JPH11231333A - Liquid crystal injection device and manufacture of liquid crystal display device using same - Google Patents

Liquid crystal injection device and manufacture of liquid crystal display device using same

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Publication number
JPH11231333A
JPH11231333A JP3714898A JP3714898A JPH11231333A JP H11231333 A JPH11231333 A JP H11231333A JP 3714898 A JP3714898 A JP 3714898A JP 3714898 A JP3714898 A JP 3714898A JP H11231333 A JPH11231333 A JP H11231333A
Authority
JP
Japan
Prior art keywords
liquid crystal
panel
crystal injection
chamber
cassette
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3714898A
Other languages
Japanese (ja)
Inventor
Naoto Yokoyama
直人 横山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP3714898A priority Critical patent/JPH11231333A/en
Publication of JPH11231333A publication Critical patent/JPH11231333A/en
Pending legal-status Critical Current

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  • Liquid Crystal (AREA)

Abstract

PROBLEM TO BE SOLVED: To shorten the time required to inject a liquid crystalline material by providing a conveying mechanism part which takes a panel formed by sticking two substrates together by a substrate sticking jig housed in a load lock part from the jig and conveys it to a chamber for liquid crystal injection. SOLUTION: The liquid crystal injection device 1 consists of a load lock part 2, a robot 5, a cassette inverting mechanism 6, the chamber 7 for liquid crystal injection, and a cassette conveying mechanism 8. The cassette conveying mechanism 8 carries a panel 1 together with the substrate sticking jig 3, used to stick substrates in the preceding process, in the load lock part 2 while the jig 3 is set on the panel and the pressure at the time of sticking the substrates is maintained. Then evacuation is carried out by opening the discharge valve of the valve 9 of the load lock part 2, but a vacuum is already produced in the panel 10, so that only the load lock part 2 is evacuated. In this evacuating operation, neither the cracking of the panel 10 nor the peeling of a seal material is caused, so that the operation is completed speedily.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、液晶表示装置を製
造するときに対向する2枚の電極基板を貼り合せたパネ
ルに液晶を注入する液晶注入装置及びその液晶注入装置
を用いた液晶表示装置の製造方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal injection device for injecting liquid crystal into a panel in which two opposing electrode substrates are bonded when manufacturing a liquid crystal display device, and a liquid crystal display device using the liquid crystal injection device. And a method for producing the same.

【0002】[0002]

【従来の技術】液晶表示装置の貼り合せ及び液晶の注入
は、例えば次に示すような方法で行われていた。
2. Description of the Related Art The bonding of a liquid crystal display device and the injection of liquid crystal have been carried out, for example, by the following methods.

【0003】まず、液晶を駆動するための電極を備えた
一対のガラス基板のうちの一方に熱硬化型のシール材を
塗布し、他方に一対の基板間隔を均一にするためのスペ
ーサを散布した後、両基板を位置合せする。次に、位置
合せした一対の基板を冶具に挟み込み、基板間を排気す
ることで基板は大気圧により均等に加圧される。この状
態を維持したまま冶具ごとオーブンに入れて加熱するこ
とで、大気圧により基板の間隔がスペーサで均一になる
ようにプレスされた状態でシール材が硬化されて2枚の
基板が貼り合される。
First, a thermosetting sealing material is applied to one of a pair of glass substrates provided with electrodes for driving a liquid crystal, and a spacer is sprayed on the other to make the distance between the pair of substrates uniform. Thereafter, the two substrates are aligned. Next, the pair of aligned substrates is sandwiched between jigs, and the space between the substrates is evacuated, whereby the substrates are uniformly pressed by the atmospheric pressure. By holding the jig together in an oven and heating while maintaining this state, the sealing material is hardened in a state where the substrate is pressed by the atmospheric pressure so that the distance between the substrates becomes uniform with the spacer, and the two substrates are bonded together. You.

【0004】次に、貼り合せた一対の基板(以下パネル
と称す)を液晶注入用のチャンバ内に入れ、該チャンバ
内を排気にすることによってパネル内を真空状態にした
後、パネルを構成する2枚の基板間に形成された液晶注
入口部を液晶材料に浸ける。
[0004] Next, a pair of substrates (hereinafter referred to as a panel) which are bonded to each other are put into a chamber for injecting liquid crystal, and the inside of the chamber is evacuated to evacuate the panel to form a panel. A liquid crystal injection port formed between two substrates is immersed in a liquid crystal material.

