JPH11162344A - Coating formation on display surface of display device, manufacture of display device, and fault inspecting device for display device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for forming a coating on a display surface of a display device while reducing a coating fault at a visible level or more in a display surface of a display device and while improving quality and yield. SOLUTION: This manufacturing method has a phosphor forming process, a coating forming process for coating a display surface as a surface of a glass panel formed with the phosphor in the phosphor forming process with a low reflecting film by using a coating forming device 62 in the predetermined coating forming condition, a fault inspecting process for optically inspecting a fault to be generated on the low reflecting film formed on the display surface of the display device in the coating forming process, and a coating forming condition control process for computing the coating forming condition 71 on the basis of the information related to a fault on the low reflecting film inspected in the fault inspecting process and for controlling the predetermined coating forming condition of the coating forming process on the basis of the computed coating forming condition.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a display device, and more particularly, to a method of forming a coating on a display surface of a display device and a method of manufacturing the display device, in order to obtain a display surface having a coating defect with a level higher than a visible level. The present invention relates to a defect inspection method for a display surface of a display device and an apparatus thereof.

[0002]

2. Description of the Related Art Inspection of coating defects on a display surface of a conventional display device has been performed visually.

[0003]

However, the above-mentioned conventional visual inspection is extremely insufficient in terms of missed inspection and inspection time. For this reason, it was impossible to suppress the occurrence of defects in the coating on the display surface of the display device.

[0004] An object of the present invention is to solve the above problems.
Provided are a method of forming a coating on a display surface of a display device and a method of manufacturing the display device, which improve the quality and improve the yield by reducing defects on the display surface of the display device that are higher than a visible level of the coating. Is to do. Further, another object of the present invention is to provide a display surface of a display device capable of inspecting with high reliability without overlooking a defect generated on a low reflection film coated on the display surface of the display device. And a defect inspection method therefor.

[0005]

In order to achieve the above object, the present invention provides a coating method in which a display surface of a display device is coated with a low-reflection film under a predetermined coating forming condition using a coating forming apparatus. Forming a defect, a defect inspection step of inspecting a defect generated on the low reflection film formed on the display surface of the display device by the coating formation step, and information on the defect on the low reflection film inspected by the defect inspection step. Calculating a coating forming condition based on the calculated coating forming condition, and controlling a predetermined coating forming condition in the coating forming process based on the calculated coating forming condition. This is a method of forming a coating on a substrate. Also,
The present invention provides a coating forming step of coating a low reflection film on a display surface of a display device under a predetermined coating forming condition using a coating forming apparatus, and forming the coating on the display surface of the display device by the coating forming step. A defect inspection step of optically inspecting a defect generated on the low-reflection film, and a coating formation condition based on information on the defect on the low-reflection film optically inspected by the defect inspection step. A coating forming condition controlling step of controlling predetermined coating forming conditions in the coating forming step based on the applied coating forming conditions.

Further, according to the present invention, there is provided a coating forming step of coating a display surface of a display device with a low reflection film by using a coating forming apparatus, and forming the coating on the display surface of the display device by the coating forming process. A defect inspection step of inspecting a defect generated on the low-reflection film and determining whether or not the low-reflection film formed by coating is defective based on the information on the inspected defect on the low-reflection film; A step of removing the low-reflection film from the display surface when the low-reflection film is determined to be defective by the inspection step, and recoating and correcting the low-reflection film on the display surface using a coating forming apparatus. A method for forming a coating on a display surface of a display device. The present invention also provides a coating forming step of coating a low reflection film on a display surface of a display device using a coating forming apparatus, and a low reflection film formed on the display surface of the display device by the coating forming step. A defect inspection step of optically inspecting the defect occurring on the surface, and determining whether the low reflection film formed by coating is defective based on information on the defect on the inspected low reflection film,
A coating correcting step of removing the low-reflection film from the display surface when the low-reflection film is determined to be defective by the defect inspection step, and recoating and correcting the low-reflection film on the display surface using a coating forming apparatus; A method for forming a coating on a display surface of a display device, comprising:

Further, according to the present invention, a phosphor matrix is formed by forming a black matrix on the back surface of a panel glass constituting a display device using a shadow mask and applying a phosphor of three colors to form a phosphor. Forming a coating by coating the display surface, which is the surface of the panel glass on which the phosphor has been formed in the phosphor forming step, with a low-reflection film using a coating forming apparatus under predetermined coating forming conditions. A defect inspection step of inspecting a defect generated on the low reflection film formed on the display surface of the display device by the coating forming step; and a defect inspection step based on the information on the defect on the low reflection film inspected by the defect inspection step. To calculate the coating forming conditions, and based on the calculated coating forming conditions, a predetermined cost in the coating forming step. Controlling the coating formation conditions (adjustment including.) Is a manufacturing method of a display apparatus characterized by comprising a coating formation condition control step of.
The present invention also provides a phosphor forming step of forming a black matrix on the back surface of a panel glass constituting a display device using a shadow mask, and applying a phosphor of three colors to form a phosphor. A coating forming step of coating the display surface, which is the surface of the panel glass on which the phosphor is formed in the phosphor forming step, with a low reflection film using a coating forming apparatus under predetermined coating forming conditions; A defect inspection step of optically inspecting a defect generated on the low reflection film formed on the display surface of the display device by the coating formation step; and a defect inspection step based on information on the defect on the low reflection film inspected by the defect inspection step. To calculate the coating forming conditions, and based on the calculated coating forming conditions, a predetermined coating in the coating forming step. Is a manufacturing method of a display apparatus characterized by comprising a coating formation condition control step of controlling the ring forming conditions (adjustment including.).

The present invention also provides a phosphor forming method in which a black matrix is formed on the back surface of a panel glass constituting a display device using a shadow mask, and three color phosphors are applied to form a phosphor. A coating step of coating a display surface, which is a surface of the panel glass, on which the phosphor has been formed in the phosphor forming step, with a low reflection film using a coating forming apparatus; and Inspect the defects generated on the low reflection film formed on the display surface of the display device by the process, and determine whether the low reflection film coated based on the inspected information on the defects on the low reflection film is defective. A low-reflection film is determined to be defective by the defect inspection step, the low-reflection film is removed from the display surface, and a coating is applied to the display surface. It is a manufacturing method of a display apparatus characterized by comprising a coating modifying step of modifying and re-coated with a low-reflection film using Ingu forming apparatus. The present invention also provides a phosphor forming step of forming a black matrix on the back surface of a panel glass constituting a display device using a shadow mask, and applying a phosphor of three colors to form a phosphor. On the display surface, which is the surface of the panel glass on which the phosphor has been formed in the phosphor forming step,
A coating forming step of coating the low-reflection film using a coating forming apparatus, and optically inspecting a defect generated on the low-reflection film formed on the display surface of the display device by the coating forming step; A defect inspection step of determining whether the coated low reflection film is defective based on the information on the defect on the formed low reflection film, and when the low reflection film is determined to be defective by the defect inspection step. Removing the low-reflection film from the display surface, and recoating and correcting the low-reflection film on the display surface by using a coating forming apparatus.

