JPH11213086A - Oscillation mirror type scanner - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the size and weight of an oscillation mirror type scanner, to eliminate the necessity of a rotary shaft, a bearing and a mechanical return spring and to attain an optional required maximum rotation angle. SOLUTION: This scanner has an oscillation mirror 1m, a rotational oscillator 1 with oscillation magnets 1g, a rotational oscillator pivoting means 2 for rotatably pivoting the oscillator 1, and an electric driving coil 4 surrounding the oscillator 1. The means 2 consists of an oscillator pivoting plate 21, a bendable plate 22, a roof type projected body 23, and a mounting base 24. The plate 22 is made of a flexible and elastic material and is recessed on both the right and left side faces like a curve. The projected body 23 projects its front like a roof shape so as to rotate the oscillator 1 up to an optional required maximum rotation angle. The magnetic flux of each oscillation magnet 1g crosses with the coil 4.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a movable reflecting mirror type scanning device capable of scanning a light beam over a wide angle range. In particular, the present invention relates to a vibrating mirror type scanning device for use in an optical information reading device that reads a barcode symbol on an optical recording medium.

[0002]

2. Description of the Related Art A light beam scanning device used in a conventional optical information reading device includes (1) a device in which a polygon mirror and a rotary drive motor are connected by a rotating shaft, and (2) a single surface mirror and a galvanometer. A motor and a motor connected by a rotating shaft are generally used. FIG. 15A is a perspective view of (1) a light beam scanning device using a borgon mirror and a rotary drive motor. In the same figure (a), pm is a polygon mirror, d
m is a rotary drive motor. As shown, the polygon mirror pm and the rotary drive motor dm are configured separately from each other, and are connected directly or via a speed reduction mechanism. FIG. 15B is a perspective view of (2) a light beam scanning device using a single surface mirror and a galvano motor.
In FIG. 3B, sm is a single-sided mirror, and gm is a galvano motor. Single-sided mirror sm and galvano motor g
m, as shown in the figure, are formed separately from each other, and both rotating shafts are directly connected.

However, in the first light beam scanning device using the polygon mirror pm and the rotary drive motor dm, the height is increased because the polygon mirror pm and the rotary drive motor dm are formed separately. It is difficult to greatly reduce the dimension in the direction (ie, the rotation axis direction), and since the rotation drive motor dm is used, the dimension in the front-rear direction (ie, the direction perpendicular to the rotation axis direction) is reduced. It is difficult to further reduce. In addition, single-sided mirror sm and galvano motor g
In the second light beam scanning device using m, since the single-sided mirror sm and the galvano motor gm are formed separately from each other, the dimension in the height direction (that is, the rotation axis direction) is further reduced. And the use of the galvano motor gm, it is difficult to further reduce the dimension in the front-rear direction (that is, the direction perpendicular to the rotation axis direction).

Therefore, the inventor of the present application firstly disclosed a vibrating mirror type scanning apparatus in which the dimensions in the direction of the rotation axis and in the front-rear direction are further reduced by integrating the reflection mirror, the movable magnet and the rotation axis. Invented (Japanese Unexamined Patent Publication No. 7-261109)
JP-A-8-129600). FIG.
FIGS. 2A and 2B are explanatory views of one embodiment, in which FIG. 1A is a plan view, FIG. 1B is a front view, and FIG. 1C is a side view.
In the figure, 1 is a rotating vibrator, 3 is a rotating shaft, 4 and 4 are first and second electric drive wires, and 71 is a _first magnetic yoke.
Sides, 7 ₂ and the second side of the magnetic yoke, 7 _c binding portion of the magnetic yoke, h is the holder. The rotating vibrator 1 includes a movable mirror 1m and a pair of movable magnets 1g, 1g.

The upper end and lower end of the rotating shaft 3 of the rotating vibrator 1 are supported by a pair of bearings (not shown). The first side 7 ₁ of the magnetic yoke is curved convexly to the left, the magnetic yoke also the interior of the first electrical drive line wheels 4 that is curved in a convex penetrating in leftward, curved convexly rightward first side 7 _2, the same through the interior of the second electrical drive line wheels 4 that is curved convexly toward the right. 1 g of a pair of movable magnets,
The magnetic flux generated by 1 g is linked to the winding portions of the first and second electric driving wire rings 4 and 4 that are adjacent to each other. Therefore, when the alternating current (alternating voltage) is supplied to the first and second electric drive wire rings 4 and 4, the movable mirror 1m starts rotating and oscillating. The oscillating mirror type scanning device is a result of the above-mentioned invention,
15. Height dimension in the axial direction 8.6 mm, width dimension in the horizontal direction
5mm, depth dimension of 15.55mm in the front-back direction,
Miniaturized.

[0006]

However, today, more than three years later, according to the results of research conducted by the present inventors, it has been found that the light beam scanning type optical information reading device has been further improved in convenience and improved. In order to expand its use and create new usage patterns, the size of the oscillating mirror scanning device, which is the core of the device, should be further reduced, and the dimension in the front-rear direction should be significantly reduced (ultra thinner) ) And further reduction of the overall weight of the device, especially of the rotating vibrator (ultra-lightening), was found to be indispensable. For those who are trying to achieve such a goal, the rotating shafts, bearings, and return springs that have supported the rotating vibrating body with the mirror so far are now the largest fetters or bottlenecks. It turned out that it was converted to (Airo). Further, it is necessary to further improve the scanning frequency and the maximum scanning angle of the light beam, and to control the correction of the scanning characteristics and the temperature characteristics of the light beam. The necessity of a signal, and therefore, the instantaneous value of the rotation angle of the same beam every moment (continuously)
The need for a new rotation angle detection system that can detect this has also been identified.

[0007]

SUMMARY OF THE INVENTION Therefore, a first object of the present invention is to further reduce the outer dimensions of a vibrating mirror type scanning device, and to greatly reduce the front-to-rear dimension in particular (i.e., ultra-thin). Shape), greatly reduce the distance between the pivot point (line) and the oscillating mirror (should be reduced to 1.2 mm or less), and at the same time, further reduce the weight of the entire device. In particular, to further reduce the size and weight (ultra-lightening) of the rotating vibrating body, which is an essential part of the vibration vibrating body (simply dare to say, ultra-small vibration with dimensions of 2.5 x 4.0 x 0.3 mm or less) Realizing a mirror). A second object of the invention of the present application is to provide a new rotary vibrating body which can obviate the need for a conventional rotary shaft, bearing and return spring which have previously supported a rotary vibrating body with a mirror. It is to provide a bearing means. A third object of the invention of this application is to make it possible to rotate the rotating vibrator 1 to any desired maximum rotation angle (for example, when the light beam diameter is about 1 mm).
To satisfy the required maximum scanning angle of 50 degrees).

A fourth object of the invention of the present application is to increase the seismic strength in the left-right direction and the rotation axis direction so that the scanning beam light in the left-right direction or the rotation axis direction caused by an external impact or the like is not improved. An object of the present invention is to realize a vibrating mirror type scanning device capable of greatly reducing desired vibration. A fifth object of the invention of the present application is to provide a new method capable of instantaneously detecting the instantaneous value of the rotation angle of the rotating vibrating body, that is, the instantaneous value of the rotation angle of the light beam. Another object of the present invention is to provide a rotation angle detection system. A sixth object of the invention of this application is to control the scanning speed of the light beam using the light beam rotation angle detection signal from the new rotation angle detection system and / or scan the light beam. It is an object of the present invention to provide a correction control system for a vibrating mirror type scanning device capable of correcting and controlling characteristics and temperature characteristics. A seventh object of the present invention is to achieve the above objects with a simple configuration and at low cost.

[0009]

[Means for achieving the object]
The first means for achieving the above objects is a rotating vibrating body 1, a rotating vibrating body supporting means 2 for rotatably supporting the rotating vibrating body 1 at a central portion thereof, The rotating vibrator 1 includes an electric driving wire ring 4 disposed so as to surround both rotating end surfaces and both side end surfaces of the rotating vibrating member 1, and a substrate 6, and the rotating vibrating member 1 has a single vibrating mirror surface 1m '. And one or more vibrating magnets 1
, the vibrating mirror surface 1m 'has a rectangular or square contour and is positioned at the forefront, and each vibrating magnet 1g,.
Has a front surface parallel to it, and has a thickness as small as possible in the front-rear direction. The rotating vibrating body supporting means 2 includes a vibration supporting plate 21, a flexible plate 22, The vibration support plate 21 is composed of a roof-shaped convex body 23 and a pedestal 24. The vibration support plate 21 forms a plate-like body having a thickness as small as possible in the front-rear direction. Board 22
Is made of a flexible elastic material so that it can bend and rotate itself, and is short in the front-rear direction, long in the axial direction, and concave in a bay shape with both left and right sides smooth. Thus, a plate-like body having the smallest thickness between the two most concave portions is formed, and the vibration support plate 21 is provided at its front end face.
MenHisashi portion and smoothly continuous, roof-shaped projections 23 after, in order to allow pivoting until any desired maximum rotation angle theta _M within the rotation plane of the rotation vibration member 1, its front It forms a convex body projecting forward in the shape of the roof, and smoothly connects to the rear end surface of the flexible plate 22 at the center top surface, the pedestal 24 continues to the rear surface of the roof-shaped convex body 23 at its front surface, The rear surface is fixed to the front surface of the substrate 6, the electric drive wire loop 4 is wound in a substantially rectangular tube shape, and the rear end surface is fixed to the front surface of the substrate 6 directly or via a supporting member having the same shape. Each of the vibrating magnets 1g,... Is magnetized in the same direction in accordance with a straight line penetrating itself in the left-right direction. , Two opposite
Side 4 _1, 4 ₂ Senwa portion interlinked, an oscillating mirror type scanner.

The second means is a vibrating mirror type scanning device which constitutes the first means, wherein the rotary vibrating body 1 includes one vibrating mirror 1m and two vibrating magnets 1g, 1g. The vibrating mirror 1m has a plate shape with a rectangular or square contour, has a single vibrating mirror surface 1m 'on the front surface, and each of the vibrating magnets 1g, 1g has a square rod shape. The vibration support plate is formed so as to have a thickness as small as possible in the front-rear direction and to be in parallel with the respective vibration edges on the rear surface of the vibration mirror 1m in the vicinity of the respective vibration edges. Reference numeral 21 denotes a vibrating mirror type scanning device which is coupled to an intermediate region on the rear surface of the vibrating mirror 1m on the front surface thereof, where the two vibrating magnets 1g, 1g are not fixed.

The third means is a vibrating mirror type scanning device as the first means, wherein the rotary vibrating body 1 includes one vibrating mirror 1m and one vibrating magnet 1g.
The vibrating mirror 1m has a rectangular or square plate-like shape and a single vibrating mirror surface 1m 'on the front surface.
The vibrating magnet 1g forms a plate as thin as possible in the front-rear direction, and is fixed concentrically to the rear surface of the vibrating mirror 1m.
This is a vibrating mirror type scanning device which is concentrically coupled to the center of the rear surface of the vibrating magnet 1g.

Fourth means is a vibrating mirror type scanning device as the first means, wherein the rotary vibrating body 1 comprises a single vibrating mirror surface 1m 'located on the front surface and one vibrating magnet. 1g, the vibrating magnet 1g has a substantially rectangular or square plate-like contour, and has a thickness as small as possible in the front-rear direction. Is a mirror-finished surface, and the vibration bearing plate 21 is a vibrating mirror type scanning device that is concentrically coupled to the center of the rear surface of the vibrating magnet 1g on the front surface.

A fifth means is that in any one of the vibrating mirror type scanning devices constituting the first to fourth means, the magnetic sensor 5 for detecting the turning angle θ of the turning vibrator 1 is provided. The pedestal 24 is a vibrating mirror type scanning device in which a cavity 24s is formed at the rear part thereof, and the magnetic sensor 5 is disposed in the cavity 24s.

According to a sixth aspect of the present invention, in any one of the vibrating mirror type scanning devices according to the first to fourth means, a substantially yoke-shaped or U-shaped magnetic yoke is included.
Of the pair of opposing sides 7 ₁ and 7 ₂ are respectively
The magnetic yoke 7 is disposed so as to face each of the rotation end faces of the rotary vibrating body 1 via the corresponding portion of the electric drive wire loop 4, and the entire magnetic yoke 7 has a substantially parallel relationship with the rotary vibrating body 1. 1 is a vibrating mirror-type scanning device arranged to form

According to a seventh aspect of the present invention, in any one of the vibrating mirror type scanning devices according to the first to fourth means, a substantially U-shaped magnetic yoke 7 is included, and the opposite sides 7 ₁ ,. 7 ₂ each, through the corresponding portion of the electrical drive line wheels 4, wherein disposed to face the respective rotation end surface of the rotary vibrating body 1, the coupling portion 7 _c of the magnetic yoke 7, the pedestal 24 A vibrating mirror type scanning device arranged so as to bypass the rear surface of the scanning mirror.

Eighth means is that in any of the vibrating mirror type scanning devices according to the sixth or seventh means, the magnetic yoke 7 is provided so as to face both rotating end surfaces of the rotating vibrator 1. A pair of opposite sides 7 ₁ and 7 ₂ is a vibrating mirror type scanning device in which the pair of sides 7 ₁ and 7 ₂ has an outwardly curved shape in the rotating plane of the rotating vibrating body 1.

The ninth means is a rotating vibrator 1, a rotating vibrating body supporting means 2 for rotatably supporting the rotating vibrating body 1 at the center thereof, and both rotations of the rotating vibrating body 1. An electric drive wire loop 4 disposed so as to surround the moving end face and both end faces;
And a pair of fixed magnets 8, 8.
Is a single oscillating mirror surface 1m 'and one oscillating magnetic body 1
g ', the vibrating mirror surface 1m' has a rectangular or square contour, and is located at the forefront, and the vibrating magnetic body 1g 'is located behind the vibrating mirror surface 1m'. And a plate-like body parallel thereto, and the thickness in the front-rear direction is made as thin as possible.
Is a vibration bearing plate 21, a flexible plate 22, and a roof-shaped convex body 2.
3 and a pedestal 24, the vibration bearing plate 21 forms a plate-like body as thin as possible in the front-rear direction, and its front surface is coupled to the rear surface of the vibration magnetic body 1g '.
Is made of a flexible elastic material so that it can bend and rotate itself, and is short in the front-rear direction, long in the axial direction, and concave in a bay shape with both left and right sides smooth. Thus, a plate-like body having the smallest thickness between the two most concave portions is formed, and the vibration support plate 21 is provided at its front end face.
MenHisashi portion and smoothly continuous, roof-shaped projections 23 after, in order to allow pivoting until any desired maximum rotation angle theta _M within the rotation plane of the rotation vibration member 1, its front It forms a convex body projecting forward in the shape of the roof, and smoothly connects to the rear end surface of the flexible plate 22 at the center top surface, the pedestal 24 continues to the rear surface of the roof-shaped convex body 23 at its front surface, The rear surface is fixed to the front surface of the substrate 6, the electric drive wire loop 4 is wound in a substantially rectangular tube shape, and the rear end surface is fixed to the front surface of the substrate 6 directly or via a supporting member having the same shape. Each of the fixed magnets 8, 8 is disposed outside the electric drive wire ring 4 and at a position facing each of the rotating end faces of the vibrating magnetic body 1g ', and their magnetic lines of force are arranged. The magnets are magnetized in the same direction so as to penetrate through the vibrating magnetic body 1g 'in the same direction. A mirror type scanner.

A tenth means is the vibrating mirror type scanning device according to the ninth means, wherein the rotary vibrating body 1 comprises
Vibrating mirror 1m and one vibrating magnetic body 1g ', the vibrating mirror 1m has a rectangular or square contour and a single vibrating mirror surface 1m' on the front surface, The vibrating magnetic body 1g 'is a vibrating mirror type scanning device which forms a plate-like body as thin as possible in the front-rear direction and is fixed to the rear surface of the vibrating mirror 1m.

An eleventh means is the vibrating mirror type scanning device according to the ninth means, wherein the rotary vibrating body 1 comprises
Vibrating magnetic body 1g 'and a single vibrating mirror surface 1m'. Vibrating magnetic body 1g 'forms a rectangular or square plate-like body as thin as possible in the front-rear direction. The mirror surface 1m 'is a vibrating mirror type scanning device in which the front surface of the vibrating magnetic body 1g' is mirror-finished.

The twelfth means includes a vibrating mirror type scanning device according to any one of the ninth to eleventh means, wherein the magnetic yoke has a substantially mouth-shaped or U-shaped magnetic yoke. A pair of opposite sides 7 ₁ , 7 ₂ are connected to the outer end faces of the fixed magnets 8, 8, respectively, and the entire magnetic yoke 7 is arranged so as to form a substantially parallel relationship with the rotary vibrating body 1. The vibrating mirror type scanning device is provided.

According to a thirteenth aspect, in any one of the oscillating mirror type scanning devices according to the ninth to the eleventh means, a substantially U-shaped magnetic yoke 7 is included, and the opposite sides 7 ₁ , 7 ₂ are each connected to the outer end surface of each fixed magnet 8,8, the coupling portion 7 _c of the magnetic yoke 7, the pedestal 2
4 is a vibrating mirror type scanning device arranged so as to bypass the rear surface of the scanning device.

Fourteenth means are a rotating vibrator 1, rotating vibrating body supporting means 2 for rotatably supporting the rotating vibrating body 1 at the center thereof, and each of the rotating vibrating bodies 1 The rotating vibrating body 1 includes a pair of electric driving wires 4 and 4 disposed close to the end face and a substrate 6.
Or a plurality of vibrating magnets 1g,..., And the vibrating mirror surface 1m 'has a rectangular or square contour and is located at the forefront, and each of the vibrating magnets 1g,. The rotating vibrating body support means 2 is located on the rear side of the mirror surface 1m 'and has a front surface parallel to the mirror surface 1m' and has a thickness as small as possible in the front-rear direction. The vibration support plate 21 is composed of a plate 22, a roof-shaped convex body 23, and a pedestal 24. The vibration support plate 21 forms a plate-like body as thin as possible in the front-rear direction, and is coupled to the rear surface of the rotary vibration body 1 at the front surface. The flexible plate 22 is made of a flexible elastic material so as to be able to bend and rotate. The flexible plate 22 is short in the front-rear direction, long in the axial direction, and has a smooth left and right side surface. And the thickness between the two concave portions is the thinnest. Been a plate-like body, smoothly continuous with MenHisashi portion after vibration support plate 21 at its front end face,
Roof-shaped projections 23, in order to allow pivoting until any desired maximum rotation angle theta _M within the rotation plane of the rotation vibration member 1,
The front surface forms a convex body protruding forward in the shape of a roof, and smoothly connects to the rear end surface of the flexible plate 22 at the center top surface, and the pedestal 24 is connected to the rear surface of the roof-shaped convex body 23 at the front surface. The rear surface is continuous and the rear surface is fixed to the front surface of the substrate 6, and each of the electric driving wire rings 4, 4 respectively surrounds an axis parallel to a straight line that passes through each rotation end face of the rotation vibrator 1 at right angles. It is wound so as to be cylindrical, elliptical tubular, or rectangular tubular, and is arranged such that the side surfaces of the arc-shaped or linear portions at the front thereof are close to the respective rotating end faces of the rotating vibrator 1, The arc, square or straight windings at the rear of them
Fixed to the front surface of the substrate 6 directly or via a support member,
Each of the vibrating magnets 1g,... Is magnetized in the same direction in accordance with a straight line penetrating itself in the left-right direction. This is a vibrating mirror type scanning device that links with a linear portion.

A fifteenth means is the oscillating mirror type scanning device according to the fourteenth means, wherein the rotary vibrator 1 is
It includes one vibrating mirror 1m and two vibrating magnets 1g, 1g. The vibrating mirror 1m has a rectangular or square contour and a single vibrating mirror surface 1 on its front surface.
m ', and each of the vibrating magnets 1g, 1g forms a square rod body, has a thickness in the front-rear direction as thin as possible, and is located near each vibrating edge on the rear surface of the vibrating mirror 1m. The vibration support plate 21 is fixed in a parallel relationship with each of the vibration edges, and the vibration support plate 21 has a front surface, a rear surface of the vibration mirror 1m, and an intermediate area where both the vibration magnets 1g, 1g are not fixed. Is a oscillating mirror scanner.

A sixteenth means is the vibrating mirror type scanning device according to the fourteenth means, wherein the rotary vibrating body 1 is
The vibrating mirror 1m includes a vibrating mirror 1m and a vibrating magnet 1g. The vibrating mirror 1m has a rectangular or square contour and a single vibrating mirror surface 1m 'on the front surface. 1g forms a plate-like body as thin as possible in the front-rear direction, and is fixed to the rear surface of the vibrating mirror 1m. It is a mirror type scanning device.

A seventeenth means is the vibrating mirror type scanning device according to the fourteenth means, wherein the rotary vibrator 1 is
It is composed of a single vibrating mirror surface 1m 'and one vibrating magnet 1g. The vibrating magnet 1g has a rectangular or square plate-like contour and a thickness in the front-rear direction as much as possible. The vibrating mirror surface 1m 'is formed by mirror-finished the front surface of the vibrating magnet 1g.
Is a vibrating mirror type scanning device which is coupled to the rear surface of the plate-shaped vibrating magnet 1g on the front surface.

The eighteenth means is the vibrating mirror type scanning device of the fourteenth means, and further includes a magnetic sensor 5 for detecting the rotation angle θ of the rotary vibrating body 1; Is a vibrating mirror type scanning device in which a void 24s is formed in the rear part, and the magnetic sensor 5 is disposed in the void 24s.

The nineteenth means is a rotating vibrator 1, a rotating vibrating body supporting means 2 for rotatably supporting the rotating vibrating body 1 at the center thereof, and each rotating of the rotating vibrating body 1. The rotating vibrating body 1 includes a pair of electric driving wires 4 and 4 disposed close to the end face and a substrate 6.
Or a plurality of oscillating magnets 1g,..., And the oscillating mirror surface 1m ′ has a substantially rectangular or square contour and is located at the forefront, and each of the oscillating magnets 1g,. The rotating vibrating body support means 2 has a vibration supporting plate 21 which has a front surface located rearward of and parallel to the vibration mirror surface 1m 'and which has a thickness as small as possible in the front-rear direction.
The vibration support plate 21 is composed of a bendable plate 22, a roof-shaped convex body 23, and a pedestal 24. The vibration support plate 21 forms a plate having a thickness as small as possible, and is coupled to the rear surface of the rotary vibration body 1 at the front surface. The flexible plate 22 is made of a flexible elastic material so as to be able to bend and rotate, and is short in the front-rear direction, long in the axial direction, and has a smooth bay shape on both left and right sides. It forms a plate-shaped body which is concave (indented) and thus the thickness between the two most concave portions is the thinnest, and is smoothly connected to the center of the rear surface of the vibration bearing plate 21 at its front end face, Roof-shaped convex body 23
In order to allow pivoting until any desired maximum rotation angle theta _M pivoting vibrating body 1 in the rotation plane, a convex body whose front forwardly projecting roof shape, its central At the top surface, it smoothly continues to the rear end surface of the flexible plate 22,
Is continuous with the rear surface of the roof-shaped convex body 23 at its front surface,
The rear surface is fixed to the front surface of the substrate 6, and each of the electric drive wires 4 and 4 is close to each rotation end surface of the rotation vibrator 1 and has a cylindrical shape around an axis parallel to the front-rear direction. The electric drive wire loops 4 and 4 are fixed to the front surface of the substrate 6 directly or via a support member having the same shape as the electric drive wire loops 4 and 4 so that the vibration Magnet 1g, ...
Are magnetized in the same direction in accordance with a straight line penetrating themselves in the left-right direction, and their magnetic lines of force are oriented in the same direction as the forwardly arcuate or linear portions of the respective electric drive wire rings 4, 4. This is a vibrating mirror-type scanning device that links with the mirror.

A twentieth means is the vibrating mirror type scanning device according to the nineteenth means, wherein the rotary vibrating body 1 is
It includes one vibrating mirror 1m and two vibrating magnets 1g, 1g. The vibrating mirror 1m has a rectangular or square plate-like shape and a single vibrating mirror surface 1m on the front surface. , And each of the vibrating magnets 1g, 1g has a rectangular rod shape, the thickness in the front-rear direction is made as thin as possible, and the vibrating mirror 1m has a rear surface near each vibrating edge.
The vibration supporting plate 21 is fixed in a parallel relationship with each of the vibrating edges, and the vibration support plate 21 is provided at a front surface thereof, at a rear surface of the vibrating mirror 1m, and in an intermediate region where the two vibrating magnets 1g, 1g are not fixed. Combined, oscillating mirror scanner.

According to a twenty-first means, in the oscillating mirror type scanning device according to the nineteenth means, the rotary vibrating body 1 comprises:
It includes one vibrating mirror 1m and one vibrating magnet 1g. The vibrating mirror 1m has a rectangular or square plate-like shape and a single vibrating mirror surface 1 on its front surface.
m ′, the vibrating magnet 1g forms a plate-like body as thin as possible in the front-rear direction, and is fixed concentrically to the rear surface of the vibrating mirror 1m. This is a vibrating mirror type scanning device that is concentrically coupled to the rear center of the vibrating magnet 1g.

A twenty-second means is the vibrating mirror type scanning device according to the nineteenth means, wherein the rotary vibrating body 1 is
The vibrating magnet 1g includes one vibrating magnet 1g and a single vibrating mirror surface 1m '. The vibrating magnet 1g has a rectangular or square plate-like shape and a thickness in the front-rear direction as much as possible. The vibrating mirror surface 1m 'is formed by mirror-finishing the front surface of the vibrating magnet 1g.
Is a vibrating mirror type scanning device which is concentrically coupled to the rear center of the vibrating magnet 1g on the front surface.

[0031] Means 23, in any one of the oscillating mirror type scanner forming a unit of the first 19, second 22, and contains a magnetic yoke 7 substantially U-shaped, each opposite side ₇₁ of the magnetic yoke 7, each 7 _2, wherein the electrical drive line wheels 4 and 4
And the coupling portion 7c of the magnetic yoke 7
Is a vibrating mirror type scanning device arranged so as to bypass the rear surface of the pedestal 24.

The twenty-fourth means is any one of the vibrating mirror type scanning devices of the first to twenty-third means, wherein the rotating vibrating body support means 2 is a rubber material, a synthetic resin material, an elastomer material or the like. Is a vibrating mirror type scanning device made of a flexible elastic material.

A twenty-fifth means is any one of the vibrating mirror type scanning devices of the first to twenty-third means, wherein the flexible plate 22 of the rotary vibrating body support means 2 is made of carbon fiber, Kevlar fiber or the like. Is a vibrating mirror type scanning device made of flexible fibers.

A twenty-sixth means is the oscillating mirror type scanning device according to any one of the first to twenty-fourth means, wherein the rotary vibrating body support means 2 is a single continuous material made of a single elastic material. 1 is a vibrating mirror scanning device configured as a body.

[0035]

BEST MODE FOR CARRYING OUT THE INVENTION

First Embodiment A first embodiment of a vibrating mirror type scanning device according to the present invention will be described. 1A and 1B are explanatory views of the first embodiment, wherein FIG. 1A is a front view and FIG. 1B is a cross-sectional view. FIG. 2 is an exploded perspective view of the first embodiment. 1 and 2, reference numeral 1 denotes a rotating vibrating body, 2 denotes a rotating vibrating body supporting means, 4 denotes an electric drive wire ring, 5 denotes a magnetic sensor, and 6 denotes a substrate. In this embodiment, the rotating vibrator 1 is a single vibrating mirror 1.
m and two vibrating magnets 1g, 1g. The oscillating mirror 1m has a thin plate-like body, and its contour preferably has a rectangular shape. However, it does not prevent a square shape, a barrel shape, or a wound shape. A single oscillating mirror surface 1m 'is formed on the front surface as shown in FIG. In this specification, for convenience of explanation,
The normal direction of the oscillating mirror 1m is the "front-back direction", FIG. 1 (b)
The plane parallel to the plane of the drawing is the "rotation surface of the vibration mirror 1m", the direction perpendicular to the rotation surface of the vibration mirror 1m is the "rotation axis direction", and the horizontal direction of the vibration mirror 1m (that is, FIG. ) Is referred to as a “lateral direction”.

Each of the two vibrating magnets (1g, 1g)
It is configured in a square rod shape. Their cross-sectional shapes are shown in FIG.
(B). The material of the vibrating magnet is S
mCo, NeFeB, or ferrite materials are used. When SmCo or NeFeB is used, the magnetic flux density can be increased, and thus the device can be reduced in size and weight. When using a ferrite material,
Costs can be reduced. In addition, the above vibration magnet
Resin-bound magnets can be used. Since the resin-bound magnet has good moldability, the cost can be reduced. One vibrating magnet 1g is fixed to a band-shaped region corresponding to the leftmost vibration edge of the rear surface of the vibration mirror 1m, and the other vibration magnet 1g is immediately fixed to the rightmost vibration edge of the rear surface of the vibration mirror 1m. Is fixed to the strip-shaped region. Thus, the rear surface of the oscillating mirror 1m is divided into three regions including a left band region, a right band region, and a center band region. (The role of the intermediate band-like region will be described later.) The rotating vibrator 1 is configured as light as possible. Thereby, the controllability of the scanning speed and the scanning angle of the rotating vibrator 1 is improved.

By the way, the size of the two vibrating magnets (1g, 1g) in the front-rear direction (ie, the normal direction of the vibrating mirror 1m) is made as small as possible. Therefore, their cross-sectional shapes are made as flat as possible. This is the expansion of the maximum rotation angle theta _m of rotating the vibrating body 1, it is to make a reasonable contribution (about This repeated explanation). As shown in FIG. 1B, the rotating vibrating body support means 2 includes a vibration supporting plate 21, a flexible plate 22,
It includes a roof-shaped convex body 23 and a pedestal 24. The vibration support plate 21 forms a plate-shaped body parallel to the vibration mirror 1m. The cross-sectional shape is as shown in FIG. That is, the thickness in the front-back direction (the normal direction of the vibrating mirror 1m) is reduced as much as possible. The vibration support plate 21 has its front surface firmly connected to the band-shaped region at the center of the rear surface of the vibration mirror 1m by an adhesive or the like.

The flexible plate 22 is made of a flexible elastic material. Or it consists of flexible fibers. An overview of the shape is a plate-like body that has a small thickness in the left-right direction, a short length in the front-rear direction, and extends long in the rotation axis direction. Thereby, the bendable plate 22 itself can be bent and deformed in the turning surface, and therefore, the front half thereof can be bent and turned in the turning surface. The front end face of the flexible plate 22 smoothly continues to the rear center of the vibration support plate 21. That is, the transition between the both side surfaces of the flexible plate 22 and the center of the rear surface of the vibration support plate 21 is continuous without generating a discontinuous point (line). However, if we take a closer look at the left and right sides of the flexible plate 22, they will all be
As shown in FIG. 1 (b), the thickness of the flexible plate 22 corresponding to the two most concave portions, which are concave (indented) in a smooth bay shape in the rotation surface, is the most. It is thinned. As a result, an equivalent rotation center point (line) is stably formed as shown in the design drawing, and the problem that it varies from product to product does not occur.

The entire roof-shaped convex body 23 forms a convex body that protrudes forward in a roof shape. In other words, one central top surface located at the forefront end and having the shape and size matching the rear end surface of the flexible plate 22, four trapezoidal slopes surrounding the central top surface, and the four slopes And four ridgelines that define the boundary of, and one rear surface that forms a rectangle (or square). The roof-shaped convex body 23 has a central top surface,
It smoothly continues to the rear end face of the flexible plate 22. That is, the roof-shaped convex body 23 and the flexible plate 22 transition continuously without generating a discontinuous point (line). Rotating the vibrating body 1, the first time the introduction of the roof-shaped projections 23, any desired maximum time until rotation angle theta _M in said rotating surface, it became rotatable. The pedestal 24 has a flat front surface, and an appropriate space 24s is formed at the rear of the base 24, as shown in FIG. 1B. 24 s does not need to be formed). The pedestal 24 is continuous with the rear surface of the roof-shaped convex body 23 at the front surface, and the rear surface is fixed to the front surface of the substrate 6.

Now, the whole of the rotary vibrating body support means 2 is constituted as a single continuous body made of a single flexible elastic material. At that time, as the flexible elastic material, for example, various rubber materials such as silicone rubber, chloroprene rubber, ethylene propylene rubber, nitrile rubber, urethane rubber, or various molding materials such as injection molded elastomer, polyethylene, and nylon can be used. . The flexible plate 22 of the rotation vibrating body support means 2 can be made of a flexible fiber such as carbon fiber or Kevlar fiber in some cases. The board 6 may be a printed board. This is because the entire device is reduced in size and weight.

The electric drive wire loop 4 is formed by winding a winding around a square tubular winding frame (not shown), for example. As a result, the four sides 4 ₁ , 4 ₂ , 4 ₃ ,
4 ₄ is formed. For example, when the power supply voltage is 3 V and the scanning frequency is 50 Hz, the diameter of the conductor used is, for example, about 0.05 mm, and the number of turns is, for example, 500.
Of the degree. These values depend on the operating frequency and operating voltage of the drive power supply, the magnetic resistance of the magnetic circuit, and the like. The winding frame and the windings constituting the electric drive wire loop 4 are integrally solidified or fixed using, for example, a hot-melt resin. The length in the front-rear direction is slightly larger than the length formed by the sum of the thickness of the vibration mirror 1 and the length in the front-rear direction of the rotating vibrating body support means 2. The rear end surface of the electric drive wire ring 4 is directly fixed to the front surface of the substrate 6. The first half of the main part, as shown in FIG.
The left and right rotating end surfaces of the rotating vibrating body 1 and the remaining both side end surfaces are surrounded. Each of the vibrating magnets (1g,...) Is a straight line penetrating itself in the left-right direction (in other words, a straight line orthogonal to both the front-rear direction and the rotation axis direction).
The magnets are magnetized in the same direction. Therefore, the magnetic lines of force generated therefrom are wound on the opposing two side surfaces 4 ₁ , 4 ₂ of the 4 side surfaces 4 ₁ , 4 ₂ , 4 ₃ , 4 ₄ formed by the rectangular cylindrical electric drive wire 4. It will intersect at a substantially right angle with the line portion.
In some cases, the electric drive wire ring 4 may be omitted in the latter half thereof to shorten its entire length. When the overall length is reduced, the rear end surface of the electric drive wire ring 4 is fixed to the front surface of the substrate 6 via a support member (not shown) of the same shape.

The overall operation of the first embodiment of the vibrating mirror type scanning device of the present invention will be described. 1st
The rotating vibrator 1 and the rotatable portion of the rotating vibrating body support means 2 (the portion in front of the rotation center point (line)) are integrally formed with each other to form forced rotation vibration or free rotation. Rotational vibration can be performed. The vibration equation defining the free-rotation vibration is approximately as follows. ^{I (d 2 θ / dt 2} ) + c (dθ / dt) + kθ = 0 (1) where, I is the moment of inertia of the rotatable portion of the rotational vibrator 1 and the rotational vibrator support means 2, theta can times Rotation angle of dynamic vibrator 1, c
Is a viscous damping constant, k is a spring constant (rotational moment required for turning by a unit angle), and t is time. When the viscous damping constant c can be neglected, it is approximately as follows. I (d ² θ / dt ² ) + c (dθ / dt) + kθ = 0 (2) The natural angular frequency (mechanical resonance frequency) of the rotating vibrating body 1 is
As can be easily understood from the equation (2), the rotating vibrator 1
And the spring constant k of the rotating vibrating body support means 2.

FIG. 12 is a distribution diagram of lines of magnetic force generated by a pair of vibrating magnets (1g, 1g) of the rotary vibrating body 1. In the figure, reference numeral 4 denotes an electric drive wheel. When an alternating current is supplied to the electric drive line wheels 4, by the interaction between current and flux, forward the winding portion of the left side surface 4 ₁ (or backward)
Force of, the winding portion of the right side surface 4 ₂ a force rearward (or forward). That is, a rotational moment in the reverse direction or the forward direction acts on the electric drive wheel 4. However, both winding portions do not rotate because they are firmly fixed. Therefore, a pair of right and left vibrating magnets 1g, 1
Rotational moments in the forward or reverse direction are generated alternately with respect to g, that is, with respect to the rotating vibrator 1. The magnitude of the rotational moment is approximately as follows. Rotational moment = (T · cosωt) cos θ (3) where T is a constant proportional to the alternating current, and ω is the frequency of the alternating current. θ is the rotation angle of the rotating vibrator 1.

Therefore, the vibration equation defining the forced rotational vibration is approximately as follows. ^{I (d 2 θ / dt 2} ) + c (dθ / dt) + kθ = (T · cosωt) c osθ (4) where, I is the the rotatable portion of the rotational vibrator 1 and the rotational vibrator support means 2 Moment of inertia, θ is the rotation angle of the rotary vibrating body 1, c
Is the damping coefficient, k is the spring constant, t is time, T is the torque due to the alternating current, and ω is the frequency of the alternating current. As can be easily understood from Equation (4), the angular frequency and amplitude of the reciprocating rotational vibration (forced vibration) in the steady state are determined by the amplitude of the alternating current and the frequency ω. When the rotation angle θ of the rotary vibrating body 1 is small, cos θ ≒ 1. Therefore, the vibration equation (4) can be approximated by the following equation. In ^{I (d 2 θ / dt 2} ) + c (dθ / dt) + kθ = T · cosωt (5) transient, rough waveform of reciprocating rotation vibration (forced vibration) solves the above-mentioned vibration equation (4) By
You can find out. When the rotary vibrator 1 performs reverse rotary vibration, the light beam incident on the vibration mirror 1m on the front surface of the rotary vibrator 1 is scanned on the optical information pattern.

The magnetic sensor will be described. When the rotation angle θ of the rotary vibrating body 1 is zero, the magnetic force lines are parallel to the substrate 6 in the detection unit of the magnetic sensor (for example, the Hall element) 5 disposed on the substrate 6, and the output of the Hall element is minimum. , Approximately zero. When the rotation vibrator 1 is at the position of the rotation angle θ, the lines of magnetic force in the Hall element unit are also inclined by the angle θ with respect to the substrate surface.
When the magnetic flux density the Hall element unit and B _h magnetic vector B perpendicular to the substrate surface (theta) _{is, B (θ) = B h} sinθ , and the Hall voltage from the Hall element, a rotational angle signal, to receive Can be done. FIG. 13 shows a drive circuit for controlling the scanning angle using the rotation angle signal from the magnetic sensor 5. Details of this circuit will be described later.

A description will be given of a second embodiment of the vibrating mirror type scanning device according to the present invention. FIG. 3 shows the second
1A is a front view, and FIG. 1B is a horizontal cross-sectional view. In FIG.
Reference numeral 1 denotes a rotating vibrating body, 2 denotes a rotating vibrating body supporting means, 4 denotes an electric drive wire ring, 5 denotes a magnetic sensor (for example, a Hall element), and 6 denotes a substrate. 1 m is a single rectangular vibrating mirror, 1 m 'is a vibrating mirror surface, 1 g is a single plate-shaped vibrating magnet, 21 is a vibrating body support plate, 22 is a flexible plate, 23 is a roof-shaped convex, 24
Is a pedestal, and 24s is an empty space. In the second embodiment, the rotating vibrator 1 contains only a single vibrating mirror 1m and a single vibrating magnet 1g. The rear surface of the vibration mirror 1m and the front surface of the vibration magnet 1g are firmly connected by, for example, an adhesive. As can be seen from FIG. 3, the electric drive winding 4 has a left side wall, a right side wall, an upper side wall, and a lower side wall at a position surrounding the vibrating magnet 1g in close proximity. The plate-shaped vibrating magnet 1g is magnetized in the left-right direction, and the lines of magnetic force interlink with the winding portion on the left side wall and the winding portion on the right side wall of the electric drive winding 4 having a rectangular cylindrical shape. Second
Other items of the third embodiment are the same as those of the first embodiment.

A third embodiment of the vibrating mirror type scanning device according to the present invention will be described. FIG.
1A is a front view, and FIG. 1B is a horizontal sectional view. In FIG. 4, 1
Reference numeral denotes a rotating vibrating body, 2 denotes a rotating vibrating body supporting means, 4 denotes an electric drive wire ring, 5 denotes a magnetic sensor, and 6 denotes a base. 1m 'is a rectangular vibrating mirror surface, 1g is a single substantially rectangular plate-shaped vibrating magnet, 21 is a vibrating body support plate, 22 is a flexible plate, 23 is a roof-shaped convex, 24 is a pedestal, and 24s is empty Place. In the third embodiment, the rotating vibrator 1 includes a single vibrating mirror surface 1m 'and a single plate-shaped vibrating magnet 1g, and the single vibrating mirror surface 1m' The front surface of the magnet 1g is mirror-finished. 1 g of a plate-shaped vibrating magnet is
It is magnetized in the left-right direction, and the lines of magnetic force interlink with the winding part of the left side wall and the winding part of the right side wall of the electric drive winding 4 having a rectangular cylindrical shape. Other items of the third embodiment are the same as those of the first and second embodiments.

A fourth embodiment of the vibrating mirror type scanning device according to the present invention will be described. FIG.
1A is a front view, and FIG. 1B is a horizontal sectional view. In FIG. 5, 1
Reference numeral denotes a rotating vibrating body, 2 denotes a rotating vibrating body supporting means, 4 denotes an electric drive wire ring, 6 denotes a substrate, and 7 denotes a magnetic yoke. 1m 'is a rectangular vibrating mirror surface, 1g and 1g are rod-shaped vibrating magnets,
21 is a vibrating body support plate, 22 is a flexible plate, 23 is a roof-shaped convex body, and 24 is a pedestal. Magnetic yoke 7 in the fourth embodiment, the overall shape forms a shape of substantially opening, a pair of two opposite sides 7 ₁ and 7 _2, and has two coupling portions 7 _c, 7 _c. The substantially yoke-shaped magnetic yoke 7 is arranged and fixed so as to closely surround the electric drive wire loop 4 around it. Each pair of two opposite sides 7 ₁ and 7 ₂ of the magnetic yoke 7, through the left side wall and right side wall of the electrical drive line wheels 4 which form a square tube shape, each rotational end face of the rotary vibration member 1 and the counter I'm sullen. The one-to-two vibrating magnets 1g, 1g and one magnetic yoke 7 constitute a substantially "sun" shaped magnetic circuit in a plane parallel to the vibrating mirror. as a result,
The magnetic resistance decreases and the magnetic flux increases. Therefore, the turning torque for the turning vibrator 1 increases.

One to two vibrating magnets 1g of the rotary vibrating body 1
1 g and one to two opposite sides 7 of the fixed yoke 7 adjacent thereto
Attraction force due to a static magnetic field always acts between the _first and _second elements. For this reason, with respect to the rotating vibrating body 1, it is moved to the origin position (the position of θ = 0, the position shown, the vibrating magnet 1g,
A magnetic spring force (rotational moment) acts to restore 1 g to the position where the opposite sides 7 ₁ and 7 _{2 of the} fixed yoke 7 are closest to each other. The magnitude of the magnetic spring force is approximately as follows. Magnetic spring force _(torque) = k m · _sinθ where, _{k m} is the spring constant of the magnetic spring, theta is angle of rotation of the rotary vibrator 1. Therefore, the rotation vibration member 1, the spring force of the rotational vibrator support means 2 k- [theta and, magnetic spring force by the permanent magnet (k m _· si
nθ) and the rotational moment (T · co
sωt) cos θ act simultaneously and in parallel. When rotation angle theta is _small, it becomes a _{k m · sinθ ≒ k m ·} θ. The vibration equation is as follows. ^{I (d 2 θ / dt 2} ) + c (dθ / dt) + (k + k m) θ = (T · co sωt) (6) where, I is the moment of inertia of rotating the vibrating body 1, theta is rotated vibrator A rotation angle of 1, c is a damping coefficient, k is a mechanical spring constant,
k _m is the magnetic spring constant, T is the torque due to the alternating current, t
Is the time and ω is the frequency of the alternating current.

[0050] According to the vibration equation (5), the magnetic spring constant k _m and the mechanical spring constant k is equal. Therefore, the magnetic spring force can replace the mechanical spring force and naturally hold the rotating vibrating body 1 at rest at the origin (zero angle) position. Further, since the value of the mechanical spring constant k having the temperature dependency can be extremely reduced, the temperature dependency of the mechanical resonance frequency and the vibration amplitude of the rotary vibrating body 1 can be reduced. That is, the scanning characteristics of the light beam can be stabilized against a change in temperature. Furthermore,
Since the sum of the magnetic spring force and the mechanical spring force can be reduced, the vibration amplitude of the rotary vibrating body 1 can be increased. That is, a large vibration amplitude can be obtained with a small driving power. In the fourth embodiment, no magnetic sensor is used. Other items of the fourth embodiment are the same as those of the first embodiment.

A fifth embodiment of the vibrating mirror type scanning device according to the present invention will be described. FIG.
1A is a front view, and FIG. 1B is a horizontal sectional view. In FIG. 6, 1
Reference numeral denotes a rotating vibrating body, 2 denotes a rotating vibrating body supporting means, 4 denotes an electric drive wire ring, 6 denotes a substrate, and 7 denotes a magnetic yoke. 1m 'is a rectangular vibrating mirror surface, 1g and 1g are rod-shaped vibrating magnets,
21 is a vibrating body support plate, 22 is a flexible plate, 23 is a roof-shaped convex body, and 24 is a pedestal. Magnetic yoke 7 in the fifth embodiment, the overall shape forms a shape of substantially C, a pair of two opposite sides 7 ₁ and 7 _2, and has one of the coupling portion 7 _c. The substantially U-shaped magnetic yoke 7 is used to
Is arranged and fixed so as to closely surround the three sides thereof. A pair of two opposite sides 7 _1, 7 _2, respectively, the left side wall of the electrical drive line wheels 4 angled cylindrical magnetic yoke 7, through the right side wall, each rotational end face of the rotary vibration member 1 and the counter I'm sullen. The one-to-two vibrating magnets 1g, 1g and one magnetic yoke 7 constitute a substantially square-shaped magnetic circuit in a plane parallel to the vibrating mirror. As a result, the magnetic resistance decreases and the magnetic flux increases. Therefore, the turning torque for the turning vibrator 1 increases. Other items of the fifth embodiment are the same as those of the fourth embodiment.

A sixth embodiment of the vibrating mirror type scanning device according to the present invention will be described. FIG.
1A is a front view, and FIG. 1B is a horizontal sectional view. In FIG. 7, 1
Reference numeral denotes a rotating vibrating body, 2 denotes a rotating vibrating body supporting means, 4 denotes an electric drive wire ring, 6 denotes a substrate, and 7 denotes a magnetic yoke. 1m 'is a rectangular vibrating mirror surface, 1g and 1g are rod-shaped vibrating magnets,
21 is a vibrating body support plate, 22 is a flexible plate, 23 is a roof-shaped convex body, and 24 is a pedestal. The magnetic yoke 7, the entire shape forms a shape of substantially C, a pair of two opposite sides 7 ₁ and 7 ₂ and 1
It has a plurality of coupling portions _7c . The substantially U-shaped magnetic yoke 7 of the sixth embodiment is disposed so as to surround the left side wall and the right side wall of the rectangular electric drive wire 4 and the rear surface of the pedestal 24 as shown in the figure. Is done. Each opposite sides 7 _1, 7 ₂ pair two magnetic yoke 7, the left side wall, through the right side wall, is caused to the respective rotary end face facing the rotation vibration member 1, the coupling portion 7 of the magnetic yoke 7 _c is detoured around the rear surface of the pedestal 24. The one-to-two vibrating magnets 1g, 1g and one magnetic yoke 7 constitute a substantially square-shaped magnetic circuit in the rotation plane of the vibrating mirror 1. As a result, the magnetic resistance decreases and the magnetic flux increases. Therefore, the turning torque for the turning vibrator 1 increases. Other items of the sixth embodiment are the same as those of the fifth embodiment.

A seventh embodiment of the oscillating mirror type scanning device according to the present invention will be described. FIG.
1A is a front view, and FIG. 1B is a horizontal sectional view. In FIG. 8, 1
Reference numeral denotes a rotating vibrating body, 2 denotes a rotating vibrating body supporting means, 4 denotes an electric drive wire ring, 6 denotes a substrate, and 7 denotes a magnetic yoke. 1m 'is a rectangular vibrating mirror surface, 1g and 1g are rod-shaped vibrating magnets,
21 is a vibrating body support plate, 22 is a flexible plate, 23 is a roof-shaped convex body, and 24 is a pedestal. The magnetic yoke 7 according to the seventh embodiment has a substantially U-shape overall shape, and has one to two opposite sides 7.
Having ₁ and _{7 2} and one coupling portion _{7 c.} And
The opposite sides 7 ₁ and 7 _2, the portion facing to both turning end face of the rotary vibration member 1 is in the horizontal section (rotation plane of the rotation vibration member 1), a shape curved in a convex outside adult doing. The substantially U-shaped magnetic yoke 7 of the seventh embodiment is disposed so as to surround the left and right walls of the rectangular electric drive wire 4 and the rear surface of the pedestal 24 as shown in the figure. Is done. Each pair of two opposite sides 7 _1, 7 ₂ of the curved portion of the magnetic yoke 7, the left side wall, through the right side wall, is caused to face the respective rotary end surface of the rotary vibrating body 1, the same magnetic yoke 7 coupling portion 7 _c is caused to bypass the rear surface of the base 24. One to two vibrating magnets 1g, 1g and one magnetic yoke 7
A substantially square-shaped magnetic circuit is formed in the rotation plane of the vibrating mirror 1. Now, when the shapes of the opposite sides 7 ₁ and 7 ₂ of the magnetic yoke 7 and the shapes of the right and left ends of the vibrating magnets 1 g and 1 g are particularly arcuate in a horizontal cross section (the rotating surface of the rotating vibrator 1). Is that the degree of increase in the magnetic energy of the air gap with the increase in the rotation angle θ decreases, so that the opposite sides 7 ₁ , 7
₂ and the attraction force between the vibrating magnets 1g, 1g are reduced. Therefore, there is an advantage that the spring constant decreases and the natural angular frequency (resonance frequency) of the rotating vibrator 1 decreases. Other items in the seventh embodiment are the same as those in the sixth embodiment. Note that the seventh embodiment can be generally applied to an embodiment including a magnetic yoke (for example, the fourth and fifth embodiments).

An eighth embodiment of the vibrating mirror type scanning device according to the present invention will be described. FIG.
1A is a front view, and FIG. 1B is a horizontal sectional view. In FIG. 9, 1
Reference numeral denotes a rotating vibrating body, 2 denotes a rotating vibrating body supporting means, 4 denotes an electric drive wire ring, 6 denotes a substrate, 7 denotes a magnetic yoke, and 8 denotes a fixed magnet. 1m 'is a rectangular vibrating mirror surface, 1g' is a single plate-shaped vibrating magnetic body, 21 is a vibrating body support plate, 22 is a flexible plate, 23 is a roof-shaped convex body, and 24 is a pedestal. The vibrating mirror surface 1m 'is obtained by mirror-finishing the entire surface of the plate-shaped vibrating magnetic body 1g'. The magnetic yoke 7, the entire shape forms a shape of substantially C, having a pair of two opposite sides 7 ₁ and 7 ₂ and one coupling portion 7 _c. The substantially U-shaped magnetic yoke 7 is disposed so as to surround the left and right walls of the rectangular electric drive wire 4 and the rear surface of the pedestal 24 as shown in the figure. Each opposite sides 7 _1, 7 ₂ pair two magnetic yoke 7, the left side wall, through the right side wall, is caused to the respective rotary end face facing the rotation vibration member 1, the coupling portion 7 of the magnetic yoke 7
_c is detoured around the rear surface of the pedestal 24. In the eighth embodiment, as shown, between the opposite sides ₇₁ of the left side wall and the magnetic yoke 7 of the electric drive line wheels 4, as well as opposite sides of the right side wall and the yoke 7 of the magnetic drive line wheels 4 each between 7 _2, space is provided, fixed magnet 8, 8 are disposed. The single plate-shaped vibrating magnetic body 1g ', one magnetic yoke 7, and one to two fixed magnets 8, 8 have a substantially rectangular shape in a horizontal cross section (the rotating surface of the vibrating mirror 1). Of the magnetic circuit. As a result, the magnetic resistance decreases and the magnetic flux increases. Therefore, the turning torque for the turning vibrator 1 increases. Other items of the eighth embodiment are the same as those of the third embodiment.

A ninth embodiment of the vibrating mirror type scanning device according to the present invention will be described. 10A and 10B are explanatory views of the ninth embodiment, wherein FIG. 10A is a front view, FIG. 10B is a horizontal sectional view, and FIG. 10C is a side view. 10, reference numeral 1 denotes a rotating vibrating body, 2 denotes a rotating vibrating body support means, and 4, 4 denote first and second electric drive wires.
Is a magnetic sensor, and 6 is a substrate. 1m 'is a single rectangular vibrating mirror surface, 1g and 1g are bar-shaped vibrating magnets, 21 is a vibrating body support plate, 22 is a flexible plate, 23 is a roof-shaped convex body, 24 is a pedestal, and 24s is an empty space. is there. 1st, 2nd
The electric drive wire rings 4 and 4 have a cylindrical shape, an elliptical cylindrical shape, or a rectangular cylindrical shape around an axis parallel to the left-right direction, that is, an axis parallel to a straight line passing through each rotating end face at a right angle. Wound around. The first and second electric drive wires 4, 4 are arranged such that the side surfaces of the arc-shaped or linear portions at the front portions thereof are close to the respective rotating end surfaces of the rotating vibrator 1. The rear arc-shaped, square-shaped, or straight-shaped winding portion is fixed to the front surface of the substrate 6 directly or via a support member. Each of the pair of two vibrating magnets 1g, 1g is magnetized in the same direction in accordance with a straight line penetrating itself in the left-right direction. According to the ninth embodiment, the front end portions of the first and second electric drive wire rings 4 and 4 vibrate in the same direction as the arc-shaped or linear portions at the front portions of the first and second electric drive wires 4 and 4. The mirror surface 1m 'can be prevented from going forward. Other items of the ninth embodiment are the same as those of the first embodiment.

A tenth embodiment of the vibrating mirror type scanning device according to the present invention will be described. FIG. 11 is an explanatory view of the tenth embodiment, and FIG.
FIG. 1B is a horizontal sectional view, and FIG. 1C is a side view. In FIG. 11, reference numeral 1 denotes a rotating vibrating body, 2 denotes a rotating vibrating body support means, 4 denotes an electric drive wire ring, 6 denotes a substrate, and 7 denotes a magnetic yoke. 1m 'is a rectangular vibrating mirror surface,
1 g, 1 g are rod-shaped vibrating magnets, 21 is a vibrating body support plate, 22
Is a flexible plate, 23 is a roof-shaped convex body, and 24 is a pedestal. The first and second electric drive wire loops 4 and 4 are respectively wound around an axis parallel to the front-rear direction in a cylindrical shape, an elliptical cylindrical shape, or a rectangular cylindrical shape. First and second electric drive wheels 4, 4
Is arranged such that the side surface of the portion closer to the front of the rotating vibrator 1 is close to each rotating end surface. The rear end surfaces thereof are fixed to the front surface of the substrate 6 directly or via a support member having the same shape as them. Each of the pair of two vibrating magnets 1g, 1g is magnetized in the same direction in accordance with a straight line penetrating itself in the left-right direction. According to the tenth embodiment, the forefront of the first and second electric drive wire rings 4 and 4 is linked to the front winding of the first and second electric drive wires 4 and 4 in the same direction as the vibrating mirror surface 1 m. 'Does not cross forward. Tenth
Other items of the third embodiment are the same as those of the first embodiment.

The operation mode of each embodiment of the oscillating mirror type scanning device according to the present invention will be described. Each of the above embodiments is used in a resonance mode or a non-resonance mode. In the resonance mode, the frequency of the alternating current supplied to the electric drive wheel 4 and the natural angular frequency (resonance frequency) of the rotary vibrating body 1 are made the same. The resonance frequency of the rotation vibration member 1, by adjusting the moment of inertia I and / or the spring constant of the rotational vibrator 1 (k + k _m), is adjusted. The characteristics of the resonance mode are as follows. (1) Operate only at the resonance frequency. (2) Operate with sinusoidal vibration. (3) The operating current can be extremely reduced. (4) The amplitude (scan width) can be controlled by the supplied current. (5) High-speed scanning becomes possible.

In the non-resonance mode, the frequency ω of the alternating current supplied to the electric drive wire ring 4 must be considerably smaller (or larger) than the resonance frequency of the rotating vibrator 1. In this way, the disturbance of the waveform during the transition (the deviation from the sine wave) is avoided. The characteristics of the non-resonant mode are as follows. (1) It is necessary to operate in a frequency range sufficiently lower than the resonance frequency. (2) An operation of following the supply current waveform is possible. The scanning speed, scanning width, linear speed, and the like can be arbitrarily controlled. In the case of the non-resonant mode, an internal loss or an external damper can be provided. Furthermore, aperiodic motion (creep-like motion) can be used as overdump. In this case, the controllability is further improved.

The driving circuit of each embodiment of the oscillating mirror type scanning device of the present invention will be described. FIG.
FIG. 4 is an explanatory diagram of a drive circuit for an embodiment with a magnetic sensor. This drive circuit includes drive signal generation means, a servo amplifier (AMP), a drive circuit, a magnetic sensor, and an angle detection amplifier. The drive signal generating means is composed of, for example, a microcomputer or the like, and repeatedly generates a drive signal (target value) having a desired frequency, a desired amplitude, and a desired waveform. The magnetic sensor 5 detects a rotation angle (a control amount) of the rotation vibrator 1. The rotation angle signal from the magnetic sensor is amplified by an angle detection amplifier and then applied to a servo amplifier (servo AMP). The servo amplifier (AMP) and the drive circuit form a difference signal between the drive signal (target value) and the rotation angle signal (control amount), and set the difference signal to zero based on the formed difference signal. The operation amount (current amount) is determined, and the determined operation amount (current amount) is supplied to the electric driving wheel 4 of the vibrating mirror type scanning device.

As a result, the rotation angle θ of the rotation vibrator 1
The (instantaneous value) continuously follows the change of the drive signal (target value) given by the drive signal generating means. As a result, the scanning angle (instantaneous value) of the light beam also follows the drive signal amplitude (instantaneous value). Therefore, the scanning speed, the scanning width, the linear speed, etc. of the light beam can be controlled to any desired values. This drive circuit can be applied to the embodiment with the magnetic sensor, that is, the first to third and ninth embodiments.

FIG. 14 is an explanatory diagram of a drive circuit for an embodiment that does not use a magnetic sensor. The driving circuit for the vibrating mirror (VM) type scanning device in FIG. 14 automatically follows the frequency and phase of the driving power supply to the mechanical resonance frequency and phase of the vibrating mirror without using an optical sensor or a magnetic sensor. Can be done. The driving circuit for the vibrating mirror (VM) type scanning device includes a pulse width modulation oscillator, a vibrating mirror (VM) coil excitation circuit, a vibrating mirror (VM) coil, a voltage sampler, a pulse rise time determination circuit, and a peak holder. And a pulse falling time determination circuit. Pulse-width modulation oscillator, the self Futoki, pulse repetition frequency slightly lower than the mechanical resonance frequency F of rotation vibratory mirror (VM), the oscillation pulse train b ₁ duty ratio smaller becomes than a quarter and outputs, to the separately-excited Futoki, pulse repetition frequency follows the mechanical resonance frequency F of the vibration mirror (VM), the duty ratio outputs an oscillating pulse train b ₁ further comprising smaller than when self-oscillation.

[0062] vibrating mirror (VM) coil excitation circuit, immediately after the rotation angle θ of the oscillating mirror (VM) reaches the maximum point of the opposite direction, to the first input terminal A ₄ of the oscillating mirror (VM) coil in contrast, applying a positive polarity excitation pulse based on the oscillation pulses b _1. Vibrating mirror (VM) coil when the excitation pulse of positive polarity is applied to the first input terminal A _4, the positive direction of the angular momentum is proportional to the duration of the pulse to the vibration mirror (VM) give. When no excitation pulse is applied, the voltage sampler calculates the absolute value of the negative half-wave of the back electromotive voltage caused by the free vibration of the vibrating mirror (VM),
Detecting at the first input terminal _{A 4} of the oscillating mirror (VM) coil. The pulse rising time determination circuit detects a time when the output level of the voltage sampler reaches zero from a peak, determines a rising time of a next oscillation pulse of the paused pulse width modulation oscillator, and determines a first time of the first oscillation of the oscillator. the modulated signal input terminal a _1, applying a negative modulation voltage q for rise of the oscillation pulse. As a result, the excitation pulse can be applied at the best timing.

The peak holder is used for each period of the voltage sampler,
Detecting a peak value p _m of the output voltage of the voltage sampler output of the linear amplifier, and held. Pulse fall time decision circuit receives the peak value p _m from the oscillation pulse duration signal and the peak holder from the pulse-width modulation oscillator, the target value v _r and a peak corresponding to the desired amplitude of the oscillating mirror (VM) oscillation pulse duration proportional to the voltage difference between the values p _m, thus also determines the oscillation pulse falling time, the second the oscillator
Respect of the modulation signal input terminal a _2, for drop up the oscillation pulse of the duration, applying a positive modulating voltage r. Thereby, the rotation range of the vibrating mirror is automatically adjusted. The pulse falling time determination circuit instantaneously releases the peak voltage holding state of the peak holder at the same time. The above-described drive circuit is an embodiment of the present invention (see the specification and drawings of Japanese Patent Application No. 9-46876) and does not use a magnetic sensor or an optical sensor. It can be used in the fourth to eighth and tenth embodiments. Further, as a drive circuit for an embodiment that does not use a magnetic sensor, a drive circuit (not shown) having an open-loop configuration in which drive signal generation means and a drive circuit are cascaded may be used. The drive signal generator of this type of drive circuit is the same as the drive signal generator of FIG.

Another embodiment will be described. In the invention of this application, four types of the rotary vibrating body 1 (see FIGS. 1 to 3), and three basic shapes of the magnetic yoke 7 (see FIGS. 5, 6, and 7). , the presence or absence of the curved shape of the opposite sides 7 _1, 7 ₂ of the magnetic yoke 7 (Fig. 8, see FIG. 7), the presence or absence of the magnetic sensor 5 (Fig. 1, see FIG. 5), as well as three electrical drive line wheels 4 Format (Figures 1-9, 10,
By combining 11), many embodiments can be generated. Representative examples of the numerous embodiments thus generated are listed in the section "Means for Achieving the Object". Depending on the combination,
Some must be excluded, as some are incompatible for structural or functional reasons. Next, an application of the invention of this application will be briefly described. For the time being, application forms of the invention of this application include stationary optical information reading devices, optical information reading modules, hand-held optical information reading devices, handy terminals with built-in optical information reading devices, on-board optical sensors, optical pointers , Light levelers, light projectors and the like.

[0065]

Since the invention of this application is configured as described above, remarkable effects can be obtained as shown in the following (a) to (k). (A) The size of the vibrating mirror 1m of the bar code reader / vibrating mirror type scanning device could be further reduced. In terms of numbers, a very small oscillating mirror with dimensions of 2.5 × 4.0 × 0.3 mm could be realized. by this,
An oscillating mirror type scanning device having a light beam diameter of about 1 mm and satisfying a required maximum scanning angle of 50 degrees was realized. (B) The distance between the rotation center point (line) in the rotation vibrating body support means 2 and the vibration mirror surface (light reflecting surface) 1m 'on the front surface of the vibration mirror 1m can be greatly reduced. . In terms of numbers, it could be reduced to 1.2 mm or less (actually 1.04 mm). As a result, the dimension in the front-rear direction (scanning direction) of the oscillating mirror type scanning device could be significantly reduced. (C) As described above, the rotation center point (line) and the rotation mirror surface 1 m
, The seismic strength in a direction perpendicular to the front-rear direction (scanning direction), that is, in the left-right direction or the rotation axis direction is increased. Therefore, the undesired vibration of the scanning light beam in the left-right direction or the rotation axis direction due to an external impact or the like is significantly reduced.

(D) By introducing the roof-shaped convex body 23 between the flexible plate 22 and the pedestal 24, a sufficient clearance (space) can be secured in each rotational direction of the rotary vibrating body 1. Was. Thus, the rotation vibration member 1, any desired maximum time until rotation angle theta _m, was able to be rotated. In terms of numbers, the rotating vibrating body 1 has 12.5
More than 25 degrees on both sides. Therefore, the light beam is directed at 25 degrees (= 12.5 degrees × 2) or more on one side and 50 degrees (=
The rotation can be performed over 25 degrees × 2) or more. These numerical values satisfy the required scanning angle of the light beam of the bar code reader of 50 degrees or more. (Incidentally, the scanning range of only one side by the movable mirror as an optical disk tracking / fine actuator is limited to a distance of several tens of tracks (usually within 50 microns, at most within 100 microns at most). The maximum scanning angle of the oscillating mirror type scanning device according to the invention of this application is:
It is orders of magnitude larger than the scan angle of such an actuator. )

(E) A space 24s is formed at the rear of the pedestal 24 of the rotating vibrating body support means 2, and a rotational angle (scanning angle) of the rotating vibrating body 1 is detected in the space 24s. Magnetic sensor 5
Is provided, it is possible to easily and accurately detect the rotation angle (scan angle) at low cost. (F) By using the rotation angle (scanning angle) signal from the magnetic sensor 5, it is possible to accurately control the scanning angle of the light beam. (G) Similarly, by using the rotation angle (scanning angle) signal from the magnetic sensor 5, it becomes possible to accurately control the scanning speed of the light beam. (H) When the rotating vibrator support means 2 is made of a synthetic resin material, the elastic coefficient of the material has a temperature dependency, and thus the scanning characteristics of the light beam also have a temperature dependency. However, by using the rotation angle (scanning angle) signal from the magnetic sensor 5, correction control of the temperature dependence of the light beam scanning characteristics became possible. Therefore, the operation characteristics of the light beam are stabilized against the temperature change.