【0005】そして、チャンバ内をリークして大気圧に
戻すことで、パネル内とチャンバ内の気圧差を利用して
液晶材料を注入して行く。液晶注入が完了した後、液晶
注入口に紫外線硬化型の封止材料を塗布後紫外線を照射
して注入口を封止することで液晶表示パネルが出来上が
る。
[0005] Then, by leaking the inside of the chamber to return to the atmospheric pressure, the liquid crystal material is injected by utilizing the pressure difference between the panel and the chamber. After the injection of the liquid crystal is completed, an ultraviolet-curable sealing material is applied to the liquid crystal injection port, and then the liquid crystal display panel is completed by irradiating ultraviolet rays to seal the injection port.

【0006】次に、液晶注入工程を図6に従って説明す
る。まず図6(a)に示すように、パネル106を液晶
注入用のチャンバ101内に入れ、排気用バルブ102
を開いて該チャンバ101内を徐々に排気して真空状態
にして行く。こうすることで、貼り合せた基板間を真空
にすることができる。チャンバ101内の排気が終った
後、図6(b)に示すように、パネル106の側面部に
形成された液晶注入口108を液晶材料105の入った
液晶皿104に浸ける。そして、リーク用バルブ103
を開いてチャンバ101内を徐々にリークしてチャンバ
101内の圧力を上げて行く。このとき、パネル106
内部は真空状態であるため、チャンバ101内との圧力
差が生じ、図6(c)に示すようにパネル106内部に
液晶材料105が注入されて行く。
Next, the liquid crystal injection step will be described with reference to FIG. First, as shown in FIG. 6A, the panel 106 is placed in the chamber 101 for injecting liquid crystal, and the exhaust valve 102 is provided.
Is opened, and the inside of the chamber 101 is gradually evacuated to a vacuum state. In this manner, a vacuum can be created between the bonded substrates. After the evacuation of the chamber 101 is completed, the liquid crystal injection port 108 formed on the side surface of the panel 106 is immersed in the liquid crystal dish 104 containing the liquid crystal material 105 as shown in FIG. And the leak valve 103
Is opened to gradually leak inside the chamber 101 to increase the pressure inside the chamber 101. At this time, the panel 106
Since the inside is in a vacuum state, a pressure difference is generated between the inside of the chamber 101 and the liquid crystal material 105 is injected into the panel 106 as shown in FIG.

【0007】[0007]

【発明が解決しようとする課題】しかしながら、上記従
来の液晶注入方法では、液晶表示装置の大型化に伴い、
液晶材料の注入工程に大変時間がかかるという問題があ
った。これは、パネルの基板間隔が5μm程度と狭いた
めに、パネル106内部の排気を行うときに、チャンバ
101内の排気をゆっくりと行わなければならないこと
による。パネル106内を真空状態にする場合にチャン
バ101内の排気を速く行うと、パネル106の排気が
チャンバ101内の排気に追いつかず、パネル106内
の圧力とチャンバ101内の圧力とに差が生じてパネル
106内の圧力の方が高くなるために、基板が膨らんで
シール材が剥がれたり、基板が割れたりする恐れがあっ
た。
However, in the above-described conventional liquid crystal injection method, the size of the liquid crystal display device is increased,
There is a problem that it takes a very long time to inject the liquid crystal material. This is because when the inside of the panel 106 is evacuated, the inside of the chamber 101 must be slowly evacuated because the substrate interval between the panels is as small as about 5 μm. If the inside of the chamber 106 is evacuated quickly when the inside of the panel 106 is evacuated, the exhaust of the panel 106 cannot catch up with the inside of the chamber 101, and a difference occurs between the pressure in the panel 106 and the pressure in the chamber 101. As a result, the pressure inside the panel 106 becomes higher, so that the substrate may swell and the sealing material may be peeled off, or the substrate may be broken.

【0008】本発明は、このような従来技術の欠点を解
決するためになされたものであり、液晶材料の注入工程
に要する時間を短縮した液晶注入装置及びその液晶注入
装置を用いた液晶表示装置の製造方法を提供することを
目的とする。
SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned drawbacks of the prior art, and a liquid crystal injection device in which the time required for a liquid crystal material injection step is reduced, and a liquid crystal display device using the liquid crystal injection device. It is an object of the present invention to provide a method for producing the same.

