JPH11218448A - Temp. sensor and manufacture thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To avoid the wire breaking due to the thermal expansion in a temp. sensor having a temp. detector element on a ceramic board. SOLUTION: A metal tube 1, ceramic long board 2 housed in the tube 1, at least two conductive patterns 4 disposed from the top end of the board 2 surface to the rear end, and temp. detector element 3 connected between the top ends of these conductive patterns 4 are provided, the top end of the board 2 is fixed to the top end of the tube 1 through an inorg. filler 5, and the rear end of the board 2 is supported with an elastic member at the rear end of the tube 1. Since only a part of the space between the tube 1 and board 2 is secured by the inorg. filler 5, the stress due to the thermal expansion coefficient difference between the tube 1 and board 2 is not exerted on the entire board 2, the wire breaking never occurs and hence a temp. sensor good in yield can be obtd.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a temperature sensor and a method for manufacturing the same.

[0002]

2. Description of the Related Art In a temperature sensor for detecting a high temperature by a temperature detecting element, a lead wire cannot be directly soldered to the temperature detecting element. That is, since the detection temperature is high, the soldered portion melts and the connection between the temperature detection element and the lead wire is disconnected.

Therefore, a temperature sensor has been proposed in which two conductive patterns are formed on a ceramic substrate, and a temperature detecting element is connected between the ends of the conductive patterns. That is, in this configuration, a conductive pattern is formed up to the rear end of the substrate, and the lead wire is connected at the rear end of the substrate which is sufficiently lower than the temperature detecting element.

[0004]

When a large number of such temperature sensors were manufactured, disconnection occurred inside the sensor,
It has been found that the yield is only 30% or less for good products. As a result of investigating the cause, this temperature sensor protects the temperature detection element at the tip of the substrate with a metal cap, stores the entire substrate in a metal cylinder, and fills both ends of this cylinder with inorganic filler. By filling the material, both ends of the board are fixed, but when the temperature sensor becomes high temperature, the board is damaged due to stress applied due to the difference in thermal expansion coefficient between the cylinder and the board, resulting in disconnection. Conceivable. Therefore, the conventional configuration has a problem that disconnection occurs frequently and the yield is very poor.

An object of the present invention is to solve the above-mentioned conventional problems and to provide a temperature sensor having a good yield.

[0006]

SUMMARY OF THE INVENTION In order to achieve the above object, the present invention provides a method of fixing a front end of a substrate to a front end of a cylindrical body with an inorganic filler, and a rear end of the substrate with a cylindrical body. It has a configuration supported by an elastic body on the rear end side,
With this configuration, since the rear end side of the substrate is supported by the elastic body, stress is not easily applied to the substrate even if expansion and contraction due to the difference in the thermal expansion coefficient between the cylindrical body and the substrate occurs, and as a result, the substrate is damaged. Therefore, it is possible to configure a temperature sensor having a good yield without disconnection.

[0007]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The invention according to claim 1 of the present invention is directed to a metal cylindrical body, a ceramic long substrate housed in the cylindrical body, and a rear surface from the front end side of the substrate surface. At least two conductive patterns provided on the end side, and a temperature detecting element connected between the front end sides of these conductive patterns, and the front end side of the substrate is fixed to the front end of the cylindrical body with an inorganic filler. At the same time, the rear end side of the substrate is supported by an elastic body on the rear end side of the cylindrical body, and only a part of the gap between the cylindrical body and the substrate is fixed with an inorganic filler. No stress is applied to the entire substrate, and no disconnection occurs. Accordingly, the temperature sensor having a good yield can be realized.

According to a second aspect of the present invention, the cylindrical body has an opening at a front end side and a rear end side, and the front end side is covered with an inorganic filler, and the front end of the substrate is contained in the inorganic filler. Since the temperature detecting element does not move in the cylinder even when it is vibrated at a high temperature, there is an effect that disconnection under the high temperature vibration can be prevented.