The present invention also provides a phosphor forming method in which a black matrix is formed on the back surface of a panel glass constituting a display device by using a shadow mask, and three color phosphors are applied to form a phosphor. Forming a coating by coating the display surface, which is the surface of the panel glass on which the phosphor has been formed in the phosphor forming step, with a low-reflection film using a coating forming apparatus under predetermined coating forming conditions. Irradiating the low-reflection film portion formed on the display surface of the display device by the coating forming step with illumination light having a wavelength having a desired spectral characteristic within the wavelength range of visible light; The reflected light obtained from the defective portion generated on the film is received by the photoelectric conversion means and converted into an image signal so that it can be distinguished from the reflected light from the normal low reflection film portion. A defect inspection step of inspecting a defect generated on the low reflection film based on the obtained image signal, and calculating a coating forming condition based on information on the defect on the low reflection film inspected by the defect inspection step; A coating forming condition control step of controlling (including adjusting) predetermined coating forming conditions in the coating forming step based on the calculated coating forming conditions. The present invention also provides a phosphor forming step of forming a black matrix on the back surface of a panel glass constituting a display device using a shadow mask, and applying a phosphor of three colors to form a phosphor. A coating forming step of coating a display surface, which is a surface of the panel glass on which the phosphor is formed in the phosphor forming step, with a low reflection film using a coating forming apparatus; The low-reflection film portion formed on the display surface of the device is irradiated with illumination light having a wavelength having a desired spectral characteristic within the wavelength range of visible light, and is obtained from a defect portion generated on the low-reflection film. The reflected light received by the photoelectric conversion means is converted into an image signal so that it can be distinguished from the reflected light from the normal low-reflection film portion, and generated on the low-reflection film based on the converted image signal. A defect inspection step of inspecting the defect and determining whether the coated low reflection film is defective based on the information on the defect on the inspected low reflection film; and a low reflection film by the defect inspection step. Removing the low-reflection film from the display surface when it is determined to be defective, and recoating and correcting the low-reflection film on the display surface using a coating forming apparatus. It is a manufacturing method of an apparatus.

Further, according to the present invention, a phosphor matrix is formed by forming a black matrix on the back surface of a panel glass constituting a display device by using a shadow mask and applying a phosphor of three colors to form a phosphor. Forming a coating by coating the display surface, which is the surface of the panel glass on which the phosphor has been formed in the phosphor forming step, with a low-reflection film using a coating forming apparatus under predetermined coating forming conditions. Step, irradiating the low reflection film portion formed on the display surface of the display device by the coating forming step with illumination light having a wavelength having desired spectral characteristics,
The reflected light obtained from the defective portion generated on the low-reflection film is received by the photoelectric conversion means and converted into an image signal so that it can be distinguished from the reflected light from the normal low-reflection film portion. The converted image signal A defect inspection step of calculating a feature amount of the defect based on the calculated feature amount and inspecting a defect generated on the low reflection film based on the calculated feature amount; and information on the defect on the low reflection film inspected by the defect inspection step. A coating forming condition control step of calculating (including adjusting) predetermined coating forming conditions in the coating forming step based on the calculated coating forming conditions. Of the display device. The present invention also provides a phosphor forming step of forming a black matrix on the back surface of a panel glass constituting a display device using a shadow mask, and applying a phosphor of three colors to form a phosphor. A coating forming step of coating a display surface, which is a surface of the panel glass on which the phosphor is formed in the phosphor forming step, with a low reflection film using a coating forming apparatus; The low-reflection film portion formed on the display surface of the device is irradiated with illumination light having a wavelength having a desired spectral characteristic, and reflected light obtained from a defect portion generated on the low-reflection film is returned to a normal low-reflection film. The light is received by the photoelectric conversion means and converted into an image signal so that it can be distinguished from the reflected light from the unit, and the feature amount of the defect is calculated from the converted image signal, based on the calculated feature amount. A defect inspection step of determining whether the formed low-reflection film is defective or not, and removing the low-reflection film from the display surface when the low-reflection film is determined to be defective by the defect inspection step; A coating correction step of recoating and correcting the low reflection film on the surface using a coating forming apparatus.

Further, the present invention irradiates low-reflection film portions formed on the display surface of a display device with illumination light having a wavelength having a desired spectral characteristic, and removes the defect portions generated on the low-reflection films from the defective portions. The reflected light obtained is received by a photoelectric conversion means and converted into an image signal so that it can be distinguished from the reflected light from a normal low reflection film portion, and a defect generated on the low reflection film based on the converted image signal. And a device for inspecting a display surface of a display device for defects. In addition, the present invention irradiates the low reflection film portion formed on the display surface of the display device with illumination light having a wavelength having a desired spectral characteristic, and reflects light obtained from a defect portion generated on the low reflection film. The light is received by the photoelectric conversion means and converted into an image signal so that the light can be distinguished from the light reflected from the normal low-reflection film portion, and the feature amount of the defect is calculated from the converted image signal. A method and apparatus for inspecting a display surface of a display device for inspecting a defect generated on a low reflection film based on an amount of the defect. Also,
The present invention performs an automatic inspection for coating defects on the display surface of a display device, and obtains at least one defect occurrence information of the position, area, and frequency of the defect obtained from the result. At least one coating formation condition (operating condition) of quantity, panel preheating temperature and coating speed control
The display is converted into a set value and fed back as the set value of the coating forming condition (operating condition) of the coating forming device, and the coating forming condition of the coating forming device is optimized for the purpose of reducing the number of defects generated in the coating. In the display device, it is possible to suppress the occurrence of a coating defect in which at least one physical quantity (feature amount) of the area, depth, and reflection luminance of the coating defect is equal to or more than a visible level. Is a method of forming a coating.

Further, the present invention provides a display device, wherein a coating defect in which at least one physical quantity (feature quantity) of a coating defect has a value equal to or more than a visible level occurs in a display device. A method of forming a coating on a display surface of a display device, wherein the coating of the device is removed and the coating is formed again to correct the coating. Further, the present invention irradiates the coating on the display surface of the display device with illumination light having spectral emission characteristics that emphasizes the reflected light component of the defective portion, receives the reflected light from the coating on the display surface, and converts it into an image signal. A display device comprising: a defect detection system; and a processing system for discriminating (identifying) a portion having a relatively high intensity from the stored image data obtained by the defect detection system as a defect. Is a defect inspection apparatus.

As described above, according to the above configuration,
On the display surface of the display device, it is possible to suppress the occurrence of a coating defect in which at least one physical quantity of the area, depth, and reflection luminance of the coating defect indicates a value equal to or higher than a visible level, and as a result, as a display device, The quality can be improved and the yield can be improved. Further, according to the configuration, it is possible to inspect with high reliability without overlooking a defect generated on the low reflection film coated on the display surface of the display device,
As a result, the quality of the display device can be improved, and the yield can be improved.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a display surface coating forming method, a display surface coating defect inspection method and a display device according to the present invention will be described with reference to the drawings. FIG. 1 shows a cross section of a display surface of a display device according to the present invention. On the entire surface of the panel glass 3 which is the display surface of the display device, a low-reflection film 1 is used to reduce the reflection of external light in the use environment of the display device and improve the visibility of the display display. The coating is formed with a thickness of about 1 μm to 20 μm. On the opposite side of the coating surface of the panel glass 3, a fluorescent display surface is formed by the black matrix graphite 4 and the phosphor 5. By the way, when coating the low reflection film 1 on the entire surface of the panel glass 3 which is the display surface of the display device, the coating material composition and amount are inappropriate, particulate foreign matter is mixed, the panel preheating temperature is inappropriate, and As shown in FIG. 1, various defects 2 on the low-reflection film 1 that are higher than a visible level occur due to an inappropriate coating speed or the like. The defect 2 having a level equal to or higher than the level that can be visually recognized (visually recognized) has various distributions, various sizes, and different brightness due to the attachment of the particulate foreign matter 2a.

Therefore, the present invention first provides a low reflection film 1 on the entire surface of a panel glass 3 which is a display surface of a display device.
Is inspected for defects 2 which are generated at a level higher than a visible level when coating is applied, and the inspection result is fed back to a coating forming apparatus to form coating conditions (coating material composition and amount, prevention of mixing of particulate foreign matter,
By controlling the panel preheating temperature and the coating speed), the occurrence of defects 2 above a visible level is prevented. Further, according to the present invention, first, when the low reflection film 1 is coated and applied on the entire surface of the panel glass 3 which is the display surface of the display device, the defects 2 which are generated at a visible level or higher are inspected. A defective product having a defect 2 that is higher than a visible level based on the defect is to remove the low reflection film 1 from the entire surface of the panel glass 3 and re-coat it to obtain a good product. Next, a description will be given of an inspection of a defect 2 having a visible level or higher that is generated when the low reflection film 1 is coated on the entire surface of the panel glass 3 which is the display surface of the display device according to the present invention. FIG. 2 shows the principle of a defect inspection for discriminating reflected light from a defective portion from reflected light from a normal film portion and optically detecting a defect generated on the low reflection film 1 coated on the panel glass surface. FIG. It is assumed that the illumination light having the spectral characteristic of the function A (λ) having the length λ is applied to the display surface of the display device coated with the low reflection film 1. The reflected light from each part of the display surface with respect to the illumination light A (λ) will be described below. Since the defective portion 2 has a state in which the panel glass surface is exposed or nearly exposed, the reflected light (mainly specularly reflected light) at the defective portion 2 is reflected light (mainly specularly reflected light) D ( λ) and light reflected from the fluorescent display surface (mainly specularly reflected light). On the other hand, the reflected light (mainly specularly reflected light) in the normal portion of the film is the sum of the reflected light (mainly specularly reflected light) N (λ) of the normal portion of the film and the reflected light (mainly specularly reflected light) from the fluorescent display surface. It will be. The reflected light (mainly specularly reflected light) from the fluorescent display surface is the sum of the phosphor excitation light Pe (λ) and the reflected light (mainly specularly reflected light) Pr (λ) from the phosphor. 3 is attenuated by the transmittance.

