JPH11201641A - Automatic dryer - Google Patents

Automatic dryer

Info

Publication number
JPH11201641A
JPH11201641A JP10006849A JP684998A JPH11201641A JP H11201641 A JPH11201641 A JP H11201641A JP 10006849 A JP10006849 A JP 10006849A JP 684998 A JP684998 A JP 684998A JP H11201641 A JPH11201641 A JP H11201641A
Authority
JP
Japan
Prior art keywords
desiccant
refrigerator
humidity
vent
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10006849A
Other languages
Japanese (ja)
Inventor
Tadaichi Ushida
唯一 牛田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Living Co Ltd
Original Assignee
Toyo Living Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Living Co Ltd filed Critical Toyo Living Co Ltd
Priority to JP10006849A priority Critical patent/JPH11201641A/en
Publication of JPH11201641A publication Critical patent/JPH11201641A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To hold therein an ultra-low humidity at low cost by providing a timer control circuit having a plurality of controlling functions and providing a time difference between a recyclably energizing heating time to a heater and an opening/closing time of a shutter, thereby preventing a backflow of a moisture absorption residual water content of a desiccant thereinto. SOLUTION: The automatic dryer adapted to a long-term storage of an electronic component such as a semiconductor or the like, food or the like comprises a dry unit 4 having a desiccant 8 and a heating material 7 for heating the desiccant 8 to recycle it. The unit 4 has shutters 10, 11 for opening/closing an indoor vent port 6A and an outdoor vent port 6B. The shutter. At the time of opening the port 6A and closing the port 6B under the control of a timer control circuit 30, high humidity air therein is dehumidified by the desiccant. At the time of closing the port 6A and opening the port 6B, the air of the state containing the moisture discharged from the desiccant is exhausted outdoor to hold therein an ultra-low humidity.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、密閉庫内を自動的
に除湿処理して、半導体等の電子部品や精密機器や食品
等の長期保管に最適な自動乾燥装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an automatic drying apparatus which automatically dehumidifies the inside of a closed storage and is optimal for long-term storage of electronic parts such as semiconductors, precision equipment, foodstuffs and the like.

【0002】[0002]

【従来の技術】この種の自動乾燥装置として、図7
(a),(b)に開示されたものがある。この自動乾燥
装置1′は密閉キャビネット型になっていて、その庫内
2は側壁1aにより庫外3と仕切られている。この庫内
2の側壁1a側にはドライユニット(自動乾燥機)4を
取り付けてあり、該ドライユニット4のハウジング5内
には乾燥室5Aと通気制御室5Bとを区画する隔壁6,
6を付設してある。
2. Description of the Related Art FIG.
(A) and (b) are disclosed. This automatic drying apparatus 1 'is of a closed cabinet type, and the inside 2 of the cabinet is separated from the outside 3 by a side wall 1a. A dry unit (automatic dryer) 4 is attached to the side wall 1a side of the inside 2 of the refrigerator, and a partition 5 for partitioning a drying chamber 5A and a ventilation control chamber 5B in a housing 5 of the dry unit 4 is provided.
6 is attached.

【0003】図7(a)に示すように、乾燥室5A内に
は、内部にヒーター(発熱体)7と、このヒーター7を
包囲する粒状等の特殊乾燥剤(ゼオラム)8を内装した
一組の乾燥剤容器9を縦型状に並設し、上記隔壁6,6
に開設した庫内用通気口6A及び庫外用通気口6Bを交
互に開閉するシーソー状の一対のシャッター10,11
を各支軸13A,13Bを支点として揺動自在に支持し
てある。
As shown in FIG. 7A, inside a drying chamber 5A, a heater (heating element) 7 and a special drying agent (zeolum) 8 surrounding the heater 7 are provided. A set of desiccant containers 9 are vertically arranged side by side, and
A pair of seesaw-shaped shutters 10 and 11 that alternately open and close the in-compartment ventilation port 6A and the outside-compartment ventilation port 6B that have been opened.
Are swingably supported on the support shafts 13A and 13B.

【0004】さらに、図7(b)に示すように、支軸1
3A,13Bには、T型状の傾動杆14A,14Bが一
対のシャッター10,11とそれぞれ一体的に連動する
ように固設されており、一方の傾動杆14Aを図7
(b)において時計方向に付勢するバネ15Aと、他方
の傾動杆14Bを反時計方向に付勢するバネ15Bとを
ハウジング5内にそれぞれ張設する一方、ワイヤー1
6,17を介して形状記憶合金コイル(シャッター駆動
手段)18により各傾動杆14A,14Bを互いに連係
させたものであり、該形状記憶合金コイル18を、加熱
体19を支持する加熱板20に連設した筒体21内に貫
挿するようにして、加熱体19の発熱により筒体21内
で加熱させると共に、乾燥剤8よりの対流熱によっても
加熱させて変態現象を誘起させ、効果的に収縮させるこ
とによって各バネ15A,15Bに抗して一方の傾動杆
14Aが反時計方向に、また他方の傾動杆14Bが時計
方向に連動状に作動されるように構成したものであり、
ヒーター7及び加熱体19はそれぞれタイマースイッチ
22を介して電源23に導通自在に接続されている。
[0004] Further, as shown in FIG.
3A and 13B, T-shaped tilting rods 14A and 14B are fixedly provided so as to integrally cooperate with a pair of shutters 10 and 11, respectively.
In (b), a spring 15A for urging in the clockwise direction and a spring 15B for urging the other tilting rod 14B in the counterclockwise direction are respectively stretched in the housing 5, while the wire 1
The tilting rods 14A and 14B are linked to each other by a shape memory alloy coil (shutter driving means) 18 through the elements 6 and 17, and the shape memory alloy coil 18 is attached to a heating plate 20 supporting a heating body 19. In order to penetrate into the continuously provided cylindrical body 21 to heat the inside of the cylindrical body 21 by the heat generated by the heating body 19 and to heat by the convective heat from the desiccant 8 to induce a transformation phenomenon, which is effective. , The one tilting rod 14A is operated counterclockwise against the springs 15A and 15B, and the other tilting rod 14B is operated clockwise in conjunction with each other.
The heater 7 and the heating body 19 are each connected to a power supply 23 via a timer switch 22 so as to be able to conduct.