【0009】[0009]

【課題を解決するための手段】本発明は、液晶注入装置
において、少なくとも、基板貼り合せ冶具を収容するロ
ードロック部と、液晶注入用チャンバ部と、前記ロード
ロック部に収容された基板貼り合せ冶具から2枚の基板
を貼り合せた後のパネルを取り出して前記液晶注入用チ
ャンバに搬送する搬送機構部とを備えたことを特徴とす
る。
According to the present invention, in a liquid crystal injection device, at least a load lock portion accommodating a substrate bonding jig, a liquid crystal injection chamber portion, and a substrate bonded in the load lock portion. And a transfer mechanism for taking out the panel after bonding the two substrates from the jig and transferring the panel to the liquid crystal injection chamber.

【0010】また、本発明は、前記ロードロック部と、
前記液晶注入用チャンバ部と、前記搬送機構部とが、夫
々独立に制御可能な排気機構を有することを特徴とす
る。
[0010] The present invention also provides the load lock unit,
The liquid crystal injection chamber section and the transport mechanism section each have an exhaust mechanism that can be controlled independently.

【0011】また、本発明は液晶表示装置の製造方法に
おいて、基板貼り合せ冶具に対向配置された2枚の基板
をセットし排気加熱することで基板を貼り合せ、前記基
板貼り合せ冶具をその圧力を維持した状態で液晶注入装
置内に搬入し、前記液晶注入装置の前記基板貼り合せ冶
具搬入部を前記基板貼り合せ冶具内の圧力まで減圧した
後でパネルを取り出し、該パネルを液晶注入用チャンバ
に搬送して液晶材料を注入することを特徴とする。
Further, the present invention relates to a method of manufacturing a liquid crystal display device, wherein two substrates disposed opposite to a substrate bonding jig are set, and the substrates are bonded by evacuation and heating. Is maintained in the liquid crystal injection device, the substrate bonding jig carry-in portion of the liquid crystal injection device is depressurized to the pressure in the substrate bonding jig, and then the panel is taken out. And injecting the liquid crystal material.

【0012】[0012]

【発明の実施の形態】以下、本発明の一実施形態につい
て図1乃至図4を参照して説明する。図1は液晶注入装
置の概略構成図、図2は基板貼り合せ冶具の概略構成
図、図3は図1で示した液晶注入装置のカセット反転機
構の概略構成図、図4は図1で示した液晶注入装置の液
晶注入用チャンバの概略構成図である。
DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIGS. 1 is a schematic configuration diagram of a liquid crystal injection device, FIG. 2 is a schematic configuration diagram of a substrate bonding jig, FIG. 3 is a schematic configuration diagram of a cassette reversing mechanism of the liquid crystal injection device shown in FIG. 1, and FIG. FIG. 3 is a schematic configuration diagram of a liquid crystal injection chamber of a liquid crystal injection device according to the present invention.

【0013】図において、液晶注入装置1は、2枚の基
板が所定の間隙を保持して貼り合された液晶注入前のパ
ネル10を搬入するロードロック部2、基板貼り合せ冶
具3から液晶注入用カセット4にパネル10を移載する
ロボット5、液晶注入用カセット4を反転させるカセッ
ト反転機構6、パネル10に液晶材料を注入するための
チャンバ7、反転させた液晶注入用カセット4を液晶注
入用チャンバ7に搬送するカセット搬送機構8より構成
される。
In FIG. 1, a liquid crystal injection device 1 is provided with a load lock unit 2 for loading a panel 10 before liquid crystal in which two substrates are bonded while maintaining a predetermined gap, and a liquid crystal injection device 3 from a substrate bonding jig 3. Robot 5 for transferring panel 10 to cassette 4 for cassette, cassette reversing mechanism 6 for reversing liquid crystal injecting cassette 4, chamber 7 for injecting liquid crystal material into panel 10, liquid crystal injecting cassette 4 for inverting liquid crystal It is composed of a cassette transport mechanism 8 for transporting to the chamber 7 for use.

