JPH11215791A - Rotation drive - Google Patents

Rotation drive

Info

Publication number
JPH11215791A
JPH11215791A JP2906098A JP2906098A JPH11215791A JP H11215791 A JPH11215791 A JP H11215791A JP 2906098 A JP2906098 A JP 2906098A JP 2906098 A JP2906098 A JP 2906098A JP H11215791 A JPH11215791 A JP H11215791A
Authority
JP
Japan
Prior art keywords
air
stator
motor
disposed
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2906098A
Other languages
Japanese (ja)
Inventor
Hiroyuki Hagiwara
裕之 萩原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2906098A priority Critical patent/JPH11215791A/en
Publication of JPH11215791A publication Critical patent/JPH11215791A/en
Pending legal-status Critical Current

Links

Landscapes

  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Brushless Motors (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
  • Permanent Magnet Type Synchronous Machine (AREA)

Abstract

PROBLEM TO BE SOLVED: To reduce runout in a radial direction while an object is rotating by disposing a magnetic circuit constituted of a plurality of magnets and a plurality of coils between two air bearings. SOLUTION: A rotor 2 and a stator 12, and a plate 3 and the stator 12 are disposed so as to have a slight clearance at a boundary part. By having air supplied from the outside flow into respective boundary parts from the stator 12, an air membrane is formed to attain the function of a bearing. The two air bearings are disposed at a motor housing 13, and a motor part 4 is disposed between the two air bearings 1. The supporting shaft 16 of the motor part 4 is integrally-fixed through another shaft 7, and a rotor yoke 6 formed out of magnetic substance and a plurality of magnets 5 are fixed to a support shaft 16. The disc-shaped scale 11 of an encoder is integrally formed at the end part of one air bearing 1, and the angle of a rotating part including the two air bearings 1 and the motor part 4 is measured.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、ハードディスクの
検査装置、サーボ信号を記録する装置または光ディスク
の試験装置等の各種生産装置に使用される回転駆動装置
に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rotary drive device used in various production devices such as a hard disk inspection device, a servo signal recording device, and an optical disk test device.

【0002】[0002]

【従来の技術】従来、この種の回転駆動装置として、デ
ィスクの試験装置等に好適に利用されるスピンドルモー
タが知られている。
2. Description of the Related Art Conventionally, as this kind of rotary drive device, there has been known a spindle motor suitably used for a disk test device or the like.

【0003】図5にスピンドルモータの構成を、図6に
その回動部の構成を示す。空気軸受け101はロータ1
02とステータ112と2枚のプレート103とで構成
される。ロータ102とステータ112とはその境界部
にわずかな空隙を持って配設されており、プレート10
3とステータ112も同様にその境界部にわずかな空隙
を持って配設されている。外部から供給される空気をス
テータ112から前記各境界部に流入する事によって空
気膜が構成され軸受けの機能を達成する。プレート10
3にはモータ104の支軸116が一体的に固定されて
おり、支軸116には磁性体からなるロータヨーク10
6及び複数の磁石105が固定されている。支軸116
の端部には支軸116を含む回動部の角度を計測するエ
ンコーダの円盤型スケール111が一体的に設けられて
いる。108はモータコイル、109はコア(磁心)、
113はモータハウジング、117はディスクを載置す
るテーブルを示す。
FIG. 5 shows a configuration of a spindle motor, and FIG. 6 shows a configuration of a rotating portion thereof. The air bearing 101 is the rotor 1
02, a stator 112, and two plates 103. The rotor 102 and the stator 112 are disposed with a slight gap at the boundary between the rotor 102 and the stator 112.
Similarly, the stator 3 and the stator 112 are disposed with a slight gap at the boundary. The air supplied from outside flows from the stator 112 into each of the boundary portions to form an air film, thereby achieving a bearing function. Plate 10
3, a support shaft 116 of the motor 104 is integrally fixed, and the support shaft 116 has a rotor yoke 10 made of a magnetic material.
6 and a plurality of magnets 105 are fixed. Support shaft 116
Is integrally provided with a disk-shaped scale 111 of an encoder for measuring the angle of the rotating portion including the support shaft 116. 108 is a motor coil, 109 is a core (magnetic core),
Reference numeral 113 denotes a motor housing, and 117 denotes a table on which a disk is mounted.

【0004】[0004]

【発明が解決しようとしている課題】しかしながら、上
述の従来例では回転支持を行なう空気軸受けの剛性不足
のために、対象物の回転時のラジアル方向の振れが発生
するといった欠点があった。本発明は、上述の従来例に
おける問題点に鑑みてなされたもので、対象物の回転時
のラジアル方向の振れを低減することを目的とする。
However, in the above-mentioned conventional example, there is a drawback that radial deflection occurs during rotation of the object due to insufficient rigidity of the air bearing for supporting the rotation. SUMMARY OF THE INVENTION The present invention has been made in view of the above-described problems in the conventional example, and has as its object to reduce radial deflection during rotation of an object.

【0005】[0005]

【課題を解決するための手段】そこで本発明による回転
駆動装置では、空気軸受けを2個を配設し、前記2個の
空気軸受けの間に複数個の磁石と複数個のコイル等で構
成される磁気回路を配設する事によって前記の課題を解
決するものである。
Therefore, in the rotary driving device according to the present invention, two air bearings are provided, and a plurality of magnets and a plurality of coils are provided between the two air bearings. This problem is solved by disposing a magnetic circuit.

【0006】[0006]

【実施例1】以下、図面を用いて本発明の実施例を説明
する。図1に本発明の一実施例に係るスピンドルモータ
の構成を、図2にその回動部の構成を示す。空気軸受け
1はロータ2とステータ12と2枚のプレート3(3
a,3b)とで構成される。ロータ2とステータ12は
その境界部にわずかな空隙を持つように配設されてお
り、プレート3とステータ12も同様に境界部にわずか
な空隙を持つように配設されている。外部から供給され
る空気をステータ12から前記各境界部に流入する事に
よって空気膜が形成され、軸受けの機能を達成する。こ
の空気軸受け1を2個、モータハウジング13に配設
し、前記2個の空気軸受け1の間にモータ部4を配設す
る。プレート3にはモータ部4の支軸16が別の軸7を
介して一体的に固定されており、支軸16には磁性体か
らなるロータヨーク6及び複数の磁石5が固定されてい
る。一方(図面で下側)の空気軸受け1の端部にはエン
コーダの円盤型スケール11が一体的に設けられ前記2
個の空気軸受け1とモータ部4を含む回動部の角度を計
測する。8はモータコイル、9はコア(磁心)、13は
モータハウジング、117はディスクを載置するテーブ
ルを示す。
Embodiment 1 Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 shows a configuration of a spindle motor according to an embodiment of the present invention, and FIG. 2 shows a configuration of a rotating portion thereof. The air bearing 1 includes a rotor 2, a stator 12, and two plates 3 (3
a, 3b). The rotor 2 and the stator 12 are disposed so as to have a small gap at the boundary, and the plate 3 and the stator 12 are also disposed so as to have a small gap at the boundary. An air film is formed by flowing air supplied from the outside from the stator 12 into each of the above-mentioned boundaries, thereby achieving a bearing function. The two air bearings 1 are provided in the motor housing 13, and the motor unit 4 is provided between the two air bearings 1. A support shaft 16 of the motor unit 4 is integrally fixed to the plate 3 via another shaft 7, and a rotor yoke 6 made of a magnetic material and a plurality of magnets 5 are fixed to the support shaft 16. At one end of the air bearing 1 (lower side in the drawing), a disk-shaped scale 11 of an encoder is integrally provided.
The angle of the rotating part including the air bearing 1 and the motor part 4 is measured. Reference numeral 8 denotes a motor coil, 9 denotes a core (magnetic core), 13 denotes a motor housing, and 117 denotes a table on which a disk is placed.

【0007】[0007]

【実施例2】図3に本発明の他の実施例に係るスピンド
ルモータの構成を、図4にその回動部の構成を示す。空
気軸受けはロータ23(23aまたは23b)とステー
タ22と1枚のプレート21(21aまたは21b)と
で構成される。ロータ23とステータ22はその境界部
にわずかな空隙を持って配設されており、プレート21
とステータ22も同様に境界部にわずかな空隙を持って
配設されている。外部から供給される空気をステータ2
2から前記各境界部に流入する事によって空気膜が形成
され軸受けの機能を達成する。この空気軸受けを2個、
モータハウジング28に配設し、前記2個の空気軸受け
の間にモータ部を配設する。ロータ23の一端にはモー
タ部の支軸33が一体的に構成されており、支軸33に
は磁性体からなるロータヨーク25及び複数の磁石24
が固定されている。一方の空気軸受けのプレート21b
の端部にはエンコーダの円盤型スケール27が一体的に
設けられ前記2個の空気軸受けモータ部を含む回動部の
角度を計測する。32はディスクを載置するテーブルを
示す。
Embodiment 2 FIG. 3 shows a configuration of a spindle motor according to another embodiment of the present invention, and FIG. 4 shows a configuration of a rotating portion thereof. The air bearing includes a rotor 23 (23a or 23b), a stator 22, and one plate 21 (21a or 21b). The rotor 23 and the stator 22 are disposed with a slight gap at the boundary between the rotor 23 and the stator 22.
Similarly, the stator 22 is also provided with a slight gap at the boundary. Air supplied from outside is supplied to the stator 2
The air film is formed by flowing into each of the boundary portions from 2 to achieve the function of the bearing. Two of these air bearings,
The motor unit is disposed on the motor housing 28, and a motor unit is disposed between the two air bearings. At one end of the rotor 23, a support shaft 33 of a motor unit is integrally formed. The support shaft 33 includes a rotor yoke 25 made of a magnetic material and a plurality of magnets 24.
Has been fixed. Plate 21b of one air bearing
A disk-shaped scale 27 of an encoder is integrally provided at an end of the rotary shaft, and measures an angle of a rotating unit including the two air bearing motor units. Reference numeral 32 denotes a table on which a disk is placed.

【0008】[0008]

【発明の効果】以上詳細に説明したように本発明による
回転駆動装置は空気軸受けを2個配設し、その間にモー
タユニットを構成することによって、回転支持を行なう
空気軸受けの剛性が倍増し、対象物の回転時のラジアル
方向の振れを十分に抑えることが可能となった。
As described in detail above, the rotary drive device according to the present invention has two air bearings and a motor unit between them, thereby doubling the rigidity of the air bearing that supports rotation. It has become possible to sufficiently suppress the radial deflection during rotation of the object.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本発明の一実施例に係るスピンドルモータの
構成図である。
FIG. 1 is a configuration diagram of a spindle motor according to one embodiment of the present invention.

【図2】 図1のスピンドルモータの回動部の構成を示
す図である。
FIG. 2 is a diagram illustrating a configuration of a rotating unit of the spindle motor of FIG. 1;

【図3】 本発明の他の実施例に係るスピンドルモータ
の構成図である。
FIG. 3 is a configuration diagram of a spindle motor according to another embodiment of the present invention.

【図4】 図3のスピンドルモータの回動部の構成を示
す図である。
FIG. 4 is a diagram illustrating a configuration of a rotating unit of the spindle motor of FIG. 3;

【図5】 従来例のスピンドルモータの構成図である。FIG. 5 is a configuration diagram of a conventional spindle motor.

【図6】 図5のスピンドルモータの回動部の構成を示
す図である。
FIG. 6 is a diagram illustrating a configuration of a rotating unit of the spindle motor in FIG. 5;

【符号の説明】[Explanation of symbols]

1:空気軸受け、2,23(23a,23b):ロー
タ、3(3a,3b),21(21a,21b):プレ
ート、4:モータ部、5:磁石、6:ロータヨーク、
7:別の軸、8:モータコイル、9:コア(磁心)、1
2,22:ステータ、13,28:モータハウジング、
16,33:支軸、17,32:テーブル。
1: air bearing, 2, 23 (23a, 23b): rotor, 3 (3a, 3b), 21 (21a, 21b): plate, 4: motor part, 5: magnet, 6: rotor yoke,
7: another axis, 8: motor coil, 9: core (magnetic core), 1
2,22: Stator, 13,28: Motor housing,
16, 33: spindle, 17, 32: table.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 流体を媒体とする軸受けと、電磁モータ
と、エンコーダとを用いた回転駆動装置において、前記
流体を媒体とする軸受けを2個配設し、前記流体を媒体
とする2個の軸受けの間に前記モータを配置し、前記流
体を媒体とする一方の軸受けを挟んで前記モータとは逆
側の該軸受けの回動部に前記エンコーダ用の円盤状スケ
ールを配設したことを特徴とする回転駆動装置。
In a rotary drive device using a bearing using a fluid as a medium, an electromagnetic motor, and an encoder, two bearings using the fluid as a medium are provided, and two bearings using the fluid as a medium are provided. The motor is arranged between bearings, and the disk-shaped scale for the encoder is arranged on a rotating portion of the bearing opposite to the motor with one of the bearings using the fluid as a medium. And a rotation drive device.
JP2906098A 1998-01-28 1998-01-28 Rotation drive Pending JPH11215791A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2906098A JPH11215791A (en) 1998-01-28 1998-01-28 Rotation drive

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2906098A JPH11215791A (en) 1998-01-28 1998-01-28 Rotation drive

Publications (1)

Publication Number Publication Date
JPH11215791A true JPH11215791A (en) 1999-08-06

Family

ID=12265835

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2906098A Pending JPH11215791A (en) 1998-01-28 1998-01-28 Rotation drive

Country Status (1)

Country Link
JP (1) JPH11215791A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102134789B1 (en) * 2019-11-14 2020-07-16 시너스텍 주식회사 Rotate unit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102134789B1 (en) * 2019-11-14 2020-07-16 시너스텍 주식회사 Rotate unit

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