JPH11230087A - Seal member with filter and turbo-molecular pump therewith - Google Patents

Abstract

PROBLEM TO BE SOLVED: To simplify the structure of a connection section between devices to be evacuated by arranging a seal ring made of an elastic body having the thickness larger than the thickness of a ring member on the outer periphery of the ring member, and integrally fitting a filter preventing a solid from passing through the inside to the ring member. SOLUTION: A seal member 70 with a filter is arranged on the exhaust port of a turbo-molecular pump. The seal member 70 with the filter is constituted of an inside ring 72 integrally fitted with a meshy filter 78 to cover the inside opening section, an outside ring 74, and an elastic ring 76 pinched between them. The thickness (r) of the elastic ring 76 is set larger than the thickness (t) of the inside ring 72 and the outside ring 74. When an intake port and the exhaust port of a device are fixed by bolts across the elastic ring 76, the elastic ring 76 is collapsed into close contact with the faces of the intake port and exhaust port, and airtightness is secured. No filter support ring is required to be provided at the intake port, and the structure is simplified.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a turbo-molecular pump in which gas is exhausted by a high-speed rotating blade and / or a thread groove rotor.

[0002]

2. Description of the Related Art FIG. 4 shows a conventional general structure of a turbo-molecular pump. This includes a rotor R having a main shaft 10 and a rotating cylindrical portion 12 rotating integrally therewith, a stator S having a fixed cylindrical portion 14 surrounding the main shaft 10, and a cylindrical casing surrounding the rotating cylindrical portion 12. 16 and base B
It is assembled and constructed above. At the intake port 50 of the turbo molecular pump having such a configuration, a filter for preventing dust from entering is arranged.

[0003] Such a filter 52 is constituted by a mesh 56 stretched over a ring-shaped frame 54, and is mounted on a support ring 58 fixed inside the intake port 50. A seal ring 62 is provided between the intake port 50 and the exhaust port 60 of the processing apparatus to be evacuated to maintain airtightness between the two. This seal ring 62
Are formed by sandwiching an elastic ring 68 between an inner ring 64 and an outer ring 66 each made of a metal material.

[0004] On the opposing surfaces of the inner ring 64 and the outer ring 66, grooves 64a and 66a having a circular cross section along the shape of the elastic ring 68 are formed in the circumferential direction. The thickness t of the inner ring 64 and the outer ring 66 is set smaller than the diameter r of the elastic ring. Therefore, when the intake port 50 and the exhaust port 60 are fixed with bolts or the like with the elastic ring 68 interposed therebetween, the elastic The airtightness is ensured by the ring 68 being pressed and crushed and closely attached.

[0005]

However, in such a conventional technique, a filter 52 is provided in the intake port 50.
In order to provide the support ring 58, the component cost and the mounting cost are required, and dirt and the like easily adhere to the portion of the support ring 58. It became necessary to take measures such as performing it frequently.

SUMMARY OF THE INVENTION In view of the above-mentioned problems, it is an object of the present invention to provide a turbo-molecular pump in which the structure of a connecting portion between devices to be evacuated is simplified and cost and workability are improved.

[0007]

According to the first aspect of the present invention, a seal ring made of an elastic body having a thickness larger than the thickness of the ring member is disposed on the outer periphery of the ring member. A seal member with a filter, wherein a filter for preventing solid matter from passing through the inside of the ring member is integrally attached.

Thus, it is not necessary to provide a structure for separately supporting the filter, and the configuration and maintenance are simplified. Even if the filter is fixed to the ring member by welding etc.,
Alternatively, it may be detachably fixed with an appropriate jig.

The invention according to claim 2 is the seal member with a filter according to claim 1, wherein a second ring member is disposed outside the elastic ring.

According to a third aspect of the present invention, there is provided a turbo-molecular pump in which the filter-equipped sealing member according to the first or second aspect is disposed at an intake port.

[0011]

Embodiments of the present invention will be described below with reference to the drawings. The turbo-molecular pump according to the embodiment shown in FIG. 1 includes a rotor R having a main shaft 10 and a rotary cylindrical portion 12 rotating integrally therewith, a stator S having a fixed cylindrical portion 14 surrounding the main shaft 10, a rotary cylinder, A cylindrical casing 16 surrounding the shape portion 12 is assembled on a base B. In addition, a filter-integrated seal ring 20 is provided at an intake port 18 of the casing 16.

A drive motor 22 is disposed between the main shaft 10 and the fixed cylindrical portion 14, and an upper radial bearing 24 and a lower radial bearing 26 are provided above and below the drive motor 22. And, at the lower part of the spindle 10, the spindle 10
, And an axial bearing 32 composed of upper and lower coils 30 on the side of the stator S are arranged. Thus, the rotor R rotates at a high speed under the active control of five axes as the drive motor 22 is driven.

On the outer periphery of the upper portion of the rotary cylindrical portion 12, a rotary wing 34 is provided.
Are integrally provided to form an impeller 36, while, on the inner surface of the casing 16, fixed wings 38 alternately arranged with the rotating wings 34 are provided. As a result, a blade exhaust unit 40 that exhausts air by the interaction between the rotating blade 34 that rotates at high speed and the stationary blade 38 that is stationary is formed.