【0005】また、タイマースイッチ22については、
図8に示すように、6時間を1サイクルとして、5時間
30分経過後に30分間該タイマースイッチ22が開成
されてヒーター7及び加熱板19に通電し、これらの発
熱によって乾燥剤8及び形状記憶合金コイル18を加熱
するように構成されている。
[0005] Further, regarding the timer switch 22,
As shown in FIG. 8, the timer switch 22 is opened for 30 minutes after the elapse of 5 hours and 30 minutes with 6 hours as one cycle, and the heater 7 and the heating plate 19 are energized. It is configured to heat the alloy coil 18.

【0006】尚、図7(a),(b)中、符号1A,1
Bは側壁1aに開設した排気口と吸気口を示し、また、
5C,5Dはいずれも通気制御室5Bを密閉状の庫内2
に連通させる庫内通気口であって、傾動杆14A,14
Bの各脚14C,14Dとハウジング5との間にはバネ
24A,24Bを介装して、傾動杆14A,14Bの作
動の応答性を向上させ、低湿度の庫内2の空気の漏れを
低減させている。
Incidentally, in FIGS. 7A and 7B, reference numerals 1A and 1
B indicates an exhaust port and an intake port opened in the side wall 1a.
Each of 5C and 5D has a ventilation control chamber 5B in a closed chamber 2
, The tilting rods 14A, 14A.
Springs 24A, 24B are interposed between the legs 14C, 14D of B and the housing 5 to improve the responsiveness of the operation of the tilting rods 14A, 14B, and to prevent air leakage from the low humidity interior 2 of the refrigerator. Has been reduced.

【0007】次に、上記構成の自動乾燥装置1′の作用
について説明する。まず、タイマースイッチ22が開放
され、ヒーター7及び加熱体19が不作動で発熱してい
ない状態にあっては、形状記憶合金コイル18が常温で
伸長状態であって、バネ15A,15Bによって付勢さ
れ、一方の傾動杆14Aは図7(b)中時計方向に、ま
た他方の傾動杆14Bは反時計方向に回転され、各支軸
13A,13Bとにより該傾動杆14A,14Bに対し
て連動状とされた一対のシャッター10,11がそれぞ
れ同方向に回転され、いずれも図7(a)中で点線にて
示すように位置される。
Next, the operation of the automatic drying apparatus 1 'having the above configuration will be described. First, when the timer switch 22 is opened and the heater 7 and the heating element 19 are inactive and do not generate heat, the shape memory alloy coil 18 is in an extended state at normal temperature and is urged by the springs 15A and 15B. One tilting rod 14A is rotated clockwise in FIG. 7 (b), and the other tilting rod 14B is rotated counterclockwise in FIG. 7B, and is interlocked with the tilting rods 14A, 14B by the respective support shafts 13A, 13B. The pair of shutters 10 and 11 are rotated in the same direction, and both are positioned as indicated by the dotted lines in FIG.

【0008】これによって、庫内用通気口6Aが開か
れ、庫外用通気口6Bが閉じられる。この結果、乾燥室
5Aは庫内用通気口6A及び庫内通気口5C,5Dを介
して庫内2と連通され、該庫内2の多湿状態の空気は乾
燥剤容器9内の乾燥剤8によって除湿処理されて軽量化
された後、庫内2の庫内通気口5Cから図7(a)中矢
印Bで示すように庫内2に自然対流状態で帰還される一
方、この空気量を補填するように庫内2の未処理の空気
が図7(a)中矢印Aで示すように乾燥室5A内に流入
されて、順次庫内2の除湿処理が継続され、この除湿時
間が5時間30分間実施されて庫内2は十分乾燥状態に
処理される。これにより、庫内2に格納された半導体等
の収納品は低湿度状態に保管される。
As a result, the inside air vent 6A is opened, and the outside air vent 6B is closed. As a result, the drying chamber 5A is communicated with the inside of the refrigerator 2 through the ventilation hole 6A for the refrigerator and the ventilation holes 5C and 5D in the refrigerator, and the humid air in the refrigerator 2 is supplied with the desiccant 8 in the desiccant container 9. After being dehumidified to reduce the weight, the air is returned to the interior 2 from the interior ventilation port 5C of the interior 2 by natural convection as shown by an arrow B in FIG. The unprocessed air in the refrigerator 2 is supplied into the drying chamber 5A as shown by an arrow A in FIG. 7A so as to make up for it, and the dehumidification process in the refrigerator 2 is sequentially continued. The processing is performed for 30 minutes, and the inside of the refrigerator 2 is processed to a sufficiently dry state. Thereby, the storage items such as semiconductors stored in the storage 2 are stored in a low humidity state.

【0009】上記5時間30分にわたる吸湿乾燥処理の
後にタイマースイッチ22が閉成されてヒーター7と加
熱体19に通電されると、乾燥処理室5A内では、ヒー
ター7により乾燥剤8が加熱されて再生処理され、一
方、筒体21内に配設された形状記憶合金コイル18は
加熱体19の発熱により加熱板20を介して筒体21内
において急速に加熱されると共に、隣接する乾燥処理室
5A内の乾燥剤8の熱によっても複合状に加熱される。
これによって、形状記憶合金コイル18は乾燥剤8の再
生処理に追随し、タイミングを整合させて筒体21内で
収縮することとなる。
When the timer switch 22 is closed and the heater 7 and the heating element 19 are energized after the above-mentioned moisture-absorbing drying process for 5 hours and 30 minutes, the desiccant 8 is heated by the heater 7 in the drying chamber 5A. On the other hand, the shape memory alloy coil 18 disposed in the cylindrical body 21 is rapidly heated in the cylindrical body 21 through the heating plate 20 by the heat generated by the heating body 19, and the adjacent drying processing is performed. The composite material is also heated by the heat of the desiccant 8 in the chamber 5A.
As a result, the shape memory alloy coil 18 follows the regenerating process of the desiccant 8, and contracts in the cylindrical body 21 at the same timing.