(I) The angular position of the rotary vibrating body 1 is
As described above, the rotation angle (scan angularity) from the magnetic sensor 5
Since it is possible to electrically control by using the signal, the stationary position of the rotary vibrating body 1 is set to a predetermined position by the elasticity and rigidity of (the flexible plate 22 of) the rotary vibrating body supporting means 2 (the flexible plate 22). It is no longer necessary to hold on to the origin. Therefore, it is possible to design the spring constant of the flexible plate 22 of the rotating vibrating body support means 2 to be extremely small, and therefore, it is easy to rotate the rotating vibrating body 1 in a predetermined rotating direction. It became possible to do. Therefore, it is possible to reduce the driving force for the rotating vibrator 1 and the driving power. Further, since the spring force due to the elasticity of the flexible plate 22 can be designed to be extremely small, the mechanical vibration strength of the rotary vibrating body 1 can also be designed to be small, and control becomes very easy. Was.

(J) The vibrating magnet (1 g,
…), The magnetic yoke 7 is disposed
When the magnetic attractive force generated between the magnetic yoke 7 and the vibrating magnet (1g,...) Is used as an equivalent return spring force, the spring force of the flexible plate 22 having a temperature change characteristic is correspondingly increased. Can be reduced, so that the temperature characteristics are improved. (K) A pair of electric drive trains 4 having a longitudinal axis.
In the case of the configuration in which (4, 4) is arranged on the left and right sides of the rotary vibrating body 1, the front end of the same ring (4, 4) is
m '. Therefore, the longitudinal dimension of the device can be further reduced. (1) Both the volume and the weight have been remarkably improved. That is, the external dimensions of the conventional vibrating mirror type scanning device are 8.6 × 16.
5 × 15.55 ≒ 2206.55mm was the ^3, outer dimensions of the oscillating mirror type scanner according to the invention of the present application, 5.1 × 6.6 × 3.55 ≒ 119.49mm 3 next, by volume It was reduced to 5.4% (1/18). or,
The weight of the conventional vibrating mirror type scanning device was 5.21 g, but the weight of the vibrating mirror type scanning device according to the invention of this application was 0.27 g, and the weight was 5.2% (1/1).
9) The weight was reduced.

[Brief description of the drawings]

FIG. 1 shows a first example of a vibrating mirror type scanning device according to the present invention.
It is explanatory drawing of embodiment.

FIG. 2 is an exploded perspective view of the first embodiment.

FIG. 3 is an explanatory diagram of the second embodiment.

FIG. 4 is an explanatory diagram of the third embodiment.

FIG. 5 is an explanatory diagram of the fourth embodiment.

FIG. 6 is an explanatory diagram of the fifth embodiment.

FIG. 7 is an explanatory diagram of the sixth embodiment.

FIG. 8 is an explanatory diagram of the seventh embodiment.

FIG. 9 is an explanatory diagram of the eighth embodiment.

FIG. 10 is an explanatory diagram of the ninth embodiment.

FIG. 11 is an explanatory diagram of the tenth embodiment.

FIG. 12 is a distribution diagram of lines of magnetic force by the vibrating magnet of the first embodiment.

FIG. 13 is an explanatory diagram of a drive circuit according to the first embodiment and the like.

FIG. 14 is an explanatory diagram of a drive circuit according to the fourth embodiment and the like.

FIG. 15 is an explanatory diagram of a conventional light beam scanning device.

FIG. 16 is an explanatory view of a conventional vibrating mirror type scanning device.

[Explanation of symbols]

REFERENCE SIGNS LIST 1 rotating vibrating body 1 g vibrating magnet 1 g ′ vibrating magnetic body 1 m vibrating mirror 1 m ′ vibrating mirror surface 2 rotating vibrating body support means 21 vibration supporting plate 22 flexible plate 23 roof convex body 24 pedestal 3 rotating shaft 4 electric Drive wire 5 Magnetic sensor 6 Substrate 7 Magnetic yoke 7 ₁ First side of magnetic yoke 7 ₂ First side of magnetic yoke 8 Fixed magnet dm Rotary drive motor gm Galvano motor h Holder pm Polygonal mirror sm Tammen mirror θ _t times Motion angle θ _m Maximum rotation angle

Claims (26)