Further, the fixed tubular portion 1 is attached to the rotating tubular portion 12.
A screw groove portion 42 extending downward along the outer periphery of 4 is provided integrally, and a screw groove 44 is provided on the outer peripheral surface of the screw groove portion 42. On the other hand, the stator S has
The thread groove spacer 46 surrounding the outer circumference of the second 2 is disposed. As a result, a screw groove exhaust section 48 for exhausting by the drag action of the screw groove 44 of the screw groove section 42 rotating at a high speed is formed between the blade exhaust section 40 and the exhaust port 49.

The inlet 50 of this turbo-molecular pump has:
A seal member 70 with a filter for preventing intrusion of dust and maintaining airtightness with a device to be evacuated by the turbo-molecular pump is arranged. As shown in FIG. 2A, the entire configuration of the sealing member with a filter 70 is shown, and the components thereof are shown in FIG. 2B. And a mesh-like filter 78 integrally attached to the inside of the inner ring 72 so as to cover the inner opening.

The inner ring 72 is formed of a suitable metal material, such as, for example, stainless steel, and includes an outer portion 80 sandwiched between a turbomolecular pump and a device to be evacuated.
And a cylindrical inner portion 82 having an outer diameter slightly smaller than the inner diameter of the exhaust port 60 of the device to be evacuated and the inlet port 50 of the turbo-molecular pump. Outer ring 74
Is also formed of a metal material such as Al. The elastic ring 76 is formed of, for example, a fluorine resin. The filter 78 is usually made of a metal mesh, and is fixed to the inner surface of the inner ring 72 by brazing, an adhesive, or the like.

On the opposing surfaces of the inner ring 72 and the outer ring 74, grooves 72a, 74a having a circular cross section along the shape of the elastic ring 76 are formed in the circumferential direction. The thickness t of the inner ring 72 and the outer ring 74 is set smaller than the diameter r of the elastic ring. The sectional area of the space between the inner ring and the outer ring is set smaller than the sectional area of the elastic ring 76. Therefore, the elastic ring 7
When the intake port 50 and the exhaust port 60 of the apparatus are fixed with bolts or the like with the 6 interposed therebetween, the elastic ring 76 is pressed and crushed by these,
It protrudes up and down from the space between the inner ring 72 and the outer ring 74. This is in close contact with the surface of the turbo molecular pump and the surface of the device to be evacuated, so that airtightness between them is ensured.

The operation of the turbo-molecular pump having the filter-equipped seal member configured as described above will be described. The outer ring 74 and the elastic ring 7 as shown in FIG.
6. The three parts of the inner ring with filter 72 are combined as shown in FIG. This is sandwiched between the intake port 50 of the turbo molecular pump and the exhaust port 60 of the device so that the inner member 82 of the inner ring 72 is fitted to each, and the turbo molecular pump and the device are fastened with bolts or the like. Since the thickness r of the elastic ring 76 is larger than the thickness t of the inner ring 72 and the outer ring 74, the elastic ring 7
6 is pushed and crushed, and closely adheres to the surface of the inlet 50 of the turbo-molecular pump and the outlet 60 of the device. When replacing the filter 78, the inner ring 72 to which the new filter 78 is fixed in advance may be prepared, and the entire inner ring 72 may be used.

Thus, in this turbo molecular pump,
The replacement work of the filter 78 is easy. In addition, intake port 5
Since there is no need to provide a filter support ring on the filter, no parts and mounting costs are required, and the configuration of this part is simplified and maintenance is also simplified.

FIG. 2C shows an inner ring 72A of another embodiment, in which a filter 78 is detachably mounted. That is, the inner ring 72
A groove 84 extending in the circumferential direction is formed on the inner peripheral surface of A.
After placing the filter 78 thereon, an elastic pressing member 86 is attached to the groove 84 to fix the filter 78. This facilitates the replacement of the filter 78 and eliminates the need to replace the entire inner ring, thereby reducing component costs.

The outer ring 74 should preferably prevent the elastic ring 76 from expanding outward, but the gist of the present invention can be achieved without the outer ring 74. Further, in the above-described embodiment, the seal member with the filter is attached to the intake port 50 of the turbo-molecular pump. However, it goes without saying that the seal member may be used at any place where both the seal and the filter function are required.

[0022]

As described above, according to the present invention,
There is no need to provide a separate filter support structure,
The structure of the connection between the devices to be evacuated can be simplified, the cost and workability can be improved, and as a result a compact turbo-molecular pump can be provided.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a turbo-molecular pump according to one embodiment of the present invention.

2A is a cross-sectional view illustrating an embodiment of a filter-equipped seal member of the present invention, FIG. 2B is a diagram illustrating components thereof,
(C) It is a figure showing a component of other embodiments.

FIG. 3 is a plan view of the filter-equipped seal member of FIG. 2;

FIG. 4 is a sectional view showing a conventional turbo-molecular pump.

[Explanation of symbols]

 50 Inlet 72 Inner ring 74 Outer ring 76 Elastic ring 78 Filter

Claims (3)

[Claims] 1. A seal ring made of an elastic body having a thickness larger than the thickness of the ring member is disposed on the outer periphery of the ring member, and the ring member is provided with a solid material passing through the inside of the ring member. A sealing member with a filter, wherein a filter for blocking is integrally attached. 2. The filter-equipped seal member according to claim 1, wherein a second ring member is disposed outside the elastic ring. 3. A turbo-molecular pump, wherein the filter-equipped seal member according to claim 1 or 2 is disposed at an intake port.