【0010】その結果、各傾動杆14A,14Bはバネ
15A,15Bに抗し、また、バネ24A,24Bに付
勢されて、支軸13A,13Bを支点として、それぞれ
反時計方向もしくは時計方向に回転され、この各支軸1
3A,13Bに連結された一対のシャッター10,11
がそれぞれ同方向に回転されて、図7(a)中実線にて
示す位置に移動され、庫外用通気口6Bが開かれる一
方、庫内用通気口6Aが閉じられる。
As a result, the tilting rods 14A and 14B are opposed to the springs 15A and 15B, and are urged by the springs 24A and 24B to rotate counterclockwise or clockwise with the support shafts 13A and 13B as fulcrums. Rotated, each of these spindles 1
A pair of shutters 10, 11 connected to 3A, 13B
Are rotated in the same direction, are moved to the positions indicated by the solid lines in FIG. 7A, and the outside vent 6B is opened, while the inside vent 6A is closed.

【0011】これによって、乾燥室5Aは庫外用通気口
6B及び排気口1Aと吸気口1Bとにより庫外3と連通
され、ヒーター7で加熱されて乾燥剤8から排出された
水分を十分内包した状態の高温の空気は、図7(a)中
矢印Cで示すように,一挙に排気口1Aから庫外3に排
出され、代わってその空気量を補填するするように、図
7(a)中矢印Dで示すように、自動的に庫外3の新鮮
な空気が吸気口1B及び庫外用通気口6Bから自然対流
状に連続的に供給され、引き続いて乾燥剤8から除湿さ
れた水分を庫外3に排出させ、30分間にわたって乾燥
剤8は十分再生処理される。そして、6時間後また上記
と同じサイクルで吸湿と湿気排出を繰り返し行う。
As a result, the drying chamber 5A is communicated with the outside 3 through the vent hole 6B and the exhaust port 1A and the intake port 1B for the outside of the refrigerator, and sufficiently contains the moisture that is heated by the heater 7 and discharged from the desiccant 8. As shown by the arrow C in FIG. 7A, the high-temperature air in the state is exhausted from the exhaust port 1A to the outside of the refrigerator 3 at a stroke, and the air amount is replaced to compensate for the amount of air. As indicated by the middle arrow D, fresh air outside the refrigerator 3 is automatically and continuously supplied in a natural convection manner from the intake port 1B and the ventilation hole 6B for the exterior, and the moisture dehumidified from the desiccant 8 is subsequently removed. The desiccant 8 is discharged to the outside 3 and is sufficiently regenerated for 30 minutes. After 6 hours, the moisture absorption and the moisture discharge are repeated in the same cycle as described above.

【0012】[0012]

【発明が解決しようとする課題】しかしながら、前記従
来の自動乾燥装置1′では、図8に示すように、6時間
を1サイクルとして、その内30分間を乾燥剤8の加熱
と、湿気排出及び吸湿を行うシャッター開閉動作のため
の形状記憶合金コイル18への通電とを、同時刻同時間
の単一サイクルで行っていたため、図4に示すように、
乾燥剤8の温度が加熱終了時(30分後)は最高の温度
になっていて、該乾燥剤8の温度が冷却するまでの約3
0分間は余分の水分(吸湿残存水分)が開かれた庫内用
通気口6Aから庫内2へ逆排出(逆流)される虞があっ
た。この場合には、図5の点線で示すように、庫内2の
湿度が一時的に急上昇してしまい、庫内2を低湿度に常
に維持することが難しかった。
However, in the conventional automatic drying apparatus 1 ', as shown in FIG. 8, a cycle of 6 hours is performed, of which 30 minutes are used for heating the desiccant 8 and for discharging and discharging moisture. Since the energization of the shape memory alloy coil 18 for the shutter opening / closing operation for absorbing moisture was performed in a single cycle at the same time, as shown in FIG.
At the end of heating (after 30 minutes), the temperature of the desiccant 8 is the highest, and it takes about 3 seconds until the temperature of the desiccant 8 cools.
For 0 minute, there is a possibility that excess moisture (moisture-absorbing residual moisture) may be discharged backward (backflow) from the opened internal air vent 6A to the internal storage 2. In this case, as shown by the dotted line in FIG. 5, the humidity in the refrigerator 2 temporarily rises temporarily, and it is difficult to always maintain the refrigerator 2 at a low humidity.

【0013】そこで、本発明は、前記した課題を解決す
べくなされたものであり、乾燥剤の吸湿残存水分が庫内
に逆流するのを確実に防ぐことができると共に、庫内を
低コストで常に超低湿度に保持することができる自動乾
燥装置を提供することを目的とする。
Accordingly, the present invention has been made to solve the above-mentioned problems, and it is possible to reliably prevent the moisture-absorbing residual moisture of the desiccant from flowing back into the refrigerator, and to reduce the cost in the refrigerator at a low cost. It is an object of the present invention to provide an automatic drying device that can always maintain an extremely low humidity.

【0014】[0014]

【課題を解決するための手段】請求項1の発明は、密閉
庫内に、乾燥剤と、この乾燥剤を加熱して再生処理する
発熱体と、庫内用通気口及び庫外用通気口を開閉するシ
ャッターとを備え、このシャッターで前記庫内用通気口
を開いて前記庫外用通気口を閉じた時に前記庫内の多湿
状態の空気を前記乾燥剤によって除湿処理すると共に、
該シャッターで前記庫内用通気口を閉じて前記庫外用通
気口を開いた時に前記乾燥剤から排出された水分を含む
状態の空気を庫外に排出させるようにした自動乾燥装置
において、前記発熱体への再生通電加熱時間と前記シャ
ッターの開閉作動時間に時間差を設けた複数の制御機能
を有するタイマー制御回路を備えたことを特徴とする。
According to the present invention, a desiccant, a heating element for heating and regenerating the desiccant, a vent for the inside of the refrigerator, and a vent for the outside of the refrigerator are provided in the closed cabinet. And a shutter that opens and closes, and performs a dehumidifying process on the humid air in the refrigerator when the vent for the refrigerator is closed by closing the vent for the refrigerator with the shutter and the desiccant.
An automatic drying device configured to discharge air containing moisture discharged from the desiccant to the outside of the refrigerator when the inside ventilation hole is closed with the shutter and the outside ventilation hole is opened; A timer control circuit having a plurality of control functions in which a time difference is provided between a regeneration energizing heating time for the body and an opening / closing operation time of the shutter is provided.

