JPH11169754A - Liquid discharge method, liquid coating nozzle and apparatus using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make the dripping amt. of a coating soln. on a surface to be coated as little as possible within a necessary range to eliminate the necessity for the shaking-of or recovery of an excessive soln. and to continuously discharging the coating soln. by relatively simple constitution to prevent the drying of the coating soln. SOLUTION: A liquid coating nozzle 20 equipped with a liquid storage part 22 having a liquid introducing port 22i and a liquid discharge orifice 23 and an air storage part 24 having an air introducing port 24i and an air discharge orifice 25 and having the respective discharge orifices arranged thereto so that the discharge line L1 of the liquid discharge orifice and the discharge line L2 of the air discharge orifice cross each other at a predetermined angle is used as a liquid is discharged in a predetermined direction from the liquid discharge orifice while air is discharged from the air discharge orifice to be blown on the discharged liquid at a predetermined angle and a part of liquid droplets formed from the discharged liquid is allowed to drip in the air discharge direction.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid discharging method for discharging and applying a liquid to a surface of an object to be coated, and a liquid applying nozzle and a liquid applying apparatus using the same.

[0002]

2. Description of the Related Art As is well known, in the process of manufacturing various industrial products, there is provided an application step of applying a liquid to a target surface in order to form a thin film of a predetermined property on a specific surface of the product. For example, in the case of a cathode ray tube (CRT) for a color television, red (R), green (G), and blue (B) are applied by coating a liquid containing a phosphor on a protective glass serving as a display portion thereof. Are formed. In such a coating process, in order to form a thin film having a thickness as uniform as possible, it is required to apply the coating solution as uniformly as possible to the target surface. For example, the above-mentioned cathode ray tube or various substrates (for example, In the case of a relatively wide or large area, such as a semiconductor substrate or an optical disk substrate, it is generally difficult to apply uniformly.

As a liquid coating method used in such a coating step, for example, as shown in FIG. 17, it is conceivable to perform a coating by sweeping a nozzle 110 which is long in a width direction on the surface of a coating object W '. Have been. In this conventional example,
The liquid application apparatus 101 includes a liquid application nozzle 110, a work support 102 that rotatably supports an application object W ′ (for example, a panel of a cathode ray tube for a color television), and a liquid application nozzle 110 that applies the liquid application nozzle 110 to the application object W ′. A nozzle moving mechanism (not shown) for moving the nozzle in the Y direction (a direction orthogonal to the nozzle longitudinal direction X). A mechanical shutter 104 and a collecting liquid receiver 105 are disposed below the liquid application nozzle 110, and are appropriately used as needed, as described later.

In the setting state shown in FIG. 17, the liquid application nozzle 110 arranged above the application object W ′ is moved from the liquid ejection port to the application liquid (for example, a phosphor) as shown in FIG. The slurry is moved in the Y direction while discharging (slurry in which the particles are dispersed), whereby the coating is performed on the surface of the coating target W ′. According to this method, the entire surface of the surface to be applied can be applied in a relatively short time. When the coating is completed in this way, as shown in FIG. 19, the work support 102 is rotated while the coating Cf 'is not dried, and the centrifugal force acts to homogenize the coating and apply it to the central portion. To prevent dripping. Then, the surplus coating liquid is shaken off and the work W ′ is laid down (see FIG. 20), and thereafter, drying is performed. The surplus coating liquid that has been shaken off is collected by a predetermined collecting means (not shown).

FIGS. 21 and 2 show specific examples of the liquid application nozzle used in the above-described application method.
As shown in FIG. In the liquid application nozzle 120 illustrated in FIG. 21, the application liquid stored in the liquid storage unit 122 is applied from a liquid discharge port 123 provided in communication with the liquid storage unit 122 by pressure acting on the application liquid. Discharged toward the target surface. As the liquid discharge ports 123, for example, holes having a diameter of about 0.15 mm are arranged in the lower end portion of the nozzle 120 along the longitudinal direction at a pitch of about 1 mm, for example.

In the liquid application nozzle 130 illustrated in FIG. 22, a gas storage section 134 is provided so as to surround both sides and a lower side of the liquid storage section 132, and is provided in communication with the liquid storage section 132. Directly below the liquid discharge port 133 (for example, having a diameter of about 0.15 mm and a pitch of about 1 mm), with a gap of, for example, about 0.3 mm, a gas discharge port 135 having a slightly larger diameter than the liquid discharge port 133.
(For example, the diameter is about 0.3 mm and the pitch is about 1 mm). Then, the coating liquid stored in the liquid storage section 132 has a pressurized gas supplied to the gas discharge port 135.
Is discharged from the liquid discharge port 133 toward the surface to be coated using the negative pressure.

[0007]

It is known that, in order to obtain a uniform coating film on the surface to be coated, it is necessary to limit the size of the liquid discharge port to a certain value or less.
As the size of the liquid ejection port is reduced, clogging is more likely to occur. In particular, in the case of a coating liquid in which a filler is mixed, such as a phosphor slurry, this tendency becomes more prominent due to settling or aggregation of the filler. Further, if the flow of the coating liquid is stopped and stays there, clogging or poor discharge is likely to occur due to drying. Therefore, it is necessary to avoid repeating the discharge / stop of the coating liquid as much as possible. For this reason, as shown in FIGS. 18 to 20, the application liquid is continuously discharged from the discharge port of the liquid application nozzle 110, and during standby and movement other than during application to the application target surface, The collected liquid receiver 105 and the mechanical shutter 1
A method of receiving and collecting the data at 04 is known, but when such a method is adopted, there is a problem that the configuration becomes complicated.

On the other hand, when the liquid application nozzle shown in FIG. 21 is used, since the application liquid is ejected by simple pressurization, it is not possible to make the droplets falling on the surface to be applied smaller than a certain size. It is not possible to do so, and usually, an excessive amount of the coating liquid that is necessary for coating the entire surface to be applied falls on the target surface. For this reason, after the application is completed, it is necessary to rotate the work support base 102 at a high speed as described above, and to shake off the excess application liquid and collect the application liquid that has been shaken off by the action of the centrifugal force.

In the case where the liquid application nozzle shown in FIG. 22 is used, the space between the liquid discharge port 133 and the gas discharge port 135 is used because the negative pressure of the gas discharged from the gas discharge port 135 is used. Must be kept below a certain value, and since the liquid discharge port 133 is constantly exposed to the airflow,
A small amount of the coating liquid discharged in an unstable manner is accumulated between the two discharge ports 133 and 135, or a dried coating liquid or the like grows and adversely affects the gas flow as foreign matter. For this reason, the discharge of the coating liquid becomes unstable, and it becomes difficult to maintain good quality of the coating film on the surface to be coated. Further, maintenance of the nozzle 130 requires a lot of time and labor. Was.

The present invention has been made in view of the above technical problems, and the necessity of shaking off and collecting excess liquid is eliminated by minimizing the amount of the coating liquid dripped onto the surface to be coated within a necessary range. It is another object of the present invention to provide a liquid discharge method, a liquid coating nozzle and a liquid coating apparatus using the liquid discharge method, which can discharge a coating liquid continuously with a relatively simple configuration and can prevent drying of the coating liquid. And

[0011]

For this reason, the liquid discharging method according to the present invention discharges the liquid in a predetermined direction from the liquid discharging port and discharges the gas by discharging the gas from the gas discharging port. Is sprayed at a predetermined angle, and a part of the discharged liquid in the form of droplets is dropped in the gas discharge direction.

In this case, the gas desirably contains vapor of the liquid solvent or water vapor, or desirably a dry gas or a gas heated to a predetermined temperature. Further, it is desirable that the above-mentioned gas contains a gas ionized positively (+) or negatively (-).

In the liquid discharging method according to another aspect of the present invention, the liquid is discharged in a predetermined direction from a liquid discharging port, and the first gas is discharged from a first gas discharging port to discharge the liquid. By spraying the liquid at a first predetermined angle, a part of the discharged liquid that has been turned into droplets is moved in the discharge direction of the first gas, and the second gas is discharged from the second gas discharge port. Then, the moved dropletized portion is sprayed at a second predetermined angle, and the moved dropletized portion is dropped in the discharge direction of the second gas.

In this case, it is desirable that the first gas contains the vapor of the liquid solvent. Also,
The second gas desirably contains water vapor, or is preferably a dry gas or a gas heated to a predetermined temperature. Further, it is desirable that the above-mentioned gas contains a gas ionized positively (+) or negatively (-).

In the liquid discharging method according to still another aspect of the present invention, in each of the above methods, the liquid is discharged from a liquid discharging port toward a liquid receiving portion, and the remaining portion of the discharged liquid that is not dropped is the liquid receiving portion. It is intended to be collected after being received at.

[0016] The liquid application nozzle according to the present invention comprises:
A liquid reservoir having a liquid inlet and a liquid outlet; and a gas reservoir having a gas inlet and a gas outlet, wherein a discharge line of the liquid outlet and a discharge line of the gas outlet are at a predetermined angle. The discharge ports are arranged so as to intersect with each other.

In this case, the liquid application nozzle desirably includes heating means for heating the gas discharged from the gas discharge port, and further increases the gas discharged from the gas discharge port. ) Or minus (-). In particular, it is desirable that the gas can be continuously or intermittently discharged from the gas discharge port. Further, it is desirable that a liquid receiving portion having a liquid discharge port is provided on the discharge line of the liquid discharge port on the downstream side of the intersection with the discharge line of the gas discharge port, and in particular,
It is desirable that the liquid receiving portion is inclined in the longitudinal direction of the nozzle, and the liquid outlet is formed downstream of the inclination.

Further, a liquid application apparatus according to the present invention is a liquid application nozzle according to any one of the above, and a relative moving means for moving the liquid application nozzle relative to the application object on the application object. Comprising, the liquid application nozzle,
The gas discharge port and the surface to be coated of the object to be coated are arranged so as to face each other.

A liquid application nozzle according to another aspect of the present invention includes a liquid storage section having a liquid inlet and a liquid discharge port, and a gas storage section having a gas inlet and first and second gas discharge ports. A discharge line of the liquid discharge port and a discharge line of the first gas discharge port intersect at a first predetermined angle;
The discharge ports are arranged such that the discharge line of the first gas discharge port and the discharge line of the second gas discharge port intersect at a second predetermined angle downstream of the intersection on the discharge line of the gas discharge port. It is characterized by having been done.

In this case, the gas reservoir has a first gas reservoir having a first gas inlet and a first gas outlet, and a second gas reservoir having a second gas inlet and a second gas outlet.
The gas storage section may be constituted by two separate gas storage sections.

