JPH11213727A - Lighting system, and lighting system in clean room - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a lighting system that is excellent in illumination efficiency and can prevent dust from adhering. SOLUTION: A lighting system 20 in a clean room has a frame member 21 to support a filter on a ceiling part and is so structured as to be attached to the frame member 21 and illuminate its lower side area with a fluorescent lamp 25. In this case, a reflecting plate 22 attached to the frame member 21 and a fixing means 31 to fix the reflecting plate 22 on the frame member 21 are provided for it. In addition, shading means 23, 36 are formed in between the reflecting plate 22 and the frame member 21.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a lighting device, and more particularly to a reflector of a lighting device used in semiconductor manufacturing, biotechnology, and a clean room in an operating room.

[0002]

2. Description of the Related Art For example, in the manufacture of a semiconductor device, a predetermined process is generally performed inside a clean room in order to prevent dust from adhering. In this clean room, a high-performance filter for circulating clean air is provided independently for each unit on the ceiling side, and each unit is arranged and mounted in the vertical and horizontal directions. From each unit of these high-performance filters, clean air from which dust has been removed is blown downward.

On the ceiling side, a portion between these units is a frame made of aluminum.
The above-mentioned fluorescent lamp is attached to this frame. And by illuminating with this fluorescent light,
Brightness has been secured to perform work inside the clean room.

[0004]

In recent years, units such as ducts have been mounted between the high-performance filter and the ceiling upper wall in order to purify the air circulating from the high-performance filter at a high level. However, in this case, the portion where the conventional frame is located becomes high due to the high wall surface above the ceiling and the location of various production facilities. For this reason, the fluorescent lamp provided on the frame is separated from the work site, which causes a problem that the illuminance by the fluorescent lamp is not improved.

[0005] Further, the illumination light emitted from the fluorescent lamp does not always go to the work site, but some illumination light goes to the high-performance filter located on the upper side. For this reason, the fluorescent lamp does not have a good efficiency of emitting illumination light.

Further, since the air is blown downward from the high-performance filter, in the case of the conventional reflecting plate, dust easily accumulates on the upper side of the fluorescent lamp due to the collision of air. If the dust is blown away, the dust will scatter to the work area below,
There is a disadvantage that the yield of semiconductor manufacturing is not good.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a lighting device which has better lighting efficiency than the prior art and can prevent the attachment of dust. is there.

[0008]

In order to solve the above-mentioned problems, the invention according to claim 1 has a frame member for supporting a filter on a ceiling portion, and is attached to the frame member and a fluorescent lamp is provided on a lower side. A lighting device in a clean room, comprising: a reflector attached to the frame member; and fixing means for fixing the reflector to the frame member.

According to a second aspect of the present invention, there is provided an illumination device which is attached to a frame member and illuminates a lower side of the frame member with a fluorescent lamp.
An illumination device comprising: a shielding unit that covers a gap generated between the reflection plate and the frame member; and a fixing unit that fixes the reflection plate to the frame member.

According to a third aspect of the present invention, an inclined portion for reflecting illumination light toward a side of the reflector along a longitudinal direction of the reflector is formed at a central portion in a width direction of the reflector. 3. The lighting device according to claim 2, wherein:

According to a fourth aspect of the present invention, the reflecting plate includes:
The lighting device according to claim 1 or 2, wherein locking members for locking the fluorescent lamp are provided at appropriate intervals.

[0012] According to the first aspect of the present invention, since the structure includes the reflecting plate attached to the frame member inside the clean room and the fixing means for fixing the reflecting plate to the frame member, It is possible to improve the brightness inside the clean room by reflecting the illumination light from the fluorescent lamp.

For this reason, it is possible to reduce the light loss by efficiently reflecting the illumination light emitted from the fluorescent lamp. According to the invention of claim 2, a reflector attached to the frame member, shielding means for covering a gap generated between the reflector and the frame member, and fixing means for fixing the reflector to the frame member; Therefore, it is possible to prevent dust from entering a gap generated between the reflection plate and the frame member. For this reason, it is possible to prevent dust from entering the gap and accumulating on the back surface of the reflection plate, so that the accumulated dust is not blown away and does not adversely affect the work area below.

According to the third aspect of the present invention, an inclined portion for reflecting the illumination light toward the side of the reflector along the longitudinal direction of the reflector is formed at the central portion in the width direction of the reflector. Therefore, when the illumination light emitted above the fluorescent lamp is reflected by the reflector, it is possible to prevent the illumination light from returning to the fluorescent lamp again. For this reason, all the light emitted from the fluorescent lamp can be reflected by the reflector, and the illumination efficiency is improved.

According to the fourth aspect of the present invention, since the reflecting plate is provided with locking members for locking the fluorescent lamp at appropriate intervals, the heat generated by the fluorescent lamp through the locking member is provided. Can be transmitted to the reflection plate. For this reason,
It is possible to improve the characteristics of the fluorescent lamp due to heat.

[0016]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIG. 1 or FIG. The lighting device 20 shown in FIG. 1 is adapted to be attached to the frame member 21 at this upper end. This lighting device 20 has a reflection plate 22. The reflection plate 22 is a long member having a length of, for example, about 1185 mm and a width of about 80 mm, and is formed so that the cross-sectional shape is the same at any position.