【0015】請求項2の発明は、請求項1記載の自動乾
燥装置であって、前記庫内に、該庫内の湿度を感知して
前記タイマー制御回路をON・OFF制御する湿度調節
器を配置すると共に、前記乾燥剤と前記シャッターとを
少なくとも備えたドライユニットを複数配置し、この複
数のドライユニットを前記湿度調節器を介して前記タイ
マー制御回路により該各ドライユニットの作動サイクル
時間に時間差を設けてそれぞれ制御自在にしたことを特
徴とする。
According to a second aspect of the present invention, there is provided the automatic drying apparatus according to the first aspect, further comprising a humidity controller which detects humidity in the refrigerator and controls ON / OFF of the timer control circuit in the refrigerator. In addition, a plurality of dry units including at least the desiccant and the shutter are arranged, and the plurality of dry units are time-differentially operated by the timer control circuit via the humidity controller. Are provided so as to be freely controllable.

【0016】請求項3の発明は、請求項2記載の自動乾
燥装置であって、前記湿度調節器の設定湿度を変更し
て、各湿度領域において前記複数のドライユニットの運
転をそれぞれ可変自在にしたことを特徴とする。
According to a third aspect of the present invention, there is provided the automatic drying apparatus according to the second aspect, wherein the set humidity of the humidity controller is changed so that the operation of each of the plurality of dry units can be changed in each humidity range. It is characterized by having done.

【0017】[0017]

【発明の実施の形態】以下、本発明の一実施形態を図面
に基づいて説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings.

【0018】図1(a),(b)は本発明の一実施形態
の自動乾燥装置の要部の各断面図、図2は同自動乾燥装
置に用いられるタイマー制御回路の構成図、図3は自動
乾燥装置のタイマーサイクルと乾燥剤の加熱時間及びシ
ャッターの開閉作動時間の関係を示す説明図である。
FIGS. 1A and 1B are cross-sectional views of main parts of an automatic drying apparatus according to an embodiment of the present invention. FIG. 2 is a configuration diagram of a timer control circuit used in the automatic drying apparatus. FIG. 4 is an explanatory diagram showing a relationship between a timer cycle of an automatic drying apparatus, a heating time of a desiccant, and an opening / closing operation time of a shutter.

【0019】図1(a),(b)に示すように、自動乾
燥装置1は、その密閉庫内2に、乾燥剤8と、この乾燥
剤8を加熱して再生処理するヒーター(発熱体)7と、
庫内用通気口6A及び庫外用通気口6Bを開閉する一対
のシャッター10,11等を備えたドライユニット(自
動乾燥機)4を取り付けてある点、上記一対のシャッタ
ー10,11でドライブユニット4の庫内用通気口6A
を開いて庫外用通気口6Bを閉じた時に庫内2の多湿状
態の空気を乾燥剤8によって除湿処理すると共に、該一
対のシャッター10,11で庫内用通気口6Aを閉じて
庫外用通気口6Bを開いた時に乾燥剤8から排出された
水分を含む状態の空気を庫外3に排出させるようにして
ある点等は、前記従来例の自動乾燥装置1′の構成と同
様であるので、同一構成部分には同一符号を付して詳細
な説明は省略する。
As shown in FIGS. 1 (a) and 1 (b), an automatic drying apparatus 1 includes a desiccant 8 and a heater (heating element) for heating and regenerating the desiccant 8 in a closed chamber 2 thereof. 7)
A dry unit (automatic dryer) 4 having a pair of shutters 10 and 11 for opening and closing the inside vent 6A and the outside vent 6B is attached. Ventilation opening 6A
Is opened to close the outside vent 6B, the humid air inside the compartment 2 is dehumidified by the desiccant 8, and the inside vent 6A is closed by the pair of shutters 10 and 11 to vent the outside. The point that air containing moisture discharged from the desiccant 8 when the mouth 6B is opened is discharged to the outside 3 of the refrigerator is similar to the configuration of the automatic drying apparatus 1 'of the conventional example. The same components are denoted by the same reference numerals, and detailed description is omitted.

【0020】ここで、ヒーター7への再生通電加熱時間
(乾燥剤8の加熱時間)と一対のシャッター10,11
の開閉作動時間に時間差Tを設けた複数の制御機能を有
するタイマー制御回路30を、ヒーター7及び形状記憶
合金コイル(シャッター駆動手段)18を加熱する加熱
体19にそれぞれ接続してある。また、このタイマー制
御回路30にはAC電源(電源)40を接続してあると
共に、庫内2の湿度を感知して該タイマー制御回路30
をON・OFF制御する湿度検出センサーとしての湿度
調節器50を接続してある。
Here, the regeneration heating time (heating time of the desiccant 8) to the heater 7 and the pair of shutters 10, 11
A timer control circuit 30 having a plurality of control functions in which a time difference T is provided in the opening / closing operation time is connected to a heater 7 for heating the heater 7 and the shape memory alloy coil (shutter driving means) 18, respectively. Further, an AC power supply (power supply) 40 is connected to the timer control circuit 30, and the timer control circuit 30
Is connected to a humidity controller 50 as a humidity detection sensor for controlling ON / OFF of the sensor.

【0021】図2に示すように、タイマー制御回路30
は、AC電源40に接続される一対の入力端子31,3
2と、この一対の入力端子31,32に接続された制御
回路33と、この制御回路33に接続されたICタイマ
ー回路34と、このICタイマー回路34に接続された
4つの出力端子36〜39とで構成されている。このタ
イマー制御回路30の2つの出力端子36,37から乾
燥剤8を加熱するヒーター7への通電が行われ(例え
ば、図3に示すように、1サイクルを6時間とした場合
に、30分通電をONし、5時間30分通電をOFFす
る)、残りの2つの出力端子38,39から一対のシャ
ッター10,11を開閉駆動させる形状記憶合金コイル
18の加熱体19への通電を行うようになっている(例
えば、図3に示すように、1サイクルを6時間とした場
合に、1時間通電をONし、5時間通電をOFFす
る)。この場合に、乾燥剤8の加熱時間と一対のシャッ
ター10,11の開閉作動時間の時間差Tは30分とな
る。
As shown in FIG. 2, the timer control circuit 30
Are a pair of input terminals 31, 3 connected to the AC power supply 40.
2, a control circuit 33 connected to the pair of input terminals 31 and 32, an IC timer circuit 34 connected to the control circuit 33, and four output terminals 36 to 39 connected to the IC timer circuit 34. It is composed of Power is supplied to the heater 7 for heating the desiccant 8 from the two output terminals 36 and 37 of the timer control circuit 30 (for example, as shown in FIG. 3, when one cycle is 6 hours, 30 minutes). The energization is turned on and the energization is turned off for 5 hours and 30 minutes), and the remaining two output terminals 38 and 39 are energized to the heating element 19 of the shape memory alloy coil 18 that drives the pair of shutters 10 and 11 to open and close. (For example, as shown in FIG. 3, when one cycle is 6 hours, energization is turned on for 1 hour and energization is turned off for 5 hours). In this case, the time difference T between the heating time of the desiccant 8 and the opening / closing operation time of the pair of shutters 10 and 11 is 30 minutes.

