JPH11167740A - Device and method for mounting hologram, and hologram - Google Patents

Abstract

PROBLEM TO BE SOLVED: To mount a hologram on a mounting position horizontally by grasping the hologram from its side surface with first, second fingers in the state that the upper surface of the hologram is abutted horizontally on an abutment part with a hologram grasp hand horizontally moving, vertically moving and horizontally rotating the hologram. SOLUTION: The hologram grasp hand for moving the hologram in the X axial, Y axial directions and rotating in the biaxial direction abuts horizontally on the upper surface of the hologram with the abutment parts 47, 48 of respective lower surfaces of abutment plates 45, 46. In such a state, the hologram is grasped from its side surfaces with V grooves 43, 44 of an immovable and movable fingers 35, 36 moving integrally with she substrate 34 of the hologram grasp hand and in the direction of the arrow 39. The V grooves 43, 44 are provided on the immovable and movable fingers 35, 36 at respective opening angles 90 deg., and hold the movable finger 36 with linear sliders 37, 38 to be pushed out with a piston 42. Thus, the hologram is fixed to the mounting position while horizontally keeping it.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hologram mounting apparatus and method used for manufacturing a hologram unit which is a component of a hologram head which is a kind of optical head, and a hologram.

In recent years, with the speeding up of computer systems and the increase in the amount of data, there has been a demand for an auxiliary storage device capable of performing high-speed and large-capacity storage / reproduction as an auxiliary storage device.

For this reason, the demand for optical information storage / reproducing devices such as CD-ROM devices and optical disk devices tends to increase year by year, and in the future, they will be shifted to cheaper, smaller and larger capacity models. Expected.

In order to reduce the size and capacity of these CD-ROM devices and optical disk devices, a highly reliable small optical head, a high-density storage medium, and a short-wavelength emission laser are required. Required.

In recent years, as a small optical head, a hologram unit in which a laser diode as a light source, a photodiode and a hologram as a photodetector are unitized, a hologram head formed by combining a collimation lens and an objective lens, has been developed. Development is taking place.

[0006]

2. Description of the Related Art FIG. 12 is a schematic front view showing an example of a hologram unit. In FIG. 12, 1 is a stem, 2 is a laser diode as a light source mounted on the stem 1, and 3 is mounted on the stem 1. This is a photodiode forming a photodetector.

Further, 4 to 7 are leads, 8 is a cap mounted on the stem 1, and 9 is bonded and fixed to the upper surface of the cap 8 including an opening formed in the cap 8 and forming an optical path with an adhesive 10. It is a hologram.

FIG. 13 is a flowchart showing a conventional hologram mounting method for the cap 8 which is performed when the hologram unit shown in FIG. 12 is manufactured.

That is, in the conventional hologram mounting method for the cap 8 performed when the hologram unit shown in FIG. 12 is manufactured, first, the laser diode 2, the photodiode 3, and the stem 1 on which the cap 8 is mounted are set on a movable stage. (Step S1).

Next, the hologram 9 is set on the upper surface including the opening of the cap 8, and the hologram 9 is pressed against the cap 8 with a low load by a hand having XYZθ degrees of freedom (step S2).

Next, after recognizing the center of the optical surface of the hologram 9 using a CCD camera arranged above, a laser beam is generated from the laser diode 2 and emitted from the laser diode 2 also using the CCD camera. The emitted light is imaged through an ND (neutral density) filter to recognize the light emitting point of the laser diode 2 (step S).
3, S4).

Next, a positioning operation of the hologram 9 is performed, and the opening of the cap 8 is placed on the XY plane (horizontal plane) so that the center of the optical surface of the hologram 9 coincides with the light emitting point of the laser diode 2. It is positioned on the upper surface including (Step S5).

Next, an optical element for acquiring a servo signal is set, and the hologram 9 is corrected for the Y axis (correction in the Y axis direction), the θ axis correction (correction around the Z axis), and the X axis correction (the X axis correction). (Direction correction) are sequentially performed (steps S6 to S9).

Next, it is determined whether or not the hologram 9 has acquired a predetermined signal by Y-axis correction (step S1).
0), if the predetermined signal by the Y-axis correction has not been obtained, the process returns to step S7. If the predetermined signal by the Y-axis correction has been obtained, the hologram 9 obtains the predetermined signal by the θ-axis correction. Is determined (step S1).
1).

If the result of the determination is that the predetermined signal due to the θ-axis correction has not been obtained, the process returns to step S8, and if the predetermined signal due to the θ-axis correction has been obtained, the hologram 9 uses the predetermined signal due to the X-axis correction. Is determined (step S12).

As a result of the determination, if the predetermined signal by the X-axis correction has not been obtained, the process returns to step S9. If the predetermined signal by the X-axis correction has been obtained, the hologram 9 is attached to the cap 8 with the adhesive 10 (Step S1
3). Thus, conventionally, the hologram 9
Was mounted on the cap 8.

[0017]

However, in the conventional hologram mounting method shown in FIG. 13, since the hologram 9 is mounted along the upper surface including the opening of the cap 8, the horizontality of the hologram 9 is reduced. However, even if the stem 1 can be set horizontally at the time of the movable stage, it is not always possible to mount the hologram 9 horizontally. Was.

For example, as shown in FIG. 14, even if the stem 1 can be set horizontally, if the upper surface 12 of the cap 8 is inclined with respect to the horizontal However, the hologram 9 is also inclined with respect to the horizontal direction, and the hologram 9 cannot be kept horizontal.

XY of the light emitting point of the laser diode 2
In general, the coordinate value differs for each product due to a tolerance of the stem 1, a mounting error of the laser diode 2 with respect to the stem 1, and the like.

Therefore, when positioning the hologram 9 on the cap 8 and aligning the center of the optical surface of the hologram 9 with the light emitting point of the laser diode 2 on the XY plane, the θ stage for rotating the hologram 9 horizontally is used. In some cases, the rotation axis does not coincide with the center of the optical surface of the hologram 9.

However, the conventional hologram mounting method shown in FIG. 13 does not consider such a mismatch between the rotation axis of the θ stage and the center of the optical surface of the hologram 9,
If there is a discrepancy between the rotation axis of the θ stage and the center of the optical surface of the hologram 9, if the θ axis correction is performed, X
The origin of the Y plane rotates around the rotation axis of the θ stage,
The hologram 9 is displaced with respect to the XY axes.

For this reason, in the conventional hologram mounting method shown in FIG. 13, steps S7 to S12 must be repeated, and there is a problem that it takes a long time to position the hologram 9.

In view of the foregoing, it is a first object of the present invention to provide a hologram mounting apparatus capable of mounting a hologram horizontally at a hologram mounting position, and to mount a hologram horizontally at a hologram mounting position. A second object of the present invention is to provide a hologram mounting apparatus capable of reducing the time required for mounting a hologram.
The purpose of.

A third object of the present invention is to provide a hologram mounting method capable of reducing the time required for mounting a hologram on a hologram mounting portion, and to reduce the time required for mounting a hologram at a hologram mounting position. A fourth object is to provide a hologram that can be shortened.

[0025]

According to a first aspect of the present invention, there is provided a hologram mounting apparatus including a hologram gripping hand for horizontally moving, vertically moving, and horizontally rotating a hologram. The hologram gripping hand includes a striking portion capable of horizontally striking the upper surface of the hologram, and first and second fingers for gripping the hologram from the side with the striking portion striking the upper surface of the hologram. It is that it has.

According to the first aspect of the present invention, the hologram gripping hand includes the abutting portion capable of horizontally abutting the upper surface of the hologram. The hologram can be held horizontally by gripping the hologram with the first and second fingers, and the hologram gripping hand can be moved horizontally,
Even when the hologram is moved vertically and rotated horizontally, the hologram can be kept horizontal.

Therefore, by holding the hologram horizontally by the hologram gripping hand and moving it to the hologram mounting position, and fixing the hologram at the hologram mounting position while maintaining the horizontal state of the hologram, the hologram mounting position is not horizontal. In both cases, the hologram can be mounted horizontally at the hologram mounting position.

According to a second aspect of the present invention, in the hologram mounting apparatus according to the second aspect, in the first aspect, the abutting portion comprises: a first abutting portion provided on the first finger; And a second abutting portion provided on the second finger.

According to the second aspect of the present invention, the same operation as the first aspect can be obtained, and the first and second aspects can be obtained.
Since the first and second abutting portions are provided on the finger, the hologram can be reliably abutted with a simple configuration.

In the present invention, the third invention (hologram mounting apparatus according to claim 3) is the first or second invention, wherein
The first finger is immobile, and the second finger is movable in the hologram gripping direction.

According to the third aspect of the present invention, the same operation as that of the first or the second aspect can be obtained, and only the second finger is movable. Gripping can be performed.

According to a fourth aspect of the present invention, there is provided a hologram mounting apparatus according to the first, second or third aspect, wherein the first and second fingers are provided with holograms at opposing portions. The first and second V-grooves are pressed against the side surfaces of the first and second corner portions facing each other.

According to the fourth aspect of the present invention, the same operation as that of the first, second or third aspect can be obtained, and a simple structure can be obtained when the hologram is a rectangular flat plate. Thus, the hologram can be securely held.

According to a fifth aspect of the present invention, there is provided a hologram mounting apparatus according to the first, second, third or fourth aspect, wherein the hologram is mounted so that the hologram can be levitated with its upper surface facing upward. And a hologram floating means having a hologram mounting portion to be placed and a compressed air emitting portion for discharging compressed air upward from a lower portion of the hologram mounting portion to float the hologram. .

According to the fifth aspect of the present invention, the same operation as that of the first, second, third or fourth aspect can be obtained, and the hologram can be easily formed on the abutment portion of the hologram gripping hand. Therefore, there is no need to provide a device having a complicated configuration as a device for horizontally abutting the hologram on the abutting portion of the hologram gripping hand.

In a sixth aspect of the present invention, the hologram mounting apparatus according to the sixth aspect is the first, second, third, fourth or fifth aspect of the present invention, wherein the hologram gripping hand is horizontally moved. And a second movable stage mounted with the first movable stage and horizontally rotating the hologram gripping hand.

According to the sixth aspect of the present invention, the same operation as that of the first, second, third, fourth or fifth aspect can be obtained, and the center of the optical surface of the hologram and the light source can be obtained. By aligning the light emission point of the hologram holding hand with the rotation center of the second movable stage, even if the hologram gripping hand is rotated horizontally,
Since the position of the origin on the horizontal plane (XY plane) does not change, even if the hologram is corrected around the rotation axis (Z axis), a position shift with respect to the two horizontal axes (XY axis) does not occur. Absent.

According to a seventh aspect of the present invention, in the hologram mounting apparatus according to the seventh aspect, in the sixth aspect, the hologram gripping hand is not affected by the angular displacement due to the horizontal rotation and is coordinated via the imaging means. That is, a predetermined mark from which a value can be obtained is provided on the upper surface.

According to the seventh aspect of the invention, according to the seventh aspect, the same operation as that of the sixth aspect can be obtained, and the second movable stage is movable, and the predetermined action formed on the upper surface of the hologram gripping hand is achieved. Let the mark take three or more positions,
By acquiring the coordinate values of these three or more positions and performing a predetermined calculation based on these coordinate values, the coordinate value of the rotation center of the second movable stage can be easily calculated.

According to an eighth aspect of the present invention (a hologram mounting method according to claim 8), a first movable stage for horizontally moving a hologram gripping hand and a first movable stage are mounted on the hologram gripping hand. A hologram mounting method for mounting a hologram at a hologram mounting position using a hologram mounting apparatus including a second movable stage that rotates horizontally, wherein the hologram is positioned at the hologram mounting position when the hologram is positioned at the hologram mounting position. The center of the optical surface of the hologram is aligned with the center of rotation.

According to the eighth aspect of the present invention, when the light emitting point of the light source is made to coincide with the rotation center of the second movable stage, even if the hologram gripping hand is rotated horizontally,
Since the position of the origin on the horizontal plane (XY plane) does not change, even if the hologram is corrected around the rotation axis (Z axis), a position shift with respect to the two horizontal axes (XY axis) does not occur. Absent.

According to a ninth aspect of the present invention, in the hologram mounting method according to the ninth aspect, the coordinate value of the rotation center of the second movable stage is determined by moving the second movable stage. The hologram gripping hand or the predetermined mark formed on the upper surface of the hologram gripped by the hologram gripping hand is set at three or more positions.
The coordinates are obtained by acquiring the coordinate values of the positions more than the position and performing a predetermined operation based on these coordinate values.

According to the ninth aspect of the present invention, the same operation as that of the eighth aspect can be obtained, and the coordinate value of the rotation center of the second movable stage can be easily calculated.

In the tenth aspect of the present invention, the hologram according to the tenth aspect is provided with a predetermined mark on the upper surface which is not affected by the angular displacement due to the horizontal rotation and whose coordinate value can be obtained through the imaging means. It has it.

According to the tenth aspect of the present invention, a first movable stage for horizontally moving the hologram gripping hand, and a second movable stage for mounting the first movable stage and horizontally rotating the hologram gripping hand When the hologram is mounted at the hologram mounting position using the hologram mounting apparatus having the above, when the hologram is positioned with respect to the hologram mounting position, the center of the optical surface of the hologram is aligned with the rotation center of the second movable stage. In the case where the hologram is gripped by the hologram gripping hand in advance, the second movable stage is moved, and a predetermined mark formed on the upper surface of the hologram is caused to take three or more positions. When the coordinate value of the second movable stage is obtained, the coordinate value of the rotation center of the second movable stage can be easily calculated. That.

[0046]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to FIGS.
One embodiment of the hologram mounting apparatus according to the present invention will be described including an embodiment of a hologram mounting method and a hologram according to the present invention, using a hologram mounting apparatus used for manufacturing the hologram unit shown in FIG. 12 as an example.

FIG. 1 is a schematic perspective view showing a main part of an embodiment of a hologram mounting apparatus according to the present invention.
Moves the hologram 9 in three axes (X axis, Y axis, Z axis) and 1
It is a hologram movable means that can rotate its axis (θ axis).

Further, reference numeral 20 denotes a biaxial shaft (X
A stem moving means 21 that can move (axis, Y axis) and rotate one axis (θ axis) is disposed above the hologram moving means 19 and is an imaging means having a field of view on the hologram moving means 19 side.

In the hologram moving means 19,
22 is a hologram gripping hand that grips the hologram 9;
Reference numeral 23 denotes a hand-based X stage on which the hologram holding hand 22 is mounted so that the hologram holding hand 22 can be moved in the X-axis direction. Reference numeral 24 denotes a hologram for fixing the hologram holding hand 22 to the hand-based X stage 23. The gripping hand fixing means 24.

Reference numeral 25 denotes a hand system Y stage on which a hand system X stage 23 is mounted so that the hologram gripping hand 22 can be moved together with the hand system X stage 23 in the Y-axis direction.

A hand system 26 is provided with a hand system Y stage 25 so that the hologram gripping hand 22 can be horizontally rotated about the Z axis together with the hand system X stage 23 and the hand system Y stage 25. θ stage.

Reference numeral 27 denotes a hand system θ stage 26 mounted so that the hologram gripping hand 22 can be moved in the Z-axis direction together with the hand system X stage 23, the hand system Y stage 25, and the hand system θ stage 26. It is a configured hand Z-stage.

Further, in the stem moving means 20, 28
Reference numeral denotes a stem holding arm serving as a stem holding portion 29 for holding the distal end portion so that the stem 1 can be removed, and reference numeral 30 denotes a stem θ stage configured so that the stem holding arm 28 can be horizontally rotated.

Reference numeral 31 denotes a stem system θ stage 30 on which the stem holding arm 28 is mounted.
And a stem X stage configured to be movable in the X-axis direction.

Reference numeral 32 denotes a stem system X stage 31 on which a stem holding arm 28 is mounted.
And a stem Y stage configured to be movable in the Y axis direction together with the stem X stage 31.

FIG. 2 is a schematic perspective view of the hologram gripping hand 22 as viewed obliquely from below, and FIG. 3 is a schematic plan view of the hologram gripping hand 22 as viewed from above.

In FIGS. 2 and 3, reference numeral 34 denotes a base, and reference numeral 35 denotes an immobile finger which is formed integrally with the base 34 and serves as a first finger for holding the hologram 9.

Reference numeral 36 denotes a base 3 via linear sliders 37 and 38 which are configured to slide one-dimensionally.
4 is a movable finger that serves as a second finger for gripping the hologram 9 and that can be moved back and forth as indicated by an arrow 39.

Reference numeral 40 denotes a piston fixing member fixed to the lower surface of the movable finger 36; 41, an air cylinder;
Reference numeral 2 denotes a piston having a distal end fixed to the piston fixing member 40 and pushing the movable finger 36 forward by compressed air supplied into the air cylinder 41.

Reference numeral 43 denotes a V-shaped groove formed on the stationary finger 35 for holding the hologram 9 and an opening angle of 90 °, and reference numeral 44 denotes a V-shaped groove 43 for holding the hologram 9.
And a V-groove with an opening angle of 90 ° formed in the movable finger 36 so as to face the V-groove.

Reference numeral 45 denotes the V-groove 4
A butting plate 46 fixed to the upper surface of the fixed finger 35 for abutting through the hologram 3 is a movable finger 36 for abutting the upper surface of the hologram 9 via the V-groove 44.
Abutment plate fixed to the upper surface of the.

Also, 47 and 48 are abutment plates 45 and 46
Is a part of the lower surface of the hologram 9, and is a striking portion for striking the upper surface of the hologram 9 via the V-grooves 43, 44, and the striking portions 47, 48 are horizontal.

Reference numeral 49 denotes an opening formed in the abutting plate 45 for recognizing the first hologram recognition mark formed on the hologram 9 from above, and reference numeral 50 denotes a second hologram formed on the hologram 9. This is an opening formed in the butting plate 46 for recognizing the hologram recognition mark from above.

Reference numeral 51 denotes a hand system θ stage rotation center search mark formed on the upper surface of the stationary finger 35 and capable of recognizing an image. The hand system θ stage rotation center search mark 51 is formed by horizontal rotation. It is a circular mark so that the coordinate value can be obtained via the imaging means without being affected by the angular displacement.

FIG. 4 is a flowchart showing a hologram mounting method (one embodiment of the hologram mounting method of the present invention) using one embodiment of the hologram mounting apparatus of the present invention, and one embodiment of the hologram mounting apparatus of the present invention. In the hologram mounting method using the method, first, the Z-axis of the hologram moving means 19, that is, the hand system θ stage 2
A search is made for the rotation center of No. 6 (step P1).

FIG. 5 is a plan view for explaining a method of searching for the center of rotation of the hand system θ stage 26. 5 in FIG.
Reference numeral 2 denotes a field of view of the imaging unit 21, and in this example, a hand system θ
By rotating the stage 26 and using the imaging means 21,
Position P ₁ of the hand based θ stage rotation center for searching the mark 51 three, image recognition by P _2, P _3, a position P ₁ of these three, P _2, coordinate values of P ₃ (X _1, Y ₁ ), (X ₂ ,
Y ₂ ) and (X ₃ , Y ₃ ).

In this embodiment, the hand system θ stage 26
Is rotated, the hand system θ stage rotation center search mark 51 rotates around the rotation center 54 of the hand system θ stage 26 as indicated by the two-dot chain line 53.

Therefore, the coordinate value (X ₀ , Y ₀ ) of the rotation center 54 of the hand system θ stage 26 is P ₁ (X ₁ , Y ₁ ).
And _{P 2 (X 2, Y 2} ) two vertical straight lines 55 connecting the bisector 5
6 and the coordinate value of the intersection of the vertical bisector 58 of the straight line 57 connecting P ₂ (X ₂ , Y ₂ ) and P ₃ (X ₃ , Y ₃ ). It can be obtained by the formula shown below.

[0069]

(Equation 1)

Thus, the hand system θ stage 26
After searching for the rotation center 54 of the laser diode 2,
The stem 1 on which the photodiode 3 and the cap 8 are mounted is horizontally set on the stem holding section 29 at the tip of the stem holding arm 28 of the stem moving means 20 (step P).
2).

When one embodiment of the hologram mounting apparatus of the present invention is used, the height of the cap 8 is set to be lower than the height of the conventional case as long as the hologram 9 can be bonded and fixed. It is preferable to keep it.

Next, the hologram 9 is gripped by the hologram gripping hand 22 and the hologram 9 is moved to the hologram moving means 1.
9 (steps P3 and P4).

FIG. 6 is a schematic cross-sectional view for explaining a method of gripping the hologram 9 by the hologram gripping hand 22. In FIG. 6, reference numeral 59 denotes a pallet constituting hologram floating means, and 60 denotes a hologram 9. It is a hologram fitting hole that forms a hologram mounting portion on which the upper surface is placed so as to be levitated.

Reference numeral 61 denotes a compressed air discharge passage which forms a compressed air discharge portion formed at the center of the pallet 59 for sending compressed air to the hologram fitting hole 60 from the bottom surface 62 of the hologram fitting hole 60. .

In the present embodiment, first, as shown in FIG.
0 and the hologram gripping hand 22 is positioned slightly above the hologram 9.

In this case, the V-grooves 43 and 44 are
When the hologram 9 is floated above the pair of diagonals, the hologram gripping hand 22 is positioned so that the upper surface of the hologram 9 abuts against the abutting plates 47 and 48.

Next, when compressed air is sent to the hologram fitting hole 60 through the compressed air discharge path 61, the hologram 9 floats as shown in FIG. The hologram 9 hits the abutments 47 and 48 and is in a horizontal state.

Then, next, the hologram gripping hand 22
Compressed air is supplied to the air cylinder 41, and the movable finger 36 is moved forward as shown in FIG.
3 and 44 are pressed against the side surfaces of the two opposing corners of the hologram 9, while maintaining the horizontal state of the hologram 9,
The hologram 9 is moved to the fixed finger 35 and the movable finger 3.
6 to terminate the delivery of the compressed air from the compressed air discharge passage 61.

Thus, the hologram gripping hand 2
After grasping the hologram 9 with 2 and moving the hologram 9 on the Z axis of the hologram moving means 19, the center of the optical surface of the hologram 9 is searched (step P5).

As shown in FIG. 9, the center of the optical surface of the hologram 9 is aligned with the hologram recognition marks 64 and 65 formed on the upper surface of the opposing corners of the hologram 9 and the openings 49 of the abutment plates 45 and 46. The hologram 1 is recognized by performing image recognition using the image pickup means 21 via the reference numeral 50 and calculating the middle point of a line segment 66 connecting the hologram recognition marks 64 and 65.
The center 67 of 0 can be searched.

After searching the center 67 of the optical surface of the hologram 9 in this way, the stem 1 held by the stem holding section 29 of the stem holding arm 28 is positioned below the imaging means 21 and Is estimated (step P).
6).

As shown in FIG. 10, the position of the light emitting point of the laser diode 2 is estimated by using a semicircular mesa unit 6 formed at a predetermined distance from the light emitting point 68 of the laser diode 2.
The image recognition can be performed by recognizing images 9 and 70 and referring to the respective recognition points of the mesa units 69 and 70.

After estimating the position of the light emitting point 68 of the laser diode 2 in this way, the positioning of the hologram 9 and the stem 1 is calculated, and the center of the optical surface of the hologram 9 is Positioning of the hologram 9 on the upper surface including the opening of the cap 8 and positioning of the stem 1 are performed so that the light emitting points 68 of the laser diode 2 coincide with the light emitting points 68 (step P7).

Next, an optical element for acquiring a servo signal is set, and after the laser diode 2 emits light, the Y-axis correction, the θ-axis correction, and the X-axis correction of the hologram 9 are sequentially performed (steps P8 to P11). ), The hologram 9 is bonded and fixed to the cap 8 using the adhesive 10 (step P).
12).

As described above, according to one embodiment of the hologram mounting apparatus of the present invention, the hologram 9 is abutted against the abutting portions 47 and 48 of the hologram holding hand 22 which is leveled, and the immovable finger 35 and the movable finger By holding the hologram 9 with the hologram 9, the hologram 9 can be held horizontally by the hologram holding hand 22. Even if the hologram holding hand 22 is horizontally moved, vertically moved, and horizontally rotated, the horizontal state of the hologram 9 is maintained. Can be maintained.

Therefore, the hologram 9 is horizontally held by the hologram gripping hand 22 and moved to the upper surface 12 including the opening of the cap 8, and the hologram 9 is removed from the opening of the cap 8 while the horizontal state of the hologram 9 is maintained. By bonding the hologram 9 to the upper surface 12 including the opening, the upper surface 12 including the opening of the cap 8 is not horizontal.
The hologram 9 can be mounted horizontally on the upper surface 12 including the opening of the cap 8.

When the height of the cap 8 is set to be lower than the conventional height within a range where the hologram 9 can be bonded and fixed, if the processing accuracy and the mounting accuracy of the cap 8 are low, For example, as shown in FIG. 11, even when the upper surface 12 of the cap 8 is tilted, the hologram 9 can be horizontally adhered and fixed while slightly floating from the cap 8, so that the hologram 9 can be fixed in the Z-axis direction. Mounting accuracy can be increased.

According to the embodiment of the hologram mounting apparatus of the present invention, the abutment plates 45 and 46 are fixed to the fixed finger 35 and the movable finger 36, so that the hologram 9 can be abutted with a simple structure. The hologram 9 can be gripped with a simple configuration because only one finger is movable.

According to the embodiment of the hologram mounting apparatus of the present invention, since the V-grooves 43 and 44 having an opening angle of 90 degrees are formed in the fixed finger 35 and the movable finger 36, the structure is simple. Thus, the hologram 9 of a rectangular flat plate can be securely held.

According to one embodiment of the hologram mounting apparatus of the present invention, the pallet 5 serving as hologram floating means is provided.
9, the upper surface of the hologram 9 can be easily and horizontally abutted against the abutting portions 47 and 48 of the hologram gripping hand 22 by compressed air. There is no need to provide a device having a complicated configuration as a device for horizontal contact, and the device can be simplified.

According to one embodiment of the hologram mounting apparatus of the present invention, the hand system X stage 23 is connected to the hand system Y stage.
Since the hand system Y stage 25 is mounted on the hand system θ stage 26, the center 67 of the optical surface of the hologram 9 and the light emitting point 68 of the laser diode 2 are mounted on the hand system θ stage 26. When the hologram gripping hand 22 is rotated horizontally, the position of the origin on the XY plane does not change even if the hologram gripping hand 22 is horizontally rotated. Is not generated, the time required for positioning the hologram can be reduced, and the time required for mounting the hologram can be reduced.

