer optical transmission path forming material in a state in which a solidifying first material is surrounded by a solidifying second material forming a clad in a flowing state. The method for forming an optical transmission line according to claim 1, wherein: 4. The optical transmission line forming method according to claim 1, further comprising a light shielding step of covering said optical transmission path with a light shielding material for shielding external light. 5. An optical transmission line formed between optical transmission ends of optical transmission line forming bodies having optical transmission ends connected by an optical transmission line and performing optical transmission through the optical transmission line. In the path forming apparatus, a nozzle for injecting a solidifying light transmission path forming material in a flowing state, moving means for moving the nozzle in a three-dimensional direction relative to the light transmission path forming body, and a flowing state An injection means for injecting and stopping the light transmission path forming material from the nozzle, a cutting means for cutting the light transmission path forming material injected from the nozzle, the moving means, and the injection Controlling the cutting means and the cutting means to move the nozzle to the position of the first light transmitting end of the light transmitting end, and the light transmitting state flowing from the nozzle to the first light transmitting end. Supplying the road forming material To connect the optical transmission path forming material 1 of the optical transmission terminal,
The nozzle is moved from the first optical transmission end to a predetermined position in the vicinity of the second optical transmission end so as to be in a flow state continuous with the optical transmission path forming material connected to the first optical transmission end. A line is formed by a certain optical transmission path forming material, the line is cut by the cutting means at a predetermined position near the second optical transmission end, and the nozzle is moved to the position of the second optical transmission end. And supplying the flowing optical transmission path forming material from the nozzle to the second optical transmission end.
Control means for connecting the line to the second optical transmission end by enclosing the end of the line on the second optical transmission end side in the optical transmission line forming material supplied to the optical transmission end. An optical transmission line forming apparatus, comprising: