JPH11220189A - Gas laser - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a gas laser capable of achieving high-output laser oscillation, stabilizing the output for a long time, and has high oscillation efficiency by efficiently supplying and discharging a gas medium to be excited into an electric field, by stabilizing the discharge of the gas medium to be excited and performing high-efficiency excitation. SOLUTION: In a gas laser, a gas medium 5 to be excited is supplied and/or discharged so that it does not orthogonally cross the direction of an electric field 3 between electrodes 1a and 1b, thus reducing the change in electric field strength, caused when the gas medium 5 is excited while passing through the electric field 3, and the bias and instability of discharge.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas laser device, and more particularly to a gas laser device which excites a gas medium to be excited to a high energy state in an electric field formed by an electrode and performs laser oscillation. It relates to the composition of supply and discharge.

[0002]

2. Description of the Related Art Conventionally, as means for supplying / discharging a gas medium to be excited into an electric field in a gas laser apparatus, Japanese Unexamined Patent Application Publication No.
Japanese Patent Application Laid-Open No. 291662/1991 discloses a configuration for supplying and discharging such an excited gas medium.
Generally, it is called a triaxial orthogonal type.

FIG. 7 is a sectional view showing a schematic structure of such a conventional gas laser device. In FIG. 7, an electric field 103 is generated by applying a high voltage from a high-voltage power supply (not shown) to a pair of opposed electrodes 101a and 101b, thereby generating an electric field region 103a. The excited gas medium 105 is discharge-excited by the generated electric field region 103a, and a laser beam is generated by a pair of not-illustrated reflecting mirrors, one of which is a partial reflecting mirror on the optical axis 110 corresponding to the direction perpendicular to the paper surface. Oscillation occurs.

The gas medium 105 to be excited is a blower 1
13, and the gas medium to be excited 105 is
As shown by the arrows in the drawing, the flow is supplied so as to be substantially perpendicular to the direction of the electric field from a plane parallel to the plane formed by the direction of the electric field and the direction perpendicular to the paper surface, and substantially perpendicular to the opposite surface. And then returns to the blower 113 after passing through the heat exchanger 114.

[0005] These components are a laser tube 115.
Is located inside.

[0006]

However, such a configuration has the following problems.

FIG. 8 shows a pair of electrodes 101a and 101b.
FIG. 3 is a diagram for explaining the state of an electric field formed by the electrodes. Since these electrodes have edges, the electric flux line 120 has the densest center of the electrode and becomes sparser toward the end of the electrode, and the electric field strength is reduced. Has a distribution in which the center is strong and the edges are weak.

On the other hand, when the excited gas medium is discharge-excited by an electric field and laser-oscillates, the temperature rises. If there is a flow in the excited gas medium, a temperature distribution is formed in the flow direction. However, in general, when a gas temperature distribution is present in an electric field, a discharge tends to be ignited at a place where the gas temperature is high.

For this reason, in the conventional three-axis orthogonal type configuration,
Due to the fact that the flow direction of the excited gas medium and the direction in which the electric field distribution exists between the electrodes are substantially coaxial in the left-right direction in FIG. 7, the discharge is caused by the temperature of the excited gas medium within the electric field distribution. In some cases, a phenomenon in which the distribution is biased toward the high temperature side or a phenomenon in which the discharge position becomes unstable in the electric field distribution, that is, in the flow direction of the gas medium to be excited, is observed in the pulse discharge.

When the supply and discharge of the gas medium to be excited into and out of the electric field are perpendicular to the direction of the electric field, the gas medium undergoes the largest change in the electric field strength. Becomes noticeable.

When such a phenomenon occurs, the efficiency of laser oscillation is reduced, and the output of laser oscillation is also reduced. This leads to contamination of optical parts due to electrode sputtering and deterioration of the gas medium to be excited. I will.

That is, it can be said that the subject to be overcome for the stability of discharge is that the excited gas medium undergoes an unnecessary large change in electric field strength.

According to the present invention, by efficiently supplying / discharging a gas medium to be excited into an electric field, stabilizing the discharge of the gas medium to be excited, and performing high-efficiency excitation, high output of laser oscillation is achieved. It is an object of the present invention to provide a gas laser device that can realize high output power, long-term stability and high oscillation efficiency.

[0014]

In the gas laser apparatus according to the present invention, the gas medium to be excited is supplied and / or exhausted so as not to be orthogonal to the direction of the electric field between the electrodes, so that the gas medium to be excited is within the electric field. In this case, the change in the electric field intensity received when passing through the gate electrode can be reduced, and the bias and instability of the discharge can be reduced.

According to such a configuration, by efficiently supplying and discharging the gas medium to be excited into the electric field, stabilizing the discharge of the gas medium to be excited, and performing highly efficient excitation,
An object of the present invention is to provide a gas laser device capable of realizing high output of laser oscillation, long-term stability of output, and high oscillation efficiency.

[0016]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention according to claim 1 is a gas laser apparatus which forms an electric field between electrodes and excites a gas medium to be excited between the electrodes to a high energy state to perform laser oscillation. The gas medium to be excited is supplied and / or discharged so as not to be orthogonal to the direction of the electric field between the electrodes.

Thus, the change in the electric field intensity received when the excited gas medium passes through the electric field can be reduced, and the occurrence of bias and instability of the discharge can be reduced. Excitation is realized, which has the effect of increasing the output of laser oscillation, stabilizing the output for a long time, and obtaining high oscillation efficiency.

Specifically, the supply and / or discharge of the gas medium to be excited is performed through an opening between the electrode and a wall member that covers the gas medium to be excited. This is preferable because of the certainty of the operation and the simplicity of the configuration.

According to a third aspect of the present invention, there is provided a gas laser apparatus which forms an electric field between electrodes and excites a gas medium to be excited between the electrodes to a high energy state to perform laser oscillation. In the gas laser device, the supply and / or discharge of the gas medium to be excited is performed through the electrode.

[0020] This also makes it possible to reduce the change in the electric field intensity that the excited gas medium undergoes when passing through the electric field, to reduce the occurrence of bias and instability in the discharge, to stabilize the discharge, and to improve the efficiency. This has the effect of achieving high power of laser oscillation, long-term stability of output, and high oscillation efficiency.

More specifically, the electric field between the electrodes is formed through an opening formed between the front surface and the back surface of the electrode on the side of the excited gas excited to a high energy state. It is preferable that the supply and / or discharge of the gas medium to be excited be performed so as not to be orthogonal to the direction.

As described above, in particular, if the excited gas medium is caused to flow between the front surface and the back surface of the electrode, the excited gas medium can be supplied and discharged into the electric field with the shortest distance. Realize the flow of the excited gas medium along the direction,
By achieving more efficient supply and discharge of the gas medium to be excited, and by increasing the output of laser oscillation and stabilizing the discharge, there is an effect that high oscillation efficiency and long-term stability of output can be obtained.

Here, it is sufficient that at least one opening penetrates the front and rear surfaces of the electrode in order for the gas medium to be excited to flow therethrough.

In particular, if a plurality of openings are provided, the flow of the gas medium to be excited can be increased, a uniform flow of the gas medium to be excited can be formed within the electric field, or the flow of the gas medium to be excited corresponding to the strength of the electric field distribution can be increased. Forming the flow of the gas medium has the effect of increasing the output of laser oscillation.

In the above, at least one of the electrodes for forming the electric field may include a dielectric, so that a so-called ballast effect is generated by the dielectric, and the uniform discharge is achieved. It has the effect of increasing the laser oscillation output and improving the oscillation efficiency, and the ballast effect is increased especially when a dielectric is provided for both electrodes.

Further, in the above, the shapes of the electrodes for forming the electric field may be different from each other, and the different shapes of the electrodes may cause the supply and discharge of the gas medium to be excited. It has the effect of optimizing the flow of the gas medium to be excited in the electric field and the electric field distribution formed by the electrode shape, making the discharge more stable and uniform, and increasing the efficiency and output of the laser oscillation. .

In the above, even if the gas medium to be excited circulates around a region excited to a high energy state as described in claim 8, the gas medium can be excited after being cooled. It can contribute to oscillation.

In the above, if the excited gas medium is discharged and then supplied again into the electric field as described in claim 9, the excited gas medium is circulated so that the excited gas medium is circulated. Since the gas medium can be repeatedly used, the gas laser device consumes a small amount of gas, and has an effect of configuring an economical device.

In this case, there may be provided a means for forcibly discharging the gaseous medium to be excited and supplying the gaseous medium to the electric field again after the discharge. The amount of circulation can be increased, and the flow state of the gas medium to be excited can be controlled more, which has the effect of increasing the output of laser oscillation and increasing the efficiency of laser oscillation by stabilizing discharge. Preferred.

[0030] Further, a means for cooling the gas medium to be excited may be provided in a path for discharging the medium to be excited and supplying the gas medium again after the discharge. It is preferable because the temperature of the gas medium to be excited again supplied to the substrate can be lowered, and the laser oscillation can have a high output.

Further, the invention has a means for pre-ionizing the gaseous medium to be excited, and the ionized gas serving as a seed for discharging is discharged into the gaseous medium between the electrodes by performing the preionization. It can be present before the start of the discharge, whereby the distribution of the excited gas medium in the excited state is made uniform,
It is preferable because it has the effect of obtaining highly efficient laser oscillation and long-term stability of output.

Here, if the means for preionization is provided coaxially with the direction of the electric field, the preionization can be performed at the shortest distance to the gas medium to be excited in the electric field. Becomes possible, and the surface of the electrode forming the electric field on the excited gas medium side has a high electron density.
This is preferable because the distribution of the gas medium to be excited in the excited state can be made more uniform, and high-efficiency laser oscillation and long-term stability of output can be obtained.

In the above, as described in claim 14,
The electric field formed between the electrodes is a high-frequency electric field,
Oscillation of the electric field direction over time is preferable because it has the effect of suppressing the occurrence of arc discharge and increasing the laser oscillation output and improving the oscillation efficiency.

Here, when the frequency of the high-frequency electric field is a microwave, the vibration of the electric field becomes faster, the occurrence of arc discharge is further reduced, and the output of laser oscillation is increased. This is preferable because it has the effect of achieving long-term stability of output and high oscillation efficiency.

Further, as set forth in claim 16, there is provided a standing wave forming means for converting a microwave into a standing wave, wherein the gas medium to be excited is excited at an antinode position of the standing wave. In this way, by using the microwave as a standing wave and exciting the gas medium to be excited at the antinode position of the standing wave, the gas medium to be excited is excited at a position where the electric field strength is highest, and This is preferable because strong excitation can be performed, and an effect that high output and high efficiency of laser oscillation can be obtained is obtained.

Here, as described in claim 17, when the microwave frequency is 2.45 GHz ± 0.05 GHz, an inexpensive magnetron can be used, and the cost of the apparatus can be reduced. Is preferable.

Hereinafter, embodiments of the present invention will be described with reference to FIGS. 1 to 6. (Embodiment 1) Hereinafter, Embodiment 1 of the present invention will be described in detail with reference to the drawings.

FIG. 1 is a schematic view of a gas laser device according to the present embodiment. In FIG. 1, 1a is a first electrode, 1b
Is a second electrode, 2a is a first dielectric electrode, 2b is a second dielectric electrode, 3 is an electric field, 3a is its electric field region or discharge region, 4 is an insulating partition, 5 is a gas medium to be excited, 6 is a gas medium supply port, 7 is a gas medium discharge port, 8 is an internal laser tube,
Reference numeral 10 denotes an optical axis, and reference numeral 15 denotes a laser tube, which constitutes a gas laser device.

Here, the excited gas medium 5 shown in this embodiment can oscillate several wavelengths by changing the type of gas medium.

For example, the present invention can be applied to a CO ₂ gas laser, a CO gas laser, a N ₂ gas laser, a metal vapor gas laser, a rare gas gas laser, a He—Ne gas laser, an ion laser, and the like.

With the above arrangement, a reflecting mirror facing the direction of the optical axis 10 and capable of reflecting the oscillation wavelength of the gas medium, that is,
One is a mirror with infinitely high reflectivity, the other is partially transmissive, but most of the rest can be oscillated by placing a partially reflecting mirror that reflects, but more details on this configuration and operation I will explain to you.

First, the excited gas medium 5 is placed in the laser tube 15.
Is enclosed. Each of the electrodes 1 is connected to a power supply (not shown). The power supply is, for example, a high-frequency power supply, and a dielectric electrode 2 is disposed on the side of the electrode 1 to be excited by the gas medium. The insulation between the electrode 1 and the laser tube 15 is obtained by the insulator partition wall 4.

Subsequently, a high voltage is applied to the electrode 1a and the electrode 1a from the power supply, and an electric field 3 is formed in the electric field region 3a via the dielectric electrode 2 in parallel with the plane of the drawing.

Then, the excited gas medium 5 in the electric field region 3a to which the high voltage is applied is broken down and starts discharging, the excited gas medium 5 is excited to be in a high energy state, and the optical axis 10 Laser light is oscillated from the partial reflecting mirror side of the two reflecting mirrors facing upward.

At this time, the gas medium 5 to be excited is supplied to the electric field region 3a through the gas medium supply port 6, and
After being excited by discharge and contributing to laser oscillation, the temperature rises to a high level, passes through the gas medium outlet 7, and is discharged out of the electric field region 3a.

Subsequently, the gas medium to be excited 5 discharged from the gas medium discharge port 7 reaches the gas medium supply port 6 while being naturally cooled in the laser tube 15 as shown by an arrow, and is again discharged and excited by the laser. Contributes to oscillation.

The gas medium 5 to be excited is supplied not only from the gas medium outlet 7 but also from the internal laser tube 8 as indicated by the arrow.
There is also a component that circulates through the inside, is naturally cooled in the internal laser tube 8, and, together with the excited gas medium 5 from the gas medium supply port 6, is again excited by discharge and contributes to laser oscillation.

Here, the laser tube 15 and the internal laser tube 8
It is of course effective to forcibly cool the water with water or the like.

In the above process, supply and discharge of the excited gas medium 5 to and from the electric field region 3a will be described in more detail.

In the present embodiment, the supply and discharge of the excited gas medium 5 to and from the electric field region 3a circulates at a certain angle which is not parallel to or perpendicular to the direction of the electric field 3 in a direction parallel to the plane of the drawing. Become.

This is because the electric flux in the direction of the electric field in the electric field 3 has continuity, and therefore, there is almost no electric field intensity distribution in this direction.

That is, the flow component of the gas medium 5 to be excited in the electric field distribution orthogonal to the electric field direction is reduced, so that the occurrence of bias and instability of the discharge is suppressed, and the uniformity and stabilization are achieved. Become.

Here, when the power supply connected to the electrode 1 is a high-frequency power supply, an electric field direction parallel to the plane of the drawing is formed between the electrodes 1, but this electric field oscillates at the frequency of the high-frequency power supply. More stable discharge can be realized.

Further, by disposing the dielectric electrode 2 on the side of the excited gas medium 5 of the electrode 1, the discharge is made uniform by the ballast effect of the dielectric, and more stable discharge can be realized.

Further, if the shapes of the electrodes 1a and 1b are different, more effective control of the electric field distribution becomes possible, and uniform and stable discharge can be obtained.

The electrode 1 may be made of a conductive material, and preferably has a high thermal conductivity. The shape of the electrode 1 is columnar, square, trapezoidal, hemispherical, or elliptical. The effect can be obtained with a body shape, a parabolic shape, a shape with a constriction at the center, a three-dimensional shape, and the like. Further, for example, cooling with insulating oil or ion-exchanged water is also effective.

The dielectric electrode 2 can be made of quartz, a ceramic material, a polymer material, or the like as a dielectric, and has a structure having an effective dielectric function, for example, a dielectric material. A structure having a vacuum part or a gas medium 5 to be excited
A dielectric filled with a gas having a sufficiently high pressure may be used, and a material having a high thermal conductivity or a material having a low coefficient of thermal expansion is more preferable.

Further, the effect can be obtained even if the shape is a column, a square, a trapezoid, a hemisphere, an ellipsoid, a paraboloid, a shape constricted at the center, a three-dimensional shape, or the like. The arrangement is effective even on one side only, and it is preferable that the arrangement is on both sides.

It is preferable that the gas medium supply port 6 and the gas medium discharge port 7 have one or more openings, and the shape of the openings may be a circle, a slit, or a mesh.

As described above, according to the present embodiment, high output of laser oscillation, long-term stability of output, and high oscillation efficiency can be obtained.

The optical axis 10 does not have to be perpendicular to the plane of the paper as long as it can perform laser oscillation.

Further, specifically, the insulator partition wall 4 is desirably one having a high thermal conductivity or a low coefficient of thermal expansion. Further, for example, cooling with insulating oil is also effective. is there.

Embodiment 2 Hereinafter, Embodiment 2 of the present invention will be described in detail with reference to the drawings.

FIG. 2 is a schematic diagram of the gas laser device of the present embodiment. In FIG. 2, reference numeral 21a denotes a first opening electrode, 21b denotes a second opening electrode, 22a denotes a first opening dielectric electrode, and 22b denotes a second opening dielectric. The configuration is the same as that of the first embodiment, except that the functions of the gas medium supply port 6 and the gas medium discharge port 7 are constituted by an electrode 21 having an opening and a dielectric electrode 22 having an opening.

In the following, a description will be given with a special focus on portions different in operation from the first embodiment. First, the excited gas medium 5 moves from the back surface side, which is the electric field region 3a side of the first opening electrode 21b, to the front surface side with respect to the electric field region 3a formed by the electrode 21 with an opening. The first dielectric electrode 22b with an opening flows from the back surface side, which is the electric field region 3a side, to the front surface side, and is directly supplied to the electric field region 3a.

Subsequently, the gas medium 5 to be excited is moved from the front surface side, which is the electric field region 3a side of the second dielectric electrode 22a with the opening, to the back surface side with respect to the electric field region 3a formed by the electrode 11 with the opening. Further, the second electrode with opening 21a flows from the front surface side, which is the electric field region 3a side, to the rear surface side, and is directly discharged from the electric field region 3a.

That is, in this configuration, the excited gas medium 5
Supply / discharge is performed directly to the electric field region 3a, thereby enabling highly efficient circulation.

Therefore, the flow component of the gaseous medium 5 to be excited in the direction of the electric field intensity distribution perpendicular to the direction of the electric field is minimized, so that the uniformity and stabilization of the discharge can be obtained and the injection power to the electric field region 3a can be increased. Will be possible.

As described above, according to the present embodiment, high output of laser oscillation, long-term stability of output, and high laser oscillation efficiency can be obtained more effectively.

Here, it is preferable that the number of openings through which the gas flows is specifically plural, and the shape of the openings may be a circle, a slit, or a mesh. By controlling the direction of the flow, the flow can be controlled.

(Embodiment 3) Hereinafter, Embodiment 3 of the present invention will be described in detail with reference to the drawings.

FIG. 3 is a schematic diagram of a gas laser device according to the present embodiment. In FIG. 3, 31 is a blower and 3
Reference numeral 2 denotes a heat exchanger, and otherwise has the same configuration as that of the second embodiment.

The following is a description focusing on the differences from the second embodiment. In the present embodiment, after the excited gas medium 5 after the excitation has been discharged from the electric field region 3a through the second apertured dielectric electrode 22b and the second apertured electrode 21b, After passing through the inside of the laser tube 15, it first passes through the heat exchanger 32.

The heat exchanger 32 has a metal fin inside, and is configured to have a high probability of collision with the excited gas medium 5 in a high temperature state. It may be configured such that cooling of the gas medium 5 to be excited can be efficiently performed using liquid nitrogen or the like.

After passing through the heat exchanger 32, the excited gas medium 5, which has become normal temperature again, passes through the blower 31,
It circulates again to contribute to laser oscillation.

At this time, the circulation of the excited gas medium 5 is forcibly performed by the blower 31. This blower 31
Specifically, a mechanical booster pump, a turbo blower, a coaxial fan, a mixed flow fan, a sirocco fan, and the like can be used.

As described above, according to the present embodiment, high power of laser oscillation can be obtained by supplying a large amount of the gaseous medium 5 to be excited to the electric field region 3a. , It is possible to discharge the excited gas medium 5 after excitation, further stabilize the discharge, and obtain laser oscillation with long-term stability of output and high oscillation efficiency.

(Embodiment 4) Hereinafter, Embodiment 4 of the present invention will be described in detail with reference to the drawings.

FIG. 4 is a schematic diagram of the gas laser device of the present embodiment. In FIG. 4, reference numeral 41a denotes a first preliminary ionization electrode, reference numeral 42b denotes a second preliminary ionization electrode, and the other configuration is the same as that of the third embodiment.

The following is a description focusing on the differences from the third embodiment. In the present embodiment, preliminary ionization electrodes 41a and 41b are provided below the first electrode 21b with an opening, and the electric field of the electrode 21 with an opening immediately before the discharge is ignited in the electric field region 3a. , The preliminary ionization electrode 41 is configured to discharge.

The ultraviolet light generated by the discharge passes through the opening of the first opening electrode 21b and the opening of the first dielectric electrode 22b to generate ionized gas in the electric field region 3a.

The ionized gas serves as a seed for discharge ignition, and facilitates ignition at a high gas pressure where it is difficult to generate discharge ignition. Stabilization will be obtained.

As described above, according to the present embodiment, ignition at a high gas pressure is facilitated, laser output can be increased by increasing the number of molecules of the gas medium to be excited, and a stable discharge can be obtained. As a result, long-term stability of output and laser oscillation with high oscillation efficiency can be obtained.

For the preliminary ionization, corona discharge, ultraviolet light irradiation, or electron beam irradiation can be specifically used. The preionization may be performed at a position other than the above-mentioned position and perpendicular to the direction of the electric field. It is also effective to provide in the dielectric electrode, to perform on the discharge side of the excited gas medium 5, and to arrange a plurality of preliminary ionization electrodes two-dimensionally or three-dimensionally.

Embodiment 5 Hereinafter, Embodiment 5 of the present invention will be described in detail with reference to the drawings.

FIG. 5 is a schematic diagram of the gas laser device of the present embodiment. In FIG. 5, reference numeral 51 denotes a waveguide opening;
Is a waveguide, 53 is a dielectric window, 54 is a microwave oscillator,
55 is a matching device, 56 is a plunger, and 57 is a cooling water channel, which is the same as that of the second embodiment except that these are provided.

The following description focuses on differences from the second embodiment. When the frequency of the high-frequency electric field is a microwave as in this embodiment, the microwave propagates as a radio wave in the waveguide in a mode determined by the shape of the waveguide by the waveguide to form an electric field in the waveguide. Therefore, there are some differences from the case where the high frequency electric field is less than GHz.

Specifically, the electrode 2 with an opening shown in FIG.
1a and 21b become a part of the waveguide made of a conductor, and the insulator partition wall 4 becomes unnecessary.

That is, the electrodes 21a, 21 with openings shown in FIG.
b designates waveguide openings 51 a and 51 b, and the gas medium 5 to be excited is connected to the waveguide 53 on the right side of the dielectric window 53 and the laser tube 1.
5 is enclosed.

The microwave oscillated from the microwave generator 54 propagates in the waveguide 52 in a mode selected by the shape of the waveguide 52.