According to one embodiment of the hologram mounting apparatus of the present invention,
A circular hand system θ capable of acquiring coordinate values via the imaging means 21 without being affected by angular displacement due to horizontal rotation.
Since the stage rotation center search mark 51 is provided, the hand system θ stage 26 is rotated to allow the hand system θ stage rotation center search mark 51 to take at least three positions. By obtaining the coordinate values and performing a predetermined calculation based on these coordinate values, the coordinate value of the rotation center 54 of the hand system θ stage 26 can be easily calculated.

Note that instead of providing the hand system θ stage rotation center search mark 51 on the upper surface of the hologram gripping hand 22, the same mark as the hand system θ stage rotation center search mark 51 is provided on the upper surface of the hologram 9. The hologram thus configured constitutes one embodiment of the hologram of the present invention.

Further, according to the embodiment of the hologram mounting apparatus of the present invention, the position of the light emitting point 68 of the laser diode 2 is estimated by performing image recognition of the mesa units 69 and 70. There is no need to prepare a filter, and the apparatus can be simplified.

[0095]

According to the first aspect of the present invention, the hologram can be gripped horizontally by the hologram gripping hand.
The hologram is gripped horizontally by the hologram gripping hand, moved to the hologram mounting position, and the hologram is fixed at the hologram mounting position while maintaining the horizontal state of the hologram. It can be mounted horizontally at the mounting position.

According to the second aspect of the present invention (the hologram mounting apparatus according to the second aspect), the same effect as that of the first aspect can be obtained, and the first and second fingers have the first and second fingers. Since the second butting portion is provided, the hologram can be reliably butted with a simple configuration.

According to the third aspect of the present invention, the same effect as that of the first or second aspect can be obtained, and only the second finger is movable. Therefore, the hologram can be gripped with a simple configuration.

According to the fourth aspect of the present invention (the hologram mounting apparatus according to the fourth aspect), the same effect as that of the first, second or third aspect can be obtained, and the shape of the hologram can be reduced. In the case of a rectangular flat plate, the hologram can be securely held with a simple configuration.

According to the fifth aspect of the present invention (the hologram mounting apparatus according to the fifth aspect), the same effect as that of the first, second, third or fourth aspect can be obtained, and the hologram can be obtained. Since the hologram can be easily hit horizontally against the butting portion of the gripping hand, there is no need to provide a device having a complicated configuration as a device for hitting the hologram horizontally against the butting portion of the hologram holding hand.

According to the sixth aspect of the present invention, the first, second, third and fourth hologram mounting apparatuses are provided.
Alternatively, the same effect as that of the fifth invention can be obtained, and even if the correction is performed around the rotation axis (Z axis) of the hologram, a positional shift with respect to two horizontal axes (XY axes) is prevented. Therefore, the positioning time of the hologram can be reduced, and the mounting time of the hologram can be reduced.

According to the seventh aspect of the present invention (the hologram mounting apparatus according to the seventh aspect), the same effect as that of the sixth aspect can be obtained, and the coordinates of the rotation center of the second movable stage can be obtained. The value can be easily calculated.

According to the eighth aspect of the present invention (the hologram mounting method according to claim 8), even if the rotation of the hologram is corrected around the rotation axis, the hologram is prevented from being displaced with respect to the XY axes. Therefore, the positioning time of the hologram can be reduced, and the mounting time of the hologram can be reduced.

According to the ninth aspect of the present invention (hologram mounting method according to the ninth aspect), the same effect as that of the eighth aspect can be obtained, and the coordinates of the center of rotation of the second movable stage can be obtained. The value can be easily calculated.

According to the tenth aspect of the present invention, according to the hologram of the tenth aspect, the first movable stage for horizontally moving the hologram gripping hand, and the first movable stage are mounted on the hologram gripping hand. Second to rotate horizontally
When the hologram is mounted at the hologram mounting position using the hologram mounting apparatus having the movable stage, the center of the optical surface of the hologram coincides with the rotation center of the second movable stage when positioning the hologram with respect to the hologram mounting position. In this case, the coordinate value of the rotation center of the second movable stage can be easily calculated.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view showing a main part of an embodiment of a hologram mounting apparatus according to the present invention.

FIG. 2 is a schematic perspective view of a hologram gripping hand included in an embodiment of the hologram mounting apparatus of the present invention, as viewed obliquely from below.

FIG. 3 is a schematic plan view of a hologram gripping hand included in an embodiment of the hologram mounting apparatus of the present invention, as viewed from above.

FIG. 4 is a flowchart showing a hologram mounting method (an embodiment of the hologram mounting method of the present invention) using an embodiment of the hologram mounting apparatus of the present invention.

FIG. 5 is a plan view for explaining a method of searching for the center of rotation of the hand system θ stage of the hologram moving means provided in one embodiment of the hologram mounting apparatus of the present invention.