In these cases, it is desirable to provide a heating means for heating the gas discharged from the second gas discharge port, and to further increase the gas discharged from the second gas discharge port. It is desirable to provide ionization means for ionizing to +) or minus (-). In particular, it is desirable that the gas can be continuously or intermittently discharged from the gas discharge port. Further, it is desirable that a liquid receiving portion having a liquid discharge port is provided on the discharge line of the liquid discharge port on the downstream side of the intersection with the discharge line of the first gas discharge port. It is desirable that the receiving portion is inclined in the longitudinal direction of the nozzle, and the liquid outlet is formed downstream of the inclination.

According to another aspect of the present invention, there is provided a liquid application apparatus, wherein the liquid application nozzle is moved relative to the application object on the application object. And a relative moving means, wherein the liquid application nozzle is disposed so that the second gas discharge port and the surface to be applied of the application object face each other.

[0023]

Embodiments of the present invention will be described below, for example,
A case where the present invention is applied to a step of applying a slurry-like coating solution containing phosphor particles to a protective glass serving as a display portion of a cathode ray tube (CRT) for a television will be described in detail with reference to the accompanying drawings. First, a first embodiment of the present invention will be described. FIG. 1 is a perspective view illustrating a schematic configuration of a liquid application apparatus 1 according to the present embodiment. As shown in the figure, the liquid application apparatus 1 includes, as basic components, a work support table 2 that rotatably supports an application target W (work: a cathode ray tube for a television, for example), and a work W
A liquid application nozzle 20 for applying a predetermined application liquid (for example, a slurry-like coating liquid containing phosphor particles) to the application surface (for example, the protective glass surface of the cathode ray tube), and both sides of the work support table 2 A pair of panel members 3 arranged in
And a pair of moving supports 10 fixed to the upper ends of the liquid application nozzles 20 and supporting the movement of the liquid application nozzle 20 (movement in the Y direction in FIG. 1). The above liquid application nozzle 2
0 is formed in a rod shape extending in a certain direction (X direction in FIG. 1) as a whole, and the liquid application nozzle 20 is disposed above the left and right moving support portions 10 with respect to the left and right moving support portions 10. The supporting base plate 9 is in contact.

The work support base 2 has a pair of mounting plates 2a for mounting a work W on its upper surface, and an electric motor (not shown) and a speed reduction mechanism (not shown) on its lower surface. After the application operation for the work W by the liquid application nozzle 20 is completed, the rotation drive unit 2M is operated to drive the work support base 2 before the drying step. Then, the work W is rotated at a predetermined relatively low rotation speed (for example, about 40 rpm). By giving such a rotation, for example, it is possible to make the application liquid uniformly spread on the surface of the work W, and it is possible to prevent the application liquid from dripping into the central portion of the application surface.

As shown in detail in FIGS. 2 and 3, the pair of movable support portions 10 includes a pair of guide rails 11 extending in the moving direction (Y direction) of the liquid application nozzle 20. A rotatable ball screw shaft 12 extending along one guide rail 11, a drive block 13 fitted to the ball screw shaft 12 and the one guide rail 11, A corresponding driven block 14 is provided which is fitted to the corresponding guide rail 11 on the other side. Ball screw shaft 12
A pair of bearings 12b support the vicinity of both ends, and a drive motor 12M is connected to one shaft end. The drive block 13 is provided with a linear bearing 11b guided by the guide rail 11 on one side and a ball nut 12n meshing with the ball screw shaft 12.
The driven block 14 is provided with a linear bearing 11b guided by the guide rail 11 on the other side.

The above components are housed in a case body 10c having a horizontal opening.
Each of the guide rails 11 is connected via a bottom plate (see FIG. 1).
Is fixed to the upper end of the panel member 3 of the liquid application device 1. Both ends of the base plate 9 supporting the liquid application nozzle 20 are fixed to the drive block 13 and the driven block 14, respectively. When the ball screw shaft 12 is rotated at a predetermined rotation speed by operating the drive motor 12M, the ball screw shaft 12
The drive block 13 having the ball nut 12n meshing with the guide rail 11 is slid at a predetermined speed in the Y direction in the figure while being guided by the guide rail 11.

Accordingly, the base plate 9 (that is, the liquid application nozzle 20) moves in the same direction, and at the same time, the driven block 14 is slid in the Y direction while being guided by the guide rail 11. . In other words, the liquid application nozzle 20 is provided with the pair of guide rails 1.
While being guided by No. 1, it is moved at a predetermined speed in a direction (Y direction) orthogonal to its longitudinal direction (X direction in the figure). The driving mechanism for moving the liquid application nozzle 20 in the Y direction is not limited to the one using the ball screw as described above. For example, various other driving mechanisms such as a belt driving or a chain driving may be used. It is possible to use the above mechanism.

The drive block 13 and the driven block 1
4 (in this embodiment, the drive block 1
3), a coating liquid supply hose 13H for supplying a coating liquid into the liquid coating nozzle 20 is connected via a connection fitting (not shown). More preferably, a coating liquid reflux hose 14H for refluxing the coating liquid from inside the liquid coating nozzle 20 is connected to the driven block 14 via a connection fitting (not shown). As shown in FIG. 3, the coating liquid supply hose 13H is connected to the discharge side of a coating liquid pump Pg such as a gear pump, while the coating liquid recirculation hose 14H is connected via a valve 17 to the coating liquid pump Pg.
Is connected to the suction side. The tank Tk for storing the coating liquid is connected via a valve 18 to the suction side of the coating liquid pump Pg.

When the supply of the coating liquid is stopped,
By closing the valve 18 with the valve 17 open, the coating liquid supply hose 13H and the coating liquid reflux hose 1
The coating liquid can be circulated in a closed loop including 4H and the coating liquid pump Pg. By circulating the coating liquid in this way, when the supply of the coating liquid is stopped, the phosphor filler in the coating liquid staying in the piping, the hoses 13H, 14H, the liquid coating nozzle 20, and the like precipitates in the coating liquid. Can be suppressed.

As shown by a broken line in FIG. 2, one of the drive block 13 and the driven block 14 (the drive block 13 in the present embodiment) of the liquid coating apparatus 1 A gas supply hose 13A for supplying a predetermined gas to the air supply is connected via a connection fitting (not shown). Although not specifically shown, for example, an electromagnetic solenoid valve is provided at an intermediate portion on the upstream side of the gas supply hose 13A to control supply / stop of gas into the liquid application nozzle 20. A control valve is provided, and the control valve is connected to a control panel (not shown) of the liquid coating apparatus 1 so as to be able to send and receive signals. The supply of gas into the liquid application nozzle 20 can be stopped according to a command signal from a controller in the control panel.

Next, the configuration of the liquid application nozzle 20 will be described. FIG. 4 is a perspective view showing the liquid application nozzle 20 according to the present embodiment with a part of the inside thereof being exposed.
As shown in the figure, the liquid application nozzle 20 includes a nozzle body 21 made of, for example, steel in a substantially rod shape extending in a certain direction as a whole, and a liquid to be applied (application liquid) is provided in the nozzle body 21. , A gas storage unit 24 for storing gas (for example, compressed air) blown against liquid discharged from a plurality of liquid discharge ports 23 provided in the liquid storage unit 22, A liquid receiving portion 26 which is provided to face the outlet 23 and receives a remaining portion of the discharged liquid which is not dropped on the work W side. The liquid storing portion 22, the gas storing portion 24 and the liquid receiving portion 26 Are formed along the longitudinal direction inside the nozzle body 21.

At one end of the nozzle body 21 in the longitudinal direction (the left end in FIG. 4), the liquid storage section 22 is provided.
And a gas inlet 24i for introducing a predetermined gas into the gas storage unit 24. The liquid inlet 22i and the gas inlet 24i are provided with the coating liquid of the liquid coating apparatus 1. Liquid supply hose 13
H and the gas supply hose 13A. The liquid receiving portion 26 is formed in a trough shape having a substantially U-shaped peripheral edge in a vertical cross section, and the bottom portion 26 b is formed in the nozzle body 21.
It is inclined at a predetermined gradient so as to fall from one end side (left end side in FIG. 4) in the longitudinal direction toward the other end side (right end side in FIG. 4). A liquid outlet 26o is provided at the most lowered portion on the downstream side (that is, the other end side of the nozzle body 21).
6o is a coating liquid reflux hose 14H of the liquid coating apparatus 1.
Is in communication with

The liquid storage section 22 is provided at a relatively side portion in a longitudinal section of the nozzle body 21, and each liquid discharge port 23 is provided.
Is formed, for example, as a round hole having a diameter of 0.15 mm, and the opening thereof is oriented in a substantially horizontal direction.
Are arranged along the longitudinal direction of the nozzle main body 21 at the pitch shown in FIG. Further, the gas storage section 24 is provided at a relatively upper portion in a vertical cross section of the nozzle body 21, and a gas discharge port 25 for blowing a gas to the liquid discharged from each of the liquid discharge ports 23 is provided at a lower portion thereof. ing. The gas discharge port 25 is formed, for example, with a slit having a gap of 0.1 mm, and the nozzle body 21 is substantially parallel to the arrangement direction of the liquid discharge ports 23 in a state where the opening is directed substantially vertically.
Are provided along the longitudinal direction. The gas discharge port 2
The lower part facing 5 opens to the outside of the nozzle body 21. The positional relationship between the gas discharge port 25 and the liquid discharge port 23 is set so that the vicinity of the liquid discharge port 23 is not exposed to the airflow from the gas discharge port 25 and the liquid does not stain the liquid discharge port 23. Have been.

That is, the discharge line L of the liquid discharge port 23
1 and the discharge lines L2 of the gas discharge ports 25 so as to intersect at a predetermined angle (substantially a right angle in the present embodiment).
5 are arranged. Further, a liquid receiving portion 26 having a liquid discharge port 26o is provided downstream of an intersection of the gas discharge port 25 and the discharge line L2 on the discharge line L1 of the liquid discharge port 23. . It is more preferable that the surface of the liquid receiving portion 26 that is in direct contact with the liquid (coating liquid) is finished very smoothly (for example, in a mirror-like shape) so that the phosphor particles in the liquid are not adhered. It is designed to be prevented as much as possible.

The liquid application nozzle 2 configured as described above
0 is assembled between the left and right moving support portions 10 of the liquid application device 1 and the liquid introduction port 22i is supplied from the application liquid supply hose 13H.
The application liquid is supplied into the liquid application nozzle 20 through the nozzle. The supplied coating liquid is stored in the liquid storing section 23 so that the pressure over the entire length of the nozzle body 21 is made uniform, and as shown in FIG. The liquid is discharged substantially linearly from the outlet 23. The discharge rate is
For example, it is 3 to 10 g / min per one discharge port 23. At this time, the discharge flow of the discharged liquid is composed of a main discharge flow Fm that travels straight from the liquid discharge port 23 with a substantially constant diameter, and fine granular droplets Fd that scatter around the discharge flow. . Note that the coating liquid is a slurry in which the phosphor particles are dispersed as described above.