As described above, the low-reflection film 1 coated on the panel glass surface has a lower reflectance characteristic than the glass surface in order to reduce reflection of external light. The reflected light from the part becomes stronger than the reflected light from the normal part of the film, and can be discriminated.
That is, in the present invention, a defective portion is detected using this characteristic. In particular, in order to increase the discrimination ratio of the reflected light from the defective portion to the reflected light from the normal portion of the film and improve the sensitivity of defect detection, the excitation and reflection components from the phosphor screen are reduced, and the Spectral intensity characteristic A (λ) in which the reflection component is reduced
May be used as the illumination light. That is, illumination light having a spectral intensity characteristic A (λ) that maximizes the ratio of the defective component reflection component to the normal film reflection component in the sensor output may be used. The reflection component of the defective part of the molecule is shown below (number
1) It has the relationship of the formula. ∫ [D (λ) + T (λ) {Pe (λ) + Pr (λ)}] C (λ) dλ (Equation 1) The normal component reflection component of the denominator is expressed by the following equation (2). Have.

∫ [N (λ) + T ′ (λ) {Pe (λ) + Pr (λ)}] C (λ) dλ <∫ [N (λ) + T (λ) {Pe (λ) + Pr (λ) }] C (λ) dλ (Equation 2) where T (λ) is the spectral transmittance of panel glass 3 and T ′
(λ) is the spectral transmittance of the panel glass 3 and the low reflection film 1. C (λ) indicates the spectral sensitivity characteristic of the imaging system (sensor system).

Assuming that the spectral intensity of the illumination light is A (λ), the reflected light D (λ) of the defective portion has the following equation (3).
The film normal portion reflected light N (λ) has the relationship of the following (Equation 4), and the phosphor reflected light Pr (λ) has the relationship of the following (Equation 5), and the phosphor excitation component Pe (λ) ) Has the relationship of the following (Equation 6). D (λ) ≒ αA (λ) (Equation 3) N (λ) = R (λ) A (λ) (Equation 4) Pr (λ) = T (λ) A (λ) (Equation 5) Pe (λ) ) = F (A (λ)) (Equation 6) where R (λ) is the spectral reflectance of the low reflection film 1. By the way, in order to increase the ratio of the reflection component of the defective portion to the reflection component of the normal portion in the sensor output as much as possible, the excitation / reflection component (成分 T (λ) {Pe (λ) + Pr)
(λ)} C (λ) dλ) and the reflection light (分光 N (λ) C (λ) dλ) from the normal part of the film can be reduced to the illumination light having the spectral intensity characteristic A (λ). do it. ∫T (λ) {Pe
(λ) + Pr (λ)} C (λ) dλ, Pe (λ) is Pr
λT (λ)
{Pe (λ) + Pr (λ)} C (λ) dλ can be approximated by ΔT ² (λ) A (λ) C (λ) dλ from the relationship of the above equation (5). Further, ∫N (λ) C (λ) dλ can be represented by ∫R (λ) A (λ) C (λ) dλ from the relationship of the above equation (4).

From the relationship between these two conditions, the panel glass 3
Has a low spectral transmittance T (λ), and the spectral reflectance R of the low reflection film 1 is low.
It suffices to use illumination light having a spectral intensity characteristic A (λ) with a low (λ). In particular, in the range of the wavelength (λ) of visible light, the spectral transmittance T (λ) of the panel glass 3 and the spectral reflectance R (λ) of the low-reflection film 1 vary depending on the wavelength (λ). Will be. Therefore, it is sufficient to use illumination light having a spectral intensity characteristic A (λ) in which the spectral transmittance T (λ) of the panel glass 3 and the spectral reflectance R (λ) of the low reflection film 1 are both low. Among the spectral intensity characteristics A (λ), the spectral transmittance T (λ) of the panel glass 3 and the spectral reflectance R of the low reflection film 1
Decreasing both (λ) depends on the wavelength (λ) of the illumination light, that is, the spectral characteristics.

Next, an embodiment of a coating defect inspection method and apparatus according to the present invention will be described with reference to FIGS. 3, 4, and 5. FIG. FIG. 3 is a diagram showing a first embodiment of a coating defect inspection method and apparatus according to the present invention. The detection optical system 10 is arranged close to the coating surface of the inspection target 8 having the low reflection film 1 coated on the entire surface of the panel glass 3 which is the display surface 8 of the display device. The detection optical system 10 includes:
It comprises an illumination optical system 11a and an imaging optical system 21b.
The illumination optical system 11 a includes a fluorescent lamp 12, a reflector 13, a diffuser 14 for reducing illumination intensity unevenness from the fluorescent lamp 12, and a spectral intensity characteristic A (λ) for enhancing defective part reflected light components.
Illuminating light having a spectral intensity characteristic A (λ) in which the spectral transmittance T (λ) of the panel glass 3 is low and the spectral reflectance R (λ) of the low reflection film 1 is low. The inspection target 8 is configured to be illuminated with such an intensity distribution. The illumination optical system 11a uses, for example, diffusion illumination by the diffusion plate 14 so as to illuminate the inspection target 8 with a uniform intensity distribution. The diffusion plate 14 is for forming a large number of secondary point light sources on this surface.
On the back (upper surface) of the fluorescent lamp 12, a reflector 13 such as an aluminum foil is provided for improving the illumination efficiency. On the front surface (lower surface), for example, a diffusion plate 14 and a filter 15 for enhancing a defective portion reflected light component are installed in order to reduce illumination intensity unevenness. The vertical positional relationship between the diffusion plate 14 and the filter 15 may be opposite to that shown in the drawing. The spectral emission characteristic of the fluorescent lamp 12 is L (λ), and the spectral transmittance characteristic of the filter 15 is F
(λ), the spectral transmittance T (λ) of the panel glass 3 is low, and the spectral reflectance R (λ) of the low reflection film 1 is low. Spectral intensity characteristics A (λ) = L (λ) · F (λ) ) Is obtained. Thus, as the illumination optical system 11a, the spectral emission characteristics L
It is not necessary to include the fluorescent lamp 12 having (λ) and the filter 15 having spectral transmittance characteristics F (λ). The spectral transmittance T (λ) of the panel glass 3 is low, and the spectral reflection of the low reflection film 1 is low. It is sufficient that the illumination light irradiating the inspection object (display surface of the display device) 8 has a spectral intensity characteristic A (λ) with a low ratio R (λ) and a uniform intensity distribution.

Then, the imaging optical system 21a outputs the emphasized defective portion reflected light D from the coating surface of the object 8 to be inspected.
The half mirror 22a that reflects (λ) and the emphasized defective portion reflected light D (λ) reflected by the half mirror 22a
And an area sensor 24a composed of a TV camera, a CCD sensor, or the like having a low magnification (reduction system) imaging optical system for receiving an image signal and outputting an image signal. The imaging optical system 21a condenses the reflected light D (λ) from the coating surface of the inspection target 8 and focuses it on the light receiving surface of the area sensor 24a to form an NA (Numerical Ape).
rture) may be provided. When a condensing lens having a large NA is used, more reflected light from the coating surface can be collected and received by the light receiving surface of the area sensor 24a. Therefore, the illumination optical system 11
The diffused illumination light from “a” is applied to the coating surface of the inspection target 8 via the half mirror 22 a, and the reflected light from the coating surface is turned by 90 degrees by the half mirror 22 a to change the direction of the area sensor of the imaging optical system 21. 24a. Let the spectral sensitivity characteristic of the area sensor 24a be C (λ).

The driving of the fluorescent lamp 12 in the illumination optical system 11a is performed by a driving signal 16 supplied from a high-frequency driving circuit 17.
by. The area sensor 24a uses high-frequency driving.
The purpose of the present invention is to prevent the brightness of the inspection image picked up by the above from fluctuating due to the image pickup timing. For example, the driving cycle of the fluorescent lamp 12 in the illumination optical system 11a is set to about 1/10 or less of the exposure time of the area sensor 24a. The image signal 25 from the area sensor 24a is
Is input to The image processing device 26 incorporating a detection algorithm described later, as shown in FIGS.
Based on the image signal 25 in which the reflected light (mainly specularly reflected light) D (λ) from the panel glass 3 by the defective portion 2 obtained from the area sensor 24a is emphasized, that is, based on the property that the reflected light from the defective portion is strong, Perform defect detection. That is, FIG.
(B) and FIG. 16 (b) show the defect 2 generated on the low reflection film 1 as shown in FIG. 15 (a) and FIG. 16 (a) (in the case of FIG. 2A shows a defect 2 to which an attached area 2a is attached), and shows a waveform of a digital image signal 25 converted by receiving the reflected light obtained from the low reflection film 1 by the area sensor 24a. In the case of the defect 2 to which the particulate foreign matter 2a is attached, a large change occurs in the outline of the defective portion in the image signal 25. For example, it is possible to extract the outline of the defective portion by differentiating the image signal 25. This makes it possible to perform defect detection.

In the first embodiment shown in FIG. 3, since the entire coating surface cannot be inspected at once,
Is moved relative to the detection optical system 10 in the illustrated direction by a movement control mechanism (not shown) such as a stage, and divided and inspected as shown in FIG. When the coating surface is not flat, the detection optical system 1
The entire optical system 10 is finely rotated by an attitude control mechanism (not shown) in accordance with the normal direction of the coating surface to control the attitude. By moving, the relative position / posture of the detection optical system 10 with respect to the coating surface for each divided inspection position is kept within a certain range.

FIG. 4 is a view showing a second embodiment of the coating defect inspection method and apparatus according to the present invention.
The second embodiment differs from the first embodiment shown in FIG. 3 in the illumination optical system 11b. The illumination optical system 11b has a spectral emission characteristic L emitted from the light source 31.
The light having '(λ) passes through the filter 15 having the spectral transmittance characteristic F (λ) and the spectral transmittance T (λ) of the panel glass 3.
Is low, the spectral reflectance R (λ) of the low-reflection film 1 is low, and the spectral reflectance R (λ) is converted into illumination light having a spectral intensity characteristic A (λ) = L ′ (λ) · F (λ). It is configured to be supplied to a light guide plate 34 made of acrylic or the like via the light guide plate 34. The spectral emission characteristic of the light source 31 is L ′ (λ),
Is assumed to be F (λ), the light guide plate 34
As a result, the spectral intensity characteristic A (λ) of the panel glass 3 having a low spectral transmittance T (λ) and the low reflection film 1 having a low spectral reflectance R (λ) can be obtained. Further, a diffusion plate 8 is provided on the front surface (lower surface) of the light guide plate 19, and a diffusion illumination system is formed as the illumination optical system 11b as in the first embodiment shown in FIG. The filter 15 is not provided in front of the light source 31 but in FIG.
The filter 15 may be arranged on the front or back of the light guide plate 34 as in the first embodiment shown in FIG. Also in the second embodiment shown in FIG. 4, since the entire coating surface cannot be inspected at once as in FIG. 3, the object 8 to be inspected is moved by a movement control mechanism (not shown) such as a stage.
It is moved relative to 0 in the direction shown in the figure to perform a division inspection as shown in FIG. When the coating surface is not flat or when the coating surface is not flat, the entire detection optical system 10 is finely rotated around the detection system rotation axis 23 by a posture control mechanism (not shown) in the normal direction of the coating surface. The position of the detection optical system 10 is moved up and down by an up / down control mechanism (not shown) in the direction shown in the drawing, thereby controlling the relative position and position of the detection optical system 10 with respect to the coating surface for each divided inspection position. Keep your posture within a certain range.

FIG. 5 is a view showing a third embodiment of the coating defect inspection method and apparatus according to the present invention.
The third embodiment differs from the first embodiment shown in FIG. 3 in the illumination optical system 11c and the imaging optical system 21b. The illumination optical system 11c includes a slit light source 36, a filter 15 having a spectral intensity characteristic A (λ) for enhancing the reflected light component of the defective portion, and a mirror 35, and the spectral transmittance T (λ) of the panel glass 3. And the slit illumination light having the spectral intensity characteristic A (λ) having a low spectral reflectance R (λ) of the low-reflection film 1 is illuminated to the inspection object 8 with a uniform intensity distribution. You. That is, slit illumination light is supplied from the slit light source 36 to the mirror 35 through the filter 15. The mirror 35 reflects the supplied slit illumination light and irradiates the coating surface through the half mirror 22b. Spectral emission characteristics of the slit light source 36 are represented by L “(λ),
Let the spectral transmittance characteristic of the filter 15 be F (λ). The imaging optical system 21b includes a line sensor 2 having a spectral sensitivity characteristic C (λ).
4b is used. The illumination optical system 11c, the imaging optical system 21b, and the half mirror 22b are arranged so that the imaging field of view of the line sensor 24b coincides with the portion irradiated with the slit illumination light.
Set the mutual positional relationship between.

In the third embodiment shown in FIG.
Since the entire coating surface cannot be inspected at once as in the first embodiment shown in FIG. 1, the inspection object 8 is moved relative to the detection optical system 10 by a movement control mechanism (not shown) such as a stage. The inspection is carried out in the direction shown in FIG. When the coating surface is not flat or when the coating surface is not flat, the entire detection optical system 10 is finely rotated around the detection system rotation axis 23 by a posture control mechanism (not shown) in the normal direction of the coating surface. The position of the detection optical system 10 is moved up and down by an up / down control mechanism (not shown) in the direction shown in the drawing, thereby controlling the relative position and position of the detection optical system 10 with respect to the coating surface for each divided inspection position. Keep your posture within a certain range.

FIG. 6 shows a low reflection film 1 coated on the entire surface of a panel glass 3 which is a display surface of a display device.
FIG. 13 is a diagram showing a fourth embodiment in which the entire surface of the inspection target 8 having the above is inspected collectively. FIG. 6A is a front view showing the display surface 8 of the display device in the fourth embodiment, and FIG. 6B is a side view of FIG. 6A. In the case of the fourth embodiment, the illumination optical system 11 constituting the detection optical system 10
, The panel glass 3 has a low spectral transmittance T (λ),
Spectral intensity characteristic A where the spectral reflectance R (λ) of the low reflection film 1 is low.
It is necessary to illuminate the entire surface of the inspection object 8 having the low reflection film 1 with the illumination light having (λ) at a time, and further, in the imaging optical system 21 constituting the detection optical system 10, the low reflection film 1 It is necessary to condense the defective part reflected light D (λ) from the entire surface of the inspection object 8 having the above-mentioned condition by a condenser lens (not shown) and form an image on the light receiving surface of the area sensor 24.

In FIG. 6, since the inspection area 41 is the entire display surface 8 of the display device, the detection optical system 1
0, it is not necessary to move the object 8 to be inspected, but when the coating surface is not flat, the brightness of the illumination optical system 11 is increased and the depth of focus of the illumination optical system 11 is adjusted in order to focus the imaging optical system 21 over the entire area to be inspected 41. It is necessary to narrow down the imaging optical system 21 so as to obtain an in-focus state by making it deeper. FIG. 7 is a view showing a fifth embodiment in which the entire surface of the inspection object 8 having the low reflection film 1 coated on the entire surface of the panel glass 3 which is the display surface of the display device is divided and inspected. FIG.
FIG. 7A is a front view showing a display surface 8 of a display device in the fifth embodiment, and FIG. 7B is a side view of FIG. 7A. In the fifth embodiment, since the inspection area 42 is a part of the display surface of the display device,
As described in the first to third embodiments shown in FIGS. 3 to 5, the detection optical system 10 and the inspection target 8 need to be appropriately moved. The moving method of the inspection object 8 and the imaging timing of the imaging optical system 21 include a method of imaging while moving at a constant speed, an acceleration method,
There is a method of imaging after deceleration and stop. In the former case, it is necessary to appropriately control the exposure time by an electronic shutter or the like in the area sensor 24a to prevent the captured image from being blurred. In the case of the line sensor 24b, it is necessary to determine the moving speed of the inspection target 8 according to the imaging magnification of the sensor optical system and the scan rate of the sensor so that the entire display surface of the display device can be imaged without omission.

FIG. 8 is a schematic configuration diagram showing an embodiment of the image processing apparatus according to the present invention. The image processing device 26
The inspection object / detection optical system moving mechanism 45 and the sensor 24 are connected. Then, the image processing device 26 reads out the digital image data stored in the sensor input interface unit 51, the image storage unit 52, the image cutout / display unit 53, and the image storage unit 52 and performs a defect detection process. A defect detection processing unit 55 composed of a CPU or the like that outputs the result to the image cutout / display unit 53 or outputs the result to another device, and a control unit that controls the moving mechanism 45 of the inspection object / detection optical system. 54. The image signal 25 captured by the sensor 24 is converted into a digital image signal and stored in the image storage unit 52 via the sensor input interface unit 51. The image cutout / display unit 53 includes the image storage unit 3
This is to cut out and display an image of the inspection surface at an arbitrary position and size from 1 and to enable a visual review of the inspection image. The defect detection processing unit 55 cuts out the inspection surface image at an arbitrary position and size from the image storage unit 31 and detects a defect based on a detection algorithm described later. The defect detection processing unit 55 can also output the detection result of the defect to the image cutout / display unit 53 and display it superimposed on the image signal 25 captured by the sensor 24. The defect detection processing unit 29 includes a moving mechanism 4 for the inspection object / detection optical system.
5 is controlled by the control unit 54 to control the movement of the moving mechanism 45 of the inspection object / detection optical system in accordance with the sensor input timing.

FIG. 9 is a diagram showing a first embodiment of a defect detection algorithm executed in the defect inspection processing unit 55. The defect inspection processing unit 55 sets a detection window 57 of M lines × N pixels to the extent that the illuminance unevenness of the illumination optical system 11 does not affect the sensor input image 25 sequentially input and stored in the image storage unit 31. Set and cut out. Then, the defect detection processing unit 55 calculates an average gray value (average brightness value) for the gray value (brightness value) f (i, j) in the detection window 57 based on the following equation (7). Is calculated to calculate a threshold value t. A portion where the gray level value (brightness value) f (i, j) in the detection window 57 is larger than the calculated threshold value t or greater than or equal to the threshold value t is determined as the defective portion reflected light. It is extracted as a grayscale image signal (brightness image signal) indicating a defective portion obtained from the component, and it is determined that the defective portion 2 exists in the detection window 57 on the coated low reflection film 1. That is, the threshold value t is a reference value for extracting only various defects 2 that are visible on the low-reflection film 1 coated on the entire surface of the panel glass 3 which is the display surface of the display device and are equal to or higher than a visible level. . The defect detection processing unit 55 changes the position of the detection window 57 so as to cover the entire sensor input image 25 while appropriately overlapping, thereby indicating defective portions at all positions of the sensor input image 25. Detection (extraction) of a grayscale image signal can be executed. Threshold value t = (1 / MN)） _{j = j0−j0 + M−1 i = i0−i0 + N−1} f (i, j) ( _Equation 7) where M × N ≧ 2.

FIG. 10 is a diagram showing a second embodiment of the defect detection algorithm executed by the defect inspection processing unit 55. The defect inspection processing unit 55 determines whether the current inspection target sensor input image 25 stored in the image storage unit 52 and the previous inspection target sensor input image 25 ′ stored in the image storage unit 52 have the same inspection position. A window of M lines × N pixels (M × N ≧ 1) is set and cut out.
For the past sensor input image 25 'to be inspected, a past average gray value may be used. Then, the defect inspection processing unit 55 outputs the current sensor input image 2 to be inspected.
5 and M in the sensor input image 25 'of the past inspection target
The average density values (average brightness values) fn and fp in the windows 58 and 58 'of line × N pixels are calculated, and the absolute value of the calculated fn-fp is calculated. If fn-fp | is greater than a predetermined threshold value td1 or greater than or equal to this threshold value td1, it is determined that the defect 2 exists in the window 58 of M lines × N pixels on the coated low reflection film 1. Thus, M in the past sensor input image 25 ′ to be inspected is
A reference value for determining that various defects 2 whose level is equal to or higher than a visible level in the window 58 on the low reflection film 1 has an average density value (average brightness value) fp in the window 58 ′ of line × N pixels. Become. However, in the case of the second embodiment, the sensor input image 2 of the past inspection target
5 ′ is stored in the image storage unit 52, or the calculated M in the sensor input image 25 ′ to be inspected in the past.
It is necessary to store the average grayscale value (average brightness value) fp in the window 58 ′ of line × N pixels in the image storage unit 52 or a storage device (not shown). As described above, the defect inspection processing unit 55 determines the existence of the defect 2 in the window 58 on the low-reflection film 1 while suppressing the influence of the uneven illuminance of the illumination optical system 11 by using the comparison between the present time and the past. Can be. If the average of the past is limited to the past of a certain time from the present, the illumination optical system 11
Of the window 2 on the low-reflection film 1 can also be determined. The defect inspection processing unit 55 uses the window determined as having a defect as the detection window 59 shown in FIG. 9 to detect a grayscale image signal indicating a defective portion by the same processing method as in the first embodiment shown in FIG. Extraction).

FIG. 11 is a diagram showing a third embodiment of the defect detection algorithm executed by the defect inspection processing unit 55. The defect inspection processing unit 55 applies M lines × N pixels (where M × N ≧ 5) to the sensor input image 25 stored in the image storage unit 52 so that there is no influence of uneven illuminance of the illumination system.
The differential window 59 of 2) is set and cut out. And
The defect inspection processing unit 55 executes a differential operation for emphasizing the outline of a portion having a gray value (brightness value) larger than the surroundings inside the differential window 59, and the differential value is set to a predetermined threshold value td2. If it is larger than or equal to or larger than the threshold value td2, the contour indicating the defect 2 is extracted in the differential window 59 on the low reflection film 1, and it can be determined that the defect 2 exists. That is, the threshold value td2 for the differential value of the light and shade is different from the level of various defects
Is a reference value for judging that exists. Defect inspection processing unit 5
5, a detection window 59 shown in FIG. 9 is used as a differential window determined to have a defect to detect (extract) a grayscale image signal indicating a defective portion by the same processing method as in the first embodiment shown in FIG. Do.