【0022】以上実施形態の自動乾燥装置1のタイマー
制御回路30による乾燥剤8の温度変化と時間の関係を
図4に示す。この図4のA1ポイントで乾燥剤8の加熱
を開始する。これにより、乾燥剤8の温度は30分間で
約100〜110℃に上昇し、この間吸着水分の排出作
業を行う。A2ポイントで加熱を終了し、乾燥剤8の温
度上昇は停止し、その後、周囲温度により乾燥剤8の温
度が順次低下していく。その過程のA3ポイント(70
℃)はA2ポイントからの余熱で、まだ乾燥剤8の吸着
水分は緩やかに排出している温度域である。A3ポイン
ト以降(70℃以下)では、乾燥剤8の吸着水分の排出
がほぼ無くなるので、このA3ポイントで一対のシャッ
ター10,11によるドライブユニット4の庫内用通気
口6Aと庫外用通気口6Bの切り替えを行う。即ち、A
3ポイントで一対のシャッター10,11によりドライ
ブユニット4の庫内用通気口6Aを開いて庫外用通気口
6Bを閉じて、庫内2の多湿状態の空気を乾燥剤8によ
って除湿処理する。
FIG. 4 shows the relationship between the temperature change of the desiccant 8 and the time by the timer control circuit 30 of the automatic drying apparatus 1 of the above embodiment. At the point A1 in FIG. 4, heating of the desiccant 8 is started. Thereby, the temperature of the desiccant 8 rises to about 100 to 110 ° C. in 30 minutes, and during this time, the operation of discharging the adsorbed moisture is performed. The heating is stopped at the point A2, the temperature rise of the desiccant 8 stops, and then the temperature of the desiccant 8 gradually decreases depending on the ambient temperature. A3 points in the process (70
° C) is the residual heat from point A2, and is the temperature range in which the adsorbed moisture of the desiccant 8 is still slowly discharged. After the point A3 (70 ° C. or lower), the adsorbed moisture of the desiccant 8 is almost completely discharged. Perform a switch. That is, A
At three points, the pair of shutters 10 and 11 open the internal air vent 6A of the drive unit 4 and close the external air vent 6B, and the humid air in the internal chamber 2 is dehumidified by the desiccant 8.

【0023】従来の自動乾燥装置1′では、A1ポイン
トの乾燥剤8の加熱の開始と共に、一対のシャッター1
0,11で庫内用通気口6Aを閉じ、庫外用通気口6B
を開いて乾燥剤8から排出された水分を含む状態の空気
を庫外3に排出させ、また、A2ポイントで乾燥剤8の
加熱停止と一対のシャッター10,11による庫内用通
気口6Aの開動作と庫外用通気口6Bの閉動作への切替
を同時に行っていたので、乾燥剤8の吸湿残存水分が庫
内2へ排出する虞があり、これにより、庫内2の湿度を
上昇させていたが、本自動乾燥装置1では、A1ポイン
トの乾燥剤8の加熱の開始と共に、一対のシャッター1
0,11で庫内用通気口6Aを閉じ、庫外用通気口6B
を開いて乾燥剤8から排出された水分を含む状態の空気
を庫外3に排出させ、A2ポイントで加熱停止のみと
し、A3ポイントで一対のシャッター10,11による
庫内用通気口6Aの開動作と庫外用通気口6Bの閉動作
への切替を行っているため、乾燥剤8の吸湿残存水分の
庫内2への排出は最小となり、庫内2の湿度は低湿度に
保持される。
In the conventional automatic drying apparatus 1 ', the heating of the desiccant 8 at the point A1 is started and the pair of shutters 1
At 0,11, the inside vent 6A is closed and the outside vent 6B is closed.
Is opened to discharge the air containing the water discharged from the desiccant 8 to the outside 3 of the refrigerator, and to stop the heating of the desiccant 8 at A2 point and to open the ventilation hole 6A for the refrigerator by the pair of shutters 10 and 11. Since the opening operation and the switching to the closing operation of the outside vent 6B are simultaneously performed, there is a possibility that the moisture remaining in the desiccant 8 may be discharged into the interior 2 of the desiccant, thereby increasing the humidity of the interior 2 of the interior. However, in the present automatic drying apparatus 1, the heating of the desiccant 8 at the A1 point is started, and the pair of shutters 1
At 0,11, the inside vent 6A is closed and the outside vent 6B is closed.
Is opened to discharge the air containing moisture discharged from the desiccant 8 to the outside 3 of the refrigerator, stop the heating only at the point A2, and open the ventilation hole 6A for the interior by the pair of shutters 10 and 11 at the point A3. Since the operation and the switching to the closing operation of the outside vent 6B are performed, the residual moisture absorbed by the desiccant 8 is minimized to the inside of the refrigerator 2 and the humidity in the refrigerator 2 is kept low.

【0024】図4の乾燥剤8の加熱時間と一対のシャッ
ター10,11の切替に時間差Tをを設けることによ
り、従来の自動乾燥装置1′と本自動乾燥装置1による
庫内2の湿度の変化と時間の関係を図5に示す。この図
5は図4と同じ時間軸としたもので、B1ポイントは乾
燥剤8の加熱により庫内2及びドライブユニット4のハ
ウジング5からの微小リーク(空気漏れ)により、庫内
2の湿度は上昇する(B1〜B2間の30分間)。従来
の自動乾燥装置1′は点線で示すように、B2ポイント
(乾燥剤8の加熱停止)後も一対のシャッター10,1
1の切替を同時に行っているため、庫内2へ湿気が逆流
する虞があり、約1時間にわたり庫内2の湿度は上昇す
る。本自動乾燥装置1によると、B2ポイント後も一対
のシャッター10,11の切替は行われず(一対のシャ
ッター10,11で庫内用通気口6Aを閉じ、庫外用通
気口6Bを開いた状態のため)、B3ポイント(即ち、
図4のA3ポイントは湿気排出しない温度)で一対のシ
ャッター10,11を切替える。これにより、B3ポイ
ント以降は、庫内2の湿度は速やか低下し、乾燥剤8の
加熱サイクル中の温度上昇を最小限に抑制することがで
きる。その結果、従来は5〜10%がこの種の装置の低
湿度下限値であったものを、1%の超低湿度にまで低下
させ、その状態を安定的に保持し得る自動乾燥装置1を
低コストで提供することができる。
By providing a time difference T between the heating time of the desiccant 8 and the switching of the pair of shutters 10 and 11 shown in FIG. 4, the humidity of the inside 2 of the refrigerator by the conventional automatic drying apparatus 1 'and the automatic drying apparatus 1 can be reduced. FIG. 5 shows the relationship between the change and the time. FIG. 5 shows the same time axis as FIG. 4, and the point B1 increases the humidity in the refrigerator 2 due to minute leak (air leakage) from the refrigerator 2 and the housing 5 of the drive unit 4 due to the heating of the desiccant 8. (30 minutes between B1 and B2). As shown by the dotted line, the conventional automatic drying apparatus 1 'has a pair of shutters 10, 1 even after the point B2 (heating of the desiccant 8 is stopped).
Since the switching of 1 is performed at the same time, there is a possibility that moisture may flow back into the refrigerator 2, and the humidity in the refrigerator 2 increases for about one hour. According to the present automatic drying apparatus 1, the pair of shutters 10 and 11 are not switched even after the point B2 (the pair of shutters 10 and 11 closes the inside vent 6A and opens the outside vent 6B. Therefore, B3 point (that is,
(A3 point in FIG. 4 is a temperature at which moisture is not discharged), and the pair of shutters 10 and 11 are switched. Thus, after the point B3, the humidity of the inside of the refrigerator 2 rapidly decreases, and the temperature rise during the heating cycle of the desiccant 8 can be suppressed to a minimum. As a result, an automatic drying apparatus 1 capable of lowering the low humidity lower limit of this type of apparatus from 5% to 10% in the past to 1% ultra-low humidity and stably maintaining that state. It can be provided at low cost.

【0025】このように、自動乾燥装置1は、乾燥剤8
の加熱時間と一対のシャッター10,11の開閉の切替
時間にT時間(例えば30分)の時間差を設け、このT
時間の設定時間は、加熱終了時の乾燥剤8の温度(11
0〜150℃)から水分を排出しなくなる温度(約60
〜70℃)まで低下した時間とし、その時点で一対のシ
ャッター10,11の切替を行う。T時間は乾燥剤8の
容量や種類、乾燥剤容器9の大きさによって異なるが、
通常60〜80℃程度で排水作用は殆ど生じないので、
T時間のタイムラグを行うことにより(図3で示すA点
の位置でシャッター切替を行う)、庫内2への湿気排出
(逆流)は殆ど行われず、再生時の温度上昇による加湿
作用が無くなる分、庫内2の湿度低湿作用は促進され
る。
As described above, the automatic drying apparatus 1 includes the desiccant 8
A time difference of T time (for example, 30 minutes) is provided between the heating time of T and the switching time of opening and closing of the pair of shutters 10 and 11.
The set time of the time depends on the temperature of the desiccant 8 at the end of heating (11
0 to 150 ° C.), the temperature (about 60
7070 ° C.), at which point the pair of shutters 10 and 11 are switched. The T time varies depending on the capacity and type of the desiccant 8 and the size of the desiccant container 9,
Usually, the drainage action hardly occurs at about 60 to 80 ° C,
By performing a time lag of T time (the shutter is switched at the position of point A shown in FIG. 3), the moisture is not substantially discharged (backflow) to the inside 2 of the refrigerator, and the humidifying effect due to the temperature rise during reproduction is eliminated. The effect of lowering the humidity of the interior 2 is promoted.

【0026】この効果が従来のものと比べ、庫内2の低
湿作用を一層促進させ、低湿作用能力(低湿性能)が2
倍以上に向上し、庫内2の湿度を1%の超低湿度にまで
低下させることができ、安定した超低湿度を常に維持す
ることができる。このため、超低湿度の自動乾燥装置1
の利用時に、庫内2へ半導体等の収納品を入れるための
図示しない扉の開閉を行っても、庫内2への湿度低下が
微小時間で済み、特に扉の開閉頻度の少ない場合には、
通常6時間のサイクル周期(タイマー周期)をタイマー
制御回路30に接続された図示しないスイッチ一つで1
2時間サイクルや18時間サイクルに設定変更すること
により、超低湿度1%を保持したまま乾燥剤8の加熱時
間のサイクル当たりの比率を1/2や1/3とすること
ができ、簡単に省エネルギーを達成することができる。
即ち、電気料金を1/2や1/3にすることができる。
また、庫内2へ収納する収納品として半導体パッケージ
を収納した場合、半導体パッケージの吸湿による水分ク
ラックの発生を防止し、品質向上ひいては歩留まり向上
のため超低湿度保管が可能となる。さらに、自動乾燥装
置1の維持費を窒素ガス等の不活性ガスを用いる場合に
比べて1/10の維持費で済ますことができる。
This effect further promotes the low-humidity action of the inside 2 of the refrigerator as compared with the conventional one, and the low-humidity action capacity (low-humidity performance) is 2
The humidity in the refrigerator 2 can be reduced to an ultra-low humidity of 1%, and a stable ultra-low humidity can always be maintained. For this reason, the ultra-low humidity automatic drying apparatus 1
In the case of using, even if opening and closing a door (not shown) for putting stored items such as semiconductors into the compartment 2 is performed, the humidity in the compartment 2 can be reduced only for a short time, especially when the door is not frequently opened and closed. ,
Normally, a cycle period (timer period) of 6 hours is set to one by one switch (not shown) connected to the timer control circuit 30.
By changing the setting to a 2-hour cycle or an 18-hour cycle, the ratio of the heating time of the desiccant 8 per cycle can be reduced to 1/2 or 1/3 while maintaining the ultra-low humidity of 1%. Energy saving can be achieved.
That is, the electricity bill can be reduced to 1/2 or 1/3.
Further, when the semiconductor package is stored as a storage product to be stored in the storage 2, moisture cracks due to moisture absorption of the semiconductor package can be prevented, and ultra-low humidity storage can be performed to improve the quality and the yield. Further, the maintenance cost of the automatic drying apparatus 1 can be reduced to 1/10 of the case of using an inert gas such as nitrogen gas.