【0014】ロードロック部2には、前工程の基板貼り
合せで使用された基板貼り合せ冶具3が、パネル10を
セットした状態で且つ基板貼り合せ時の圧力が維持され
たままの状態で搬入される。このとき、前工程では基板
がオーブンによって加熱されてシール材が硬化されるた
め、ロードロック部2への搬入前には液晶材料17を注
入するときの温度まで基板温度を下げておく。この際、
基板貼り合せ冶具3により維持されている圧力をさらに
下げてもよい。基板貼り合せ冶具3の搬入後、ロードロ
ック部のバルブ9の排気バルブ(図示せず)を開いて基
板貼り合せ冶具3によって維持されている圧力になるま
でロードロック部2の排気を行う。ロードロック部2の
基板貼り合せ冶具3搬入口には扉11、ロードロック部
とロボット5との間には扉12が設置されているので、
扉11及び12を閉めた状態でロードロック部2だけを
排気すればよい。この排気作業は、パネル10内が真空
状態にあるので、シール材13が剥がれたり、基板10
a,10bが割れたりする恐れがないため、急速に行う
ことができる。
The substrate bonding jig 3 used in the substrate bonding in the previous process is loaded into the load lock unit 2 with the panel 10 set and the pressure at the time of substrate bonding maintained. Is done. At this time, in the previous step, the substrate is heated by the oven to cure the sealing material. Therefore, before the substrate is carried into the load lock unit 2, the substrate temperature is lowered to the temperature at which the liquid crystal material 17 is injected. On this occasion,
The pressure maintained by the substrate bonding jig 3 may be further reduced. After the substrate bonding jig 3 is carried in, the load lock unit 2 is evacuated until the pressure maintained by the substrate bonding jig 3 is reached by opening an exhaust valve (not shown) of the valve 9 of the load lock unit. The door 11 is installed at the entrance of the substrate bonding jig 3 of the load lock unit 2, and the door 12 is installed between the load lock unit and the robot 5.
Only the load lock unit 2 needs to be exhausted with the doors 11 and 12 closed. In this evacuation operation, since the inside of the panel 10 is in a vacuum state, the sealing material 13 is peeled off,
Since a and 10b are not likely to be cracked, it can be performed quickly.

【0015】次に、基板貼り合せ冶具3を開放し、ロボ
ット5を用いてパネル10を基板貼り合せ冶具3から液
晶注入用カセット4に移載する。パネル10を移載した
後カセット反転機構6を用いて液晶注入用カセット4を
反転させる。これは液晶材料17をパネル10に注入す
るときに、パネル10が縦になっている必要があるため
である。反転させた液晶注入用カセット4は、カセット
搬送機構8によって液晶材料17を注入するためのチャ
ンバ7まで搬送する。
Next, the substrate bonding jig 3 is opened, and the panel 10 is transferred from the substrate bonding jig 3 to the liquid crystal injecting cassette 4 using the robot 5. After the panel 10 is transferred, the liquid crystal injecting cassette 4 is inverted using the cassette inverting mechanism 6. This is because the panel 10 needs to be vertical when the liquid crystal material 17 is injected into the panel 10. The inverted liquid crystal injection cassette 4 is transported by the cassette transport mechanism 8 to the chamber 7 for injecting the liquid crystal material 17.

【0016】液晶注入用カセット4をチャンバ7内に搬
送した後、バルブ9のうちの排気用バルブ9aを開いて
液晶材料注入のために必要な真空度まで排気を行い、パ
ネル10の液晶注入口部15を液晶皿16に入れられた
液晶材料17に浸け、リーク用バルブ9bを開いてチャ
ンバ7内をリークして液晶材料17の注入を行う。チャ
ンバ7は複数設置されており、カセット搬送機構8との
間には夫々扉7aが設けられ、各チャンバ7毎に、排気
用バルブ9a,リーク用バルブ9bが設けられ、夫々独
立して排気及びリークが可能な構成となっている。チャ
ンバ7の数は、前工程である真空プレスのタクトと液晶
注入にかかるタクトから適宜決定すればよい。チャンバ
7内のリークが終了した後、各チャンバ7のカセット搬
出扉19からカセット4を取り出して液晶注入工程が終
了する。
After transporting the liquid crystal injecting cassette 4 into the chamber 7, the evacuation valve 9a of the valve 9 is opened to evacuate to the degree of vacuum necessary for injecting the liquid crystal material. The part 15 is immersed in the liquid crystal material 17 placed in the liquid crystal dish 16, the leak valve 9 b is opened, and the inside of the chamber 7 is leaked to inject the liquid crystal material 17. A plurality of chambers 7 are provided, a door 7a is provided between the chamber 7 and the cassette transport mechanism 8, and an exhaust valve 9a and a leak valve 9b are provided for each chamber 7, and the exhaust and the exhaust are independently performed. It is configured to be able to leak. The number of chambers 7 may be determined as appropriate based on the tact of the vacuum press and the tact of the liquid crystal injection, which are the preceding steps. After the leakage in the chamber 7 is completed, the cassette 4 is taken out from the cassette carrying-out door 19 of each chamber 7 and the liquid crystal injection step is completed.