The above-described width of the reflection plate 22 is a size corresponding to the width of the frame member 21. In order to guide the fitting into the frame member 21, cover portions 23 are formed at both ends of the reflection plate 22, and are provided so that the fitting into the frame member 21 is surely performed.

The plate surface extending from both ends of the reflection plate 22 toward the center side has a side inclined portion 24 inclined upward at an appropriate angle. The angle of inclination of the side inclined portion 24 is set at an angle for improving the reflectivity of the fluorescent lamp 25 attached to the reflecting plate 22 so that the illumination light is prevented from traveling upward from the fluorescent lamp 25. Is formed.

In the present embodiment, the side inclined portion 24 is bent at the end portion in the width direction so as to increase the inclination angle, whereby the lower side of the illumination light emitted from the fluorescent lamp 25 is formed. It is configured such that reflection to the side can be favorably performed.

A central inclined portion 26 is formed on the central side of the reflective plate 22 with respect to the lateral inclined portion 24. The central inclined portion 26 is formed so as to be inclined downward from the side inclined portion 24 toward the center of the reflective plate 22 when the reflective plate 22 is attached to the frame member 21. That is, the reflection plate 22 is formed in a shape depressed downward at the center.

A fluorescent lamp 25 is provided on the inner side of the reflection plate 22.
Is attached. The fluorescent lamp 25 is connected to the reflection plate 22.
Is mounted via a metal lighting holder 27. The illumination holder 27 has a mounting portion 28 on the upper end side, and the mounting portion 28 is fixed to the central inclined portion 26 by, for example, a screw to attach the illumination holder 27.

The illumination holder 27 is formed by bending a metal plate-like member. The mounting height of the fluorescent lamp 25 from the mounting portion 28 and the mounting of the fluorescent lamp 25 at the center of the reflector 22 are set. Adjustment support section 29
have. The other end of the mounting portion 28 of the adjustment support portion 29 is a holder portion 30.

The inner periphery of the holder 30 is provided with the fluorescent lamp 2
5 has an inner diameter that is slightly smaller than the outer diameter of the holder 5.
The other end is bent radially outward. For this reason, by using the elastic force of the holder 30, the fluorescent lamp 25 can be locked well.

The reflection plate 22 is locked by a reflection plate fixing bracket 31 as fixing means. This reflector fixing bracket 31
Is formed in a flat plate shape, and a sticking portion 32 on which a double-sided tape is stuck, for example,
Provided at right angles from both ends of the reflection plate 22.
Bent portion 33 for locking this reflector fixing bracket 31
It is composed of

At the lower end of the bent portion 33, a locking claw 3
4 are formed. The locking claw 34 is connected to the reflection plate 2.
The reflector plate fixing bracket 31 is hooked and locked with respect to 2. For this reason, locking holes 35 are formed in the reflection plate 22 corresponding to the locking portions of the locking claws 34. The locking hole 35 is provided between the upper surface of the reflection plate 22 and the reflection fixture 31 when the reflection fixture 31 is hooked.
Is formed at a position having an appropriate gap.

Here, FIG. 1 and FIG.
The locking claw 3 is inserted into the locking hole 35 from the inside of the
Although the configuration in which the locking member 4 is locked has been described, the locking hole 35 may be formed in any place as long as it can lock the reflection plate 22 well. However,
In the above-described embodiment, in order not to impair the reflectivity of the illuminating light by the reflection plate 22, the locking portion 35 is formed in the cover portion 23.

The reflection fixing bracket 31 and the locking holes 34 are arranged at appropriate intervals in order to maintain good attachment of the reflection plate 22.
In this embodiment, the gaps are attached to both ends of the reflection plate 22.

The reflection plate 22 is provided with its both ends open when attached to a frame member 21 made of a material such as aluminum. In order to prevent dust from entering these ends, a closing member is provided. 36 are attached to both ends. The closing member 36 is formed in a flat plate shape to close portions between both ends of the reflection plate 22 and the frame member 21, and for locking the closing member 36 to an end of the reflection plate 22. In addition, it is formed in a size to contact the inner side of the reflection plate 22 and the frame member 21.

The reflection plate 22 and the closing member 36
In order to make the surface flush, a step may be formed in the closing member 36, and the other side of the portion in contact with the reflector 22 may be formed to be flush with the reflector 22.

According to the illumination device 20 having such a configuration,
Since the fluorescent lamp 25 is configured to be attached to the reflection plate 22, it is possible to reflect the illumination light toward the high-performance filter downward. For this reason, in the work area below the fluorescent lamp 25, the brightness is improved, and the illumination light can be effectively used, so that energy can be efficiently used, which contributes to energy saving.

The reflection plate 22 has a cover portion 23 whose upper end is bent upward.
It is possible to prevent dust from entering the back surface of the reflection plate 22 from the side in the width direction.

The reflecting plate 22 includes the reflecting plate 2.
Since the closing members 36 for closing both ends in the longitudinal direction are attached, it is possible to prevent dust from entering from both ends in the longitudinal direction.