Here, as the microwave generator 54,
For example, a magnetron that oscillates at 2.45 GHz is easily available and inexpensive.

Next, the microwave transmits through the dielectric window 53 transmitting the microwave and propagates to the right side of the dielectric window 53.

Here, as the dielectric window 53, for example, quartz or Teflon is suitable for transmitting microwaves and enclosing the gas medium 5 to be excited.

The microwave forms a standing wave between the matching device 55 and the wall of the waveguide 52 formed of the conductor on the side of the gas medium 5 to be excited.

More specifically, an antinode of a standing wave is formed at the position of the optical axis 10 and the electric field region 3a is set to be equal to or higher than the discharge starting voltage. Laser oscillation is performed in the direction of.

In general, since the microwave frequency is high, the vibration of the electric field changes at a very high speed, the occurrence of arc discharge is suppressed, and a high injected power density is obtained.

In the electric field region 3a which is a discharge region,
The waveguide openings 51a and 52b are provided, and the shape and the opening shape are the electrodes 21a and 21b with openings according to the second embodiment.
Are the same as those described for the waveguide openings 51a,
Inside the waveguide 51b, the dielectrics 22a and 22b with openings described in the second embodiment are provided.

Thus, the electric field distribution in the electric field region 3a is controlled, the discharge binding force is increased, and the discharge is stabilized.

Further, since the microwave propagates as a radio wave in the waveguide 52 made of a conductor, most of the structure can be made of a metal suitable for cooling the gas medium 5 to be excited. By providing the cooling water passage 17 in the pipe 15, efficient cooling can be performed.

Similarly to the fourth embodiment, one preliminary ionizing electrode is formed in the lower part of the waveguide opening 51 or in the waveguide 52 in which the excited gas medium 5 is sealed. It is also preferable to provide and install as described above.

As described above, according to the present embodiment, by using a microwave, an electric field is alternated at a higher speed to suppress the occurrence of arc discharge, and discharge is excited at the antinode position of the microwave standing wave. By strengthening the binding force of the discharge, the instability due to the distribution in the propagation direction due to the supply and discharge of the excited gas medium to and from the discharge area, and the instability of the discharge due to the temperature distribution are suppressed, and the discharge stabilization thereby allows the microwave Utilizing the features of (1), laser output with high output, long-term stability of output and laser oscillation with high oscillation efficiency can be obtained, and most of them can be made of metal suitable for cooling. A suitable configuration is realized.

Embodiment 6 Hereinafter, Embodiment 6 of the present invention will be described in detail with reference to the drawings.

FIG. 6 is a schematic diagram of the gas laser device of the present embodiment. In FIG. 6, 31 is a blower and 32 is a heat exchanger, and the other configuration is the same as that of the fifth embodiment.

In this embodiment, the excited gas medium 5 is
The excited gas medium 5 forcedly circulated by the blower 31 and further heated to a high temperature by the discharge excitation is efficiently cooled by the waveguide 52 and the laser tube 15 having the cooling water channel therein and the heat exchanger 32. Will be.

As described above, according to the present embodiment, in addition to the effects of the fifth embodiment, by increasing the amount of the gaseous medium to be excited in the discharge region, it is possible to increase the output of laser oscillation. It is particularly effective in increasing the output of continuous oscillation, and also allows the excited gas medium after excitation from the discharge region to be quickly discharged, further stabilizing the discharge,
Laser oscillation with long-term stability of output and high oscillation efficiency can be obtained.

[0106]

As described above, according to the present invention, when the gas medium to be excited is discharge-excited in the electric field region having the electric field intensity distribution, the gas medium to be excited should be at least not orthogonal to the direction of the electric field. By supplying / discharging, the change in the electric field intensity distribution that the excited gas medium receives when passing through the electric field region is minimized, whereby the advantageous effect that the discharge is stabilized can be obtained.

[Brief description of the drawings]

FIG. 1 is a schematic view of a gas laser device according to a first embodiment of the present invention.

FIG. 2 is a schematic diagram of a gas laser device according to a second embodiment.