【0017】ここで、図2に示した真空プレス工程の詳
細説明を行う。まず、図2aに示すように、2枚の基板
10a,10bが真空プレスされているときには、上冶
具20と下冶具21との間のパッキン22及び23で囲
まれた部分の空気は排気口24より排気され真空状態に
なっている。排気口24部分にチェック弁25を設置し
ておくことで、基板貼り合せ冶具3内を真空の状態に維
持することができる。
Here, the vacuum press step shown in FIG. 2 will be described in detail. First, as shown in FIG. 2A, when the two substrates 10a and 10b are vacuum-pressed, the air in the portion surrounded by the packings 22 and 23 between the upper jig 20 and the lower jig 21 is discharged from the exhaust port 24. It is more evacuated and in a vacuum. By installing the check valve 25 at the exhaust port 24, the inside of the substrate bonding jig 3 can be maintained in a vacuum state.

【0018】プレス終了後、基板貼り合せ冶具3により
真空の状態を維持したままのパネル10をオーブンから
取り出し、液晶材料を注入可能な温度まで冷ます。基板
温度が下がった後、パネル10を基板貼り合せ冶具3ご
と液晶注入装置1のロードロック部2に搬入し、液晶注
入装置1内の排気を行う。この排気は、基板貼り合せ冶
具3内部の圧力と同等になるまで一気に行う。そして、
図2aに示すように、パネル10の所にリフタ27を挿
入し、ガイド28によって、下冶具21と下冶具押さえ
26とを下降させてリフタ27上に乗せる。このリフタ
27のパネル支持部にはパッド27aが設けられてい
る。ここにロボット5のハンド部を挿入し、パネル10
を基板貼り合せ冶具3から取り出す。基板貼り合せ冶具
3から取り出されたパネル10は、そのまま液晶注入用
カセット4に水平な状態に移載される。
After the pressing, the panel 10 with the vacuum maintained is taken out of the oven by the substrate bonding jig 3 and cooled to a temperature at which the liquid crystal material can be injected. After the temperature of the substrate is lowered, the panel 10 is carried into the load lock unit 2 of the liquid crystal injection device 1 together with the substrate bonding jig 3, and the inside of the liquid crystal injection device 1 is evacuated. This exhaust is performed at a stretch until the pressure inside the substrate bonding jig 3 becomes equal to the internal pressure. And
As shown in FIG. 2A, the lifter 27 is inserted into the panel 10, and the lower jig 21 and the lower jig holder 26 are moved down by the guide 28 and placed on the lifter 27. A pad 27a is provided on a panel supporting portion of the lifter 27. Here, the hand part of the robot 5 is inserted, and the panel 10
From the substrate bonding jig 3. The panel 10 taken out from the substrate bonding jig 3 is directly transferred to the liquid crystal injecting cassette 4 in a horizontal state.

【0019】パネル10が搭載された液晶注入用カセッ
ト4は、カセット反転機構6により、パネル10が縦向
きであって液晶注入口部15が下に来るように液晶注入
用カセット4を反転させる。反転させた基板注入用カセ
ット4は、カセット搬送機構8のカセット台29上に載
置されて液晶注入用チャンバ7内に搬送される。このと
きカセット台29はボールネジ機構により移動される。
The liquid crystal injecting cassette 4 on which the panel 10 is mounted is inverted by the cassette inverting mechanism 6 so that the panel 10 is oriented vertically and the liquid crystal injecting port 15 is located below. The inverted substrate injection cassette 4 is placed on the cassette table 29 of the cassette transport mechanism 8 and transported into the liquid crystal injection chamber 7. At this time, the cassette table 29 is moved by the ball screw mechanism.