According to a third aspect of the present invention, a terminal connected to a rear end of at least two conductive patterns is fixed to a rear end of a substrate, and a lead wire is connected to the rear end of the terminal. Along with the connection configuration, a stretch-absorbing portion is formed between the front end portion and the rear end portion of the terminal, and the stretch-absorbing portion absorbs expansion and contraction due to a difference in thermal expansion coefficient between the cylindrical body and the substrate. This has the effect that disconnection can be prevented without applying stress to the substrate.

According to a fourth aspect of the present invention, the rear end portion of the terminal protrudes into the holding body, and the expansion and contraction absorbing portion is formed by bending the middle portion of the terminal. It has the effect that an effective expansion-contraction part can be formed.

According to a fifth aspect of the present invention, the terminal is made of stainless steel whose surface is nickel-plated. The terminal can be easily connected to the conductive pattern by soldering by nickel plating, and the material is stainless steel. This has the effect of having sufficient strength against the pulling of the lead wire and having the effect of preventing the terminal from rusting.

According to a sixth aspect of the present invention, the tip of the terminal has a U-shaped or U-shaped cross-section, and a substrate is inserted and fixed inside the terminal. This has the effect that the substrate can be fixed easily and reliably.

According to a seventh aspect of the present invention, a notch is provided at a part of the tip of the terminal, and the terminal and the conductive pattern can be securely connected by performing soldering at the notch. Having.

The invention described in claim 8 has an effect that a highly reliable temperature sensor can be constituted since the elastic body is made of silicon or polyimide and both are made of high heat resistant resin.

According to a ninth aspect of the present invention, an opening is formed in a portion of the cylinder corresponding to the temperature detecting element. When the substrate is fixed to the cylinder with an inorganic filler, the substrate is passed through the opening. The temperature sensor can be fixed while being held, and the temperature is directly transmitted to the temperature detecting element, so that a high-speed responsive temperature sensor can be configured.

According to a tenth aspect of the present invention, when the size of the opening is larger than the area of the temperature detecting element, and the substrate is fixed to the cylinder while holding the substrate through the opening, the size of the substrate fixing jig is increased. Can be larger than the cross-sectional area of the temperature detection element, which prevents the inorganic filler from adhering to the temperature detection element, and has the effect of forming a high-speed response temperature sensor because the temperature is directly transmitted to the temperature detection element. Have.

According to the eleventh aspect of the present invention, the temperature detecting element is formed of platinum or a thermistor, and has an effect of being able to measure a high temperature with high accuracy.

According to a twelfth aspect of the present invention, there is provided a metal cylindrical body, a ceramic long substrate housed in the cylindrical body, and at least a ceramic substrate provided from a front end side to a rear end side of the substrate surface. It is provided with two conductive patterns and a temperature detecting element connected between the front ends of these conductive patterns. The front end of the substrate is fixed to the front end of the cylinder with an inorganic filler, and An end side of the temperature sensor supported by an elastic body on a rear end side of the cylindrical body, through an opening formed in a portion corresponding to a temperature detecting element of the cylindrical body, is smaller than the area of the opening, and An inorganic filler hardening jig having a dent having a depth substantially equal to the distance from the tip of the cylindrical body to the tip of the opening by piercing a substrate fixing jig having a cross-sectional area larger than the area of the detection element so as to sandwich the front and back of the substrate In the depression In addition to filling the filling material, the tip of the cylindrical body is immersed in the depression, and the inorganic filler is penetrated into the tip of the cylindrical body to produce a temperature sensor. Since the inorganic filler is allowed to penetrate into the distal end portion of the cylindrical body while the inorganic filler is protected, there is an effect that the inorganic filler can be easily filled in a specified amount without adhering to the temperature detecting element.

According to a thirteenth aspect of the present invention, the temperature sensor is manufactured by curing the inorganic filler in the distal end of the cylindrical body while the distal end of the cylindrical body is immersed in the recess of the inorganic filler curing jig. It has an effect that the substrate and the substrate do not move during curing, and the substrate can be fixed to substantially the center of the cylinder.

