JPH11183671A - Tables and their driving unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily adjust the positions of tables being arranged inside a vacuum container or the like under a vacuum state regardless of the directional property of operation. SOLUTION: A unit is provided with tables 2 where the operation direction of pressing force against a mobile table body 2a is set to a slant direction, a pressing member 3 for allowing the pressing force to operate on the mobile table body 2a, a rotary driving part 4, a rotation transfer shaft 5 where rotating force from the rotary driving part 4 is applied and at the same time can be separated halfway, a sealing member 6 that is mounted on the base end part of the rotation transfer shaft 5 and at the same time seals the outer periphery of the rotation transfer shaft 5, and a motion conversion member 7 that is mounted on the tip part and at the same time converts the rotary motion of the rotation transfer shaft 5 into linear motion of the pressing member 3. Also, the components 2-7 are formed into a unit.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a table and a drive unit thereof, and more particularly, to an optical element such as a mirror or a grating which can be adjusted in position and directivity. The present invention relates to tables and a drive unit thereof.

[0002]

2. Description of the Related Art As is well known, for example, a measuring apparatus or an experimental apparatus using an optical element such as a mirror, a grating, a lens, and an optical fiber is intended to adjust the position and directivity of the optical element. Various tables are incorporated.

[0003] As the above-mentioned tables, an X table of a type in which a moving table body moves linearly along only the X axis, and an XY table of a type in which a moving table body moves along two axes of the X axis and the Y axis. X of a type in which a table, also a moving table body, moves along three axes of X axis, Y axis and Z axis
There are a YZ table, and a rotary table or the like in which the table body rotates around its vertical axis. Other types of tables include those of a type in which the table body is rotated through axes perpendicular to each other and parallel to its surface (corresponding to holders such as mirror holders).

In order to move or rotate the above-mentioned various types of tables, these tables generally use a micrometer head or the like in the case of manual operation, and generally use a stepping motor or the like in the case of automatic operation. Have been.

[0005] In this case, the tables that are put into practical use or proposed today are unitized with the micrometer head, the stepping motor and the like fixedly installed on the tables.

The above-mentioned XYZ table can be moved in three axial directions by three micrometer heads or the like. These micrometer heads or the like move each moving table body along each axis. In general, the three micrometer heads and the like are configured to direct in directions along the X axis, the Y axis, and the Z axis, that is, three different directions. .

[0007]

By the way, if the micrometer head, the stepping motor, and the like are fixedly installed on the tables as in the above-mentioned prior art, for example, there is a demand for using the tables in a vacuum. There is a problem that can not be dealt with appropriately.

That is, if the position adjustment is to be performed while the tables with the micrometer head are arranged inside a vacuum vessel or the like, an operator inserts his hand into the vacuum vessel or the like that is open to the atmosphere. After the position of the tables and the like has been adjusted by operating the micrometer head, the inside of the vacuum container or the like must be evacuated. Therefore, in order to adjust the positions of the tables and the like after the inside of the vacuum container or the like is evacuated, the vacuum is once broken to open to the atmosphere, and then the hand is inserted into the inside to set the micrometer head. After that, the inside of the vacuum container or the like must be returned to the vacuum state again. In some cases, these operations need to be performed repeatedly and frequently, which not only requires extreme complexity,
There is a problem that such a mode of use cannot be tolerated at all.

On the other hand, when the tables with the stepping motor are arranged inside a vacuum vessel or the like, the wirings are appropriately sealed with respect to the vacuum vessel or the like so that the vacuum vessel or the like can be used. It is possible to adjust the position of the tables and the like by controlling the stepping motor from the outside after the inside of the device is evacuated. However,
In this case, the stepping motor must have a structure that can withstand use in a vacuum, and to manufacture a stepping motor that operates well in a vacuum,
Since there are a large number of sliding parts and the like in which seizure and galling are likely to occur, a special structure is required to operate these parts well. For this reason, not only does the production cost rise, but also there is a problem that a great deal of labor, time and expense are required to produce a stepping motor using an ultra-high vacuum (for example, using a 10 ^-10 Torr region). .

On the other hand, in the above-mentioned conventional XYZ table, three micrometer heads and the like are different from each other.
When the operator adjusts the position of the table in three directions, the position of the table is set to three.
Since the directions in which the hands are applied to the individual micrometer heads and the like are different from each other, there is a problem that a troublesome work is forced. In addition, since the viewing directions for the individual micrometer heads and the like are different from each other, not only is reading of the scale difficult, but also there is a problem that reading errors may occur in some cases.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and provides a table inside a vacuum vessel or the like so that the position thereof can be easily adjusted from the outside under a vacuum state. It is a technical object of the present invention to prevent the directionality of operation from being a problem when adjusting the position of a class.

[0012]

Means for Solving the Problems The tables and the drive unit thereof according to the present invention are characterized in that they are configured as described below in order to achieve the above technical objects.

That is, the drive unit for tables and the like described in claim 1 of the present application has a moving table body that moves linearly along one axis by the action of a pressing force, and pushes the moving table body against the moving table body. Tables in which the direction of action of the pressure is the inclined direction, a pressing member that applies a pressing force to the moving table body of the tables, a rotation driving unit,
A rotation transmission shaft to which rotation force is applied from the rotation drive unit and which can be separated on the way, a sealing member attached to a base end of the rotation transmission shaft and sealing an outer periphery of the rotation transmission shaft; A motion conversion member attached to a tip end of the rotation transmission shaft and converting the rotation of the rotation transmission shaft into a linear motion of the pressing member, and these are unitized. .

According to a second aspect of the present invention, there is provided a drive unit for tables and the like, which has a moving table body which moves linearly along one axis when a pressing force acts thereon, and which applies a pressing force to the moving table body. Tables having a non-inclination direction of action, a pressing member for applying a pressing force to the moving table body of the tables, a rotation drive unit, and a rotation force from the rotation drive unit is applied. A rotation transmission shaft that is separable on the way, a seal member attached to a base end of the rotation transmission shaft and sealing an outer periphery of the rotation transmission shaft, and a seal member attached to a distal end of the rotation transmission shaft and A motion converting member for converting the rotational motion of the rotation transmission shaft into a linear motion of the pressing member, and these are unitized.

According to a third aspect of the present invention, there is provided a driving unit for a table and the like according to the first aspect of the present invention, and a driving unit for a table and the like according to the second aspect of the invention. In combination with a drive unit, two moving table bodies of the XY table or three moving table bodies of the XYZ table are driven respectively, and the directionality of the linear motion of each pressing member is unified in the same direction. It is characterized by having.

A driving unit for a table or the like according to a fourth aspect of the present invention is a single unit which is rotatable through two axes which are parallel to a surface thereof and mutually perpendicular to each other by a pressing force. Tables having one rotary table body and the direction of action of each pressing force on two locations of the rotary table body being inclined, and pressing forces on two locations of the rotary table body of the tables, respectively Each of the pressing members, the two rotation drive units, the rotation transmission shafts to which the rotation force is applied from the rotation drive units and which can be separated in the middle thereof, A seal member attached to the base end and sealing the outer periphery of each of the rotation transmission shafts; and a rotation motion of each of the rotation transmission shafts attached to the distal end portion of each of the rotation transmission shafts, the linear movement of each of the pressing members. Each motion conversion member to be converted Have, and which are characterized by being unitized.

A driving unit for a table or the like according to a fifth aspect of the present invention is a single unit which is rotatable through two axes which are parallel to a surface thereof and mutually perpendicular to each other by a pressing force. A table having one rotary table body and the direction of action of each pressing force applied to two locations of the rotary table body is set to a non-inclination direction, and a table is provided for pressing two locations of the rotary table body. Each pressing member for applying pressure, two rotation driving units, each rotation transmission shaft to which the rotation force from each rotation driving unit is applied and which can be separated on the way, and each rotation transmission shaft A seal member attached to the base end of the rotary transmission shaft and sealing the outer periphery of each rotation transmission shaft; and a linear movement of each pressing member attached to the distal end of each rotation transmission shaft and rotating the rotation transmission shaft. Each motion conversion unit that converts to It has the door, and which are characterized by being unitized.

According to a sixth aspect of the present invention, there is provided a table-type driving unit, which includes one or both of the above-described first and second table-type driving units. One or two or three moving table bodies and one rotary table body of the composite table are respectively combined with one of the driving units of the tables described in the items 4 and 5 in combination. It is characterized in that it is driven and that the directionality of the linear motion of each pressing member is unified in the same direction.

According to a seventh aspect of the present invention, there is provided a drive unit for a table having a swivel table which is rotatable through an axis perpendicular to the surface thereof when a pressing force is applied thereto. Tables in which the direction of application of the pressing force to the table body is inclined, a pressing member for applying a pressing force to the revolving table body of the tables, a rotation drive unit, and a rotation force from the rotation drive unit , A rotation transmitting shaft that is separable in the middle of the rotation transmitting shaft, a sealing member attached to a base end of the rotation transmitting shaft and seals an outer periphery of the rotation transmitting shaft, and a distal end of the rotation transmitting shaft. And a motion converting member for converting the rotational motion of the rotation transmission shaft into a linear motion of the pressing member, and these are unitized.

The drive unit for tables and the like described in claim 8 of the present application has a swivel table body rotatable through an axis perpendicular to the surface of the swivel table when a pressing force acts on the drive unit. Tables in which the direction of action of the pressing force on the table body is a non-inclination direction, a pressing member for applying a pressing force to the revolving table body of the tables, a rotation drive unit, and rotation from the rotation drive unit A rotation transmission shaft to which a force is applied and which can be separated on the way; a seal member attached to a base end of the rotation transmission shaft to seal an outer periphery of the rotation transmission shaft; and a tip of the rotation transmission shaft. A motion converting member attached to the portion and converting the rotational motion of the rotation transmission shaft into a linear motion of the pressing member, and these are unitized.

According to a ninth aspect of the present invention, there is provided a table-type driving unit according to one or both of the first and second types of table-type driving units. A combination of any one of the drive units of the tables described in claims 4 and 5 with one of the drive units of the tables described in claims 7 and 8 above, One or two of the composite tables
Or three moving table bodies, one rotating table body, and one turning table body, and the directionality of the linear motion of each pressing member is unified in the same direction. Features.

According to a tenth aspect of the present invention, in the drive unit for a table or the like according to any one of the first to ninth aspects, the rotation transmitting shaft includes a bent portion and a telescopic portion in the middle thereof. In addition, a universal joint is provided at the bent portion, and a telescopic member capable of transmitting and rotating rotation is provided at the telescopic portion.

According to an eleventh aspect of the present invention, in the drive unit for a table or the like according to the tenth aspect, a bent portion is provided at two places, and an elastic member is provided between the two bent portions. The telescopic member is interposed and can be separated in the middle of the elastic member.

According to a twelfth aspect of the present invention, in a table or the like having a moving table body that moves linearly in one direction by the action of a pressing force, a portion excluding a surface portion of the moving table body is provided. A concave portion having an open outer surface portion is formed at a target portion, and a bottom surface of the concave portion is an inclined surface on which the pressing force acts.

According to a thirteenth aspect of the present invention, in the tables according to the twelfth aspect, the concave portions are formed in at least two of the four corners of the movable table. And

[0026]

According to the invention as set forth in claim 1 of the present application, when installing a drive unit for a table or the like in a vacuum vessel, first, the rotation transmission shaft is separated so that two units are used. Divided into Then, the tables, the pressing member, the motion converting member, and the tip side of the rotation transmission shaft, which are the constituent elements of one of the separated units, are taken into the vacuum container, and the tables are set in a predetermined position. On the other hand, the rotation drive unit, the seal member, and the base end side of the rotation transmission shaft, which are components of the other unit separated from each other, are located outside the vacuum vessel, and in this state, the base of the rotation transmission shaft is The end side is inserted into the inside of the vacuum container, and the rotation drive unit and the seal member are installed outside the vacuum container. Thereafter, if the rotation transmission shaft once separated as described above is returned to the original non-separated state again, the rotation transmission shaft can perform the rotation transmission action over its entire length.

Thereafter, by evacuating the inside of the vacuum container or the like, the rotational motion obtained by the rotary drive unit existing in the atmosphere includes a seal member (including a member other than the seal member of the drive unit (the following embodiment). After being transmitted to a rotation transmission shaft existing inside a vacuum vessel or the like maintained in a vacuum state, the motion is converted into linear motion of the pressing member by the operation of the motion converting member. As a result, the pressing member presses the moving table body of the tables in the inclined direction.

In this case, if the pressing member linearly moves in a direction orthogonal to the movable direction of the moving table, the pressing force of the pressing member is inclined in a direction inclined with respect to the direction of the linear movement. Due to the action, the moving table body moves in a direction orthogonal to the direction of linear movement of the pressing member. Therefore, the pressing member can be disposed so as to linearly move in a direction different by 90 ° with respect to the moving axis of the moving table body, and at the same time, has the same linear moving direction as the pressing member. Alternatively, it is also possible to arrange the rotation transmission shaft so as to extend along substantially the same direction. As described above, since the direction of the linear movement of the pressing member and the direction of disposition of the rotation transmitting shaft are the same or substantially the same, the configuration of the connecting portion between them is extremely simplified. Further, the position of the rotary drive unit outside the vacuum vessel can also be shifted on an extension in a direction different from the moving axis of the moving table by 90 °.

Specific examples of the rotation drive unit include a manually operated micrometer head and a simple knob, and motors such as a stepping motor that can be automated by an electric method. .

As described above, according to the first aspect of the present invention, the inside of the vacuum container is evacuated by assembling the unitized driving mechanism for the tables into the vacuum container. Even after this, the position of the moving table can be adjusted without breaking the vacuum by operating the rotation drive unit. Further, when a motor such as a stepping motor is used as the rotary drive unit, there is no need to make the motor a structure that can withstand use in a vacuum, so that the structure is simplified and the manufacturing cost is reduced. Can be achieved. Further, since the table and the drive mechanism are unitized, assembly to the vacuum vessel can be performed very easily, workability can be improved, and maintenance and inspection after assembly can be performed very easily. Will be.

The invention described in claim 2 of the present application is different from the invention described in claim 1 only in that the pressing direction of the pressing member against the moving table body of the tables is the non-inclination direction. Are different. Therefore, the direction of the linear movement of the pressing member and the direction of disposition of the rotation transmission shaft can be made to coincide with the direction along the movement axis of the moving table body. On an extension of Other functions and effects are the same as those of the first aspect of the present invention.

According to the invention described in claim 3 of the present application, when manufacturing a so-called XY table in which the movable table slides along both the X axis and the Y axis orthogonal thereto, for example, along the X axis A table having a moving table body that moves
The drive unit of the above-mentioned claim 2 is used as the drive unit of the table, while the drive unit of the table of the above-mentioned claim 1 having the moving table body moving along the Y axis is used. They are used to assemble them so as to have a function as an XY table. By doing so, the directionality of the linear motion of the pressing members of both drive units can be made the same, and the arrangement direction of both rotation transmission shafts can be made the same,
Furthermore, it becomes possible to arrange both rotation driving units in the same place. Therefore, waste of space in the vacuum vessel is eliminated when, for example, the linear motion directions of the two pressing members point in directions orthogonal to each other and the directions of disposition of the rotation transmission shafts also point in directions orthogonal to each other. As well as
When the two rotary drive units are installed at positions spaced apart by 90 degrees from each other outside the vacuum vessel, the operability of the rotary drive unit is deteriorated and the installation space is wasted.

Further, the invention described in claim 3 is an X
A movable table body slides along three axes: an axis, a Y axis orthogonal to the axis, and a Z axis orthogonal to both axes.
The present invention can also be applied when manufacturing a table.
That is, for example, the drive unit of the above-described claim 2 is used as a drive unit of a table having a moving table body moving along the X axis, while a table having a moving table body moving along the Y axis is used. A drive unit for a table and a drive unit for a table having a moving table moving along the Z-axis, each of which has the function of an XYZ table; It is assembled to have. This allows
The directionality of the linear motion of each pressing member of the three drive units can be made the same, and the direction of disposition of each rotation transmission shaft can also be made the same. It is possible to arrange them collectively. Therefore,
In this case, the same operation and effect as those of the above-described XY table can be obtained.

According to the invention described in claim 4 of the present application,
In the case of having a single rotary table body that is rotatable through two axes that are parallel to the surface and that are perpendicular to each other, the rotary table body is rotated around each axis by each pressing member that performs linear motion. If a pressing force is applied in a non-inclined state at a position separated from the corresponding axis by a predetermined dimension, in a direction orthogonal to the surface and also in a direction orthogonal to the axis, Good. In this case, since the action directions of the respective pressing forces are all directions orthogonal to the surface of the rotary table body, the two pressing members are in a state parallel to each other. According to the fourth aspect of the present invention, since the action direction of the pressing force is the inclined direction, the linear motion direction of each pressing member is in a state parallel to the surface of the rotary table body and mutually. It becomes possible to be in a state parallel to. Also in the case of the present invention, the same functions and effects can be obtained by the same components as those of the above-described first aspect.

According to the invention described in claim 5 of the present application,
As described above, when the rotary table body is rotatable via two axes parallel to each other and perpendicular to each other, the rotary table is moved by each pressing member performing a linear motion. In order to rotate around the axis, a pressing force is applied in a non-inclined state at a position away from the corresponding axis by a predetermined dimension, in a direction orthogonal to the surface and also in a direction orthogonal to the axis. In this case, in this case, since the action directions of the respective pressing forces are all directions orthogonal to the surface of the rotary table body, the two pressing members are in a state parallel to each other. Also in the case of the present invention, the same functions and effects can be obtained by the same components as those of the above-described first aspect.

According to the invention described in claim 6 of the present application, the so-called X table or the so-called XY table or the so-called X table in which the movable table slides along only one axis.
When a composite table is manufactured by combining a YZ table and a drive unit such as a table having a rotary table body that rotates through the two axes, the directivity of the linear motion of the pressing member of each drive unit is made the same. This makes it possible to easily arrange the rotation transmission shafts in the same direction, and furthermore, it is possible to collectively arrange the rotation drive units at the same location. Therefore, for example, when the linear motion directions of the pressing members are oriented in different directions and the directions of the rotation transmission shafts are oriented in different directions, waste of space in the vacuum vessel is eliminated. At the same time, each of the rotation drive units is set to 90 °
When installed at a position separated by an angle of 80 °, the operability of the rotary drive unit is deteriorated and the installation space is wasted.

According to the invention described in claim 7 of the present application,
In the case where the rotating table body is rotatable through an axis perpendicular to the surface thereof, if the rotating table body is rotated around the axis by a pressing member that performs a linear motion, the rotating table body deviates from the axis by a predetermined distance. A pressing force may be applied to the projection formed at the set position, preferably on the outer periphery of the revolving table body, in a direction parallel to the surface and perpendicular to the axis in a non-inclined state. By the way, according to the invention of claim 7, since the action direction of the pressing force is the inclined direction, the linear motion direction of the pressing member is perpendicular to the surface of the turning table body, that is, of the turning table body. It is possible to make them parallel to the axis. Also in the case of the present invention, the same functions and effects can be obtained by the same components as those of the above-described first aspect.

According to the invention described in claim 8 of the present application,
As described above, in the case where the turning table body is rotatable through an axis perpendicular to the surface, in order to rotate the turning table body around the axis by a pressing member that performs a linear motion, The pressing force may be applied in a non-inclined state at a position separated from the axis by a predetermined dimension in a direction parallel to the surface and perpendicular to the axis. Since the direction of action of the pressing force in this case is the non-inclination direction, the direction of linear movement of the pressing member is the direction parallel to the surface of the revolving table body and the direction orthogonal to the axis thereof as described above. Becomes Also, in the case of the present invention, the same operation and effect can be obtained by the same components as those of the above-described first embodiment.

According to a ninth aspect of the present invention, there is provided the above-described so-called X table, the above-mentioned XY table, or the above-mentioned so-called XYZ table, a drive unit for a table having the above-mentioned rotary table body, When a composite table is manufactured by combining with a drive unit such as a table having a body, all the directions of linear motions of the pressing members of each drive unit are made the same, so that the arrangement direction of each rotation transmission shaft is also changed. It is easy to make them the same, and furthermore, it becomes possible to collectively arrange the rotary drive units at the same location. Therefore, for example, when the linear motion directions of the pressing members are oriented in different directions and the directions of the rotation transmission shafts are oriented in different directions, waste of space in the vacuum vessel is eliminated. At the same time, each of the rotation drive units is set to 90 ° or 1
When installed at a position separated by an angle of 80 °, the operability of the rotary drive unit is deteriorated and the installation space is wasted.

According to the invention as set forth in claim 10 of the present application, a rotation transmission shaft having a bent portion provided with a universal joint and an expansion / contraction portion provided with an expansion / contraction member capable of transmitting rotation is provided. When a plurality of rotary drives are collectively installed, the position of the rotary drives may be slightly reduced if necessary due to the need to avoid interference between the rotary drives. Even if it is displaced and mounted, smooth rotational drive will be performed.

According to the invention described in claim 11 of the present application, in addition to obtaining the same operation and effect as in the invention described in claim 10, in addition to the bending portions ( Since the (universal joint) is provided, the work of attaching and detaching the elastic member can be easily performed, and the workability is improved.

According to the twelfth aspect of the present invention, the moving table body is configured to be able to be pressed from a direction perpendicular to the moving axis, that is, the moving table body is used as a means for setting the acting direction of the pressing force to the inclined direction. An inclined surface is formed on the table body. Then, in order to form this inclined surface, a concave portion whose outer surface portion direction is open is formed at a partial location other than the surface portion of the moving table body, and the bottom surface of this concave portion is the same as the inclined surface. It is being done. According to this, the movable table body performs the pressing action by causing the tip of the member that performs the pressing action from the outer surface of the recess to enter the recess and pressing the inclined surface of the bottom of the recess by the tip. It moves in a direction orthogonal to the moving direction of. In this case, since the surface portion of the moving table body is not involved in the formation of the inclined surface at all, in other words, even if a concave portion is formed in the moving table body, the surface portion has a thick portion having a predetermined thickness. , The surface of the moving table body can be kept usable over the entire surface. Further, since the concave portion is used when the inclined surface is formed, the projecting portion does not exist, so that the size and weight can be reduced, and a sufficient peripheral space can be secured.

According to the thirteenth aspect of the present invention, the concave portion (the bottom surface is an inclined surface) is formed at at least two corners of the moving table body. The pressing direction can be changed to the opposite side or the pressing position can be easily shifted depending on whether the tip of the member that performs the pressing action is pressed against the inclined surface of the concave portion, and the design can be easily performed. Will increase the degree of freedom.

[0044]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram showing an embodiment of a table and its driving unit according to the present invention.

FIG. 1 shows a table according to a first embodiment of the present invention.
FIG. 2 is a plan view showing a part of the driving unit of a bull type, and FIG. As shown in FIG.
The drive unit 1 has a moving table 2a that moves linearly along the YY direction in FIG. 1 when a pressing force is applied, and the direction of action of the pressing force on the moving table 2a is the inclination direction. And a pressing member 3 for applying a pressing force to the moving table body 2a.

The drive unit 1 further includes a rotary drive unit 4 composed of a micrometer head, a rotary transmission shaft 5 to which a rotary force is applied from the rotary drive unit 4 and which can be separated on the way. A magnetic shield type sealing member 6 attached to the base end of the rotation transmission shaft 5 and sealing the outer periphery of the rotation transmission shaft 5; A motion converting member 7 for converting a rotational motion into a linear motion of the pressing member 3; The components 2 to 7 are unitized.

The rotation transmission shaft 5 has a bent portion 5
a, 5a and a telescopic part 5b, a universal joint is provided at each of the bent parts 5a, 5a, and a telescopic member capable of transmitting rotation and expanding and contracting is provided at the telescopic part 5b. Is arranged

The table 2 is described in detail (see FIGS. 1 and 2). The movable table 2a is held above the fixed table 2b via crossed roller guides G, G, G, G. And the moving table 2
A concave portion 8 having a right-angled triangular shape in a plan view, in which the outer side surface direction is open, is formed in a partial location other than the surface portion a. The bottom surface of the concave portion 8 is an inclined surface 8a having an inclination angle of 45 ° for the above-mentioned pressing force to act. In this embodiment, the concave portions 8 are formed at four corners of the moving table 2a.

The motion converting member 7 (see FIG. 2), in this embodiment, has a female screw portion 10 formed in a block body 9 fixedly mounted on the side surface of the fixed table body 2b, and the rotation transmitting shaft. 5 is formed by forming a male screw portion 11 at the distal end thereof and screwing the both.

In this embodiment, the pressing member 3 includes a slide body 13 slidable only in the X-X direction along a rail 12 formed on the upper surface of the block body 9, and a tip of the slide body 13. And a roller body (ball bearing) 14 which is rotatably held by the roller. The spherical body embedded in the distal end portion (male thread portion 11) of the rotation transmission shaft 5 is in contact with the lower protrusion 13 a integrally formed with the slide body 13, and the spherical body embedded in the distal end of the slide body 13. The roller body 14 is the moving table body 2
a is in contact with the inclined surface 8a. .

The telescopic member 5b is fixed to the rod 15 at the base end of the rotation transmission shaft 5 and has a rod 16 at the distal end thereof at an inner hole of a cylindrical body 16 having an elongated hole 16a open at one end. The portion 17 is configured to be fitted so as to be movable in the axial direction. In this case, a predetermined gap is provided between the other end of the elongated hole 16a and the end face of the distal rod portion 17. Two rollers 18, 18 are rotatably attached to the distal end of the distal rod portion 17, and the outer peripheral surface of one of the rollers 18 is on one side of the long hole 16 a of the cylindrical body 16. The outer peripheral surface of the other roller 18 abuts only on the other side edge of the long hole 16a.

A large number of mounting holes (female screws) 19 for mounting various members are formed on the entire surface of the moving table 2a, and the moving table 2a is composed of both table bodies. An elastic body (not shown) such as a coil spring disposed in a gap between 2a and 2b is urged downward in FIG.

According to the above-described configuration, when the operator rotates the operation knob of the rotation drive unit 4 composed of a micrometer head, the rotation force is applied to the rotation transmission shaft 5 and the rotation transmission shaft 5 is rotated. The rotational motion of the shaft 5 is converted into a linear motion in the axial direction, that is, the XX direction by the action of the motion converting member 7. As a result, the roller body 1 at the tip of the pressing member 3
4 and the contact position between the movable table 2a and the inclined surface 8a changes, and the movable table 2a moves in the YY direction.

In the first embodiment, the moving table 2 is used.
a is formed with an inclined surface 8a and the pressing member 3 is
However, conversely, a roller body may be attached to the moving table body 2a, and the pressing member 3 may be formed with an inclined surface. In the first embodiment, a micrometer head with a scale is used as the rotary drive unit 4. However, a simple knob without a scale may be used, or a motor such as a stepping motor may be used. There may be. Then, in the first embodiment,
The above three types of rotation drive units can be easily replaced.

FIGS. 3 and 4 show a drive unit for tables and the like according to a second embodiment of the present invention. The difference between the second embodiment and the first embodiment is the movement of the table. The point that the table body 2a is movable in the X-X direction, the point that the block body 9 of the motion conversion member 7 has an L-shaped cross section, and that the pressing member 3 is simply a spherical body at the tip of the male screw portion 11. 11a and the point that the contact portion of the moving table body 2a with which the pressing member 3 contacts is a non-inclined surface. Therefore, according to the second embodiment, by operating the rotation drive unit 4, the moving table 2a moves in the X-X direction. Since the other components are the same as those of the first embodiment, in FIGS. 3 and 4, the same reference numerals are given to the same components as those of the first embodiment, and the description thereof will be omitted. Omitted.

FIGS. 5 and 6 show a drive unit for a table or the like according to a third embodiment of the present invention. The difference between the third embodiment and the first embodiment is that the drive unit is fixed. The rotation table body 22a is Xa with respect to the table body 22b.
A point held rotatably around the axis and around the Ya axis, and one inclined surface 8a is formed on the back surface of the block body 29 extending and attached to the turntable 22a, and the other inclined surface 8a is formed. It is formed on the back surface of the block body 39 directly attached to the back surface of the rotary table body 22a. In the third embodiment, two rotation transmission shafts 5, 5 are arranged in parallel. Therefore, according to the third embodiment, the rotary table 22a rotates about the Xa axis by operating the lower rotary drive unit 4 in FIG. 5, whereas the upper rotary drive in FIG. By operating the unit 4, the rotary table body 22a rotates around the Ya axis. In this case, the rotary table body 22a is in a state of being urged to rotate in the respective predetermined directions with respect to the two shafts by an elastic body (not shown). The other components are the same as those in the first embodiment described above. Therefore, in FIGS. 5 and 6, the same reference numerals are given to the same components as those in the first embodiment, and the description thereof will be omitted. Omitted.

FIG. 7 shows a table according to a fourth embodiment of the present invention.
The fourth embodiment differs from the first embodiment in that the fourth embodiment differs from the first embodiment in that the swivel table 32a is held rotatably about the support shaft 33 with respect to the fixed table 32b. And the tip of the elastic urging mechanism 35 from one side abuts against the protrusion 34 screwed and fixed to the boss of the swivel table 32a, and presses the pressing member 3 (male thread 11 from the other side). (The spherical body at the tip of the tip) is in a non-inclined state. Therefore, according to the fourth embodiment, by operating the rotation drive unit 4, the turning table body 32a rotates around the support shaft 33. In addition, regarding the other constituent requirements, the first
Since the configuration is the same as that of the first embodiment, in FIG. 7, the same components as those of the first embodiment are denoted by the same reference numerals, and description thereof is omitted.

FIG. 8 shows a tape according to the first to fourth embodiments.
It shows a schematic configuration of a composite table 40 obtained by combining bull type drive units. Specifically, a table-type drive unit T2 according to the second embodiment, a table-type drive unit T1 according to the first embodiment, and a A drive unit T1 for tables and the like according to the first embodiment, a drive unit T3 for tables and the like according to the third embodiment, and a drive unit T4 for tables and the like according to the fourth embodiment are assembled. It is. According to the composite table 40, all the pressing members 3 have the same linear motion directionality, so that all the rotation transmission shafts 5 can have the same directivity.
The one shown in the figure guides three rotation transmitting shafts 5 to two ports A1 and A2 existing in the same direction, and three rotations to each flange F1 and F2 of the two ports. The drive unit 4 is installed collectively.

[Brief description of the drawings]

FIG. 1 is a plan view showing a table-type drive unit according to a first embodiment of the present invention.

FIG. 2 is a partially broken enlarged front view showing a drive unit for tables and the like according to the first embodiment of the present invention.

FIG. 3 is a plan view showing a driving unit for tables and the like according to a second embodiment of the present invention.

FIG. 4 is a partially broken enlarged front view showing a drive unit for tables and the like according to a second embodiment of the present invention.

FIG. 5 is a plan view showing a driving unit for tables according to a third embodiment of the present invention.

FIG. 6 is an enlarged front view of a main part showing a drive unit for tables according to a third embodiment of the present invention.

FIG. 7 is a plan view showing a table-type drive unit according to a fourth embodiment of the present invention.

FIG. 8 is a schematic front view showing a composite table obtained by combining the drive units of the tables according to the first to fourth embodiments of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Drive unit of tables 2 Tables 2a Moving table body 3 Pressing member 4 Rotation drive part 5 Rotation transmission shaft 5a Bending part 5b Extension part 6 Seal member 7 Motion conversion member 8 Depression 8a Inclined surface

Claims (13)

[Claims] 1. A table having a moving table body that moves linearly along one axis by the application of a pressing force, and a table in which the direction of the pressing force applied to the moving table body is an inclined direction. A pressing member for applying a pressing force to a moving table body such as a table, a rotation drive unit, a rotation transmission shaft to which rotation force from the rotation drive unit is applied and which can be separated in the middle thereof, A seal member attached to the base end of the rotation transmission shaft and sealing the outer periphery of the rotation transmission shaft; and a rotation movement of the rotation transmission shaft attached to the tip end of the rotation transmission shaft and converting the rotation of the rotation transmission shaft into a linear movement of the pressing member. A drive unit for tables and the like, comprising a motion converting member for converting, and these are unitized. 2. A table having a moving table body that moves linearly along one axis by the application of a pressing force, and a direction in which the pressing force acts on the moving table body in a non-inclination direction; A pressing member for applying a pressing force to a moving table body of the tables, a rotation driving unit, a rotation transmission shaft to which rotation force from the rotation driving unit is applied and which can be separated in the middle thereof, A sealing member attached to a base end of the rotation transmission shaft and sealing an outer periphery of the rotation transmission shaft; and a linear movement of the pressing member attached to a distal end of the rotation transmission shaft and rotating the rotation transmission shaft. And a motion conversion member for converting the motion into a unit, and these are unitized. 3. A combination of a table-type drive unit according to claim 1 and a table-type drive unit according to claim 2 to form two moving table members of an XY table or an XYZ table. 3. A driving unit for a table, wherein the three moving table bodies are driven respectively, and the direction of linear movement of each pressing member is unified in the same direction. 4. A rotary table having a single rotary table which is rotatable through two axes which are parallel to a surface thereof and which are perpendicular to each other when a pressing force is applied thereto, A table in which the direction of action of each pressing force on the portion is an inclined direction, a pressing member for applying a pressing force to each of two portions of the rotary table body of the table, and two rotation driving portions; A rotational force from each of the rotational drive units is applied, and each rotational transmission shaft is detachable in the middle thereof, and is attached to a base end of each of the rotational transmission shafts, and an outer periphery of each of the rotational transmission shafts. A sealing member for sealing, and a motion conversion member attached to a tip end of each of the rotation transmission shafts and converting the rotational motion of each of the rotation transmission shafts into the linear motion of each of the pressing members; and these are units. It is characterized by being Table driving unit. 5. A rotary table having a single rotary table body which is rotatable through two axes which are parallel to a surface thereof and which are perpendicular to each other when a pressing force is applied thereto, and wherein the rotary table body has a single rotary table body. Tables in which the direction of action of each pressing force on the location is a non-inclination direction, each pressing member for applying a pressing force to two locations of the rotary table body of the tables, and two rotary driving units And a rotation transmission shaft to which rotation force is applied from each of the rotation drive units and which can be separated in the middle thereof, and an outer periphery of each rotation transmission shaft attached to a base end of each rotation transmission shaft. And a motion conversion member attached to the tip of each of the rotation transmission shafts and converting the rotational motion of each of the rotation transmission shafts into the linear motion of each of the pressing members, and Note that the unit is Driving unit for tables etc. 6. A driving unit for a table or the like according to claim 1 or 2, and a driving unit for a table or the like according to claim 4 or 5. One or two or three moving table bodies and one rotary table body of the composite table are driven in combination with each other, and the directionality of the linear motion of each pressing member is set in the same direction. A drive unit for tables, which is unified to 7. A table having a turning table body rotatable through an axis perpendicular to the surface thereof by the action of a pressing force, and a direction in which the pressing force acts on the turning table body in an inclined direction. , A pressing member for applying a pressing force to the revolving table body of the tables, a rotation drive unit, and a rotation transmission that is provided with a rotation force from the rotation drive unit and is separable on the way. A shaft, a seal member attached to a base end of the rotation transmission shaft and sealing an outer periphery of the rotation transmission shaft, and a pressing member attached to a tip end of the rotation transmission shaft and controlling the rotational movement of the rotation transmission shaft. And a motion conversion member for converting the motion into a linear motion, and these are unitized. 8. A turning table body which is rotatable through an axis perpendicular to the surface thereof by the action of a pressing force, and the direction in which the pressing force acts on the turning table body is a non-inclination direction. A table, a pressing member for applying a pressing force to the rotating table body of the table, a rotation driving unit, and a rotation that is provided with a rotation force from the rotation driving unit and is separable in the middle thereof. A transmission shaft, a seal member attached to a base end of the rotation transmission shaft and sealing an outer periphery of the rotation transmission shaft, and a pressure member attached to a tip end of the rotation transmission shaft and pressing the rotation movement of the rotation transmission shaft. And a motion converting member for converting the motion into linear motion of the member, and these are unitized. 9. A driving unit for a table or the like according to claim 1 or 2, and a driving unit for a table or the like according to claim 4 or 5. 9. One or two or three moving table bodies and one rotary table of a composite table by combining one of them with one of the table driving units according to claims 7 and 8. A drive unit for a table, wherein the body and one turning table body are respectively driven, and the direction of linear movement of each pressing member is unified in the same direction. 10. The rotation transmitting shaft has a bent portion and a telescopic portion in the middle thereof, a universal joint is arranged at the bent portion, and rotation transmission is possible to the telescopic portion. The drive unit for a table or the like according to any one of claims 1 to 9, wherein a telescopic member that can expand and contract is provided. 11. A bend portion is provided at two places, and an elastic member is interposed between the two bend portions, and the middle of the elastic member is separable. Item 11. A driving unit for a table according to item 10. 12. A table having a moving table body that moves linearly in one direction by the application of a pressing force, wherein the outer surface part direction is open at a partial location other than the surface part of the moving table body. Tables characterized by forming a concave portion in a state and using a bottom surface of the concave portion as an inclined surface on which the pressing force acts. 13. The tables according to claim 12, wherein the concave portions are formed in at least two of the four corners of the movable table body.