【0020】次に液晶注入工程について図1及び図4を
用いて詳細に説明する。チャンバ7内に搬送された液晶
注入用カセット4をカセット受台30上に載置する。そ
して排気用バルブ9aを開いて、液晶注入用チャンバ7
内注入に必要な真空度まで排気した後、液晶材料17を
入れた液晶皿16を載置した液晶皿載置台31を上昇さ
せて液晶注入用カセット4内のパネル10を液晶に浸け
る。ここでは液晶皿16側を上昇させたが、この構成に
限定されるものではなく、液晶注入用カセット4側を下
降させて液晶材料17に浸す構成であってもよい。その
後、リーク用バルブを開いて、チャンバ7内をリークし
て液晶材料17をパネル10内に注入する。
Next, the liquid crystal injection step will be described in detail with reference to FIGS. The liquid crystal injecting cassette 4 transported into the chamber 7 is placed on the cassette receiving table 30. Then, the exhaust valve 9a is opened, and the liquid crystal injection chamber 7 is opened.
After evacuation to the degree of vacuum necessary for the internal injection, the liquid crystal dish mounting table 31 on which the liquid crystal dish 16 containing the liquid crystal material 17 is mounted is raised, and the panel 10 in the liquid crystal injection cassette 4 is immersed in the liquid crystal. Here, the liquid crystal dish 16 is raised, but the present invention is not limited to this configuration, and the liquid crystal injection cassette 4 may be lowered and immersed in the liquid crystal material 17. After that, the leak valve is opened to leak the inside of the chamber 7 and the liquid crystal material 17 is injected into the panel 10.

【0021】以上のような方法を採用することにより、
前工程の真空プレスで使用する基板貼り合せ冶具3の真
空状態を維持したままで、パネル10を液晶注入装置1
内に搬入することが可能になる。
By adopting the above method,
While maintaining the vacuum state of the substrate bonding jig 3 used in the vacuum press in the previous process, the panel 10 is
It is possible to carry in.

【0022】次に、図5を用いてパネルを多数個取りす
る場合の液晶注入方法について説明する。図5はパネル
を多数個取りする場合のチャンバの構成を示す図であ
る。図5において、液晶注入用カセット51内にはパネ
ル10が上下2段に分けて夫々複数載置されている。こ
のとき、下段のパネル10は注入口部15を下向きに載
置され、上段のパネル10は注入口部15を上向きに載
置される。液晶材料17の注入は、下段のパネル10は
液晶皿52に入れた液晶材料17にパネル10を浸すこ
とにより行い、上段のパネル10は上部からディスペン
サ53により液晶材料17を滴下することにより注入す
る。これによって、パネル10を多面取りする場合にも
液晶注入を容易に行うことができる。
Next, a liquid crystal injection method when a large number of panels are formed will be described with reference to FIG. FIG. 5 is a diagram showing a configuration of a chamber when a large number of panels are taken. In FIG. 5, a plurality of panels 10 are placed in a liquid crystal injecting cassette 51 in two upper and lower stages. At this time, the lower panel 10 is placed with the inlet 15 facing downward, and the upper panel 10 is placed with the inlet 15 facing upward. The liquid crystal material 17 is injected by immersing the panel 10 in the liquid crystal material 17 placed in the liquid crystal dish 52 for the lower panel 10, and is injected by dropping the liquid crystal material 17 from the upper part by the dispenser 53. . This makes it possible to easily inject liquid crystal even when multiple panels 10 are formed.

【0023】[0023]

【発明の効果】本発明によれば、液晶を注入するための
真空チャンバ内の排気にかかる時間を短縮して、液晶表
示装置の生産性を大幅に向上させることができる。
According to the present invention, the time required for evacuation of the vacuum chamber for injecting the liquid crystal can be reduced, and the productivity of the liquid crystal display device can be greatly improved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係る液晶注入装置の一実施形態を示す
概略構成図である。
FIG. 1 is a schematic configuration diagram showing one embodiment of a liquid crystal injection device according to the present invention.

【図2】基板貼り合せ冶具の一実施形態を示す概略構成
図である。
FIG. 2 is a schematic configuration diagram showing one embodiment of a substrate bonding jig.

【図3】図1で示した液晶注入装置のカセット反転機構
の部分拡大図である。
FIG. 3 is a partially enlarged view of a cassette reversing mechanism of the liquid crystal injection device shown in FIG.

【図4】図1で示した液晶注入装置の液晶注入用の真空
チャンバの部分拡大図である。
FIG. 4 is a partially enlarged view of a vacuum chamber for liquid crystal injection of the liquid crystal injection device shown in FIG.

【図5】本発明に係る液晶注入装置の液晶注入用の真空
チャンバの他の構成を示す部分拡大図である。
FIG. 5 is a partially enlarged view showing another configuration of the liquid crystal injection vacuum chamber of the liquid crystal injection apparatus according to the present invention.