FIG. 6 is a schematic cross-sectional view for explaining a method of holding a hologram by a hologram holding hand included in an embodiment of the hologram mounting apparatus of the present invention.

FIG. 7 is a schematic cross-sectional view for explaining a method of gripping a hologram by a hologram gripping hand provided in an embodiment of the hologram mounting apparatus of the present invention.

FIG. 8 is a schematic cross-sectional view for explaining a method of holding a hologram by a hologram holding hand included in an embodiment of the hologram mounting apparatus of the present invention.

FIG. 9 is a schematic plan view showing a hologram mounted using one embodiment of the hologram mounting apparatus of the present invention.

FIG. 10 is a schematic plan view of a laser diode constituting the hologram unit as viewed from above.

FIG. 11 is a schematic front view of a hologram unit for describing an effect of a hologram mounting method using one embodiment of the hologram mounting apparatus of the present invention.

FIG. 12 is a schematic front view showing an example of a hologram unit.

FIG. 13 is a flowchart showing a conventional hologram mounting method for a cap performed when manufacturing the hologram unit shown in FIG.

FIG. 14 is a schematic front view of a hologram unit for describing a problem of the conventional hologram mounting method shown in FIG.

[Explanation of symbols]

 (FIG. 1) 23 hand system X stage 25 hand system Y stage 26 hand system θ stage 27 hand system Z stage 28 stem holding arm 29 stem holding unit 30 stem system θ stage 31 stem system X stage 32 stem system Y stage

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Akihiko Yabuki 4-1-1 Kamikadanaka, Nakahara-ku, Kawasaki City, Kanagawa Prefecture Inside Fujitsu Limited (72) Inventor Hideo Kato 4-1-1 Kamiodanaka, Nakahara-ku, Kawasaki City, Kanagawa Prefecture No. 1 Fujitsu Limited (72) Inventor Yukihiro Abiko 4-1-1 Kamikodanaka, Nakahara-ku, Kawasaki City, Kanagawa Prefecture Fujitsu Limited

Claims (10)

[Claims] 1. A hologram mounting apparatus comprising a hologram gripping hand for horizontally moving, vertically moving, and horizontally rotating a hologram, wherein the hologram gripping hand is capable of horizontally striking an upper surface of the hologram; A hologram mounting apparatus, comprising: first and second fingers for gripping the hologram from the side while the upper surface of the hologram abuts against the abutment portion. 2. The abutting portion has a first abutting portion provided on the first finger, and a second abutting portion provided on the second finger. The hologram mounting device according to claim 1, wherein: 3. The hologram mounting apparatus according to claim 1, wherein the first finger is immovable, and the second finger is movable in a hologram gripping direction. 4. The first and second fingers have, on opposing portions, first and second V-grooves for pressing the opposing side surfaces of the first and second corners of the hologram. 4. The hologram mounting device according to claim 1, wherein: 5. A hologram mounting portion on which the hologram is mounted so that it can levitate with its upper surface facing upward, and compressed air for discharging compressed air upward from a lower portion of the hologram mounting portion to float the hologram. 5. The hologram mounting device according to claim 1, further comprising a hologram levitation means having an air discharge portion. 6. A method according to claim 1, further comprising a first movable stage for horizontally moving said hologram gripping hand, and a second movable stage for mounting said first movable stage and horizontally rotating said hologram gripping hand. The hologram mounting device according to claim 1, 2, 3, 4, or 5. 7. The hologram gripping hand has a predetermined mark on its upper surface which is not affected by an angular displacement due to horizontal rotation and can obtain a coordinate value via an imaging means. Item 7. A hologram mounting device according to Item 6. 8. A hologram mounting apparatus comprising: a first movable stage for horizontally moving a hologram gripping hand; and a second movable stage mounted with the first movable stage and horizontally rotating the hologram gripping hand. A hologram mounting method for mounting a hologram at a hologram mounting position, wherein at the time of positioning the hologram to the hologram mounting position, aligning the center of the optical surface of the hologram with the rotation center of the second movable stage. A hologram mounting method characterized in that: 9. A coordinate value of a rotation center of the second movable stage is formed on an upper surface of the hologram gripping hand or a hologram gripped by the hologram gripping hand, which moves the second movable stage. 9. The method according to claim 8, wherein the predetermined mark is set to three or more positions, coordinate values of the three or more positions are obtained, and a predetermined calculation is performed based on the coordinate values. The hologram mounting method described in the above. 10. The apparatus is not affected by angular displacement due to horizontal rotation,
A hologram having a predetermined mark on an upper surface from which a coordinate value can be obtained via an imaging unit.