FIG. 12 is a flowchart showing a first embodiment of the defect inspection algorithm executed by the defect inspection processing unit 55. The defect inspection processing unit 55 determines in step S
At 121, a grayscale image signal indicating a defective portion obtained from the sensor input image 25 by a defective portion reflection component is extracted from the sensor input image 25 based on the defective portion detection algorithm shown in FIGS. . Next, in step S122, the defect inspection processing unit 55 calculates the feature amount (for example, position, area, average gray value, maximum gray value) of the defective part 2 from the gray image signal indicating the extracted defective part. Next, in step S123, the defect inspection processing unit 55 determines whether or not the defect part 2 is acceptable based on the calculated feature amount [physical quantity (for example, position, area, average gray value, maximum gray value)] of the defective part 2. The result of the pass / fail judgment is stored in the memory 55a in the processing unit in correspondence with the serial number of the display device.
Alternatively, the information is stored in a storage device 60 connected to the processing unit, and further output to the display unit 53, recorded on a recording medium as the output unit 56 and output, or another device via a network as the output unit 56. Alternatively, it can be output to another system. The physical quantity, which is the feature quantity to be calculated, is
On the display surface of the display device, it is sufficient that various defects 2 at or above a visible level can be judged as defective (defective), and the position, area, average gray value,
It is not limited to the maximum gray value. In the case of the fourth embodiment in which the entire surface of the inspection target 8 shown in FIG. 6 is inspected collectively, the position information of the defective portion 2 is calculated from the coordinates of the pixels that are received and sampled by the area sensor 24. In the case of the fifth embodiment shown in FIG. 7 in which the entire surface of the inspection object 8 is divided and inspected, the area sensor or the linear sensor 24 detects the coordinates of the pixels received and sampled from the moving mechanism 45. It is possible to calculate based on the relative movement amount of the inspection target 8 with respect to the detection optical system 10 to be performed. The area of the defective portion 2 can be calculated by counting the number of pixels in a region indicating one defective portion. The average gray value (average brightness value) of the defective portion 2 is obtained by counting the gray value of each pixel in an area indicating one defective portion,
It can be calculated by dividing by the number of pixels corresponding to the area. The maximum density value (maximum brightness value) of the defective portion 2 can be calculated as a value indicating the maximum brightness in the region indicating one defective portion (maximum density value). The calculated area of the defective portion 2 and the calculated defective portion 2
In order to temporarily store the average grayscale value (average brightness value) and the maximum grayscale value (maximum brightness value) of the defective portion 2,
It can also be stored in the memory 55a.

FIG. 13 shows a defect inspection processing unit 5 according to the present invention.
FIG. 9 is a diagram illustrating an example of a relationship regarding consistency between a defect inspection and a visual inspection performed in 5. This figure shows a critical curved surface 131 visually rejected by visual inspection, a defect area, an average density value (average brightness value), and a maximum density value (maximum brightness value) in the defect inspection executed by the defect inspection processing unit 55. It is a three-dimensional diagram showing a relationship between two feature quantities, ie, physical quantities. The inside of the visually rejected critical curved surface 131 is a region indicating a non-visible non-defective defect generated on the low-reflection film 1, and the outside of the visually rejected critical curved surface 131 is a visible level generated on the low-reflective film 1. This is an area showing the above defects. Therefore, the defect inspection processing unit 55
The information relating to the critical curved surface 131 is visually input / output using input means (comprising a recording medium, a keyboard, or the like) 57 and stored in the memory 55a in the processing unit or the storage device 60 connected to the processing unit. Keep it. Accordingly, in step S123, the defect inspection processing unit 55 reads the information regarding the visual matching / non-critical surface 131 stored in the memory 55a in the processing unit or the storage device connected to the processing unit, and reads the read visual / non-critical surface. 131
A pass / fail decision is made on the defect based on the relationship between the information about the defect and the physical quantity which is the three feature amounts of the calculated defect area, average gray level (average brightness value), and maximum gray level (maximum brightness value). The pass / fail judgment result is stored in the memory 55a in the processing unit or the storage device 60 connected to the processing unit in association with the serial number of the display device, and is further output to the display unit 53 or stored in a recording medium as the output unit 56. The data is recorded and output, or output to another device or another system via a network which is the output unit 56.

In the embodiment shown in FIG. 13, the physical quantity which is the three characteristic quantities of the defect area, the average density value (average brightness value) and the maximum density value (maximum brightness value) is targeted.
Other combinations may be physical quantities that are more or less than three feature quantities. For a large number of various defects (different distributions, various sizes, attachment of particulate foreign matter, etc.), the relationship between the pass / fail of the visual judgment and the physical quantity as the characteristic quantity is determined, and the physical quantity as the characteristic quantity is determined with the coordinate axes. In the characteristic amount (physical amount) space to be defined, the visual conformity critical surface 131 is defined. The pass / fail of the defective portion based on the characteristic amount (physical amount) is determined based on the visual matching critical surface 131. In the above, the embodiment in which the defect generated on the low-reflection film 1 is optically inspected has been described. However, the defect is obtained by irradiating the low-reflection film 1 with an electron beam and irradiating the electron beam. By detecting an image based on secondary electrons, the low reflection film 1
It is possible to inspect the defects generated above.

Next, a method of manufacturing a display for suppressing the occurrence of coating defects based on the pass / fail information of the defective portion 2 generated on the low reflection film 1 determined by the image processing device 26 of the defect detection device according to the present invention, and An embodiment of the system will be described with reference to FIG. FIG.
1 is a schematic configuration diagram showing one embodiment of a display manufacturing system for suppressing occurrence of coating defects according to the present invention. That is, visual recognition (visual recognition) generated on the low reflection film 1 coated on the display surface of the display device.
It is an object of the present invention to suppress defects higher than a possible level, to ensure high quality, and to improve the yield. Panel glass 3
A black matrix 4 is formed using a shadow mask on the back surface of the substrate, and phosphors 5 of three colors are applied. A display device with an uncoated display surface (uncoated product) with a shadow mask attached to this panel glass, a funnel welded, an electron gun attached and sealed
61 is obtained. A coating forming device 62 is provided on the entire surface of the panel glass 3 which is a display surface of the uncoated product 61.
Thus, the low-reflection film 1 is formed by coating, and a coated product 63 is obtained. Finished coating product 63
It is conveyed to the coating defect inspection device 64 according to the present invention, and the device 64 inspects whether or not the defect portion 2 on the low reflection film 1 is higher than the visual recognition level. Is stored in the memory 55a in the processing unit or the storage device 60 connected to the processing unit in correspondence with the serial number of the display device.
3, output to a recording medium as output means 56, and output, or output to another device or another system via a network as output means 56.

Then, the coating defect inspection device 64 sorts out the non-defective coating product 65 and the defective coating product 66 based on the inspection result corresponding to the serial number of the display device. The non-defective coated article 65 is transported to the image quality adjustment step in which the deflection yoke is mounted and the image quality is adjusted in the next step, and the display device is manufactured. The defective coating product 66 is supplied to the coating peeling device 67, and the low reflection film 1 having the defective portion 2 is peeled and removed by chemical processing and mechanical processing to form an uncoated product 61. This uncoated product 61 is fed into the coating forming device 62 again,
The low-reflection film 1 is formed on the entire surface of the panel glass 3 as a display surface by coating, so that a coated finished product 63 having no defect 2 is obtained.

Also, the coating defect inspection device 64
Defects output in correspondence with the product number of the display device based on inspection results including physical quantities (defect position (including distribution), area, average density value, maximum density value, etc.) which are characteristic quantities of the defect The defect information 56 such as the type and position (including the distribution) is notified to the forming condition control device 68 of the coating forming device 62 via a recording medium or a network. The forming condition control device 68 calculates (determines) a coating forming condition 71 of the coating forming device 62 for reducing coating defects by analyzing the defect information 56. The forming condition control device 68 controls the coating forming device 62 based on the calculated coating forming condition 71, for example, at least one of the composition and / or amount of the coating material, the panel preheating temperature, the coating speed, and the cleaning. The low-reflection film 1 is coated so that the coating forming device 62 does not cause a defect of a level higher than a visible level on the display surface of the display device. The formation condition control device 68 outputs a defect quantity output based on an inspection result including a physical quantity (defect position (including distribution), area, average density value, maximum density value, etc.) which is a feature quantity of the defect. Defect information 56 such as type and position (including distribution), composition and / or amount 71 of coating material to be controlled, panel preheating temperature 7
A table showing the correspondence between the coating conditions such as 2, coating speed 73, and cleaning 74 is created and stored in the storage device 68a.

That is, the forming condition control device 68 stores the forming conditions (composition and / or amount of coating material, panel preheating temperature, coating speed, cleaning, etc.) 72 coated from the coating forming device 62 on the display device. The input is made directly or by using input means (keyboard, recording medium, etc.) 69 corresponding to the product number. As for the cleaning, the coating forming device 62 is subjected to cleaning or the like so as to prevent particulate foreign matter from entering during coating. This information is input to the forming condition control device 68 using the input means 69. You.