Further, a central inclined portion 26 is formed at the central portion in the width direction of the reflecting plate 22, and the illumination light does not reach the fluorescent lamp 25 at the central inclined portion 26 so that the reflecting plate 22
Of the fluorescent lamp 25
The illumination light emitted from the lamp does not travel to the fluorescent lamp 25, so that the efficiency of the illumination light can be improved, and the brightness at the lower side is improved.

Further, since the fluorescent lamp 25 is configured to be locked by the illumination holder 27, it is possible to transmit heat by the lighting of the fluorescent lamp 25 to the reflection plate 22 via the illumination holder 27. This makes it possible to keep the temperature of the fluorescent lamp 25 low by conduction of heat, and the fluorescent lamp 2
5 Contributes to longer life and higher efficiency.

While the embodiment of the present invention has been described above, the present invention can be variously modified in addition to the above. This is described below. In the above embodiment, the configuration in which the fluorescent lamp 25 is locked to the illumination holder 27 has been described. However, in addition to this, the configuration in which the fluorescent lamp 25 is locked only to the socket, or the fluorescent lamp 25 is connected to the illumination holder 27 and the socket. A configuration in which both are locked may be employed. In this case, the socket also has a role as a fixing means. However, since the reflecting plate 22 is also fixed by the reflecting plate fixing bracket 31 as the fixing means, the lighting device 20 is satisfactorily locked. ing.

Further, a screw for locking the illumination holder 27 is extended and screwed to the frame member 21, whereby the illumination device 20 and the reflection plate 22 are connected to the frame member 21.
It is good also as a structure which is locked to. In this case, the reflector fixing bracket 31 also serves as a fixing means, and the reflector fixing bracket 31 can be omitted.

In the above-described embodiment, the reflector 22 is mounted and fixed by the reflector fixing bracket 31. However, the reflector 22 may be directly fixed to the frame member 21 by, for example, screws. I do not care. In addition, various modifications can be made without departing from the scope of the present invention.

[0038]

As described above, according to the first aspect of the present invention, there is provided a reflection plate attached to the frame member inside the clean room, and fixing means for fixing the reflection plate to the frame member. With this configuration, it is possible to improve the brightness inside the clean room by reflecting the illumination light from the fluorescent lamp by the reflector.

Therefore, it is possible to reduce the light loss by efficiently reflecting the illumination light emitted from the fluorescent lamp. According to the second aspect of the present invention, a reflecting plate attached to the frame member, a shielding unit for covering a gap generated between the reflecting plate and the frame member, and a fixing unit for fixing the reflecting plate to the frame member. Therefore, it is possible to prevent dust from entering a gap generated between the reflection plate and the frame member. For this reason, it is possible to prevent dust from entering the gap and accumulating on the back surface of the reflection plate, so that the accumulated dust is not blown away and does not adversely affect the work area below.

According to the third aspect of the present invention, an inclined portion for reflecting the illumination light toward the side of the reflector along the longitudinal direction of the reflector is formed at the central portion in the width direction of the reflector. Therefore, when the illumination light emitted above the fluorescent lamp is reflected by the reflector, it is possible to prevent the illumination light from returning to the fluorescent lamp again. For this reason, all the light emitted from the fluorescent lamp can be reflected by the reflector, and the illumination efficiency is improved.

According to the fourth aspect of the invention, since the reflecting plate is provided with the locking members for locking the fluorescent lamp at appropriate intervals, the fluorescent lamp emits light through the locking member. Heat can be transmitted to the reflector. For this reason, it becomes possible to improve the characteristics of the fluorescent lamp due to heat.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a configuration of a lighting device according to an embodiment of the present invention.

FIG. 2 is an exemplary front view showing the configuration of the lighting device according to the embodiment;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 20 ... Illumination device 21 ... Frame member 22 ... Reflector 23 ... Covering part 24 ... Side inclined part 25 ... Fluorescent lamp 26 ... Central inclined part 27 ... Lighting holder 31 ... Reflector fixing bracket 36 ... Closure member

Continued on the front page (72) Inventor Kunio Hayashi 3-35, Honcho, Okaya City, Nagano Prefecture Inside Izzet Co., Ltd.

Claims (4)

[Claims] 1. A lighting device in a clean room having a frame member for supporting a filter on a ceiling portion, the lighting device being mounted on the frame member and illuminating a lower side with a fluorescent lamp, wherein a reflector attached to the frame member; A lighting device in a clean room, comprising: fixing means for fixing the reflection plate to the frame member. 2. An illumination device mounted on a frame member and illuminating a lower side of the frame member with a fluorescent lamp, wherein a reflecting plate mounted on the frame member and a cover for covering a gap generated between the reflecting plate and the frame member. And a fixing means for fixing the reflection plate to the frame member. 3. An inclined portion for reflecting illumination light toward a side of the reflector along a longitudinal direction of the reflector at a central portion in a width direction of the reflector. The lighting device according to claim 2. 4. The lighting device according to claim 1, wherein the reflecting plate is provided with locking members for locking the fluorescent lamp at appropriate intervals.