[Claims] 1. A rotating vibrating body (1), a rotating vibrating body supporting means (2) for rotatably supporting the rotating vibrating body (1) at a central portion thereof, and the rotating vibrating body (1). 1) It includes an electric drive wire loop (4) disposed so as to surround both the rotation end faces and both side end faces, and a substrate (6). Mirror surface (1
m ′) and one or a plurality of vibrating magnets (1g,...), and the vibrating mirror surface (1m ′) has a rectangular or square shape and is located at the forefront, Each of the oscillating magnets (1g,...) Is located at the back of the oscillating mirror surface (1m ′) and has a front surface parallel to the oscillating mirror surface (1m ′), and the thickness in the front-rear direction is made as thin as possible. The rotating vibrating body support means (2) includes a vibration supporting plate (21).
And a flexible plate (22), a roof-shaped convex body (23), and a pedestal (24). The vibration bearing plate (21) forms a plate-like body as thin as possible in the front-rear direction. The front surface thereof is coupled to the rear surface of the rotary vibrating body (1). The flexible plate (22) is made of a flexible elastic material so that it can be bent and rotated. Direction, long in the axial direction, and the left and right sides are concavely formed in a smooth bay on both sides, thereby forming a plate-like body having the smallest thickness between the two most concave portions. The front end surface smoothly continues to the center of the rear surface of the vibration support plate (21), and the roof-shaped convex body (23)
Any desired maximum rotation angle (θ _M ) within the rotation plane
In order to be able to rotate, the whole forms a convex body protruding forward in the shape of a roof, and smoothly connects to the rear end surface of the flexible plate (22) at the center top surface, (24) is continuous with the rear surface of the roof-shaped convex body (23) at the front surface, and the rear surface is connected to the substrate (6).
The electric drive wire ring (4) is wound in a substantially rectangular cylindrical shape,
The rear end surface is fixed to the front surface of the substrate (6) directly or via a support member having the same shape as the end surface, and each of the vibrating magnets (1g,. Then, the lines of magnetic force interlink with the wire loop portions of the opposing two sides (4 ₁ , 4 ₂ ) of the four sides formed by the electric drive loop (4). , Vibrating mirror type scanning device. 2. The rotating vibrator (1) includes one vibrating mirror (1m) and two vibrating magnets (1g, 1g), and the vibrating mirror (1m) has a contour. Each of the vibrating magnets (1g, 1g) forms a rectangular rod or a square plate, and has a single vibrating mirror surface (1m ') on the front surface. The thickness of the vibrating mirror (1m) is fixed as close as possible to the respective vibrating edges in a direction parallel to the respective vibrating edges. 21) The vibration mirror according to claim 1, wherein a front surface of the vibration mirror is coupled to a rear surface of the vibration mirror (1m) and to an intermediate region where the two vibration magnets (1g, 1g) are not fixed. Shape scanning device. 3. The rotating vibrator (1) includes one vibrating mirror (1m) and one vibrating magnet (1g), and the vibrating mirror (1m) has a rectangular outline. Or, it has a square plate-like body, has a single vibrating mirror surface (1 m ′) on the front surface, and the vibrating magnet (1g) forms a plate-like body as thin as possible in the front-rear direction. The vibrating mirror (1m) is concentrically fixed to a rear surface of the vibrating mirror (1m), and the vibrating bearing plate (21) is concentrically coupled to a rear central portion of the vibrating magnet (1g) at a front surface thereof. 2. The vibrating mirror scanning device according to 1. 4. The rotating vibrating body (1) is composed of a single vibrating mirror surface (1m ′) located on the front surface and one vibrating magnet (1g). The plate has a substantially rectangular or square contour, and the thickness in the front-rear direction is made as thin as possible. The vibrating mirror surface (1m ') is provided with the vibrating magnet (1g).
The vibrating bearing according to claim 1, wherein the front surface of the vibrating magnet (1g) is concentrically coupled to the center of the rear surface of the vibrating magnet (1g) at the front surface thereof. Mirror type scanning device. 5. A magnetic sensor (5) for detecting a rotation angle (θ) of the rotation vibrating body (1), wherein the pedestal (24) has a void (24s) in a rear portion thereof. The vibrating mirror type scanning device according to any one of claims 1 to 4, wherein the magnetic sensor (5) is disposed in the space (24s). 6. A magnetic yoke (7) having a substantially open or U-shape, wherein a pair of opposite sides (7 ₁ , 7 ₂ ) of the magnetic yoke (7) are respectively provided with the electric yoke. Drive wire ring (4)
The magnetic yoke (7) is disposed so as to face each of the rotating end faces of the rotating vibrating body (1) via a corresponding portion of the rotating vibrating body (1).
The oscillating mirror scanning device according to claim 1, wherein the oscillating mirror scanning device is arranged so as to have a substantially parallel relationship with the scanning mirror. 7. A substantially U-shaped magnetic yoke (7), and each of the opposite sides (7 ₁ , 7 ₂ ) of the magnetic yoke (7) is a corresponding part of the electric drive wire loop (4). through, the disposed to face the respective rotation end surface of the rotational vibrator (1), the junction of the magnetic yoke (7) (7 _c) is to bypass the rear surface of said base (24) The oscillating mirror type scanning device according to claim 1, wherein the scanning device is arranged in a scanning mirror. 8. The magnetic yoke (7) includes a pair of opposite sides (7 ₁ , 7) opposed to both rotating end faces of the rotating vibrating body (1).
The vibrating mirror-type scanning device according to claim 6, wherein ₂ ) has a shape curved outward and convex in a rotating plane of the rotating vibrating body (1). 9. A rotating vibrating body (1), a rotating vibrating body supporting means (2) for rotatably supporting the rotating vibrating body (1) at a central portion thereof, and the rotating vibrating body (1). (1) an electric drive wire loop (4) disposed so as to surround both the rotation end faces and both end faces, a substrate (6), and a pair of fixed magnets (8, 8); The dynamic vibrator (1) has a single vibrating mirror surface (1).
m ') and one vibrating magnetic body (1g'), and the vibrating mirror surface (1m ') has a rectangular or square shape, and is located at the forefront, The magnetic body (1g ') is provided on the vibrating mirror surface (1
m ′) is located at the rear position and forms a plate-like body parallel thereto, and the thickness in the front-rear direction is made as thin as possible. 21)
And a flexible plate (22), a roof-shaped convex body (23), and a pedestal (24). The vibration bearing plate (21) forms a plate-like body as thin as possible in the front-rear direction. The front surface thereof is coupled to the rear surface of the vibrating magnetic body (1g '). The flexible plate (22) is made of a flexible elastic material so that it can bend and rotate. Direction, long in the axial direction, and the left and right sides are concavely formed in a smooth bay on both sides, thereby forming a plate-like body having the smallest thickness between the two most concave portions. The front end surface smoothly continues to the center of the rear surface of the vibration support plate (21), and the roof-shaped convex body (23)
Any desired maximum rotation angle (θ _M ) within the rotation plane
In order to be able to rotate, the whole forms a convex body protruding forward in the shape of a roof, and smoothly connects to the rear end surface of the flexible plate (22) at the center top surface, (24) is continuous with the rear surface of the roof-shaped convex body (23) at the front surface, and the rear surface is connected to the substrate (6).
The electric drive wire ring (4) is wound in a substantially rectangular cylindrical shape,
The rear end surface is fixed to the front surface of the substrate (6) directly or via a support member having the same shape as the end surface, and each of the fixed magnets (8, 8) is outside the electric drive wire ring (4). And the vibrating magnetic body (1
g ′) are disposed at positions opposing the respective rotating end faces, and their magnetic lines of force cooperate to form the vibrating magnetic body (1).
g ') A vibrating mirror type scanning device which is magnetized in the same direction so as to penetrate in the same direction. 10. The rotating vibrator (1) includes one vibrating mirror (1m) and one vibrating magnetic body (1g ′), and the vibrating mirror (1m) has a contour. It has a rectangular or square shape and a single oscillating mirror surface (1
m '), wherein the vibrating magnetic body (1g') forms a plate-like body as thin as possible in the front-rear direction and is fixed to the rear surface of the vibrating mirror (1m). The oscillating mirror type scanning device as described in the above. 11. The rotating vibrating body (1) includes one vibrating magnetic body (1g ′) and a single vibrating mirror surface (1m ′). The vibrating magnetic body (1g ′) A rectangular or square plate-like body having a thickness as small as possible in the front-rear direction is formed, and the vibrating mirror surface (1 m ′) is
The vibrating mirror type scanning device according to claim 9, wherein the front surface of g ') is mirror-finished. 12. A substantially yoke-shaped or U-shaped magnetic yoke (7), and a pair of opposing sides (7 ₁ , 7 ₂ ) of the magnetic yoke (7) are respectively fixed to the fixed yoke. Magnet (8, 8)
And the whole of the magnetic yoke (7) is connected to the rotating vibrator (1).
The oscillating mirror type scanning device according to claim 9, wherein the oscillating mirror type scanning device is arranged so as to have a substantially parallel relationship with the scanning mirror. 13. A substantially U-shaped magnetic yoke (7), wherein the opposite sides (7 ₁ , 7 ₂ ) of the magnetic yoke (7) are respectively outer end faces of the fixed magnets (8, 8). is connected to, the coupling portion of the magnetic yoke (7) (7 _c), the base is disposed so as to bypass the rear surface (24), the oscillating mirror form according to any one of claims 9 to 11 Scanning device. 14. A rotary vibrating body (1), a rotary vibrating body supporting means (2) for rotatably supporting the rotary vibrating body (1) at a central portion thereof, and the rotary vibrating body (1). 1) a pair of electric drive wire loops (4, 4) arranged close to each of the rotating end faces;
The rotating vibrating body (1) comprises a single vibrating mirror surface (1).
m ′) and one or a plurality of vibrating magnets (1g,...), and the vibrating mirror surface (1m ′) has a rectangular or square shape and is located at the forefront, Each of the oscillating magnets (1g,...) Is located at the back of the oscillating mirror surface (1m ′) and has a front surface parallel to the oscillating mirror surface (1m ′), and the thickness in the front-rear direction is made as thin as possible. The rotating vibrating body support means (2) includes a vibration supporting plate (21).
And a flexible plate (22), a roof-shaped convex body (23), and a pedestal (24). The vibration bearing plate (21) forms a plate-like body as thin as possible in the front-rear direction. The front surface thereof is coupled to the rear surface of the rotary vibrating body (1). The flexible plate (22) is made of a flexible elastic material so that it can be bent and rotated. Direction, long in the axial direction, and the left and right sides are concavely formed in a smooth bay on both sides, thereby forming a plate-like body having the smallest thickness between the two most concave portions. The front end surface smoothly continues to the center of the rear surface of the vibration support plate (21), and the roof-shaped convex body (23)
Any desired maximum rotation angle (θ _M ) within the rotation plane
In order to be able to rotate, the whole forms a convex body protruding forward in the shape of a roof, and smoothly connects to the rear end surface of the flexible plate (22) at the center top surface, (24) is continuous with the rear surface of the roof-shaped convex body (23) at the front surface, and the rear surface is connected to the substrate (6).
Each of the electric drive wire loops (4, 4) is cylindrically formed around an axis parallel to a straight line passing through the respective rotation end faces of the rotation vibrator (1) at right angles. It is wound in an elliptical cylindrical shape or a rectangular cylindrical shape, and is arranged such that the side surfaces of the arcuate or linear portions at the front thereof are close to the respective rotating end surfaces of the rotating vibrating body (1), The rear arc-shaped, square-shaped, or straight-shaped winding portion is fixed directly or via a support member to the front surface of the substrate (6). Each of the vibrating magnets (1g,...) It is magnetized in the same direction according to a straight line penetrating itself in the left-right direction, and the lines of magnetic force interlink with the arc-shaped or straight-line portion at the front part of each of the electric drive wheels (4, 4). , Vibrating mirror type scanning device. 15. The rotating vibrator (1) includes one vibrating mirror (1m) and two vibrating magnets (1g, 1g), and the vibrating mirror (1m) has a contour. It has a rectangular or square shape and a single oscillating mirror surface (1
m '), and each of the vibrating magnets (1g, 1g) forms a square rod, has a thickness as small as possible in the front-rear direction, and has a rear surface of the vibrating mirror (1m). The vibrating bearing plate (21) is fixed in the vicinity of each vibrating edge so as to form a parallel relationship with each vibrating edge. 15. The oscillating mirror scanning device according to claim 14, wherein both oscillating magnets (1g, 1g) are coupled to an unfixed intermediate region. 16. The rotating vibrator (1) includes one vibrating mirror (1m) and one vibrating magnet (1g), and the vibrating mirror (1m) has a rectangular shape or a contour. It has a square shape and a single oscillating mirror surface (1
m '), wherein the vibrating magnet (1g) forms a plate as thin as possible in the front-rear direction, is fixed to the rear surface of the vibrating mirror (1m), and the vibration support plate (21) The oscillating mirror type scanning device according to claim 14, wherein said oscillating magnet (1g) is coupled to a rear surface of said oscillating magnet (1g) at a front surface thereof. 17. The rotating vibrator (1) includes a single vibrating mirror surface (1m ') and one vibrating magnet (1g), and the vibrating magnet (1g) has a rectangular outline. And the thickness in the front-rear direction is made as thin as possible, and the vibrating mirror surface (1m ') is provided with the vibrating magnet (1g).
The vibrating mirror type scanning according to claim 14, wherein the front surface of the vibrating mirror (21) is mirror-finished, and the vibrating bearing plate (21) is coupled to the rear surface of the plate-shaped vibrating magnet (1g) at the front surface. apparatus. 18. A rotation angle (θ) of the rotation vibrator (1).
The base (24) has a void (24s) formed in the rear thereof, and the magnetic sensor (5) has a magnetic sensor (5) in the void (24s). The oscillating mirror type scanning device according to claim 14, which is provided. 19. A rotating vibrating body (1), a rotating vibrating body support means (2) for rotatably supporting the rotating vibrating body (1) at a central portion thereof, and the rotating vibrating body (1). 1) a pair of electric drive wire loops (4, 4) arranged close to each of the rotating end faces;
The rotating vibrating body (1) comprises a single vibrating mirror surface (1).
m ′) and one or a plurality of vibrating magnets (1 g,...), and the vibrating mirror surface (1 m ′) has a substantially rectangular or square shape and is located at the forefront. Each of the oscillating magnets (1g,...) Is located at the rear of the oscillating mirror surface (1m ′) and has a front surface parallel to the oscillating mirror surface (1m ′), and the thickness in the front-rear direction is made as thin as possible. The rotating vibrating body support means (2) includes a vibration supporting plate (21).
And a flexible plate (22), a roof-shaped convex body (23), and a pedestal (24). The vibration bearing plate (21) forms a plate-like body as thin as possible, and has a front surface thereof. And a flexible elastic material is used for the flexible plate (22) so as to be able to bend and rotate, and the flexible plate (22) is short in the front-rear direction. A plate-like body which is long in the axial direction and is concave (indented) in a smooth bay shape on both left and right side surfaces, and thus the thickness between the two most concave portions is made the thinnest; The front end surface smoothly continues to the center of the rear surface of the vibration support plate (21), and the roof-shaped convex body (23)
Any desired maximum rotation angle (θ _M ) within the rotation plane
In order to be able to rotate, the whole forms a convex body protruding forward in the shape of a roof, and smoothly connects to the rear end surface of the flexible plate (22) at the center top surface, (24) is continuous with the rear surface of the roof-shaped convex body (23) at the front surface, and the rear surface is connected to the substrate (6).
The electric drive wire loops (4, 4) are respectively close to the turning end faces of the turning vibrating body (1) and are cylindrical around an axis parallel to the front-rear direction. The electric drive wire loop (4, 4) has a rear end surface directly or through a support member having the same shape as the front surface of the substrate (6). Each of the vibrating magnets (1g,...) Is magnetized in the same direction along a straight line penetrating itself in the left-right direction. A vibrating mirror-type scanning device, which is linked in the same direction as the arc-shaped or linear portion on the front side of (4) or (4). 20. The rotating vibrator (1) includes one vibrating mirror (1m) and two vibrating magnets (1g, 1g), and the vibrating mirror (1m) has a contour. Each of the vibrating magnets (1g, 1g) forms a rectangular rod or a square plate, and has a single vibrating mirror surface (1m ') on the front surface. The thickness of the vibrating mirror (1m) is fixed as close as possible to the respective vibrating edges in a direction parallel to the respective vibrating edges. 21) The vibration mirror according to claim 19, wherein a front surface of the vibration mirror is coupled to a rear surface of the vibration mirror (1m) and an intermediate area where the two vibration magnets (1g, 1g) are not fixed. Shape scanning device. 21. The rotating vibrator (1) includes one vibrating mirror (1m) and one vibrating magnet (1g), and the vibrating mirror (1m) has a rectangular shape. Or, it has a square plate-like body, has a single vibrating mirror surface (1 m ′) on the front surface, and the vibrating magnet (1g) forms a plate-like body as thin as possible in the front-rear direction. The vibrating mirror (1m) is concentrically fixed to a rear surface of the vibrating mirror (1m), and the vibrating bearing plate (21) is concentrically coupled to a rear central portion of the vibrating magnet (1g) at a front surface thereof. 20. A vibrating mirror type scanning device according to item 19. 22. The rotating vibrator (1) includes one vibrating magnet (1g) and a single vibrating mirror surface (1m ′), and the vibrating magnet (1g) has a contour. It forms a rectangular or square plate-like body and has a thickness as small as possible in the front-rear direction, and the vibrating mirror surface (1m ') is provided with the vibrating magnet (1g).
20. The vibration according to claim 19, wherein the front surface is mirror-finished, and the vibration support plate (21) is concentrically coupled to the center of the rear surface of the vibration magnet (1g) at the front surface. Mirror type scanning device. 23. A substantially U-shaped magnetic yoke (7), and the opposite sides (7 ₁ , 7 ₂ ) of the magnetic yoke (7) are respectively provided with the electric drive wire loops (4, 4). is inserted in line with the axis, the coupling portion of the magnetic yoke (7) (7 _c), the base is disposed so as to bypass the rear surface (24), one of claims 19 to 22 4. The vibrating mirror type scanning device according to claim 1. 24. The oscillating mirror type scanning according to claim 1, wherein said rotating oscillating body support means (2) is made of a flexible material such as a rubber material, a synthetic resin material, or an elastomer material. apparatus. 25. The vibrating mirror according to claim 1, wherein the bendable plate (22) of the rotating vibrating body support means (2) is made of a flexible fiber such as carbon fiber or Kevlar fiber. Shape scanning device. 26. The oscillating mirror type scanning according to claim 1, wherein said rotating vibrating body support means (2) is configured as a single continuous body made of a single elastic material. apparatus.