Further, the forming condition control device 68 includes physical quantities (defect position (including distribution), area, average density value, maximum density value, etc.) which are feature quantities of defects from the coating defect inspection device 64. Information 56 such as the type and position (including distribution) of a defect output based on the inspection result obtained
Is input by a network or input means (keyboard, recording medium, etc.) 69 in association with the product number of the display device. Accordingly, the formation condition control device 68 includes the defect information 56 such as the type and position (including distribution) of the defect output from the coating defect inspection device 64 based on the inspection result including the physical quantity of the defect, and the coating forming device 62. By obtaining the correspondence with the coating forming conditions 72 obtained from the above, it is possible to create a table indicating the correspondence between the defect information 56 and the coating forming conditions 72 and store it in the storage device 68a. Thereby, the low reflection film 1 coated on the display surface of the display device 1
When a defect having a level higher than the visually recognizable level occurs, the defect information 56 is fed back to the forming condition control device 68, and the forming condition control device 68 calculates the coating forming condition 71 for suppressing the occurrence of the defect. Thus, it is possible to control the coating forming conditions in the coating forming apparatus 62. For example, when a defect higher than a visible level occurs on the low reflection film 1 due to the attachment of particulate foreign matter, the coating forming apparatus 6
It is necessary to suppress the generation of particulate foreign matter by performing washing or the like as a control of the coating forming conditions for 2.
In this case, the forming condition control device 68 displays on the display means 70 alarm information indicating that the defect information 56 indicating that particulate foreign matter has adhered or control information of the coating molding condition indicating that cleaning or the like needs to be performed. By notifying the operator of the coating forming apparatus 62, the operator can manually perform cleaning and the like to suppress the occurrence of defects on the low-reflection film 1 that are above a visible level. . Also, the composition and / or amount of the coating material can be manually controlled by an operator.

The conditions for forming the coating forming apparatus 62 include the composition / amount of the coating material, the panel preheating temperature, the coating speed, the cleaning, and the conditions for coating the low reflection film 1 on the display surface. Further, in the above embodiment, the case where the forming condition control device 68 and the coating forming device 62 are configured separately has been described. However, the forming condition control device 68 may be provided in the coating forming device 62. it is obvious.
As described above, according to the method for inspecting coating defects of a display device according to the present invention and the device and the manufacturing method using the same, at least one physical quantity of the area / depth / reflection luminance of the coating defect is visually recognized in the display device. It is possible to suppress a coating defect having a value higher than a possible level, for example, a diameter of 0.3 mm or more.

[0042]

According to the present invention, a coating defect on a display surface of a display device is automatically inspected, operating conditions of a coating forming process are optimized according to a defect occurrence situation, and a coating defect is determined for a defective coating product. By removing and removing the coating and forming the coating again, it is possible to reduce the occurrence of visible coating defects, and as a result, it is possible to stably manufacture a high-quality display device.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a display surface of a display device according to the present invention.

FIG. 2 is a diagram showing the principle of a coating defect inspection according to the present invention.

FIG. 3 is a view showing a first embodiment of a coating defect inspection method and apparatus according to the present invention.

FIG. 4 is a view showing a coating defect inspection method and apparatus according to a second embodiment of the present invention.

FIG. 5 is a view showing a third embodiment of the coating defect inspection method and apparatus according to the present invention.

FIG. 6 is a view showing a fourth embodiment in which the entire display surface of the display device according to the present invention is inspected collectively.

FIG. 7 is a view showing a fifth embodiment in which the entire display surface of the display device according to the present invention is divided and inspected.

FIG. 8 is a schematic configuration diagram illustrating an embodiment of an image processing unit according to the present invention.

FIG. 9 is a diagram showing a first embodiment of a defect detection algorithm executed in the defect inspection processing unit according to the present invention.

FIG. 10 is a diagram showing a second embodiment of the defect detection algorithm executed in the defect inspection processing unit according to the present invention.

FIG. 11 is a diagram showing a third embodiment of the defect detection algorithm executed in the defect inspection processing unit according to the present invention.

FIG. 12 is a flowchart illustrating a first example of a defect inspection algorithm executed in the defect inspection processing unit according to the present invention.

FIG. 13 is a diagram illustrating an example of a relationship between consistency of a defect inspection and a visual inspection performed in a defect inspection processing unit according to the present invention.

FIG. 14 is a schematic configuration diagram showing one embodiment of a manufacturing system for realizing a display manufacturing method for suppressing occurrence of coating defects according to the present invention.

FIG. 15 is a diagram showing a concave defect generated on the display surface of the display device according to the present invention and a waveform of an image signal obtained from the concave defect.

FIG. 16 is a diagram showing a defect caused by adhesion of particulate foreign matter generated on the display surface of the display device according to the present invention, and a waveform of an image signal obtained from the defect.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Low reflection film, 2 ... Defect (defect part), 3 ... Panel glass, 4 ... Black matrix graphite, 5 ... Phosphor, 8 ... Display surface (inspection object), 10 ... Detection optical system, 11, 11
a, 11b, 11c: illumination optical system, 12: fluorescent lamp, 13
... Reflection plate, 14 diffusion plate, 15 filter, 17 high-frequency drive circuit, 21, 21a, 21b imaging optical system, 22
a: half mirror, 24: sensor (area sensor), 2
4a: Area sensor, 24b: Line sensor, 25, 2
5 ': Image signal (sensor input image), 26: Image processing device, 31: Light source, 33: Image guide, 34: Light guide plate, 35: Mirror, 41, 42 ... Inspection area, 45: Moving mechanism, 51 ... Sensor input interface unit, 52 ...
Image storage unit, 53: Image cutout / display unit, 54: Control unit, 55: Defect inspection processing unit, 55a: Memory, 56: Output means (defect information), 57: Detection window, 58, 5
8 ': window, 59: differential window, 60: storage device, 61: uncoated product, 62: coating forming device, 64: coating defect inspection device, 65: good coating product, 66: defective coating product, 68: formation condition control Device, 68a storage device, 69 input means, 7
0: display means, 71: coating forming conditions, 131:
Critical surface for visual pass / fail

Continued on the front page (72) Inventor Eiichi Nishiyama 3300 Hayano, Mobara-shi, Chiba Pref.Electronic Device Division, Hitachi, Ltd. (72) Inventor Nobuyuki Koganezawa 3300 Hayano, Mobara-shi, Chiba Pref. Within the business division

Claims (14)