While the coating is not being performed on the surface of the workpiece W to be coated, no gas is supplied to the gas reservoir 24 of the liquid coating nozzle 20 and the discharge of the gas from the gas discharge port 25 is stopped. is there. Therefore, in this state, FIG.
As shown in (2), all of the liquid discharge flow proceeds straight as it is, is received by the liquid receiving portion 26, flows toward the liquid discharge port 26o along the inclination of the bottom portion 26b, and passes through the coating liquid reflux hose 14H. It is refluxed.

On the other hand, when the coating is performed on the surface of the workpiece W to be coated, the gas supply hose 13A is used to apply the gas to the gas inlet 2.
A gas of a predetermined pressure (for example, compressed air) is supplied into the liquid application nozzle 20 via 4i. The supplied gas is stored in the gas storage unit 24 so that the nozzle body 21
As shown in FIG. 6, the gas having a constant pressure is uniformly discharged from the gas discharge port 25 in a substantially curtain shape. The flow rate of the gas discharge flow is, for example, 5 to 15 m / s immediately below the gas discharge port 25.

The flow of the gas discharged from the gas discharge port 25 is blown against the flow of the liquid discharged from the liquid discharge port 23 at a predetermined angle (substantially right angle in the present embodiment) and collides. At this time, the main flow Fm of the liquid discharge flow
Since the droplets Fd scattered around the surface of the workpiece W are relatively light, they are dropped in the discharge direction (that is, downward) on the flow of the gas discharge flow, and adhere to the surface of the workpiece W to be coated. on the other hand,
The remaining portion of the liquid discharge flow that is not dropped (that is, the main flow Fm of the liquid discharge flow) proceeds straight as it is to the liquid receiving portion 2.
6 and is recirculated as described above. That is, the liquid is discharged from the liquid discharge port 23 in a predetermined direction (substantially horizontal direction),
5, discharging a gas at a predetermined angle (substantially right angle) to the discharged liquid, and dropping a part of the discharged liquid into a droplet in a gas discharge direction (substantially vertically downward). You can do it.

Next, a process of applying the workpiece W using the liquid application nozzle 20 will be described with reference to a series of process explanatory diagrams of FIGS. First, at the time when the work W is set on the work support 2 of the liquid coating apparatus 1, FIG.
As shown in (2), the liquid application nozzle 20 is at the initial position.
At this time, the liquid is discharged from the liquid discharge port 23 of the liquid application nozzle 20, but the gas is not discharged from the gas discharge port 25, and therefore, the entire discharge flow of the liquid is received by the liquid receiving section 26. Has been collected.

Thereafter, the liquid application nozzle 20 is driven in the Y direction, and when the nozzle 20 reaches the effective application surface of the work W, gas is discharged from the gas discharge port 25, and the main discharge flow Fm of the liquid discharge flow. , The droplet portion Fd is mainly dropped along with the flow of the gas, and is applied on the application surface of the work W to form the coating film Cf (see FIG. 8). The width dimension (length in the X direction (direction perpendicular to the paper surface in the figure) of the liquid application nozzle 20) is set to a length corresponding to the width dimension of the effective application surface of the work W.
As 0 crosses over the effective application surface of the work W, the effective application surface of the work W is uniformly wetted as a whole.

Then, after the droplet Fd is dropped on the entire effective application surface of the work W and the coating film Cf is formed on the effective application surface, the discharge of the gas from the gas discharge port 25 is stopped. When the liquid application nozzle 20 reaches the standby position after passing the work W, the movement in the Y direction is stopped (see FIG. 9). Thus, the application of the work W to the application surface is completed. At this time, the gas discharge port 25 of the liquid application nozzle 20
Is discharged, but the discharge of the application liquid from the liquid discharge port 23 is continued, and the entire discharge flow of the liquid is received and recovered by the liquid receiving portion 26.

Next, in order to uniformly spread the coating liquid on the surface to be coated of the work W and to prevent the coating liquid from dripping into the central portion of the work W, the work support table 2 is used.
Is driven, and the work support base 2 is rotated at a relatively low rotation speed (for example, about 40 rpm). After that, the drying heater 6 and the drying air blow device 7 are set above the work W, and thereby, the applied surface of the work W is dried. Then, one cycle of a coating and drying process on the workpiece W to be coated is completed.

As described above, according to the present embodiment, the liquid application nozzle 20 includes the liquid storage section 22 having the liquid introduction port 22i and the liquid ejection port 23, the gas introduction port 24i and the gas ejection port 24i. A gas reservoir 24 having an outlet 25, and each discharge port L2 of the liquid discharge port 23 and the discharge line L2 of the gas discharge port 25 intersect at a predetermined angle (a right angle in the present embodiment). Since the outlets 23 and 25 are arranged, the liquid discharged from the liquid discharge port 23 in the predetermined direction is such that the gas discharged from the gas discharge port 25 is sprayed at a predetermined angle against the discharge flow Fm. As a result, a part of the droplet Fd is dropped in the gas discharge direction. That is, the liquid is dropped by discharging the gas from the gas discharge port 25 provided independently of the liquid discharge port 23. Therefore, even if the discharge of the liquid from the liquid discharge port 23 is continued, by stopping the discharge of the gas from the gas discharge port 25, the dropping of the liquid can be stopped. As a result, the dropping of the liquid and the stopping of the dropping can be repeated without causing the liquid to stay, and without having to worry about the occurrence of clogging at the liquid discharge port 23.

Further, since the gas discharge port 25 and the liquid discharge port 23 are provided independently of each other, the liquid discharge port 23 is not exposed to the gas flow (gas discharge flow) from the gas discharge port 25. In this manner, it is possible to effectively prevent the occurrence of liquid ejection failure due to drying, aggregation, or turbulence of the air flow near the liquid ejection port. Further, since the coating is performed using relatively light droplets having a small diameter that can be dropped by an air current, a thin and dense coating film can be obtained. For this reason, dripping of an excessive liquid can be suppressed, and conventionally, it is possible to eliminate the step of shaking off excess liquid and the step of collecting the surplus liquid that has been shaken off, and moreover, it is possible to obtain Since the coating film is thinner than before, the drying time of the coating film can be shortened.

In particular, since the gas discharge from the gas discharge port 25 can be performed continuously or intermittently, the gas discharge from the gas discharge port 25 is continued while the liquid discharge from the liquid discharge port 23 is continued. The discharge can be stopped to stop the dropping of the liquid. Accordingly, during the process of applying the work W to the application surface, the gas is continuously discharged and the liquid is dropped on the work application surface. During a standby period or the like, it is possible to stop the discharge of the gas and stop the dropping of the liquid while the discharge of the liquid is continued. That is,
No liquid stagnation occurs and therefore the liquid discharge port 2
Liquid dropping and dropping stop can be repeated without worrying about the occurrence of clogging in 3.

Further, the discharge line L of the liquid discharge port 23
A liquid receiving portion 26 having a liquid discharge port 26o is provided downstream of the intersection of the gas discharge port 25 and the discharge line L2 on the upper side 1 so that the liquid discharged from the liquid discharge port 23 can be discharged. I can definitely receive it. That is, when the gas is not discharged from the gas discharge port 25, all of the liquid discharge flows are discharged. (That is, the main flow of the liquid discharge flow) travels straight as it is and is received by the liquid receiving portion 26. Since the liquid receiving portion 26 is provided with a liquid outlet 26o for discharging the received liquid to the outside, by connecting the liquid outlet 26o to the liquid supply side of the liquid storing portion 22, The liquid received by the liquid receiving section 26 can be returned to the liquid supply side. Therefore, the liquid continuously discharged from the liquid discharge port 23 can be collected without waste and reused.

In this case, in particular, the liquid receiving portion 26 is inclined in the longitudinal direction of the nozzle, and the liquid discharge port 26o is formed on the downstream side of the inclination. The liquid can reliably and smoothly flow toward the liquid outlet 26o without causing the liquid to stay in the middle of the liquid receiving portion 26.

In the above embodiment, the gas discharge port 25
Although compressed air is used as the gas discharged from the, other types of gas such as nitrogen may be used instead. Further, a gas having the following various characteristics can be used. For example, a gas containing the vapor of the solvent of the coating liquid may be used. In this case, it is possible to maintain a high vapor pressure in the vicinity of the liquid discharge portion 23 and the vicinity of the liquid discharge portion 23 which has been formed into a liquid droplet by the gas spraying or has been further moved, and discharge failure due to drying of the liquid or the like. Can be more reliably prevented, and the fluctuation of the liquid component can be prevented. In particular, when the liquid discharged from the liquid discharge port 23 is received and collected by the liquid receiving portion 26, the liquid receiving portion 26 is also prevented from being dried and can be smoothly recovered, and the fluctuation of the liquid component is reduced. It is also possible to prevent and recover the recovered liquid as it is.

Further, a gas containing water vapor may be used as the gas. In this case, a coating film can be formed more smoothly than in a case where only the droplet Fd of the coating liquid is dropped on the surface to be coated of the work W, and a uniform coating film can be obtained more easily. become able to. Furthermore,
A dry gas may be used as the gas. In this case, it is possible to increase the viscosity of the droplet Fd of the coating liquid to increase the binding force of the work W to the surface to be coated. As a result, dripping can be suppressed and a more stable coating film can be formed. This also makes it possible to perform selective application (printing) using a metal mask or the like.

Further, when the coating liquid does not contain a heat-sensitive material, a gas heated to a predetermined temperature is used as the gas, as described later (see the fourth embodiment). May be. In this case, the droplet F of the coating liquid
d can be made into a powder form in which only particles of a photosensitive material and a binder are attached to particles of a coating substance (phosphor particles), and coating can be performed substantially by powder discharge. As a result, the powder can be treated as a liquid, greatly reducing the problem of reduced yield due to nozzle clogging and powder soaring and work environment problems compared to conventional powder coating. Become.

Further, as described later (refer to the fifth embodiment), a gas containing a gas ionized positively (+) or negatively (-) may be used as the gas. In this case, the droplet-formed portion sprayed with the gas is charged to the same polarity as the gas. Therefore, by charging the surface to be coated with the polarity opposite to that of the gas, the droplet to be dropped can be brought into close contact with the surface to be coated by electrostatic force, and the adhesion of the coating film can be improved. In addition, selective application can be performed by partially charging the surface to be applied.

Next, a second embodiment of the present invention will be described. FIG. 11 is a perspective view of a liquid application nozzle 30 according to a second embodiment of the present invention, which is a cross-sectional view of a middle part in the longitudinal direction. The liquid application nozzle 30 is used, for example, in a process of applying a fluorescent screen of a cathode ray tube (work W) as in the first embodiment. In the following description, the same components as those in the first embodiment are denoted by the same reference numerals, and further description is omitted. The liquid application nozzle 30 according to the present embodiment has a substantially rod-shaped, for example, steel nozzle body 31 extending in a certain direction as a whole, as in the first embodiment. A liquid storage portion 32 for storing a liquid to be applied (application liquid), and a liquid for receiving a remaining portion of the liquid discharged from the plurality of liquid discharge ports 33 provided in the liquid storage portion 32, which is not dropped on the work W side. And a receiving portion 36.

The most significant difference between the liquid application nozzle 30 and the liquid application nozzle 20 in the first embodiment is that two gas reservoirs are provided. That is, in the present embodiment, the liquid storage portion 32 is formed at a substantially upper center portion in a relatively vertical section of the nozzle main body 31,
A plurality of liquid discharge ports 33 are provided at the lower part. Each liquid ejection port 33 is, as in the case of the first embodiment,
For example, it is formed of a round hole having a diameter of 0.15 mm, and is arranged along the longitudinal direction of the nozzle body 31 at a pitch of 1 mm, for example, with the opening thereof being directed substantially downward.
The liquid receiving portion 36 has the same configuration as that in the first embodiment, and is provided at a lower portion of the nozzle body 31 so as to face the liquid discharge port 33.

Further, a first gas storing portion 34 for storing a gas to be blown against the liquid discharged from each of the liquid discharge ports 33 is formed on a side portion in a vertical cross section of the nozzle body 31, and an inner side portion thereof is formed. Is provided with a gas discharge port 35 (first gas discharge port). The first gas discharge port 35 is formed, for example, with a slit having a gap of 0.1 mm, and the liquid discharge port 33 is formed in a state where the opening is directed substantially in the horizontal direction.
Are provided along the longitudinal direction of the nozzle body 31 substantially in parallel with the arrangement direction. The positional relationship between the first gas discharge port 35 and the liquid discharge port 33 is such that the vicinity of the liquid discharge port 33 is exposed to the airflow from the first gas discharge port 35, and the liquid contaminates the liquid discharge port 33. Not set.

Further, a second gas storage section 38 is formed on the side of the liquid storage section 32 (on the side remote from the first gas storage section 34), and a gas discharge port 39 (below) is formed below the second gas storage section 38. A second gas discharge port) is provided. The second gas discharge port 3
9 is formed, for example, with a slit having a gap of 0.1 mm,
The opening portion is provided along the longitudinal direction of the nozzle main body 31 substantially in parallel with the arrangement direction of the liquid discharge ports 33 with the opening directed substantially vertically. The lower portion facing the second gas discharge port 39 is open to the outside of the nozzle body 31. Further, a side portion facing the first gas discharge port 35 is more preferably opened to the outside of the nozzle body 31.

That is, the discharge line L of the liquid discharge port 33
1 intersects with the discharge line L2 of the first gas discharge port 35 at a first predetermined angle (substantially a right angle in the present embodiment), and is closer than the intersection on the discharge line L2 of the first gas discharge port 35. On the downstream side, the discharge line L2 of the first gas discharge port and the second gas discharge port 3
The discharge ports 33, 35, and 39 are arranged such that the discharge line L3 of the nine crosses at a second predetermined angle (substantially a right angle in the present embodiment). The ejection line L of the liquid ejection port 33
The liquid receiving portion 36 is provided on the downstream side of the intersection of the first gas discharge port 35 and the discharge line L2 above the first gas discharge port 35. The bottom portion 36b of the liquid receiving portion 36 is inclined in the same manner as in the first embodiment, and the liquid outlet 36o is provided on the terminal side (the right end side in FIG. 11).
Are formed.

Although not specifically shown, an application liquid is introduced into the liquid storage section 32 at one end (the left end in FIG. 11) of the liquid application nozzle 30 in the longitudinal direction of the nozzle body 31. First and second gas inlets for introducing a predetermined gas into the liquid inlet and the first and second gas reservoirs 34 and 38, respectively, are provided. A coating liquid supply hose of a liquid coating device is connected to the liquid inlet. In the liquid coating apparatus according to the present embodiment, more preferably, two gas supply units are provided, and different gases (for example, the first gas storage unit) are provided in the first gas storage unit 34 and the second gas storage unit 38, respectively. Compressed air is supplied to 34, and water vapor is supplied to the second gas reservoir 38.

The liquid application nozzle 3 configured as described above
0 is assembled between the left and right moving support portions 10 of the liquid application device, and the liquid application nozzle 30 is inserted through a liquid introduction port (not shown).
Supply the coating liquid inside. The supplied coating liquid is stored in the liquid storing section 33 so that the pressure over the entire length of the nozzle body 31 is made uniform, and as shown in FIG. The liquid is discharged substantially linearly from the outlet 33. The discharge amount is, for example, one discharge port 33.
3 to 10 g / min. At this time, the discharge flow of the discharged liquid is composed of a main discharge flow Fm that travels straight from the liquid discharge port 33 with a substantially constant diameter, and fine and relatively light droplets Fd that scatter around the discharge flow. Have been.
The coating liquid is a slurry in which the phosphor particles are dispersed as described above.

While the coating is not performed on the surface of the workpiece W to be coated, both gas storage sections 3 of the liquid coating nozzle 30 are used.
No gas is supplied to the gas discharge ports 35 and 39.
The discharge of gas from is stopped. Therefore, in this state, as shown in FIG. 12, the entire discharge flow of the liquid goes straight as it is, is received by the liquid receiving portion 36, and flows toward the liquid discharge port 36o along the slope of the bottom portion 36b. Collected on the liquid supply unit side. At this time, the position of the liquid discharge port 33 is more preferably the bottom portion 36b of the liquid receiving portion 36 so that the liquid discharge flow does not hit the liquid surface of the liquid flowing through the liquid receiving portion 36 to generate bubbles. Is set to slightly deviate from. The above-described liquid ejection step is the same as in the first embodiment.

On the other hand, when the coating is performed on the surface of the workpiece W to be coated, a predetermined pressure (a predetermined gas) is supplied into the liquid coating nozzle 30 through the first and second gas inlets (not shown). For example, compressed air and steam) are supplied. In the supplied gas (compressed air and water vapor), the compressed air as the first gas is stored in the first gas storage unit 34, and the water vapor as the second gas is stored in the second gas storage unit 38, respectively. Accordingly, the pressure over the entire length of the nozzle body 31 is uniformed. Then, as shown in FIG.
Compressed air as a first gas having a constant pressure in the first gas storage unit 34 is uniformly discharged from the first gas discharge port 35 in a substantially curtain shape. The flow velocity of the discharge flow of the first gas is, for example, 5 to 15 m / s immediately after the first gas discharge port 25.

The flow of the first gas (compressed air) discharged from the first gas discharge port 35 is at a predetermined angle with respect to the flow of the liquid discharged from the liquid discharge port 33 (in this embodiment, a substantially right angle). ) And colliding. At this time, the droplet Fd scattered around the main flow Fm in the liquid discharge flow is
Since it is relatively light, it can be moved in the discharge direction (that is, horizontal direction) while riding on the flow of the discharge flow of the first gas,
The remaining portion of the liquid discharge flow that is not moved (that is, the main flow Fm of the liquid discharge flow) is slightly affected by the flow of the first gas, but proceeds straight as it is to the liquid receiving portion 36.
And collected as described above.

Further, the water vapor as the second gas having a constant pressure in the second gas storage section 38 is uniformly discharged from the second gas discharge port 39 in a substantially curtain shape. The flow rate of the discharge flow of the second gas is, for example, 5 immediately after the second gas discharge port 39.
１５15 m / s. The flow of the second gas (water vapor) discharged from the second gas discharge port 35 is at a predetermined angle (in the direction of the flow of the droplet Fd moved on the first gas (compressed air)). In the embodiment, they are sprayed at a substantially right angle) and collide. As a result, the droplet Fd rides on the flow of the discharge flow of the second gas and is dropped in the discharge direction (that is, downward), and adheres to the application surface of the work W.

That is, the liquid is ejected from the liquid ejection port 33 in a predetermined direction (substantially vertically downward), and the first gas is ejected from the first gas ejection port 35 to apply the first gas to the ejected liquid. Is sprayed at a predetermined angle (substantially right angle) to move a part of the discharged liquid into droplets in the first gas discharge direction (substantially horizontal direction). 2 can be discharged and sprayed at a second predetermined angle (substantially at right angle) to the moved dropletized portion, and the moved dropletized portion can be dropped in the discharge direction of the second gas. is there. The application process of the work W using the liquid application nozzle 30 is described in FIGS.
This is the same as the case of the first embodiment described with reference to a series of process explanatory diagrams of FIG.

As described above, according to the second embodiment of the present invention, the liquid application nozzle 30 includes the liquid storage section 32 having the liquid introduction port (not shown) and the liquid discharge port 33. A gas inlet (not shown) and first and second gas discharge ports 35, 39, and gas storage portions 34, 38, and the discharge line L1 of the liquid discharge port 33 and the first gas discharge The discharge line L2 of the outlet 35 intersects at a first predetermined angle (substantially a right angle in the present embodiment), and the first gas discharge port 35 on the discharge line L2 on the downstream side of the intersection above the first line, The discharge ports 33, 35, and 39 are arranged such that the discharge line L2 of the gas discharge port 35 and the discharge line L3 of the second gas discharge port 39 intersect at a second predetermined angle (substantially a right angle in the present embodiment). Therefore, the liquid discharged from the liquid discharge port 33 has the The gas (first gas) discharged from the one gas discharge port 35 is sprayed at a first predetermined angle, so that a part of the droplet Fd is moved in the discharge direction of the first gas, and further, This moved dropletized portion Fd
The gas (second gas) discharged from the second gas discharge port 39 is sprayed at a second predetermined angle, so that the gas is dropped in the discharge direction of the second gas. In other words, the liquid can be dropped by discharging the gas from the first and second gas discharge ports 35 and 39 provided independently of the liquid discharge port 33. Therefore, the liquid discharge port 33
Even if the liquid is continuously discharged from the gas discharge port 3
By stopping the discharge of the gas from 5, 39, the dropping of the liquid can be stopped. As a result, the dropping of the liquid and the stopping of the dropping of the liquid can be repeated without causing the liquid to stay, and thus without having to worry about the occurrence of clogging at the liquid discharge port 33.

The first and second gas discharge ports 35, 3
Since the liquid discharge port 9 and the liquid discharge port 33 are provided independently of each other, the position can be set so that the liquid discharge port 33 is not exposed to the gas flow (gas discharge flow) from the gas discharge ports 35 and 39. It is possible to effectively prevent the occurrence of liquid ejection failure due to drying or aggregation of the liquid in the vicinity of the ejection port or turbulence of the air flow. Further, since the coating is performed using relatively light droplets having a small diameter that can be dropped by an air current, a thin and dense coating film can be obtained. For this reason, dripping of an excessive liquid can be suppressed, and conventionally, it becomes possible to eliminate the step of shaking off excess liquid and the step of collecting the excess liquid that has been shaken off. Drying time can also be shortened. Further, the second gas is sprayed on the dropletized portion Fd which has been formed into droplets by the spraying of the first gas and moved, and is dropped in the discharge direction. Therefore, by spraying the second gas,
For example, it is possible to suitably control the dripping state of the droplet Fd, for example, to rectify the flow of the moved dropletized portion Fd or to make the droplet finer, and to perform better and stable coating. Become like

Further, in particular, in the liquid application nozzle 30 according to the present embodiment, the gas storage section includes a first gas storage section 34 having a first gas introduction port (not shown) and a first gas discharge port 35. And a second gas inlet (not shown) and a second gas outlet 3
9 and the second gas storage section 38 having two separate gas storage sections 34 and 38, the discharge conditions of each gas from the first and second gas discharge ports 35 and 39 are individually set. , It is possible to obtain an optimal discharge state, and the first and second gas discharge ports 35, 3
9, it becomes possible to discharge different types of gases (in this embodiment, compressed air and water vapor).

In this embodiment, for example, water vapor is used as the second gas. Thus, a coating film can be formed more smoothly, and a uniform coating film can be more easily obtained.

In this embodiment, the effect of being able to continuously or intermittently discharge the gas from each of the gas discharge ports 35 and 39 is described. The effect of providing the liquid receiving portion 36 having the liquid discharge port downstream of the intersection of the first gas discharge port 35 with the discharge line L2, and the liquid receiving portion 36 is inclined in the nozzle longitudinal direction. The effect of forming the liquid discharge port 36o on the downstream side of the inclination is the same as in the case of the above-described first embodiment.

In the present embodiment, compressed air is used as the gas discharged from the first gas discharge port 35, and gas containing water vapor is used as the gas discharged from the second gas discharge port 39. Alternatively, another kind of gas such as nitrogen may be used. Further, a gas having the following various characteristics can be used. For example, as the gas discharged from the first gas discharge port 35, a gas containing the vapor of the solvent of the coating liquid may be used. In this case, the high-pressure vapor can be maintained in the vicinity of the liquid-drop portion, which has been formed or moved further by the spraying of the gas, and the vicinity of the liquid discharge port 33, and the discharge failure due to drying of the liquid or the like can be maintained. Can be more reliably prevented, and the fluctuation of the liquid component can be prevented. In particular, when the liquid discharged from the liquid discharge port 33 is received and collected by the liquid receiving portion 26, the liquid receiving portion 36 is also prevented from drying and can be smoothly collected.
It is also possible to prevent fluctuation of the liquid component and to reuse the collected liquid as it is.

Further, as the gas discharged from the second gas discharge port 39, a dry gas may be used. In this case, it is possible to increase the viscosity of the droplet Fd of the coating liquid to increase the binding force of the work W to the surface to be coated. As a result,
It is possible to form a more stable coating film by suppressing dripping. This also makes it possible to perform selective application (printing) using a metal mask or the like.

Further, when the coating liquid does not contain a heat-sensitive material, the gas discharged from the second gas discharge port 39 was heated to a predetermined temperature as described in the fourth embodiment. A gas or a gas containing a gas ionized to plus (+) or minus (-) as described in the fifth embodiment may be used.

In the second embodiment, the gas reservoir is provided with the first gas inlet (not shown) and the first gas outlet 35.
And a second gas storage unit 38 having a second gas introduction port (not shown) and a second gas discharge port 39. However, it is also possible to use a single gas storage unit and provide two gas discharge ports. Next, a third embodiment of the present invention will be described. As shown in FIG. 14, in the liquid application nozzle 40 according to the present embodiment, a liquid storage section 42 having a plurality of liquid discharge ports 43 at a lower portion is formed at a substantially central portion in a vertical cross section of the nozzle body 41. I have.
Each of the liquid ejection ports 43 is formed, for example, as a round hole having a diameter of 0.15 mm as in the case of the first and second embodiments.
The nozzles 41 are arranged at a pitch of mm along the longitudinal direction of the nozzle body 41 (the direction perpendicular to the plane of FIG. 14). still,
The liquid receiving portion 46 has the same configuration as that in the first and second embodiments, and is provided at a lower portion of the nozzle main body 41 so as to face the liquid discharge port 43.

One gas storage section 44 is formed so as to surround both sides and the upper side of the liquid storage section 42 and communicate therewith. A first gas discharge port 45 is provided at each end of the gas storage section 44. And a second gas discharge port 49 are provided. Both of the gas discharge ports 45 and 49 are formed, for example, with slits having a gap of 0.1 mm. The first gas discharge port 45 has its opening directed substantially in the horizontal direction. 49 is provided along the longitudinal direction of the nozzle body 41 substantially in parallel with the arrangement direction of the liquid discharge ports 43 with its opening directed substantially vertically downward. The lower part facing the second gas discharge port 49 is open to the outside of the nozzle body 41. Further, a side portion facing the first gas discharge port 45 is more preferably opened to the outside of the nozzle body 41. That is, the shape and positional relationship between the two gas discharge ports 45 and 49 and the liquid discharge port 43 are the same as those in the second embodiment.

That is, as in the case of the second embodiment, the discharge line of the liquid discharge port 43 and the first gas discharge port 4
5 intersects at a first predetermined angle (substantially a right angle in the present embodiment), and on the discharge line of the first gas discharge port 45 downstream from the intersection, the first gas discharge port 45 And the discharge lines of the second gas discharge ports 49 intersect at a second predetermined angle (substantially a right angle in the present embodiment). The same configuration as in the first and second embodiments is provided on the discharge line of the liquid discharge port 43 downstream of the intersection of the first gas discharge port 45 and the discharge line L2. The liquid receiving portion 46 is provided.

In the case of the third embodiment, the gas storage section 44 is integrated into one, and therefore, the gas supplied to the liquid application nozzle 40 is the same as that of the second embodiment except that only one kind of gas is supplied. The same operation and effect as the embodiment can be obtained.

Next, a fourth embodiment of the present invention will be described. As shown in FIG. 15, in the liquid application nozzle 50 according to the present embodiment, a liquid storage part 52 having a plurality of liquid discharge ports 53 at a lower part is formed at a substantially central part in a vertical cross section of the nozzle body 51. I have. Each liquid discharge port 53
As in the case of the first to third embodiments, the nozzle body 41 is formed, for example, with a round hole having a diameter of 0.15 mm and the opening thereof is directed substantially downward, for example, at a pitch of 1 mm. Are arranged along the longitudinal direction (the direction perpendicular to the plane of FIG. 15). In addition, the liquid receiving portion 56
It has a configuration similar to that in the first to third embodiments, and is provided at the lower part of the nozzle body 51 so as to face the liquid ejection port 53.

Further, a first gas storage portion 54 for storing a gas blown against the liquid discharged from each of the liquid discharge ports 53 is provided on a side portion of the nozzle body 51 in a vertical cross section.
Is formed, and a gas discharge port 55 (first gas discharge port) is provided on an inner side portion thereof. The first gas discharge port 55 is
For example, a gap is formed by a slit of 0.1 mm, and is provided along the longitudinal direction of the nozzle body 51 substantially in parallel with the arrangement direction of the liquid discharge ports 53 in a state where the opening is oriented substantially in the horizontal direction. I have. Further, a second gas storage portion 58 is formed on the side of the liquid storage portion 52 (side of the first gas storage portion 54), and a gas discharge port 59 (second gas storage portion) is formed below the second gas storage portion 58. Discharge port). The second
The gas discharge port 59 is formed, for example, with a slit having a gap of 0.1 mm, and the opening thereof is oriented in a substantially vertical direction, and the longitudinal direction of the nozzle body 51 is substantially parallel to the arrangement direction of the liquid discharge ports 53. It is provided along. The lower part facing the second gas discharge port 59 is the nozzle body 5
1 is open to the outside. Further, a side portion facing the first gas discharge port 55 is more preferably opened to the outside of the nozzle body 51. That is, the shape and positional relationship between the two gas storage portions 54 and 58 and the liquid storage portion 52 and the shape and positional relationship between the two gas discharge ports 55 and 59 and the liquid discharge port 53 are different from those in the second embodiment. Is the same as in the case of

That is, as in the case of the second and third embodiments, the discharge line of the liquid discharge port 53 and the discharge line of the first gas discharge port 55 are at the first predetermined angle (in this embodiment, substantially the same). At a right angle) and on the discharge line of the first gas discharge port 55 downstream of the intersection, the discharge line of the first gas discharge port 55 and the discharge line of the second gas discharge port 59 form the second line.
Are arranged so as to intersect at a predetermined angle (substantially right angle in the present embodiment). And
On the downstream side of the intersection with the discharge line of the first gas discharge port 55 on the discharge line of the liquid discharge port 53, first to third
The liquid receiving portion 56 having the same configuration as that of the embodiment is provided.

In the present embodiment, the second gas storage 5
8, a heater 57 as heating means for heating gas discharged from the second gas discharge port 59 is provided. After being heated to a predetermined temperature by the heater 57, the gas is discharged from the second gas discharge port 59.

As described above, since the liquid application nozzle 50 according to the present embodiment is provided with the heating means 57 for heating the gas discharged from the second gas discharge port 59,
The gas discharged from the second gas discharge port 59 can be heated to a predetermined temperature, and the droplets of the coating liquid adhere to the particles of the coating substance (for example, phosphor particles) by the particles of the photosensitive material and the binder. It is possible to perform application by powder discharge substantially in the form of powder only. As a result, the powder can be treated as a liquid, greatly reducing the problem of reduced yield due to nozzle clogging and powder soaring and work environment problems compared to conventional powder coating. Become.
In this case, it is necessary that the coating liquid does not contain a heat-sensitive material.

Next, a fifth embodiment of the present invention will be described. As shown in FIG. 16, in the liquid application nozzle 60 according to the present embodiment, a liquid storage portion 62 having a plurality of liquid ejection ports 63 at the lower portion is formed at a substantially central portion in a vertical cross section of the nozzle main body 61. In addition, the first gas storage portion 64 having the first gas discharge port 65 and the second gas storage portion 68 having the second gas discharge port 69 have the same shape and shape as those in the second and fourth embodiments. They are arranged in a positional relationship. Further, a liquid receiving portion 66 having the same configuration as that in the first to fourth embodiments is provided. That is, the basic configuration of the liquid application nozzle 60 is the same as that in the second and fourth embodiments.

In the present embodiment, the second gas storage 6
Inside 8, an ionizer 67 is provided as ionization means for ionizing the gas discharged from the second gas discharge port 69 to plus (+) or minus (−). Then, the gas (for example, compressed air) stored in the second gas storage unit 58 is ionized to plus (+) or minus (−) by the ionizer 67 and then discharged from the second gas discharge port 69. It has become so.

In this case, since the gas discharged from the second gas discharge port 69 is ionized to plus (+) or minus (-), the dropletized portion sprayed with this gas is the same as the gas. It is charged to polarity. Therefore, by charging the surface to be coated to the opposite polarity to the gas,
The droplet to be dropped can be brought into close contact with the surface to be coated by electrostatic force, and the adhesion of the coating film can be improved. In addition, selective application can be performed by partially charging the surface to be applied.

The present invention is not limited to the above-described embodiment, but may be modified without departing from the scope of the invention.
It goes without saying that various improvements or design changes are possible. For example, the shape, size, positional relationship, and the like of the liquid discharge port and the gas discharge port are appropriately specified, but these can be changed to obtain required application conditions. That is, for example, the liquid ejection port does not necessarily have to be a round hole. Further, the gas discharge port does not necessarily have to be slit-shaped, and a hole-shaped one may be provided corresponding to the liquid discharge port. Further, the application liquid discharge conditions should be set appropriately so as to conform to the type of the selected application liquid or the specifications required for the product. Moreover,
In each of the above embodiments, the application liquid is a phosphor slurry and the application object W is a panel of a cathode ray tube as applied to the phosphor screen application process of the cathode ray tube, but other members of other products are applied. Needless to say, other coating solutions may be used.

[0085]

According to the liquid discharging method of the first aspect of the present invention, the liquid discharged from the liquid discharging port in a predetermined direction is the gas discharged from the gas discharging port with respect to the discharge flow. Is sprayed at a predetermined angle, so that a part of the droplet is dropped in the gas discharge direction. That is, the liquid is dropped by discharging the gas from the gas discharge port provided independently of the liquid discharge port. Therefore, even if the discharge of the liquid from the liquid discharge port is continued, by stopping the discharge of the gas from the gas discharge port, the dropping of the liquid can be stopped. As a result, the dropping of the liquid and the stopping of the dropping can be repeated without causing the liquid to stay, and thus without having to worry about the occurrence of clogging at the liquid discharge port. Further, since the gas discharge port and the liquid discharge port are provided independently of each other, the position of the liquid discharge port can be set so as not to be exposed to the gas flow (gas discharge flow) from the gas discharge port. It is possible to effectively prevent the occurrence of liquid ejection failure due to drying or aggregation of the liquid near the outlet or turbulence of the air flow. Further, since the coating is performed using relatively light droplets having a small diameter that can be dropped by an air current, a thin and dense coating film can be obtained. For this reason, dripping of excess liquid can be suppressed, and conventionally, it becomes possible to eliminate the step of shaking off excess liquid and the step of collecting the excess liquid that has been shaken off, and
Since the obtained coating film is thinner than before, the drying time of the coating film can be shortened.

According to the liquid discharging method of the second aspect of the present invention, basically, the same effects as the first aspect of the invention can be obtained. What's more,
Since the gas contains the vapor of the liquid solvent, it is possible to maintain a high vapor pressure in the vicinity of the liquid droplet or the liquid discharge port which has been dropletized or further moved by blowing the gas. Thus, it is possible to more reliably prevent ejection failure due to drying of the liquid and the like, and to prevent fluctuation of the liquid component. In particular, in the case where the liquid discharged from the liquid discharge port is received and collected by the liquid receiving portion, the liquid receiving portion is also prevented from drying and can be smoothly recovered, and the liquid component can be recovered. It is also possible to prevent fluctuations and to reuse the collected liquid as it is.

Further, according to the liquid discharging method of the third aspect of the present invention, basically the same effects as those of the first aspect can be obtained. What's more,
Since the gas contains water vapor, a coating film can be formed more smoothly and a uniform coating film can be formed more easily than in a case where only the droplets of the coating liquid are dropped on the surface to be coated of the work. Will be able to gain.

Further, according to the liquid discharging method of the fourth aspect of the present invention, basically the same effects as those of the first aspect can be obtained. In addition, since the gas is a dry gas, it is possible to increase the viscosity of the liquid droplets of the application liquid and increase the binding force to the work application surface. As a result, dripping can be suppressed and a more stable coating film can be formed. This also makes it possible to perform selective application (printing) using a metal mask or the like.

Further, according to the liquid discharging method of the fifth aspect of the present invention, basically the same effects as those of the first aspect can be obtained. In addition, since the gas is heated to a predetermined temperature, the droplets of the coating liquid are formed into a powder form in which only particles of the binder are attached to particles of the coating substance, and the powder is substantially discharged by the powder discharge. Coating can be performed. As a result, the powder can be treated as a liquid, greatly reducing the problem of reduced yield due to nozzle clogging and powder soaring and work environment problems compared to conventional powder coating. Become.

Further, according to the liquid discharging method of the invention of claim 6 of the present application, basically the same effects as those of the invention of any one of claims 1 to 5 can be obtained. it can. In addition, since the gas contains a gas that has been ionized positively (+) or negatively (−), the dropletized portion sprayed with this gas is charged to the same polarity as the gas. Therefore, by charging the surface to be coated with the polarity opposite to that of the gas, the droplet to be dropped can be brought into close contact with the surface to be coated by electrostatic force, and the adhesion of the coating film can be improved. In addition, selective application can be performed by partially charging the surface to be applied.

According to the liquid discharge method of the present invention, the liquid discharged from the liquid discharge port in a predetermined direction is discharged from the first gas discharge port with respect to the discharge flow. When the first gas is blown at a first predetermined angle, a part of the droplets is moved in the discharge direction of the first gas. The second gas discharged from the discharge port is sprayed at a second predetermined angle, so that the second gas is dropped in the discharge direction of the second gas. That is, the liquid is dropped by discharging the gas from the first and second gas discharge ports provided independently of the liquid discharge port. Therefore, even if the discharge of the liquid from the liquid discharge port is continued, by stopping the discharge of the gas from the gas discharge port, the dropping of the liquid can be stopped. As a result, the dropping of the liquid and the stopping of the dropping can be repeated without causing the liquid to stay, and thus without having to worry about the occurrence of clogging at the liquid discharge port. In addition, since the first and second gas discharge ports and the liquid discharge port are provided independently of each other, the liquid discharge port is not exposed to the gas flow (gas discharge flow) from the gas discharge port. The position can be set, and it is possible to effectively prevent the occurrence of liquid ejection failure due to drying or aggregation of the liquid near the liquid ejection port or turbulence of the air flow. Further, since the coating is performed using relatively light droplets having a small diameter that can be dropped by an air current, a thin and dense coating film can be obtained. For this reason, dripping of an excessive liquid can be suppressed, and conventionally, it is possible to eliminate the step of shaking off excess liquid and the step of collecting the surplus liquid that has been shaken off, and moreover, it is possible to obtain Since the coating film is thinner than before, the drying time of the coating film can be shortened. Furthermore, since the second gas is sprayed onto the dropletized portion which has been formed into droplets by the first gas and is moved by the first gas, the droplet is dropped in the discharge direction. It is possible to suitably control the dripping state of the droplets, for example, by rectifying the flow of the dropletized portion or making the droplets finer, and it is possible to perform better and more stable coating.

Further, according to the liquid ejecting method of the present invention, basically the same effects as those of the above-mentioned invention can be obtained. What's more,
Since the gas contains the vapor of the liquid solvent, it is possible to maintain a high vapor pressure in the vicinity of the liquid droplet or the liquid discharge port which has been dropletized or further moved by blowing the gas. Thus, it is possible to more reliably prevent ejection failure due to drying of the liquid and the like, and to prevent fluctuation of the liquid component. In particular, in the case where the liquid discharged from the liquid discharge port is received and collected by the liquid receiving portion, the liquid receiving portion is also prevented from drying and can be smoothly recovered, and the liquid component can be recovered. It is also possible to prevent fluctuations and to reuse the collected liquid as it is.

Further, according to the liquid discharging method of the ninth aspect of the present invention, basically the same effects as those of the seventh aspect can be obtained. Moreover, since the second gas contains water vapor, it is possible to form a coating film more smoothly than in the case where only the droplets of the coating liquid are dropped on the surface to be coated of the workpiece. A uniform coating film can be obtained more easily.

Further, according to the liquid ejecting method according to the tenth aspect of the present invention, basically the same effects as those of the seventh aspect can be obtained. In addition, since the second gas is a dry gas, it is possible to increase the viscosity of the liquid droplets of the coating liquid and increase the binding force to the work application surface. As a result, dripping can be suppressed and a more stable coating film can be formed. This also gives
It is also possible to perform selective application (printing) using a metal mask or the like.

Further, according to the liquid ejecting method according to the eleventh aspect of the present invention, basically, the same effect as that of the seventh aspect can be obtained. In addition, since the gas is heated to a predetermined temperature, the droplets of the coating liquid are formed into a powder form in which only particles of the binder are attached to particles of the coating substance, and the powder is substantially discharged by the powder discharge. Coating can be performed. As a result, the powder can be treated as a liquid, greatly reducing the problem of reduced yield due to nozzle clogging and powder soaring and work environment problems compared to conventional powder coating. Become.

Further, according to the liquid ejecting method of the twelfth aspect of the present invention, basically the same effects as in any one of the seventh to eleventh aspects can be obtained. it can. In addition, since the gas contains a gas that has been ionized positively (+) or negatively (−), the dropletized portion sprayed with this gas is charged to the same polarity as the gas. Therefore, by charging the surface to be coated with the polarity opposite to that of the gas, the droplet to be dropped can be brought into close contact with the surface to be coated by electrostatic force, and the adhesion of the coating film can be improved. Also,
By partially charging the surface to be coated, selective coating can be performed.