【図6】従来の液晶注入装置による液晶注入方法を説明
する図である。
FIG. 6 is a diagram illustrating a liquid crystal injection method using a conventional liquid crystal injection device.

【符号の説明】[Explanation of symbols]

1 液晶注入装置 2 ロードロック部 3 基板貼り合せ冶具 4 液晶注入用カセット 5 ロボット 6 カセット反転機構 7 液晶注入用チャンバ 8 カセット搬送機構 9a 排気用バルブ 9b リーク用バルブ 10 パネル DESCRIPTION OF SYMBOLS 1 Liquid crystal injection apparatus 2 Load lock part 3 Substrate bonding jig 4 Liquid crystal injection cassette 5 Robot 6 Cassette inversion mechanism 7 Liquid crystal injection chamber 8 Cassette transport mechanism 9a Exhaust valve 9b Leak valve 10 Panel

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 少なくとも、基板貼り合せ冶具を収容す
るロードロック部と、液晶注入用チャンバ部と、前記ロ
ードロック部に収容された基板貼り合せ冶具から2枚の
基板を貼り合せた後のパネルを取り出して前記液晶注入
用チャンバに搬送する搬送機構部とを備えたことを特徴
とする液晶注入装置。
1. A panel after at least two substrates are bonded from a load-lock portion for housing a substrate bonding jig, a liquid crystal injection chamber portion, and a substrate bonding jig stored in the load-lock portion. And a transfer mechanism for taking out the liquid crystal and transferring the liquid to the liquid crystal injection chamber.
【請求項2】 前記ロードロック部と、前記液晶注入用
チャンバ部と、前記搬送機構部とが、夫々独立に制御可
能な排気機構を有することを特徴とする請求項1に記載
の液晶注入装置。
2. The liquid crystal injecting apparatus according to claim 1, wherein the load lock section, the liquid crystal injecting chamber section, and the transport mechanism section each have an exhaust mechanism that can be independently controlled. .
【請求項3】 基板貼り合せ冶具に対向配置された2枚
の基板をセットし排気加熱することで基板を貼り合せ、
前記基板貼り合せ冶具をその圧力を維持した状態で液晶
注入装置内に搬入し、前記液晶注入装置の前記基板貼り
合せ冶具搬入部を前記基板貼り合せ冶具内の圧力まで減
圧した後でパネルを取り出し、該パネルを液晶注入用チ
ャンバに搬送して液晶材料を注入することを特徴とする
液晶表示装置の製造方法。
3. A substrate bonding jig is set with two substrates disposed to face each other, and the substrates are bonded by exhausting and heating.
The substrate bonding jig is loaded into the liquid crystal injection device while maintaining the pressure, and the panel is taken out after the pressure of the substrate bonding jig loading portion of the liquid crystal injection device is reduced to the pressure in the substrate bonding jig. Transferring the panel to a liquid crystal injection chamber and injecting a liquid crystal material.
JP3714898A 1998-02-19 1998-02-19 Liquid crystal injection device and manufacture of liquid crystal display device using same Pending JPH11231333A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3714898A JPH11231333A (en) 1998-02-19 1998-02-19 Liquid crystal injection device and manufacture of liquid crystal display device using same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3714898A JPH11231333A (en) 1998-02-19 1998-02-19 Liquid crystal injection device and manufacture of liquid crystal display device using same

Publications (1)

Publication Number Publication Date
JPH11231333A true JPH11231333A (en) 1999-08-27

Family

ID=12489538

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3714898A Pending JPH11231333A (en) 1998-02-19 1998-02-19 Liquid crystal injection device and manufacture of liquid crystal display device using same

Country Status (1)

Country Link
JP (1) JPH11231333A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100494700B1 (en) * 2001-12-22 2005-06-13 비오이 하이디스 테크놀로지 주식회사 Method for manufacturing liquid crystal display device
KR100494696B1 (en) * 2001-10-17 2005-06-13 비오이 하이디스 테크놀로지 주식회사 Method for manufacturing liquid crystal display device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100494696B1 (en) * 2001-10-17 2005-06-13 비오이 하이디스 테크놀로지 주식회사 Method for manufacturing liquid crystal display device
KR100494700B1 (en) * 2001-12-22 2005-06-13 비오이 하이디스 테크놀로지 주식회사 Method for manufacturing liquid crystal display device

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