[Claims] 1. A coating forming step of coating a display surface of a display device with a low reflection film under a predetermined coating forming condition using a coating forming apparatus, and forming the coating on the display surface of the display device by the coating forming process. A defect inspection step of inspecting a defect generated on the low-reflection film, and calculating a coating forming condition based on information on the defect on the low-reflection film inspected by the defect inspection step;
A coating forming condition control step of controlling predetermined coating forming conditions in the coating forming step based on the calculated coating forming conditions. 2. A coating forming step of coating a low reflection film on a display surface of the display device under a predetermined coating forming condition using a coating forming apparatus, and forming the coating on the display surface of the display device by the coating forming step. A defect inspection step of optically inspecting a defect generated on the low-reflection film, and calculating a coating forming condition based on information on the defect on the low-reflection film optically inspected by the defect inspection step; A coating forming condition control step of controlling predetermined coating forming conditions in the coating forming step based on the calculated coating forming conditions. 3. A coating forming step of coating a display surface of the display device with a low-reflection film using a coating forming apparatus, and forming the coating on the display surface of the display device by the coating forming step. A defect inspection step of inspecting a defect generated in the low reflection film, and determining whether or not the low reflection film coated is defective based on the information on the defect on the inspected low reflection film. Removing the low-reflection film from the display surface when the reflection film is determined to be defective, and re-coating the display surface with the low-reflection film using a coating forming apparatus to correct the low-reflection film. For forming a coating on the display surface of a display device. 4. A coating forming step of coating a display surface of a display device with a low-reflection film using a coating forming apparatus; and forming a coating on the display surface of the display device by the coating forming process. A defect inspection step of optically inspecting for defects occurring in the defect, and determining whether or not the coated low-reflection film is defective based on the information on the inspected defects on the low-reflection film; A step of removing the low-reflection film from the display surface when the low-reflection film is determined to be defective by the process, and recoating and correcting the low-reflection film on the display surface using a coating forming apparatus. A method for forming a coating on a display surface of a display device, comprising: 5. A phosphor forming step of forming a black matrix on a back surface of a panel glass constituting a display device by using a shadow mask and applying a phosphor of three colors to form a phosphor; A coating forming step of coating the display surface, which is the surface of the panel glass on which the phosphor has been formed in the phosphor forming step, with a low reflection film using a coating forming apparatus under predetermined coating forming conditions; A defect inspection step of inspecting a defect generated on the low reflection film formed on the display surface of the display device by the coating formation step; and coating formation conditions based on the information on the defect on the low reflection film inspected by the defect inspection step. Is calculated,
Controlling the predetermined coating forming conditions in the coating forming step based on the calculated coating forming conditions. 6. A phosphor forming step of forming a black matrix on a back surface of a panel glass constituting a display device using a shadow mask and applying a phosphor of three colors to form a phosphor. A coating forming step of coating the display surface, which is the surface of the panel glass on which the phosphor has been formed in the phosphor forming step, with a low reflection film using a coating forming apparatus under predetermined coating forming conditions; A defect inspection step of optically inspecting a defect generated on the low-reflection film formed on the display surface of the display device by the coating formation step; and a defect inspection step based on information on the defect on the low-reflection film inspected by the defect inspection step. Calculate the coating formation conditions,
Controlling the predetermined coating forming conditions in the coating forming step based on the calculated coating forming conditions. 7. A phosphor forming step of forming a black matrix on a back surface of a panel glass constituting a display device using a shadow mask and applying a phosphor of three colors to form a phosphor; A coating forming step of coating a display surface, which is a surface of the panel glass, on which the phosphor is formed in the phosphor forming step, with a low reflection film using a coating forming apparatus; Inspect the defects generated on the low-reflection film formed on the display surface, and determine whether or not the coated low-reflection film is defective based on the information on the inspected defects on the low-reflection film. A defect inspection step; removing the low reflection film from the display surface when the low reflection film is determined to be defective by the defect inspection step; Method of manufacturing a display device characterized by having a coating modifying step of modifying and re-coated with a low-reflection film using a. 8. A phosphor forming step of forming a black matrix on a back surface of a panel glass constituting a display device using a shadow mask and applying a phosphor of three colors to form a phosphor; A coating forming step of coating a display surface, which is a surface of the panel glass, on which the phosphor is formed in the phosphor forming step, with a low reflection film using a coating forming apparatus; Optically inspects for defects that occur on the low-reflection film formed on the display surface of the display surface, and determines whether or not the low-reflection film formed based on the inspected information on the defect on the low-reflection film is defective. A low-reflection film is determined to be defective by the defect inspection step, the low-reflection film is removed from the display surface, and a coating is applied to the display surface. Method of manufacturing a display device characterized by having a coating modifying step of modifying and re-coated with a low-reflection film using a forming device. 9. A phosphor forming step of forming a black matrix on a back surface of a panel glass constituting a display device using a shadow mask and applying a phosphor of three colors to form a phosphor; A coating forming step of coating the display surface, which is the surface of the panel glass on which the phosphor has been formed in the phosphor forming step, with a low reflection film using a coating forming apparatus under predetermined coating forming conditions; The low reflection film portion formed on the display surface of the display device by the coating forming step is irradiated with illumination light having a wavelength having a desired spectral characteristic within the wavelength range of visible light, and is generated on the low reflection film. The reflected light obtained from the defective portion is received by a photoelectric conversion means and converted into an image signal so that it can be distinguished from the reflected light from a normal low reflection film portion, and the converted image signal A defect inspection step for inspecting a defect occurring on the low-reflection film based to calculate the coating formation condition based on the information about the defects on the low-reflection film was examined by the defect inspection process,
Controlling the predetermined coating forming conditions in the coating forming step based on the calculated coating forming conditions. 10. A phosphor forming step of forming a black matrix on a back surface of a panel glass constituting a display device using a shadow mask and applying a phosphor of three colors to form a phosphor; A coating forming step of coating a display surface, which is a surface of the panel glass, on which the phosphor is formed in the phosphor forming step, with a low reflection film using a coating forming apparatus; The low-reflection film portion formed on the display surface is irradiated with illumination light having a wavelength having a desired spectral characteristic within the wavelength range of visible light, and is obtained from a defective portion generated on the low-reflection film. The reflected light is received by the photoelectric conversion means and converted into an image signal so that the reflected light can be discriminated from the reflected light from the normal low-reflection film portion, and is generated on the low-reflection film based on the converted image signal. A defect inspection step of inspecting the defect and determining whether or not the coated low reflection film is defective based on the inspected information on the defect on the low reflection film; Removing the low-reflection film from the display surface when it is determined to be defective, and recoating and correcting the low-reflection film on the display surface using a coating forming apparatus. Device manufacturing method. 11. A phosphor forming step of forming a black matrix on a back surface of a panel glass constituting a display device using a shadow mask, and applying a phosphor of three colors to form a phosphor; A coating forming step of coating the display surface, which is the surface of the panel glass on which the phosphor has been formed in the phosphor forming step, with a low reflection film using a coating forming apparatus under predetermined coating forming conditions; The low reflection film portion formed on the display surface of the display device by the coating forming step is irradiated with illumination light having a wavelength having a desired spectral characteristic, and reflected light obtained from a defect portion generated on the low reflection film is irradiated. The light is received by the photoelectric conversion means and converted into an image signal so that it can be distinguished from the light reflected from the normal low reflection film portion, and the feature amount of the defect is calculated from the converted image signal. A defect inspection step of inspecting a defect generated on the low-reflection film based on the calculated feature amount; and calculating a coating forming condition based on information on the defect on the low-reflection film inspected by the defect inspection step. And
Controlling the predetermined coating forming conditions in the coating forming step based on the calculated coating forming conditions. 12. A phosphor forming step of forming a black matrix on a back surface of a panel glass constituting a display device by using a shadow mask and applying a phosphor of three colors to form a phosphor; A coating forming step of coating a display surface, which is a surface of the panel glass, on which the phosphor is formed in the phosphor forming step, with a low reflection film using a coating forming apparatus; Irradiation light of a wavelength having desired spectral characteristics is applied to the low reflection film portion formed on the display surface of the display surface, and reflected light obtained from a defect portion generated on the low reflection film is returned to a normal low reflection film portion. The light is received by the photoelectric conversion means and converted into an image signal so that it can be distinguished from the reflected light from the image signal. The feature amount of the defect is calculated from the converted image signal, and based on the calculated feature amount. A defect inspection step of determining whether the formed low-reflection film is defective, and, when the low-reflection film is determined to be defective by the defect inspection step, removing the low-reflection film from the display surface and displaying the defect. A coating correction step of recoating and correcting the low reflection film on the surface using a coating forming apparatus. 13. A low reflection film portion formed on a display surface of a display device is irradiated with illumination light having a wavelength having a desired spectral characteristic, and reflected light obtained from a defective portion generated on the low reflection film. The light is received by the photoelectric conversion means and converted into an image signal so that it can be distinguished from the reflected light from the normal low-reflection film part, and a defect generated on the low-reflection film is inspected based on the converted image signal. A method for inspecting a display surface of a display device for defects. 14. A low reflection film portion formed on a display surface of a display device is irradiated with illumination light having a wavelength having a desired spectral characteristic, and reflected light obtained from a defect portion generated on the low reflection film. Is received by the photoelectric conversion means and converted into an image signal so that it can be discriminated from the reflected light from the normal low-reflection film portion, and the feature amount of the defect is calculated from the converted image signal, and the calculated feature amount is calculated. A defect inspection method for a display surface of a display device, wherein a defect generated on a low reflection film is inspected based on the method.