Further, according to the liquid ejecting method according to the thirteenth aspect of the present invention, basically, the same effect as any one of the first to twelfth aspects can be obtained. . In addition, the liquid is discharged from the liquid discharge port toward the liquid receiving portion, and the remaining portion of the discharged liquid which is not dropped is received and collected by the liquid receiving portion, so that the liquid is continuously discharged from the liquid discharge port. The discharged liquid can be collected without waste and reused.

Further, according to the liquid application nozzle of the present invention, there is provided a liquid storage section having a liquid inlet and a liquid discharge port, and a gas storage section having a gas inlet and a gas discharge port. Since each discharge port is arranged so that the discharge line of the liquid discharge port and the discharge line of the gas discharge port intersect at a predetermined angle, the liquid discharged from the liquid discharge port is When the gas discharged from the gas discharge port is sprayed at a predetermined angle, a part of the droplet is dropped in the gas discharge direction. That is, the liquid can be dropped by discharging the gas from the gas discharge port provided independently of the liquid discharge port. Therefore, even if the discharge of the liquid from the liquid discharge port is continued, by stopping the discharge of the gas from the gas discharge port, the dropping of the liquid can be stopped. As a result, the dropping of the liquid and the stopping of the dropping can be repeated without causing the liquid to stay, and thus without having to worry about the occurrence of clogging at the liquid discharge port. Further, since the gas discharge port and the liquid discharge port are provided independently of each other, the position of the liquid discharge port can be set so as not to be exposed to the gas flow (gas discharge flow) from the gas discharge port. It is possible to effectively prevent the occurrence of liquid ejection failure due to drying or aggregation of the liquid near the outlet or turbulence of the air flow. Further, since the coating is performed using relatively light droplets having a small diameter that can be dropped by an air current, a thin and dense coating film can be obtained. For this reason, dripping of excess liquid can be suppressed, and conventionally, it becomes possible to eliminate the step of shaking off excess liquid and the step of collecting the excess liquid that has been shaken off, and
The drying time of the coating film can be shortened.

Further, according to the liquid application nozzle of the invention of claim 15 of the present application, basically the same effects as those of the invention of claim 14 can be obtained. In addition, since a heating means for heating the gas discharged from the gas discharge port is provided, the gas discharged from the gas discharge port can be heated to a predetermined temperature. The droplets can be made into a powder form in which only particles of a binder are attached to particles of a coating substance, and coating can be performed substantially by powder discharge. As a result, the powder can be treated as a liquid, greatly reducing the problem of reduced yield due to nozzle clogging and powder soaring and work environment problems compared to conventional powder coating. Become.

Further, according to the liquid application nozzle according to the invention of claim 16 of the present application, basically, the above-mentioned claim 14 is applicable.
Alternatively, the same effect as that of the invention according to claim 15 can be obtained. In addition, since there is provided an ionizing means for ionizing the gas discharged from the gas discharge port to plus (+) or minus (-), the dropletized portion sprayed with the gas is a gas. It is charged to the same polarity. Therefore, by charging the surface to be coated with the polarity opposite to that of the gas, the droplet to be dropped can be brought into close contact with the surface to be coated by electrostatic force, and the adhesion of the coating film can be improved. In addition, selective application can be performed by partially charging the surface to be applied.

Further, according to the liquid application nozzle according to the seventeenth aspect of the present invention, basically, the above-mentioned fourteenth aspect is provided.
-The same effects as any one of the inventions according to the sixteenth aspect can be obtained. Moreover, since the discharge of the gas from the gas discharge port can be performed continuously or intermittently, the discharge of the gas from the gas discharge port is stopped while the discharge of the liquid from the liquid discharge port is continued. Liquid dripping can be stopped. Therefore, during the coating process on the workpiece application surface, the gas is continuously discharged and the liquid is dropped on the workpiece application surface, while the application process is completed and a standby period until the next workpiece application process is performed. In the middle or the like, it is possible to stop the discharge of the gas and stop the dropping of the liquid while the discharge of the liquid is continued. That is, the dropping of the liquid and the stopping of the dropping can be repeated without causing the liquid to stay and therefore without having to worry about the occurrence of clogging at the liquid discharge port.

Further, according to the liquid application nozzle according to the eighteenth aspect of the present invention, basically, the above-mentioned fourteenth aspect
-The same effects as any one of the inventions according to the seventeenth aspects can be obtained. In addition, a liquid receiving portion having a liquid discharge port is provided on the discharge line of the liquid discharge port on the downstream side of the intersection with the discharge line of the gas discharge port. The ejected liquid can be reliably received. That is, when gas is not discharged from the gas discharge port, the discharge flow of all liquids is
Also, when gas is being discharged from the gas discharge port,
The remainder of the liquid discharge flow that is not dropped (that is, the main flow of the liquid discharge flow) proceeds straight as it is and is received by the liquid receiving portion. Since the liquid receiving portion is provided with a liquid outlet for discharging the received liquid to the outside, by connecting this liquid outlet to the liquid supply side of the liquid storing portion, the liquid receiving portion is provided. The received liquid can be returned to the liquid supply side.

Furthermore, according to the liquid application nozzle of the nineteenth aspect of the present invention, basically, the above-mentioned eighteenth aspect
The same effect as that of the invention according to the first aspect can be obtained. In addition, the liquid receiving portion is inclined in the longitudinal direction of the nozzle, and the liquid outlet is formed on the downstream side of the inclination, so that the liquid received by the liquid receiving portion can be supplied to the liquid receiving portion. The liquid can be reliably and smoothly flown toward the liquid discharge port without causing stagnation on the way.

According to the liquid application nozzle of the twentieth aspect of the present invention, there is provided a liquid reservoir having a liquid inlet and a liquid outlet, a gas inlet, and first and second two gas outlets. And a discharge line of the liquid discharge port intersects a discharge line of the first gas discharge port at a first predetermined angle, and the intersection on the discharge line of the first gas discharge port is provided. On the downstream side, the discharge ports are arranged such that the discharge line of the first gas discharge port and the discharge line of the second gas discharge port intersect at a second predetermined angle. The discharged liquid is sprayed at a first predetermined angle with a gas (first gas) discharged from the first gas discharge port with respect to the discharge flow, so that a part of the liquid that has been formed into droplets is converted into the first gas. In the discharge direction of the second gas, and the moved dropletized portion is discharged by the second gas discharge portion. Gas discharged from the (second gas)
Is sprayed at a second predetermined angle, so that the second gas is dropped in the discharge direction. That is, the liquid can be dropped by discharging the gas from the first and second gas discharge ports provided independently of the liquid discharge port. Therefore, even if the discharge of the liquid from the liquid discharge port is continued, by stopping the discharge of the gas from the gas discharge port, the dropping of the liquid can be stopped. As a result, the dropping of the liquid and the stopping of the dropping can be repeated without causing the liquid to stay, and thus without having to worry about the occurrence of clogging at the liquid discharge port. In addition, since the first and second gas discharge ports and the liquid discharge port are provided independently of each other, the liquid discharge port is not exposed to the gas flow (gas discharge flow) from the gas discharge port. The position can be set, and it is possible to effectively prevent the occurrence of liquid ejection failure due to drying or aggregation of the liquid near the liquid ejection port or turbulence of the air flow. Further, since the coating is performed using relatively light droplets having a small diameter that can be dropped by an air current, a thin and dense coating film can be obtained. For this reason, dripping of an excessive liquid can be suppressed, and conventionally, it becomes possible to eliminate the step of shaking off excess liquid and the step of collecting the excess liquid that has been shaken off. Drying time can also be shortened. Furthermore, the first
The second gas is sprayed on the dropletized portion that has been dropletized and moved by the spraying of the gas, and the droplet is dropped in the ejection direction. It is possible to suitably control the dripping state of the droplets, for example, by rectifying the flow of the oxidized portion or making the droplets finer, so that better and more stable coating can be performed.

Furthermore, according to the liquid application nozzle of the twenty-first aspect of the present invention, basically, the same effects as those of the twentieth aspect can be obtained. In addition, the gas storage section has a first gas storage section having a first gas inlet and a first gas discharge port, and a second gas storage section having a second gas inlet and a second gas discharge port. The first and second gas storage units are composed of two separate gas storage units.
It is possible to individually set the discharge condition of each gas from the gas discharge port to obtain an optimum discharge state, and discharge different types of gas from the first and second gas discharge ports. Will also be able to do it.

Further, according to the liquid application nozzle according to the invention of claim 22 of the present application, basically, the above-mentioned claim 20
Alternatively, the same effect as that of the invention according to claim 21 can be obtained. In addition, since a heating means for heating the gas discharged from the second gas discharge port is provided, the gas discharged from the second gas discharge port can be heated to a predetermined temperature. In addition, the droplets of the coating liquid can be formed into a powdery state in which only particles of the binder are attached to particles of the coating substance, and coating can be performed substantially by powder discharge. As a result,
By handling the powder as a liquid, it is possible to greatly reduce the problem of a decrease in yield due to clogging of nozzles and the rise of powder and the problem of the working environment, as compared with conventional powder coating.

Further, according to the liquid application nozzle according to the twenty-third aspect of the present invention, basically, the twentieth aspect is described.
-The same effect as any one of the inventions according to the twenty-second aspect can be obtained. In addition, since there is provided an ionizing means for ionizing the gas discharged from the gas discharge port to plus (+) or minus (-), the dropletized portion sprayed with the gas is a gas. It is charged to the same polarity. Therefore, by charging the surface to be coated with the polarity opposite to that of the gas, the droplet to be dropped can be brought into close contact with the surface to be coated by electrostatic force, and the adhesion of the coating film can be improved. In addition, selective application can be performed by partially charging the surface to be applied.

Further, according to the liquid application nozzle according to the invention of claim 24 of the present application, basically, the above-mentioned claim 20 is provided.
-The same effects as any one of the inventions according to claims 23 can be obtained. Moreover, since the discharge of the gas from the gas discharge port can be performed continuously or intermittently, the discharge of the gas from the gas discharge port is stopped while the discharge of the liquid from the liquid discharge port is continued. Liquid dripping can be stopped. Therefore, during the coating process on the workpiece application surface, the gas is continuously discharged and the liquid is dropped on the workpiece application surface, while the application process is completed and a standby period until the next workpiece application process is performed. In the middle or the like, it is possible to stop the discharge of the gas and stop the dropping of the liquid while the discharge of the liquid is continued. That is, the dropping of the liquid and the stopping of the dropping can be repeated without causing the liquid to stay and therefore without having to worry about the occurrence of clogging at the liquid discharge port.