FIG. 3 is a schematic view of a gas laser device according to a third embodiment.

FIG. 4 is a schematic view of a gas laser device according to a fourth embodiment.

FIG. 5 is a schematic view of a gas laser device according to a fifth embodiment.

FIG. 6 is a schematic view of a gas laser device according to a sixth embodiment.

FIG. 7 is a schematic diagram of a conventional gas laser device.

FIG. 8 is a schematic diagram of a flux line between the electrodes.

[Explanation of symbols]

 1a 1st electrode 1b 2nd electrode 2a 1st dielectric electrode 2b 2nd dielectric electrode 3 Electric field 3a Electric field or discharge region 4 Insulator partition wall 5 Excited gas medium 6 Gas medium supply port 7 Gas medium discharge port Reference Signs List 8 internal laser tube 10 optical axis 15 laser tube 21a first opening electrode 21b second opening electrode 22a second opening dielectric electrode 22b second opening dielectric electrode 31 blower 32 heat exchanger 41a 2 pre-ionization electrodes 41b 2nd pre-ionization electrode 51a 1st waveguide opening 51b 2nd waveguide opening 57 cooling water channel 52 waveguide 53 dielectric window 54 microwave oscillator 55 matching unit 56 plunger 101a first electrode 101b Second electrode 103 Electric field 103a Electric field or discharge area 105 Excited gas medium 113 Blower 114 Heat exchanger 115 Ray The tube 120 Electric wire

Claims (17)

[Claims] 1. A gas laser device which forms an electric field between electrodes and excites an excited gas medium between the electrodes to a high energy state to perform laser oscillation, wherein the excited gas medium comprises the electrode The gas laser device is supplied and / or discharged so as not to be orthogonal to the direction of the electric field between them. 2. The gas laser device according to claim 1, wherein the supply and / or discharge of the excited gas medium is performed through an opening between the electrode and a wall member covering the excited gas medium. 3. A gas laser device which forms an electric field between electrodes and excites a gas medium to be excited located between the electrodes to a high energy state to perform laser oscillation, and supplies and / or supplies the gas medium to be excited. Or a gas laser device in which the discharge is performed through the electrode. 4. The excited gas is not orthogonal to the direction of the electric field between the electrodes through an opening formed between the front surface and the rear surface of the electrode on the excited gas side excited to a high energy state. The gas laser device according to claim 3, wherein supply and / or discharge of the medium is performed. 5. The gas laser device according to claim 4, wherein at least one opening penetrates the front and back surfaces of the electrode so that the gas medium to be excited flows therethrough. 6. The gas laser device according to claim 1, wherein at least one of the electrodes forming the electric field includes a dielectric. 7. The gas laser device according to claim 1, wherein the electrodes forming the electric field have different shapes. 8. The gas laser device according to claim 1, wherein the gas medium to be excited circulates around a region excited to a high energy state. 9. The gas laser apparatus according to claim 1, wherein the gas medium to be excited is supplied again into the electric field after being discharged. 10. The gas laser apparatus according to claim 9, further comprising means for forcibly discharging the gas medium to be excited and supplying the gas medium again after the discharge. 11. The gas laser device according to claim 9, further comprising means for cooling the gas medium to be excited in a path for discharging the gas medium to be excited and supplying the gas medium again after the gas is exhausted. 12. The gas laser device according to claim 1, further comprising means for pre-ionizing the gas medium to be excited. 13. The gas laser device according to claim 12, wherein the means for preionization is provided coaxially with the direction of the electric field. 14. The gas laser device according to claim 1, wherein the electric field formed between the electrodes is a high-frequency electric field. 15. The gas laser device according to claim 14, wherein the frequency of the high-frequency electric field is a microwave. 16. The gas laser device according to claim 15, further comprising a standing wave forming means for converting a microwave into a standing wave, and exciting the gas medium to be excited at an antinode of the standing wave. 17. The microwave frequency is 2.45 GHz.
17. The gas laser device according to claim 16, wherein the frequency is ± 0.05 GHz.