【0027】また、図6に示すように、1サイクル時間
を3時間として、乾燥剤加熱時間やシャッター切替間隔
を可変させることもできる。さらに、タイマー制御回路
30の出力端子を例えば8つに増やして、庫内2にドラ
イユニット4を2つ配置し、この2つのドライユニット
4,4を湿度調節器50を介してタイマー制御回路30
により該2つのドライユニット4,4の作動サイクル時
間に時間差(例えば3時間)を設けてそれぞれ制御自在
にしてもよい。この場合は、1サイクル時間が6時間の
場合でも相互に3時間づつずらすことで、1サイクル時
間を上記図6に示すものと同様に機能させることがで
き、庫内2の湿度を利用目的に合う適正な湿度に調節す
ることができて汎用性を向上させることができる。ま
た、上記湿度調節器50の設定湿度を変更して、各湿度
領域において上記2つのドライユニット4,4の運転を
それぞれ可変自在にしてもよい。この場合には、庫内2
に収納される収納品に適した最適な湿度に該庫内2の湿
度を容易かつ自由に調節することができる。
As shown in FIG. 6, one cycle time is set to three hours, and the drying agent heating time and the shutter switching interval can be varied. Further, the number of output terminals of the timer control circuit 30 is increased to, for example, eight, and two dry units 4 are arranged in the refrigerator 2. The two dry units 4 and 4 are connected via the humidity controller 50 to the timer control circuit 30.
Accordingly, a time difference (for example, 3 hours) may be provided between the operation cycle times of the two dry units 4 and 4 so that each of them can be controlled freely. In this case, even if the one cycle time is 6 hours, the one cycle time can be made to function similarly to that shown in FIG. The humidity can be adjusted to a suitable level, and the versatility can be improved. Further, the set humidity of the humidity controller 50 may be changed so that the operation of the two dry units 4 and 4 can be varied in each humidity range. In this case, warehouse 2
The humidity in the storage 2 can be easily and freely adjusted to the optimum humidity suitable for the storage items stored in the storage.

【0028】尚、前記実施形態によれば、シャッターを
開閉動させるシャッター駆動手段として形状記憶合金コ
イルを用いたが、モーターや電磁弁等をシャッター駆動
手段としてもよい。さらに、タイマー制御回路をICタ
イマー回路等により構成したが、電気抵抗やキャバンタ
ー等により構成してもよい。
Although the shape memory alloy coil is used as the shutter driving means for opening and closing the shutter according to the above-described embodiment, a motor, an electromagnetic valve or the like may be used as the shutter driving means. Further, although the timer control circuit is configured by an IC timer circuit or the like, it may be configured by an electric resistance, a cabanter, or the like.

【0029】[0029]

【発明の効果】以上説明したように、請求項1の発明に
よれば、乾燥剤の加熱時間と湿気排出及び吸湿を行うシ
ャッターの開閉作動時間に時間差を設けることにより、
乾燥剤の吸湿残存水分の庫内への逆流を確実に防止する
ことができると共に、庫内を低コストで常に超低湿度に
維持することができる。
As described above, according to the first aspect of the present invention, a time difference is provided between the heating time of the desiccant and the opening / closing operation time of the shutter for discharging and absorbing moisture.
It is possible to reliably prevent the desiccant from remaining moisture-absorbed residual water flowing back into the storage, and it is possible to always maintain the storage at ultra-low humidity at low cost.

【0030】請求項2の発明によれば、庫内の湿度を利
用目的に合う適正な湿度に調節することができ、汎用性
を向上させることができる。
According to the second aspect of the present invention, the humidity in the refrigerator can be adjusted to an appropriate humidity suitable for the purpose of use, and the versatility can be improved.

【0031】請求項3の発明によれば、請求項2の効果
に加えて、庫内に収納される収納品に適した最適な湿度
に該庫内の湿度を容易かつ自由に調節することができ
る。
According to the third aspect of the invention, in addition to the effect of the second aspect, it is possible to easily and freely adjust the humidity in the refrigerator to an optimum humidity suitable for the storage items stored in the refrigerator. it can.

【図面の簡単な説明】[Brief description of the drawings]

【図1】(a)は本発明の一実施形態の自動乾燥装置に
おける乾燥剤容器位置の縦断面図、(b)は同装置にお
ける形状記憶合金コイルの加熱手段位置の縦断面図であ
る。
1A is a longitudinal sectional view of a desiccant container position in an automatic drying apparatus according to an embodiment of the present invention, and FIG. 1B is a longitudinal sectional view of a heating means position of a shape memory alloy coil in the automatic drying apparatus.

【図2】上記自動乾燥装置に用いられるタイマー制御回
路の構成図である。
FIG. 2 is a configuration diagram of a timer control circuit used in the automatic drying device.

【図3】上記自動乾燥装置のタイマーサイクルと乾燥剤
加熱時間及びシャッター切替間隔の関係を示す説明図で
ある。
FIG. 3 is an explanatory diagram showing a relationship between a timer cycle of the automatic drying device, a drying agent heating time, and a shutter switching interval.

【図4】上記自動乾燥装置における乾燥剤の温度と時間
の関係を示す説明図である。
FIG. 4 is an explanatory diagram showing a relationship between the temperature of a desiccant and time in the automatic drying device.