Further, according to the liquid application nozzle according to the invention of claim 25 of the present application, basically, the liquid application nozzle according to claim 20
-The same effect as any one of the inventions according to claims 24 can be obtained. In addition, a liquid receiving portion having a liquid discharge port is provided on the discharge line of the liquid discharge port on the downstream side of the intersection with the discharge line of the gas discharge port. The ejected liquid can be reliably received. That is, when gas is not discharged from the gas discharge port, the discharge flow of all liquids is
Also, when gas is being discharged from the gas discharge port,
The remainder of the liquid discharge flow that is not dropped (that is, the main flow of the liquid discharge flow) proceeds straight as it is and is received by the liquid receiving portion. Since the liquid receiving portion is provided with a liquid outlet for discharging the received liquid to the outside, by connecting this liquid outlet to the liquid supply side of the liquid storing portion, the liquid receiving portion is provided. The received liquid can be returned to the liquid supply side.

Further, according to the liquid application nozzle according to the invention of claim 26 of the present application, basically, the liquid application nozzle according to claim 25
The same effect as that of the invention according to the first aspect can be obtained. In addition, the liquid receiving portion is inclined in the longitudinal direction of the nozzle, and the liquid outlet is formed on the downstream side of the inclination, so that the liquid received by the liquid receiving portion can be supplied to the liquid receiving portion. The liquid can be reliably and smoothly flown toward the liquid discharge port without causing stagnation on the way.

Further, according to the invention of claim 27 of the present application,
The liquid application nozzle according to any one of claims 14 to 19, wherein the gas discharge port faces the application surface of the application object, and the liquid application nozzle is applied to the application object on the application object. Thus, a liquid coating apparatus having the same effect as that of any one of the fourteenth to nineteenth aspects can be obtained.

Furthermore, according to the invention of claim 28 of the present application,
The liquid application nozzle according to any one of claims 20 to 26, wherein the second gas discharge port faces the application surface of the application object, and the application object is applied on the application object. And a liquid coating apparatus having the same effect as any one of the inventions according to claims 20 to 26 can be obtained.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a schematic configuration of a liquid application device according to a first embodiment of the present invention.

FIG. 2 is a perspective view showing an internal structure of a moving support portion of the liquid application device.

FIG. 3 is a side view showing an internal structure of a moving support portion of the liquid application device.

FIG. 4 is a perspective view showing the liquid application nozzle according to the first embodiment with the inside thereof partially exposed.

FIG. 5 is an explanatory longitudinal sectional view of the liquid application nozzle according to the first embodiment.

FIG. 6 is an explanatory longitudinal sectional view showing an enlarged main part of the liquid application nozzle according to the first embodiment.

FIG. 7 is an explanatory view showing a part of a liquid application step using the liquid application nozzle according to the first embodiment.

FIG. 8 is an explanatory view showing a part of a liquid applying step using the liquid applying nozzle according to the first embodiment.

FIG. 9 is an explanatory view showing a part of a liquid applying step using the liquid applying nozzle according to the first embodiment.

FIG. 10 is an explanatory view showing a part of a liquid applying step using the liquid applying nozzle according to the first embodiment.

FIG. 11 is a perspective view showing a liquid application nozzle according to a second embodiment of the present invention, with the inside thereof being partially exposed.

FIG. 12 is an explanatory longitudinal sectional view of a liquid application nozzle according to the second embodiment.

FIG. 13 is an explanatory longitudinal sectional view showing an enlarged main part of a liquid application nozzle according to the second embodiment.

FIG. 14 is an explanatory longitudinal sectional view of a liquid application nozzle according to a third embodiment of the present invention.

FIG. 15 is an explanatory longitudinal sectional view of a liquid application nozzle according to a fourth embodiment of the present invention.

FIG. 16 is an explanatory longitudinal sectional view of a liquid application nozzle according to a fifth embodiment of the present invention.

FIG. 17 is a perspective view illustrating a schematic configuration of a liquid application apparatus according to a conventional example.

FIG. 18 is an explanatory view showing a part of a liquid applying step using a liquid applying nozzle according to a conventional example.

FIG. 19 is an explanatory view showing a part of a liquid applying step using a liquid applying nozzle according to a conventional example.

FIG. 20 is an explanatory view showing a part of a liquid applying step using a liquid applying nozzle according to a conventional example.

FIG. 21 is a perspective view showing a liquid application nozzle according to a conventional example with the inside thereof partially exposed.

FIG. 22 is a perspective view showing the inside of a liquid application nozzle according to another conventional example with a part thereof exposed.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Liquid application device 10 ... Moving support part 20, 30, 40, 50, 60 ... Liquid application nozzle 22, 32, 42, 52, 62 ... Liquid storage part 22i ... Liquid introduction port 23, 33, 43, 53, 63 ... Liquid discharge ports 24,44 ... Gas storage section 24i ... Gas inlet port 25 ... Gas discharge ports 26,36,46,56,66 ... Liquid receiving sections 26o, 36o ... Liquid discharge ports 34,54,64 ... First gas Reservoir 35, 45, 55, 65 First gas outlet 38, 58, 68 Second gas reservoir 39, 49, 59, 69 Second gas outlet 57 Heater (heating means) 67 Ionizer (Ionization means) Fd: Droplet Fm: Liquid discharge flow L1: Discharge line of liquid discharge port L2, L3: Discharge line of gas discharge port W: Work (object to be coated)

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Hiroyuki Kotani 1006 Kazuma Kadoma, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. (72) Inventor Hiroyuki Naka 1006 Odaka Kazama Kadoma City, Osaka Matsushita Electric Industrial Co. 72) Inventor Koji Matsunaga 1006 Kadoma Kadoma, Osaka Prefecture Inside Matsushita Electric Industrial Co., Ltd. (72) Inventor Takao Inoue 1006 Odaka Kadoma Kadoma City, Osaka Pref. Matsushita Electric Industrial Co., Ltd.

Claims (28)

[Claims] 1. A method for ejecting a liquid from a liquid ejection port in a predetermined direction and ejecting a gas from a gas ejection port to spray the ejected liquid at a predetermined angle. A liquid discharging method, characterized in that a part of the liquid is dropped in a gas discharging direction. 2. The method according to claim 1, wherein the gas includes a vapor of the liquid solvent. 3. The method according to claim 1, wherein the gas contains water vapor. 4. The liquid discharging method according to claim 1, wherein said gas is a dry gas. 5. The liquid discharging method according to claim 1, wherein the gas is heated to a predetermined temperature. 6. The liquid discharging method according to claim 1, wherein the gas includes a gas ionized positively (+) or negatively (−). 7. A method in which a liquid is discharged from a liquid discharge port in a predetermined direction, and a first gas is discharged from a first gas discharge port to spray the liquid at a first predetermined angle. Moving a part of the discharged liquid into droplets in the discharge direction of the first gas, discharging the second gas from the second gas discharge port, 2. A liquid discharging method, comprising: spraying at a predetermined angle of 2 and dropping the moved liquid droplet portion in the discharging direction of the second gas. 8. The liquid discharging method according to claim 7, wherein the first gas contains a vapor of the liquid solvent. 9. The method according to claim 7, wherein the second gas contains water vapor. 10. The method according to claim 7, wherein the second gas is a dry gas. 11. The method according to claim 7, wherein the second gas is heated to a predetermined temperature. 12. The liquid discharging method according to claim 7, wherein the gas includes a gas ionized positively (+) or negatively (−). 13. The liquid receiving device according to claim 1, wherein the liquid is discharged from a liquid discharge port toward a liquid receiving portion, and the remaining portion of the discharged liquid which is not dropped is received and collected by the liquid receiving portion. The liquid ejection method according to claim 1. 14. A liquid storage section having a liquid inlet and a liquid discharge port, and a gas storage section having a gas inlet and a gas discharge port, wherein the discharge line of the liquid discharge port and the discharge of the gas discharge port are provided. A liquid application nozzle, wherein each discharge port is arranged such that a line intersects at a predetermined angle. 15. The liquid application nozzle according to claim 14, further comprising heating means for heating gas discharged from the gas discharge port. 16. The liquid according to claim 14, further comprising an ionizing means for ionizing the gas discharged from the gas discharge port into plus (+) or minus (−). Application nozzle. 17. The method according to claim 14, wherein the discharge of the gas from the gas discharge port can be performed continuously or intermittently.
The liquid application nozzle according to claim 16. 18. A liquid receiving portion having a liquid discharge port is provided on a discharge line of the liquid discharge port downstream of an intersection with the discharge line of the gas discharge port. The liquid application nozzle according to any one of claims 14 to 17. 19. The liquid application nozzle according to claim 18, wherein the liquid receiving portion is inclined in the longitudinal direction of the nozzle, and the liquid outlet is formed downstream of the inclination. 20. A liquid storage unit having a liquid inlet having a liquid inlet and a liquid outlet, and a gas reservoir having a gas inlet and first and second gas outlets, wherein the discharge line of the liquid outlet is provided. And the discharge line of the first gas discharge port intersect at a first predetermined angle, and the discharge line of the first gas discharge port and the second discharge line downstream of the intersection on the discharge line of the first gas discharge port. A liquid application nozzle, wherein each discharge port is arranged so that a discharge line of a gas discharge port intersects at a second predetermined angle. 21. The gas storage section, wherein the gas storage section includes a first gas storage section having a first gas introduction port and a first gas discharge port, and a second gas storage section having a second gas introduction port and a second gas discharge port. Part of
21. The liquid application nozzle according to claim 20, comprising two separate gas storage units. 22. The liquid application nozzle according to claim 20, further comprising heating means for heating gas discharged from the second gas discharge port. 23. An apparatus according to claim 20, further comprising an ionizing means for ionizing the gas discharged from said second gas discharge port to plus (+) or minus (-).
The liquid application nozzle according to claim 22. 24. The method according to claim 20, wherein the discharge of the gas from the gas discharge port can be performed continuously or intermittently.
The liquid application nozzle according to any one of claims 23 to 23. 25. On the discharge line of the liquid discharge port, downstream of the intersection with the discharge line of the first gas discharge port,
The liquid application nozzle according to any one of claims 20 to 24, further comprising a liquid receiving portion having a liquid discharge port. 26. The liquid application nozzle according to claim 25, wherein the liquid receiving portion is inclined in the longitudinal direction of the nozzle, and the liquid outlet is formed downstream of the inclination. 27. A liquid application nozzle according to any one of claims 14 to 19, and a relative moving means for moving the liquid application nozzle relative to the application target on the application target. A liquid application nozzle, wherein the liquid application nozzle is arranged such that a gas discharge port thereof faces an application surface of the application object. 28. A liquid application nozzle according to any one of claims 20 to 26, and a relative moving means for moving the liquid application nozzle relative to the application target on the application target. And a liquid application nozzle, wherein the liquid application nozzle is arranged such that a second gas discharge port and a surface to be applied of the application object face each other.