According to a fourteenth aspect of the present invention, the substrate fixing jig and the inorganic filler curing jig are made of Teflon or a metal whose surface is coated with Teflon. Also, there is an effect that the inorganic filler is not fixed and the jig can be easily removed after the inorganic filler is cured.

According to a fifteenth aspect of the present invention, there is provided a metal cylindrical body, a ceramic long substrate housed in the cylindrical body, and at least a ceramic substrate provided from a front end side to a rear end side of the substrate surface. It is provided with two conductive patterns and a temperature detecting element connected between the front ends of these conductive patterns. The front end of the substrate is fixed to the front end of the cylinder with an inorganic filler, and An end side of the temperature sensor supported by an elastic body on a rear end side of the cylindrical body, through an opening formed in a portion corresponding to a temperature detecting element of the cylindrical body, is smaller than the area of the opening, and The substrate fixing jig having a cross-sectional area larger than the area of the detection element is inserted and the front and back of the substrate are sandwiched, from the rear end side of the cylindrical body, having a cross-sectional area smaller than a gap formed between the cylindrical body and the substrate, and From the rear end of the cylinder to the rear end of the opening An inorganic filler curing jig having a length shorter than the separation is inserted into the gap between the cylindrical body and the front and back of the substrate, the inorganic filler is injected from the opening, and cured to produce a temperature sensor. With the jig protecting the temperature detection element, the inorganic filler can be injected into the rear end of the opening of the cylinder and cured, so the inorganic filler can be easily filled without sticking to the temperature detection element Has the effect of being able to.

The invention according to claim 16 is to manufacture a temperature sensor by injecting a fixed amount of an inorganic filler by a dispenser, and has an effect that a specified amount of the inorganic filler can be easily injected.

According to a seventeenth aspect of the present invention, the substrate fixing jig and the inorganic filler curing jig are made of Teflon or a metal whose surface is coated with Teflon. Also, there is an effect that the inorganic filler is not fixed and the jig can be easily removed after the inorganic filler is cured.

Hereinafter, an embodiment of the present invention will be described with reference to FIG.
This will be described with reference to FIG. (First Embodiment) FIG. 1 is a schematic sectional view of a temperature sensor according to a first embodiment of the present invention, and FIG. 2 is a sectional view of a temperature detecting portion.

Reference numeral 1 denotes a cylindrical body made of heat-resistant stainless steel having an outer diameter of 3 mm and a thickness of 0.4 mm and having openings at the front and rear ends, and having a thickness of 0.5 mm, a width of 2 mm, and a length. A 70 mm alumina ceramic long substrate 2 is housed. A temperature detecting element 3 in the form of a film is formed on the tip side of the
It is formed by a method. Here, the temperature detection element 3 is A
Using a thermistor made of a composite oxide of l, Cr, and Fe, the length was 2 mm and the width was 1.5 mm. Two conductive patterns 4 for electrically detecting the resistance value are connected to the surface of the temperature detecting element 3. Here, the conductive pattern 4 was formed by printing and baking a platinum paste from the front end side to the rear end side of the substrate, and the width and pattern interval were each 0.5 mm.

The front end of the substrate 2 is fixed by covering the inside of the front end of the cylindrical body 1 with an inorganic filler 5. The inorganic filler 5 is mainly composed of alumina, silica, and Li ₂ O.
Was used, and was arranged such that the tip of the substrate 2 was located inside the paste.

The rear end of the substrate 2 was supported by fixing an elastic body 6 made of silicon to the rear end of the cylindrical body 1.

At the rear end of the conductive pattern 4, a 0.3 mm thick stainless steel terminal 7 having a nickel-plated surface and a U-shaped cross section is provided inside the U-shaped substrate 2. Is fixed by inserting. The state of insertion is shown in FIG. Although the terminal 7 has a U-shaped cross section in the present embodiment, the terminal 7 may have a U-shape, and any shape that is easy to manufacture may be selected. The terminal 7 has a rear end fixed in a holding body 8 made of glass fiber reinforced resin. The terminal 7 and the holder 8 were integrally formed by injection molding. Terminal 7
Is a stretch-absorbing portion 9 having a width of 0.3 mm and having a curved shape in the center thereof.
Is formed.

A lead wire 10 is connected to the rear end of the terminal 7 by welding. Welding is for obtaining sufficient tensile strength of the lead wire.

The distal end of the terminal 7 is partially provided with a U-shaped notch 11. High melting point solder 12
Is electrically connected to the conductive pattern 4 by soldering. FIG. 4 shows an enlarged view of the connection portion. The provision of the notch 11 ensures that the solder 12 adheres to the conductive pattern, and that the surface of the terminal 7 is nickel-plated so that the solder adheres to stainless steel. High reliability connection can be realized.

In the portion corresponding to the temperature detecting element 3 of the cylindrical body 1, an opening 13 having a length of 5 mm and a width of 1.7 mm, that is, an opening 13 larger than the area (2 × 1.5 mm) of the temperature detecting element is located at a symmetric position. As shown in FIG.

Reference numeral 17 denotes a temperature sensor mounting nut provided on the outer periphery of the cylinder 1. Next, a method of manufacturing the temperature detecting portion will be described.

FIG. 5 is an exploded view of the substrate 2 provided with the temperature detecting element 3 and the conductive pattern 4 and the cylinder 1 provided with the opening 13. First, the substrate 2 is inserted into the cylinder 1 in the direction of the arrow in FIG. Next, a Teflon-made substrate fixing jig 14 is inserted through the opening 13 so as to sandwich the front and back of the substrate 2.
The situation at this time is shown in FIG. Here, the substrate fixing jig 14
Has a cross-sectional area of 3 mm in length and 1.6 mm in width, ie, an opening 1
3 (5 × 1.7 mm) smaller than the temperature detecting element 3
(2 × 1.5 mm).

Next, as shown in FIG. 7, the inorganic filler 5 is filled in the depression 16 of the Teflon inorganic filler curing jig 15. The depth of the depression 16 is substantially equal to the distance from the tip of the cylindrical body 1 to the tip of the opening 13 (Lp in FIG. 7). The diameter is slightly larger than the diameter of the cylinder 1. This depression 16
The tip of the cylindrical body 1 is immersed in a state where the substrate 2 is fixed by the substrate fixing jig 14 in the inside. As a result, the inorganic filler 5 penetrates into the distal end portion of the cylindrical body 1 by a specified amount determined by the diameter and the depth of the depression 16.

In this state, the inorganic filler 5 is cured in a thermostat at 150 ° C. Thereafter, the substrate fixing jig 14 and the inorganic filler curing jig 15 are removed. At this time, both jigs 1
Since Nos. 4 and 15 are made of Teflon, the inorganic filler does not adhere thereto and can be easily removed. It should be noted that the substrate fixing jig 14 and the inorganic filler curing jig 15 have the same effect even if they are made of metal whose surface is coated with Teflon.

According to the above manufacturing method, the inorganic filler 5 does not adhere to the temperature detecting element 3 and only the front end of the substrate 2 is
Could be fixed almost in the center.

The temperature was detected electrically as a change in the resistance value of the temperature detecting element 3 depending on the temperature.

Ten prototypes of the temperature sensor having such a configuration were manufactured, and the yield was evaluated. As a result, all the wires were not disconnected, and the yield was significantly improved as compared with the conventional configuration. This is because the substrate 2 is fixed only at the front end of the cylindrical body 1, the rear end is supported by the elastic body 6, and the terminal 7 is provided with the expansion-contraction absorber 9, so that the cylindrical body 1 and the substrate 2 This is because the expansion and contraction of the substrate 2 caused by the difference in thermal expansion coefficient is absorbed by the expansion and contraction absorbing section 9 through the elastic body 6 and the substrate 2 is no longer stressed. As for the output characteristics, it was confirmed that good resistance temperature characteristics could be obtained as in the conventional example. As for reliability, as a result of a durability test under high-temperature vibration, no breakage occurred and it was found that the reliability was extremely good.

Further, as a result of evaluating the sensor responsiveness, the speed was increased by about 40% compared with the conventional example. In this configuration, the temperature detecting element is housed in a metal cap for protection in the conventional configuration, but in the present configuration, the temperature detecting element 3 is disposed inside the cylinder 1 and an opening is formed at the tip of the cylinder 1. This is because the provision of the portion 13 directly transmits the temperature change transmitted through the cap to the temperature detecting element 3.

In this embodiment, the elastic body 6 is made of silicon, but may be made of polyimide. Since polyimide has a higher heat-resistant temperature than silicon, it is effective in constructing a temperature sensor for further high-temperature use.

Furthermore, although the thermistor is used as the temperature detecting element 3, it may be made of platinum. In this case, although the rate of change in resistance due to temperature is smaller than that of the thermistor, since the film can be formed simultaneously with the conductive pattern 4, there is an advantage that the number of steps is reduced, and an appropriate temperature detecting element may be selected according to the application. In addition, when platinum is used, since the resistance change rate is small, high-precision resistance measurement is required. Therefore, if the conductive pattern 4 is made of four wires and the 4-wire resistance measuring method is used, the temperature of the conductive pattern 4 itself depends on the temperature. Since the resistance change can be canceled, the resistance change of only the temperature detecting element 3 can be obtained.

From the above, it was possible to realize a temperature sensor having a good yield. (Second Embodiment) As shown in FIG. 8, a temperature sensor according to a second embodiment of the present invention has many structural parts identical to those of the first embodiment. , To simplify the description. That is, the feature of this embodiment is that the substrate 2 is fixed to the cylindrical body 1 at the rear end of the opening 13 instead of fixing the front end of the substrate 2 with the inorganic filler 5.
Hereinafter, the temperature sensor actually manufactured in this manner will be described.

FIG. 8 is a sectional view of a temperature detecting portion. The inorganic filler 5 was filled over about 2 mm from the rear end of the opening 13, and the substrate 2 was fixed to the cylindrical body 1 at this portion.

The temperature detecting part was manufactured as follows. First, the substrate 2 is inserted into the cylinder 1 as shown in FIG. Next, a Teflon-made substrate fixing jig 14 is inserted through the opening 13 so as to sandwich the front and back of the substrate. The situation at this time is shown in FIG. Here, the cross-sectional area of the substrate fixing jig 14 was the same as that of the first embodiment.

Next, an inorganic filler hardening jig 15A having a shape shown in FIG. 9 is inserted from the rear end of the cylindrical body 1 into a gap between the front and back of the cylindrical body 1 and the substrate 2. Here, the length of the inorganic filler hardening jig 15A is shorter than the length from the rear end of the cylindrical body 1 to the rear end of the opening 13 by 2 mm. Further, the inorganic filler curing jig 15A
The base portion 18 is slightly larger than the cross-sectional area of the substrate 2,
A hole 19 having a depth substantially equal to the length (Lk in FIG. 9) of the rear end protruding portion of the substrate 2 is provided. The protruding portion of the rear end of the substrate 2 is inserted into the hole 19. Since the inorganic filler hardening jig 15A is elongated and small and has a complicated shape, it was formed by cutting stainless steel and coating the surface with a Teflon film.

FIG. 10 shows a state in which the inorganic filler hardening jig 15A is inserted into the gap between the front and back of the cylindrical body 1 and the substrate 2. In addition,
FIG. 10 is a view in which a part of the cylindrical body 1 is cut away for easy understanding.

Next, as shown in FIG. 10, the tip of the dispenser 20 is inserted into the gap between the openings 13 from both sides of the substrate, and the inorganic filler 5 is filled with the cylindrical body 1, the substrate 2, and the inorganic filler curing jig 15A. Is injected into the space defined by the specified amount.

In this state, the inorganic filler 5 is cured in a thermostat at 150 ° C. Thereafter, the substrate fixing jig 14 and the inorganic filler curing jig 15A are removed. At this time, since both the jigs are made of Teflon or stainless steel whose surface is coated with Teflon, the jig can be easily removed without the attachment of the inorganic filler.

The substrate 2 was fixed to the cylindrical body 1 by the above-described manufacturing method. In the above manufacturing method, the substrate fixing jig 1
After fixing the substrate 2 with 4, the inorganic filler hardening jig 15A is inserted into the cylindrical body 1. However, even if this procedure is reversed, the substrate 2 can be fixed in exactly the same manner.

It was confirmed that the temperature sensor manufactured in this manner exhibited good yield, output characteristics, and reliability, as well as high-speed response, as in the first embodiment.

When the temperature of a gas or the like that corrodes the elastic body 6 is measured, in the first embodiment, the gas flows in from the opening 13 and directly touches the elastic body 6 to cause corrosion. If the inorganic filler 5 is disposed at the rear end of the opening 13 as in the embodiment, the inorganic filler 5 prevents gas from flowing into the inside of the sensor, so that temperature measurement can be performed even with corrosive gas.

With the above configuration, a temperature sensor having a good yield can be realized.

[0053]

As is apparent from the above description, according to the present invention, a metal cylindrical body, a ceramic long substrate housed in the cylindrical body, and a front end side of the substrate surface. At least two conductive patterns provided on the rear end side, and a temperature detecting element connected between the front end sides of these conductive patterns, and the front end side of the substrate is made of an inorganic filler at the front end of the cylindrical body. In addition to fixing, the rear end side of the substrate is supported by an elastic body on the rear end side of the cylindrical body, and only a part of the gap between the cylindrical body and the substrate is fixed with an inorganic filler. The stress due to the difference in thermal expansion coefficient between the body and the substrate is not applied to the entire substrate, and no disconnection occurs. Therefore, an advantageous effect that a temperature sensor with a good yield can be provided can be obtained.

[Brief description of the drawings]

FIG. 1 is a schematic sectional view of a temperature sensor according to a first embodiment of the present invention.

FIG. 2 is a sectional view of a temperature detecting portion of the temperature sensor according to the first embodiment of the present invention.

FIG. 3 is a perspective view when the temperature sensor according to the first embodiment of the present invention is inserted into a terminal of a substrate.

FIG. 4 is an enlarged sectional view of a connection portion between a conductive pattern and a terminal of the temperature sensor according to the first embodiment of the present invention.

FIG. 5 is an exploded front view of a temperature detecting portion of the temperature sensor according to the first embodiment of the present invention.

FIG. 6 is a perspective view showing a substrate fixing method using a substrate fixing jig in the temperature sensor manufacturing method according to the first embodiment of the present invention.

FIG. 7 is a perspective view showing a method of filling the tip of the cylindrical body with the inorganic filler in the method of manufacturing the temperature sensor according to the first embodiment of the present invention.

FIG. 8 is a sectional view of a temperature detecting portion of a temperature sensor according to a second embodiment of the present invention.

FIG. 9 is a perspective view showing a method of fixing a substrate using an inorganic filler curing jig in a method of manufacturing a temperature sensor according to a second embodiment of the present invention.

FIG. 10 is a perspective view showing a method of filling a cylindrical body with an inorganic filler in a method of manufacturing a temperature sensor according to a second embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Cylindrical body 2 Substrate 3 Temperature detection element 4 Conductive pattern 5 Inorganic filler 6 Elastic body 7 Terminal 8 Holder 9 Expansion-contraction absorber 10 Lead wire 11 Notch 12 Solder 13 Opening 14 Substrate fixing jig 15, 15A Inorganic filler Curing jig 16 Depression 17 Nut 18 Base part 19 Hole 20 Dispenser

Claims (17)