【図5】上記自動乾燥装置の庫内の湿度と時間の関係を
示す説明図である。
FIG. 5 is an explanatory diagram showing a relationship between humidity and time in a refrigerator of the automatic drying device.

【図6】上記自動乾燥装置における他の態様のタイマー
サイクルと乾燥剤加熱時間及びシャッター切替間隔の関
係を示す説明図である。
FIG. 6 is an explanatory diagram showing a relationship between a timer cycle, a desiccant heating time, and a shutter switching interval in another mode in the automatic drying apparatus.

【図7】(a)は従来例の自動乾燥装置における乾燥剤
容器位置の縦断面図、(b)は同装置における形状記憶
合金コイルの加熱手段位置の縦断面図である。
7A is a longitudinal sectional view of a desiccant container position in a conventional automatic drying apparatus, and FIG. 7B is a longitudinal sectional view of a heating means position of a shape memory alloy coil in the same apparatus.

【図8】上記従来例の自動乾燥装置のタイマーサイクル
と乾燥剤加熱時間及びシャッター切替間隔の関係を示す
説明図である。
FIG. 8 is an explanatory diagram showing a relationship between a timer cycle, a desiccant heating time, and a shutter switching interval of the automatic drying apparatus of the conventional example.

【符号の説明】[Explanation of symbols]

1 自動乾燥装置 2 庫内 4 ドライユニット 6A 庫内用通気口 6B 庫外用通気口 7 ヒーター(発熱体) 8 乾燥剤 10,11 シャッター 30 タイマー制御回路 50 湿度調節器 DESCRIPTION OF SYMBOLS 1 Automatic drying apparatus 2 Inside of a cabinet 4 Drying unit 6A Inside of a cabinet 6B Outside of a cabinet 7B Outside of a cabinet 7 Heater (heating element) 8 Desiccant 10, 11 Shutter 30 Timer control circuit 50 Humidity controller

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 密閉庫内に、乾燥剤と、この乾燥剤を加
熱して再生処理する発熱体と、庫内用通気口及び庫外用
通気口を開閉するシャッターとを備え、このシャッター
で前記庫内用通気口を開いて前記庫外用通気口を閉じた
時に前記庫内の多湿状態の空気を前記乾燥剤によって除
湿処理すると共に、該シャッターで前記庫内用通気口を
閉じて前記庫外用通気口を開いた時に前記乾燥剤から排
出された水分を含む状態の空気を庫外に排出させるよう
にした自動乾燥装置において、前記発熱体への再生通電
加熱時間と前記シャッターの開閉作動時間に時間差を設
けた複数の制御機能を有するタイマー制御回路を備えた
ことを特徴とする自動乾燥装置。
1. An air conditioner comprising a desiccant, a heating element for heating and regenerating the desiccant, and a shutter for opening and closing a vent for the inside of the refrigerator and a vent for the outside of the refrigerator. When the inside vent is opened and the outside vent is closed, the humid air inside the compartment is dehumidified with the desiccant and the inside vent is closed with the shutter to close the outside vent. In an automatic drying device configured to discharge air containing water discharged from the desiccant when the vent is opened to the outside of the refrigerator, the regeneration heating heating time to the heating element and the shutter opening / closing operation time An automatic drying device comprising a timer control circuit having a plurality of control functions with a time difference.
【請求項2】 請求項1記載の自動乾燥装置であって、 前記庫内に、該庫内の湿度を感知して前記タイマー制御
回路をON・OFF制御する湿度調節器を配置すると共
に、前記乾燥剤と前記シャッターとを少なくとも備えた
ドライユニットを複数配置し、この複数のドライユニッ
トを前記湿度調節器を介して前記タイマー制御回路によ
り該各ドライユニットの作動サイクル時間に時間差を設
けてそれぞれ制御自在にしたことを特徴とする自動乾燥
装置。
2. The automatic drying apparatus according to claim 1, wherein a humidity controller that senses humidity in the refrigerator and controls ON / OFF of the timer control circuit is disposed in the refrigerator. A plurality of dry units including at least a desiccant and the shutter are arranged, and the plurality of dry units are controlled by providing a time difference between the operation cycle times of the respective dry units by the timer control circuit via the humidity controller. An automatic dryer characterized by being free to use.
【請求項3】 請求項2記載の自動乾燥装置であって、 前記湿度調節器の設定湿度を変更して、各湿度領域にお
いて前記複数のドライユニットの運転をそれぞれ可変自
在にしたことを特徴とする自動乾燥装置。
3. The automatic drying apparatus according to claim 2, wherein the set humidity of the humidity controller is changed, and the operation of each of the plurality of dry units is made variable in each humidity range. Automatic drying equipment.
JP10006849A 1998-01-16 1998-01-16 Automatic dryer Pending JPH11201641A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10006849A JPH11201641A (en) 1998-01-16 1998-01-16 Automatic dryer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10006849A JPH11201641A (en) 1998-01-16 1998-01-16 Automatic dryer

Publications (1)

Publication Number Publication Date
JPH11201641A true JPH11201641A (en) 1999-07-30

Family

ID=11649696

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10006849A Pending JPH11201641A (en) 1998-01-16 1998-01-16 Automatic dryer

Country Status (1)

Country Link
JP (1) JPH11201641A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2369070A (en) * 2000-11-18 2002-05-22 Russell Smith Geoffrey Regenerating desiccant humidity vent
CN100402937C (en) * 2004-10-29 2008-07-16 李泉 Electronic dehumidifying cabinet and dehumidifying method thereof
CN102795412A (en) * 2012-07-24 2012-11-28 昆山德能防潮科技有限公司 Moistureproof cabinet capable of reducing humidity quickly
DE112021003105T5 (en) 2020-06-03 2023-04-06 Fanuc Corporation laser device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2369070A (en) * 2000-11-18 2002-05-22 Russell Smith Geoffrey Regenerating desiccant humidity vent
CN100402937C (en) * 2004-10-29 2008-07-16 李泉 Electronic dehumidifying cabinet and dehumidifying method thereof
CN102795412A (en) * 2012-07-24 2012-11-28 昆山德能防潮科技有限公司 Moistureproof cabinet capable of reducing humidity quickly
DE112021003105T5 (en) 2020-06-03 2023-04-06 Fanuc Corporation laser device

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