[Claims] A metal cylindrical body, a ceramic long substrate housed in the cylindrical body, at least two conductive patterns provided from a front end side to a rear end side of the substrate surface; A temperature detecting element connected between the leading ends of these conductive patterns, and fixing the leading end of the substrate to the leading end of the cylindrical body with an inorganic filler; A temperature sensor supported by an elastic body on the rear end side. 2. The cylindrical body has an opening at a front end and a rear end thereof, and the front end is covered with an inorganic filler.
The temperature sensor according to claim 1, wherein the tip of the substrate is located within the inorganic filler. 3. A structure in which a front end of a terminal connected to a rear end of at least two conductive patterns is fixed to a rear end of a substrate, and a lead wire is connected to the rear end of the terminal. The temperature sensor according to claim 1, wherein an expansion-contraction absorber is formed between a front end and a rear end of the terminal. 4. The temperature sensor according to claim 3, wherein a rear end portion of the terminal protrudes into the holding body, and the expansion / contraction absorbing portion is formed by bending a middle portion of the terminal. 5. The temperature sensor according to claim 3, wherein the terminal is made of stainless steel whose surface is nickel-plated. 6. The terminal has a U-shaped cross section or
4. The temperature sensor according to claim 3, wherein the temperature sensor has a U-shape, and the rear end of the substrate is inserted and fixed therein. 7. The temperature sensor according to claim 3, wherein a notch is provided at a part of a tip portion of the terminal. 8. The temperature sensor according to claim 1, wherein the elastic body is made of silicon or polyimide. 9. The temperature sensor according to claim 1, wherein an opening is formed in a portion of the cylindrical body corresponding to the temperature detecting element. 10. The temperature sensor according to claim 9, wherein the size of the opening is larger than the area of the temperature detecting element. 11. The temperature sensor according to claim 1, wherein the temperature detecting element is platinum or a thermistor. 12. A metal cylinder, a ceramic long substrate housed in the cylinder, and at least two conductive patterns provided from the front end to the rear end of the surface of the substrate. A temperature detecting element connected between the leading ends of these conductive patterns, and fixing the leading end of the substrate to the leading end of the cylindrical body with an inorganic filler; In the temperature sensor supported by the elastic body on the rear end side, through an opening formed in a portion corresponding to the temperature detecting element of the cylindrical body, smaller than the area of the opening,
And, piercing the substrate fixing jig having a cross-sectional area larger than the area of the temperature detection element as if sandwiching the front and back of the substrate,
An inorganic filler curing jig having a dent having a depth substantially equal to the distance from the tip of the cylindrical body to the tip of the opening, while filling the hollow with the inorganic filler, and immersing the tip of the cylindrical body in the dent. And a method of manufacturing a temperature sensor in which an inorganic filler is penetrated into the tip of the cylindrical body. 13. The method of manufacturing a temperature sensor according to claim 12, wherein the inorganic filler in the distal end portion of the cylindrical body is cured while the distal end portion of the cylindrical body is immersed in the recess of the inorganic filler curing jig. 14. The method according to claim 12, wherein the substrate fixing jig and the inorganic filler curing jig are made of Teflon or a metal whose surface is coated with Teflon. 15. A metal cylinder, a ceramic long substrate housed in the cylinder, and at least two conductive patterns provided from the front end to the rear end of the surface of the substrate. A temperature detecting element connected between the leading ends of these conductive patterns, and fixing the leading end of the substrate to the leading end of the cylindrical body with an inorganic filler; In the temperature sensor supported by the elastic body on the rear end side, through an opening formed in a portion corresponding to the temperature detecting element of the cylindrical body, smaller than the area of the opening,
In addition, a substrate fixing jig having a cross-sectional area larger than the area of the temperature detecting element is inserted to clamp the front and back of the substrate, and has a cross-sectional area smaller than a gap formed between the cylindrical body and the substrate from the rear end side of the cylindrical body. And, an inorganic filler hardening jig having a length shorter than the distance from the rear end of the cylindrical body to the rear end of the opening is inserted into the gap between the cylindrical body and the front and back of the substrate, and the inorganic filler is removed from the opening. A method of manufacturing a temperature sensor that is injected and cured. 16. The method for manufacturing a temperature sensor according to claim 15, wherein a fixed amount of the inorganic filler is injected by a dispenser. 17. The method according to claim 15, wherein the substrate fixing jig and the inorganic filler curing jig are made of Teflon or a metal whose surface is coated with Teflon.